JPH07225138A - Rotary encoder - Google Patents

Rotary encoder

Info

Publication number
JPH07225138A
JPH07225138A JP3775394A JP3775394A JPH07225138A JP H07225138 A JPH07225138 A JP H07225138A JP 3775394 A JP3775394 A JP 3775394A JP 3775394 A JP3775394 A JP 3775394A JP H07225138 A JPH07225138 A JP H07225138A
Authority
JP
Japan
Prior art keywords
disk
image signal
angle
memory
image data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3775394A
Other languages
Japanese (ja)
Inventor
Kazuo Higashiura
一雄 東浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Priority to JP3775394A priority Critical patent/JPH07225138A/en
Publication of JPH07225138A publication Critical patent/JPH07225138A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE:To measure absolute angle position with high precision by comparing reference image data generated by irradiating each predetermined rotational position of a rotary disk with laser beams with an input image signal to measure a rotational angle of the rotary disk. CONSTITUTION:A laser beam from a laser light source 1 is converged into a spot of a predetermined size by a lens 2 and irradiates a disk 3. A reflected beam is detected by a TV camera 4, and a two-dimensional image signal for one round of the annular shade on the disk 3 surface where a two-dimensional image signal is outputted is converted by an A/D conversion circuit 7 and stored into a reference memory 9. Before an angle is measured, a two-dimensional image signal from a camera 4 corresponding to a rotational angle position of the disk 3 is converted by the circuit 7 and inputted into a control circuit 8. The circuit 8 compares an inputted two-dimensional digital signal with a reference image data called from the memory 9 by means of a correlator 10, senses an angle from an address of the memory 9 as obtained from the correlator 10, and displays it on a display device 11.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は回転式エンコーダに係
り、特に受光されたレーザー光が散乱された際に生じる
スペックルパターンを利用した回転式エンコーダに関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary encoder, and more particularly to a rotary encoder using a speckle pattern generated when a received laser beam is scattered.

【0002】[0002]

【従来の技術】従来の光学式の回転式エンコーダは光学
的パターンあるいは回折格子を形成した回転円板を用い
て、規則的な光学パターンと光の作用を利用することに
より回転角度を検出するように構成されていた。
2. Description of the Related Art A conventional optical rotary encoder uses a rotating disk having an optical pattern or a diffraction grating to detect a rotation angle by utilizing a regular optical pattern and the action of light. Was configured into.

【0003】[0003]

【発明が解決しようとする課題】しかしこのような従来
のエンコーダの構成では、光学的パターンの精度によっ
てエンコーダの性能に左右されている。従って回転円板
に正確な光学的パターンを形成する必要があり、より高
精度の分解能を得ようとすれば構成が複雑で高価とな
り、また光学的パターンの検出手段や回転速度にも制約
がある。また回転円板の劣化や温度変化による誤差を補
償することは原理的に不可能である。
However, in such a conventional encoder configuration, the performance of the encoder depends on the accuracy of the optical pattern. Therefore, it is necessary to form an accurate optical pattern on the rotating disk, and if higher resolution is to be obtained, the structure becomes complicated and expensive, and there is also a restriction on the optical pattern detection means and rotation speed. . In principle, it is impossible to compensate for errors due to deterioration of the rotating disk and temperature changes.

【0004】本発明の目的は回転円板の散乱面の各角度
位置のスペックルパターンを検出することにより比較的
簡単な構成で高精度な分解能の絶対角度位置を検出可能
な光学式の回転式エンコーダを提供することにある。
The object of the present invention is to detect the speckle pattern at each angular position on the scattering surface of the rotating disk, and to detect the absolute angular position with high precision and resolution with a relatively simple structure. To provide an encoder.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
本発明の回転式エンコーダは、回転円板にレーザー光を
照射するレーザー光照射手段と、予め上記回転円板の各
所定回転位置にレーザー光を照射することにより生じる
スペックルパターンを有する参照画像データを記憶する
記憶手段と、上記回転円板の回転位置に対応する入力画
像信号を上記参照画像データと比較して上記回転円板の
回転角度を測定する演算手段と、を有することを要旨と
する。
In order to achieve the above object, the rotary encoder of the present invention comprises a laser light irradiating means for irradiating a rotating disc with a laser beam, and a laser at each predetermined rotating position of the rotating disc in advance. A storage means for storing reference image data having a speckle pattern generated by irradiating light, and an input image signal corresponding to a rotation position of the rotating disc are compared with the reference image data to rotate the rotating disc. The gist is to have a calculating means for measuring an angle.

【0006】[0006]

【作用】回転円板にレーザー光を照射し、その各回転角
度位置での照射面に発生するスペックルパターンを利用
して円板の回転角を測定する。このスペックルパターン
は円板の表面の微細な凹凸により発生する円板の各角度
位置に固有のものであるので、このスペックルパターン
を各角度位置で予め測定しておけば、円板上の各角度位
置情報として利用できる。
Operation: The rotating disk is irradiated with laser light, and the rotation angle of the disk is measured using the speckle pattern generated on the irradiation surface at each rotation angle position. This speckle pattern is unique to each angular position of the disk generated by the fine irregularities on the surface of the disk, so if you measure this speckle pattern in advance at each angular position, It can be used as each angular position information.

【0007】[0007]

【実施例】以下図面に示す本発明の実施例を説明する。
図1は本発明による回転式エンコーダの一実施例であ
る。同図において、1は半導体レーザーから成るレーザ
ー光源、2は集束レンズ、3は回転円板、4は結像レン
ズ5及び2次元センサ6等から成るテレビカメラ、7は
A/D変換回路、8はマイクロコンピュータ等より成る
制御回路、9は参照メモリ、10は相関器、11は表示
器である。
Embodiments of the present invention shown in the drawings will be described below.
FIG. 1 shows an embodiment of a rotary encoder according to the present invention. In the figure, 1 is a laser light source composed of a semiconductor laser, 2 is a focusing lens, 3 is a rotating disk, 4 is a television camera composed of an imaging lens 5 and a two-dimensional sensor 6, etc., 7 is an A / D conversion circuit, 8 Is a control circuit including a microcomputer, 9 is a reference memory, 10 is a correlator, and 11 is a display.

【0008】レーザー光源1からのレーザー光はレンズ
2で所定の大きさのスポットに集束され円板3を照射す
る。これによる反射光はテレビカメラ4によって検出さ
れ2次元画像信号(アナログ信号)が出力される。この
2次元画像信号は前述したように円板3の表面の微細な
凹凸により発生する円板3の各角度位置に固有のスペッ
クルパターンを有しているので、このスペックルパター
ンは円板3上の回転角度位置情報として利用できる。
Laser light from the laser light source 1 is focused on a spot having a predetermined size by a lens 2 and illuminates a disc 3. The reflected light due to this is detected by the television camera 4 and a two-dimensional image signal (analog signal) is output. Since this two-dimensional image signal has a speckle pattern specific to each angular position of the disc 3 generated by the fine irregularities on the surface of the disc 3 as described above, this speckle pattern is the disc 3 It can be used as the above rotation angle position information.

【0009】そこで、例えば、円板3表面の円環状斜線
部の一周分の2次元画像信号をA/D変換回路7でディ
ジタル信号に変換し、予め各角度位置情報に対応する参
照データとして参照メモリ9に格納しておく。そして角
度測定時に、円板3の回転角度位置に対応したテレビカ
メラ4からの2次元画像信号をA/D変換回路7によっ
て2次元ディジタル信号に変換し制御回路8に入力す
る。制御回路8は、入力されたこの2次元ディジタル信
号と、参照メモリ9から呼び出した参照画像データと、
を相関器10に加えて両者の対応関係を比較する。即
ち、上記参照画像データは図2に示すように、参照メモ
リ9において円板3の一周分AA’〜BB’に格納され
ているので、前記入力2次元ディジタル信号を一時にホ
ールドしておくと共に参照メモリ9の窓9a(アドレ
ス)を移動させてサーチし、呼び出された参照データと
一致すれば相関器10より相関出力が得られる。この相
関出力が得られた時の参照メモリ9のアドレスから角度
を検知することができ、表示器11に角度が表示され
る。なお、AA’とBB’は円板3上の円環状のデータ
として2重となっている。また2次元ディジタル信号は
2値以上の多値画像信号であるが、2値では画像の一致
度が十分得られないので、それ以上の多値画像信号とす
るのが好適である。更に円板3に照射されるレーザー光
のスポット1a(照射範囲)は図3に示すようにセンサ
6に入射する撮像範囲1bより広くする必要がある。
Therefore, for example, a two-dimensional image signal for one round of an annular shaded portion on the surface of the disk 3 is converted into a digital signal by the A / D conversion circuit 7 and referred to in advance as reference data corresponding to each angular position information. It is stored in the memory 9. Then, when measuring the angle, the two-dimensional image signal from the television camera 4 corresponding to the rotation angle position of the disc 3 is converted into a two-dimensional digital signal by the A / D conversion circuit 7 and input to the control circuit 8. The control circuit 8 inputs the input two-dimensional digital signal and the reference image data called from the reference memory 9,
Is added to the correlator 10 and the correspondence between the two is compared. That is, as shown in FIG. 2, the reference image data is stored in the reference memory 9 in one round AA 'to BB' of the disk 3, so that the input two-dimensional digital signal is held at the same time. The window 9a (address) of the reference memory 9 is moved to perform a search, and if it matches the called reference data, the correlator 10 obtains a correlation output. The angle can be detected from the address of the reference memory 9 when this correlation output is obtained, and the angle is displayed on the display 11. Note that AA 'and BB' are duplicated as circular data on the disk 3. Further, the two-dimensional digital signal is a multi-valued image signal having two or more values. However, since the degree of image coincidence is not sufficiently obtained with two values, it is preferable to use a multi-valued image signal having more than that. Further, the spot 1a (irradiation range) of the laser light with which the disc 3 is irradiated needs to be wider than the imaging range 1b incident on the sensor 6 as shown in FIG.

【0010】前記センサ6は図4に示すように1次元ラ
インセンサ6’を使用してもよい。この場合は1次元画
像信号がA/D変換回路7によって1次元ディジタル信
号に変換され図5に示すようにこの1次元ディジタル信
号と1次元の参照画像データとの一致をサーチして回転
角度を求める。
The sensor 6 may use a one-dimensional line sensor 6'as shown in FIG. In this case, the one-dimensional image signal is converted into a one-dimensional digital signal by the A / D conversion circuit 7, and as shown in FIG. 5, the one-dimensional digital signal and the one-dimensional reference image data are searched for a match to determine the rotation angle. Ask.

【0011】図6は図4の例における入力データfと参
照データgの一例を示す。この例で、夫々のデータは、
例えば、多値の階調から成るディジタルデータで、参照
メモリ9の窓(アドレス)を移動させて入力データと一
致する場所のアドレスをサーチして角度を求める。この
場合の一致度hjは正規化処理などを加えた後、例え
ば、下記(1)式で、
FIG. 6 shows an example of the input data f and the reference data g in the example of FIG. In this example, each data is
For example, the angle is obtained by moving the window (address) of the reference memory 9 and searching the address of the place matching the input data with digital data composed of multi-valued gradations. The degree of coincidence h j in this case, after being subjected to normalization processing and the like,

【数1】 j=0,1,2,…,n−1,(但しjn=j0,jn+1
=j1…とする。) 求める。一致度hjの最大値を示す参照メモリの番地j
から角度を求めることができる。このjは整数とした
が、図7に示すように、例えば、j−1,j,j+1の
3点より2次近似で極大値jmaxを求める等の補間演算
により画像の画素単位以下の座標精度で、一致度を得る
こともできる。
[Equation 1] j = 0, 1, 2, ..., N-1, (where j isn= J0, Jn + 1
= J1... ) Ask. Degree of coincidence hjAddress j of the reference memory showing the maximum value of
The angle can be calculated from This j is an integer
However, as shown in FIG. 7, for example, j−1, j, j + 1
The maximum value j from the three points in the quadratic approximationmaxInterpolation calculation such as obtaining
To obtain the degree of coincidence with the coordinate accuracy of the pixel unit of the image or less
You can also

【0012】なお、円板3の各所定角度位置に、スペッ
クルパターンに加えて、簡単なパターンを予め形成して
おくと、調整する場合に有効である。またメモリに記憶
されているスペックルパターン(参照データ)は定期的
に更新することが好ましい。
It is effective for adjustment to form a simple pattern in advance in addition to the speckle pattern at each predetermined angular position of the disk 3. Further, it is preferable to regularly update the speckle pattern (reference data) stored in the memory.

【0013】[0013]

【発明の効果】以上説明したように本発明によれば、円
板に従来のように正確な角度検出用の光学的パターンを
設けなくても、予め一周分のスペックルパターンをメモ
リに記憶しておくだけで、精度な角度検出を行うことが
でき、比較的簡単な構造で安価なエンコーダを得ること
ができる。しかも上記スペックルパターンを定期的に更
新することにより円板の劣化や温度変化による誤差を補
償することが可能である。
As described above, according to the present invention, the speckle pattern for one round is stored in the memory in advance without providing the disc with the optical pattern for accurate angle detection as in the conventional case. It is possible to perform accurate angle detection only by setting it in advance, and it is possible to obtain an inexpensive encoder with a relatively simple structure. Moreover, by periodically updating the speckle pattern, it is possible to compensate for errors due to deterioration of the disk and temperature changes.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示すブロック図である。FIG. 1 is a block diagram showing an embodiment of the present invention.

【図2】上記実施例の動作説明図である。FIG. 2 is an operation explanatory diagram of the above embodiment.

【図3】レーザー光の照射範囲と撮像範囲の関係を示す
説明図である。
FIG. 3 is an explanatory diagram showing a relationship between a laser light irradiation range and an imaging range.

【図4】本発明の他の実施例を示すブロック図である。FIG. 4 is a block diagram showing another embodiment of the present invention.

【図5】図4の実施例の動作説明図である。FIG. 5 is an operation explanatory diagram of the embodiment in FIG.

【図6】入力データと参照データの一例を示す図であ
る。
FIG. 6 is a diagram showing an example of input data and reference data.

【図7】一致度の最大値を求める補間演算の説明図であ
る。
FIG. 7 is an explanatory diagram of an interpolation calculation for obtaining the maximum value of the degree of coincidence.

【符号の説明】[Explanation of symbols]

1 レーザー光源 3 円板 4 テレビカメラ 6 センサ 7 A/D変換回路 8 制御回路 9 メモリ 10 相関器 11 表示器 1 Laser Light Source 3 Disc 4 TV Camera 6 Sensor 7 A / D Conversion Circuit 8 Control Circuit 9 Memory 10 Correlator 11 Display

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 回転円板にレーザー光を照射するレーザ
ー光照射手段と、予め上記回転円板の各所定回転位置に
レーザー光を照射することにより生じるスペックルパタ
ーンを有する参照画像データを記憶する記憶手段と、 上記回転円板の回転位置に対応する入力画像信号を上記
参照画像データと比較して上記回転円板の回転角度を測
定する演算手段と、 を有することを特徴とする回転式エンコーダ。
1. A laser light irradiating means for irradiating a rotating disk with a laser beam, and reference image data having a speckle pattern generated by irradiating a predetermined rotating position of the rotating disk with the laser beam in advance is stored. A rotary encoder comprising: a storage unit; and a calculation unit that compares an input image signal corresponding to a rotation position of the rotating disc with the reference image data to measure a rotation angle of the rotating disc. .
JP3775394A 1994-02-10 1994-02-10 Rotary encoder Pending JPH07225138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3775394A JPH07225138A (en) 1994-02-10 1994-02-10 Rotary encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3775394A JPH07225138A (en) 1994-02-10 1994-02-10 Rotary encoder

Publications (1)

Publication Number Publication Date
JPH07225138A true JPH07225138A (en) 1995-08-22

Family

ID=12506238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3775394A Pending JPH07225138A (en) 1994-02-10 1994-02-10 Rotary encoder

Country Status (1)

Country Link
JP (1) JPH07225138A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007279523A (en) * 2006-04-10 2007-10-25 Canon Inc Image forming apparatus and image forming method
KR101005781B1 (en) * 2008-04-21 2011-01-06 (주)이오시스템 Device and method for detecting angle
JP2015114279A (en) * 2013-12-13 2015-06-22 國防部軍備局中山科學研究院 Precision angular positioning device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007279523A (en) * 2006-04-10 2007-10-25 Canon Inc Image forming apparatus and image forming method
US8264733B2 (en) 2006-04-10 2012-09-11 Canon Kabushiki Kaisha Image forming apparatus and image forming method for detecting light intensities
KR101005781B1 (en) * 2008-04-21 2011-01-06 (주)이오시스템 Device and method for detecting angle
JP2015114279A (en) * 2013-12-13 2015-06-22 國防部軍備局中山科學研究院 Precision angular positioning device

Similar Documents

Publication Publication Date Title
US6268918B1 (en) Three-dimensional input device
JP2943499B2 (en) Height measuring method and device
JP2696044B2 (en) Focus detection method, non-contact displacement measuring method and apparatus using the same
JPS5999304A (en) Method and apparatus for comparing and measuring length by using laser light of microscope system
US20110044561A1 (en) Optoelectronic angle sensor and method for determining a rotational angle about an axis
US20020080345A1 (en) Optical system for detecting surface defect and surface defect tester using the same
JPS63501526A (en) High speed 3D surface digitizer
US3743427A (en) Modulation transfer function measurement system and method
JPH10206132A (en) Three-dimensional measuring system
JPS61128111A (en) Method of measuring angular displacement of object with measuring chart
US4920273A (en) Z-axis measurement system
JP2003520952A (en) Method of generating threshold value for position control circuit
US4390277A (en) Flat sheet scatterometer
JPH07225138A (en) Rotary encoder
JP2002257511A (en) Three dimensional measuring device
US5436727A (en) Distance measuring method and apparatus
US5600123A (en) High-resolution extended field-of-view tracking apparatus and method
JP7324097B2 (en) Three-dimensional surveying device, three-dimensional surveying method and three-dimensional surveying program
JP3324367B2 (en) 3D input camera
JP3122732B2 (en) Readout device and distance measuring device
JP2787928B2 (en) Image signal processing method
JPS63222208A (en) Apparatus for measuring depth of recessed part
JPH07190773A (en) Optical three-dimensional position detecting device
JPH06186035A (en) Three-dimenisonal position measuring system
JPH0432729A (en) Fourier transformation type spectral analyzing device