JPH07208972A - Scanning probe microscope - Google Patents

Abstract

PURPOSE:To easily replace a sample without using a tool by installing a metal for sample installation on a metal sheet partitoned by a nonmagnetic substance so as to be close to a magnet stand composed of a magnetic substance partitioned by the nonmagnetic substance. CONSTITUTION:In a magnet stand 1, magnets 6 are arranged in such a way that N-poles and N-poles, and S-poles and S-poles are opposed to each other, and iron sheets 7 are sandwiched between the magnets 6. An iron-sheet group 4 which has been partitioned by nonmagnetic substances 8 is brought into contact with the stand 1. When the iron sheets 7 are situated between the N-poles and the N-poles, and the S-poles and the S-poles in the stand 1, the iron sheets 7 become respectively the N-poles or the S-poles, an iron base board 9 on which a sample 5 has been placed is attracted to the iron-sheet group 4 by their magneticpole line. On the other hand, when the iorn-sheet group 4 is moved in such a way that the nonmagnetic substances 8 come to positions of the iron sheets 7 by means of a shaft 2 and a lever 3 for rotation, respective regions which have been partitoned by the nonmagnetic substances 8 in the iron-sheet group 4 form one set each of the N-poles and the S-poles, the iron-sheet group 4 cannot have any polarity, and the iron base stand 9 is separated from the iron-sheet group 4. Thereby, the sample 5 can be replaced simply.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning probe microscope, and is characterized by a sample mounting mechanism.

[0002]

2. Description of the Related Art Recently, non-contact, non-destructive, high-resolution microscopes have become increasingly important in a wide range of fields such as biology and semiconductor device development. Conventionally used optical microscopes had excellent characteristics in terms of non-contact and non-destructive, but due to the principle of using an imaging optical system, the range of use is limited due to the limited resolution due to the diffraction limit. It was

A transmission type photon scanning tunneling microscope was developed to solve these problems. A measurement method using a transmission photon scanning tunneling microscope will be described. First, illumination light is made incident from the back surface of the sample so that the total reflection condition is satisfied on the surface of the sample. An electric field called an evanescent wave is generated on the sample surface by the irradiation of this illumination light. The evanescent wave exponentially attenuates with the distance from the sample surface, and becomes 1 / e (e is the number of Napiers) at a height of about the wavelength. High vertical resolution can be obtained by detecting this evanescent wave with a probe that scans the surface of the sample in a non-contact manner. Further, by providing the probe with an opening smaller than the wavelength of light and limiting the region within the surface for detecting the evanescent wave, a higher lateral resolution can be obtained as compared with the conventional optical microscope.

The evanescent wave decays exponentially with the distance from the sample surface as described above. for that reason,
In order to obtain high resolution, the minute opening at the tip of the probe is not always necessary, and the tip of the probe may be sharpened. The resolution is determined by the S / N of the signal in terms of vertical resolution and the effective minute aperture diameter in terms of lateral resolution. Therefore, it is necessary to increase the aperture diameter in order to obtain high vertical resolution, and to reduce the aperture diameter in order to obtain high lateral resolution, and there is a trade-off relationship between the vertical resolution and the horizontal resolution. It can be said that there is.

The sample mounting mechanism of the conventional scanning probe microscope has a structure as shown in FIG. This is because the sample mount (11) is
It is composed of a wire (10) for fixing 8) and a sample table (9). First, the sample (5) is placed between the sample table (9) and the wire (10), and then the sample (5) is attached.
Is held by the bending portion (10a) of the wire (10) and the wire holding screw (12) is tightened, so that the sample (5) is pressed and fixed to the sample stand (9).

However, in such a conventional sample mounting mechanism, the sample is not completely fixed and the refraction part (10
Problems such as the sample being destroyed in a) and the sample being difficult to move with the sample fixed have been solved. It has been proposed to adsorb and fix the sample on a sample base made of a magnetic material (JP-A-4-348205). It has a structure as shown in FIG. The sample (5) is attached to the sample mount (11) by adsorbing the magnet base (13) on the sample mount (9) made of a magnetic material.

[0007]

The present inventor observed using a scanning probe microscope using the sample mounting mechanism shown in FIG. 4, and the magnet base (13) on which the sample (5) was mounted was observed. ) Was removed from the sample stage (9), a tool such as tweezers of a non-magnetic material (eg copper) was required 1.
Furthermore, since the magnet base (13) and the sample table (9) are attracted by a large force, it is difficult to control the force when separating the two, and there is a problem that the sample is dropped.
When a conventional sample mounting mechanism is used, there is a problem that observation using a scanning probe microscope becomes inconvenient.

[0008]

The inventor of the present invention thought that removal would be easy if the magnitude of the magnetic force between the magnet base and the sample table could be controlled. Therefore, the present inventor has found that the relationship between the magnetic field of the magnetic pole of the magnet and the magnetic substance is used. Therefore, the present inventor devised a combination of magnetic poles, installed a magnetic sample base on the magnetic pole, and moved these to control the magnitude of the magnetic force between the magnet base and the sample base. I tried to remove it.

The present invention is firstly directed to "at least a probe,
In a scanning probe microscope including a sample attachment mechanism, the fine movement unit of the probe, or the fine movement mechanism of the sample, the attachment mechanism of the sample is composed of at least four magnetic regions separated by at least three nonmagnetic substances. And a metal plate having at least two regions separated by at least one non-magnetic material adjacent to the magnetic body of the magnet base, and a metal for setting a sample on the metal plate. A microscope (claim 1), characterized in that a sample stage consisting of is arranged.

Secondly, "a magnet base constituted by at least four magnetic bodies divided by at least three non-magnetic bodies, and at least one non-magnetic body close to the magnetic base of the magnet base. Mounting of a sample of a scanning probe microscope, which is composed of a metal plate having at least two regions separated by, and on which a sample stage made of metal for placing a sample is arranged. Mechanism (claim 2) ".

[0011]

The present invention has a structure as shown in FIG. The magnet stand (1) has a north pole and a north pole of the magnet (6).
The poles are arranged so that the S poles and the S poles face each other, and the iron plate (7) is sandwiched between the magnets (6). The iron plate group (4) partitioned by the non-magnetic material (8) is brought into contact with the magnet table (1). When the iron plate (7) is located between the N pole and the N pole and the S pole and the S pole of the magnet base (1) as shown in FIG. 2A, the iron plate (7) is placed as described in (a). Since each of them becomes an N pole or an S pole, the magnetic pole line in the iron base (9) is as shown by the broken line, and the iron base (9)
Will be adsorbed on the iron plate group (4).

On the other hand, in (b), from the state of (a),
It shows a case where the iron plate group (4) is moved so that the non-magnetic body (8) comes to the position of the iron plate (7). In such a state, each area of the iron plate group (4) partitioned by the non-magnetic material (8) has one N pole and one S pole, so the iron plate group (4) must have polarity. I can't. As a result, the iron substrate (9) is separated from the iron plate group (4).

With this structure, the sample can be easily replaced. In the present invention, it is preferable that the sample table and the sample mounting table are in contact with each other by attracting a magnetic force, but they can be used even if they are apart from each other as long as the lines of magnetic force are not outside.

[0014]

[Embodiment 1] A sample mounting mechanism of a scanning probe microscope according to this embodiment of FIG. 1 is shown. The iron plate group (4) partitioned by the non-magnetic material (8) is formed into a circular shape. Materials such as aluminum, copper, and iron oxide are used as the nonmagnetic material. The iron plate group (4) has a diameter of 10 mm and a thickness of 1 mm. Although the iron plate group (4) is formed of iron in this embodiment, a material such as cobalt, nickel, aluminum, or a Whistler alloy may be used. Further, the shape does not have to be circular. Further, a rotary shaft (2) is attached to this, and it can freely rotate on a cylindrical magnet base (1) by a rotary lever (3). This shape may also be a shape other than the cylindrical shape. The magnet base (1) has a diameter of 10 mm and a thickness of 0.3 mm. In FIG. 1, the magnet base (1) and the iron plate group (4) are shown separated for the sake of explanation, but when actually used, both are used in contact with each other.

The sample table is placed on the iron plate group (4) having such a structure.

[0016]

When the sample mounting mechanism is installed in the scanning probe microscope, the sample can be easily replaced without using a tool such as tweezers. Further, unlike the conventional case, the sample is not dropped at the time of replacement, the sample is not damaged, and the operation of the scanning probe microscope is simplified. Furthermore, since the magnetic force lines of the sample stand are not exposed to the outside, the magnetic force is not weakened and the durability is improved.

[Brief description of drawings]

FIG. 1 is a schematic view of a sample mounting mechanism for a scanning probe microscope according to this embodiment.

FIG. 2 is a conceptual diagram showing a magnetic field state of a sample mounting mechanism for a scanning probe microscope according to the present embodiment,
The case where the iron substrate is adsorbed by the iron plate group (a) and the case where it is separated (b) are shown.

FIG. 3 is a schematic view of a conventional sample mounting mechanism for a scanning probe microscope.

FIG. 4 is a schematic view of a conventional sample mounting mechanism for a scanning probe microscope.

[Explanation of symbols]

 1 ... Magnet base 2 ... Rotating shaft 3 ... Rotating lever 4 ... Iron plate group 5 ... Sample 7 ... Iron plate 8 ... Non-magnetic material 9 ... Sample base 10 ...・ Wire 11 ・ ・ Sample mount 12 ・ ・ Wire holding screw 13 ・ ・ Magnetic substrate

Claims (2)

[Claims] 1. A scanning probe microscope comprising at least a probe, a sample attachment mechanism, a fine movement unit of the probe, or a fine movement mechanism of the sample, wherein at least four attachment units of the sample are separated by at least three non-magnetic substances. On the metal plate, there is a magnet plate composed of a region made of a magnetic material, and a metal plate having at least two regions separated by at least one non-magnetic material adjacent to the magnetic material of the magnet base. A microscope characterized in that a sample stage made of metal for placing a sample on is arranged in the microscope. 2. A magnet base composed of at least four magnetic bodies divided by at least three non-magnetic bodies, and at least one non-magnetic body adjacent to the magnetic body of the magnet base. A mounting mechanism for a sample of a scanning probe microscope, comprising a metal plate having at least two regions provided on the metal plate, and a sample table made of metal for mounting a sample on the metal plate.