JPH07244014A - Pollution degree-measuring apparatus for article surface - Google Patents

Pollution degree-measuring apparatus for article surface

Info

Publication number
JPH07244014A
JPH07244014A JP3514394A JP3514394A JPH07244014A JP H07244014 A JPH07244014 A JP H07244014A JP 3514394 A JP3514394 A JP 3514394A JP 3514394 A JP3514394 A JP 3514394A JP H07244014 A JPH07244014 A JP H07244014A
Authority
JP
Japan
Prior art keywords
particles
measured
measuring
amount
charge amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3514394A
Other languages
Japanese (ja)
Inventor
Chikara Ueno
主税 上野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP3514394A priority Critical patent/JPH07244014A/en
Publication of JPH07244014A publication Critical patent/JPH07244014A/en
Pending legal-status Critical Current

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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE:To simply measure pollution degree of the surface of an object to be measured without using organic solvent by spraying a compressed gas to the surface of the object to be measured, removing chargeable particles, and measuring a charge amount. CONSTITUTION:A contact terminal 5 is brought into contact with a sample component 2, the both are charged, and particles 5 are adhered to the surface of the component 2. They are introduced into a Faraday cage 1, compressed air 10 is sprayed, and only the particles 5 are blown away by a lower wire net 4. Then, an opposite charge amount Q of equal amount to that removed by the particles 5 is retained at the component 2. Thus, the charge amount removed by the removed particles 5 can be indirectly measured. The amount Q is obtained by measuring a potential V across a capacitor (having an electrostatic capacity C) 8 connected to the cage 1 and obtaining it by Q=CV. This method does not use organic solvent, and can obtain a much lower cost a apparatus when compared with a spectral type analyzer.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の技術分野】本発明は、特に小型の物品の汚染度
の測定に適した物品表面の汚染度測定装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an article surface contamination degree measuring apparatus suitable for measuring the degree of contamination of a small article.

【0002】[0002]

【従来の技術】従来、金属部品の洗浄液としてフロン
(特にCFC−113)や四塩化炭素、トリクロロエチ
レン、1,1,1−トリクロロエタンなどの塩素系有機
溶剤が多用されてきた。しかしながら、これらの溶剤は
発ガン性物質あるいはオゾン層破壊物質として、国際的
に使用の規制または中止が求められている。よって、生
産現場においてはこれらの規制対象溶剤を使用しない新
たな洗浄プロセスへの移行を進めている。
2. Description of the Related Art Conventionally, chlorine-based organic solvents such as Freon (particularly CFC-113), carbon tetrachloride, trichloroethylene, and 1,1,1-trichloroethane have been frequently used as cleaning liquids for metal parts. However, these solvents are internationally required to be regulated or discontinued as carcinogens or ozone depleting substances. Therefore, at the production site, we are moving to a new cleaning process that does not use these regulated solvents.

【0003】これに伴い、新たな洗浄プロセスを通過し
た部品の簡便な洗浄度を評価する必要が生じているが、
主に形状が小さく複雑な金属加工部品の表面脱脂洗浄度
の評価方法としては、間接的手法及び直接的手法に大別
できる。間接的手法で代表的なものは、油脂に対して非
常に高い抽出能力を持つ溶剤で、表面の残留油脂分を完
全に抽出して定量評価する方法が挙げられる。この方法
は簡便で、かなり高精度な評価が可能であり、しかも部
品の形状に影響されないなどの長所がある。しかし、抽
出溶剤として使用可能なものは四塩化炭素などの塩素系
有機溶剤に限られるため、塩素系有機溶剤の使用規制に
伴って生産現場での実施が困難になりつつある。
Along with this, it is necessary to evaluate the degree of simple cleaning of parts that have passed a new cleaning process.
The methods for evaluating the degree of surface degreasing and cleaning of metal working parts, which are mainly small in size and complicated, can be roughly classified into an indirect method and a direct method. A typical indirect method is a solvent having a very high extraction ability for fats and oils, and there is a method of completely extracting residual fats and oils on the surface and quantitatively evaluating it. This method has the advantages that it is simple, allows highly accurate evaluation, and is not affected by the shape of the parts. However, since the extractable solvent is limited to a chlorine-based organic solvent such as carbon tetrachloride, it is becoming difficult to implement it at the production site due to the regulation of the use of the chlorine-based organic solvent.

【0004】また直接的手法としては、オージェ電子分
光法、FT−IR法などの分光学的方法が挙げられる
が、測定装置が大きく高価であり簡便性に欠けるため生
産現場での使用は困難であった。
Direct methods include spectroscopic methods such as Auger electron spectroscopy and FT-IR. However, since the measuring device is large and expensive and lacks in simplicity, it is difficult to use it at a production site. there were.

【0005】[0005]

【発明が解決しようとする課題】上述したように、従来
の表面脱脂洗浄度の評価装置は、小さく複雑な形状の金
属部品に対しては溶剤抽出法以外に簡便な物品の表面汚
染度測定装置がないと言うという問題があった。
As described above, the conventional surface degreasing and cleaning degree evaluation apparatus is a simple apparatus for measuring the surface contamination degree of articles other than the solvent extraction method for small and complicated metal parts. There was a problem saying that there was no.

【0006】本発明は上記問題点に鑑みてなされたもの
で、有機溶剤を使用することなく、非測定物表面の汚染
度を簡便に測定できる物品の表面汚染度測定装置を提供
する事を目的とする。
The present invention has been made in view of the above problems, and an object of the present invention is to provide an apparatus for measuring the surface contamination level of an article, which can easily measure the contamination level of the surface of a non-measurement object without using an organic solvent. And

【0007】[0007]

【課題を解決するための手段及び作用】上目的を達成す
るために、本発明は帯電可能な粒子を接触させた被測定
物の表面に圧縮した気体を吹き付けて前記粒子を除去す
る第1の手段と、前記被測定物から除去した前記粒子の
帯電量を測定することによって前記被測定物の表面の汚
染度を測定する第2の手段とを具備することを特徴とす
る物品表面の汚染度測定装置を提供するものである。
In order to achieve the above object, the present invention provides a first method for spraying a compressed gas onto the surface of an object to be measured which is in contact with a chargeable particle to remove the particle. And a second means for measuring the degree of contamination of the surface of the object to be measured by measuring the charge amount of the particles removed from the object to be measured. A measuring device is provided.

【0008】ここで、圧縮した気体は装置全体の取扱の
容易性から空気、或いは空気にアルゴン等の不活性ガス
を混合させたものである事が望ましい。また、帯電した
粒子はFe等の金属を中心にして樹脂被膜で表面を保護
したものが測定感度が高くできるので望ましい。
Here, the compressed gas is preferably air, or a mixture of air and an inert gas such as argon, from the viewpoint of easy handling of the entire apparatus. Further, it is desirable that the charged particles have a resin coating centered on a metal such as Fe because the surface of the charged particles is protected because the measurement sensitivity can be increased.

【0009】[0009]

【実施例】本発明の詳細を実施例を用いて説明する。図
1に実施例に使用した表面汚染度測定装置を示した。1
は、測定部の本体となる金属製のファラデーケージであ
る。この内部には圧縮空気10の吹き出し用ノズル6と
連結して円錐状の空洞9が形成されている。3は被測定
物としての試料部品2を保持する金網ホルダーであり、
ファラデーケージ1に電気的に接続されると共に空洞9
の出口に形成されている。4は吹き飛ばされた接触粒子
5の電荷を受けとるための金網である。
EXAMPLES Details of the present invention will be described with reference to examples. FIG. 1 shows a surface contamination degree measuring device used in the examples. 1
Is a metal Faraday cage that serves as the main body of the measurement unit. Inside this, a conical cavity 9 is formed in connection with the nozzle 6 for blowing out the compressed air 10. 3 is a wire mesh holder for holding a sample part 2 as an object to be measured,
Cavity 9 electrically connected to Faraday cage 1
Is formed at the exit of. Reference numeral 4 is a wire net for receiving the electric charge of the contact particles 5 blown off.

【0010】以下、測定原理を図1を参照して説明す
る。接触粒子5と試料部品2とを接触させると両者は帯
電し接触粒子5は部品表面に付着する。これらをファラ
デーケージ1に入れ圧縮空気10を吹き付け、下部の金
網4により接触粒子5のみを吹き飛ばすと、試料部品2
には接触粒子5が持ち去ったのと等量で逆の電荷量Qが
残る。これにより除去した接触粒子5が持ち去った電荷
量を間接的に測定することが可能である。電荷量Qはフ
ァラデーケージに接続したコンデンサ(静電容量C)8
の両端の電位Vを測定し、Q=CVとして求められる。
ここでは、ファラデーケージ1およびノズル6から第1
の手段が構成され、また、金網4、コンデンサ8、この
両端の電圧を測定した結果から電荷量Qを算出する上述
の測定系から第2の手段が構成されている。
The measurement principle will be described below with reference to FIG. When the contact particles 5 and the sample part 2 are brought into contact with each other, both are charged and the contact particles 5 adhere to the surface of the part. When these are placed in a Faraday cage 1 and compressed air 10 is blown, and only the contact particles 5 are blown off by the lower wire net 4, the sample part 2
, The amount Q of charges opposite to that which the contact particles 5 have carried away remains. As a result, it is possible to indirectly measure the amount of charge carried away by the removed contact particles 5. The amount of charge Q is the capacitor (electrostatic capacity C) connected to the Faraday cage 8
The electric potential V at both ends of is measured to obtain Q = CV.
Here, from the Faraday cage 1 and the nozzle 6 to the first
In addition, the wire mesh 4, the capacitor 8 and the above-mentioned measurement system for calculating the charge amount Q from the result of measuring the voltage across the wire mesh 4 and the capacitor 8 constitute the second means.

【0011】実際にマグネトロン用アノードの構成部品
の一つであるO−リング(無酸素銅、外径8.0mm ×内径
7.2mm 、厚さ0.8mm )に加工油(鉱物油)が付着したも
のを被測定物として、この表面汚染度測定装置を用いて
洗浄度評価を行った。
An O-ring (oxygen-free copper, outer diameter 8.0 mm x inner diameter), which is one of the components of the anode for the magnetron, is actually used.
Using the surface contamination degree measuring device, the cleaning degree was evaluated by using the measurement oil (mineral oil) adhered to 7.2 mm, thickness 0.8 mm) as the object to be measured.

【0012】O−リングの洗浄条件等は以下の通りであ
る。 (1)洗浄条件 a.洗浄液 :パラフィン系およびナフテン系混
合溶剤 b.洗浄条件 :50℃、超音波×2分、100℃
×2分乾燥 (2)洗浄度評価条件 a.接触粒子 :Fe粒子(アクリル樹脂コーティ
ング品) b.その粒径 :50〜100 μm c.その粒子全重量:10g d.ブロー時間 :30秒 e.試料部品数 :5個 この表面汚染度測定装置で得られた帯電量の値と、同じ
条件で洗浄した試料を四塩化炭素抽出−赤外分光分析に
より残留油分量を定量した結果を図2に示す。
The conditions for cleaning the O-ring are as follows. (1) Cleaning conditions a. Cleaning solution: Paraffin-based and naphthene-based mixed solvent b. Cleaning conditions: 50 ° C, ultrasonic wave x 2 minutes, 100 ° C
× 2 minutes drying (2) Cleaning degree evaluation conditions a. Contact particles: Fe particles (acrylic resin coated product) b. Its particle size: 50-100 μm c. Total weight of the particles: 10 g d. Blow time: 30 seconds e. Number of sample parts: 5 Fig. 2 shows the result of quantifying the residual oil content by carbon tetrachloride extraction-infrared spectroscopic analysis of the value of the charge amount obtained with this surface pollution degree measuring device and the sample washed under the same conditions. Show.

【0013】図2において「未洗浄」は被測定物をまっ
たく洗浄していないもの、「洗浄品」は前述した方法に
より洗浄、乾燥を行ったもの、「従来品」は実際の生産
工程において、1,1,1-トリクロロエタン3槽式洗浄装置
で洗浄したものについての結果である。
In FIG. 2, "unwashed" means that the object to be measured has not been washed at all, "washed product" means that the product has been washed and dried by the method described above, and "conventional product" means that in the actual production process. It is a result about what was washed with 1,1,1-trichloroethane three-tank type washing device.

【0014】上記の結果により、帯電量と残留油分量と
は相関があり、被測定物の表面に残っている残留油分量
を赤外分光分析と同程度の高い精度で測定することがで
きる。また、装置自体に光学部品を必要としないために
分光型分析装置と比較して小型で価格も非常に廉価な装
置を提供することができる。更に、小さい複雑な形状を
した金属部品の洗浄度評価を溶剤抽出法と同様に簡便に
行うことが可能である。
From the above results, there is a correlation between the amount of charge and the amount of residual oil, and the amount of residual oil remaining on the surface of the object to be measured can be measured with the same high accuracy as in infrared spectroscopy. In addition, since the device itself does not require optical parts, it is possible to provide a device that is smaller in size and much cheaper than the spectroscopic analyzer. Furthermore, it is possible to easily evaluate the cleaning degree of a metal part having a small and complicated shape as in the solvent extraction method.

【0015】本発明は上記実施例に限定されるものでは
なく、以下のように種々変形して実施することができ
る。被測定物はO−リング以外のゴム製品、プラスチッ
ク製品、或いはコネクタピン等の比較的小さな形状をし
ている金属部品であっても、上記実施例と同様に測定す
ることができる。
The present invention is not limited to the above embodiments, but can be implemented in various modifications as follows. Even if the object to be measured is a rubber product other than the O-ring, a plastic product, or a metal part having a relatively small shape such as a connector pin, it can be measured in the same manner as in the above embodiment.

【0016】接触粒子は、被洗浄物に対して十分小さく
また部品と接触させた際に、なるべく大きい帯電量を示
すものが望ましく、上記実施例で使用したアクリル樹脂
でコーティングされたFe粒子(粒径:50〜100 μm)
などを使用することができる。
It is desirable that the contact particles are sufficiently small with respect to the object to be cleaned and exhibit a large amount of charge when brought into contact with parts. The Fe particles coated with the acrylic resin (particles used in the above examples) Diameter: 50-100 μm)
Etc. can be used.

【0017】更に、上述した実施例では被測定物を洗浄
した後の汚染度を測定したが、本発明の装置によってい
かなる状態の汚染度も測定することができ、例えば洗浄
する前の被測定物の表面汚染度を測定することも可能で
ある。
Furthermore, in the above-mentioned embodiment, the degree of contamination after washing the object to be measured is measured, but the degree of contamination in any state can be measured by the apparatus of the present invention, for example, the object to be measured before washing. It is also possible to measure the degree of surface contamination of.

【0018】[0018]

【発明の効果】本発明の洗浄度評価方法は、被洗浄物に
粒子を混合接触させ、その粒子の帯電量を測定すること
により、有機溶剤を使用することがなく、分光型分析装
置と比較して価格も非常に廉価な装置を提供することが
できる。
EFFECT OF THE INVENTION The cleaning degree evaluation method of the present invention compares particles with a spectroscopic analyzer by mixing and contacting the particles with the object to be cleaned and measuring the charge amount of the particles, without using an organic solvent. Thus, it is possible to provide a device that is very inexpensive.

【0019】[0019]

【図面の簡単な説明】[Brief description of drawings]

【0020】[0020]

【図1】本発明の実施例の断面図FIG. 1 is a sectional view of an embodiment of the present invention.

【0021】[0021]

【図2】本発明の実施例を説明する図FIG. 2 is a diagram illustrating an embodiment of the present invention.

【0022】[0022]

【符号の説明】[Explanation of symbols]

1 ファラデーケージ 2 試料部品 3 金網ホルダー 4 金網 5 吹き飛ばされた粒子 6 ノズル 1 Faraday cage 2 Sample parts 3 Wire mesh holder 4 Wire mesh 5 Particles blown off 6 Nozzle

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】帯電可能な粒子を接触させた被測定物の表
面に圧縮した気体を吹き付けて前記粒子を除去する第1
の手段と、前記被測定物から除去した前記粒子の帯電量
を測定することによって前記被測定物の表面の汚染度を
測定する第2の手段とを具備することを特徴とする物品
表面の汚染度測定装置。
1. A first method for spraying a compressed gas onto a surface of an object to be measured which is brought into contact with chargeable particles to remove the particles.
And the second means for measuring the degree of contamination of the surface of the object to be measured by measuring the charge amount of the particles removed from the object to be measured. Degree measuring device.
JP3514394A 1994-03-07 1994-03-07 Pollution degree-measuring apparatus for article surface Pending JPH07244014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3514394A JPH07244014A (en) 1994-03-07 1994-03-07 Pollution degree-measuring apparatus for article surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3514394A JPH07244014A (en) 1994-03-07 1994-03-07 Pollution degree-measuring apparatus for article surface

Publications (1)

Publication Number Publication Date
JPH07244014A true JPH07244014A (en) 1995-09-19

Family

ID=12433693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3514394A Pending JPH07244014A (en) 1994-03-07 1994-03-07 Pollution degree-measuring apparatus for article surface

Country Status (1)

Country Link
JP (1) JPH07244014A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011510320A (en) * 2008-01-31 2011-03-31 ザ プロクター アンド ギャンブル カンパニー This application claims the benefit of US Provisional Application No. 61/063079, filed Jan. 31, 2008.
CN109444562A (en) * 2018-11-01 2019-03-08 华北电力大学(保定) It is a kind of for measuring the measuring system of grains of sand carrying capacity

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011510320A (en) * 2008-01-31 2011-03-31 ザ プロクター アンド ギャンブル カンパニー This application claims the benefit of US Provisional Application No. 61/063079, filed Jan. 31, 2008.
CN109444562A (en) * 2018-11-01 2019-03-08 华北电力大学(保定) It is a kind of for measuring the measuring system of grains of sand carrying capacity
CN109444562B (en) * 2018-11-01 2021-03-16 华北电力大学(保定) Measuring system and method for measuring sand charge quantity

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