JPH0719917A - Flowmeter - Google Patents

Flowmeter

Info

Publication number
JPH0719917A
JPH0719917A JP4355193A JP4355193A JPH0719917A JP H0719917 A JPH0719917 A JP H0719917A JP 4355193 A JP4355193 A JP 4355193A JP 4355193 A JP4355193 A JP 4355193A JP H0719917 A JPH0719917 A JP H0719917A
Authority
JP
Japan
Prior art keywords
flow rate
data
output signal
detecting means
coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4355193A
Other languages
Japanese (ja)
Other versions
JP3103700B2 (en
Inventor
Koichi Ueki
浩一 植木
Koichi Takemura
晃一 竹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Gas Co Ltd
Tokyo Gas Co Ltd
Toho Gas Co Ltd
Panasonic Holdings Corp
Original Assignee
Osaka Gas Co Ltd
Tokyo Gas Co Ltd
Toho Gas Co Ltd
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Gas Co Ltd, Tokyo Gas Co Ltd, Toho Gas Co Ltd, Matsushita Electric Industrial Co Ltd filed Critical Osaka Gas Co Ltd
Priority to JP05043551A priority Critical patent/JP3103700B2/en
Publication of JPH0719917A publication Critical patent/JPH0719917A/en
Application granted granted Critical
Publication of JP3103700B2 publication Critical patent/JP3103700B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)

Abstract

PURPOSE:To correct the fluctuation of a flow rate detecting sensor for measuring the flow rate of gas or liquid, and perform a highly precise flow rate calculation. CONSTITUTION:A coefficient data group determined from the data obtained by a fluid flow rate and the output signal of a flow rate detecting means 8 are preliminarily stored in a data storing means 9, and the data for correcting the dispersion of the flow rate detecting means 8 is inputted to a correction value input means 10. Further, a correcting means 11 corrects the coefficient data group stored in the data storage means 9 with a correction value. A flow rate arithmetic means 12 interpolates and approximates the nonlinear characteristic of a coefficient showing the relationship between a fluid flow rate Q and the flow rate detecting means 8 from the output signal detected by the flow rate detecting means 8 and the corrected data group of the coefficient data of the data storage means 9 to determine the flow rate.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、都市ガス、LPGガス
等の気体や水道水などの液体等の流体流量を計測する流
量計に係わり、特に流量検出センサーとしてフルイディ
ック素子を用いた流量計で、流量計間の器差を簡単且つ
速く修正し流量センサーの出力信号より高精度の演算機
能を有する流量計に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow meter for measuring the flow rate of gas such as city gas, LPG gas or liquid such as tap water, and particularly to a flow meter using a fluidic element as a flow rate detecting sensor. Thus, the present invention relates to a flow meter which can easily and quickly correct the instrumental difference between the flow meters and has a calculation function with higher accuracy than the output signal of the flow rate sensor.

【0002】[0002]

【従来の技術】従来、この種の流量計は、例えば特開平
3−44512号公報に示されているように、図4、図
5のような構成になっていた。
2. Description of the Related Art Conventionally, a flow meter of this type has a structure as shown in FIGS. 4 and 5, as disclosed in Japanese Patent Laid-Open No. 3-44512.

【0003】即ち、図4の従来の流量計において、1は
流量計で、2はガス配管、3はフルイディック発振素子
で、流体のもつ運動エネルギーを利用して流体発振を生
じさせる。4は圧電膜センサーで、流体発振の周波数を
検出する。5はフローセンサで小流量域の流量を検出す
る。6は遮断弁で、異常な使用状態を検出するとガスの
供給を遮断する。7は制御装置である。
That is, in the conventional flowmeter of FIG. 4, 1 is a flowmeter, 2 is a gas pipe, and 3 is a fluidic oscillation element, which causes fluid oscillation by utilizing the kinetic energy of the fluid. A piezoelectric film sensor 4 detects the frequency of fluid oscillation. A flow sensor 5 detects a flow rate in a small flow rate range. A shutoff valve 6 shuts off the gas supply when an abnormal use state is detected. Reference numeral 7 is a control device.

【0004】図5に制御装置7の特性を示す。ガス配管
2を流れる流体はフルイディック発信素子3を通過する
時で流体発振を生じる。そのときの発振周波数Fと流体
流量とのフルイディック発振素子3で関係が一般にQ=
A・F+Bなる直線近似式が成立することを利用して流
量を求める。しかしフルイディック発振素子3は計測す
る全流量域で前述の直線式は成立しない。従って直線近
似が可能な発振周波数範囲毎に直線近似式の定数A、B
を変えて流量を求める。図5は周波数F0で直線近似式
が切り替わる場合である。
FIG. 5 shows the characteristics of the control device 7. The fluid flowing through the gas pipe 2 causes fluid oscillation when passing through the fluidic transmission element 3. The relationship between the oscillation frequency F and the fluid flow rate at that time is generally Q =
The flow rate is obtained by utilizing the fact that the linear approximation formula A · F + B holds. However, the fluidic oscillating element 3 does not hold the above-described linear equation in the entire flow rate range to be measured. Therefore, the constants A and B of the linear approximation equation are set for each oscillation frequency range where linear approximation is possible.
To obtain the flow rate. FIG. 5 shows a case where the linear approximation formula is switched at the frequency F0.

【0005】次に定数A、Bはバラツキがあり16段階
に分割しあらかじめ設定しておく。そして周波数範囲が
F0までの領域においてA0、B0の最適な組合せを16
段階の中より選ぶ。同様に周波数がF0以上の場合、A
1、B1の最適な組合せを16段階の中から選択し設定す
る。以上の処理を行った後流量計測をし圧電膜センサ4
から検出した周波数より流量を求める。
Next, since the constants A and B have variations, they are divided into 16 steps and set in advance. Then, the optimum combination of A0 and B0 is 16 in the frequency range up to F0.
Choose from among the stages. Similarly, if the frequency is F0 or higher, A
The optimum combination of 1 and B1 is selected from 16 steps and set. After performing the above processing, the flow rate is measured and the piezoelectric film sensor 4
Calculate the flow rate from the frequency detected from.

【0006】[0006]

【発明が解決しようとする課題】しかしながら上記従来
の構成では、流量と振動周波数(あるいは周期)の関係
を示す定数を16段階しか設定していないため、特に設
定した段階の間に最適値がある場合、器差が大きくな
り、その結果流量を精度良く計測できず、また積算流量
値にも影響するという課題があった。
However, in the above-mentioned conventional configuration, since the constant indicating the relationship between the flow rate and the vibration frequency (or cycle) is set only in 16 steps, there is an optimum value especially between the set steps. In this case, there is a problem that the instrumental difference becomes large and, as a result, the flow rate cannot be accurately measured and the integrated flow rate value is also affected.

【0007】本発明は上記課題を解決するもので、流量
検出手段のバラツキを吸収しかつ出力信号より正確な流
量演算をおこなえる流量計を提供することを目的とした
ものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a flow meter capable of absorbing variations in flow rate detecting means and performing accurate flow rate calculation from an output signal.

【0008】[0008]

【課題を解決するための手段】本発明は上記目的を達成
するため、流体流量を検出する流量検出手段と、予め前
記流量検出手段の出力信号と流体流量に対応した前記流
量検出手段の出力信号とから求めた係数群とを記憶した
データ記憶手段と、前記データ記憶手段のデータを補正
する値を入力する補正値入力手段と、前記補正データで
前記データ記憶手段のデータ値を補正する補正手段と、
前記流量検出手段の出力信号と前記補正手段で補正され
た係数データ群とから流量を演算する流量演算手段とを
有するものである。
In order to achieve the above object, the present invention provides a flow rate detecting means for detecting a fluid flow rate, an output signal of the flow rate detecting means and an output signal of the flow rate detecting means corresponding to the fluid flow rate in advance. And a correction value input means for inputting a value for correcting the data of the data storage means, and a correction means for correcting the data value of the data storage means with the correction data. When,
The flow rate calculation means calculates a flow rate from the output signal of the flow rate detection means and the coefficient data group corrected by the correction means.

【0009】[0009]

【作用】本発明は上記構成によって、流体流量と流量検
出手段の出力信号との関係を示す係数のバラツキを補正
値入力手段より入力した補正値をもとに補正手段で最適
値に補正する。その補正された係数データと流量検出手
段の出力信号とから流量演算手段で瞬時流量を演算し更
に積算流量を求める。
According to the present invention, with the above structure, the correction means corrects the variation of the coefficient indicating the relationship between the fluid flow rate and the output signal of the flow rate detection means to the optimum value based on the correction value input from the correction value input means. The instantaneous flow rate is calculated by the flow rate calculation means from the corrected coefficient data and the output signal of the flow rate detection means, and the integrated flow rate is further obtained.

【0010】このように流体流量と流量検出手段の出力
信号との非線形な関係を示す希有数のバラツキを補正値
入力手段で正確に補正して流量を求めるので、流量誤差
を極めて小さく、高精度にもとめることができる。その
結果ガスの使用量である積算値も正確に計測できる。
As described above, since the rare number variation showing the non-linear relationship between the fluid flow rate and the output signal of the flow rate detecting means is accurately corrected by the correction value input means to obtain the flow rate, the flow rate error is extremely small and the accuracy is high. It can be stopped. As a result, the integrated value, which is the amount of gas used, can be accurately measured.

【0011】[0011]

【実施例】以下本発明の実施例を図1を参照して説明す
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG.

【0012】図1において、図4、図5と同相当物には
同一番号を付した。図1は本発明の一実施例の流量計の
ブロック図である。図1において、8は流量検出手段
で、例えばフルイディック発振素子3を用いて流体発振
を発生させ、流体の発振周波数を例えば圧電センサー、
サーミスタ等を用いて圧力−電圧変化、熱−抵抗変化と
して検出したり、あるいは熱線式センサーにより流速を
求める。
In FIG. 1, the same parts as those in FIGS. 4 and 5 are designated by the same reference numerals. FIG. 1 is a block diagram of a flow meter according to an embodiment of the present invention. In FIG. 1, reference numeral 8 is a flow rate detecting means, which causes fluid oscillation by using, for example, a fluidic oscillation element 3, and determines the oscillation frequency of the fluid by a piezoelectric sensor,
It is detected as a pressure-voltage change or a heat-resistance change using a thermistor or the like, or the flow velocity is obtained by a hot wire type sensor.

【0013】9はデータ記憶手段で、予め計測したい流
量範囲でサンプリングした流体流量Qとその時の流量検
出手段8の出力信号とのサンプリングデータより流体流
量と流量検出手段8の関係を示す係数を求め、係数と流
量検出手段8の出力信号とのペアで記憶している。10
は補正値入力手段で、流量検出手段8のバラツキを補正
する値が入力される。あるいは設定器(図示せず)など
を介し補正値を補正値入力手段に送信する。11は補正
手段で補正値入力手段10に入力された補正値でデータ
記憶手段9に格納された係数データ群を補正する。
Reference numeral 9 denotes a data storage means, and a coefficient indicating the relationship between the fluid flow rate and the flow rate detection means 8 is obtained from sampling data of the fluid flow rate Q sampled in advance in the flow rate range to be measured and the output signal of the flow rate detection means 8 at that time. , And the output signal of the flow rate detecting means 8 are stored as a pair. 10
Is a correction value input means to which a value for correcting the variation of the flow rate detection means 8 is input. Alternatively, the correction value is transmitted to the correction value input means via a setter (not shown) or the like. A correction unit 11 corrects the coefficient data group stored in the data storage unit 9 with the correction value input to the correction value input unit 10.

【0014】12は流量演算手段で、流量検出手段8で
検出した出力信号と補正手段11で修正された係数デー
タ群とより、そのときの瞬時流量を演算し求める。13
は積算流量演算手段で、求めた流量を積算し積算値を求
める。14は表示手段で、積算値等を表示する。
Reference numeral 12 denotes a flow rate calculation means, which calculates and calculates the instantaneous flow rate at that time from the output signal detected by the flow rate detection means 8 and the coefficient data group corrected by the correction means 11. Thirteen
Is an integrated flow rate calculation means for integrating the obtained flow rates to obtain an integrated value. Reference numeral 14 is a display means for displaying the integrated value and the like.

【0015】次に上記構成の動作を図2を用いて説明す
る。ガスが使用され始めるとガス流量を流量検出手段8
によって例えば電圧信号などの信号形態で検出する。こ
のとき流体流量と流量検出手段の出力信号とは非線形な
特性を有し、その時の流体流量Qと流量検出手段8の出
力信号の関係を示す係数δ(F)は図2に示すように非線
形な特性を有する。そこで予め流量と流量検出手段8の
出力信号との関係を測定し、いくつかサンプリングし、
係数を求め例えば設定器(図示せず)を介してデータ記
憶手段に9に転送する。設定器とは流量計測に必要なデ
ータ、例えば流量と流量検出手段の出力信号とを入力し
データ伝送する装置である。流体流量Qと流量検出手段
8の出力信号との関係を示す係数δ(F)はバラツキがあ
り、各々の流量計に取り付けられた流量検出手段8に応
じて補正する必要がある。そこで設定器等を介し補正値
入力手段10に取り付けられた流量検出手段のバラツキ
を修正する補正値を送る。次に補正手段11でデータ記
憶手段9に格納された全ての係数データを補正値で補正
する。補正された係数データ群は流量演算手段12に送
られる。以上が図3のP1、P2、P3である。
Next, the operation of the above configuration will be described with reference to FIG. When the gas starts to be used, the gas flow rate is detected by the flow rate detecting means 8
Is detected in the form of a signal such as a voltage signal. At this time, the fluid flow rate and the output signal of the flow rate detecting means have non-linear characteristics, and the coefficient δ (F) indicating the relationship between the fluid flow rate Q and the output signal of the flow rate detecting means 8 at that time is nonlinear as shown in FIG. It has various characteristics. Therefore, the relationship between the flow rate and the output signal of the flow rate detecting means 8 is measured in advance, several samplings are performed,
The coefficient is obtained and transferred to the data storage means 9 via, for example, a setter (not shown). The setting device is a device for inputting data necessary for flow rate measurement, for example, the flow rate and the output signal of the flow rate detecting means and transmitting the data. The coefficient δ (F) indicating the relationship between the fluid flow rate Q and the output signal of the flow rate detecting means 8 varies, and it is necessary to correct it according to the flow rate detecting means 8 attached to each flow meter. Therefore, a correction value for correcting the variation of the flow rate detection means attached to the correction value input means 10 is sent via a setting device or the like. Next, the correction means 11 corrects all the coefficient data stored in the data storage means 9 with the correction values. The corrected coefficient data group is sent to the flow rate calculation means 12. The above is P1, P2, and P3 in FIG.

【0016】図2に示す非線形特性の任意の流量検出手
段8の出力信号に対応した係数δ(F)は補正手段11で
補正された係数データ間で直線近似し求める。ここで、
δ(F)は流量検出手段8の出力信号Fに対応した係数であ
る。Fは流量検出手段8の出力信号で任意の値を示す。
Fi、Fjはデータ記憶手段9に格納された流量検出手
段の出力信号の値で、i番目、j番目の値を示すある。
The coefficient δ (F) corresponding to the output signal of the arbitrary flow rate detecting means 8 having the non-linear characteristic shown in FIG. 2 is obtained by linear approximation between the coefficient data corrected by the correcting means 11. here,
δ (F) is a coefficient corresponding to the output signal F of the flow rate detecting means 8. F is an output signal of the flow rate detecting means 8 and shows an arbitrary value.
Fi and Fj are the values of the output signal of the flow rate detection means stored in the data storage means 9, and indicate the i-th and j-th values.

【0017】図2において、横軸は流量検出手段8の検
出信号で、縦軸は係数を示す。計測しようとする流量範
囲に対応した検出信号の領域を、最も精度良く近似でき
るように任意に分割する。いま出力信号領域をn点分割
したとする。それぞれの境界信号をF1、F2、・・F
i、Fj・・、Fnとし、その時の係数値、即ち流量と
流量検出手段8の出力信号との比で与えられる値ををδ
(F1)、δ(F2)、・・、δ(Fn)、とする。
In FIG. 2, the horizontal axis represents the detection signal of the flow rate detecting means 8 and the vertical axis represents the coefficient. The area of the detection signal corresponding to the flow rate range to be measured is arbitrarily divided so that the most accurate approximation can be made. It is assumed that the output signal area is divided into n points. The respective boundary signals are F 1 , F 2 , ... F
i, Fj · ·, and F n, the coefficient value at that time, i.e., flow rate and a value given by the ratio of the output signal of the flow rate detecting unit 8 [delta]
(F 1 ), δ (F 2 ), ..., δ (F n ).

【0018】次に、瞬時流量Qは流量演算手段12で、
係数δ(F)と流量検出手段8の出力信号Fとから関係式
Q=δ(F)・Fより求める。即ち流量検出手段8で検出
した信号Fを前述の式に代入し流量を求める。積算流量
演算手段13は瞬時流量Qを加算し、使用合計の積算流
量を求める。表示手段14は求めた積算流量値等を表示
する。以上が図3のP4、P5、P6、P7である。
Next, the instantaneous flow rate Q is calculated by the flow rate calculating means 12.
From the coefficient δ (F) and the output signal F of the flow rate detecting means 8, the relational expression Q = δ (F) · F is obtained. That is, the signal F detected by the flow rate detecting means 8 is substituted into the above equation to obtain the flow rate. The integrated flow rate calculation means 13 adds the instantaneous flow rate Q to obtain the total used flow rate. The display means 14 displays the calculated integrated flow rate value and the like. The above are P4, P5, P6, and P7 in FIG.

【0019】このように、係数が非線形特性を示す流量
検出手段8の特性に合わせ、予め格納したデータ記憶手
段9の係数データ群を補正値入力手段10を介し入力し
た補正値で最も器差が少なくなるように補正し、更にサ
ンプリングしたポイント間の係数は直線近似するので、
検出した流量検出手段8の出力信号に対する係数を正確
に求めることが出来、かつ補正処理も簡単かつ連続無段
階の行え、その結果流量を高精度で求められ、また積算
流量などの流量計測をも正確に求めれる。
As described above, the coefficient data group of the data storage means 9 stored in advance is matched with the characteristic of the flow rate detecting means 8 whose coefficient shows a non-linear characteristic, and the correction value input through the correction value input means 10 has the most instrumental error. It is corrected so that it becomes smaller, and the coefficient between the sampled points is approximated by a straight line.
The coefficient for the detected output signal of the flow rate detecting means 8 can be accurately obtained, and the correction process can be performed easily and continuously without any step. As a result, the flow rate can be obtained with high accuracy, and the flow rate such as the integrated flow rate can be measured. Accurately required.

【0020】本発明は流体流量を計測するフルイディッ
ク式流量計の例をあげたが、他の例えば水道メータなど
の流量計に関しても上記の内容を適用できる。
The present invention has exemplified the fluidic type flow meter for measuring the flow rate of the fluid, but the above contents can be applied to other flow meters such as water meters.

【0021】[0021]

【発明の効果】以上説明したように本発明の流量計は、
予めデータ記憶手段にサンプリングした流量と流量検出
手段の出力信号との関係を示す係数データを記憶させて
おき、補正値入力手段に流量検出手段のバラツキを補正
する補正値を入力しその補正値で係数データ群を補正
し、更に補正手段で補正された係数データと、ガス等の
流体を使用開始するとそのときの流体流量を流量検出手
段で検出し、瞬時流量を求め、次に積算流量を演算し求
めるので、非線形な特性を有しかつ流量検出手段のバラ
ツキを補正した係数で流量を求めるので、簡単にかつ連
続無段階に補正でき高精度で正確に流量計測を行えると
いう効果がある。
As described above, the flowmeter of the present invention is
The coefficient data indicating the relationship between the sampled flow rate and the output signal of the flow rate detecting means is stored in advance in the data storage means, and the correction value for correcting the variation of the flow rate detecting means is input to the correction value input means. When the coefficient data group is corrected and the coefficient data corrected by the correction means and the fluid such as gas are started to be used, the flow rate detection means detects the fluid flow rate at that time, the instantaneous flow rate is calculated, and then the integrated flow rate is calculated. Since the flow rate is calculated, the flow rate is calculated using a coefficient that has a non-linear characteristic and the variation of the flow rate detecting means is corrected, and therefore, there is an effect that the flow rate can be easily and continuously corrected and the flow rate can be accurately measured with high accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例における流量計の制御ブロッ
ク図
FIG. 1 is a control block diagram of a flow meter according to an embodiment of the present invention.

【図2】同流量計の流量検出手段と流量との関係を示す
係数の特性図
FIG. 2 is a characteristic diagram of coefficients showing the relationship between the flow rate detecting means of the flowmeter and the flow rate.

【図3】同流量計の動作を示すフローチャートFIG. 3 is a flowchart showing the operation of the flow meter.

【図4】従来の流量計のシステム図[Fig. 4] System diagram of a conventional flow meter

【図5】同流量計の制御装置の特性図FIG. 5 is a characteristic diagram of the control device of the same flow meter.

【符号の説明】[Explanation of symbols]

8 流量検出手段 9 データ記憶手段 10 補正値入力手段 11 補正手段 12 流量演算手段 8 flow rate detection means 9 data storage means 10 correction value input means 11 correction means 12 flow rate calculation means

フロントページの続き (72)発明者 植木 浩一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 竹村 晃一 大阪府門真市大字門真1006番地 松下電器 産業株式会社内Front page continuation (72) Inventor Koichi Ueki 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Koichi Takemura 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】流体流量を検出する流量検出手段と、予め
前記流量検出手段の出力信号と流体流量に対応した前記
流量検出手段の出力信号とから求めた係数群とを記憶し
たデータ記憶手段と、前記データ記憶手段のデータを補
正する値を入力する補正値入力手段と、前記補正データ
で前記データ記憶手段のデータ値を補正する補正手段
と、前記流量検出手段の出力信号と前記補正手段で補正
された係数データ群とから流量を演算する流量演算手段
とからなる流量計。
1. A flow rate detecting means for detecting a fluid flow rate, and a data storage means for storing a coefficient group obtained in advance from an output signal of the flow rate detecting means and an output signal of the flow rate detecting means corresponding to the fluid flow rate. A correction value input means for inputting a value for correcting the data of the data storage means, a correction means for correcting the data value of the data storage means with the correction data, an output signal of the flow rate detection means and the correction means. A flow meter comprising a flow rate calculation means for calculating a flow rate from a corrected coefficient data group.
JP05043551A 1993-03-04 1993-03-04 Flowmeter Expired - Lifetime JP3103700B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP05043551A JP3103700B2 (en) 1993-03-04 1993-03-04 Flowmeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05043551A JP3103700B2 (en) 1993-03-04 1993-03-04 Flowmeter

Publications (2)

Publication Number Publication Date
JPH0719917A true JPH0719917A (en) 1995-01-20
JP3103700B2 JP3103700B2 (en) 2000-10-30

Family

ID=12666896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05043551A Expired - Lifetime JP3103700B2 (en) 1993-03-04 1993-03-04 Flowmeter

Country Status (1)

Country Link
JP (1) JP3103700B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019021556A1 (en) * 2017-07-26 2019-01-31 オルガノ株式会社 Water-collection dispenser and correction method therefor
US11041749B1 (en) 2019-12-19 2021-06-22 Hitachi Metals, Ltd. Multi-gas mass flow controller and method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019021556A1 (en) * 2017-07-26 2019-01-31 オルガノ株式会社 Water-collection dispenser and correction method therefor
JP2019027822A (en) * 2017-07-26 2019-02-21 オルガノ株式会社 Water sampling dispenser and correction method of the same
CN110914650A (en) * 2017-07-26 2020-03-24 奥加诺株式会社 Water dispenser and calibration method thereof
CN110914650B (en) * 2017-07-26 2020-09-11 奥加诺株式会社 Water dispenser and calibration method thereof
US11041749B1 (en) 2019-12-19 2021-06-22 Hitachi Metals, Ltd. Multi-gas mass flow controller and method
WO2021124876A1 (en) * 2019-12-19 2021-06-24 Hitachi Metals, Ltd. Multi-gas mass flow controller and method

Also Published As

Publication number Publication date
JP3103700B2 (en) 2000-10-30

Similar Documents

Publication Publication Date Title
US6170338B1 (en) Vortex flowmeter with signal processing
US5975126A (en) Method and apparatus for detecting and controlling mass flow
EP0468793B1 (en) Flowmeter fluid composition and temperature correction
CN102483344B (en) Upstream volume mass flow verification system and method
US6556931B1 (en) Apparatus and method for compensating mass flow rate of a material when the density of the material causes an unacceptable error in flow rate
US5321992A (en) Measurement of gas flows with enhanced accuracy
KR20200136029A (en) How to compensate mass flow using a known density
JP3103700B2 (en) Flowmeter
JP3057949B2 (en) Flowmeter
JPH11183231A (en) Integrating flow meter and gas meter using it
US7082826B2 (en) Gas flow meter and method for measuring gas flow rate
JP2008014834A (en) Ultrasonic flowmeter
JP3143299B2 (en) How to measure gas leaks from containers
JPH074995A (en) Method of flow rate measurement and acoustic-displacement type flowmeter
JP3146601B2 (en) Fluidic meter controller
JP3036217B2 (en) Flowmeter
JP3146603B2 (en) Fluidic meter controller
JP2002090188A (en) Gas measuring device
JP3036218B2 (en) Flowmeter
JPH05273007A (en) Flowmeter
JPH06221884A (en) Flowmeter
JP3146602B2 (en) Fluidic meter controller
JPS6175217A (en) Instrumental errors corrector for flowmeter
EP4257934A1 (en) Method and device for determining a flow rate
JPH0319492B2 (en)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20090825

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090825

Year of fee payment: 9

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 10

Free format text: PAYMENT UNTIL: 20100825

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110825

Year of fee payment: 11

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110825

Year of fee payment: 11

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120825

Year of fee payment: 12

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 12

Free format text: PAYMENT UNTIL: 20120825

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 13

Free format text: PAYMENT UNTIL: 20130825

EXPY Cancellation because of completion of term