JPH07235281A - D.c. discharge lamp, semiconductor exposure device using this discharge lamp, and projection device - Google Patents
D.c. discharge lamp, semiconductor exposure device using this discharge lamp, and projection deviceInfo
- Publication number
- JPH07235281A JPH07235281A JP6025516A JP2551694A JPH07235281A JP H07235281 A JPH07235281 A JP H07235281A JP 6025516 A JP6025516 A JP 6025516A JP 2551694 A JP2551694 A JP 2551694A JP H07235281 A JPH07235281 A JP H07235281A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- discharge lamp
- tip
- cathode
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Projection Apparatus (AREA)
- Discharge Lamp (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は直流放電灯に係り、特に
光学系と組み合わされて使用されるショートアーク型の
放電灯のようにランプ始動時に高電圧または高圧パルス
を要する直流放電灯および該放電灯を用いた映写装置並
びに半導体露光装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a direct current discharge lamp, and more particularly to a direct current discharge lamp which requires a high voltage or high voltage pulse when starting the lamp, such as a short arc type discharge lamp used in combination with an optical system. The present invention relates to a projection device and a semiconductor exposure device using a discharge lamp.
【0002】[0002]
【従来の技術】従来、この種の直流放電灯は、発光空間
を形成するバルブ内に対向して一対の電極を配置し、希
ガス、水銀またはハロゲン化金属、キセノンガスなどを
封入したものが高効率・高演色性などの特徴を活かし、
各種分野で広く普及している。その中でもアーク長が短
い、いわゆるショートアーク型の直流放電灯は、上記の
特徴に加え点光源に近い特徴を有していることから、光
学系と組み合わせて、半導体露光用,映写用,プロジェ
クター用などの光源として用いられている。2. Description of the Related Art Conventional DC discharge lamps of this type have a pair of electrodes facing each other in a bulb forming a light emitting space and filled with a rare gas, mercury or a metal halide, xenon gas or the like. Utilizing features such as high efficiency and high color rendering,
Widely used in various fields. Among them, the so-called short arc type DC discharge lamp with a short arc length has a feature similar to a point light source in addition to the above features, so it can be used in combination with an optical system for semiconductor exposure, projection, projector use. It is used as a light source.
【0003】ところで、このような直流放電灯は、例え
ば特開昭60−57930号公報に開示されたものがあ
る。この直流放電灯は、コーン状の陰極と先端部が平坦
でテーパ状の形状を有する陽極とが配置されている。By the way, such a DC discharge lamp is disclosed in, for example, JP-A-60-57930. In this DC discharge lamp, a cone-shaped cathode and an anode having a flat tip and a tapered shape are arranged.
【0004】また、特開昭50−28180号公報に開
示された直流放電灯は、図7に示すように陽極1の尖頭
部の円錐角αを80〜100°、陰極2の尖頭部の円錐
角βを60〜80°の範囲に構成し、両極共0.1mm
以上の極率半径で円味を付したものである。In the DC discharge lamp disclosed in Japanese Patent Laid-Open No. 50-28180, as shown in FIG. 7, the conical angle α of the tip of the anode 1 is 80 to 100 °, and the tip of the cathode 2 is The cone angle β of is set in the range of 60-80 °, and both poles are 0.1 mm.
It is rounded with the above radius of curvature.
【0005】なお、このような直流放電灯は、光学系と
組み合わされて使用されるため、ランプ交換時に厳密な
位置調整を必要とし、その交換時間を長く要する。その
ためランプの長寿命化が望まれている。また、用途上か
ら光出力の長時間に亘る安定性も併せて要求される。こ
のようなことから、従来の直流放電灯においては、上記
のものが採用されている。Since such a DC discharge lamp is used in combination with an optical system, strict position adjustment is required at the time of lamp replacement and the replacement time is long. Therefore, it is desired to extend the life of the lamp. In addition, the stability of the optical output over a long period of time is also required from the viewpoint of application. For this reason, the above-mentioned ones are adopted in the conventional DC discharge lamp.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、上記し
た従来の直流放電灯にあっては、寿命の延長は困難であ
る。これは、点灯時間の経過とともに、電極間距離の拡
大による光学系との組合せ時の集光効率の低下、あるい
は電極物質の飛散によるバルブ内面の黒化に伴う光出力
の低下およびバルブ内面の黒化によりバルブ温度が上昇
して歪の増加などの不具合が発生するため、短寿命とな
る問題点がある。However, it is difficult to extend the life of the conventional DC discharge lamp described above. This is because, as the lighting time elapses, the light collection efficiency when combined with an optical system decreases due to the increase in the distance between the electrodes, or the light output decreases due to the blackening of the inner surface of the bulb due to the scattering of electrode material and the blackness of the inner surface of the bulb As a result, the valve temperature rises and problems such as strain increase occur, resulting in a problem of a short life.
【0007】本発明は上述した事情を考慮してなされた
もので、長期間に亘り光出力の低下が少なく、光学系と
組み合わされて使用された場合にも集光効率の低下を防
止し得る直流放電灯および該放電灯を用いた映写装置並
びに半導体露光装置を提供することを目的とする。The present invention has been made in consideration of the above-mentioned circumstances, and it is possible to prevent a decrease in light output over a long period of time and to prevent a decrease in light collection efficiency even when used in combination with an optical system. An object of the present invention is to provide a DC discharge lamp, a projection apparatus using the discharge lamp, and a semiconductor exposure apparatus.
【0008】[0008]
【課題を解決するための手段】上述した課題を解決する
ために、本発明の請求項1に係る直流放電灯は、石英ガ
ラス製バルブの発光空間内に陽極と陰極を対向して配置
した直流放電灯において、上記陽極は胴部と、この胴部
から先端方向に連続するテーパ部と、このテーパ部の先
端に形成した曲面部とを有し、ランプ電流IL (A)、
電極間距離L(mm)、上記陽極の胴部外径D(m
m)、上記曲面部の曲率半径R(mm)としたとき、In order to solve the above-mentioned problems, a direct current discharge lamp according to claim 1 of the present invention is a direct current discharge lamp in which a positive electrode and a negative electrode are arranged facing each other in a light emission space of a quartz glass bulb. In the discharge lamp, the anode has a body portion, a tapered portion continuous from the body portion in a tip direction, and a curved surface portion formed at the tip of the tapered portion, and the lamp current IL (A),
Distance between electrodes L (mm), outer diameter of the body of the anode D (m
m), where R (mm) is the radius of curvature of the curved surface section,
【数3】0.25≦4・IL /πD2 ≦0.45[Formula 3] 0.25 ≦ 4 · I L / πD 2 ≦ 0.45
【数4】0.5R≦D/L≦1.8R の関係を満足することを特徴とする。## EQU4 ## It is characterized in that the relationship of 0.5R≤D / L≤1.8R is satisfied.
【0009】請求項2の直流放電灯は、上記陽極のテー
パ部が直線状をなすことを特徴とする。The DC discharge lamp according to claim 2 is characterized in that the tapered portion of the anode is linear.
【0010】請求項3の直流放電灯は、上記陽極が下方
に配置されるとともに、上記陰極が上方に配置されるこ
とを特徴とする。A DC discharge lamp according to a third aspect of the present invention is characterized in that the anode is arranged below and the cathode is arranged above.
【0011】請求項4の直流放電灯は、上記電極間距離
Lが1〜10(mm)の範囲に設定されたことを特徴と
する。The DC discharge lamp according to claim 4 is characterized in that the inter-electrode distance L is set in a range of 1 to 10 (mm).
【0012】請求項5の直流放電灯は、上記陽極のテー
パ部が60〜120°の範囲の円錐角に形成したことを
特徴とする。The DC discharge lamp according to claim 5 is characterized in that the taper portion of the anode is formed to have a cone angle in the range of 60 to 120 °.
【0013】請求項6の半導体露光装置は、半導体露光
装置本体と、この半導体露光装置本体に請求項1ないし
5のいずれか一に記載の直流放電灯を配置したことを特
徴とする。A semiconductor exposure apparatus according to a sixth aspect is characterized in that a semiconductor exposure apparatus main body and the DC discharge lamp according to any one of the first to fifth aspects are arranged in the semiconductor exposure apparatus main body.
【0014】請求項7の映写装置は、映写装置本体と、
この映写装置本体に請求項1ないし5のいずれか一に記
載の直流放電灯を配置したことを特徴とする。A projection apparatus according to a seventh aspect comprises a projection apparatus main body,
The DC discharge lamp according to any one of claims 1 to 5 is arranged in the main body of the projection apparatus.
【0015】[0015]
【作用】上記の構成を有する本発明の請求項1におい
て、陽極は胴部と、この胴部から先端方向に連続するテ
ーパ部と、このテーパ部の先端に形成した曲面部とを有
し、ランプ電流IL (A)、電極間距離L(mm)、上
記陽極の胴部外径D(mm)、上記曲面部の曲率半径R
(mm)としたとき、In the first aspect of the present invention having the above structure, the anode has a body, a taper portion continuous from the body in a tip direction, and a curved surface portion formed at a tip of the taper portion, Lamp current I L (A), inter-electrode distance L (mm), body outer diameter D (mm) of the anode, curvature radius R of the curved surface portion
(Mm),
【数5】0.25≦4・IL /πD2 ≦0.45[Formula 5] 0.25 ≦ 4 · I L / πD 2 ≦ 0.45
【数6】0.5R≦D/L≦1.8R の関係を満足するようにしたので、点灯時間の経過に伴
って発生する陽極先端部の損傷を防止でき、電極間距離
の拡大およびバルブ内面への黒化物の飛着も軽減され、
その結果ランプ寿命を延命することができる。Since the relationship of 0.5R ≦ D / L ≦ 1.8R is satisfied, damage to the tip of the anode that occurs with the passage of lighting time can be prevented, and the distance between the electrodes can be increased and the bulb can be prevented. The scattering of black matter on the inner surface is also reduced,
As a result, the life of the lamp can be extended.
【0016】請求項2においては、陽極のテーパ部を直
線状としたことにより、アークが安定するとともに、陽
極先端部の局部的な温度上昇を回避することができる。According to the present invention, by making the taper portion of the anode straight, the arc is stabilized and the local temperature rise at the tip of the anode can be avoided.
【0017】請求項3においては、陽極が下方に配置さ
れるとともに、陰極が上方に配置されることにより、陽
極の温度が上昇してもバルブ内の温度分布を均一化させ
ることができ、バルブ内に封入された水銀またはハロゲ
ン化金属の蒸気圧を適正に保つことができる。これによ
り、安定した光出力が得られる。According to the third aspect of the present invention, by disposing the anode on the lower side and the cathode on the upper side, it is possible to make the temperature distribution in the valve uniform even if the temperature of the anode rises. The vapor pressure of mercury or metal halide enclosed in the inside can be maintained appropriately. As a result, a stable light output can be obtained.
【0018】請求項4のように電極間距離Lは1〜10
(mm)の範囲に設定されることが望ましい。As described in claim 4, the distance L between the electrodes is 1 to 10
It is desirable to set in the range of (mm).
【0019】請求項5のように、陽極のテーパ部を60
〜120°の範囲の円錐角に形成することにより、アー
クが安定するとともに、陽極の温度が均一化し、先端部
の局部的温度上昇を回避することができる。According to a fifth aspect, the taper portion of the anode is 60
By forming the cone angle in the range of up to 120 °, the arc is stabilized, the temperature of the anode is made uniform, and a local temperature rise at the tip can be avoided.
【0020】そして、本発明の直流放電灯は、請求項
5,6のように半導体露光装置や映写装置に配置するこ
とが好ましい。The DC discharge lamp of the present invention is preferably arranged in a semiconductor exposure apparatus or a projection apparatus as claimed in claims 5 and 6.
【0021】[0021]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【0022】図1は本発明に係る直流放電灯の一実施例
である超高圧水銀ランプを示す正面図、図2は図1にお
ける陽極を示す拡大図、図3は図1における陰極を示す
拡大図である。FIG. 1 is a front view showing an ultra-high pressure mercury lamp which is an embodiment of a DC discharge lamp according to the present invention, FIG. 2 is an enlarged view showing an anode in FIG. 1, and FIG. 3 is an enlarged view showing a cathode in FIG. It is a figure.
【0023】図1において、超高圧水銀ランプは石英ガ
ラス製のバルブ10を有し、このバルブ10内には、下
方に位置する陽極11および上方に位置する陰極12が
それぞれ発光空間に対向して配置されており、内部には
希ガスと水銀が所定量封入されている。In FIG. 1, the ultrahigh pressure mercury lamp has a bulb 10 made of quartz glass. In the bulb 10, an anode 11 located below and a cathode 12 located above oppose the emission space. The rare gas and mercury are enclosed in a predetermined amount inside.
【0024】陽極11および陰極12は、それぞれ金属
箔13a,13bを介して口金14a,14bと電気的
に接続され、封止部15a,15bにおいて金属箔13
a,13b上で気密に封止されている。The anode 11 and the cathode 12 are electrically connected to the caps 14a and 14b via the metal foils 13a and 13b, respectively, and the metal foil 13 is formed in the sealing portions 15a and 15b.
It is hermetically sealed on a and 13b.
【0025】陽極11はタングステンからなり、図2に
示すように長さ9mm、厚さ0.1mmのタンタル製の
ゲッター16が一体に形成されており、封止部15aに
おいては長さ8mmの石英製のホールディングチューブ
17aがモリブデン板を介して被着されている。金属箔
13aは長さ45mm、幅6mm、厚さ0.026mm
のモリブデンからなり、電極側が電解研磨されている。
金属箔13a,13a間には、長さ37mm、幅7m
m、厚さ1.5mmの石英からなるセパレータ18aが
挟まれている。The anode 11 is made of tungsten, and as shown in FIG. 2, a getter 16 made of tantalum and having a length of 9 mm and a thickness of 0.1 mm is integrally formed. The sealing portion 15a has a quartz length of 8 mm. The holding tube 17a made of aluminum is attached via a molybdenum plate. The length of the metal foil 13a is 45 mm, the width is 6 mm, and the thickness is 0.026 mm.
Made of molybdenum, and the electrode side is electrolytically polished.
37 mm in length and 7 m in width between the metal foils 13a, 13a
A separator 18a made of quartz and having a thickness of 1.5 mm and a thickness of 1.5 mm is sandwiched.
【0026】また、陰極12は図3に示すように封止部
15bにおいて、長さ8mmの石英製のホールディング
チューブ17bがモリブデン板を介して被着されてお
り、金属箔13bは長さ28mm、幅5mm、厚さ0.
026mmのモリブデンからなり、電極側が電解研磨さ
れている。金属箔13b,13b間には、長さ21m
m、幅7mm、厚さ2.0mmの石英からなるセパレー
タ18bが挟まれている。As shown in FIG. 3, the cathode 12 has a sealing portion 15b to which a quartz holding tube 17b having a length of 8 mm is attached via a molybdenum plate, and a metal foil 13b has a length of 28 mm. Width 5 mm, thickness 0.
It is made of molybdenum of 026 mm, and the electrode side is electrolytically polished. 21m in length between the metal foils 13b, 13b
A separator 18b made of quartz and having a size of m, a width of 7 mm, and a thickness of 2.0 mm is sandwiched.
【0027】ところで、陽極11は図4に示すように胴
部11aと、この胴部11aから先端方向に連続する直
線状のテーパ部11bと、このテーパ部11bの先端に
形成した曲面部11cと、リード棒11dとから形成さ
れ、曲面部11cは曲率半径R(mm)をなしている。
そして、陽極11と陰極12との間は、その電極間距離
L(mm)を離間して対向配置されている。As shown in FIG. 4, the anode 11 has a body portion 11a, a linear taper portion 11b continuous from the body portion 11a in the tip direction, and a curved surface portion 11c formed at the tip of the taper portion 11b. , The lead rod 11d, and the curved surface portion 11c has a radius of curvature R (mm).
The anode 11 and the cathode 12 are arranged so as to face each other with a distance L (mm) between the electrodes.
【0028】次に、上記実施例に基づいて、下記の超高
圧水銀ランプ40灯を製作し、点灯寿命試験を実施し
た。Next, based on the above-mentioned embodiment, the following 40 ultra-high pressure mercury lamps were manufactured and a lighting life test was conducted.
【0029】ランプ電流IL (A):20A(50V,
1000W), 電極間距離L(mm):3mm, 陽極の胴部外径D(mm):7,7.5,8,8.5,
9,9.5,10.0,10.5(mm), 陽極のテーパ部角度θ:90°, 陽極の曲面部の曲率半径R(mm):2,2.5,3.
0,3.5,4.0, この40灯のランプを1500時間に亘り、連続点灯し
たところ表1の結果を得た。Lamp current I L (A): 20 A (50 V,
1000 W), distance L between electrodes (mm): 3 mm, outer diameter D of the body of the anode D (mm): 7, 7.5, 8, 8.5
9, 9.5, 10.0, 10.5 (mm), taper angle θ of anode: 90 °, radius of curvature R (mm) of curved surface part of anode: 2, 2.5, 3.
0, 3.5, 4.0, the 40 lamps were continuously turned on for 1500 hours, and the results shown in Table 1 were obtained.
【0030】[0030]
【表1】 [Table 1]
【0031】以上の結果から1500時間点灯後のアー
ク安定性光学系を組み合わせての実用的な露光面照度維
持率70%を基準に判定したところ、胴部外径Dが7.
5〜10.0(mm)で、且つ曲率半径Rが2.5〜
3.5(mm)の間であれば、すなわち、From the above results, when the judgment was made on the basis of a practical exposure surface illuminance maintenance ratio of 70% in combination with the arc stability optical system after lighting for 1500 hours, the outer diameter D of the body portion was 7.
5 to 10.0 (mm) and the radius of curvature R is 2.5 to
If it is between 3.5 (mm), that is,
【数7】0.25≦4・IL /πD2 ≦0.45[Formula 7] 0.25 ≦ 4 · I L / πD 2 ≦ 0.45
【数8】0.5R≦D/L≦1.8R の関係を満足すれば、共に実用的に問題のないことが判
明した。## EQU8 ## If the relationship of 0.5R.ltoreq.D / L.ltoreq.1.8R is satisfied, it has been found that there is practically no problem.
【0032】次に、本実施例の作用を説明する。Next, the operation of this embodiment will be described.
【0033】陽極11は胴部11aと、この胴部11a
から先端方向に連続するテーパ部11bと、このテーパ
部11bの先端に形成した曲面部11cとを有し、ラン
プ電流IL (A)、電極間距離L(mm)、陽極11の
胴部外径D(mm)、曲面部11cの曲率半径R(m
m)としたとき、The anode 11 includes a body 11a and the body 11a.
Has a tapered portion 11b continuous from the front to the tip end and a curved surface portion 11c formed at the tip of the tapered portion 11b. The lamp current I L (A), the inter-electrode distance L (mm), Diameter D (mm), radius of curvature R (m of curved surface portion 11c
m)
【数9】0.25≦4・IL /πD2 ≦0.45[Formula 9] 0.25 ≦ 4 · I L / πD 2 ≦ 0.45
【数10】0.5R≦D/L≦1.8R の関係を満足するようにしたので、点灯時間の経過に伴
って発生する陽極先端部の損傷を防止でき、電極間距離
の拡大およびバルブ内面への黒化物の飛着も軽減され、
その結果ランプ寿命を延命することができる。Since the relation of 0.5R ≦ D / L ≦ 1.8R is satisfied, damage to the tip of the anode that occurs with the passage of lighting time can be prevented, the distance between the electrodes can be increased, and the bulb can be prevented. The scattering of black matter on the inner surface is also reduced,
As a result, the life of the lamp can be extended.
【0034】また、陽極11のテーパ部11bを直線状
としたことにより、アークが安定し、先端部の温度上昇
を回避することができる。Further, by making the taper portion 11b of the anode 11 linear, the arc is stabilized and the temperature rise at the tip can be avoided.
【0035】さらに、本実施例では陽極11が下方に配
置されるとともに、陰極12が上方に配置されることに
より、陽極11の温度が上昇してもバルブ10内の温度
分布を均一化させることができ、バルブ10内に封入さ
れた水銀の蒸気圧を適正に保つことができる。これによ
り、安定した光出力が得られる。Further, in this embodiment, the anode 11 is arranged at the lower side and the cathode 12 is arranged at the upper side, so that the temperature distribution in the bulb 10 is made uniform even if the temperature of the anode 11 rises. Therefore, the vapor pressure of the mercury enclosed in the bulb 10 can be properly maintained. As a result, a stable light output can be obtained.
【0036】上記点灯寿命試験において、電極間距離L
を3(mm)に設定したが、これに限らず電極間距離L
を1〜10(mm)の範囲に設定すれば、同様の効果が
得られる。In the above lighting life test, the distance L between the electrodes
Was set to 3 (mm), but not limited to this, the distance between electrodes L
The same effect can be obtained by setting 1 to 10 (mm).
【0037】また、上記点灯寿命試験において、陽極1
1のテーパ部11bの角度θを90°に設定したが、こ
れに限らず60〜120°の範囲の円錐角に形成すれ
ば、アークが安定するとともに温度が均一化し、陽極1
1の先端部の局部的温度上昇を回避することができる。
ここで、テーパ部11bの角度θが60°未満であれ
ば、陽極11の先端部の温度が異常に上昇し、短時間で
劣化する一方、120°を越えると、アークが不安定
で、且つ温度が不均一になる。In the above lighting life test, the anode 1
Although the angle θ of the tapered portion 11b of No. 1 is set to 90 °, the present invention is not limited to this, and if the conical angle is formed in the range of 60 to 120 °, the arc is stabilized and the temperature is made uniform, so that the anode 1
It is possible to avoid a local temperature rise at the tip of No. 1.
Here, if the angle θ of the tapered portion 11b is less than 60 °, the temperature at the tip of the anode 11 rises abnormally and deteriorates in a short time, while if it exceeds 120 °, the arc is unstable and The temperature becomes uneven.
【0038】なお、ランプ電流IL :20A(25V,
500W)、電極間距離L:3.5(mm)のキセノン
ランプにおいて、上記実施例と同様に陽極11の胴部外
径Dおよび陽極11の曲面部11cの曲率半径Rを可変
とし、1000時間の点灯試験を実施したところ、上記
数1および数2を満足すれば、良いことが判明した。Lamp current I L : 20 A (25 V,
500 W), the distance L between electrodes: 3.5 (mm), the outer diameter D of the body portion of the anode 11 and the radius of curvature R of the curved surface portion 11c of the anode 11 were varied in the same manner as in the above-described embodiment, and 1000 hours When the lighting test of No. 2 was carried out, it was found to be satisfactory if the above-mentioned Formulas 1 and 2 were satisfied.
【0039】また、本発明は上記実施例に限定されるこ
となく、例えばハロゲン化金属を封入した直流点灯用メ
タルハライドランプにも適用できることは勿論である。Further, the present invention is not limited to the above-mentioned embodiment, but it is needless to say that the present invention can be applied to a metal halide lamp for direct current lighting in which a metal halide is enclosed.
【0040】図5は本発明に係る直流放電灯の一実施例
の超高圧水銀ランプを半導体露光装置に適用した例を示
す。図5において、超高圧水銀ランプ20から照射され
た光は、楕円ミラー21および反射ミラー22によりそ
れぞれ反射されて集光レンズ23で集光された後、反射
ミラー24、コンデンサレンズ25を経てフォトレジス
ト26を通過し、さらに縮小投影レンズ27を通ってウ
エハ28上に露光される。FIG. 5 shows an example in which an ultra-high pressure mercury lamp, which is an embodiment of the DC discharge lamp according to the present invention, is applied to a semiconductor exposure apparatus. In FIG. 5, the light emitted from the ultra-high pressure mercury lamp 20 is reflected by the elliptical mirror 21 and the reflection mirror 22, respectively, is condensed by the condenser lens 23, and then passes through the reflection mirror 24 and the condenser lens 25 to be photoresist. Then, it is exposed on the wafer 28 through the reduction projection lens 27.
【0041】図6は本発明に係る直流放電灯の他の実施
例であるキセノンランプを映写装置に適用した例を示
す。図6において、キセノンランプ30から照射された
光は楕円ミラー31により反射されてレンズ32a,3
2bに集光し、このレンズ32a,32bでは集光され
た光を平行光としてフイルム33に透過させた後、拡大
レンズ34を通して拡大し、スクリーン35上にフイル
ム33の画像が投影される。FIG. 6 shows an example in which a xenon lamp, which is another embodiment of the DC discharge lamp according to the present invention, is applied to a projection device. In FIG. 6, the light emitted from the xenon lamp 30 is reflected by the elliptical mirror 31 and is reflected by the lenses 32a, 3a.
2b, and the condensed light is passed through the film 33 as parallel light by the lenses 32a and 32b, and then expanded through a magnifying lens 34 to project an image of the film 33 on a screen 35.
【0042】したがって、上記実施例の超高圧水銀ラン
プを半導体露光装置に、キセノンランプを映写装置にそ
れぞれ適用すれば、照射面の照度の低下が少なく、且つ
安定したアーク状態が得られる。Therefore, if the ultra-high pressure mercury lamp of the above-mentioned embodiment is applied to a semiconductor exposure apparatus and the xenon lamp is applied to a projection apparatus, a decrease in illuminance on the irradiation surface is small and a stable arc state can be obtained.
【0043】[0043]
【発明の効果】以上説明したように、本発明に係る直流
放電灯の請求項1によれば、陽極は胴部と、この胴部か
ら先端方向に連続するテーパ部と、このテーパ部の先端
に形成した曲面部とを有し、ランプ電流IL (A)、電
極間距離L(mm)、上記陽極の胴部外径D(mm)、
上記曲面部の曲率半径R(mm)としたとき、As described above, according to the first aspect of the DC discharge lamp of the present invention, the anode has the body portion, the taper portion continuous from the body portion in the tip direction, and the tip of the taper portion. A curved surface portion formed on the lamp current I L (A), an inter-electrode distance L (mm), an outer diameter D (mm) of the body of the anode,
When the radius of curvature R (mm) of the curved surface portion is
【数11】0.25≦4・IL /πD2 ≦0.45[Formula 11] 0.25 ≦ 4 · I L / πD 2 ≦ 0.45
【数12】0.5R≦D/L≦1.8R の関係を満足するようにしたので、点灯時間の経過に伴
って発生する陽極先端部の損傷を防止でき、電極間距離
の拡大およびバルブ内面への黒化物の飛着も軽減され
る。その結果、長期に亘り高い光出力を維持し、ランプ
を長寿命化することができる。Since the relationship of 0.5R ≦ D / L ≦ 1.8R is satisfied, damage to the anode tip portion that occurs with the passage of lighting time can be prevented, and the distance between electrodes and the bulb can be increased. The splash of black matter on the inner surface is also reduced. As a result, a high light output can be maintained for a long period of time, and the lamp life can be extended.
【0044】請求項2によれば、陽極のテーパ部を直線
状としたことにより、アークが安定し、陽極先端部の局
部的温度上昇を回避することができる。According to the second aspect, by making the taper portion of the anode linear, the arc is stabilized and a local temperature rise at the tip of the anode can be avoided.
【0045】請求項3によれば、陽極が下方に配置され
るとともに、陰極が上方に配置されることにより、陽極
の温度が上昇してもバルブ内の温度分布を均一化させる
ことができ、バルブ内に封入された水銀またはハロゲン
化金属の蒸気圧を適正に保つことができる。これによ
り、安定した光出力が得られる。According to the third aspect, by disposing the anode in the lower part and the cathode in the upper part, it is possible to make the temperature distribution in the valve uniform even if the temperature of the anode rises. The vapor pressure of mercury or metal halide enclosed in the bulb can be maintained appropriately. As a result, a stable light output can be obtained.
【0046】請求項4によれば、電極間距離Lを1〜1
0(mm)の範囲に設定しても、請求項1と同様の効果
がえられる。According to claim 4, the distance L between the electrodes is 1 to 1
Even if it is set in the range of 0 (mm), the same effect as in claim 1 can be obtained.
【0047】請求項5によれば、陽極のテーパ部を60
〜120°の範囲の円錐角に形成することにより、アー
クが安定するとともに温度が均一化し、先端部の温度上
昇を回避することができる。According to the fifth aspect, the taper portion of the anode is 60
By forming the cone angle in the range of up to 120 °, the arc becomes stable and the temperature becomes uniform, and the temperature rise at the tip can be avoided.
【0048】さらに、請求項6や請求項7のように本発
明の直流放電灯を半導体露光装置や映写装置にそれぞれ
適用すれば、照射面の照度の低下が少なく、且つ安定し
たアーク状態が得られる。Furthermore, when the DC discharge lamp of the present invention is applied to a semiconductor exposure apparatus or a projection apparatus as in claim 6 or claim 7, a decrease in illuminance on the irradiation surface is small and a stable arc state is obtained. To be
【図1】本発明に係る直流放電灯の一実施例である超高
圧水銀ランプを示す正面図。FIG. 1 is a front view showing an ultra-high pressure mercury lamp which is an embodiment of a DC discharge lamp according to the present invention.
【図2】上記実施例の陽極を示す拡大図。FIG. 2 is an enlarged view showing an anode of the above embodiment.
【図3】上記実施例の陰極を示す拡大図。FIG. 3 is an enlarged view showing the cathode of the above embodiment.
【図4】上記実施例の陽極および陰極を示す拡大図。FIG. 4 is an enlarged view showing an anode and a cathode of the above embodiment.
【図5】一実施例である超高圧水銀ランプを適用した半
導体露光装置を示す概略図。FIG. 5 is a schematic view showing a semiconductor exposure apparatus to which an ultrahigh pressure mercury lamp according to an embodiment is applied.
【図6】本発明に係る直流放電灯の他の実施例のキセノ
ンランプを適用した映写装置を示す概略図。FIG. 6 is a schematic view showing a projection device to which a xenon lamp of another embodiment of the DC discharge lamp according to the present invention is applied.
【図7】従来の直流放電灯であるショートアーク放電灯
の陽極および陰極を示す拡大図。FIG. 7 is an enlarged view showing an anode and a cathode of a short arc discharge lamp which is a conventional DC discharge lamp.
10 バルブ 11 陽極 11a 胴部 11b テーパ部 11c 曲面部 11d リード棒 12 陰極 13a,13b 金属箔 14a,14b 口金 15a,15b 封止部 10 Valve 11 Anode 11a Body 11b Tapered part 11c Curved part 11d Lead rod 12 Cathode 13a, 13b Metal foil 14a, 14b Base 15a, 15b Sealing part
Claims (7)
と陰極を対向して配置した直流放電灯において、上記陽
極は胴部と、この胴部から先端方向に連続するテーパ部
と、このテーパ部の先端に形成した曲面部とを有し、ラ
ンプ電流IL(A)、電極間距離L(mm)、上記陽極
の胴部外径D(mm)、上記曲面部の曲率半径R(m
m)としたとき、 【数1】0.25≦4・IL /πD2 ≦0.45 【数2】0.5R≦D/L≦1.8R の関係を満足することを特徴とする直流放電灯。1. A direct current discharge lamp in which an anode and a cathode are arranged to face each other in a light emission space of a quartz glass bulb, wherein the anode has a body portion, a taper portion continuous from the body portion in a tip direction, and the taper portion. The lamp current I L (A), the inter-electrode distance L (mm), the outer diameter D (mm) of the body of the anode, and the radius of curvature R (m of the curved surface portion.
m), the following relationship is satisfied: 0.25 ≦ 4 · I L / πD 2 ≦ 0.45 ## EQU2 ## 0.5R ≦ D / L ≦ 1.8R DC discharge lamp.
とを特徴とする請求項1記載の直流放電灯。2. The DC discharge lamp according to claim 1, wherein the tapered portion of the anode has a linear shape.
上記陰極が上方に配置されることを特徴とする請求項1
または2記載の直流放電灯。3. The anode is disposed below, and
The cathode is arranged above.
Alternatively, the DC discharge lamp according to item 2.
の範囲に設定されたことを特徴とする請求項1記載の直
流放電灯。4. The distance L between the electrodes is 1 to 10 (mm).
The direct current discharge lamp according to claim 1, wherein the direct current discharge lamp is set in the range.
の範囲の円錐角に形成したことを特徴とする請求項1ま
たは2記載の直流放電灯。5. The taper portion of the anode is 60 to 120 °.
The DC discharge lamp according to claim 1 or 2, wherein the DC discharge lamp is formed with a cone angle in the range.
装置本体に請求項1ないし5のいずれか一に記載の直流
放電灯を配置したことを特徴とする半導体露光装置。6. A semiconductor exposure apparatus main body, and the semiconductor exposure apparatus main body, wherein the DC discharge lamp according to any one of claims 1 to 5 is arranged.
求項1ないし5のいずれか一に記載の直流放電灯を配置
したことを特徴とする映写装置。7. A projection apparatus main body, and the projection apparatus main body, wherein the DC discharge lamp according to claim 1 is arranged in the projection apparatus main body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6025516A JPH07235281A (en) | 1994-02-23 | 1994-02-23 | D.c. discharge lamp, semiconductor exposure device using this discharge lamp, and projection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6025516A JPH07235281A (en) | 1994-02-23 | 1994-02-23 | D.c. discharge lamp, semiconductor exposure device using this discharge lamp, and projection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07235281A true JPH07235281A (en) | 1995-09-05 |
Family
ID=12168231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6025516A Pending JPH07235281A (en) | 1994-02-23 | 1994-02-23 | D.c. discharge lamp, semiconductor exposure device using this discharge lamp, and projection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07235281A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10261383A (en) * | 1997-03-18 | 1998-09-29 | Ushio Inc | Short arc discharge lamp |
EP1217644A1 (en) * | 2000-12-20 | 2002-06-26 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Short arc high pressure discharge lamp for use in digital projection techniques |
US7388223B2 (en) | 2003-05-28 | 2008-06-17 | Samsung Sdi Co., Ltd. | Flat panel display device and method of fabricating the same |
CN104138952A (en) * | 2013-05-07 | 2014-11-12 | 上海亚尔光源有限公司 | Arc-shaped molybdenum plate and manufacturing method and application thereof |
-
1994
- 1994-02-23 JP JP6025516A patent/JPH07235281A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10261383A (en) * | 1997-03-18 | 1998-09-29 | Ushio Inc | Short arc discharge lamp |
KR100499618B1 (en) * | 1997-03-18 | 2005-10-24 | 우시오덴키 가부시키가이샤 | Short Arc Discharge Lamp |
EP1217644A1 (en) * | 2000-12-20 | 2002-06-26 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Short arc high pressure discharge lamp for use in digital projection techniques |
CN1316550C (en) * | 2000-12-20 | 2007-05-16 | 电灯专利信托有限公司 | Short arc high-pressure discharge lamp for digital projection technique |
US7388223B2 (en) | 2003-05-28 | 2008-06-17 | Samsung Sdi Co., Ltd. | Flat panel display device and method of fabricating the same |
CN104138952A (en) * | 2013-05-07 | 2014-11-12 | 上海亚尔光源有限公司 | Arc-shaped molybdenum plate and manufacturing method and application thereof |
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