JPH07249819A - Frequency-stabilized laser apparatus - Google Patents

Abstract

PURPOSE:To obtain a frequency-stabilized laser apparatus whose frequency accuracy and stability are high, whose bandwidth is narrow, which can oscillate a high-output pulse and which can generate a frequency-variable laser beam. CONSTITUTION:A high-frequency power supply 10 modulates a comb generator 20. A Faraday rotator 21 and a total reflecting mirror 22 are arranged and installed in the horizontal direction on the incident and radiant side of the comb generator 20. At the Faraday rotator 21, the deflection face of an incident laser beam and that of a radiant laser beam can be turned by 90 deg.. A polarizing mirror 23 and a semitransmitting mirror 24 are arranged in the vertical direction on the lower side as shown in the figure of the total reflecting mirror 22. An isolator 25, a semitransmitting mirror 26 and a semiconductor laser 27 are arranged in the horizontal direction on the right side of the semitransmitting mirror 24. A light feedback means which includes a Fabry-Perot etalon 28 15 arranged and installed on the upper side of the semitransmitting mirror 26. A frequency standard 29 is arranged at the polarizing mirror 23 via an etalon 40, and a frequency can be stabilized by it.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a frequency-stabilized laser device used for laser isotope separation such as uranium enrichment by atomic laser method, element separation in nuclear fuel reprocessing, atmospheric environment measurement, laser measurement such as spectroscopy. It is about. More specifically, the present invention relates to a frequency-stabilized laser device capable of generating frequency-tunable laser light having a stable frequency.

[0002]

2. Description of the Related Art Generally, in laser isotope separation such as uranium enrichment by atomic laser method, element separation in nuclear fuel reprocessing, or atmospheric environment measurement, laser measurement such as spectroscopy, the resonance frequency of the target atom is accurate. A frequency tuned laser light is required. Further, the laser light required in such a technical field needs to have a narrow band spectrum. Moreover, it is desirable that the frequency tuning range of the laser light is wide in order to resonate with as many atoms as possible. Furthermore, high-power pulsed laser light is required for atomic laser method uranium enrichment and atmospheric environment measurement. In order to generate laser light that satisfies the above-mentioned three requirements, dye lasers and tunable solid-state lasers have conventionally been used, and etalons (resonators) have been used.
Narrowing the band and tuning the frequency with a diffraction grating, etc., and identifying the frequency with a wavemeter.

[0003]

However, in these conventional laser devices, it is necessary to incorporate many optical elements, and since the wavelength meter used here is large, the device itself is complicated and large. Will be things.

Further, since the conventional wavemeter used for identifying the frequency is large and very expensive, there is a drawback that the entire apparatus becomes large and the cost becomes high.

Further, in the above-mentioned conventional device,
There is also a drawback that the frequency accuracy and stability are not so high.

The present invention solves the above-mentioned drawbacks, has high frequency accuracy and stability, has a narrow band spectrum, is capable of high-power pulse oscillation, and is small in size capable of generating a variable frequency laser beam. It is an object of the present invention to provide a low cost frequency stabilized laser device.

[0007]

In order to achieve the above object, a frequency-stabilized laser device according to a first aspect of the present invention has a spectrum with a narrow band, and the frequency of laser light is varied. A laser light generator capable of generating, a comb generator in which laser light from the laser light generator is modulated by an optical frequency modulation element, and a Fabry-Perot resonator is configured on the input / output side of the laser light,
One of the sidebands of the comb-shaped spectrum laser light generated from the comb generator is irradiated as a frequency reference, and the irradiation result is detected by a detector. Based on the detection signal, the laser drive power supply and the Fabry of the laser light generator are detected. And a control means for controlling the operation of the drive power source for the Perot etalon.

In order to achieve the above object, a frequency-stabilized laser device according to a second aspect of the present invention is a frequency-stabilized side device in which the center frequency or side band is tuned to a frequency reference such as an absorption spectrum of an atom. The beat frequency is changed by interfering the comb generator that can output the laser light including the band, the laser light that includes the sideband from the comb generator with the output laser light from the other wavelength tunable laser light generator. A laser light output unit is provided which is tuned and stabilized to the required frequency by measuring and performing feedback control of the wavelength tunable laser frequency.

In the frequency-stabilized laser device according to the third aspect of the present invention, the laser beam whose frequency is stabilized in the laser beam output section is capable of high-power pulse oscillation of a dye laser, a solid-state laser, etc., and has a variable wavelength. It is characterized by performing injection seeding on a laser light generator.

[0010]

According to the first aspect of the present invention, one of the sidebands of the comb generator is tuned to the frequency reference such as the absorption spectrum of atoms to tune the center frequency of the output laser light. In this case, the frequency can be tuned only at discrete values, but continuous tuning can be performed by combining with a frequency shifter or the like.

According to the second aspect of the present invention, the sidebands of the laser light from the comb generator section whose frequency is stabilized by frequency tuning to the frequency reference each become a frequency standard. Precise frequency control by providing a laser light output unit, adjusting the output light near the required frequency, measuring the beat frequency with the sideband closest to the required frequency, and performing feedback control. The obtained laser beam can be obtained.

According to the third aspect of the present invention, a continuous wave laser beam whose frequency is controlled with high precision is generated, and the seed wave is injected into another pulsed wavelength tunable laser, so that the same as the continuous wave laser beam is generated. It is possible to obtain a pulsed laser beam whose frequency is controlled with a degree of precision. Moreover, since the frequency-controlled pulsed laser light is essentially the same as the output that can be generated from the pulsed oscillation wavelength variable laser, it is possible to increase the output.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to illustrated embodiments.

FIG. 1 shows an embodiment of the frequency stabilized laser device of the present invention. Reference numeral 10 is a high frequency power supply, and the high frequency power supply 10 modulates the comb generator 20. A Faraday rotator 21 and a total reflection mirror 22 are linearly arranged in the horizontal direction in the drawing on the input / output side of the comb generator 20, and the laser light passes through the total reflection mirror 22 and the Faraday rotator 21. The laser light from the comb generator 1 is guided to the Faraday rotator 21,
The optical path d is configured so as to be guided toward the total reflection mirror 22. The total reflection mirror 22 is arranged at an angle of 45 degrees with respect to the laser light directed to the comb generator 20. Further, the Faraday rotator 21 can rotate the deflecting surfaces of the incident laser light and the outgoing laser light by 90 degrees.

A polarization mirror 23 and a semi-transmission mirror 24 are linearly arranged in the vertical direction in the figure below the total reflection mirror 22 in the figure to form an optical path of laser light. On the right side of the semi-transmissive mirror 24 in the figure, an isolator 25, a semi-transmissive mirror 26, and a semiconductor laser 27 are arranged linearly in the horizontal direction in the figure.
Optical paths a and b for guiding the laser light from 7 are formed.

A Fabry-Perot etalon 28 is disposed above the semi-transmissive mirror 26 in the figure. The Fabry-Perot etalon 28, the semi-transmissive mirror 26 and a piezo drive power source 33, which will be described later, constitute an optical feedback means.
The laser light processed by the optical feedback means can be optically returned to the semiconductor laser 27.

A frequency reference 29 is arranged on the right side of the polarizing mirror 23 in the figure through a Fabry-Perot etalon 40, and a detector 30 is arranged on the right side of the frequency reference 29 in the figure. This detector 30
Forms an electric signal according to the incident laser light,
The electric signal can be supplied to the amplifier 31. The output of the amplifier 31 is electrically connected to the control circuit 32. The control circuit 32 is electrically connected to a piezo drive power supply 33 and a semiconductor laser drive power supply 34, and can drive and control the piezo drive power supply 33 and the semiconductor laser drive power supply 34. The piezo drive power source 33 is electrically connected to the piezo 36 of the Fabry-Perot etalon 28 and can drive the piezo 36. The semiconductor laser driving power source 34 is electrically connected to the semiconductor laser 27 and can drive the semiconductor laser 27. As the semiconductor laser 27, a narrow band single mode laser device is used, and it is desirable to use a laser device having a narrow band to some extent.

The operation of such an embodiment will be described with reference to FIGS. 2 shows the state of the laser light on the optical paths a, b, c, d, e of the frequency standard laser device of FIG. Further, in FIG. 2, the horizontal axis represents frequency,
The vertical axis shows the level of laser light.

Part of the laser light generated by the semiconductor laser 27 is supplied to the Fabry-Perot etalon 28 via the semi-transmissive mirror 26. The laser light on the optical path a is narrowed to some extent as shown by the a-axis in FIG. 2, but is not completely narrowed. The laser light processed by the Fabry-Perot etalon 28 is returned to the semiconductor laser 27 via the semi-transmissive mirror 26 again. As a result, the laser light passing through the semi-transmissive mirror 26 has a narrow band as shown by the b axis in FIG. A part of this laser light is reflected by the semi-transmissive mirror 24, and is input to the comb generator 20 via the polarization mirror 23, the total reflection mirror 22, and the Faraday rotator 21. At this time, since the laser light of the semiconductor laser 27 is linearly polarized, the polarization plane of the polarization mirror 23 is aligned with the laser light, and the polarization mirror 23 is set so that all the laser light is transmitted.

The comb generator 20 is a high frequency power source 10.
Due to this, a high voltage modulation voltage is applied. As a result, sidebands are generated in the spectrum of the laser light output from the comb generator 20. In this comb generator 20, for example, a laser beam captured from a partially reflecting surface provided by cutting out a corner portion of a non-linear crystal body having a flat plate cube shape is reflected in zigzag at opposite sides. The laser light that has been repeatedly reflected is reflected by the total reflection surface provided by cutting out the diagonal of the above-mentioned corner and again traces the same course to be output from a part of the reflection surface. The Fabry-Perot resonator is constructed in the and works as a high-precision frequency filter. Therefore, the laser light extracted again from the comb generator 20 contains many comb-shaped side bands. Also,
In the case of the comb generator 20, since the resonator length of the Fabry-Perot resonator configured is long, the side band interval is short. Therefore, the laser beam that has passed through the Faraday rotator 21 contains many comb-shaped side bands at short intervals as shown by the d-axis in FIG.

In the above description, the comb generator 20 is
Although the modulation element and the Fabry-Perot resonator are described as being integrated, the Fabry-Perot resonator may be placed outside the modulation element. Further, although the surface that enters the Fabry-Perot resonator and the exit surface from the resonator are the same surface, the exit surface may be the opposite surface to allow passage through the Fabry-Perot resonator. In this case, the Faraday rotator 21 becomes unnecessary. Further, the modulator and the Fabry-Perot resonator may be integrated.

The laser light in which the side band is generated in this way again reaches the polarization mirror 23 via the Faraday rotator 21 and the total reflection mirror 22. At this time, if the polarization plane is set to rotate 90 degrees by passing through the Faraday rotator 21, the polarization plane of the laser light and the polarization plane of the laser light are deviated by 90 degrees. Then, it is totally reflected at and is irradiated to the frequency reference 29 through the Fabry-Perot etalon 40.

Here, any one of the side bands is selected by the Fabry-Perot etalon 40, that is, N of the side band of the laser light as shown on the e-axis of FIG.
The second mode (N is any integer) is used to tune to the reference frequency. This allows the center frequency to be swept and stabilized. In this way, by irradiating the atom of the frequency reference 29 with the Nth mode, the result is detected by the detector 30. The detection signal detected by the detector 30 is amplified by the amplifier 31 and input to the control circuit 32. The control circuit 32 controls the operation of the semiconductor laser driving power source 34 based on the detection signal to control the current flowing through the semiconductor laser 27 and adjust the temperature of the semiconductor laser 27. Further, the control circuit 32 performs drive control of the piezo drive power source 33 based on the detection signal to adjust the interval of the Fabry-Perot etalon 28 by the piezo 36, thereby narrowing the spectrum band at the required wavelength. .

The semiconductor laser 27 operates as described above.
The laser light output from the semi-transmissive mirror 26 is finally stabilized in a narrow band and is output from the semi-transmissive mirror 24. The laser light at this time has a narrow band as shown by the c-axis in FIG.

As described above, in this embodiment, it is possible to obtain laser light stabilized at a required frequency, and it is easy to narrow the frequency band.

In the above embodiment, the comb generator 20 modulates the laser light to generate a large number of sidebands, and the sidebands are irradiated to the atoms of the frequency reference 29 by the polarization mirror 23, and the absorption spectrum of the atoms is obtained. Since it is tuned to the required wavelength by matching
A large and expensive wavelength meter is not required, which allows downsizing of the entire device and cost reduction.

FIG. 3 shows another embodiment of the present invention. Also in this figure, the same components as those in FIG.

The frequency-stabilized laser device shown in this figure is roughly composed of a comb generator section 2 and a laser light output section 4.

Here, the comb generator section 2 is constructed as follows. Reference numeral 20a is a modulation element with a Fabry-Perot resonator, and the modulation element 20a is adapted to be modulated by a high frequency power source (not shown). A Faraday rotator 21 and a polarization mirror 23 are linearly arranged in the horizontal direction in the drawing on the entrance and exit sides of the modulator 20a, and the laser light is guided to the modulator 20a via the polarization mirror 23 and the Faraday rotator 21. In addition, an optical path is configured such that the laser light from the modulation element 20a is guided toward the Faraday rotator 21 and the polarization mirror 23. The polarization mirror 23 is arranged at 45 degrees with respect to the laser light directed to the comb generator 1. Further, the Faraday rotator 21 can rotate the deflecting surfaces of the incident laser light and the outgoing laser light by 90 degrees.

A semi-transmissive mirror 24 and a total reflection mirror 22 are linearly arranged in the vertical direction in the figure above the polarizing mirror 23 in the figure, and an optical path of laser light is formed.
The isolator 2 is provided on the right side of the total reflection mirror 22 in the figure.
5, the semi-transmissive mirror 26 and the semiconductor laser 27 are linearly arranged in the horizontal direction in the drawing, and an optical path for guiding the laser light from the semiconductor laser 27 is formed.

A Fabry-Perot etalon 28 is disposed below the semi-transmissive mirror 26 in the figure. The Fabry-Perot etalon 28, the semi-transmissive mirror 26 and a piezo drive power source 33, which will be described later, constitute an optical feedback means.
The laser light processed by the optical feedback means can be optically returned to the semiconductor laser 27.

A frequency reference 29 is arranged on the right side of the semi-transmissive mirror 24 in the figure, and a detector 30 is arranged on the right side of the frequency reference 29 in the figure. The detector 30 forms an electric signal according to the incident laser beam and can supply the electric signal to the amplifier 31. The output of the amplifier 31 is electrically connected to the control circuit 32. This control circuit 32 is
It is electrically connected to the piezo drive power supply 33 and the semiconductor laser drive power supply 34, and can drive and control the piezo drive power supply 33 and the semiconductor laser drive power supply 34. The piezo drive power source 33 is electrically connected to the piezo 36 of the Fabry-Perot etalon 28,
The piezo 36 can be driven. The semiconductor laser driving power source 34 is electrically connected to the semiconductor laser 27 and can drive the semiconductor laser 27. The semiconductor laser 27 is preferably a narrow band single mode laser device. A total reflection mirror 39 is provided on the output side of the polarization mirror 23 so that the output laser light of the comb generator section 2 can be guided to the laser light output section 4.

On the other hand, the laser light output section 4 is constructed as follows. Reference numeral 41 denotes a semiconductor laser, and on the laser light output side of the semiconductor laser 41, semi-transmissive mirrors 42 and 43 are linearly arranged in the horizontal direction in the drawing. A piezo 44 is provided above the semi-transmissive mirror 42 in the figure.
The Fabry-Perot etalon 45 provided with is arranged in the vertical position in the figure. Similarly, a coupling mirror 46 is arranged in the vertical direction of the semi-transmissive mirror 43 in the drawing. A total reflection mirror 47 is arranged in the horizontal direction on the left side of the coupling mirror 46 in the figure, and the laser light from the comb generator unit 2 guided through the total reflection mirror 39 is supplied to the coupling mirror 46. Is done. A photo-detecting element 48 is provided on the right side of the coupling mirror 46 in the figure, and the beat light input by the photo-detecting element 48 can be converted into an electric signal. The electric signal converted by the photodetector element 48 is input to the amplifier 49. The output of the amplifier 49 is electrically connected to the frequency comparator 50 so that the electric signal amplified by the amplifier 49 is given. The frequency comparator 50 can compare the frequencies of the input signals and supply the comparison result to the control circuit 51. Control circuit 51
Is a piezo drive power source 52 and a semiconductor laser drive power source 5
3 is electrically connected to the piezo drive power source 52 and the semiconductor laser drive power source 53 based on the signal. The piezo drive power supply 52 is electrically connected to the piezo 44 of the Fabry-Perot etalon 45, and the electric power from the piezo drive power supply 52 drives the piezo 44 so that the interval between the Fabry-Perot etalons 45 can be adjusted. . The semiconductor laser driving power source 53 is electrically connected to the semiconductor laser 41, and the oscillation frequency of the semiconductor laser 41 can be controlled by adjusting the current and temperature of the semiconductor laser driving power source 53.

The operation of the embodiment thus constructed will be described with reference to FIGS. 3 and 4. Here, in FIG. 4, the optical paths a, b, c, d, e, f, of the frequency standard laser device of FIG.
The state of the laser beam in g is shown. In addition, in FIG.
The horizontal axis represents frequency and the vertical axis represents the laser light level.

Although the semiconductor laser is also used in this embodiment, the semiconductor laser 41 for emitting the laser light used as the output laser light and the semiconductor laser 27 constituting the comb generator section 2 are separate as shown in the figure.

First, the operation of the comb generator section 2 will be described. As the semiconductor laser 27 used in the comb generator section 2, a narrow band single mode laser is suitable. A part of the laser light output from the semiconductor laser 27 is extracted by the semi-transmissive mirror 26, injected into the Fabry-Perot etalon 28, and returned to the semiconductor laser 27 again, whereby the spectrum of the laser light is further narrowed. Turn into. This is because the laser light on the optical path a had a relatively narrow band as shown by the a-axis in FIG. 4, but the laser light on the optical path b was narrowed by the optical feedback (FIG. (See b-axis in 4).

The laser beam thus narrow-banded passes through the isolator 25, the total reflection mirror 22, the semi-transmission mirror 24, the polarization mirror 23, and the Faraday rotator 21, and the modulation element 2 with the Fabry-Perot resonator.
Injected at 0a. As a result, a comb-shaped side band is generated according to the principle described in the above embodiment. That is,
The laser light on the optical path d has comb-shaped side bands as shown on the d-axis in FIG.

At this time, a part of the laser light from the semiconductor laser 27 is taken out by the semi-transmissive mirror 24 and is irradiated on the atom of the frequency reference 29. A signal detected by the detector 30 is amplified by an amplifier 31 and input to a control circuit 32 so as to be tuned to the light absorption wavelength of the atom. The control circuit 32 controls the semiconductor laser driving power source 3 based on the signal.
4 is controlled to adjust the temperature and current of the semiconductor laser 27 and stabilize the center frequency of the semiconductor laser 27.

At this time, at the same time, the control circuit 32 controls the operation of the piezo-driving power source 33 based on the signal, and adjusts the piezo 36 of the Fabry-Perot etalon 28 to adjust the etalon interval and to set an arbitrary value. Allows narrowing of the spectrum at wavelengths.

The laser light extracted from the modulator 20a passes through the Faraday rotator 21 again. At this time, if the Faraday rotator 21 is set to be rotated by 90 degrees with respect to the polarization plane of the laser light that first passes, the laser light in the optical path d passes through the polarization mirror 23 and passes through the total reflection mirror 39. The reflected light is input to the total reflection mirror 47 of the laser light output unit 4.

In the laser light output section 4, the total reflection mirror 4
The laser light input to 7 is incident on the coupling mirror 46 through the optical path d ′. Further, a part of the laser light generated by the semiconductor laser 41 is guided to the Fabry-Perot etalon 45 via the semi-transmissive mirror 42. The laser light processed by the Fabry-Perot etalon 45 is again returned to the semiconductor laser 41 via the semi-transmissive mirror 42 to narrow the frequency of the laser light. That is, while the laser beam on the optical path e has a wide band even in a relatively narrow band as shown by the e-axis in the figure, the semi-transmissive mirror 4
The laser light passing through 2 and passing through the optical path f has a narrow band as shown on the f axis of FIG. A part of the laser beam thus narrowed is extracted by the semi-transmissive mirror 43, passes through the optical path f ′, and is coupled with the laser beam from the comb generator unit 2 at the coupling mirror 46. As a result, the beat light of both laser lights is output from the coupling mirror 46. The center frequency of the laser light spectrum from the comb generator unit 2 is stabilized with the frequency reference,
Since the mode interval is constant, if it is possible to determine which mode the beat is, the oscillation frequency of the semiconductor laser 41 can be accurately determined by measuring the beat frequency. This beat light is converted into an electric signal by the photodetector element 48. This electric signal is amplified by the amplifier 49 and input to the frequency comparator 50. The frequency comparator 50 compares the frequencies and inputs the result to the control circuit 51. The control circuit 51 controls the operations of the piezo drive power supply 52 and the semiconductor laser drive power supply 53.

The oscillation frequency of the semiconductor laser 41 is determined as follows. First, the frequency of the semiconductor laser 41 is made to match the frequency of the frequency-stabilized semiconductor laser 27 in a state where the side band of the semiconductor laser 27 is not generated. After that, semiconductor laser 2
7 sidebands are generated and the frequency of the semiconductor laser 41 is swept up to around the required frequency. At this time,
The frequency is roughly adjusted by counting how many sidebands are matched from the center frequency.
After this, the frequency of the semiconductor laser 41 can be precisely measured by finely adjusting the frequency of the semiconductor laser 41 and observing the beat with the sidebands matched in the rough adjustment. The frequency sweep of the semiconductor laser 41 is performed by the control circuit 51 by the semiconductor laser drive power source 53.
Is controlled by adjusting the temperature of the semiconductor laser 41 and the current flowing through the semiconductor laser 41.

At this time, Fabry Perot Etalon 45
It is possible to narrow the band at an arbitrary wavelength by adjusting the power of the piezo drive power supply 52 for the piezo 44 attached to the.

As described above, the laser light stabilized at the required frequency can be obtained.

As described above, in another embodiment, it is possible to obtain a laser beam stabilized at a required frequency,
It is easy to narrow the frequency band.

In addition, in the other embodiments described above, a large and expensive wavelength meter is not required, which makes it possible to downsize the entire apparatus and reduce the cost.

Further, in the other embodiments described above, a high output laser beam can be obtained by using a high output laser as the laser 41 of the laser beam output section.

The above embodiment is an example of the preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the gist of the present invention. For example, in each of the above embodiments, the semiconductor lasers 27 and 41 are used as variable frequency lasers, but if a single mode laser with a narrowed spectrum band is used, wavelength control is possible only by controlling the drive current and temperature. .

Further, when a dye laser, a wavelength tunable solid-state laser, a color center laser or the like is used in place of the semiconductor lasers 27 and 41 in each of the above-mentioned embodiments, frequency control may be performed using an etalon or a diffraction grating. .

[0050]

As described above, according to the first aspect of the invention, the sideband of the laser beam is generated by the comb generator from the laser beam from the laser beam generator, and the sideband is irradiated with the frequency reference. Since it is tuned to this, it is possible to obtain a laser beam stabilized at a necessary frequency, and it is easy to narrow the frequency band.

In the invention described in claim 1, the modulation element modulates the laser light to generate a large number of sidebands, and the sidebands are irradiated with a semi-transmissive mirror at a frequency reference, and the absorption spectrum of the atom is obtained. Since the wavelength is tuned to the required wavelength by matching with, it is not necessary to use a large and expensive wavelength meter, which enables downsizing of the entire apparatus and cost reduction.

As described above, according to the second aspect of the invention, the laser light of the stabilized frequency is obtained by the comb generator section, and the laser light of the required frequency is obtained by the laser light output section based on this. Therefore, it is possible to obtain a laser beam stabilized at a required frequency, and it is easy to narrow the frequency band.

According to the second aspect of the invention, the laser light of the stabilized frequency is obtained by the comb generator, and the laser light of the required frequency is obtained by the laser light output unit based on this. Therefore, a large and expensive wavelength meter is not required, which allows downsizing of the entire device and cost reduction.

Further, according to the invention described in claim 2, a high-power laser beam can be obtained.

In addition, in the invention described in claim 3, a continuous wave laser beam whose frequency is controlled with high precision is generated, and the continuous wave laser beam is injected into another pulsed wavelength tunable laser for injection seeding. It is possible to obtain a pulsed laser light whose frequency is controlled precisely as much as light, and because this pulsed laser light whose frequency is controlled is originally about the same as the output that can be generated from the pulsed oscillation wavelength variable laser light generator. Higher output is possible.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of a frequency stabilized laser device of the present invention.

FIG. 2 is a diagram showing a state of laser light of each part of the embodiment of FIG.

FIG. 3 is a configuration diagram showing another embodiment of the present invention.

FIG. 4 is a diagram showing a state of laser light of each portion of the embodiment of FIG.

[Explanation of symbols]

 2 Com-generator part 4 Laser light output part 20a Modulator 21 Faraday rotator 22 Total reflection mirror 23 Polarizing mirror 24 Semi-transmissive mirror 25 Isolator 26 Semi-transmissive mirror 27 Semiconductor laser 29 Frequency reference 30 Detector 32 Control circuit 33 Piezo drive power supply 34 Semiconductor laser Drive power supply 36 Piezo 41 Semiconductor laser 42, 43 Semi-transmissive mirror 45 Fabry-Perot etalon 46 Coupling mirror 48 Photodetector 50 Frequency comparator 51 Control circuit 52 Piezo drive power supply 53 Semiconductor laser drive power supply

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Motonobu Korogi 3-22-6-107 Kirigaoka, Midori-ku, Yokohama-shi, Kanagawa

Claims (3)

[Claims] 1. A laser light generator having a narrow band spectrum and capable of generating the laser light by varying the frequency of the laser light, and a laser light from the laser light generator is modulated by an optical frequency modulator, and A comb generator in which a Fabry-Perot resonator is configured on the input / output side of the laser light, and one of the sidebands of the comb-shaped spectrum laser light generated from the comb generator is applied as a frequency reference, and the irradiation is performed. The result is detected by the detector,
A frequency-stabilized laser device comprising: a laser driving power source for the laser light generator and a control means for controlling the operation of the driving power source for the Fabry-Perot etalon based on the detection signal. 2. A comb generator section capable of outputting a laser beam including a side band whose frequency is stabilized by tuning a center frequency or a side band to a frequency reference such as an absorption spectrum of an atom, and a side from the comb generator section. Tuning the wavelength variable laser frequency to the required frequency by interfering the laser beam including the band with the output laser light from another wavelength variable laser light generator, measuring the beat frequency and performing feedback control. A frequency-stabilized laser device comprising: a stabilized and stabilized laser light output section. 3. A laser light generating device, such as a dye laser or a solid-state laser, capable of high-power pulse oscillation and variable in wavelength is used for injection seeding of the laser light whose frequency has been stabilized in the laser light output section. The frequency-stabilized laser device according to claim 2, which is characterized in that