JPH0724951Y2 - 駆動装置 - Google Patents

駆動装置

Info

Publication number
JPH0724951Y2
JPH0724951Y2 JP1989037212U JP3721289U JPH0724951Y2 JP H0724951 Y2 JPH0724951 Y2 JP H0724951Y2 JP 1989037212 U JP1989037212 U JP 1989037212U JP 3721289 U JP3721289 U JP 3721289U JP H0724951 Y2 JPH0724951 Y2 JP H0724951Y2
Authority
JP
Japan
Prior art keywords
electrodes
piezoelectric
plates
pzt
drive device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989037212U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02129192U (enExample
Inventor
彰 佐々木
賢司 石川
正大 宮尾
健司 村上
徹也 鈴木
直也 西野
修一 福岡
Original Assignee
静岡大学長
富士電気化学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 静岡大学長, 富士電気化学株式会社 filed Critical 静岡大学長
Priority to JP1989037212U priority Critical patent/JPH0724951Y2/ja
Publication of JPH02129192U publication Critical patent/JPH02129192U/ja
Application granted granted Critical
Publication of JPH0724951Y2 publication Critical patent/JPH0724951Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP1989037212U 1989-03-30 1989-03-30 駆動装置 Expired - Lifetime JPH0724951Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989037212U JPH0724951Y2 (ja) 1989-03-30 1989-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989037212U JPH0724951Y2 (ja) 1989-03-30 1989-03-30 駆動装置

Publications (2)

Publication Number Publication Date
JPH02129192U JPH02129192U (enExample) 1990-10-24
JPH0724951Y2 true JPH0724951Y2 (ja) 1995-06-05

Family

ID=31544120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989037212U Expired - Lifetime JPH0724951Y2 (ja) 1989-03-30 1989-03-30 駆動装置

Country Status (1)

Country Link
JP (1) JPH0724951Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11191980A (ja) * 1997-12-26 1999-07-13 Asmo Co Ltd 超音波モータの駆動回路
JPH11191982A (ja) * 1997-12-26 1999-07-13 Asmo Co Ltd 超音波モータの駆動回路

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63153405A (ja) * 1986-07-14 1988-06-25 Olympus Optical Co Ltd 走査型トンネル顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11191980A (ja) * 1997-12-26 1999-07-13 Asmo Co Ltd 超音波モータの駆動回路
JPH11191982A (ja) * 1997-12-26 1999-07-13 Asmo Co Ltd 超音波モータの駆動回路

Also Published As

Publication number Publication date
JPH02129192U (enExample) 1990-10-24

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