JPH07202527A - Dielectric coaxial resonator and conductive film forming method for same - Google Patents

Dielectric coaxial resonator and conductive film forming method for same

Info

Publication number
JPH07202527A
JPH07202527A JP50794A JP50794A JPH07202527A JP H07202527 A JPH07202527 A JP H07202527A JP 50794 A JP50794 A JP 50794A JP 50794 A JP50794 A JP 50794A JP H07202527 A JPH07202527 A JP H07202527A
Authority
JP
Japan
Prior art keywords
dielectric
coaxial resonator
electrode
peripheral surface
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50794A
Other languages
Japanese (ja)
Other versions
JP3498186B2 (en
Inventor
Hiroyuki Fujino
浩幸 藤野
Yoshiki Yamada
良樹 山田
Kimie Kaga
公衛 加賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP50794A priority Critical patent/JP3498186B2/en
Publication of JPH07202527A publication Critical patent/JPH07202527A/en
Application granted granted Critical
Publication of JP3498186B2 publication Critical patent/JP3498186B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To easily produce the dielectric coaxial resonator and to simplify a utilization by standardizing the external shape. CONSTITUTION:An electrode 4 is formed on an inside peripheral face 2A of a through hole 3, outside peripheral faces 2B parallel with the axis, and one end face 2C of a prismatic dielectric 2, which has a square section and has the circular through hole 3 formed on the axis and is made of ceramics or the like, to constitute a dielectric coaxial resonator 1. Dimensions L1 in the axial direction of the dielectric 2 are made longer than dimensions L2 in the axial direction based on the wavelength of the resonance frequency of the electrode 4, and the dimensions L2 in the axial direction of the electrode 4 are adjusted to easily constitute the dielectric coaxial resonator having an arbitrary resonance frequency.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、軸方向に延びる孔を有
する柱状誘電体の内周面及び外周面に導電性被膜を形成
してなる誘電体同軸共振器及び該誘電体同軸共振器の導
電性被膜形成方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric coaxial resonator in which a conductive coating is formed on the inner and outer peripheral surfaces of a columnar dielectric having a hole extending in the axial direction, and a dielectric coaxial resonator. The present invention relates to a conductive film forming method.

【0002】[0002]

【従来の技術】図15は、従来の誘電体同軸共振器を示
す斜視図、図16は、従来の誘電体同軸共振器の製造工
程を示す図である。
2. Description of the Related Art FIG. 15 is a perspective view showing a conventional dielectric coaxial resonator, and FIG. 16 is a view showing a manufacturing process of the conventional dielectric coaxial resonator.

【0003】同図に示す誘電体同軸共振器100は、終
端ショートの1/4波長誘電体同軸共振器で、略λg/
4(λg:共振周波数foの管内波長λg)の軸方向寸法
Lを有し、かつ、中心軸上に円形の貫通孔102が穿設
された断面正方形の角柱状のセラミックス等からなる誘
電体101の、上記貫通孔102の内周面101A、軸
に平行な外周面101B及び一方端面101Cに、銅、
銀等の金属膜Kを形成して構成されている。
The dielectric coaxial resonator 100 shown in the figure is a quarter-wave dielectric coaxial resonator with a short-circuited termination, and has a wavelength of approximately λg /.
4 (λg: tube wavelength λg of resonance frequency fo) in the axial direction, and a dielectric 101 made of prismatic ceramics or the like having a square cross section with a circular through hole 102 formed on the central axis. Of the inner peripheral surface 101A of the through hole 102, the outer peripheral surface 101B parallel to the axis, and the one end surface 101C with copper,
It is configured by forming a metal film K of silver or the like.

【0004】上記内周面101Aを被覆してなる金属膜
Kは、同軸共振器の内導体を構成し、上記外周面101
Bを被覆してなる金属膜Kは、同軸共振器の外導体を構
成し、該内導体と外導体とが上記一方端101Cに形成
された金属膜Kにより短絡されて終端ショートの1/4
波長同軸共振器が構成されている。
The metal film K covering the inner peripheral surface 101A constitutes the inner conductor of the coaxial resonator, and the outer peripheral surface 101 is formed.
The metal film K covering B constitutes the outer conductor of the coaxial resonator, and the inner conductor and the outer conductor are short-circuited by the metal film K formed at the one end 101C, and a quarter of the terminal short circuit is formed.
A wavelength coaxial resonator is configured.

【0005】上記誘電体同軸共振器100は、λg/4
以上の軸方向寸法L′を有する角柱状の誘電体101を
銅、銀等の導電性塗布材103で満たされた塗布材槽1
04に完全に浸漬して(図16(a))、上記貫通孔1
02の内周面101A、外周面101B及び両端面10
1C,101Dに導電性塗布材103が塗布された後、
所定の焼成温度で加熱して誘電体101全体に金属膜K
が形成され(図16(b))、この後、誘電体101の
一方端を、軸方向寸法Lが略λg/4になるまで研磨し
て製造されている(図16(c))。
The dielectric coaxial resonator 100 has a λg / 4
A coating material tank 1 in which a prismatic dielectric 101 having the above axial dimension L'is filled with a conductive coating material 103 such as copper or silver.
04 (FIG. 16 (a)), and the through hole 1
No. 02 inner peripheral surface 101A, outer peripheral surface 101B and both end surfaces 10
After the conductive coating material 103 is applied to 1C and 101D,
A metal film K is formed on the entire dielectric 101 by heating at a predetermined firing temperature.
Is formed (FIG. 16B), and then one end of the dielectric 101 is polished until the axial dimension L becomes approximately λg / 4 (FIG. 16C).

【0006】[0006]

【発明が解決しようとする課題】従来の誘電体同軸共振
器は、軸方向寸法Lが略λg/4に設定されているの
で、共振周波数foに応じて軸方向寸法Lが異なる。こ
のため、図17に示すように、異なる共振周波数foを
有する複数の誘電体同軸共振器100を開放端面101
Dを揃えて並設し、該開放端面101Dの前方に配置さ
れた結合基板105を介して縦続接続してなる誘電体フ
ィルタを構成した場合、誘電体同軸共振器100の終端
面101Cの面が不揃いになり、誘電体フィルタの収容
スペースを有効に利用することが困難である。
In the conventional dielectric coaxial resonator, since the axial dimension L is set to approximately λg / 4, the axial dimension L differs depending on the resonance frequency fo. Therefore, as shown in FIG. 17, a plurality of dielectric coaxial resonators 100 having different resonance frequencies fo are connected to the open end face 101.
When a dielectric filter is formed by arranging D in parallel and cascade-connecting via the coupling substrate 105 arranged in front of the open end surface 101D, the surface of the termination surface 101C of the dielectric coaxial resonator 100 is It becomes uneven, and it is difficult to effectively use the accommodation space of the dielectric filter.

【0007】また、従来の誘電体同軸共振器の製造方法
は、誘電体101全体を導電性部材で被覆した後、一方
端面を研磨して開放端面を形成するとともに、軸方向寸
法Lを所定の寸法に調整しているので、研磨工程に時間
を要し、製造に長時間を要することになっている。特に
誘電体同軸共振器の共振周波数foの種類が多くなる
と、上記研磨工程の作業内容が多種類になり、製造工程
が複雑になり、標準化が困難となる。
Further, in the conventional method for manufacturing a dielectric coaxial resonator, after covering the entire dielectric 101 with a conductive member, one end face is polished to form an open end face and the axial dimension L is set to a predetermined value. Since the dimensions are adjusted, it takes a long time for the polishing process and a long time for manufacturing. In particular, when the number of types of the resonance frequency fo of the dielectric coaxial resonator is increased, the work content of the polishing process is increased, the manufacturing process becomes complicated, and standardization becomes difficult.

【0008】本発明は、上記課題に鑑みてなされたもの
で、外観形状を標準化して誘電体フィルタ等への応用の
容易な誘電体同軸共振器及び製造の容易な該誘電体同軸
共振器の製造方法を提供することを目的とする。
The present invention has been made in view of the above problems, and a dielectric coaxial resonator having a standardized external shape and easily applied to a dielectric filter or the like, and a dielectric coaxial resonator easily manufactured. It is intended to provide a manufacturing method.

【0009】[0009]

【課題を解決するための手段】本発明は、1又は2以上
の軸方向に延びる孔を有する柱状の誘電体の軸に平行な
外周面、孔の内周面及び孔が設けられた少なくとも一方
の端面を導電材で被覆してなる誘電体同軸共振器におい
て、上記誘電体は、共振周波数の波長に基づく所定寸法
よりも長い軸方向寸法を有し、該誘電体の内周面及び外
周面は、上記端面から上記所定寸法だけ上記導電材で被
覆されているものである(請求項1)。
According to the present invention, at least one of an outer peripheral surface parallel to the axis of a columnar dielectric body having one or more axially extending holes, an inner peripheral surface of the hole, and a hole is provided. In the dielectric coaxial resonator in which the end face of is covered with a conductive material, the dielectric has an axial dimension longer than a predetermined dimension based on the wavelength of the resonance frequency, and the inner and outer peripheral surfaces of the dielectric are Is covered with the conductive material by the predetermined size from the end face (claim 1).

【0010】また、本発明は、上記誘電体同軸共振器の
製造方法であって、液状の導電材が入った導電材槽の上
方位置に、孔の上端を閉塞して上記誘電体を垂直に配置
し、第1の気圧中で上記誘電体を共振周波数の波長に基
づく所定寸法だけ上記槽内に浸漬して誘電体の下端面及
び外周面に導電材を塗布する第1の工程と、上記誘電体
を上記導電材槽に浸漬した状態で、気圧を上記第1の気
圧よりも高い所定の第2の気圧に昇圧して誘電体の内周
面に上記所定寸法だけ導電材を塗布する第2の工程と、
導電材が塗布された誘電体を所定の高温度で焼成して導
電性の被膜を形成する第3の工程からなるものである
(請求項2)。
Further, the present invention is a method of manufacturing the above dielectric coaxial resonator, wherein the upper end of the hole is closed above the conductive material tank containing the liquid conductive material so that the dielectric is vertically aligned. A first step of arranging and immersing the dielectric in the tank in a first atmospheric pressure by a predetermined dimension based on a wavelength of a resonance frequency to apply a conductive material to a lower end surface and an outer peripheral surface of the dielectric; In a state where the dielectric is immersed in the conductive material bath, the atmospheric pressure is increased to a predetermined second atmospheric pressure higher than the first atmospheric pressure to apply the conductive material on the inner peripheral surface of the dielectric by the predetermined size. 2 steps,
The third step comprises firing a dielectric material coated with a conductive material at a predetermined high temperature to form a conductive coating (claim 2).

【0011】[0011]

【作用】請求項1記載の発明によれば、誘電体の軸方向
寸法を内周面及び外周面に被覆される導電材の軸方向寸
法より長くし、該導電材の軸方向寸法が共振周波数の波
長に基づく所定寸法に設定されているので、共振周波数
に拘らず誘電体の外形形状を同一形状に標準化すること
が可能になる。
According to the first aspect of the invention, the axial dimension of the dielectric is made longer than the axial dimension of the conductive material coated on the inner and outer peripheral surfaces, and the axial dimension of the conductive material is the resonance frequency. Since the predetermined size is set based on the wavelength of, the outer shape of the dielectric can be standardized to the same shape regardless of the resonance frequency.

【0012】また、請求項2記載の発明によれば、貫通
孔の上端が密閉された上記誘電体を、第1の気圧中で上
記共振周波数の波長に基づく所定寸法だけ液状の導電性
塗布材で満たされた塗布材槽に浸漬すると、誘電体の下
端面及び軸と平行な外周面に下端から所定寸法だけ導電
性塗布材が塗布され、貫通孔の内周面には下端部のみ導
電性塗布材が塗布される。
According to the second aspect of the present invention, the dielectric coating material having the through hole sealed at the upper end is formed into a liquid conductive coating material in a first atmospheric pressure by a predetermined dimension based on the wavelength of the resonance frequency. When immersed in a coating material tank filled with, the conductive coating material is applied to the lower end surface of the dielectric and the outer peripheral surface parallel to the axis from the lower end to a specified size, and only the lower end is conductive on the inner peripheral surface of the through hole. A coating material is applied.

【0013】この状態で、気圧を第1の気圧から第2の
気圧に昇圧すると、気圧の上昇に応じて塗布材槽の液面
が押し下げられて貫通孔内の導電材の液面が上昇し、貫
通孔の内周面に下端から所定寸法だけ導電性塗布材が塗
布される。この後、導電性塗布材が塗布された誘電体を
所定の焼成温度で加熱することにより、導電性塗布材が
誘電体表面に焼結されて導電性の被膜が形成される。
In this state, when the atmospheric pressure is increased from the first atmospheric pressure to the second atmospheric pressure, the liquid surface of the coating material tank is pushed down in accordance with the increase of the atmospheric pressure, and the liquid surface of the conductive material in the through hole rises. The conductive coating material is applied to the inner peripheral surface of the through hole from the lower end by a predetermined size. Thereafter, by heating the dielectric material coated with the conductive coating material at a predetermined firing temperature, the conductive coating material is sintered on the surface of the dielectric material to form a conductive coating film.

【0014】[0014]

【実施例】図1は、本発明に係る電極形成方法により製
造された誘電体同軸共振器の第1実施例を示す斜視図、
図2は、同誘電体同軸共振器の縦断面図である。
1 is a perspective view showing a first embodiment of a dielectric coaxial resonator manufactured by an electrode forming method according to the present invention,
FIG. 2 is a vertical sectional view of the same dielectric coaxial resonator.

【0015】誘電体同軸共振器1は、正方形の断面形状
を有し、中心軸上に円形の貫通孔3が穿設されたセラミ
ックス等からなる柱状の誘電体2の、上記貫通孔3の内
周面2A、軸に平行な外周面2B及び一方端面2Cを、
銅、銀、白金等の電極(導電材)4で被覆して構成され
ている。なお、断面形状は、円形、楕円等の任意の断面
形状にすることができる。
The dielectric coaxial resonator 1 has a square cross-sectional shape, and the inside of the through hole 3 of the columnar dielectric 2 made of ceramics or the like in which the circular through hole 3 is formed on the central axis. The peripheral surface 2A, the outer peripheral surface 2B parallel to the axis, and the one end surface 2C are
It is formed by coating with an electrode (conductive material) 4 such as copper, silver, or platinum. The cross-sectional shape can be any cross-sectional shape such as a circle or an ellipse.

【0016】上記誘電体2の内周面2Aを被覆してなる
電極4は、同軸共振器の内導体を構成し、上記外周面2
Bを被覆してなる電極4は、同軸共振器の外導体を構成
し、上記一方端面2Cに被覆された電極4により上記内
導体及び該導体を短絡して終端ショートの同軸共振器が
構成されている。
The electrode 4 covering the inner peripheral surface 2A of the dielectric 2 constitutes the inner conductor of the coaxial resonator, and the outer peripheral surface 2
The electrode 4 formed by coating B constitutes an outer conductor of the coaxial resonator, and the electrode 4 coated on the one end face 2C short-circuits the inner conductor and the conductor to form a short-circuited coaxial resonator. ing.

【0017】上記誘電体2はλg/4よりも長い軸方向
寸法L1を有し、上記内周面2A及び外周面2Bは、一
方端2Cから所望の共振周波数foで共振する所定の寸
法L2だけ電極4が被覆されている。なお、この寸法L
2は、開放端の電界分布の影響により設計値と異なるこ
とから予め実験等により算出されるもので、λg/4よ
りも短い寸法である。
The dielectric 2 has an axial dimension L1 longer than λg / 4, and the inner peripheral surface 2A and the outer peripheral surface 2B have a predetermined dimension L2 at which one end 2C resonates at a desired resonance frequency fo. The electrode 4 is covered. In addition, this dimension L
2 is different from the design value due to the influence of the electric field distribution at the open end and is calculated in advance by experiments or the like, and is a dimension shorter than λg / 4.

【0018】そして、上記のように内導体及び外導体の
軸方向の寸法を設定することにより誘電体同軸共振器1
は、終端ショートの1/4波長同軸共振器となってい
る。
Then, by setting the axial dimensions of the inner conductor and the outer conductor as described above, the dielectric coaxial resonator 1
Is a quarter-wave coaxial resonator with a short-circuited termination.

【0019】図3は、本発明に係る誘電体共振器の電極
形成方法を示す概略図で、(a)は誘電体を液状の導電
性塗布材が入った塗布材槽に浸漬する前の状態を示す
図、(b)は誘電体を塗布材槽に浸漬した状態を示す
図、(c)は誘電体を塗布材槽に浸漬した状態で気圧を
上昇させた状態を示す図、(d)は塗布材槽から誘電体
を引き上げた状態で気圧を降下させた状態を示す図、
(e)は誘電体に塗布された導電性塗布材の焼成工程を
示す図である。
FIG. 3 is a schematic view showing a method for forming electrodes of a dielectric resonator according to the present invention. FIG. 3A is a state before the dielectric is immersed in a coating material tank containing a liquid conductive coating material. , (B) is a diagram showing a state where the dielectric is immersed in the coating material tank, (c) is a diagram showing a state where the atmospheric pressure is increased while the dielectric is immersed in the coating material tank, (d) Is a diagram showing a state in which the atmospheric pressure is lowered while the dielectric is pulled up from the coating material tank,
(E) is a figure which shows the baking process of the electroconductive coating material apply | coated to the dielectric material.

【0020】同図において、密閉容器5は、外部にポン
プ6が接続され、容器内の気圧が変更可能になってい
る。また、密閉容器5の内部には、銅、銀、白金等の液
状の導電性塗布材(以下、電極ペーストという)7が入
ったペースト槽(導電性塗布材槽)8が配置されてい
る。
In the figure, the closed container 5 has a pump 6 connected to the outside so that the atmospheric pressure in the container can be changed. A paste tank (conductive coating material tank) 8 containing a liquid conductive coating material (hereinafter referred to as an electrode paste) 7 such as copper, silver or platinum is arranged inside the closed container 5.

【0021】また、炉9は、複数個の温度槽が連結され
たトンネル状の電気炉で、炉内の通路に被加熱物を搬送
するベルトコンベア91が設けられている。各温度層
は、予め設定された焼成プロセスに基づく所定の温度に
保持されており、電極ペーストが塗布された誘電体2を
上記ベルトコンベア91により上流側から下流側に所定
速度で搬送して該誘電体2を所定の焼成温度で加熱する
ようになっている。
Further, the furnace 9 is a tunnel-shaped electric furnace in which a plurality of temperature tanks are connected to each other, and a belt conveyer 91 for conveying an object to be heated is provided in a passage in the furnace. Each temperature layer is kept at a predetermined temperature based on a preset firing process, and the dielectric material 2 coated with the electrode paste is conveyed from the upstream side to the downstream side at a predetermined speed by the belt conveyor 91, and The dielectric 2 is heated at a predetermined firing temperature.

【0022】誘電体同軸共振器1の製造工程は、電極ペ
ースト7を柱状の誘電体2に塗布する塗布工程と、誘電
体に塗布された電極ペースト7を焼成して金属膜を形成
する焼成工程とから構成されている。図3(a)〜
(d)は塗布工程に相当し、同図(e)は焼成工程に相
当している。
The manufacturing process of the dielectric coaxial resonator 1 includes a coating process of applying the electrode paste 7 to the columnar dielectric 2 and a baking process of baking the electrode paste 7 applied to the dielectric to form a metal film. It consists of and. Fig.3 (a)-
(D) corresponds to the coating step, and (e) in the figure corresponds to the firing step.

【0023】誘電体同軸共振器1は、以下の手順で製造
される。まず、ポンプ6により密閉容器5内を低気圧P
に保持する。次に、この密閉容器5内のペースト槽8の
上方位置に、貫通孔3の上端を密閉した誘電体2を垂直
に配置する(図3(a))。そして、低気圧Pの状態
で、誘電体2を垂直下方に下降し、その下端から共振周
波数foの波長に基づく所定寸法L2だけペースト槽8
に浸漬する(同図(b))。この後、ポンプ6により密
閉容器内5内の気圧を気圧Pよりも高い所定の気圧P′
に昇圧する(同図(c))。
The dielectric coaxial resonator 1 is manufactured by the following procedure. First, the low pressure P is generated in the closed container 5 by the pump 6.
Hold on. Next, the dielectric 2 having the upper end of the through hole 3 hermetically sealed is vertically arranged above the paste tank 8 in the hermetic container 5 (FIG. 3A). Then, in the state of the low pressure P, the dielectric 2 is vertically lowered, and the paste tank 8 is moved from the lower end thereof by a predetermined dimension L2 based on the wavelength of the resonance frequency fo.
(Fig. 2 (b)). Thereafter, the pump 6 is used to set the pressure inside the closed container 5 to a predetermined pressure P ′ higher than the pressure P.
The pressure is increased to ((c) in the figure).

【0024】上記気圧P′は、図4(a)(b)に示す
ように、貫通孔3内の電極ペースト7の液面M1が誘電
体2の外周面2Bに接している電極ペースト7の液面M
2に上昇する圧力である。すなわち、貫通孔3内の容積
をV(図4(a)参照)とし、上記電極ペースト7の液
面M1が液面M2に上昇したときの貫通孔3内の容積を
V′(図4(b)参照)とすると、ボイルの法則よりP
・V=P′・V′が成り立つから、気圧P′は、P′=
(P・V)/V′で算出される。
As shown in FIGS. 4 (a) and 4 (b), the atmospheric pressure P'in the electrode paste 7 is such that the liquid surface M1 of the electrode paste 7 in the through hole 3 is in contact with the outer peripheral surface 2B of the dielectric 2. Liquid level M
The pressure rises to 2. That is, the volume in the through hole 3 is V (see FIG. 4A), and the volume in the through hole 3 when the liquid level M1 of the electrode paste 7 rises to the liquid level M2 is V ′ (FIG. 4 ( b)), P.
・ V = P '・ V' holds, so the atmospheric pressure P'is P '=
It is calculated by (P · V) / V ′.

【0025】続いて、ペースト槽6から誘電体2を引上
げ、気圧Pよりも低い所定の気圧P″に降圧して貫通孔
3内に溜ったペーストを排出させる(図3(d))。そ
して、誘電体2に塗布された電極ペースト7を乾燥させ
た後、電気炉9により所定の焼成温度で加熱して該電極
ペースト7を焼結し、誘電体2の周面に電極被膜を形成
する(図3(e))。
Then, the dielectric 2 is pulled up from the paste tank 6 and the pressure is lowered to a predetermined atmospheric pressure P ″ lower than the atmospheric pressure P to discharge the paste accumulated in the through holes 3 (FIG. 3 (d)). After drying the electrode paste 7 applied to the dielectric 2, the electric paste 9 is heated at a predetermined firing temperature to sinter the electrode paste 7 and form an electrode coating on the peripheral surface of the dielectric 2. (FIG.3 (e)).

【0026】上記のように、誘電体同軸共振器1の誘電
体2の軸方向寸法L1を内導体及び外導体を構成する電
極4の軸方向寸法L2よりも長くし、誘電体2に形成さ
れる電極4の軸方向寸法L2を調節するようにしている
ので、誘電体同軸共振器1の製造が簡単になる。
As described above, the axial dimension L1 of the dielectric 2 of the dielectric coaxial resonator 1 is made longer than the axial dimension L2 of the electrodes 4 forming the inner conductor and the outer conductor, and the dielectric 2 is formed. Since the axial dimension L2 of the electrode 4 is adjusted, the manufacture of the dielectric coaxial resonator 1 is simplified.

【0027】また、共振周波数foに拘らず、誘電体同
軸共振器1の外形寸法を一定にすることができるので、
該誘電体同軸共振器1を応用した機器の設計が容易にな
る。例えば複数の誘電体同軸共振器を縦続接続してなる
誘電体フィルタにおいては、図5に示すように、並設さ
れた全誘電体同軸共振器1の開放端面2D及び終端面2
Cが面一になるので、誘電体同軸共振器1の配設位置に
デッドスペースが生じなく、誘電体フィルタの構造をコ
ンパクトかつ堅牢にすることができる。
Since the outer dimensions of the dielectric coaxial resonator 1 can be made constant regardless of the resonance frequency fo,
Designing a device to which the dielectric coaxial resonator 1 is applied is facilitated. For example, in a dielectric filter formed by connecting a plurality of dielectric coaxial resonators in cascade, as shown in FIG. 5, the open end surface 2D and the end surface 2 of the all-dielectric coaxial resonators 1 arranged in parallel are arranged.
Since C is flush, a dead space does not occur at the position where the dielectric coaxial resonator 1 is arranged, and the structure of the dielectric filter can be made compact and robust.

【0028】なお、上記実施例は、誘電体同軸共振器単
体について説明したが、本発明は、複数の軸方向の貫通
孔を有する誘電体の、内周面及び外周面に電極を形成し
て構成される一体成形型誘電体フィルタの構造にも適用
することができる。
Although the above embodiment has been described with respect to the dielectric coaxial resonator alone, in the present invention, electrodes are formed on the inner peripheral surface and the outer peripheral surface of the dielectric having a plurality of through holes in the axial direction. It can also be applied to the structure of the integrally formed dielectric filter configured.

【0029】また、上記誘電体同軸共振器1の製造方法
として、誘電体をペースト槽に所定寸法だけ浸漬させる
とともに、浸漬の前後で気圧を変化させて貫通孔の内周
面に形成される電極の軸方向寸法L2を制御するように
したので、簡単な方法で比較的高精度に電極を形成する
ことができ、切削による該電極の寸法の微調整を低減す
ることができる。
As a method of manufacturing the dielectric coaxial resonator 1, an electrode is formed on the inner peripheral surface of the through hole by immersing the dielectric material in a paste tank by a predetermined size and changing the atmospheric pressure before and after the immersion. Since the axial dimension L2 of the electrode is controlled, the electrode can be formed with relatively high accuracy by a simple method, and fine adjustment of the dimension of the electrode due to cutting can be reduced.

【0030】上記実施例では、貫通孔が穿設された誘電
体を用いているので、ペースト槽に浸漬する際に上記貫
通孔の開放端面側を栓等により密閉していたが、誘電体
2に代えて非貫通孔が穿設された誘電体を用いるように
してもよい。この誘電体では、上記のように貫通孔の開
放端面側を密閉する必要がないので、電極形成作業がよ
り簡単になる利点がある。
In the above-mentioned embodiment, since the dielectric material having the through hole is used, the open end face side of the through hole is sealed with a plug or the like when immersed in the paste tank. Instead of this, a dielectric having a non-through hole may be used. With this dielectric, it is not necessary to seal the open end face side of the through hole as described above, so there is an advantage that the electrode forming work becomes easier.

【0031】図6は、非貫通孔を有する誘電体を用いた
誘電体同軸共振器の構造の一例を示す斜視図、図7は、
同誘電体同軸共振器の縦断面図である。
FIG. 6 is a perspective view showing an example of the structure of a dielectric coaxial resonator using a dielectric having a non-through hole, and FIG.
It is a longitudinal cross-sectional view of the same dielectric coaxial resonator.

【0032】誘電体同軸共振器10の誘電体11は、正
方形の断面形状を有し、一方端面11Aの中心に軸に平
行な円形の非貫通孔12が穿設されている。誘電体11
の孔12の内周面は、軸に平行な面にのみ内導体電極1
3が形成されている。また、誘電体11の外周面は、上
記孔12の先端部に対向する位置に短冊状の入出力用の
端子電極15,16が形成され、この端子電極15,1
6を囲み、かつ、上記非貫通孔12に対向する部分に外
導体電極14が形成されている。上記内導体電極13及
び外導体電極14は、端面11A全体に形成された短絡
電極17により終端されている。
The dielectric 11 of the dielectric coaxial resonator 10 has a square cross-sectional shape, and a circular non-through hole 12 parallel to the axis is formed at the center of one end face 11A. Dielectric 11
The inner peripheral surface of the hole 12 of the inner conductor electrode 1 is only on the surface parallel to the axis.
3 is formed. Further, strip-shaped input / output terminal electrodes 15 and 16 are formed on the outer peripheral surface of the dielectric 11 at positions facing the tip of the hole 12, and the terminal electrodes 15 and 1 are formed.
An outer conductor electrode 14 is formed in a portion that surrounds 6 and faces the non-through hole 12. The inner conductor electrode 13 and the outer conductor electrode 14 are terminated by a short circuit electrode 17 formed on the entire end surface 11A.

【0033】この誘電体同軸共振器10は、上記端子電
極15,16と内導体電極13間に形成される結合容量
C1,C2を介して信号の入出力が行なわれ、等価回路
は、図8に示すようになっている。構造的には、図1に
示す誘電体同軸共振器1の開放端面に誘電体層が形成さ
れたものであり、図1の誘電体同軸共振器1の外周面2
Bの適所に上記端子電極15,16に相当する電極を形
成すれば、実質的に誘電体同軸共振器10と同一とな
る。
In this dielectric coaxial resonator 10, signals are input and output via coupling capacitors C1 and C2 formed between the terminal electrodes 15 and 16 and the inner conductor electrode 13, and the equivalent circuit is shown in FIG. As shown in. Structurally, a dielectric layer is formed on the open end surface of the dielectric coaxial resonator 1 shown in FIG. 1, and the outer peripheral surface 2 of the dielectric coaxial resonator 1 shown in FIG.
If electrodes corresponding to the above-mentioned terminal electrodes 15 and 16 are formed at appropriate positions in B, the dielectric coaxial resonator 10 is substantially the same.

【0034】誘電体同軸共振器10は、上述した方法に
より誘電体11の一方端面11A、外周面及び内周面に
電極4を形成した後、外周面11Bの端子電極15,1
6の形成位置の周囲の電極4を剥離して該端子電極1
5,16を形成する手順で製造される。
In the dielectric coaxial resonator 10, after the electrodes 4 are formed on the one end surface 11A, the outer peripheral surface and the inner peripheral surface of the dielectric 11 by the method described above, the terminal electrodes 15, 1 on the outer peripheral surface 11B are formed.
The terminal electrode 1 is formed by removing the electrode 4 around the formation position of 6
It is manufactured by the procedure of forming 5, 16.

【0035】なお、上記端子電極15,16に代えて開
放端面11Dに入出力用の端子電極を1個だけ形成する
ようにしてもよい。
Instead of the terminal electrodes 15 and 16, only one input / output terminal electrode may be formed on the open end surface 11D.

【0036】また、2個以上の非貫通孔を有する誘電体
を用いた場合は、一体成形型誘電体フィルタを容易に構
成することができる。
When a dielectric having two or more non-through holes is used, an integrally molded dielectric filter can be easily constructed.

【0037】図9は、本発明に係る電極形成方法により
製造される一体成形型誘電体フィルタの第1実施例を示
す斜視図、図10は、同一体成形型誘電体フィルタの縦
断面図、図11は、同一体成形型誘電体フィルタの等価
回路図である。
FIG. 9 is a perspective view showing a first embodiment of an integrally molded dielectric filter manufactured by the electrode forming method according to the present invention, and FIG. 10 is a longitudinal sectional view of the same molded dielectric filter. FIG. 11 is an equivalent circuit diagram of the same-body molding type dielectric filter.

【0038】誘電体フィルタ20は、長方形の断面形状
を有し、軸に平行な一対の非貫通孔22,23が穿設さ
れた角柱状のセラミックス等からなる誘電体21を用い
て構成された表面実装可能な一体成形型誘電体フィルタ
である。
The dielectric filter 20 has a rectangular cross section, and is constructed by using a dielectric 21 made of prismatic ceramics or the like having a pair of non-through holes 22 and 23 parallel to the axis. It is a surface-mountable integrally-formed dielectric filter.

【0039】誘電体フィルタ20は、図11の等価回路
に示すように、2個の誘電体同軸共振器θ1,θ2が一
体成形されたもので、誘電体21の軸に平行な幅広の一
方側面21Aが実装面となっている。誘電体21の非貫
通孔22,23の内周面21E,21Fは、端面21G
から所定寸法L2だけ電極4が形成され、上記側面21
Aの、上記非貫通孔22,23の先端閉塞部に形成され
た電極4に対向する位置に一対の短冊状の端子電極2
4,25が形成されている。
As shown in the equivalent circuit of FIG. 11, the dielectric filter 20 is formed by integrally molding two dielectric coaxial resonators θ1 and θ2, and has one wide side surface parallel to the axis of the dielectric 21. 21A is the mounting surface. Inner peripheral surfaces 21E and 21F of the non-through holes 22 and 23 of the dielectric 21 are end surfaces 21G.
The electrode 4 is formed by a predetermined dimension L2 from the side surface 21
A pair of strip-shaped terminal electrodes 2 are provided at positions facing the electrodes 4 formed at the tip closed portions of the non-through holes 22 and 23 of A.
4, 25 are formed.

【0040】端子電極24は、側面21Aに接する側面
21Bに回り込ませて形成され、端子電極25は、側面
21Aに接する側面2Cに回り込ませて形成されてい
る。また、誘電体21の側面21A〜21D全体及び両
端面21G,21Hに、上記端子電極24,25を囲む
ようにして電極4が形成されている。
The terminal electrode 24 is formed around the side surface 21B in contact with the side surface 21A, and the terminal electrode 25 is formed around the side surface 2C in contact with the side surface 21A. Further, the electrode 4 is formed on the entire side surfaces 21A to 21D of the dielectric 21 and both end surfaces 21G and 21H so as to surround the terminal electrodes 24 and 25.

【0041】上記側面21A〜21Dに形成された電極
4は、上記誘電体同軸共振器θ1,θ2の共通の外導体
を構成し、上記内周面21E,21Fに形成された電極
4は、それぞれ上記誘電体同軸共振器θ1,θ2の内導
体を構成し、端面21Gに形成された電極4は、上記内
導体と外導体との短絡電極を構成している。
The electrodes 4 formed on the side surfaces 21A to 21D constitute a common outer conductor of the dielectric coaxial resonators θ1 and θ2, and the electrodes 4 formed on the inner peripheral surfaces 21E and 21F respectively. The electrode 4 that forms the inner conductor of the dielectric coaxial resonators θ1 and θ2 and that is formed on the end face 21G forms the short-circuit electrode between the inner conductor and the outer conductor.

【0042】上記誘電体同軸共振器θ1,θ2は、誘電
体21内に形成される磁界により磁気的に結合され、端
子電極24と内周面21Eの電極4間に外部結合容量C
e1が構成され、端子電極25と内周面21Fの電極4
間に外部結合容量Ce2が構成されている。
The dielectric coaxial resonators θ1 and θ2 are magnetically coupled by the magnetic field formed in the dielectric 21, and the external coupling capacitance C is provided between the terminal electrode 24 and the electrode 4 on the inner peripheral surface 21E.
e1 is configured, and the terminal electrode 25 and the electrode 4 on the inner peripheral surface 21F
An external coupling capacitance Ce2 is formed between them.

【0043】更に、非貫通孔22,23の先端閉塞部に
形成された電極4と端面21H間で接地容量Cs1,Cs
2が構成されている。なお、この接地容量Cs1,Cs2
は、誘電体フィルタ20の軸方向寸法L1に寄与し、適
当に設定することにより軸方向寸法L1の短縮が可能に
なっている。
Further, the grounding capacitances Cs1 and Cs are provided between the electrode 4 and the end surface 21H which are formed at the tip closed portions of the non-through holes 22 and 23.
2 are configured. The ground capacitances Cs1 and Cs2
Contributes to the axial dimension L1 of the dielectric filter 20, and the axial dimension L1 can be shortened by appropriately setting.

【0044】誘電体フィルタ20は、誘電体21の端面
21H側をペースト槽8に浸漬して該端面21H及び側
面21A〜21Dの一部に電極ペースト7を塗布すると
ともに、上述のボイルの法則を用いた方法により誘電体
21の端面21G、側面21A〜21Dの残りの部分及
び内周面21E,21Fに電極ペースト7を塗布した
後、電気炉9により所定の温度で焼成して誘電体21に
電極4を形成し、この後、側面21A,21B,21C
の端子電極の形成位置の周囲の電極4を剥離して該端子
電極24,25を形成して製造される。
In the dielectric filter 20, the end face 21H side of the dielectric 21 is immersed in the paste tank 8 to apply the electrode paste 7 to the end face 21H and a part of the side faces 21A to 21D, and the above Boyle's law is applied. After applying the electrode paste 7 to the end face 21G, the remaining portions of the side faces 21A to 21D, and the inner peripheral faces 21E and 21F of the dielectric 21 by the method used, the dielectric paste 21 is baked at a predetermined temperature in the electric furnace 9. The electrode 4 is formed, and then the side surfaces 21A, 21B, 21C are formed.
The electrode 4 around the formation position of the terminal electrode is peeled off to form the terminal electrodes 24 and 25, which is manufactured.

【0045】図12は、本発明に係る電極形成方法によ
り製造される一体成形型誘電体フィルタの第2実施例を
示す斜視図、図13は、同一体成形型誘電体フィルタの
縦断面図である。
FIG. 12 is a perspective view showing a second embodiment of an integrally molded dielectric filter manufactured by the electrode forming method according to the present invention, and FIG. 13 is a vertical sectional view of the same molded dielectric filter. is there.

【0046】図12に示す一体成形型誘電体フィルタ2
0′は、図9において、端面21Hの非貫通孔22,2
3と同軸位置に非貫通孔26,27を穿設したものであ
る。従って、孔22と孔26間及び孔23と孔27間
は、それぞれ仕切壁28と29とにより分離されてい
る。孔26,27の軸に平行な内周面21I,21J
は、端面21Hから所定寸法L3だけ電極4が形成され
ている。
The integrally molded dielectric filter 2 shown in FIG.
In FIG. 9, 0'denotes the non-through holes 22, 2 of the end face 21H.
The non-through holes 26 and 27 are formed at the same position as the position 3 in FIG. Therefore, the holes 22 and 26 and the holes 23 and 27 are separated by the partition walls 28 and 29, respectively. Inner peripheral surfaces 21I, 21J parallel to the axes of the holes 26, 27
The electrode 4 is formed from the end face 21H by a predetermined dimension L3.

【0047】上記内周面21Iに形成された電極4と内
周面21Eに形成された電極4間で上記接地容量Cs1
が構成され、内周面21Jに形成された電極4と内周面
21Fに形成された電極4間で上記接地容量Cs2が構
成されている。従って、内周面21I,21Jに形成さ
れる電極4の長さ寸法L3を調整することにより上記接
地容量Cs1,Cs2を所要の容量値に調整することがで
きるようになっている。
The ground capacitance Cs1 is provided between the electrode 4 formed on the inner peripheral surface 21I and the electrode 4 formed on the inner peripheral surface 21E.
The ground capacitance Cs2 is formed between the electrode 4 formed on the inner peripheral surface 21J and the electrode 4 formed on the inner peripheral surface 21F. Therefore, the ground capacitances Cs1 and Cs2 can be adjusted to the required capacitance values by adjusting the length dimension L3 of the electrode 4 formed on the inner peripheral surfaces 21I and 21J.

【0048】一体成形型誘電体フィルタ20′も上記一
体成形型誘電体フィルタ20と同様の手順で製造される
が、誘電体21の端面21H側に電極ペースト7を塗布
する際、上述のボイルの法則を用いた方法により内周面
21I,21Jに塗布される電極ペースト7の寸法L3
を調整することにより接地容量Cs1,Cs2の調整を比
較的高精度に行なうことが可能である。
The integrally-molded dielectric filter 20 'is also manufactured by the same procedure as that of the integrally-molded dielectric filter 20. However, when the electrode paste 7 is applied to the end surface 21H side of the dielectric 21, the above-mentioned boiling Dimension L3 of the electrode paste 7 applied to the inner peripheral surfaces 21I and 21J by the method using the law
It is possible to adjust the ground capacitances Cs1 and Cs2 with relatively high accuracy by adjusting.

【0049】上記第2実施例では、結合孔を有しない一
体成形型誘電体フィルタについて説明したが、結合孔を
有する一体成形型誘電体フィルタに対しても本発明に係
る電極形成方法を適用することができる。
In the second embodiment, the integrally molded dielectric filter having no coupling hole has been described, but the electrode forming method according to the present invention is also applied to the integrally molded dielectric filter having the coupling hole. be able to.

【0050】すなわち、図14に示すように、電極ペー
スト7の粘度を高くすると、誘電体30をペースト槽8
に浸漬した場合、径の大きい孔31,32には電極ペー
スト7が浸入するが、径の小さい結合孔33には表面張
力により電極ペースト7が浸入しないから、結合孔33
の径の寸法に応じて電極ペースト7の粘度を適度に調整
することにより孔31,32の内周面にのみ電極を形成
することができる。
That is, as shown in FIG. 14, when the viscosity of the electrode paste 7 is increased, the dielectric 30 is moved to the paste bath 8
When soaked in, the electrode paste 7 penetrates into the holes 31 and 32 having a large diameter, but the electrode paste 7 does not penetrate into the bonding hole 33 having a small diameter due to surface tension.
By appropriately adjusting the viscosity of the electrode paste 7 in accordance with the diameter of the electrode, the electrode can be formed only on the inner peripheral surfaces of the holes 31 and 32.

【0051】[0051]

【発明の効果】以上説明したように、本発明によれば、
軸方向に延びる貫通孔を有する柱状の誘電体の軸に平行
な外周面、貫通孔の内周面及び一方端面を導電材で被覆
してなる誘電体同軸共振器において、上記誘電体の軸方
向寸法を共振周波数の波長に基づく所定寸法よりも長く
し、上記内周面及び外周面を上記一方端から上記共振周
波数の波長に基づく所定寸法だけ上記導電材で被覆する
ようにしたので、共振周波数に拘らず、誘電体同軸共振
器の外形寸法を同一寸法に標準化することができる。
As described above, according to the present invention,
In a dielectric coaxial resonator in which an outer peripheral surface parallel to the axis of a columnar dielectric body having a through hole extending in the axial direction, an inner peripheral surface of the through hole and one end surface are coated with a conductive material, the dielectric coaxial resonator has an axial direction. Since the dimension is made longer than the predetermined dimension based on the wavelength of the resonance frequency, and the inner peripheral surface and the outer peripheral surface are covered with the conductive material by the predetermined dimension based on the wavelength of the resonance frequency from the one end, the resonance frequency Regardless, the external dimensions of the dielectric coaxial resonator can be standardized to the same dimension.

【0052】これにより、共振周波数の異なる複数の誘
電体同軸共振器を縦続接続してなる誘電体フィルタ等に
適用した場合、誘電体同軸共振器の配列設置が容易で収
納スペースを有効に活用することができる。
As a result, when applied to a dielectric filter or the like in which a plurality of dielectric coaxial resonators having different resonance frequencies are connected in series, the dielectric coaxial resonators can be easily arranged and installed, and the storage space can be effectively utilized. be able to.

【0053】また、本発明によれば、共振周波数の波長
に基づく所定寸法よりも長い軸方向寸法を有する誘電体
を下端から上記所定寸法だけ導電性塗布材の槽に浸漬し
て、その一方端面、内周面及び外周面に導電性塗布材を
塗布し、この後、所定の焼成温度で加熱して導電性の被
覆層を形成するようにしたので、従来の誘電体の軸方向
寸法を調整するための研磨工程が不要となり、この分製
造工程が簡素化され、製造の自動化が可能になる。
Further, according to the present invention, a dielectric having an axial dimension longer than a predetermined dimension based on the wavelength of the resonance frequency is dipped from the lower end into the bath of the conductive coating material by the predetermined dimension, and one end surface thereof is Since the conductive coating material is applied to the inner and outer peripheral surfaces and then heated at a predetermined firing temperature to form the conductive coating layer, the axial dimension of the conventional dielectric is adjusted. The polishing process for this is unnecessary, the manufacturing process is simplified by this amount, and the manufacturing can be automated.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る電極形成方法により製造された誘
電体同軸共振器の第1実施例を示す斜視図である。
FIG. 1 is a perspective view showing a first embodiment of a dielectric coaxial resonator manufactured by an electrode forming method according to the present invention.

【図2】本発明に係る電極形成方法により製造された誘
電体同軸共振器の第1実施例の縦断面図である。
FIG. 2 is a vertical cross-sectional view of a first embodiment of a dielectric coaxial resonator manufactured by an electrode forming method according to the present invention.

【図3】本発明に係る電極形成方法を示す概略図で、
(a)は誘電体を塗布材槽に浸漬する前の状態を示す
図、(b)は誘電体を塗布材槽に浸漬した状態を示す
図、(c)は誘電体を塗布材槽の浸漬した状態で気圧を
上昇させた状態を示す図、(d)は塗布材槽から誘電体
を引き上げた状態で気圧を降下させた状態を示す図、
(e)は誘電体に塗布された導電性塗布材の焼成工程を
示す図である。
FIG. 3 is a schematic view showing an electrode forming method according to the present invention,
(A) is a diagram showing a state before the dielectric is immersed in the coating material tank, (b) is a diagram showing a state in which the dielectric is immersed in the coating material tank, and (c) is a diagram showing the dielectric being immersed in the coating material tank Showing a state in which the atmospheric pressure is raised in the state of being kept, (d) is a diagram showing a state in which the atmospheric pressure is lowered in a state where the dielectric is pulled up from the coating material tank,
(E) is a figure which shows the baking process of the electroconductive coating material apply | coated to the dielectric material.

【図4】導電性塗布材の液面の状態を示す図で、(a)
は誘電体を浸漬したときの導電性塗布材の液面の状態を
示す図、(b)は気圧を上昇したときの導電性塗布材の
液面の状態を示す図である。
FIG. 4 is a diagram showing the state of the liquid surface of the conductive coating material, (a)
FIG. 4 is a diagram showing a state of the liquid surface of the conductive coating material when the dielectric is immersed, and (b) is a diagram showing a state of the liquid surface of the conductive coating material when the atmospheric pressure is increased.

【図5】第1実施例に係る誘電体同軸共振器を用いた誘
電体フィルタの内部構造を示す平面図である。
FIG. 5 is a plan view showing the internal structure of a dielectric filter using the dielectric coaxial resonator according to the first embodiment.

【図6】非貫通孔を有する誘電体を用いた誘電体同軸共
振器の構造の一例を示す斜視図である。
FIG. 6 is a perspective view showing an example of a structure of a dielectric coaxial resonator using a dielectric having a non-through hole.

【図7】非貫通孔を有する誘電体を用いた誘電体同軸共
振器の縦断面図である。
FIG. 7 is a vertical sectional view of a dielectric coaxial resonator using a dielectric having a non-through hole.

【図8】非貫通孔を有する誘電体を用いた誘電体同軸共
振器の等価回路図である。
FIG. 8 is an equivalent circuit diagram of a dielectric coaxial resonator using a dielectric having a non-through hole.

【図9】本発明に係る電極形成方法により製造される一
体成形型誘電体フィルタの第1実施例を示す斜視図であ
る。
FIG. 9 is a perspective view showing a first embodiment of an integrally molded dielectric filter manufactured by the electrode forming method according to the present invention.

【図10】本発明に係る電極形成方法により製造される
一体成形型誘電体フィルタの第1実施例の縦断面図であ
る。
FIG. 10 is a vertical cross-sectional view of a first embodiment of an integrally molded dielectric filter manufactured by the electrode forming method according to the present invention.

【図11】本発明に係る電極形成方法により製造される
一体成形型誘電体フィルタの第1実施例の等価回路図で
ある。
FIG. 11 is an equivalent circuit diagram of a first embodiment of an integrally molded dielectric filter manufactured by the electrode forming method according to the present invention.

【図12】本発明に係る電極形成方法により製造される
一体成形型誘電体フィルタの第2実施例を示す斜視図で
ある。
FIG. 12 is a perspective view showing a second embodiment of an integrally molded dielectric filter manufactured by the electrode forming method according to the present invention.

【図13】本発明に係る電極形成方法により製造される
一体成形型誘電体フィルタの第2実施例の縦断面図であ
る。
FIG. 13 is a vertical cross-sectional view of a second embodiment of an integrally molded dielectric filter manufactured by the electrode forming method according to the present invention.

【図14】径の小さい結合孔を有する誘電体をペースト
槽に浸漬した状態を示す図である。
FIG. 14 is a diagram showing a state in which a dielectric having a coupling hole with a small diameter is immersed in a paste tank.

【図15】従来の誘電体同軸共振器を示す斜視図であ
る。
FIG. 15 is a perspective view showing a conventional dielectric coaxial resonator.

【図16】従来の誘電体同軸共振器の製造工程を示す図
で、(a)は誘電体を塗布材槽に浸漬する工程図、
(b)は誘電体に塗布され導電性塗布材を焼成する工程
図、(c)は金属膜が形成された誘電体を研磨する工程
図である。
FIG. 16 is a view showing a manufacturing process of a conventional dielectric coaxial resonator, (a) is a process drawing of immersing the dielectric in a coating material tank,
(B) is a process drawing of firing a conductive coating material applied to a dielectric, and (c) is a process drawing of polishing a dielectric having a metal film formed thereon.

【図17】従来の誘電体同軸共振器を用いた誘電体フィ
ルタの概略構造を示す平面図である。
FIG. 17 is a plan view showing a schematic structure of a dielectric filter using a conventional dielectric coaxial resonator.

【符号の説明】[Explanation of symbols]

1,10 誘電体同軸共振器 2,11,21,30 誘電体 3,12,22,23 孔 4 電極 5 密閉容器 6 ポンプ 7 電極ペースト 8 ペースト槽 9 炉 13 内導体電極 14 外導体電極 15,16,24,25 端子電極 20,20′ 誘電体フィルタ 31,32 孔 33 結合孔 1,10 Dielectric coaxial resonator 2,11,21,30 Dielectric 3,12,22,23 Hole 4 Electrode 5 Sealed container 6 Pump 7 Electrode paste 8 Paste tank 9 Furnace 13 Inner conductor electrode 14 Outer conductor electrode 15, 16, 24, 25 Terminal electrode 20, 20 'Dielectric filter 31, 32 hole 33 Coupling hole

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 1又は2以上の軸方向に延びる孔を有す
る柱状の誘電体の軸に平行な外周面、孔の内周面及び孔
が設けられた少なくとも一方の端面を導電材で被覆して
なる誘電体同軸共振器において、上記誘電体は、共振周
波数の波長に基づく所定寸法よりも長い軸方向寸法を有
し、該誘電体の内周面及び外周面は、上記端面から上記
所定寸法だけ上記導電材で被覆されていることを特徴と
する誘電体同軸共振器。
1. An outer peripheral surface parallel to the axis of a columnar dielectric having one or more axially extending holes, an inner peripheral surface of the hole and at least one end surface provided with the hole are coated with a conductive material. In the dielectric coaxial resonator, the dielectric has an axial dimension longer than a predetermined dimension based on the wavelength of the resonance frequency, and the inner peripheral surface and the outer peripheral surface of the dielectric have the predetermined dimension from the end surface. A dielectric coaxial resonator, characterized in that it is covered with the conductive material only.
【請求項2】 液状の導電材が入った導電材槽の上方位
置に、孔の上端を閉塞して上記誘電体を垂直に配置し、
第1の気圧中で上記誘電体を共振周波数の波長に基づく
所定寸法だけ上記槽内に浸漬して誘電体の下端面及び外
周面に導電材を塗布する第1の工程と、上記誘電体を上
記導電材槽に浸漬した状態で、気圧を上記第1の気圧よ
りも高い所定の第2の気圧に昇圧して誘電体の内周面に
上記所定寸法だけ導電材を塗布する第2の工程と、導電
材が塗布された誘電体を所定の高温度で焼成して導電性
の被膜を形成する第3の工程からなることを特徴とする
請求項1記載の誘電体同軸共振器の導電性被膜形成方
法。
2. The dielectric is vertically arranged by closing the upper end of the hole above the conductive material tank containing the liquid conductive material.
A first step of applying the conductive material to the lower end surface and the outer peripheral surface of the dielectric body by immersing the dielectric body in the tank under a first atmospheric pressure by a predetermined dimension based on the wavelength of the resonance frequency; and A second step of applying the conductive material to the inner peripheral surface of the dielectric material by the predetermined dimension while raising the atmospheric pressure to a predetermined second atmospheric pressure higher than the first atmospheric pressure while being immersed in the conductive material tank. And a third step of firing a dielectric material coated with a conductive material at a predetermined high temperature to form a conductive coating film, the conductivity of the dielectric coaxial resonator according to claim 1. Film forming method.
JP50794A 1994-01-07 1994-01-07 Method for forming conductive film on dielectric coaxial resonator Expired - Fee Related JP3498186B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50794A JP3498186B2 (en) 1994-01-07 1994-01-07 Method for forming conductive film on dielectric coaxial resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50794A JP3498186B2 (en) 1994-01-07 1994-01-07 Method for forming conductive film on dielectric coaxial resonator

Publications (2)

Publication Number Publication Date
JPH07202527A true JPH07202527A (en) 1995-08-04
JP3498186B2 JP3498186B2 (en) 2004-02-16

Family

ID=11475689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50794A Expired - Fee Related JP3498186B2 (en) 1994-01-07 1994-01-07 Method for forming conductive film on dielectric coaxial resonator

Country Status (1)

Country Link
JP (1) JP3498186B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111384493A (en) * 2018-12-29 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter and debugging method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111384493A (en) * 2018-12-29 2020-07-07 深圳市大富科技股份有限公司 Dielectric filter and debugging method thereof
CN111384493B (en) * 2018-12-29 2022-02-11 深圳市大富科技股份有限公司 Dielectric filter and debugging method thereof

Also Published As

Publication number Publication date
JP3498186B2 (en) 2004-02-16

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