JPH07251058A - Polygonal pressure-resistant container and its production - Google Patents

Abstract

PURPOSE:To provide a stable large-sized polygonal pressure-resistant container of high quality reduced in material cost, the number of working processes and the number of connection places, easy to produce, achieved in the reduction of cost, capable of reducing the probability of the generation of a leak to a large extent and reduced in problems such as the lowering of dimensional accuracy, the generation of strain caused by heat, the breakage of a bent part or the like. CONSTITUTION:A peripheral side panel 27 formed into a required polygonal shape as a whole by forming wide notch grooves 30a-30f to the outer surface of one thick- walled metal strip plate material at a plurality of places so as to leave an interval in the longitudinal direction of the strip plate material and bending the bottom thin- walled parts 31a-31f of the respective notch grooves into a circular arc shape is connected to one thick-walled metal bottom panel 25, and the connection part 32 of the polygonal peripheral side panel 27 and the bottom panel 25 and both end connection parts 33 of the peripheral side panel are airtightly soldered over the total length. Square rod-shaped metal reinforcing materials 35 are provided to the notch grooves 30b, 30c, 30e, 30f opened by the bending of the polygonal peripheral side panel 27 by soldering.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polygonal pressure resistant container mainly used in a vacuum chamber of a semiconductor manufacturing processing system and a manufacturing method thereof.

[0002]

2. Description of the Related Art In recent years, in semiconductor manufacturing processes such as semiconductor wafers and LCD substrates, a multi-chamber processing system called a cluster tool having a plurality of vacuum processing chambers has been developed.

A multi-chamber processing system of this type is
As shown in FIG. 4, a plurality of various vacuum processing chambers (process chambers) 1 corresponding to various semiconductor manufacturing processes are installed in a circumferential arrangement, and each vacuum processing chamber 1 is processed with semiconductor wafers, LCD substrates, or the like. As a transfer system for loading and unloading the body W, one or two loader chambers 2, and a polygonal transfer chamber (transfer chamber) that airtightly communicates with the respective vacuum processing chambers 1 and loader chambers 2 via gate valves 3. Four
A transfer arm (transfer robot) 5 that can be swung and expanded and contracted in the transfer chamber 4, an alignment mechanism 6 for alignment, and the like are provided.

In such a multi-chamber processing system, an object to be processed W such as a semiconductor wafer is carried into the loader chamber 2 in cassette K units by an external transfer device, for example, a handling arm 7, and the loader chamber 2 is evacuated there. Alternatively, after being separated from the outside by replacement with an inert gas, the objects W to be processed in the cassette K of the loader chamber 2 are taken into the transfer chamber 4 one by one by the transfer arm 5 and the alignment mechanism 6 is used. Align and align it with vacuum processing chamber 1
The wafers are sequentially carried in, where predetermined processing such as film formation and etching is performed, and the processed body is taken out into the transfer chamber 4 by the transfer arm 5 and returned to the cassette K in the loader chamber 2.

The transfer chamber 4 of such a multi-chamber processing system maintains a vacuum inside and is connected to a plurality of circumferentially arranged vacuum processing chambers 1 and load chambers 2 through gate valves, respectively. In addition, a polygonal pressure resistant container (vacuum container) 10 is used.

That is, this polygonal pressure-resistant container 10 is shown in FIG.
As shown in (a) and (b), the transfer arms 5, the alignment mechanism 6, and the mounting ports 12 and 1 for the vacuum exhaust valve, etc.
A bottom plate 15 on which 3, 14 are formed, and a peripheral side plate 17 which is provided upright on the periphery of the bottom plate 15 and is provided with a connection port 16 that is airtightly connected to each of the vacuum processing chamber 1 and the loader chamber 2 through the gate valve 3 respectively. It has a polygonal shape. The bottom plate 15 and the peripheral side plate 17 are formed of a metallic plate material such as an aluminum alloy. As shown in FIG. 5B, a ceiling plate (opening / closing lid) 18 is fastened to the upper surface of such a polygonal pressure-resistant container 10 with a fastener via an O-ring to form the transfer chamber 4 in a hermetically sealed state. .

In recent years, the transfer chamber 4 in this type of multi-chamber processing system has a large diameter semiconductor wafer as an object to be processed W, a large LCD substrate, and various vacuum processing chambers 1 and loader chambers 2. From the increase in the number of
Large-sized ones having a side length of 1 m or more have been demanded. Along with this increase in size, it has become necessary to use a metal plate material, for example, an aluminum plate having a thickness of about 20 to 30 mm, for the bottom plate 15 and the peripheral side plate 17 in order to prevent reduction in vacuum withstand strength. .

[0008]

By the way, the manufacturing of the polygonal pressure-resistant container 10 described above is carried out by a method of cutting (cutting) a metal thick plate such as a very thick stripped aluminum alloy to cut out the container. As shown in FIG. 6, a metal plate material such as an aluminum alloy having an appropriate thickness is cut to form side plates 17a, 17b, 17c, 1 corresponding to the bottom plate 11 and the peripheral side plates.
7d, 17e, 17f and 17g are prepared and the parts of the bottom plate 11 and the side plates 17a to 17g are sequentially welded to each other to assemble the polygonal pressure vessel 10.

In the former manufacturing method by hollowing, however, a small container may be used, but as described above, in the case of a large container, the material cost is high and the cutting process is troublesome, and a large amount of material is wasted. There is a problem that becomes too high.

For this reason, the latter method of welding and assembling the parts shown in FIG. 6 which is usually relatively easy in terms of material costs and the like is adopted. Since many man-hours are required and the number of welded portions is large, there is a high probability that a leak will occur in the welded portion. Moreover, at the time of welding work, each part, that is, the bottom plate 11 and each side plate 17a to 1a.
7 g is heated to a high temperature by welding heat and causes distortion, which causes deterioration of dimensional accuracy. Furthermore, in order to form a good high vacuum state inside this type of container, the inner surface of each part is mirror-finished by polishing finish etc., but this finished surface is damaged by the welding heat, etc. There was a problem that it was difficult to obtain the desired quality.

For these reasons, recently, by bending one sheet of metal plate to form a plurality of surface portions of the container, the number of parts can be minimized, that is, the number of welding points can be reduced. Proposals for pressure-resistant containers have been made. However, in this case, if it is a small container, a thin metal plate material can be used, so bending is easy,
In the case of a large container, it is necessary to use a thick metal plate material due to the problem of vacuum pressure resistance strength as described above. It is very difficult to bend this thick metal plate material, and the bending position is accurately adjusted. However, it is difficult to obtain a large dimensional error, and when bending at a plurality of points, it is more difficult and the quality cannot be stabilized.

As a solution to this, there is a method of cutting a groove in a metallic plate material and bending it, but there is a problem that bending stress concentrates at the groove bottom portion, causing breakage and strength reduction. The present invention has been made in view of the above circumstances, and an object of the present invention is to reduce the material cost, the number of working steps, the production is easy and the cost can be reduced, and the number of joints can be reduced, and the probability of occurrence of leakage can be significantly reduced. To provide a large-sized polygonal pressure-resistant container excellent in pressure resistance, which is extremely stable and of high quality, with few problems such as a decrease in accuracy, distortion due to heat, breakage of a bent portion, and strength reduction, and a manufacturing method thereof. is there.

[0013]

According to another aspect of the present invention, there is provided a polygonal pressure-resistant container having a wide cutout groove formed at a plurality of positions on the outer surface of a single thick metal strip plate at intervals in the longitudinal direction. And the bottom side thin-walled portion of each notch groove is bent in an arc shape to form a polygonal shape as a whole and a thick metal bottom plate are joined together. The joining portion between the polygonal peripheral side plate and the bottom plate and the joint portions at both ends of the peripheral side plate are airtightly brazed over the entire length.

With a polygonal pressure-resistant container having such a structure,
Since the peripheral side plate bent in a polygonal shape and one bottom plate are joined to each other, the joint part between the polygonal peripheral side plate and the bottom plate and both end joint parts of the peripheral side plate are airtightly brazed over the entire length. The material cost is much lower than the conventional hollow manufacturing method, and it does not require troublesome cutting and machining. Also, since the number of parts is small, the number of man-hours such as assembly and joining work is small and manufacturing is easy and cost can be reduced. At the same time, the number of brazed joints is small, and the probability of leakage can be greatly reduced.

Further, since the parts are airtightly joined to each other by brazing which can be processed at a relatively low temperature, the conventional welding work is unnecessary and the distortion of each part due to heat is reduced. Moreover, in order to realize a large polygonal pressure-resistant container, one thick metal strip plate is bent to obtain a polygonal peripheral side plate. At that time, the outer surface of the thick metal strip plate material is obtained. A wide notch groove is formed at a plurality of locations spaced apart in the longitudinal direction of the, and the bottom thin-walled portions of each notch groove are each bent into an arc shape to form the required polygonal shape as a whole. It is possible to realize a large polygonal pressure vessel with excellent stability and high pressure resistance, because the dimensional accuracy is constant and the decrease in dimensional accuracy is small, and there is little breakage or strength reduction due to the concentration of bending stress at the bent portion. Become.

According to another aspect of the polygonal pressure-resistant container of the present invention, wide notch grooves are formed at a plurality of intervals on the outer surface of a single thick metal strip plate in the longitudinal direction, and each notch groove is formed. A peripheral side plate having a polygonal shape required by bending each of the bottom thin-walled parts into an arc shape and a thick metal bottom plate are joined to each other, and the polygonal peripheral side plate and the bottom plate are joined together. And the joints at both ends of the peripheral side plate are airtightly brazed over the entire length, and the metal reinforcing material is brazed to the notch groove expanded by bending the polygonal peripheral side plate. It is characterized by having done.

With a polygonal pressure-resistant container having such a structure,
In addition to the function of the invention of claim 1, a metal reinforcing material is placed in a notch groove expanded by the bending of a polygonal peripheral side plate formed by cutting a groove of a single thick metal strip material and bending it. Since it is attached, it is possible to surely reinforce the groove cut and bent portion, and it is possible to realize a more stable and high-quality large-sized polygonal pressure-resistant container excellent in pressure resistance.

In the method for manufacturing a polygonal pressure-resistant container according to the third aspect of the present invention, a wide notch groove is formed at a plurality of positions spaced apart in the longitudinal direction on the outer surface of a single thick metal strip material, Bending the thin-walled bottom part of each notch into an arc shape to create a polygonal peripheral side plate as a whole, and joining this polygonal peripheral side plate and one thick metal bottom plate to each other Then, by heating in a vacuum chamber, the joint between the polygonal peripheral side plate and the bottom plate and both end joints of the peripheral side plate are airtightly brazed over the entire length. Such a method is the most suitable as a method for obtaining the polygonal pressure-resistant container of the invention of claim 1 as described above.

In the method for manufacturing a polygonal pressure-resistant container according to a fourth aspect of the present invention, a wide notch groove is formed at a plurality of locations spaced apart in the longitudinal direction on the outer surface of a single thick metal strip plate material. Bending the thin-walled bottom part of each notch into an arc shape to create a polygonal peripheral side plate as a whole, and joining this polygonal peripheral side plate and one thick metal bottom plate to each other At the same time, a metallic reinforcing material is placed in the notch groove expanded by bending the polygonal peripheral side plate, and by heating in this state in the vacuum chamber, the joint between the polygonal peripheral side plate and the bottom plate and the It is characterized in that both ends of the peripheral side plate are airtightly brazed over the entire length, and at the same time, the metallic reinforcing material is brazed in the notch groove. Such a method is optimal as a method for obtaining the polygonal pressure-resistant container of the invention of claim 2 as described above.

In the peripheral side plate for a polygonal pressure-resistant container according to a fifth aspect of the present invention, a wide notch groove is formed at a plurality of positions on the outer surface of a single thick metal strip plate material at intervals in the longitudinal direction. It is characterized in that the thin-walled bottom portion of each cutout groove is bent in an arc shape to have a desired polygonal shape as a whole. If the peripheral side plate for a polygonal pressure-resistant container having such a configuration is used, the above-mentioned claim 1 is adopted.
It is most suitable as the peripheral side plate used in the polygonal pressure-resistant container of the inventions 1 and 2.

According to a sixth aspect of the present invention, there is provided a method for bending a thick metal plate in which a notch groove is formed on one side of a thick metal plate, and the notch groove is bent through a thin bottom surface portion of the notch groove. In the bending method, the notch groove is formed wide so that the dimensional ratio of the thickness and width of the bottom thin part of the notch is in the range of 1: 5 to 2:15, and the width of the bottom thin part It is characterized by being bent in an arc shape inside. Such a method is optimal as a method for obtaining the peripheral side plate for a polygonal pressure-resistant container according to the fifth aspect of the invention.

According to the reinforcing structure of the thick metal bent plate of the invention of claim 7, a wide notch groove is formed on one surface of the thick metal plate,
The bottom thin portion of the cutout groove is bent, and a metallic reinforcing material is put into the cutout groove expanded by the bending and brazed to reinforce the cutout groove. With such a structure, the grooved bent portion of the thick metal bent plate can be surely reinforced, which is optimal for obtaining the polygonal pressure-resistant container according to the second aspect of the invention.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. The polygonal pressure-resistant container 20 illustrated here is used.
Is used to configure a large polygonal transfer chamber (transfer chamber) 4 of a multi-chamber processing system in a semiconductor manufacturing process such as a semiconductor wafer or LCD substrate, as shown in FIG. It is a thing.

That is, this polygonal pressure-resistant container 20 has a bottom plate 25 having mounting ports 22, 23, 24 for the transfer arm 5, alignment mechanism 6 and vacuum exhaust valve shown in FIG.
A peripheral side plate 27 having a connection port 26 which is provided upright on the periphery and which is airtightly connected to each of the vacuum processing chamber 1 and the loader chamber 2 through the gate valve 3 is formed into a polygonal shape. As shown in FIG. 1B, a ceiling plate (opening / closing lid) 28 is fastened to the upper surface of the polygonal pressure-resistant container 20 with a fastener via an O-ring (not shown), so that the transfer chamber 4 in a hermetically sealed state can be obtained.
Can be configured.

This polygonal pressure-resistant container 20 has a side length of 1 m.
With the above-mentioned large size, the bottom plate 25 and the peripheral side plate 27 have a thickness T in the case of a thick metal plate material, for example, an aluminum alloy plate material, in order to prevent a decrease in vacuum withstand strength due to the increase in size. A thick wall of about 20 to 65 mm is used. A stainless steel plate material having a thickness of about 10 mm may be used.

As shown in FIG. 3, the bottom plate 25 is formed by cutting a single metal flat plate made of a thick aluminum alloy or the like into a required polygonal shape, and at the same time, the mounting port 22,
23 and 24 are formed. On the other hand, as the peripheral side plate 27, as shown in FIG. 2, a single metal long strip material such as a thick aluminum alloy is prepared, and a plurality of this is bent a plurality of times to make a series of series shown in FIG. Required side plate portions 27a, 27
b, 27c, 27d, 27e, 27f, 27g are formed in an annular polygonal shape.

At this time, when the metal long strip plate material used for the peripheral side plate 27 is made of an aluminum alloy as described above and the thickness T is about 20 to 65 mm, the bending is very difficult. Therefore, the required side plate portion 2 is provided in the longitudinal direction of the outer surface thereof.
Notch grooves 30a, 30b, 30c, 30d, 30e, at a plurality of locations spaced apart to secure 7a to 27g.
30f is formed, and the bottom thin-walled portions 31a, 31b, 31c, 31d, 31e, 3 of the respective cutout grooves 30a to 30f are formed.
Each 1f is bent to have a required annular polygonal shape as a whole.

The cutout grooves 30a to 30f are shown in FIG.
As shown in (c) and (d), the groove width H is wide, and a substantially U-shaped groove in which a suitable R is formed on both sides of the inner bottom portion of the groove, although it slightly varies depending on the size of the bending angle θ of the bent portion. It is said that. With this, the bottom thin portion 31 of each notch groove 30a to 30f is formed.
Each of a to 31f is bent in an arc shape so as to minimize breakage and strength reduction due to concentration of bending stress in the bent portion.

If the groove width H is too wide, the bending position will not be constant at the time of bending, and the dimensional accuracy of the polygon will be deteriorated. Therefore, the thickness t (groove depth) of the bottom thin portions 31a to 31f is reduced. It is set appropriately in relation to For example, when the thickness T of the long strip plate material made of aluminum alloy is about 20 to 65 mm and the bending angle θ is 90 degrees, the bottom face thin portions 31a to 3a-3
The thickness t of 1f is about 1 to 5 mm, and the groove width H is about 5 to 15 mm. That is, it is preferable to set the dimensional ratio of the thickness t of the bottom thin portion of the notch groove to the groove width H within the range of 1: 5 to 1: 3. The radius R of each of the notch grooves 30a to 30f on both sides of the inner bottom of the groove is about 0.5 to 5 mm, and the bottom thin portion 31
a to 31f has a linear portion (equal thin portion) h of at least about 1 to 10 mm, and by bending this portion in an arc shape, the bottom thin portions 31a to 31f are bent to both end portions. It prevents breakage and strength deterioration due to stress concentration.

When the notch grooves 30a to 30f are formed in the long aluminum strip plate material, necessary side plate portions 27b, 27c, 27d, 27f and 27g are formed between them.
In addition, the above-mentioned vacuum processing chamber 1 and loader chamber 2 are also provided with connection ports 26 that are hermetically connected to each other through the gate valve 3, and the entire inner surface is made into a mirror surface by polishing or the like. Peripheral side plate 2 for polygonal pressure-resistant container having an annular polygonal shape as a whole, which is bent at bottom thin portions 31a to 31f of 30a to 30f.
7

The polygonal peripheral side plate 27 is joined onto the one thick metal bottom plate 25, and the peripheral side plate 27 is joined.
As shown in FIG. 1, a brazing material 34 such as an alloy made of aluminum, magnesium, or silicon is inserted into the joint 32 between the bottom plate 25 and the bottom plate 25 and the joints 33 at both ends of the peripheral side plate 27 to hermetically seal the joint. By attaching the polygonal pressure resistant container 20, the polygonal pressure resistant container 20 is manufactured.

Further, in order to reinforce the polygonal peripheral side plate 27, for example, the peripheral side plate is provided in the notch grooves 30b, 30c, 30e, 30f which are expanded by the bending as described above as shown in FIGS. A rectangular rod-shaped metallic reinforcing material 35 made of an aluminum alloy or the like having the same material as that of 27 is replaced with a brazing material 36 similar to the above.
It is fitted through and is brazed as it is.

The polygonal peripheral side plate 27 and the bottom plate 25 described above are used.
In the method of joining and brazing each other, the brazing material 34 is inserted into the joining portions 32 and 33 of each other, and the peripheral side plate 27 and the bottom plate 25 are held by appropriate fasteners (not shown). Relatively low temperature in the vacuum chamber (about 500-600 ℃)
Brazing by heating to. At the time of brazing work of this joint, the inside of the cutout grooves 30b, 30c, 30e,
It is convenient to fit a rectangular rod-shaped metallic reinforcing material 35 into the 30f via a brazing material 36 and hold it by a fastener (not shown), and brazing the reinforcing material 35 at the same time.

With the polygonal pressure-resistant container 20 and the method of manufacturing the same having such a configuration, the peripheral side plate 27 bent in a polygonal shape is provided.
And one bottom plate 25 are joined to each other to form a joint 32 between the polygonal peripheral side plate 27 and the bottom plate 25, and the peripheral side plate 27.
Since both ends of the joint 33 are airtightly brazed over the entire length, the material cost is significantly lower than the conventional hollowing manufacturing method, there is no need for troublesome cutting machining, and the number of parts is small, so the assembly and joining work is done. The number of man-hours and the like is small, the manufacturing is easy and the cost can be reduced, and the number of brazed joints is small, and the probability of occurrence of leakage can be significantly reduced.

Further, since the peripheral side plate 27 and the bottom plate 25 are airtightly joined to each other by brazing which can be processed at a relatively low temperature, the conventional welding work is unnecessary and the peripheral side plate 27 and the bottom plate 25 are distorted by heat. Less. Moreover, in order to realize the large-sized polygonal pressure-resistant container 20, one thick metal strip material is bent to obtain the polygonal peripheral side plate 27. At this time, the thick metal strip material is used. Wide notched grooves 30a to 30f are formed at a plurality of positions spaced apart in the longitudinal direction on the outer surface of the, and bottom thin-walled portions 31a to 31f of the respective notched grooves 30a to 30f are each bent in an arc shape to form an overall structure. Since it has the required polygonal shape, the bending position is constant and the decrease in dimensional accuracy is small, and there is little breakage or strength decrease due to the concentration of bending stress at the bending part, and it is extremely stable and excellent in high-quality pressure strength. A large polygonal pressure resistant container 20 can be realized.

Further, a rectangular rod-shaped metallic reinforcing material 35 is fitted through a brazing material 36 into the notch grooves 30b, 30c, 30e and 30f which are expanded by bending the polygonal peripheral side plate 27,
Since the brazing is carried out as it is, the grooved and bent portion of the peripheral side plate 27 can be surely reinforced, and it is possible to realize a more stable large-sized polygonal pressure-resistant container 20 excellent in pressure resistance.

The present invention is not limited to the above-mentioned embodiments, and for example, the polygonal pressure-resistant container 20 may have various polygonal shapes other than the illustrated shape, and other aspects do not depart from the gist of the present invention. Various changes may be made within the range.

[0038]

Since the polygonal pressure-resistant container and the method of manufacturing the same according to the present invention are configured as described above, the material cost and the number of working steps are small, the manufacturing is easy and the cost is reduced, and the number of joints is small and the leakage is prevented. The probability can be greatly reduced,
There are few problems such as a decrease in dimensional accuracy, distortion due to heat, breakage of a bent portion, and decrease in strength, and a very stable and large-sized product having excellent compressive strength can be obtained.

[Brief description of drawings]

FIG. 1A is a plan view showing an embodiment of a polygonal pressure-resistant container of the present invention, and FIG. 1B is a side view of the same.

FIG. 2 (a) is a side view of a metallic strip plate material for making a peripheral side plate used in the above-mentioned embodiment, and FIG. 2 (b) is a plan view of the same.
(C) is an enlarged view of part A of (a), and (d) is an enlarged view showing a bent state of part A.

FIG. 3 is a perspective view showing a disassembled state of each part before assembly in the above embodiment.

FIG. 4 is a partial cross-sectional plan view showing a state in which a conventional polygonal pressure-resistant container is used in a polygonal transfer chamber of a multi-chamber processing system in a semiconductor manufacturing process.

FIG. 5 is a plan view and a side view of a conventional polygonal pressure-resistant container.

FIG. 6 is an exploded perspective view of the conventional polygonal pressure-resistant container before assembly.

[Explanation of symbols]

20 ... Polygonal pressure resistant container, 25 ... Bottom plate, 27 ... Peripheral side plate, 3
0a-30 ... Notch groove, 31a-31f ... Bottom thin-walled portion,
32, 33 ... Joined portion, 34, 36 ... Brazing material, 35 ... Metal reinforcing material.

Claims (7)

[Claims] 1. A wide cutout groove is formed at a plurality of locations on the outer surface of a single thick metal strip plate at intervals in the longitudinal direction,
A peripheral side plate having a polygonal shape as a whole obtained by bending the thin-walled bottom portions of each of these notches into an arc shape and a thick metal bottom plate are joined together to form a polygonal shape. A polygonal pressure-resistant container, characterized in that a joint between the peripheral side plate and the bottom plate and both end joints of the peripheral side plate are airtightly brazed over the entire length. 2. A wide notch groove is formed at a plurality of locations on the outer surface of one thick metal strip material at intervals in the longitudinal direction,
A peripheral side plate having a polygonal shape as a whole obtained by bending the thin-walled bottom portions of each of these notches into an arc shape and a thick metal bottom plate are joined together to form a polygonal shape. The joint between the peripheral side plate and the bottom plate and the joints at both ends of the peripheral side plate are airtightly brazed over the entire length, and a metallic reinforcing material is brazed to the notch groove expanded by bending the polygonal peripheral side plate. A polygonal pressure resistant container characterized in that it is provided and configured. 3. A wide notched groove is formed at a plurality of locations on the outer surface of one thick metal strip material at intervals in the longitudinal direction,
Bending the thin-walled bottom portion of each of these notches into an arc shape to form a peripheral side plate having a desired overall shape, and the polygonal peripheral side plate and one thick metal bottom plate are Polygonal pressure resistance, characterized in that by joining and heating in a vacuum chamber, the joint between the polygonal peripheral side plate and the bottom plate and both end joints of the peripheral side plate are airtightly brazed over the entire length. Container manufacturing method. 4. A wide notch groove is formed at a plurality of locations on the outer surface of one thick metal strip material at intervals in the longitudinal direction,
Bending the thin-walled bottom portion of each of these notches into an arc shape to form a peripheral side plate having a desired overall shape, and the polygonal peripheral side plate and one thick metal bottom plate are Along with joining, a metallic reinforcing material is placed in the notch groove expanded by bending the polygonal peripheral side plate, and by heating in this state in a vacuum chamber, a joint portion between the polygonal peripheral side plate and the bottom plate and A method for manufacturing a polygonal pressure-resistant container, characterized in that both ends of the peripheral side plate are airtightly brazed over the entire length, and at the same time, the metallic reinforcing material is brazed in the notch groove. 5. A wide notch groove is formed at a plurality of locations on the outer surface of one thick metal strip material at intervals in the longitudinal direction,
A peripheral side plate for a polygonal pressure-resistant container, characterized in that the thin-walled bottom portion of each of the cutout grooves is bent into an arc shape to have a desired polygonal shape as a whole. 6. A notched groove is formed on one side of a thick metal plate,
In the method for bending a thick metal plate that is bent through the bottom thin portion of the cutout groove, the dimensional ratio of the thickness and the width of the bottom thinned portion of the cutout groove is in the range of 1: 5 to 1: 3. As described above, the method for bending a thick metal plate is characterized in that the notch groove is formed wide and is bent in an arc shape within the width of the thin portion on the bottom surface. 7. A thick notched groove is formed on one surface of a thick metal plate, a bottom thin portion of the notched groove is bent, and a metallic reinforcing material is provided in the notched groove expanded by this bending. Reinforcing structure of thick-walled metal bent plate characterized by being put and brazed.