JPH07253208A - Harmful gas absorbing and removing device - Google Patents

Harmful gas absorbing and removing device

Info

Publication number
JPH07253208A
JPH07253208A JP6047296A JP4729694A JPH07253208A JP H07253208 A JPH07253208 A JP H07253208A JP 6047296 A JP6047296 A JP 6047296A JP 4729694 A JP4729694 A JP 4729694A JP H07253208 A JPH07253208 A JP H07253208A
Authority
JP
Japan
Prior art keywords
harmful gas
slaked lime
exhaust gas
combustion furnace
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6047296A
Other languages
Japanese (ja)
Inventor
Kazuteru Shinohara
一照 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MARUKOSHI ENG KK
Original Assignee
MARUKOSHI ENG KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MARUKOSHI ENG KK filed Critical MARUKOSHI ENG KK
Priority to JP6047296A priority Critical patent/JPH07253208A/en
Publication of JPH07253208A publication Critical patent/JPH07253208A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a harmful gas absorbing and removing device, provided with a simple structure suitable for a small-size incinerator and the like especially and capable of absorbing and removing harmful gas in exhaust gas surely without generating any secondary public pollution. CONSTITUTION:A reaction chamber 12, receiving granular slaked lime S under a condition capable of being contacted with high-temperature exhaust gas discharged out of a combustion furnace, is provided in a main body 10 connected to the exhaust part of the combustion furnace.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、燃焼炉、とくに焼却
炉からの排気中に含まれる有害ガスを吸収し、除去する
装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for absorbing and removing harmful gas contained in exhaust gas from a combustion furnace, particularly an incinerator.

【0002】[0002]

【従来の技術】焼却炉等の燃焼炉から排出される排気中
には、HCl等の塩素化合物、HF等のふっ素化合物、あ
るいはSO2 、SO3 等のイオウ酸化物などの有害ガス
が含まれるため、これら有害ガスの除去が必要とされ
る。従来、燃焼炉の排気中から上記各有害ガスを除去す
る装置としては、消石灰を利用したものが一般的であ
る。すなわち各有害ガスは、消石灰の主成分であるCa
(OH)2 と、それぞれ下記反応式に示す反応をし、そ
れによって無害化されるとともに、排気中から除去され
る。
2. Description of the Related Art Exhaust gas discharged from combustion furnaces such as incinerators contains chlorine compounds such as HCl, fluorine compounds such as HF, and harmful gases such as sulfur oxides such as SO 2 and SO 3. Therefore, it is necessary to remove these harmful gases. Conventionally, as a device for removing each of the harmful gases from the exhaust gas of the combustion furnace, a device using slaked lime is generally used. That is, each harmful gas is Ca, which is the main component of slaked lime.
Each of them reacts with (OH) 2 as shown in the following reaction formula to be rendered harmless and removed from the exhaust gas.

【0003】2HCl+Ca(OH)2 →CaCl2 +2H2 O 2HF+Ca(OH)2 →CaF2 +2H2 O SO2 +Ca(OH)2 →CaSO3 +H2 O SO3 +Ca(OH)2 →CaSO4 +H2 O 上記反応を利用した装置には、消石灰を水に溶かした水
溶液を、排気と接触させつつ反応させる湿式のものと、
消石灰の微粉末を排気ダクト内に吹き込んで混合しなが
ら反応させる乾式のものとがある。
2HCl + Ca (OH) 2 → CaCl 2 + 2H 2 O 2HF + Ca (OH) 2 → CaF 2 + 2H 2 O SO 2 + Ca (OH) 2 → CaSO 3 + H 2 O SO 3 + Ca (OH) 2 → CaSO 4 + H 2 O In the apparatus utilizing the above reaction, a wet type in which an aqueous solution in which slaked lime is dissolved in water is reacted while contacting with exhaust gas,
There is a dry type in which fine powder of slaked lime is blown into the exhaust duct to react while being mixed.

【0004】[0004]

【発明が解決しようとする課題】ところが、前者の湿式
の装置の場合、反応生成物を含む大量の汚泥が発生する
上、余剰水を放流する必要がある。このため、水質汚染
等の二次公害を防ぐには、有害ガス除去のための装置よ
り大掛かりな、汚泥および汚水処理のための設備が必要
となるという問題がある。
However, in the case of the former wet type apparatus, a large amount of sludge containing reaction products is generated, and it is necessary to discharge excess water. Therefore, in order to prevent secondary pollution such as water pollution, there is a problem that equipment for sludge and sewage treatment, which is larger than a device for removing harmful gas, is required.

【0005】また乾式の場合は、有害ガスと反応した消
石灰の微粉末自体が、二次公害のもとになる粉塵である
ため、大気汚染等の二次公害を防ぐには、やはり、有害
ガス除去のための装置より大掛かりな、電気集塵機やバ
グフィルター等が必要となる。しかも、上記電気集塵機
やバグフィルターは、300℃以上の高温には耐えられ
ないので、燃焼炉からの高温の排気(700〜900℃
程度)を、300℃以下に冷却する冷却機器が必要とな
り、さらに設備が大掛かりになるという問題もある。
In the case of the dry method, since the fine powder of slaked lime itself which has reacted with harmful gas is dust which causes secondary pollution, in order to prevent secondary pollution such as air pollution, the harmful gas is also required. An electrostatic precipitator, bag filter, etc., which are larger than the removal device, are required. Moreover, since the above electrostatic precipitators and bag filters cannot withstand high temperatures of 300 ° C or higher, high temperature exhaust gas from the combustion furnace (700 to 900 ° C) is used.
There is also a problem in that a cooling device for cooling the temperature to 300 ° C. or less is required, and the equipment becomes large-scale.

【0006】このため従来の装置は、燃焼炉の中でも比
較的小型のものが多い焼却炉には適しておらず、とくに
小型の焼却炉の排気は、有害ガスを含んだままで大気中
に放出されているのが現状である。この発明の目的は、
とくに小型の焼却炉等にも適した簡単な構造を有し、し
かも排気中の有害ガスを、二次公害をおこすことなく確
実に吸収除去できる有害ガス吸収除去装置を提供するこ
とにある。
For this reason, the conventional apparatus is not suitable for an incinerator, which is often a relatively small one among combustion furnaces, and the exhaust gas of a small incinerator is discharged into the atmosphere while containing harmful gas. Is the current situation. The purpose of this invention is
An object of the present invention is to provide a harmful gas absorption / removal device which has a simple structure particularly suitable for a small incinerator and the like, and which can surely absorb and remove the harmful gas in the exhaust gas without causing secondary pollution.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
の、この発明の有害ガス吸収除去装置は、燃焼炉の排気
部に接続される本体内に、燃焼炉から排出される高温の
排気と接触可能な状態で、粒状の消石灰を収容する反応
室が設けられていることを特徴とする。
In order to solve the above-mentioned problems, a harmful gas absorption / removal device of the present invention is provided with a high temperature exhaust gas discharged from a combustion furnace in a main body connected to an exhaust part of the combustion furnace. It is characterized in that a reaction chamber for accommodating granular slaked lime is provided in a contactable state.

【0008】[0008]

【作用】上記構成からなる、この発明の有害ガス吸収除
去装置によれば、燃焼炉から排出される高温の排気を直
接に、反応室内に収容される消石灰と接触させるので、
粒状で比表面積の小さい粒状の消石灰を使用しているに
も拘らず、微粉末状のものと同程度、あるいはそれ以上
の反応速度で、排気中の有害ガスを効率よくかつ確実に
吸収、除去できる。
According to the harmful gas absorption / removal device of the present invention having the above-mentioned structure, the high-temperature exhaust gas discharged from the combustion furnace is brought into direct contact with the slaked lime contained in the reaction chamber.
Despite the use of granular slaked lime with a small specific surface area, it efficiently and reliably absorbs and removes harmful gases in the exhaust gas at a reaction rate comparable to or higher than that of fine powder. it can.

【0009】また、上記のように消石灰は粒状であり、
それが反応室内に収容されているため、消石灰の水溶液
や微粉末のように、二次公害のもとになる汚泥や粉塵を
発生しない。したがって、それらの処理装置が不要であ
るとともに、冷却機器も不要であり、装置を簡略化でき
る。また消石灰の水溶液や微粉末は、1回の処理で多量
に消費されるのに対し、粒状の消石灰は、比較的長期間
に亘って繰り返し使用できるので、微粉末等の特殊な形
態のものより安価であることや、あるいは前記のように
汚泥、粉塵の処理装置、冷却機器等が不要であることと
相まって、装置のランニングコストが少なくてすむとい
う利点もある。
As mentioned above, slaked lime is granular,
Since it is stored in the reaction chamber, it does not generate sludge or dust that causes secondary pollution, unlike the aqueous solution of slaked lime or fine powder. Therefore, these processing devices are unnecessary, and cooling equipment is also unnecessary, and the device can be simplified. In addition, a large amount of slaked lime aqueous solution and fine powder is consumed in one treatment, whereas granular slaked lime can be repeatedly used over a relatively long period of time, so it is better than a special form such as fine powder. In addition to being inexpensive and not requiring a sludge and dust treatment device, a cooling device, etc. as described above, there is also an advantage that the running cost of the device can be reduced.

【0010】[0010]

【実施例】以下にこの発明の有害ガス吸収除去装置を、
その一実施例を示す図面を参照しつつ説明する。図1
(a)(b)および図2に示すように、この実施例の有害ガス
吸収除去装置1は、焼却炉Fの上面の排気口F1に直結
された下本体10と、この下本体10の上に接続された
上本体11とを備えている。また、上本体11の上には
煙突Cが接続されている。
EXAMPLE A harmful gas absorption / removal apparatus of the present invention will be described below.
An embodiment will be described with reference to the drawings. Figure 1
As shown in (a) and (b) and FIG. 2, the harmful gas absorption / removal device 1 of this embodiment includes a lower body 10 directly connected to an exhaust port F1 on the upper surface of an incinerator F, and an upper portion of the lower body 10. And an upper body 11 connected to. Further, a chimney C is connected to the upper body 11.

【0011】下本体10は、途中に大径部10aを備え
た略筒状に形成されており、この大径部10aの側面に
形成した開口10bから、粒状の消石灰Sを収容した反
応室12が、大径部10a内に挿入、配置されている。
反応室12は、その底板12aが、焼却炉Fからの排気
は通過させるが、粒状の消石灰Sは通過させない網状に
なっているとともに、天板のない浅い箱状に形成されて
おり、その箱の側面の1つが、上記開口10bを閉じる
蓋体12bになっている。
The lower main body 10 is formed in a substantially cylindrical shape having a large diameter portion 10a in the middle thereof, and a reaction chamber 12 containing granular slaked lime S is opened from an opening 10b formed on the side surface of the large diameter portion 10a. Is inserted and arranged in the large diameter portion 10a.
The reaction chamber 12 has a bottom plate 12a formed into a net-like shape which allows exhaust gas from the incinerator F to pass through but does not allow granular slaked lime S to pass through, and is formed in a shallow box shape without a top plate. One of the side surfaces is a lid 12b that closes the opening 10b.

【0012】そして上記蓋体12bと、開口10bの縁
10cとをボルトbで固定することで、開口10bが閉
じられるとともに、反応室12が、下本体10の大径部
10a内に固定されている。上記反応室12は、ボルト
bを外すだけで、下本体10の大径部10aから引き出
すことができるので、消石灰Sを簡単に交換できるとい
う利点がある。
By fixing the lid 12b and the edge 10c of the opening 10b with the bolt b, the opening 10b is closed and the reaction chamber 12 is fixed in the large diameter portion 10a of the lower body 10. There is. Since the reaction chamber 12 can be pulled out from the large-diameter portion 10a of the lower body 10 simply by removing the bolt b, there is an advantage that the slaked lime S can be easily replaced.

【0013】なお図中符号12cは、反応室12を下本
体10の大径部10aから引き出す際、あるいは挿入す
る際の把手である。反応室12に収容する粒状の消石灰
Sのサイズはとくに限定されないが、10〜30mm程度
であるのが好ましい。粒状の消石灰Sのサイズが10mm
未満では、反応室12に収容した際に、各消石灰粒子間
の隙間が小さくなりすぎて、排気の通過を妨げるおそれ
がある。逆に、粒状の消石灰Sのサイズが30mmを超え
た場合には、比表面積が小さくなりすぎて、排気中の有
害ガスを十分に除去できなくなるおそれがある。
Reference numeral 12c in the drawing is a handle for pulling out or inserting the reaction chamber 12 from the large diameter portion 10a of the lower body 10. The size of the granular slaked lime S contained in the reaction chamber 12 is not particularly limited, but is preferably about 10 to 30 mm. The size of granular slaked lime S is 10 mm
When the amount is less than the above, the space between the respective slaked lime particles becomes too small when housed in the reaction chamber 12, and there is a possibility that the passage of exhaust gas may be hindered. On the contrary, when the size of the granular slaked lime S exceeds 30 mm, the specific surface area becomes too small, and the harmful gas in the exhaust may not be sufficiently removed.

【0014】上本体11は、途中に径の小さいオリフィ
ス部11aを備えた筒状に形成されているとともに、そ
の下方に、略L字状のエアノズル13を、その先端が上
方、すなわちオリフィス部11aの方に向くように配置
したもので、図2に示すように、エアノズル13には送
風機Bが接続されている。上記上本体11は、送風機B
を運転して、エアノズル13の先端から、図1(a) 中に
一点鎖線の矢印で示すように、空気をオリフィス部11
aの方向に噴射し、それによって上下両本体10,11
内に上昇気流を発生させて、同図中に黒矢印で示すよう
に、焼却炉Fから、有害ガスを含んだ高温の排気を排出
させるためのものである。
The upper main body 11 is formed in a tubular shape with an orifice portion 11a having a small diameter in the middle thereof, and a substantially L-shaped air nozzle 13 is provided below the upper main body 11, and the tip thereof is upward, that is, the orifice portion 11a. The air blower B is connected to the air nozzle 13 as shown in FIG. The upper body 11 is a blower B
1 to drive air from the tip of the air nozzle 13 into the orifice portion 11 as shown by the dashed line arrow in FIG.
It is jetted in the direction of a, whereby the upper and lower bodies 10, 11
This is for generating an ascending airflow inside and discharging high temperature exhaust gas containing harmful gas from the incinerator F as shown by a black arrow in the figure.

【0015】この上本体11においては、送風機Bから
の送風量を調整することで、焼却炉Fからの排気の排気
量、すなわち後述する、消石灰Sを通過する排気の質量
速度を制御することができる。上記各部からなる、この
実施例の有害ガス吸収除去装置1を用いて、焼却炉Fか
らの排気を処理するには、まず、送風機Bを運転すると
ともに、焼却炉Fに点火する。
In the upper body 11, by adjusting the amount of air blown from the blower B, the amount of exhaust gas from the incinerator F, that is, the mass velocity of exhaust gas passing through the slaked lime S, which will be described later, can be controlled. it can. In order to process the exhaust gas from the incinerator F using the harmful gas absorption / removal device 1 of this embodiment, which is made up of the above-mentioned components, first, the blower B is operated and the incinerator F is ignited.

【0016】そうすると、上下両本体10,11内に上
昇気流が生じて、図1(a) 中に黒矢印で示すように、焼
却炉Fから、有害ガスを含んだ高温の排気(700〜9
00℃程度)が排出される。そして、排出された高温の
排気は、反応室12において、粒状の消石灰Sと接触
し、前記反応式にしたがって各種有害ガスが吸収、除去
された後、同図中に白矢印で示すように、上本体11お
よび煙突Cを通って大気中に放散される。
Then, an ascending air current is generated in the upper and lower main bodies 10 and 11, and as shown by a black arrow in FIG. 1 (a), a high temperature exhaust gas (700 to 9) containing harmful gas is emitted from the incinerator F.
(About 00 ° C) is discharged. Then, the discharged high-temperature exhaust gas comes into contact with the granular slaked lime S in the reaction chamber 12, and after various harmful gases are absorbed and removed according to the reaction formula, as shown by the white arrow in the figure, It is diffused into the atmosphere through the upper body 11 and the chimney C.

【0017】この際、排気の温度(℃)、消石灰Sを通
過する排気の質量速度(kg/m2 H)、および有害ガス
の吸収率(%)は、たとえば図3に実線の曲線で示す関
係にある。つまり反応速度は、温度の上昇とともに指数
関数的に上昇するため、質量速度が同じ場合には、排気
の温度が高いほど、有害ガスの吸収率が高くなり、ま
た、反応速度は化学反応速度と物理的な拡散速度の調和
平均に支配されるため、排気の温度が同じ場合には、質
量速度が低いほど、有害ガスの吸収率が高くなるのであ
る。
At this time, the temperature (° C.) of the exhaust gas, the mass velocity (kg / m 2 H) of the exhaust gas passing through the slaked lime S, and the absorption rate (%) of the harmful gas are shown by a solid curve in FIG. 3, for example. Have a relationship. In other words, the reaction rate increases exponentially with increasing temperature, so if the mass velocity is the same, the higher the temperature of the exhaust gas, the higher the absorption rate of harmful gas. Since the physical average is controlled by the harmonic average of the diffusion rate, the lower the mass velocity, the higher the absorption rate of harmful gas when the temperature of the exhaust gas is the same.

【0018】図3の場合の具体的な数値をあげると、上
下両本体10,11の内径が300mm、下本体10の大
径部10aの内径が700mm、下本体10の高さが85
0mm、消石灰Sのサイズが10〜30mm、反応室12内
の消石灰Sの量が70g、反応室12内の消石灰Sの層
厚みが150mmであり、この場合、排気の温度を800
℃に設定し、かつ消石灰Sを通過する排気の質量速度を
1000kg/m2 Hに設定すると、有害ガスの吸収率は
54%となる。
To give specific values in the case of FIG. 3, the inner diameters of the upper and lower main bodies 10 and 11 are 300 mm, the inner diameter of the large diameter portion 10a of the lower main body 10 is 700 mm, and the height of the lower main body 10 is 85 mm.
0 mm, the size of slaked lime S is 10 to 30 mm, the amount of slaked lime S in the reaction chamber 12 is 70 g, and the layer thickness of slaked lime S in the reaction chamber 12 is 150 mm. In this case, the temperature of the exhaust gas is 800
When the temperature is set to ° C and the mass velocity of the exhaust gas passing through the slaked lime S is set to 1000 kg / m 2 H, the absorption rate of harmful gas is 54%.

【0019】なお、この発明の有害ガス吸収除去装置の
構成は、以上で説明した実施例には限定されない。たと
えばこの発明の有害ガス吸収除去装置は、燃焼炉の排気
部に接続されていればよく、上記排気部としては、燃焼
炉の排気口や、あるいは排気口に接続された排気の経路
等があげられる。つまりこの発明の有害ガス吸収除去装
置は、図の実施例のように、焼却炉F(燃焼炉)の排気
口F1に直結してもよいが、排気口に接続されたダクト
の途中に配置しても構わない。
The construction of the harmful gas absorption / removal device of the present invention is not limited to the above-described embodiment. For example, the harmful gas absorption / removal device of the present invention may be connected to the exhaust part of the combustion furnace, and the exhaust part may be the exhaust port of the combustion furnace or the exhaust path connected to the exhaust port. To be That is, the harmful gas absorption / removal device of the present invention may be directly connected to the exhaust port F1 of the incinerator F (combustion furnace) as in the embodiment shown in the figure, but it is arranged in the middle of the duct connected to the exhaust port. It doesn't matter.

【0020】また図の実施例の装置では、下本体10に
対して引き出し、挿入可能な箱状の反応室12内に消石
灰Sを収容していたが、消石灰Sの反応室12への収容
方法は、これには限定されない。さらに図の実施例の装
置は、上記反応室12を備えた下本体10と、排気のた
めの送風機Bが接続された上本体11とで構成されてい
たが、たとえば排気のシステムを備えた燃焼炉に、この
発明の装置を組み込む場合には、上記上本体11は省略
することができる。
In the apparatus of the illustrated embodiment, the slaked lime S is stored in the box-shaped reaction chamber 12 that can be pulled out from the lower body 10 and inserted. Is not limited to this. Further, the apparatus of the embodiment shown in the figure was composed of a lower main body 10 having the reaction chamber 12 and an upper main body 11 to which a blower B for exhaust was connected. When the apparatus of the present invention is incorporated in the furnace, the upper body 11 can be omitted.

【0021】またこの発明の装置は、焼却炉以外の燃焼
炉に接続することができる。その他、この発明の要旨を
変更しない範囲で、種々の設計変更を施すことができ
る。
The apparatus of the present invention can be connected to a combustion furnace other than the incinerator. In addition, various design changes can be made without changing the gist of the present invention.

【0022】[0022]

【発明の効果】以上、詳述したようにこの発明の有害ガ
ス吸収除去装置は、従来のものよりも簡単な構造を有
し、しかも排気中の有害ガスを、二次公害をおこすこと
なく確実に吸収除去できる。したがってこの発明の有害
ガス吸収除去装置は、とくに小型の焼却炉等、種々の燃
焼炉に適しており、これら燃焼炉の排気から有害ガスを
除去して、大気汚染を防止するためにきわめて有用であ
る。
As has been described in detail above, the harmful gas absorption / removal device of the present invention has a simpler structure than the conventional ones, and moreover, can secure harmful gas in exhaust gas without causing secondary pollution. Can be absorbed and removed. Therefore, the harmful gas absorption and removal device of the present invention is suitable for various combustion furnaces such as small incinerators, and is extremely useful for removing harmful gas from the exhaust gas of these combustion furnaces to prevent air pollution. is there.

【図面の簡単な説明】[Brief description of drawings]

【図1】同図(a) はこの発明の有害ガス吸収除去装置の
一実施例の内部構造を示す断面図、同図(b) は上記実施
例の装置の外観を示す正面図である。
FIG. 1 (a) is a sectional view showing the internal structure of an embodiment of the harmful gas absorption / removal apparatus of the present invention, and FIG. 1 (b) is a front view showing the external appearance of the apparatus of the above embodiment.

【図2】上記実施例の装置を、燃焼炉としての焼却炉に
取付けた状態を示す概略図である。
FIG. 2 is a schematic view showing a state in which the apparatus of the above-mentioned embodiment is attached to an incinerator as a combustion furnace.

【図3】実施例の装置における、排気の温度と、消石灰
を通過する排気の質量速度と、有害ガスの吸収率との関
係を示すグラフである。
FIG. 3 is a graph showing the relationship between the temperature of exhaust gas, the mass velocity of exhaust gas that passes through slaked lime, and the absorption rate of harmful gas in the apparatus of the example.

【符号の説明】[Explanation of symbols]

1 有害ガス吸収除去装置 10 下本体 11 上本体 12 反応室 S 消石灰 1 Toxic gas absorption and removal device 10 Lower body 11 Upper body 12 Reaction chamber S Slaked lime

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 B01D 53/34 134 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI technical display location B01D 53/34 134

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】燃焼炉の排気中に含まれる有害ガスを、消
石灰と反応させて吸収、除去するための装置であって、
燃焼炉の排気部に接続される本体内に、燃焼炉から排出
される高温の排気と接触可能な状態で、粒状の消石灰を
収容する反応室が設けられていることを特徴とする有害
ガス吸収除去装置。
1. A device for absorbing and removing harmful gas contained in exhaust gas of a combustion furnace by reacting with slaked lime,
Absorption of harmful gas, characterized in that a reaction chamber for accommodating granular slaked lime is provided in the body connected to the exhaust part of the combustion furnace in a state in which it can come into contact with high-temperature exhaust gas discharged from the combustion furnace. Removal device.
JP6047296A 1994-03-17 1994-03-17 Harmful gas absorbing and removing device Pending JPH07253208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6047296A JPH07253208A (en) 1994-03-17 1994-03-17 Harmful gas absorbing and removing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6047296A JPH07253208A (en) 1994-03-17 1994-03-17 Harmful gas absorbing and removing device

Publications (1)

Publication Number Publication Date
JPH07253208A true JPH07253208A (en) 1995-10-03

Family

ID=12771329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6047296A Pending JPH07253208A (en) 1994-03-17 1994-03-17 Harmful gas absorbing and removing device

Country Status (1)

Country Link
JP (1) JPH07253208A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009285656A (en) * 2009-09-01 2009-12-10 Hitachi Ltd Apparatus and method for dry treatment of hf-containing gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009285656A (en) * 2009-09-01 2009-12-10 Hitachi Ltd Apparatus and method for dry treatment of hf-containing gas

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