JPH07247500A - Cleanser for semiconductor device and method for forming wiring pattern - Google Patents

Abstract

PURPOSE:To produce a semiconductor device cleanser comprising a specific quaternary ammonium hydroxide, a saccharide and an acid amide compound in a specific ratio, capable of perfectly removing a side wall-protecting film formed on the dry etching treatment of the semiconductor device, and excellent in working environment protection. CONSTITUTION:This semiconductor device cleanser comprises (A) 0.01-15wt.% of a quaternary ammonium hydroxide of the formula (R is a 1-4C alkyl or, a hydroxy-substituted alkyl; R<1> is a 1-4C alkyl) such as tetramethylammonium hydroxide, (B) 0.1-20wt.% of a sacchride such as a triose or a suger alcohol such as glucose, and (C) 1-60wt.% of an acid amide compound such as formamide. The method for forming a wiring pattern comprises preferably forming a wiring pattern with a dry-etching gas on an aluminum conductive film formed on a semiconductor wafer, and subsequently removing a protecting film formed on the side wall of a photoresist from the aluminum wiring pattern with this cleanser.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for treating a surface of a semiconductor wafer in a manufacturing process of a semiconductor integrated circuit device, and more specifically, removing a side wall protective film on an aluminum-based wiring body formed in a dry etching process. The present invention relates to an organic alkaline aqueous solution-based cleaning agent for semiconductor devices and a method for forming a wiring pattern.

[0002]

2. Description of the Related Art Conventionally, an aluminum-based metal has been used as a wiring material used on a semiconductor wafer. Especially, in recent years, electromigration, stress migration, etc. occur due to high integration and miniaturization of circuits. Migration is suppressed by using aluminum alloys (Al-Si, Al-Si-Cu) in which a trace amount of silicon, copper, etc. is added to aluminum.

In a manufacturing technique using an aluminum alloy as a wiring material, first, an aluminum alloy layer is formed on a semiconductor wafer on which a diffusion layer, an insulating film and the like are formed by a sputter deposition method. Next, after applying a resist on the aluminum alloy film, a fine pattern is formed by photolithography. After the development, the aluminum alloy film is further dry-etched using the resist pattern as a mask to form a wiring pattern. At this time, a chlorine-based gas such as Cl ₂ or Cl ₂ -BCl ₃ is generally used as the dry etching gas used.

During this dry etching, a sidewall protection film, which is a reaction product of the photoresist and the dry etching gas, is formed on the pattern sidewall of the formed aluminum alloy film. Therefore, it is possible to perform a fine processing technique by performing highly selective etching by anisotropic etching by forming a sidewall protective film, but on the other hand, it is difficult to remove the formed sidewall protective film. Is occurring. Further, chlorine, which is a component of the dry etching gas used in the side wall protection film during the dry etching, is taken in and reacts with moisture in the atmosphere after the etching is completed to generate an acid such as hydrogen chloride. It is known to corrode the alloy (corrosion) and cause problems such as wire breakage and have a great influence. As a method of avoiding such corrosion, there are a method of heating a wafer after dry etching, a method of cleaning with a large amount of pure water, and the like, but none of the methods gives good results and completely avoids corrosion. It is not possible
(SemiconNews October 1988 pages 44-49). Therefore, in order to avoid such corrosion, it is necessary to completely remove the side wall protective film.

As a method of removing the side wall protective film, a cleaning liquid such as an organic acidic cleaning liquid or an organic alkaline cleaning liquid is generally used. However, any of these organic acidic cleaning solutions and organic alkaline cleaning solutions must be heated to about 100 ° C. before use, and the sidewall protective film cannot be completely removed even at such high temperatures. Further, these cleaning solutions cause corrosion of the aluminum alloy film which is a wiring material during cleaning and cannot be used for forming fine patterns. Furthermore, these cleaning liquids must be rinsed with an organic solvent such as isopropanol having good compatibility with water after cleaning, and then rinsed with water, which complicates the process.
It is not preferable in terms of safety.

In addition to the above-mentioned cleaning method using an organic acid cleaning solution or an organic alkaline cleaning solution, plasma ashing is performed after dry etching, and an aqueous solution of quaternary ammonium hydroxide such as tetramethylammonium hydroxide is used. There is a method of removing the resist residuals (Japanese Patent Laid-Open No. 62-281332). In this method, the aluminum alloy, which is the wiring material, is severely corroded and cannot be used for fine patterns. Further, as a method of removing the side wall protective film, there is a method of washing with an aqueous solution of quaternary ammonium hydroxide to which sugars and sugar alcohols are added (Japanese Patent Laid-Open No. 4-48633). It cannot suppress corrosion and cannot be used for ultra-fine patterns.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to completely remove the above side wall protective film to avoid corrosion.
Another object of the present invention is to provide a cleaning liquid for semiconductor devices that does not corrode aluminum alloy, which is a wiring material, and a method for forming an ultrafine wiring pattern using the cleaning liquid.

[0008]

DISCLOSURE OF THE INVENTION As a result of intensive studies on the method of manufacturing a semiconductor device having the above problems, the present inventors have found that quaternary ammonium hydroxide, saccharides or sugar alcohols as a cleaning agent for semiconductor devices. By using an aqueous solution containing an acid amide compound and the sidewall protection film formed during dry etching is completely removed, the occurrence of corrosion is completely avoided, and the corrosion of the aluminum alloy, which is the wiring material, is sufficiently prevented. It was found that an ultra-fine wiring pattern can be formed because it is suppressed, and the present invention has been reached.

That is, the present invention relates to the general formula [(R ¹ ) ₃ N-
R] ⁺ OH ^- quaternary ammonium hydroxide (R is an alkyl group or a hydroxy-substituted alkyl group having 1 to 4 carbon atoms, R ¹ represents an alkyl group having 1 to 4 carbon atoms) represented by 0.0
1 to 15% by weight, sugars or sugar alcohols 0.1
Wiring was formed by a dry etching gas on a cleaning agent for a semiconductor device, which was composed of an aqueous solution containing 20% by weight and an acid amide compound of 1 to 60% by weight, and an aluminum-based conductive film formed on a semiconductor wafer. rear,
A method for forming a wiring pattern is characterized in that the sidewall protective film of the photoresist is removed from the aluminum-based wiring body by using this cleaning agent for a semiconductor device.

The quaternary ammonium hydroxide used in the cleaning agent for semiconductor devices of the present invention has the general formula [(R ¹ ) ₃ N
-R] ⁺ OH ^- (R is an alkyl group or a hydroxy-substituted alkyl group having 1 to 4 carbon atoms, R ¹ represents an alkyl group having 1 to 4 carbon atoms) represented by. Examples of the quaternary ammonium hydroxide represented by this general formula include tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, trimethylethylammonium hydroxide and dimethyldiethylammonium hydroxide. Oxide, trimethyl (2-hydroxyethyl) ammonium hydroxide, tributyl (2-hydroxyethyl)
Examples include ammonium hydroxide and the like.

Among these quaternary ammonium hydroxides, especially tetramethylammonium hydroxide
(TMAH) and trimethyl (2-hydroxyethyl) ammonium hydroxide are preferably used. The concentration of the quaternary ammonium hydroxide used as the cleaning agent for semiconductor devices of the present invention is 0.01 to 15% by weight, preferably 0.05 to 10% by weight, based on the total solution. If the concentration of the quaternary ammonium hydroxide is too low, the removal rate of the sidewall protection deposited film is slow and the desired removal effect cannot be achieved sufficiently. On the other hand, if the concentration is too high, the aluminum alloy, which is the wiring material, is severely corroded.

The saccharides used in the present invention together with the above quaternary ammonium hydroxide are saccharides such as monosaccharides and polysaccharides. Specifically, for example, glycerinaldehyde having 3 to 6 carbon atoms and threose. , Erythrose, arabinose, xylose, ribose, ribulose, xylulose, glucose, mannose, galactose, tagatose, allose, altose, gulose, idose, talose, sorbose, psicose and fructose. Examples of sugar alcohols include threitol, erythritol, arabitol, xylitol, talitol, sorbitol, mannitol, iditol and dulcitol.

Among these sugars or sugar alcohols, glucose, mannose, galactose, sorbitol, mannitol and xylitol are preferably used from the viewpoint of solubility and dispersibility. The concentration of sugars or sugar alcohols in the total solution is 0.1 to 20% by weight, preferably 0.5 to 15% by weight. If the concentration of sugars or sugar alcohols is too low, the aluminum alloy, which is the wiring material, is severely corroded, and if the concentration of sugars or sugar alcohols is too high, the removal rate of the sidewall protective deposited film becomes slow.

Further, in the present invention, an acid amide compound is used together with the above quaternary ammonium hydroxide and sugars or sugar alcohols. Specific examples of the acid amide compound include formamide, N-ethylformamide, N, N-diethylformamide, acetamide, N-methylacetamide, N, N-
Examples thereof include dimethylacetamide, N-ethylacetamide, N, N-diethylacetamide, pyrrolidone, N-methylpyrrolidone, N-ethylpyrrolidone and ε-caprolactam. The concentration of these acid amide compounds in the total solution is 1 to 60% by weight, preferably 3 to 50% by weight. If the concentration of the acid amide compound is too low, the aluminum alloy, which is the wiring material, is corroded severely, and if the concentration of the acid amide compound is too high, the removal rate of the sidewall protective film becomes slow.

The cleaning agent for a semiconductor device of the present invention is a side wall protective film which is formed on a pattern side wall of an aluminum alloy film formed when a wiring pattern is formed on an aluminum-based conductive film formed on a semiconductor wafer by dry etching gas. The temperature at the time of removing the side wall protective film is usually room temperature, but when the removal rate of the side wall protective film is remarkably slow, heating or heating may be performed as necessary. Ultrasonic treatment is performed.

A dipping method, a spray method, or the like is appropriately selected as a treatment method with the semiconductor device cleaning agent of the present invention. The washing temperature and time are not particularly limited,
It is appropriately selected in consideration of the state of the side wall protective film, the type of wiring material, the type of dry etching gas, and the like. Ultrapure water is sufficient for cleaning after using the cleaning agent for a semiconductor device of the present invention, and it is not necessary to use alcohol solvents such as isopropanol and ethanol or other organic solvents as rinse solutions.

[0017]

EXAMPLES The present invention will be described in detail with reference to examples. However, the present invention is not limited to these examples.

Example 1 FIG. 1 is a sectional view of a semiconductor device after dry etching. In Fig. 1, Al / Si / Cu (95.
5/4 / 0.5) Alloy film 2 and SiO ₂ oxide film 3 are formed.
A patterned resist film 4 is formed on the oxide film 3, and Cl ₂ and BCl ₃ are used as a mask with the resist film 4 as a mask.
A via hole 6 penetrating the oxide film is formed by dry etching mainly composed of. On the side wall of the via hole 6, a side wall protective film 5 composed of a resist residue and an etching residue is formed. FIG. 2 is a cross-sectional view after removing the resist film 4 of FIG. 1 by plasma ashing. At this time, the side wall protective film 5 adheres and remains on the side wall and the bottom of the via hole 6.

2 wt. Soak for 3 minutes. After the immersion, it was rinsed with ultrapure water, dried, and observed with an electron microscope (SEM). As a result, as shown in FIG. 3, the side wall protective film 5 was completely removed, and the Al / Si / Cu alloy film 2 and the oxide film 3 were not corroded at all. After drying, it was left in the atmosphere for 2 days, but no corrosion occurred.

Comparative Example 1 Using the same semiconductor device as that of FIG. 2 of Example 1, TMAH 0.3
Immersion was carried out for 3 minutes at 23 ° C. in a cleaning liquid containing 10% by weight of sorbitol and the balance of water. After immersion, rinse with ultrapure water, dry and observe with SEM. As a result, as shown in FIG. 4, the sidewall protection film 5 was completely removed, but Al / Si / Cu was removed.
Corrosion was observed in the alloy film 2 and the oxide film 3.

Comparative Example 2 Using the same semiconductor device as that of FIG. 2 of Example 1, TMAH 0.3
Immersion was carried out for 3 minutes at 23 ° C. in a cleaning liquid with the balance being water with the balance being water. After immersion, rinse with ultrapure water, dry and observe with SEM. As a result, as shown in FIG.
Was completely removed and no corrosion was observed on the oxide film 3, but it was confirmed that the Al / Si / Cu alloy film 2 was severely corroded.

Example 2 Using the same semiconductor device as in FIG. 2 of Example 1, 2% by weight of trimethyl (2-hydroxyethyl) ammonium hydroxide, 10% by weight of xylitol, 5% by weight of dimethylacetamide and the balance of water were used. For certain semiconductor device cleaning liquids
It was immersed at 23 ° C for 1 minute. After immersion, rinse with ultrapure water, dry and observe with SEM. As a result, as shown in FIG. 3, the side wall protective film 5 was completely removed and no corrosion of the Al / Si / Cu alloy film 2 and the oxide film 3 was observed.

Example 3 Using the same semiconductor device as in FIG. 2 of Example 1, TMAH 0.5
5% by weight, glucose 7% by weight, N-methylpyrrolidone 40% by weight, and the balance being water, to a semiconductor device cleaning solution.
Soaked for a minute. After immersion, rinse with ultrapure water, dry and observe with SEM. As a result, as shown in FIG. 3, the side wall protective film 5 is completely removed and the Al / Si / Cu alloy film 2 and the oxide film are removed.
No corrosion of 3 was observed.

[0024]

As shown in the examples, after the wiring is formed on the aluminum-based conductive film formed on the semiconductor wafer by the dry etching gas, the cleaning agent for semiconductor device of the present invention is used to form the sidewall of the photoresist. The protective film was completely removed, no corrosion of the aluminum-based conductive film and the oxide film was observed at all, and the obtained semiconductor device was washed with ultrapure water and dried. Does not occur.

Therefore, by using the cleaning agent for a semiconductor device of the present invention, highly selective etching can be performed by anisotropic etching due to the formation of the side wall protective film, and an ultrafine wiring pattern can be formed. Further, when the cleaning agent for a semiconductor device of the present invention is used, rinsing is very easy and there is no need to use an organic solvent such as isopropanol, which is advantageous in terms of working environment.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a semiconductor device after dry etching, observed with an electron microscope (SEM).

FIG. 2 is a cross-sectional view of the semiconductor device after removing the resist film 4 of FIG. 1 by plasma ashing, and observing it with an electron microscope (SEM).

FIG. 3 is a cross-sectional view of the semiconductor device of FIG. 2 immersed in the cleaning agent for semiconductor devices of the present invention, rinsed with ultrapure water, dried, and observed with an electron microscope (SEM) (Examples 1 to 1). 3).

4 is a cross-sectional view of the semiconductor device of FIG. 2 immersed in an aqueous solution of TMAH and sorbitol, rinsed with ultrapure water, dried, and observed by SEM (Comparative Example 1).

5 is a cross-sectional view of the semiconductor device of FIG. 2 immersed in an aqueous solution of TMAH, rinsed with ultrapure water, dried, and observed by SEM (Comparative Example 2).

[Explanation of symbols]

1 Si semiconductor substrate 2 Al / Si / Cu (95.5 / 4 / 0.5) alloy film 3 SiO ₂ oxide film 4 resist film 5 sidewall protection film 6 via hole

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Ryuji Hasemi 182 Shinwari, Tayuhama, Niigata City, Niigata Prefecture Mitsubishi Gas Chemical Co., Ltd. Niigata Research Center

Claims (2)

[Claims] 1. The general formula [(R ¹ ) ₃ N—R] ⁺ OH
^- (R is an alkyl group having 1 to 4 carbon atoms or a hydroxy-substituted alkyl group, R ¹ is an alkyl group having 1 to 4 carbon atoms) 0.01 to 15% by weight of quaternary ammonium hydroxide, saccharide Alternatively, a cleaning agent for a semiconductor device comprising an aqueous solution containing sugar alcohols in an amount of 0.1 to 20% by weight and an acid amide compound in an amount of 1 to 60% by weight. 2. A sidewall protective film of a photoresist is formed on a sidewall of a photoresist by using the cleaning agent for a semiconductor device according to claim 1, after the wiring is formed on the aluminum-based conductive film formed on a semiconductor wafer by dry etching gas. A method for forming a wiring pattern, which comprises removing from a body.