JPH07230049A - Driving optical parts - Google Patents

Abstract

PURPOSE:To provide a fresh structure of optical parts having a function to change over an optical waveguide. CONSTITUTION:The optical parts have a stationary electrode 12 which is fixed via an SiO2 layer 15 onto an Si substrate 11 and a moving electrode 13 which is partly fixed via an SiO2 layer 16 onto this Si substrate 11. The moving part 13b of the moving electrode 13 has a cantilever structure fixed at one end. The optical waveguide 14 is arranged on the moving part 13b. The moving part 13b is attracted to the stationary electrode 12 side by electrostatic force when a potential difference is applied between the stationary electrode 12 and the moving electrode 13. As a result, the optical waveguide 14 is displaced and, therefore, the optical waveguide is changed over by utilizing the displacement of its front end 14a.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drive type optical component having an optical waveguide for propagating an optical signal.

[0002]

2. Description of the Related Art FIG. 10 schematically shows a conventional optical waveguide switching mechanism. When selectively optically coupling one optical waveguide 201 of the waveguide substrate 200 to an arbitrary optical waveguide 101 of the connector unit 100, there is a method of mechanically moving the waveguide substrate 110 using an electromagnet or the like. Are known. Conventionally, the optical waveguide is switched by displacing the entire waveguide substrate 200 relative to the connector unit 100 in this way.

[0003]

[Problem to be Solved by the Invention] Connector unit 10
As 0 becomes large in scale, a large-scale driving device for driving the waveguide substrate 200 is required, and since the moving distance also increases, the time spent for switching the optical waveguide also increases. However, the conventional mechanism could not overcome such a problem.

Therefore, the present invention has an object to provide a new structure of an optical component capable of overcoming such problems.

[0005]

A drive type optical component optical waveguide according to the present invention comprises a fixed electrode fixed on a supporting substrate,
The movable electrode, which is disposed adjacent to the fixed electrode and whose placement position is displaced by receiving an electrostatic force (Coulomb force) that acts between the fixed electrode and the fixed electrode, either directly or indirectly And an optical waveguide whose arrangement position is displaced in association with the movement of the movable electrode.

The movable electrode can also be constructed as a cantilever structure having a fixed end fixed to the support substrate and a free end that can be displaced when an electrostatic force is applied. In the case of such a configuration, it is preferable to integrally fix the optical waveguide to the upper part, the lower part or the side part of the movable electrode.

Displacement transmitting means driven by the movable electrode that is displaced is provided between the movable electrode and the optical waveguide.
The optical waveguide may be displaced by this displacement transmitting means.

[0008]

By applying a predetermined voltage to the fixed electrode and the movable electrode, a predetermined charge is accumulated in this portion, and an electrostatic force (Coulomb force) acts during this period. As is well known, when charges having different polarities are applied to the fixed electrode and the movable electrode, an attractive force is generated between them and the movable electrode is attracted to the fixed electrode side. Further, when charges of the same polarity are applied to the fixed electrode and the movable electrode, a repulsive force is generated between them and the movable electrode moves away from the fixed electrode. In the present invention, the movement of the movable electrode that receives such electrostatic force is mainly used to displace the optical waveguide.

[0009]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

<First Embodiment> FIG. 1 shows the appearance of a drive type optical component (hereinafter referred to as an optical component) according to the present embodiment. The optical component 10 includes a fixed electrode 12 and a movable electrode 13 formed of a Si film on a Si substrate 11, and a silica-based optical waveguide 14 is fixed on the movable electrode 13.

The fixed electrode 12 has a rectangular flat plate shape having a thickness of 1.0 μm and a length of about 20 mm in the longitudinal direction, and has a thickness of 0.5 μm of SiO ₂ which functions as an insulating layer.
It is fixed to the surface of the Si substrate 11 via the layer 15.

The movable electrode (free electrode) 13 has a thickness of 0.5.
The base 13a fixed to the surface of the Si substrate 11 via the SiO ₂ layer 16 of μm, and the fixed electrode 12 from the base 13a.
And a movable portion 13b having a small diameter that extends substantially in parallel with. The movable portion 13b is formed integrally with the base portion 13a, projects from the side surface of the base portion 13a, and is wholly floating from the surface of the Si substrate 11. In other words, it has a cantilever structure with one end fixed.
Therefore, the movable portion 13b is in a state of bending when receiving an external force. The thickness of the movable electrode 13 is also 1.0 μm, and as a result, the movable portion 13b and the fixed electrode 12 are
They are arranged at substantially the same height, and are opposed to each other with an interval of about 10 μm and insulated from each other.

The optical waveguide 14 has a core of 5 μm □, a clad of 8 μm thick, and Δn (incremental ratio of the refractive index of the core to the refractive index of the clad) = 0.5%.
It is fixed integrally on the movable portion 13b. The fixed position of the optical waveguide 14 with respect to the movable portion 13b is the same as the movable portion 1
You may fix to the lower part, side part, etc. of 3b.

The operation of the optical component 10 thus constructed will be described. The optical component 10 is driven by using electrostatic force. That is, as shown in FIG. 2A, a DC drive power supply 16 is connected between the fixed electrode 12 and the base 13a of the movable electrode 13, and a potential difference of DC 300 V is applied between the two electrodes. Then, electric charge is charged in each electrode,
An electric field is generated between the fixed electrode 12 and the movable electrode 13, and opposing electrodes attract each other to generate an attractive force.
In this case, this suction force is estimated to be about 0.4 [gf]. The movable portion 13b of the movable electrode 13 receives this suction force and is attracted to the fixed electrode 12 side (FIG. 2 (b),
(See (c)). At this time, since the optical waveguide 14 is also displaced integrally with the movable portion 13b, the position of the tip end portion 14a is changed to that shown in FIG.
It is displaced in the direction of the arrow in (c).

Further, in order to return to the original position, after the voltage application by the DC drive power source 16 is stopped, the fixed electrode 12 and the movable electrode 13 are short-circuited, or they are connected to the ground with each other. Then, the electric charge accumulated in both electrodes is discharged. As a result, the electrostatic force working between the electrodes disappears, and the movable portion 13a of the movable electrode 13 returns to the original state of FIG. 2B due to its own restoring force. As a result of this movement, the tip portion 14a of the optical waveguide 14 also moves to
It is displaced in the direction opposite to the arrow of (c) and returns to the state of FIG. 2 (b).

The optical component 10 has such a tip portion 14 as described above.
The optical waveguide can be switched by using the displacement of a. That is, by arranging one end of the optical waveguide to be coupled with the optical waveguide 14 at a position facing the distal end 14a of the optical waveguide 14, one of the optical waveguides can be selected depending on the displacement position of the distal end 14a. Can be selectively optically coupled with.

In the optical component 10 shown in this embodiment, an example is shown in which the movable electrode 13 is pulled toward the fixed electrode 12 side by utilizing the attractive force of electrostatic force. It is also possible to drive the optical waveguide 14 by utilizing the repulsive force of electrostatic force by giving positive charge or negative charge.
Of course it is possible.

Further, as shown in FIG. 3A, the movable portion 13b of the movable electrode 13 may be arranged in the center and the fixed electrodes 12, 12 'may be arranged on both sides thereof. In this case, by using either one or both of the movable portion 13b and the fixed electrode 12 and the attraction force, and the repulsive force of the movable portion 13b and the fixed electrode 12 ′, as shown in FIG. It may be driven as shown in (c). With this configuration, when the optical waveguides are switched using this optical component, the selection range of the optical waveguides that can be optically coupled is expanded as compared with FIG.

Further, as shown in FIG.
If the movable electrode 17 is provided on the two adjacent side surfaces of and the fixed electrode 18 is arranged at the opposite position,
It is also possible to two-dimensionally control the displacement of the end face position of the optical waveguide 14 in the xy plane.

<Second Embodiment> FIGS. 5A and 5B show another embodiment of the optical component. The optical component 20 shown in FIG. 5 also uses the electrostatic force to displace the optical waveguide 24 as in the first embodiment.

The fixed electrode 22 is made of SiO 2 having a thickness of 0.5 μm.
It is fixed to the surface of the Si substrate 21 via the _two layers 25. A movable electrode 23 is arranged adjacent to the fixed electrode 22. The movable electrode 23 is displaceably supported in a floating state from the surface of the Si substrate 21 by a displacement transmission mechanism described later. The fixed electrode 22 and the movable electrode 23 each have a thickness of 1.0 μm and an operating length of 20 m.
The side surfaces face each other with a gap of m, 10 μm.

The optical component 20 is provided with a displacement transmitting mechanism for transmitting the displacement of the movable electrode 23 between the movable electrode 23 and the optical waveguide 24.

This displacement transmission mechanism has a lever structure, and one end of which is fixed to the movable electrode 23 at the first arm 26a.
And a second arm rotatably supported by the Si substrate 21 on the fulcrum shaft 27, and a third arm 26c supporting the optical waveguide 24 at one end, and the opposing ends are mutually rotated by the connecting shaft 28. It is movably connected. As a result, the displacement of the movable electrode 23 is transmitted to the optical waveguide 24, and the optical waveguide 24 is displaced in the direction of the arrow shown. By adopting such a displacement transmission mechanism having a lever structure, the movement distance of the optical waveguide can be increased as compared with the displacement distance of the movable electrode 23.

The optical waveguide 24 has a core of 0.6 μm, a clad of 2 μm and Δn = 0.4%, and is formed on the lower support 29. A guide shaft 30 is provided on a side portion of the lower support 29, and bearings 31 fixed to the surface of the Si substrate 21 are arranged on both sides of the guide shaft 30. Therefore, when the above-mentioned optical waveguide 24 is displaced, the guide shaft 30 reciprocates in the gap between the two bearings 31, which allows the optical waveguide 24 to move in a substantially parallel state while being positioned. It is a thing.

Reference numeral 36 is a DC drive power source for applying a predetermined charge to the fixed electrode 22 and the movable electrode 23. One end of the DC drive power source 36 may be directly connected to the movable electrode 23, but may be connected to the support shaft 27 as shown. Although other members move when the movable electrode 23 is displaced, the support shaft 27 is immovable, and thus it is preferable to connect to the support shaft 27 in this way. In this case, the first and second arms 26a and 26b connected to the movable electrode 23, and the support shaft 27.
Since they are all made of a material having the same conductivity as the movable electrode 23, there is no problem.

In the present embodiment, the curved waveguide 32 is arranged adjacent to the optical waveguide 24. Bent waveguide 3
2 is formed on the lower support 33, and the lower support 33 is fixed to the surface of the Si substrate 21 via the SiO ₂ layer 34. When the optical waveguide 24 is displaced in a direction approaching the curved waveguide 32 and is in contact with the curved waveguide 32, the optical waveguide 24 and the curved waveguide 32 are optically coupled, and when they are separated from each other, this optical coupling is It will be canceled. In this way, the optical component 20 as a whole constitutes an optical tap. The length of the convex curved portion of the curved waveguide 32 that contacts the optical waveguide 24 may be set arbitrarily.

Now, the operation of the optical component 30 will be described. First, when a potential difference (for example, DC300V) is applied between the fixed electrode 22 and the movable electrode 23 by the DC drive power source 36, an electrostatic force that attracts the electrodes to each other is generated,
The movable electrode 23 is attracted to the fixed electrode 22 side. As a result, the second arm 26b rotates counterclockwise about the support shaft 27 and reaches the optical waveguide 2 until it contacts the curved waveguide 32.
4 moves.

When returning to the original position, first, the voltage application by the DC drive power source 36 is temporarily stopped, and then the electric charge stored in the movable electrode 23 and the fixed electrode 22 is discharged. Next, when the fixed electrode 22 and the movable electrode 23 are charged to the same potential again using the DC drive power source 36, electrostatic forces repelling each other are generated, and the movable electrode 23 separates from the fixed electrode 22. As a result, the second arm 26 b rotates clockwise around the support shaft 27, and the optical waveguide 24 is bent and separated from the waveguide 32.

In this way, the optical coupling between the optical waveguide 24 and the curved waveguide 32 and the decoupling thereof can be performed.

In this embodiment, the mechanism in which the optical waveguide 24 and the curved waveguide 32 are brought into contact with each other by utilizing the attractive force of electrostatic force and separated from each other by utilizing the repulsive force is shown. A mechanism may be employed in which the repulsive force of the electric power is used to bring them into contact with each other and the suction force is used to separate them. Further, as shown by the one-dot chain line, the mechanism shown in FIG. 3 of the first embodiment may be adopted by providing the fixed electrode 35 on the opposite side of the fixed electrode 22 sandwiching the movable electrode 23. Further, although the optical component of the present embodiment is configured to be optically coupled to the curved waveguide, it can be used for switching the optical waveguide as in the first embodiment.

<Third Embodiment> FIGS. 6A and 6B show another embodiment of the optical component. This optical component 40 employs a pantograph structure as a displacement transmission mechanism.

The optical component 40 has fixed electrodes 42a to 42c arranged at three locations on the surface of the Si substrate 41, and each fixed electrode is fixed to the surface of the Si substrate 41 via the SiO ₂ layer 45. In the area surrounded by the fixed electrodes 42a to 42c,
A diamond-shaped elastic frame body 47 made of a thin beam, which is obtained by processing a thin film of polycrystalline silicon, is arranged, and one apex thereof is fixed to a fixed electrode 45. Further, this elastic frame body 47 is
The movable electrode 4 is provided at each vertex facing the fixed electrodes 42b and 42c.
3 is provided, and the remaining one vertex is fixed to the lower support 49 that supports the optical waveguide 44. Therefore, the fixed electrode 42 a and the movable electrode 43 are electrically connected via the elastic frame body 47. The fixed electrode 42a and the fixed electrodes 42b and 42c are connected by a DC drive power supply 45.

The operation of the optical component 40 thus constructed will be described. First, when a predetermined voltage is applied from the DC drive power source 46, the fixed electrode 42a and the fixed electrodes 42b and 42c are charged to a predetermined potential, respectively. As described above, the fixed electrode 42a and the movable electrode 43 are electrically connected, and as a result, the fixed electrodes 42b and 42c and the movable electrode 43 are connected.
An electric field is formed between the two electrodes, and an electrostatic force is generated in which the opposing electrodes attract each other. Therefore, the movable electrode 43 is attracted to the fixed electrodes 42b and 42c side. Then,
The rhombus of the elastic frame body 47 is pulled from the upper and lower sides of the drawing to crush the whole, and the apex on the optical waveguide 44 side is pulled inward.
By this action, the optical waveguide 44 is displaced in the direction of the arrow in the figure. Further, at the time of restoration, after the voltage application by the DC drive power source 46 is stopped, the movable electrode 43 side and the fixed electrode 42b,
When the electric charge stored on the 42c side is discharged, the electrostatic force is eliminated, and the elasticity of the elastic frame body 47 itself restores the original state. By using the pantograph structure as the displacement transmission mechanism as described above, the movement distance of the optical waveguide 44 can be increased as compared with the displacement distance of the movable electrode 43.

Also in the case of this embodiment, if the repulsive force of the electrostatic force is utilized, the rhombus of the elastic frame body 47 is pressed from the upper and lower sides of the figure, and the whole is crushed in the lateral direction. It is also possible to displace 44 in the direction opposite to the arrow in the figure. Further, by connecting the elastic frame bodies 47 in cascade over a plurality of stages, the distance by which the optical waveguide 44 is displaced can be increased.
Furthermore, the transmission mechanism of this pantograph structure is the same as that of the first embodiment.
It is of course possible to use it for a switching mechanism of an optical waveguide similar to the above, or a mechanism for performing optical coupling with a curved waveguide similar to the second embodiment.

<Embodiment 4> FIG. 7 shows another embodiment of the optical component. The optical component 50 uses a gear as a displacement transmission mechanism.

The optical component 50 has a fixed electrode 52 on the surface of the Si substrate 51, and the fixed electrode 52 is fixed to the surface of the Si substrate 51 via the SiO ₂ layer 55. A movable electrode 53 is arranged opposite to the fixed electrode 52, a rack 56a having teeth formed on one side is fixed from the movable electrode 53, and a small gear 57a is attached to the rack 56a.
Are in mesh. A large gear 57b that rotates integrally with the small gear 57a is provided below the small gear 57a.
The small gear 57a and the large gear 57b are rotatably supported by a support shaft 58 fixed to the Si substrate 51. The large gear 57b meshes with a rack 56b having teeth formed on one side, and one end of the rack 56b has
The optical waveguide 54 is fixed.

A guide shaft 59 is provided on the movable electrode 53 in parallel with the rack 56a, and S is provided on both sides of the guide shaft 59.
A bearing 60 fixed on the surface of the i substrate 51 via a SiO ₂ layer 55 is arranged. On the other hand, similarly in the optical waveguide 54, guide shafts 61 are provided at two locations in parallel with the rack 56b, and on both sides thereof, SiO 2 is provided on the surface of the Si substrate 51.
_A fixed bearing 62 is arranged via _two layers 55.
Therefore, when the movable electrode 53 and the optical waveguide 54 are displaced, the guide shaft 59,
61 is reciprocated, which causes the movable electrode 5 to move.
3. The optical waveguide 54 can move in a substantially parallel state while being positioned.

Reference numeral 66 is a DC drive power source for applying a predetermined charge to the fixed electrode 52 and the movable electrode 53. One end of the DC drive power source 66 may be directly connected to the movable electrode 53, but may also be connected to the support shaft 58 of the gear as shown. When the movable electrode 53 is displaced, other members also move,
Since the support shaft 58 is immovable, it is preferable to connect to the support shaft 58 in this way. In this case, the rack 56a, the pinion 57a, and the support shaft 58, which are continuously provided with the movable electrode 53.
Since they are all made of a material having the same conductivity as the movable electrode 53, there is no problem.

Here, the operation of the optical component 50 will be schematically described. First, the fixed electrode 2 is driven by the DC drive power source 66.
When a potential difference is applied between 2 and the movable electrode 23, the movable electrode 53 is attracted to the fixed electrode 52 side. Along with this, the rack 56a moves to rotate the small gear 57a in the arrow direction. The large gear 57b rotates integrally with the small gear 57a to move the rack 56b in the arrow direction.
With such a mechanism, the optical waveguide 54 moves in the direction of the arrow shown. The operation at the time of restoration is the same as that in each of the above-described embodiments, and description thereof will be omitted.

As described above, by using the gear as the displacement transmitting mechanism, the moving distance of the optical waveguide 54 can be increased as compared with the moving distance of the movable electrode 53.

<Fifth Embodiment> FIG. 8 shows another embodiment in which the gears are used as described above. The optical component 50 of FIG.
The same components as those are indicated by the same reference numerals.

The optical component 70 is provided with a fixed rack 73 having teeth on one side. The fixed rack 73 is made of SiO ₂
It is fixed to the surface of the Si substrate 51 via the layer 55 and meshes with the large gear 74. A rack 56b meshes with the gear 74 on the opposite side of the fixed rack 73. The gear 74 is rotatably supported by a support shaft 72, and the other end of the support shaft 72 is held by an arm 71 fixed to the movable electrode 53. Therefore, the movable electrode 5
When 3 is attracted to the fixed electrode 52, the support shaft 72 moves with it, and the gear 74 rotates on the fixed rack 73 in the direction shown in the figure. Therefore, due to the rotation of the gear 74, the rack 56b is transferred in the direction shown, and the optical waveguide 54 is displaced in this direction. If such a mechanism is adopted, the displacement distance of the optical waveguide 54 will be approximately twice the displacement distance of the movable electrode 53.

At the time of restoration, if the movable electrode 53 is displaced in the direction opposite to the arrow in the figure by utilizing the repulsive force of the electrostatic force, the optical waveguide 54 is also displaced in the direction opposite to the arrow in the figure. Can be restored. The operation at the time of this return is the same as that in each of the above-described embodiments, and the description thereof will be omitted.

The displacement transmitting mechanism of the movable electrode shown in FIGS. 7 and 8 implements an optical waveguide switching mechanism similar to that of the first embodiment or an optical coupling with a curved waveguide similar to that of the second embodiment. Of course, it can also be used for a mechanism that operates.

In each of the first to fifth embodiments described above, when the displaced movable electrode comes into contact with the fixed electrode, the electrostatic force between them disappears. Therefore, an insulating spacer or the like is interposed between the facing portions of the electrodes. This can prevent the movable electrode and the fixed electrode from being electrically connected.

Further, in each of Examples 1 to 5, the fixed electrode 12 and the movable electrode 13 may have a comb-shaped electrode structure in which concavo-convex portions are provided on the surfaces facing each other as shown in FIG. is there. With such a comb-shaped electrode structure, the area where they face each other increases, so that a larger electrostatic force can be obtained.

Further, in the optical component of each embodiment, the movable electrode, the displacement transmitting mechanism portion, and the displacing member of the optical waveguide may be supported from below by a predetermined member.
In this case, the supporting member includes a pedestal protruding from the substrate,
Examples include leg portions fixed to the lower surface side of this member. Further, as a usage method, if the optical components are arranged in a matrix in multiple stages, it is possible to configure a large-scale optical waveguide switching device.

[0048]

As described above, according to the drive type optical component of the present invention, the movable electrode is displaced by utilizing the electrostatic force acting between the fixed electrode and the movable electrode, and this movement causes the optical waveguide. A mechanism for displacing is adopted.

Therefore, this drive-type optical component can be provided with a drive mechanism for displacing its own optical waveguide for each individual, and each optical component can be displaced by displacing its own optical waveguide. It is possible to function as a switching device or an optical tap for performing optical coupling / decoupling with an optical waveguide provided side by side.

Further, since the displacement can be driven only by applying a predetermined voltage from the outside, an extra drive device is not required and the entire device can be made extremely small.

Further, even when the drive-type optical components having such a function are arranged in a matrix in multiple stages, each drive-type optical component can be driven at the same time, so that the number of lines is increased. Also, this switching can be performed instantly.

[Brief description of drawings]

FIG. 1 is a perspective view showing the appearance of a drive-type optical component according to a first embodiment.

2A is a plan view of the optical component of FIG. 1, FIG. 2B is a side view of a main part taken along line I-I of FIG. 2A, and FIG.
FIG. 6 is a side view showing a state in which the optical waveguide is displaced from the above state.

3A is a sectional view showing another embodiment of the optical component shown in FIG. 1, FIG. 3B is a sectional view showing a state in which an optical waveguide is displaced from the state shown in FIG. 3A, and FIG. FIG. 6 is an end view showing a state where the optical waveguide is displaced from the state of FIG.

FIG. 4 is an explanatory diagram showing another embodiment of the optical component of FIG.

FIG. 5A is a plan view of an optical component according to a second embodiment,
(B) is a sectional view taken along line II-II of (a).

6A is a plan view showing a main part of an optical component according to a third embodiment, and FIG. 6B is an end view taken along line III-III of FIG.

FIG. 7 is a plan view showing a main part of an optical component according to a fourth embodiment.

FIG. 8 is a plan view showing a main part of an optical component according to a fourth embodiment.

FIG. 9 is a plan view when the fixed electrode and the movable electrode are comb-shaped.

FIG. 10 is a perspective view schematically illustrating a conventional optical waveguide switching mechanism.

[Explanation of symbols]

 10, 20, 40, 50, 70 ... Driving type optical component 12, 22, 42a, 42b, 42c, 52 ... Fixed electrode 13, 23, 43, 53 ... Movable electrode 14, 24, 44, 54 ... Optical waveguide 16, 36, 46, 66 ... DC drive power source

Claims (12)

[Claims] 1. A fixed electrode fixed on a supporting substrate, and a movable electrode which is arranged adjacent to the fixed electrode and whose arrangement position is displaced by receiving an electrostatic force acting between the fixed electrode and the fixed electrode. An electrode, directly or indirectly connected to the movable electrode,
A drive-type optical component comprising: an optical waveguide whose arrangement position is displaced in association with the movement of the movable electrode. 2. The drive according to claim 1, wherein the movable electrode has a cantilever structure having a fixed end fixed to the support substrate and a free end that can be displaced when the electrostatic force is applied. Mold optical parts. 3. The drive type optical component according to claim 2, wherein the optical waveguide is integrally fixed to the movable electrode. 4. The drive-type optical component according to claim 1, wherein a displacement transmitting means for displacing the optical waveguide by obtaining a driving force by the movable electrode that is displaced is interposed between the movable electrode and the optical waveguide. . 5. The displacement transmitting means includes an arm member that rotates around a fulcrum portion fixed to the support substrate, and the movable electrode is connected to one end side of the arm member, and the arm is provided. The drive-type optical component according to claim 4, wherein the optical waveguide is connected to the other end of the member. 6. The drive-type optical component according to claim 5, wherein the arm member has conductivity and is electrically connected to the movable electrode. 7. The displacement transmitting means includes a quadrilateral elastic frame body, the movable electrodes are provided at a pair of corners of the elastic frame body facing each other, and the movable electrodes are respectively disposed opposite to the movable electrodes. The fixed electrode is arranged, and one corner of a pair of remaining corners of the elastic frame body is fixed to the support substrate side, and the optical waveguide is continuously provided at the other corner. 4. The drive type optical component described in 4. 8. The drive-type optical component according to claim 7, wherein the elastic frame body has conductivity and is electrically connected to each of the movable electrodes. 9. The drive type optical component according to claim 4, wherein the displacement transmitting means includes a gear and a rack member meshing with the gear. 10. The gear includes a large gear and a small gear that rotate integrally with each other, and a support shaft that is fixed to the support substrate and rotatably supports the large gear and the small gear. The rack member has a first end to which the movable electrode is fixed at one end.
Rack member and the second rack member having the optical waveguide fixed to one end, the first rack member meshes with the pinion gear,
The drive-type optical component according to claim 9, wherein the second rack member is meshed with the large gear. 11. A voltage supply means for charging the fixed electrode and the movable electrode to a predetermined potential is provided.
The drive type optical component according to any one of 1. 12. The drive-type optical component according to claim 1, wherein the fixed electrode and the movable electrode are provided with concavo-convex portions on their opposing surfaces to increase the opposing area.