JPH07245034A - Contact structure of switch and contact structure of switch matrix - Google Patents

Abstract

PURPOSE:To prevent the attachment of an oil film and a dirt, by forming a movable contact terminal on one side dielectric layer, and generating a scratch to separate a space where contacts are provided, from a space where the driving mechanism of the movable contact terminal is provided, or an external space. CONSTITUTION:To a movable contact terminal 1, a piston 42 to be a part of an actuator 4 is installed through a dielectric sheet 3, an adhesive layer 45, and a high rigidity of square form plate 43 which consists of a metal of a synthetic resin. The terminal 1 has the elasticity and the flexibility, minute conductive projections 12 are formed on one side of the contact terminal 1, and plural recessed and projecting grooves 44 are formed to the side connecting the plate 43 to the dielectric sheet 3. As a result, a multiple point contact is realized at the contacts. And the distance between the minute conductive projections 12a and 12b is made L' intially, and made L'' by the contact, and then made L as the contact is progressed further, and a scratch to separate a space where contacts are provided, from a space where the driving mechanism of the movable contact terminal is provided, or an external space, is generated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a switch contact structure suitable for use in a switch matrix, a multiplexer, a crosspoint switch, etc.
The contact structure that can be reliably turned on / off, can handle high-speed signals, has extremely high mounting density, has excellent electrical performance in terms of both direct current and alternating current, and has a low manufacturing cost. And a contact structure of a switch matrix.

[0002]

BACKGROUND OF THE INVENTION Generally, a so-called mechanical relay or reed relay is used when one signal line is connected or disconnected by electrical control. Also, these relays
It is also used in multiplexers and switch matrices that connect and switch multiple signal lines.

The mechanical relay opens and closes contacts by driving an armature with an electromagnet, has a small transmission loss (some of which is 5 GHz or more), and has a large rated current (some of which has several tens of amps or more). However, there is an advantage that almost no thermoelectromotive force is generated. However, since this relay has a large shape, it has a problem that it is not suitable for mounting in a narrow area or for high-density mounting in a multiplexer, a switch matrix or the like.

The reed relay encloses a reed (tongue) -shaped metal piece in a glass tube and controls the electromagnetic field outside the tube to drive the reed. The reed relay is more durable than a mechanical relay. Is excellent. However, since the leads are magnetic, the loss due to the skin effect is large at high frequencies. Moreover, the capacitance of the contact portion is large. In order to reduce this, the gap at the contact portion may be reduced, but if it is too small, isolation cannot be obtained. Further, a DC error (voltage, current error) occurs due to the thermoelectromotive force due to the dissimilar metal joint. Although the shape of the reed relay is not as large as that of the above mechanical relay, the switch portion needs to have a length of about 7 mm due to its structure. Therefore, there is a limit in implementing high-density mounting in a multiplexer, a switch matrix, or the like. Especially IC
In a tester or a DC parametric tester, when it is desired to mount the reed relays at a high density, the layout and path configuration are optimized to alleviate the above inconvenience to some extent.

A conventional switch or switch matrix,
Although a semiconductor switch is often used for a multiplexer or the like, the semiconductor switch has a larger on-resistance than a mechanical relay or a reed relay, and various characteristics of the switch are unstable with respect to temperature changes.

Therefore, in the IC tester and the DC parametric tester, since it is necessary to place importance on reliability, throughput, test performance, etc., the semiconductor switch cannot be used, and a mechanical relay or a reed relay is exclusively used. . Incidentally, in the IC tester and the like, reliability is enhanced by a method of turning on / off the reed relay by dry switching. In particular, the reed relay is used in the interface portion of the front end with the object to be measured, because strict accuracy is required for reliability and throughput and high packaging density is required.

In addition, a multiplexer for handling high frequencies,
When the switch matrix, crosspoint switch, etc. are configured by relays, patterns and cables are connected between the relays. However, in the case of using this connecting means, since the connection point between the electrical contact and the relay is separated, the off switch becomes a stub, impedance matching is broken, and the frequency characteristic is deteriorated. Under these circumstances, in the reed relay, it is considered that the practical range is about 200 to 300 MHz for a 1: 4 multiplexer in consideration of the contact resistance and the effect of the skin effect.

[0008]

SUMMARY OF THE INVENTION The present invention has been proposed to solve the above problems, and one of its objects is to provide a reliable switch and switch matrix capable of performing reliable on / off. It is to provide the contact structure of. Another object of the present invention is to provide a contact structure for a switch, which has a packaging density extremely higher than that of a conventional one. Still another object is to provide a contact structure of a switch and a switch matrix, which has excellent electrical performance both in terms of direct current and alternating current. In addition, it is another object of the present invention to provide a switch and a contact structure of a switch matrix that can handle high-speed signals and have a low manufacturing cost.

[0009]

SUMMARY OF THE INVENTION A contact structure of a switch according to the present invention comprises a static contact terminal formed on a first dielectric layer having a conductor pattern forming a signal line, and a second contact formed on a second dielectric layer. A movable contact terminal facing the stationary contact terminal, a drive mechanism for moving the movable contact terminal to the stationary contact terminal side to short-circuit both contact terminals, and a movable mechanism for moving the movable contact terminal to the stationary contact terminal side. , A drive mechanism for short-circuiting both terminals, and a stationary contact terminal formed on the first dielectric layer and a second dielectric layer provided with a conductor pattern forming a signal line. A movable contact terminal formed to face the stationary contact terminal, a drive mechanism for moving the movable contact terminal to the stationary contact terminal side to short-circuit both contact terminals, and the movable contact terminal to the stationary contact terminal side. Move to both ends A drive mechanism for short-circuiting, it is characterized in comprising a. That is, in the present invention, a signal line that is short-circuited when the movable contact terminal is driven may be formed on at least one of the first dielectric layer and the second dielectric layer (note that the signal line is short-circuited). Of course, the signal line may be formed on both the first and second dielectric layers).

In the present invention, the movable contact terminal is attached to the drive mechanism via the second dielectric layer. As the drive mechanism, any means can be adopted as long as it can press the movable contact terminal against the stationary contact terminal and short-circuit the stationary contact terminal. Of course, the movable contact terminal can be separated from the stationary contact terminal in response to the control signal, and the short circuit between the stationary contact terminal and the movable contact terminal can be released. As a means for performing such a short circuit and a short circuit release, an electromagnetic drive mechanism (for example,
It is possible to use a piston provided with a permanent magnet on the shaft portion of the solenoid coil and sliding the piston along the shaft.

This type of electromagnetic drive mechanism is extremely fine (length, width, and thickness are 0.5 mm and 0.5 m, respectively) by the film technology and pattern processing technology that are currently known.
m, about several mm) can be made. The size of this drive mechanism is extremely small, so power consumption is 1 /
It can be about 10 W or less.

Further, in the contact structure of the present invention, the movable contact terminal can be constituted by a conductor pattern having a plurality of minute fine conductor projections formed on its surface. These minute conductor protrusions ensure reliable multipoint contact between the movable contact terminal and the stationary contact terminal, and realize highly reliable on / off. Various shapes such as a hemispherical shape and a mushroom shape are adopted as the shapes of the fine conductor protrusions.

If the diameter of the fine conductor projections is too large, the number cannot be secured and the effect of multipoint contact cannot be sufficiently exhibited, and if it is too small, there is a problem that the manufacturing cost increases.
Therefore, the thickness is preferably 5 to 500 μm, more preferably 10 to 100 μm. Further, if the density is too high, the effect of multipoint contact reaches a ceiling, and if it is too low, the effect of multipoint contact is not exhibited. Therefore, the density is preferably about 15 μm pitch at minimum when converted to pitch.
The maximum pitch is appropriately determined according to the size of the contacted conductor.

Further, the stationary contact terminal formed by the fine conductor projection is brought into contact with the movable contact terminal formed by the curved surface (semi-cylindrical shape, semi-elliptic shape, hemispherical shape, semi-elliptical shape, etc.) to the static contact terminal formed by the plane. Scratch against
The effect can also be produced, and the contact between both terminals becomes more reliable. In particular, when the second dielectric layer is made of a material such as PTFE having high elasticity, the scratching is performed more efficiently. Further, an elastic body can be provided on the opposite side of the surface of the second dielectric layer on which the conductor pattern is formed.

The scratch effect is obtained by making the fine conductor protrusions mushroom-shaped or columnar so that the tips of the fine conductor protrusions can be elastically deformed in a direction parallel to the contact surface, and when the switch is turned on, the movable contact terminal is provided. The pressure on the contact surface between the stationary contact terminal and the stationary contact terminal is not uniform over the entire contact surface, so that the pressure can be further increased.

In the present invention, a plurality of the stationary contact terminals are arranged on the first dielectric layer with a space therebetween, and each of the terminals forms a part of a conductor pattern forming a signal line, and the stationary contact terminals are connected to the movable contact terminals. The plurality of stationary contact terminals can be short-circuited to establish electrical continuity between the terminals. On the contrary, a plurality of the movable contact terminals are arranged on the second dielectric layer with a space therebetween,
Each of the terminals forms a part of a conductor pattern forming a signal line,
It is also possible to short-circuit the stationary contact terminal and the plurality of movable contact terminal terminals so that the terminals are electrically connected.

Further, at least one of the surface of the first dielectric layer opposite to the mounting surface of the stationary contact terminal and the surface of the second dielectric layer opposite to the mounting surface of the movable contact terminal. It is possible to provide a conductor layer to be a signal line, a ground surface, a guard surface, etc.

Further, the first dielectric sheet and the second dielectric sheet
The dielectric sheet of (1) is laminated to form a space in which the second contact terminal can move, and the drive mechanism is formed in a substrate laminated on the second dielectric sheet. It is also possible to form a switch mechanism by electromagnetic driving, electrostatic driving, or the like in a laminated body composed of the second dielectric sheet and the substrate.

For example, the driving mechanism may include a hole formed in the second dielectric layer, a solenoid pattern spirally stacked around the hole, and the movable pattern supported in the hole. The electromagnetic actuator may include a piston that moves the movable contact terminal.

With respect to the second dielectric layer, the relative dielectric constant at 1 MHz by the resonance perturbation method is 6.0 or less, the dielectric loss tangent at 1 MHz by the resonance perturbation method is 0.1 or less, and the volume resistivity is 10 or less. By setting the resistance to ¹⁴ Ω · cm or more, it is possible to improve the DC characteristics and the AC characteristics. As such a second dielectric layer, a layer made of polytetrafluoroethylene (PTFE) resin having elasticity and flexibility is preferably used. Porous PTFE (P-PTFE) is more preferably used as the PTFE.

Particularly, by using the second dielectric layer having a low dielectric constant (for example, the relative dielectric constant at 1 MHz by the resonance perturbation method is 1.6 to 2.1), a signal of a high band frequency (about 10 GHz) is obtained. Can handle. Further, by using the second dielectric layer having a large volume resistivity, the withstand voltage can be set to 500 V or more, and the leakage current can be set to 100 fA, further 10 to 1 fA.

In the present invention, a switch matrix and a multiplexer can be constructed by arranging the contact structures of the switches in a matrix. In this case, a plurality of movable contact terminals can be formed on the second dielectric layer to form a multiplexer or a switch matrix.
As a result, the space in which the contacts are present can be blocked from the space in which the drive mechanism for the movable contact terminals is provided and the external space, so that there is no inconvenience that oil films, dust, etc. adhere to the contacts. Further, since the switch elements constituting the switch matrix and the multiplexer can be collectively manufactured, the manufacturing process is simplified as compared with the case where a plurality of independent switches are collectively assembled.

The contact structure of the switch matrix of the present invention connects or disconnects a plurality of input lines and output lines at each intersection to selectively switch input / output lines. And the output line are formed by a conductor pattern arranged on one or more dielectric layers, and the connection or disconnection at the intersection of the input line and the output line is realized by the switch structure already described. It is characterized by The term "one or more dielectric layers" as used herein means a dielectric layer different from the first dielectric layer, the second dielectric layer, or the first and second dielectric layers. (So to speak, it may be a third dielectric layer).

In this case, the contact mechanism of the switch matrix has a first switch for connecting or disconnecting the input line and a second switch for connecting or disconnecting the output line and the output line at each intersection. Switch,
The third switch includes a third switch for connecting or disconnecting the input side terminal of the first switch and the output side terminal of the first switch, and the first to third switches have the switch structure described above. It can also be realized.

It is also possible to provide at least two movable contact terminals in one drive mechanism and simultaneously turn on / off a plurality of contacts by one drive mechanism. This allows
For example, when the first to third switches are operated by one driving mechanism, they can be effectively applied to a switch matrix.

In the present invention, since the stationary contact terminal can be integrally formed with the conductor pattern forming the signal line to or from the stationary contact terminal, the stub of the switch that is turned off can be made extremely small. Because you can
The circuit can be designed without impairing the impedance matching of the signal line.

[0027]

Embodiments of the present invention will be described below with reference to the drawings. It should be noted that the characteristic portions are exaggerated in FIGS. 1 to 8 for the sake of explanation, and the scale of each portion is different from the actual scale.

FIG. 1 is an explanatory view showing an embodiment of the contact structure of the present invention. In the figure, the movable contact terminal 1 is composed of a conductor pattern 11, a fine conductor protrusion 12, a plating layer 13 and an auxiliary film 14, and is on the surface of the second dielectric layer (here, the dielectric sheet 3). Is formed as follows. That is, P- having elasticity and flexibility
A conductor pattern 11 made of Cu is laminated on one surface of the dielectric sheet 3 made of PTFE resin. The conductor pattern 11 has a mushroom-shaped minute conductor protrusion 1 made of Ni.
2 is formed, and a plating layer 13 made of a rhodium alloy, an indium alloy, a palladium alloy, or the like is further formed on the surface of the fine conductor protrusion 12. Since these alloys have high hardness, they are suitable as contact metals for relays, and high durability of the contacts is realized. Further, in the figure, the periphery of the fine conductor projection 12 is surrounded by an auxiliary film 14 made of a synthetic resin such as polyimide.

On the other hand, in FIG. 1, the stationary contact terminal 2 is a conductor pattern 2 made of Cu on one surface of a circuit board 104 (here, a plate made of PTFE resin) having high rigidity.
1 (consisting of 2a to 2c in the figure) are stacked. On the surface of the conductor pattern 21, a plated layer 2 made of a rhodium alloy, an indium alloy, a palladium alloy, or the like is formed.
2 is formed. As will be described later (see FIGS. 5 and 6), the circuit board 104 includes the first dielectric layer (PTF).
E resin layer 105) / ground plane 106 / second dielectric layer (PTFE resin layer 107) has a laminated structure, and another conductor pattern 2c is formed on the surface opposite to the conductor pattern 2, and this conductor pattern is formed. 2c and the conductor patterns 2a and 2b are electrically connected via a via hole 23.

The movable contact terminal 1 is provided with an actuator 4 through a dielectric sheet 3, an adhesive layer 45, and a highly rigid quadrangular plate 43 made of metal or synthetic resin in this order.
A piston 42 forming a part (movable part) (described later) is attached. In this embodiment, the dielectric sheet 3 has elasticity and flexibility, and the minute conductor protrusions 12 are formed on one of the contact terminals (the movable contact terminal 1 in the figure), and the dielectric material of the plate 43 is used. Since a plurality of concave-convex grooves 44 are formed on the side to be joined to the sheet 3, multi-point contact at the contact point is surely performed and a scratch effect is also exerted, so that reliable electrical connection is realized. It should be noted that the uneven grooves are shown as a plurality of parallel triangular grooves in FIG. The grooves may be formed vertically and horizontally, and the shape thereof is not limited to a triangle, and various shapes such as a trapezoid, a rectangle, and a semicircle can be used.

The mechanism for causing the scratch will be described below. In FIG. 2A, it is assumed that the contact surface of the movable contact terminal 1 has a convex shape and the distance between the minute conductor protrusions 12a and 12b on the peripheral surface is L'before the contact is started. Here, it is assumed that the static contact terminal 2 of the circuit board 104 contacts the minute conductor protrusions 12a and 12b. In the state shown in FIG. 2B, the minute conductor protrusions 12a, 1
The distance between 2b becomes L ″, and when the contact progresses further, as shown in FIG.
As shown in (C), the distance between the vertices of the fine conductor protrusions 12a and 12b is L. In this way, the distance between the minute conductor protrusions changes as L '→ L ″ → L (L ′ <L ″ <L), so that scratches occur and the contact is perfect.

That is, for example, dust or the like is included in the minute conductor protrusion 1.
Even if it exists between 2a and 12b and the terminal pattern, as shown in FIGS. 3A and 3B, an oxide film, a sulfide film,
The oil film, dust, etc. are scraped by the scratch effect, so that highly reliable contact can be obtained.

The scratch is shown in FIGS. 4 (A) and 4 (B).
It can also be generated by a mechanism as shown in. 1A and 1B, it is assumed that the movable contact terminal 1 is flat and that the synthetic resin elastic body E is provided on the lower surface thereof. In this case, the distance between the minute conductor protrusions that was L at the start of contact (see FIG. 11A) is changed to L after the contact is finished (see FIG. 12B). , 12b is deformed into a convex shape, which is L '. That is, the distance between the minute conductor protrusions is L →
As shown in FIG. 3 (A),
As in the case of (B), scratches occur and the contact is perfect. It is considered that the mechanisms shown in FIGS. 4A and 4B also occur in the contacts shown in FIGS. 2A to 2C.

FIG. 5 is an exploded explanatory view showing a membrane switch (planar switch) to which the contact structure of FIG. 1 is applied. In the figure, an electromagnetic actuator 4 is built in a square opening 102 at the center of a substrate 101 made of ceramic. This actuator 4 has a solenoid coil 41 and a piston 42 made of a permanent magnet as its constituent elements. By changing the direction of the magnetic field of the coil 41 by external control, the piston 42
Can be appropriately reciprocated in a direction perpendicular to the surface of the substrate 101. The electromagnetic actuator 4 can be easily manufactured by the current film technology and pattern processing technology with a size of about 0.5 mm × 0.5 mm and a thickness of several mm.

As described above, the square plate 43 for supporting the contact terminal 1 via the dielectric sheet 3 is attached to the tip of the piston 42, and the uneven groove 44 of the plate 43 is formed. The dielectric sheet 3 is bonded to the surface of the movable contact terminal 1 through the adhesive layer 45, and the movable contact terminal 1 is attached to the position corresponding to the plate 43. The plate 43 is sized to be accommodated in the opening 102.

The substrate 10 of the dielectric sheet 3
On the side opposite to 1, a circuit board 104 is provided via an insulator (having an opening having a size through which the movable contact terminal 1 passes) 103 made of PTFE resin.
As described above, the circuit board 104 has the ground plane 1 made of Cu by the PTFE resin layers 105 and 107.
It has a laminated structure in which 06 is sandwiched. Insulator 10
The stationary contact terminal 2 is formed on the PTFE resin layer 105 located on the third side.

Here, the stationary contact terminal 2 is composed of a pattern 2a and contact patterns 2b and 2b which form a matrix row. In addition, the other PTFE resin layer 107,
Conductor pattern 2c made of Cu forming a matrix row
Is formed, and the conductor pattern 2c is electrically connected to the contact patterns 2b, 2b through the via hole 23. And
Dielectric sheet 3, insulator 103, circuit board 1
04, the actuator 4 is covered with a cover plate 108 made of PTFE resin.

FIG. 6 is an explanatory cross-sectional view of the assembly of the membrane switch shown in FIG. FIG. 6 is an explanatory view assuming a switch matrix, and only two of the plurality of switch elements are shown (note that one contact A is on and the other contact B is off). A drive circuit pattern 110 for operating the actuator 3 is formed outside the surface of the substrate 101 opposite to the surface on which the opening 102 is provided, and the drive transistor 111 is attached to the circuit pattern 110. Has been.

In this embodiment, especially the substrate 101
Of the ceramic layer (11
2) / Ni plating layer (113) / ceramic layer (11
It has a multilayer structure of 4), and the Ni plating layer 115 is formed on the inner side surface thereof. These Ni plating layers 11
Nos. 3 and 115 are not required for switch operation, but act as electromagnetic shields. A Ni plating layer 116 is also formed on the inner surface of the substrate 101 on the side where the opening 102 is not provided.
The Ni plating layer 116 is provided to magnetically attract the end surface of the flange portion 46 at the end opposite to the mounting end of the plate 43 of the piston 42 when it is off, and this magnetic attraction reduces the drive power. Planned.

The greatest feature of the membrane switch is that
A wiring pattern and a switch terminal, which are indispensable when mounting the switch element on a circuit board, can be integrated, and a multi-contact membrane switch can be easily configured by devising the wiring pattern.

7 and 8 show a standard SMU (Sour).
I. ce Measurement Unit). M.
S. M. (Integrated Membrane
Movable switch terminal and I.S. M. S. M. The circuit configuration of is shown. As shown in FIG. 7, four independent movable contact terminals 1A to 1D are formed on one plate 43 via the dielectric sheet 3, and one actuator 4 simultaneously turns on / off four contact points. be able to. This allows
As shown in FIG. 8, connection / disconnection between two channels in the row direction (each channel is composed of signals of guard G, source S, force F, guard G) and two channels in the column direction can be performed. . In this case, since the ground plane 106 shown in FIGS. 1 to 6 can be used as a guard plane, it is possible to turn on / off a very good DC signal.

In the circuit of FIG. 8, if the pattern processing dimension is 0.2 mm, it is 4 mm ×
One element can be mounted in an area of 6.6 mm. Moreover, since the delivery patterns are integrated, the matrix elements are connected without waste in the row direction and the column direction, and high-density mounting is realized. In particular, with the latest technology, since the pattern processing dimension can be set to 0.1 mm, higher density mounting is also possible.

In the conventional set of switch elements (reed relays and mechanical relays), no matter how well the delivery pattern is impedance-matched, as long as the switch is sealed as a component, stubs are generated in each element. It is unavoidable that the

For example, in the case of a multiplexer of about 1: 2, it is possible to maintain the transmission characteristic by adding a compensation circuit for canceling the influence of the generated stub, but a multi-channel switch matrix is used. When configured, the effect of the above stub cannot be canceled even by the compensation circuit, and the wafer scale
It is not possible to obtain a multi-channel impedance-matched matrix other than integration.

On the other hand, the I.V. to which the contact structure of the present invention is applied is M. S. M. By using, it is possible to construct a stubless switch matrix while maintaining impedance matching.

FIG. 9 shows a switch matrix for high-speed signals to which the membrane switch shown in FIGS. 1 and 5 is applied. In the figure, the row direction line is R1,
, R2, ..., and column-direction lines are shown by C1, C2, ..., respectively. At the intersections of the row direction and the column direction, first to third switches that operate in complementary pairs are formed. Switch elements αij (i, j = 1, 2, ...) Are provided. In this matrix, R1 and C3
When forming a path in the element α13 at the point of intersection with and the element α22 at the point of intersection of R2 and C2, the line between the row direction and the column direction is closed (the terminals shown in black are short-circuited). , Open the lines in the row and column directions (open the terminals shown in black and the terminals shown in white). Here, all other elements are closed in the row direction and the column direction, and a line between the row direction and the column direction is opened.

In the case of FIG. 9, the right side (the side where R1, R2, ... Is displayed) and the lower side (the side where C1, C2, ... Is displayed) are stubless delivery paths. Is formed. Further, although not shown, two switch elements αij, α′ij (i,
By providing j = 1, 2, ..., On the left side (R1, R
2, the side where the display is not done) and the upper side (C1,
It is also possible to configure so as to be stubless with the side on which C2, ... Is not displayed (however, in practice, this is rare when such symmetry is required).

[0048]

Since the present invention is constructed as described above, the following effects can be obtained.

(1) By forming the movable contact terminal on the second dielectric layer, the space where the contact exists can be cut off from the space in which the drive mechanism for the movable contact terminal is provided and the external space. Therefore, it is possible to prevent the oil film and dust from adhering to the contact portion.

(2) Since the driving mechanism can be manufactured by the film technology and the pattern processing technology, it is possible to manufacture a microminiature switch. In particular, in a switch matrix, a multiplexer, etc., the switch element can be formed at once by the film technology and the pattern processing technology, so that it can be manufactured at low cost.

(3) Since the fine conductor protrusions are formed on the movable contact terminal, reliable connection can be achieved even with a low contact pressure. Further, due to the low contact pressure, etc., it is possible to realize a life equivalent to or longer than that of the reed relay.

(4) By using the second dielectric layer having a low dielectric constant, it is possible to handle a signal in a high band (about 100 GHz or more). Further, by using the second dielectric layer having a large volume resistivity, low leakage (1
Not only 00fA or less, but also 10 to 1 by devising a guard
fA is also possible) can be achieved.

(5) Since the wiring pattern and the switch can be integrated, the stub at the time of turning on and off can be made extremely small. Therefore, impedance matching can be easily achieved, and a high-quality switch matrix or multiplexer can be realized.

[Brief description of drawings]

FIG. 1 is an explanatory view showing an embodiment of a contact structure of the present invention.

2A to 2C are explanatory views showing an example of a scratch action.

3 (A) and 3 (B) are diagrams showing a state of scratching.

4A and 4B are explanatory views showing another example of the scratch action.

5 is an exploded explanatory view of a membrane switch to which the contact structure of FIG. 1 is applied.

6 is an explanatory cross-sectional view of the assembly of the membrane switch shown in FIG.

FIG. 7 is a diagram showing a state in which four independent movable contact terminals are attached to one actuator.

8 is a standard SMU I.S.I. with movable contact terminals attached to the actuator of FIG. M. S. It is a figure which shows M.

9 shows a switch matrix for high-speed signals to which the membrane switch shown in FIGS. 1 and 5 is applied.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Movable contact terminal 11 Conductor pattern 12 Micro conductor protrusion 13 Plating layer 14 Auxiliary film 2 Static contact terminal 21 Conductor pattern 22 Plating layer 23 Via hole 2a Conductor pattern 2b Contact 2c Conductor pattern 3 Second dielectric layer 4 Electromagnetic actuator 41 Solenoid coil 42 Piston 43 Plate 44 Concavo-convex groove 45 Adhesive layer 46 Flange part

Claims (13)

[Claims] 1. A stationary contact terminal formed on a first dielectric layer having a conductor pattern forming a signal line, and a movable contact terminal formed on a second dielectric layer and facing the stationary contact terminal. And moving the movable contact terminal to the stationary contact terminal side,
A contact structure for a switch, comprising a drive mechanism for short-circuiting both contact terminals. 2. A movable contact terminal formed on a second dielectric layer having a stationary contact terminal formed on a first dielectric layer and a conductor pattern forming a signal line and facing the stationary contact terminal. And moving the movable contact terminal to the stationary contact terminal side,
A contact structure for a switch, comprising a drive mechanism for short-circuiting both contact terminals. 3. A switch contact according to claim 1, wherein one or a plurality of minute conductor protrusions are formed on either of the contact surfaces of the stationary contact terminal or the movable contact terminal. Construction. 4. The stationary contact terminals are spaced apart from each other by the first contact.
Of a plurality of conductors arranged on the dielectric layer, each terminal forming a part of a conductor pattern forming a signal line, and the movable contact terminal and the plurality of stationary contact terminals are short-circuited to establish continuity between the terminals. The contact structure of the switch according to any one of claims 1 to 3, wherein 5. A surface of the first dielectric layer opposite to the mounting surface of the stationary contact terminal, and a surface of the second dielectric layer opposite to the mounting surface of the movable contact terminal. The contact structure of the switch according to any one of claims 1 to 4, wherein a conductor layer is provided on the. 6. The first dielectric sheet and the second dielectric sheet are stacked with a space in which the second contact terminal is movable opened, and the drive mechanism is provided with the second dielectric sheet. The switch mechanism is formed in a laminated body formed by the first dielectric sheet, the second dielectric sheet, and the substrate, the switch mechanism being formed in a substrate laminated on the substrate. The contact structure of the switch described in any one of 5 to 5. 7. The drive mechanism includes a hole formed in a substrate, a solenoid pattern formed around the hole, and a piston for moving the movable contact terminal movably supported in the hole. The contact structure of a switch according to claim 6, wherein the contact structure is an electromagnetic actuator provided. 8. The relative dielectric constant of the second dielectric layer at 1 MHz by the resonance perturbation method is 6.0 or less, the dielectric loss tangent at 1 MHz by the resonance perturbation method is 0.1 or less, and the volume resistance is The contact structure of the switch according to any one of claims 1 to 7, wherein the ratio is 10 ¹⁴ Ω · cm or more. 9. The contact structure of a switch according to claim 1, wherein the second dielectric layer is made of elastic and flexible polytetrafluoroethylene resin. 10. A plurality of the stationary contact terminals are formed on the first dielectric layer, and a plurality of the movable contact terminals are formed on the dielectric sheet so as to correspond to the stationary contact terminals, and the plurality of movable contact terminals are formed. The contact structure of the switch matrix according to claim 1, wherein the contact terminal is driven by one of the driving mechanisms. 11. A contact structure of a switch matrix for connecting or disconnecting a plurality of input lines and output lines at each intersection to selectively switch input / output lines, wherein one input line and one output line are provided. It is formed by a conductor pattern arranged on a plurality of dielectric layers, and the connection or disconnection at the intersection of each input line and output line is realized by the switch structure according to claim 1. Switch matrix contact structure. 12. The contact mechanism of the switch matrix comprises a first switch that connects or disconnects the input line and a second switch that connects or disconnects the output line and the output line at each intersection. And a third switch for connecting or disconnecting an input-side terminal of the first switch and an output-side terminal of the first switch, wherein the first to third switches are provided. The switch matrix contact structure according to claim 11, which is realized by the switch structure according to any one of claims 1 to 9. 13. The first, second and third switches operate with one drive mechanism.
The contact structure of the switch matrix described in 2.