JPH07205078A - Sample conveyance device for vacuum device - Google Patents

Abstract

PURPOSE:To facilitate conveyance over a long distance and delivery and receiving operations by constituting an operation means of magnet coupling type which moves a conveying shaft from the outside of a vacuum housing in non- contact state out of specific elements. CONSTITUTION:When parallel advance on an operation shaft 4 of a linear bearing 6 is made free by releasing lock by means of a lock screw 10, a slider 20 on which a magnet 3 on the atmospheric side is mounted moves smoothly by a linear bearing 6. Also, a conveying shaft 2 in a vacuum housing 1 which is magnetically connected to the magnet 3 moves at the same time. Furthermore, when the operation shaft 4 is rotated by an operation handle 12, the magnet 3 and the conveying shaft 2 are rotated respectively due to mesh of each gear 7a, 7b. On the other hand, when the operation handle 12 is rotated or moved in parallel in the condition in which the lock screw 10 is tightened and the slider 20 and the operation shaft 4 are locked, this movement is transmitted to the conveying shaft 2 via the operation shaft 2 and the magnet 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for transporting a sample inside a vacuum apparatus for the purpose of surface analysis of solids, for example, and more specifically, from the atmosphere side outside the vacuum apparatus housing to the vacuum apparatus housing. Hand over the sample inside,
The present invention relates to a sample transporting apparatus which can be easily operated even if it is an apparatus that can easily perform an operation of receiving or transporting, particularly an apparatus that requires transporting a long distance such as 1 m or more.

[0002]

2. Description of the Related Art In a vacuum apparatus for the purpose of surface analysis of solids, etc., a magnet is used as a method of a sample transfer apparatus in which the transfer of a sample in a vacuum housing can be operated from the atmosphere side outside the housing without contact A coupling type mechanism is known. This is to operate a vacuum carrying shaft equipped with a magnet by axial movement of the magnet on the atmosphere side or by rotation around the shaft in addition to the driving force in a non-contact manner. It is often used especially in vacuum devices in the ultra-high vacuum region because of the ease of sealing.

FIG. 3 shows an example of such a conventional magnet coupling type sample carrying device. In FIG. 3, reference numeral 101 denotes a vacuum apparatus housing, which is provided in a bottomed cylindrical structure with one end open, and its open end is assembled and fixed to a main body housing of the vacuum apparatus (not shown). Reference numeral 102 denotes a conveying shaft which is loosely fitted in the bottomed cylindrical housing 101 and is supported so as to be movable in the axial direction and rotatable about the axis. Reference numeral 113 denotes an operation shaft, which is a base plate 108 fixed to the housing 101.
By a, it is rotatable about the axis through the linear bearing 114 and the ball bearings 115a and 115b, and is moved in the axial direction parallel to the transport shaft 102 (hereinafter referred to as "translation" in the sense of axial movement parallel to the transport shaft). Is said to be provided freely.

Reference numeral 103 denotes the cylindrical housing 10 having a bottom.
1 is a cylindrical magnet on the atmosphere side, which is externally mounted on the slider 1. The slider 120 is supported by the slider 120 via ball bellings 121a and 121b so as to be rotatable about its axis.
20 is a base plate 108a fixed to the housing 101,
A guide rod 116 fixedly installed between 108b is movably supported in the axial direction via a ball bush 117, so that the housing 101 is movably provided in the axial direction. The slider 120 has a structure in which a pair of base plates 109a and 109b, which are spaced apart in the axial direction, are integrated by a side plate 122.

To the slider 120, one end of the operating shaft 113 is connected with axial movement restricted and axial rotation freely via ball bearings 123a and 123b. The gear 107a axially mounted on the shaft and the gear 107b axially mounted on the magnet 103 mesh with each other to transmit the rotation therebetween.

In the above structure, the operating shaft 113
When the operation handle 112 provided at one end of the housing 101 is rotated, the rotational force is passed through the operation shaft 113, the gears 107a and 107b, and the atmosphere side magnet 103, and the housing 101
The transfer shaft 102 is transmitted in a non-contact manner to the transfer shaft 102 in vacuum inside, and the transfer shaft 102 rotates about its axis. In addition, the operation handle 112
Is translated, the moving force is transmitted to the transfer shaft 102 through the operation shaft 113, the slider 120, and the atmosphere-side magnet 103 in a non-contact manner, and the transfer shaft 102 moves in the axial direction.

[0007]

However, in such a conventional sample transfer device shown in FIG. 3, when the transfer shaft 102 in vacuum is moved or rotated, the atmosphere-side magnet 103 and the operation for driving the magnet 103 are performed. Handle 112
And the movement amount thereof have a relationship of 1: 1. In particular, since the same translation amount as that of the transport shaft 102 is required in the operation handle 112, the operability is poor and there are many restrictions on the device design. This has been a problem to be solved in a vacuum device, which is often restricted by the provision of a space for translation of the operating handle due to physical restrictions.

The present invention overcomes the above-mentioned problems of the prior art, and it is not necessary to provide a space for translation of the operating handle even when transporting a sample over a long distance. An object of the present invention is to provide a sample transfer device for a vacuum device, which has excellent operability and is suitable even when a careful operation such as delivery and reception is required.

[0009]

A sample transfer device for a vacuum device according to the present invention is a sample container which is an object to be transferred and is supported so as to be movable at least in an axial direction in a housing of the vacuum device sealed from the atmosphere. For a vacuum device including a transfer shaft having a detachable sample container transfer jig and a magnetic coupling type operation means provided so that the transfer shaft can be axially moved without contact from the outside of the housing. In the sample transporting device, the magnet coupling type operating means is movably supported outside the housing along the axial direction of the transporting shaft, and the axial movement allows the transporting shaft in the housing to come into non-contact. A magnet means for entrainment movement, an operation shaft provided outside the housing so as to be movable in an axial direction parallel to the transport shaft, and a relative axis of the magnet means and the operation shaft. And disengagement means for releasing the restraint, if restrained and require countercurrent movement, there is to configured to have a movement limiting means of the guide shaft to limit axial movement range of the guide shaft to a predetermined length.

Another feature of the present invention is that the magnet means is provided so as to rotate in the axial direction of the transport shaft in addition to the axial movement of the transport shaft, and the guide shaft includes: In addition to axial movement parallel to the transport axis, rotation about the axis is possible, and rotation transmission means for transmitting rotation is provided between the guide axis and the magnet means.

[0011]

According to the above construction, by restraining the relative movement of the operation shaft and the magnet means in the axial direction, the operation of the operation shaft causes the conveyance shaft in the vacuum apparatus housing to move in the axial direction, and if necessary, this is performed. In addition, rotation around the axis can be performed, and by releasing the above constraint, the transport shaft in the vacuum device housing can be moved in the axial direction by moving the magnet means independently while the operation shaft is stopped. You can

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A specific example of the device of the present invention will be described below with reference to the drawings.

In FIG. 1, reference numeral 1 denotes a vacuum device housing, which is provided in a bottomed cylindrical structure with one end open, and its open end (the left end in FIG. 1) is not shown in the body of the vacuum device. It is assembled and fixed to the housing. Reference numeral 2 denotes a conveying shaft which is loosely fitted in the bottomed cylindrical housing 1 and is supported so as to be movable in the axial direction and rotatable about the axis. The conveying shaft has a tip (the left end in FIG. 1) for conveying. Figure 2 which is the object
Sample container conveying jig 4 that can be attached to and detached from the sample container 30 shown in
0 is provided. The sample container carrying jig 40
Will be described later.

Reference numeral 4 is an operation shaft which also serves as a guide shaft, and is fixed to the housing 1 by base plates 8a and 8b.
A stopper 11a is provided which is rotatable about an axis through ball bearings 5a and 5b and is movable (translated) in an axial direction parallel to the conveying shaft 2 and is fixed to the operating shaft 4 by a shaft. , 11b are provided so as to have a certain degree of axial play (40 mm in this example) with respect to the base plate 8a. In other words, the operation shaft 4 is movable in the axial direction within the range of 40 mm limited by the stopper, but is restricted from moving further.

Reference numeral 3 denotes a cylindrical magnet on the atmosphere side which is mounted on the bottomed cylindrical housing 1 so as to be movable in the axial direction and rotatable about the axis. The magnet 20 is attached to the slider 20 via ball bellings 21a and 21b. It is rotatably supported,
Moreover, this slider 20 has a ball bearing 22a,
The linear bearing case 23 is rotatably supported via 22b, and the linear bearing case 23 is further fitted to the operating shaft 4 via the linear bearing 6 so as to be movable in the axial direction. 1 is provided so as to be movable in the axial direction. The linear bearing case 23 can move axially with respect to the operating shaft 4 via the linear bearing 6, but is restricted from rotating about the operating shaft 4 about the axis of rotation, and the slider 20 has a ball bearing. 22a, 22b
Although it is possible to rotate about the axis, the axial movement is restricted.

The slider 20 is provided with a structure in which a pair of base plates 9a and 9b which are spaced apart in the axial direction are integrated by a side plate 24.

When the gear 7a axially mounted on the linear bearing case 23 and the gear 7b axially mounted on the magnet 3 mesh with each other, the rotation of the operating shaft 4 is rotated by the magnet 3 and hence the transport shaft 2 in the housing 1. It is being transmitted.

The characteristic feature of this embodiment is that the linear bearing case 23 of the slider 20 is constrained by the lock screw 10 so that the linear bearing case 23 cannot move relative to the operating shaft 4 in the axial direction.
It is provided so that it can be switched between the states where the restraint is released. The operation shaft 4 in this example is provided with an axial groove 4a with which the linear bearing 6 of the linear bearing case 23 engages at three or more circumferentially equidistantly spaced positions. Rotation of the operating shaft 4 is transmitted to the gear 7a by restraining rotation of the linear bearing case 23 about the operating shaft 4. Reference numeral 25 denotes a C-shaped ring assembled to the threaded portion 23a at the end of the linear bearing case 23 into which the lock screw 10 is screwed. By screwing the lock screw, the C-shaped ring 25 tightens the operating shaft 4 to operate the slider 20. Constrain axial movement on axis 4.

Next, the sample container carrying jig 40 will be described. A male screw 41 for supporting the sample table 30 shown in FIG. 2B by screw coupling is provided at the tip of the transport shaft 2.
And a pressing piece 42 as a rotation stopping member for restraining the rotation of the sample table 30. That is, the male screw 41 is fixed to the tip of the transport shaft 2 by the pin 43 so that the male screw 41 cannot rotate relative to the shaft.
The outer periphery of the distal end of the is externally rotatable and movable in the axial direction, and the outer periphery of the base side of the male screw 41 is rotatable about the axis and restrained in the axial movement. A spring holder 44 is externally mounted, and a compression spring 45 is stretched between the spring holder 44 and the pressing piece 42. Further, the tip of the pressing piece 42 is provided so as to form an arcuate concave surface so that it can be engaged along the circular side surface of the sample table 30, and the concave surface is locked at a position substantially matching the tip position of the male screw 41. To be,
The limit position is given by the flange 46 provided on the male screw 41.

The pair of the pressing piece 42 and the spring holder 44, in which the spring 45 is stretched in the middle, are
It is provided so as to integrally rotate about the axis with respect to the male screw 41, and when there is a relative rotational force that exceeds the rotational resistance (friction force) of the rotation around the axis with respect to this male screw 41, that is, the pressing piece. When the transport shaft is rotated while the rotation of the sample table 30 screwed to the sample table 42 is restricted on the stage 47, the male screw 4 accompanying the screwing operation is performed.
It can rotate freely with respect to one rotation.
That is, when the male screw 41 of the transport shaft 2 is screwed into and rotated with respect to the pressing piece 42 whose rotation is restricted,
Also, the spring holder 44 slides and rotates around the male screw 41.

FIG. 2B is a view for explaining the screwing support of the sample table 30 and the releasing operation thereof by the apparatus of this example having the above configuration.

Next, the operation of the apparatus of this example will be described.

First, in the case of a long distance conveyance in which the translational limit of the operation shaft 4 with respect to the base plate 8a exceeds 40 mm, the lock by the lock screw 10 is released and the linear bearing 6 on the operation shaft 4 is released. Freely translate. If the slider 20 is moved in this state, the slider 20 carrying the magnet 3 on the atmosphere side can be smoothly moved by the linear bearing 6 along the axis without being restricted by the operation axis 4.

Therefore, by this operation, the carrier shaft 2 in vacuum inside the housing 1 which is magnetically coupled to the atmosphere-side magnet 3 also moves, and the carrier shaft 2 does not move in the axial direction at all. It can be moved in the vacuum device by a distance.

At this time, if the operation shaft 4 is rotated by the rotation of the operation handle 12 fixed thereto, the gear 7
Rotation is transmitted to the magnet 3 by the meshing of a and 7b, and the transport shaft 2 in the housing 1 is thereby rotated.

On the other hand, after roughly moving the transport shaft 2 to the vicinity of the stage for mounting the sample container by the moving operation of the slider 20 alone, for finely moving the transport shaft 2 for handing over or receiving the sample. In this state, the lock screw 10 is tightened to lock the slider 20 and the operating shaft 4 so that their relative movement is constrained, and in this state, the operating handle 12 is rotated or translated with respect to the transport shaft. This movement can be transmitted to the transport shaft 2 in the housing via the magnet 3.

Therefore, the operator operates the magnet 3
Wherever is in the housing 1, the transfer shaft 2 can be finely moved in almost the same place, and there are few spatial restrictions on the main body of the vacuum apparatus.

Furthermore, according to the apparatus of the embodiment shown in FIG. 1, the base plate 8a for supporting the operation shaft 4 at the separated positions,
8b, the movement range of the operation shaft 4 is 40 mm, which is extremely short. Therefore, this can also be used as a guide shaft for guiding the movement of the slider 20, which is long as in the device shown in FIG. There is also an advantage that the fixed guide shaft 116, which is separately provided in order to prevent the operation shaft 113 that moves the distance from becoming long, can be omitted.

[0029]

As described above, the sample carrying device for the vacuum device of the present invention has the following effects as compared with the conventional device.

1) It is possible to switch between a careful operation by the operation axis which also serves as the guide axis and an operation by the slider in which the axial restraint relationship with the operation axis is released, so that, for example, 1 m
After roughly moving the long distance as described above by moving the slider alone, the slider can be fixed to the operation shaft and the operation handle can be operated carefully when receiving or transferring or transferring the sample container on the stage. is there.

2) Since the amount of translation of the guide shaft with respect to the base plate is small, there are few spatial restrictions for installing the sample transfer device with respect to the vacuum device, and it can be used for most vacuum devices.

3) Since it is not necessary to provide a fixed guide shaft separate from the operation shaft unlike the conventional device, the number of parts is small and the device can be downsized.

[Brief description of drawings]

FIG. 1 is a sectional view showing an example of a sample transfer device for an in-vacuum device according to the present invention,

FIG. 2 is an enlarged view of a jig for transporting a sample container provided on a transport shaft of the embodiment,

FIG. 3 is a cross-sectional view of a conventional sample transfer device for a vacuum device.

[Explanation of symbols]

1: Housing of vacuum device, 2: Transport axis, 3: Magnet, 4: Operation axis, 5a. 5b: linear bearing case, 6: linear bearing, 7a, 7b: gear, 8a,
8b: base plate, 9a, 9b: base plate, 10: lock screw, 11a, 11b: stopper, 12: operation handle, 20: slider, 21a, 21b: ball bearing, 22a, 22b: ball bearing, 23: linear bearing case , 24: side plate, 30: sample container, 4
0: Jig for transporting sample container.

Claims (2)

[Claims] 1. A transfer shaft having a sample container transfer jig which is supported at least axially movably in a housing of a vacuum device sealed from the atmosphere and is attachable to and detachable from a sample container which is an object to be transferred. A sample transfer device for a vacuum device, comprising a magnet coupling type operating means provided so that the transfer shaft can be axially moved and operated from the outside of the housing without contact, the magnet coupling type operating means. The magnet means is movably supported outside the housing along the axial direction of the carrying shaft, and the magnet means for carrying the carrying shaft in the housing in a non-contact manner by the axial movement is parallel to the carrying shaft outside the housing. The operation shaft provided so as to be movable in the axial direction and the relative axial movement of the magnet means and the operation shaft are restrained and the restraint can be released if necessary. And disengaging means, the sample transport apparatus for a vacuum apparatus characterized by being configured to have a movement limiting means of the guide shaft to limit axial movement range of the guide shaft to a predetermined length. 2. The magnet means according to claim 1, wherein the magnet means is provided so as to be rotatable about an axis for entrained rotation of the transport shaft in addition to the axial movement of the transport shaft. A sample for a vacuum apparatus, which is capable of rotating about an axis in addition to axial movement parallel to the above, and further provided with rotation transmitting means for transmitting rotation between the guide shaft and the magnet means. Transport device.