JPH07190912A - Heater for creep tester excellent in temperature retaining performance - Google Patents

Heater for creep tester excellent in temperature retaining performance

Info

Publication number
JPH07190912A
JPH07190912A JP33160693A JP33160693A JPH07190912A JP H07190912 A JPH07190912 A JP H07190912A JP 33160693 A JP33160693 A JP 33160693A JP 33160693 A JP33160693 A JP 33160693A JP H07190912 A JPH07190912 A JP H07190912A
Authority
JP
Japan
Prior art keywords
temperature
electric furnace
test piece
detecting
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP33160693A
Other languages
Japanese (ja)
Inventor
Masaharu Kamioka
正治 上岡
Susumu Sekiguchi
進 関口
Toshisue Washitani
年已 鷲谷
Norihiko Ayabe
憲彦 綾部
Iwao Hara
巌 原
Kazunari Yamaguchi
一成 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mishima Kosan Co Ltd
Nippon Steel Corp
Original Assignee
Mishima Kosan Co Ltd
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mishima Kosan Co Ltd, Nippon Steel Corp filed Critical Mishima Kosan Co Ltd
Priority to JP33160693A priority Critical patent/JPH07190912A/en
Publication of JPH07190912A publication Critical patent/JPH07190912A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

PURPOSE:To provide a system for controlling the temperature of a test piece within an error range of + or -2 deg.C with respect to a set temperature for a long time by automating the temperature regulation when a creep test is conducted, i.e., a metallic material is subjected to a long time test under a high temperature atmosphere. CONSTITUTION:An electric furnace comprising an upper zone ceramic heater 8, an intermediate zone ceramic heater 9, a lower zone ceramic heater 10, an R thermocouple 4 for detecting the atmospheric temperature, and R thermocouples 5, 6, 7 for detecting the temperature of a test piece is further provided with an electric furnace elevator 13 and an automatic temperature regulator in order to control the temperature of the for the set temperature in the range of 400-1000 deg.C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、高温雰囲気下での金属
材料のクリープ試験の分野において、試験片を中心とし
た長さ100mm幅の均熱帯を400℃から1000℃ま
での範囲で設定温度の±2℃以下の精度で温度を制御保
持可能なクリープ試験機用加熱装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a creep test of a metal material in a high temperature atmosphere, and a soaking zone having a length of 100 mm and a test piece as a center is set at a temperature set in a range of 400 to 1000.degree. To a heating device for a creep tester capable of controlling and maintaining the temperature with an accuracy of ± 2 ° C or less.

【0002】[0002]

【従来の技術】従来、クリープ試験用の電気炉を400
℃から1000℃までの範囲で温度制御させるための温
度調節器は、主に人手により電流調整をする方法がとら
れていた。しかし、この方法では、微妙な電流調整でも
±3℃から±6℃程度の温度の変動が生じるために、人
の監視が必要となり、個人差による温度誤差が生じてい
た。また、人の感による操作が主体になるために、どう
しても規定の温度以上に加熱されることもあり、クリー
プ試験で重要な、一定温度の保持に最適な装置とはなら
ない。
2. Description of the Related Art Conventionally, an electric furnace for creep test is 400
As for the temperature controller for controlling the temperature in the range of ℃ to 1000 ℃, the method of adjusting the current mainly by hand has been adopted. However, in this method, the temperature varies from ± 3 ° C. to ± 6 ° C. even if the current is subtly adjusted, so that it is necessary to monitor a person, and a temperature error occurs due to an individual difference. In addition, since the operation is mainly performed by human feeling, it may be heated to a temperature higher than the specified temperature, which is not an optimum device for maintaining a constant temperature, which is important in the creep test.

【0003】[0003]

【発明が解決しようとする課題】このように、従来の電
気炉及び温度調節装置を用いた場合、電気炉の均熱帯を
設定温度の±3℃から±6℃で安定させるのに長時間に
わたり人の操作と監視が必要であった。クリープ試験の
基本条件、即ち、設定温度で熱平衡させるために16時
間から24時間の昇温・均熱保持を行い、かつ誤差のな
い温度で保持させなければ信頼性の高いデーターを得る
ことはできない。人手の介入する温度制御では、個人
差、作業毎による誤差が生じて信頼性の高いデーター
は、得られない。
As described above, when the conventional electric furnace and temperature control device are used, it takes a long time to stabilize the soaking zone of the electric furnace at the set temperature of ± 3 ° C to ± 6 ° C. Human intervention and monitoring was required. It is not possible to obtain highly reliable data unless the creep test is conducted under the basic conditions of the creep test, that is, the temperature is raised for 16 to 24 hours in order to achieve thermal equilibrium at the set temperature and kept at a uniform temperature. . In the temperature control with human intervention, highly reliable data cannot be obtained due to individual differences and errors due to each work.

【0004】本発明は、上記問題点を解決するためのも
ので、金属材料を一定の高温度下で試験を行うにあた
り、最適な電気炉とその電気炉の均熱帯を設定温度に対
して±2℃以下で温度制御を行う自動温度調節装置を組
み合わせることにより、温度保持性能に優れたクリープ
試験機用加熱装置を提供するものである。
The present invention is intended to solve the above-mentioned problems, and when a metal material is tested at a constant high temperature, the optimum electric furnace and the soaking temperature of the electric furnace are set within ± By providing an automatic temperature control device for controlling the temperature at 2 ° C. or lower, a heating device for a creep tester having excellent temperature holding performance is provided.

【0005】[0005]

【課題を解決するための手段】本発明が要旨とするとこ
ろは、試験片に対する電気炉の位置を調整するための昇
降装置を含み、長さ方向に3分割してセラミックス埋込
ヒーターを配置し、各々独立に加熱制御可能なクリープ
試験用管状型電気炉と、該電気炉内の雰囲気温度を検出
する熱電対と、同時に試験片を長さ方向に3分割して各
位置における温度を検出する3個の熱電対と、試験片温
度を400℃から1000℃までの温度範囲で±2℃以
下の精度で保持するとともに、熱電対の断線及び短絡を
検出する機能を備えた3個の温度調節器と、電気炉の特
性に応じた最適PIDの値及び電流の上下限値とが設定
温度毎に予め入力されており、炉内雰囲気温度と試験片
の3点各々の位置における温度とを対比して、電気炉の
各位置毎に、予め入力されたデーターの中から最適なデ
ーターを選択して温度調節器へ伝送するシステムと、さ
らに、好ましくは電気炉内に3分割されて配置されたセ
ラミックス埋込ヒーターの断線検出を行うための3個の
ヒーター断線警報器と、クリープ試験片の破断を検出す
る検出器と、クリープ試験開始から終了までの時間を計
測する時間計と、で構成された温度保持性能の優れたク
リープ試験機用加熱装置である。
The gist of the present invention is to include an elevating device for adjusting the position of an electric furnace with respect to a test piece, and to arrange a ceramics embedded heater in three parts in the length direction. , A tubular electric furnace for creep test, in which heating can be controlled independently, a thermocouple for detecting the ambient temperature in the electric furnace, and at the same time, the test piece is divided into three in the length direction to detect the temperature at each position. Three thermocouples and three temperature controls with a function to detect the disconnection and short circuit of the thermocouple while keeping the temperature of the test piece within the temperature range of 400 ° C to 1000 ° C with an accuracy of ± 2 ° C or less. The optimum PID value and the upper and lower limit values of the current according to the characteristics of the electric furnace are entered in advance for each set temperature, and the furnace atmosphere temperature and the temperature at each of the three points of the test piece are compared. Then, for each position of the electric furnace, A system for selecting the optimum data from the applied data and transmitting it to the temperature controller, and further preferably 3 for detecting the disconnection of the ceramic embedded heater arranged in three in the electric furnace. Heater for creep tester, which has excellent temperature retention performance, consisting of a heater burnout alarm, a detector that detects the breakage of the creep test piece, and a time meter that measures the time from the start to the end of the creep test. It is a device.

【0006】本発明の装置によれば、均熱帯温度を一定
値に保持するためにセラミックス埋込ヒーターを上部,
中部,下部の3ゾーンに配置する内部構造を有する管状
型電気炉と、上部,中部,下部の3ゾーンのセラミック
ス埋込ヒーターを1対1で制御させるためのカスケード
制御機能を有する3台の温度調節器とで、最適なPID
値と最適な電流上下限値により設定温度に対して±2℃
以内の範囲で温度制御する、信頼性の高い試験データー
を得る。即ち、本発明では、電気炉の均熱帯を±2℃以
下の精度で安定して保持させるために、上部,中部,下
部にセラミックス埋込ヒーターを3ゾーンに内部配置し
た管状型電気炉と、電気炉の内部均熱帯域との電気炉内
部に固定する試験片の位置関係を調節するための昇降装
置と、試験片の上部,中部,下部の温度データーを測定
するための3本のR型熱電対3と、均熱帯内部の雰囲気
温度データーを測定するための1本のR型熱電対と、そ
のR型熱電対からの信号に基づいてセラミックス埋込ヒ
ーターへの電流を自動制御して、試験温度を±2℃以内
に安定して自動温度制御する温度調節器とからなる。
According to the apparatus of the present invention, in order to maintain the soaking temperature at a constant value, the ceramic embedded heater is placed on the upper part,
Tubular type electric furnace with internal structure arranged in middle and lower 3 zones, and temperature of 3 units with cascade control function to control ceramic embedded heaters in upper, middle and lower 3 zones 1: 1 Optimal PID with controller
± 2 ° C against the set temperature depending on the value and the optimum upper and lower limits of the current
Obtain reliable test data with temperature control within the range. That is, in the present invention, in order to stably maintain the soaking zone of the electric furnace with an accuracy of ± 2 ° C. or less, a tubular electric furnace in which ceramic embedded heaters are internally arranged in three zones in the upper, middle and lower parts, A lifting device for adjusting the positional relationship of the test piece fixed inside the electric furnace with the internal soaking zone of the electric furnace, and three R-types for measuring temperature data of the upper, middle and lower parts of the test piece Thermocouple 3, one R-type thermocouple for measuring atmospheric temperature data inside the soaking zone, and automatically controlling the current to the ceramic embedded heater based on the signal from the R-type thermocouple, It consists of a temperature controller that automatically controls the test temperature within ± 2 ° C.

【0007】[0007]

【作用】本発明では、図1に示すような電気炉と図2に
示した制御系を採用することにより、電気炉内部の均熱
帯域を400℃から1000℃までの範囲で設定温度の
±2℃以下で長時間保持されることになる。温度上昇時
は、炉内雰囲気温度が、電気炉内部に固定された試験片
の上部,中部,下部の温度よりも先に上昇するため、電
気炉の上部,中部,下部に3ゾーン配置されたセラミッ
クスヒーターを炉内雰囲気温度が設定温度の比例帯域に
達したら制御をかける方式として試験片温度が設定温度
を超えないように制御する。また設定温度に安定して保
持させるために、電気炉の特性に応じた最適PIDの値
及び電流上下限の値をデーター伝送用のパソコンに入力
して設定温度毎に電気炉各位置について個別に入力され
たデーターの中から最適なデーターを温度調節器へ伝送
するシステムを構成して温度保持を行う制御方式とし、
常時炉内雰囲気温度と試験片温度を検出しながら、どち
らかの温度が変動しても試験片温度が±2℃を超えない
ように自動制御しているため、試験片温度が400℃か
ら1000℃までの温度範囲で±2℃以下で保持され、
クリープ試験に最適な温度制御を行うことができる。
In the present invention, by adopting the electric furnace as shown in FIG. 1 and the control system as shown in FIG. 2, the soaking zone inside the electric furnace is set within the range of 400 ° C. to 1000 ° C. It will be held at 2 ° C or lower for a long time. When the temperature rises, the atmospheric temperature in the furnace rises before the temperature of the upper, middle and lower parts of the test piece fixed inside the electric furnace, so three zones were arranged in the upper, middle and lower parts of the electric furnace. The ceramic heater is controlled so that the temperature of the test piece does not exceed the preset temperature as a method of controlling when the atmospheric temperature in the furnace reaches the proportional band of the preset temperature. In order to keep the temperature stable at the set temperature, the optimum PID value and the current upper and lower limit values according to the characteristics of the electric furnace are input to the PC for data transmission, and each position of the electric furnace is set individually for each set temperature. From the input data, configure a system that transmits the optimum data to the temperature controller and make it a control method to maintain temperature,
Since the temperature of the atmosphere inside the furnace and the temperature of the test piece are constantly detected, the temperature of the test piece is automatically controlled so that the temperature of the test piece does not exceed ± 2 ° C even if either temperature fluctuates. It is kept below ± 2 ℃ in the temperature range up to ℃,
Optimal temperature control for creep test can be performed.

【0008】[0008]

【実施例】以下、図面を参照しながら本発明の特徴を実
施例に基づいて説明する。図1は、本発明の実施例であ
るクリープ試験機用電気炉の構造図を示し、図2は、温
度自動調節装置の制御系統図を示す。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The features of the present invention will be described below based on embodiments with reference to the drawings. FIG. 1 shows a structural diagram of an electric furnace for a creep tester which is an embodiment of the present invention, and FIG. 2 shows a control system diagram of an automatic temperature control device.

【0009】フレーム1は、電気炉本体を保持するため
のもので、昇降装置13を備えている。これによって、
プルロッド14に固定されている試験片11と電気炉ケ
ース3の中央部に位置する均熱帯12との位置関係を調
整することが可能となる。即ち、試験片11を、電気炉
中心部に位置する均熱帯12の中心部に正確に固定する
ことができる。
The frame 1 is for holding the main body of the electric furnace and is provided with a lifting device 13. by this,
It is possible to adjust the positional relationship between the test piece 11 fixed to the pull rod 14 and the soaking zone 12 located in the central portion of the electric furnace case 3. That is, the test piece 11 can be accurately fixed to the central portion of the soaking zone 12 located in the central portion of the electric furnace.

【0010】上ゾーンセラミックスヒーター8と、中ゾ
ーンセラミックスヒーター9と、下ゾーンセラミックス
ヒーター10は、データー伝送用パソコン15から設定
された温度最低400℃から最高1000℃まで加熱す
る能力を備えている。温度自動調節装置は、上ゾーン温
度調節器16と、中ゾーン温度調節器17と、下ゾーン
温度調節器18の、3ゾーン独立の温度調節器を備えて
おり、電気炉内に取り付けられた雰囲気温度検出用R熱
電対4と、試験片温度検出用R熱電対5,6,7からの
現在温度信号により各ゾーンの温度制御を行うことが可
能となっている。
The upper zone ceramics heater 8, the middle zone ceramics heater 9, and the lower zone ceramics heater 10 have the ability to heat from a temperature of 400 ° C. to 1000 ° C. set by the data transmission personal computer 15. The automatic temperature control device is equipped with an upper zone temperature controller 16, a middle zone temperature controller 17, and a lower zone temperature controller 18, which are independent of the three zones, and are installed in an electric furnace. The temperature control of each zone can be performed by the current temperature signals from the temperature detecting R thermocouple 4 and the test piece temperature detecting R thermocouples 5, 6 and 7.

【0011】次に上記構成の電気炉温度自動調節装置を
利用して昇温試験を行った温度データーを表1,表2及
び図3に示す。表1は、450℃、550℃、750℃
の3種類の温度データーを6時間置きに66時間分のデ
ーターを記録したものである。表2は、500℃、80
0℃、1000℃の3種類の温度データーを6時間置き
に66時間分のデーターを記録したものである。また、
PID及び電流の上限,下限リミットの値は各温度、各
電気炉によって微妙に異なる値となっているが調整時に
取得した値であって取得した後は、自動的に最適値が選
択されるようになっており人手をわずらわすことはな
い。図3は、設定温度に到達するまでの試験片温度と雰
囲気温度データーをグラフ化したものである。
Next, Table 1, Table 2 and FIG. 3 show temperature data obtained by conducting a temperature rise test using the electric furnace temperature automatic adjusting device having the above-mentioned structure. Table 1 is 450 ℃, 550 ℃, 750 ℃
The three types of temperature data are recorded every 6 hours for 66 hours. Table 2 shows 500 ° C, 80
It is data in which 66 hours of data are recorded every 6 hours with three kinds of temperature data of 0 ° C. and 1000 ° C. Also,
The upper and lower limit values of PID and current are slightly different depending on each temperature and each electric furnace, but they are the values acquired at the time of adjustment and the optimum values will be automatically selected after acquisition. It doesn't bother you. FIG. 3 is a graph of test piece temperature and ambient temperature data until reaching the set temperature.

【0012】本発明の方法では、設定温度に対する温度
誤差が、表1,表2及び図3のとおり各ゾーンにわたり
±2℃以内である。
In the method of the present invention, the temperature error with respect to the set temperature is within ± 2 ° C. for each zone as shown in Table 1, Table 2 and FIG.

【0013】[0013]

【表1】 [Table 1]

【0014】[0014]

【表2】 [Table 2]

【0015】[0015]

【表3】 [Table 3]

【0016】[0016]

【表4】 [Table 4]

【0017】[0017]

【発明の効果】本発明によれば、金属材料のクリープ試
験を行う場合に最も重要とされる一定温度の保持という
条件を従来の±3℃程度の温度のばらつきを±1℃程度
まで抑えることができる。また、自動制御であるため個
人差、作業毎による誤差もなく信頼性の高い温度下での
クリープ試験が行える。
According to the present invention, the condition of maintaining a constant temperature, which is most important when performing a creep test of a metal material, suppresses the temperature variation of about ± 3 ° C. to about ± 1 ° C. in the conventional case. You can Further, since it is an automatic control, it is possible to perform a highly reliable creep test under a temperature without individual differences and errors due to each work.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のクリープ試験用電気炉の断面図と温度
自動調節装置の概略図である。
FIG. 1 is a cross-sectional view of an electric furnace for creep test of the present invention and a schematic view of an automatic temperature control device.

【図2】本発明の制御系の系統図である。FIG. 2 is a system diagram of a control system of the present invention.

【図3】本発明の設定温度に到達するまでの試験片温度
と雰囲気温度データーのグラフである。
FIG. 3 is a graph of test piece temperature and ambient temperature data until the set temperature of the present invention is reached.

【図4】本発明の制御フローチャート図である。FIG. 4 is a control flowchart of the present invention.

【符号の説明】[Explanation of symbols]

1 フレーム 2 耐火煉瓦製蓋 3 電気炉ケース 4 雰囲気温度検出用R熱電対 5 試験片温度検出用R熱電対(上) 6 温度検出用R熱電対(中) 7 温度検出用R熱電対(下) 8 上ゾーンセラミックスヒーター 9 中ゾーンセラミックスヒーター 10 下ゾーンセラミックスヒーター 11 試験片 12 均熱帯 13 昇降装置 14 プルロッド 15 データー伝送用パソコン 16 上ゾーン温度調節器 17 中ゾーン温度調節器 18 下ゾーン温度調節器 1 Frame 2 Refractory Brick Lid 3 Electric Furnace Case 4 R Thermocouple for Atmospheric Temperature Detection 5 R Thermocouple for Detecting Specimen Temperature (Upper) 6 R Thermocouple for Temperature Detection (Middle) 7 R Thermocouple for Temperature Detection (Lower) ) 8 upper zone ceramics heater 9 middle zone ceramics heater 10 lower zone ceramics heater 11 test piece 12 soaking zone 13 lifting device 14 pull rod 15 PC for data transmission 16 upper zone temperature controller 17 middle zone temperature controller 18 lower zone temperature controller

───────────────────────────────────────────────────── フロントページの続き (72)発明者 関口 進 千葉県富津市新富20−1 新日本製鐵株式 会社技術開発本部内 (72)発明者 鷲谷 年已 千葉県富津市新富20−1 新日本製鐵株式 会社技術開発本部内 (72)発明者 綾部 憲彦 千葉県富津市新富20−1 新日本製鐵株式 会社技術開発本部内三島光産株式会社内 (72)発明者 原 巌 千葉県富津市新富20−1 新日本製鐵株式 会社技術開発本部内三島光産株式会社内 (72)発明者 山口 一成 千葉県富津市新富20−1 新日本製鐵株式 会社技術開発本部内三島光産株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Susumu Sekiguchi 20-1 Shintomi, Futtsu City, Chiba Prefecture Nippon Steel Co., Ltd. Corporate Technology Development Division (72) Inventor Toshimi Washiya 20-1 Shintomi, Futtsu City, Chiba Prefecture (72) Inventor Norihiko Ayabe 20-1 Shintomi, Futtsu-shi, Chiba Nippon Steel Co., Ltd. Technical Development Division, Mishima Kosan Co., Ltd. (72) Iwahara Futtsu, Chiba Prefecture Shintomi 20-1 Nippon Steel Co., Ltd.Technology Development Division, Mishima Kosan Co., Ltd. (72) Inventor Kazushige Yamaguchi 20-1 Shintomi, Chiba Prefecture Shintomi Co., Ltd.Technology Development Division, Mishima Kosan Co., Ltd. In the company

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 試験片に対する電気炉の位置を調整する
ための昇降装置を含み、長さ方向に3分割してセラミッ
クス埋込ヒーターを配置し、各々独立に加熱制御可能な
クリープ試験用管状型電気炉と、該電気炉内の雰囲気温
度を検出する熱電対と、同時に試験片を長さ方向に3分
割して各位置における温度を検出する3個の熱電対と,
試験片温度を、400℃から1000℃までの温度範囲
で±2℃以下の精度で保持するとともに、熱電対の断線
及び短絡を検出する機能を備えた3個の温度調節器と、
電気炉の特性に応じた最適PIDの値及び電流の上下限
値とが設定温度毎に予め入力されており、炉内雰囲気温
度と試験片の3点各々の位置における温度とを対比し
て、電気炉の各位置毎に、予め入力されたデーターの中
から最適なデーターを選択して温度調節器へ伝送するシ
ステムとで構成された温度保持性能の優れたクリープ試
験機用加熱装置。
1. A creep test tubular mold including an elevating device for adjusting the position of an electric furnace with respect to a test piece, arranging ceramic embedded heaters in three divisions in a length direction, and capable of independently controlling heating. An electric furnace, a thermocouple for detecting an ambient temperature in the electric furnace, and three thermocouples for simultaneously detecting the temperature at each position by dividing the test piece into three in the length direction,
The temperature of the test piece is maintained within a temperature range of 400 ° C to 1000 ° C with an accuracy of ± 2 ° C or less, and three temperature controllers equipped with a function of detecting disconnection and short circuit of the thermocouple,
The optimum PID value and the upper and lower limit values of the current according to the characteristics of the electric furnace are input in advance for each set temperature, and the furnace atmosphere temperature and the temperature at each of the three points of the test piece are compared, A heating device for a creep tester with excellent temperature holding performance, which is composed of a system that selects optimum data from pre-input data for each position of the electric furnace and transmits it to the temperature controller.
JP33160693A 1993-12-27 1993-12-27 Heater for creep tester excellent in temperature retaining performance Withdrawn JPH07190912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33160693A JPH07190912A (en) 1993-12-27 1993-12-27 Heater for creep tester excellent in temperature retaining performance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33160693A JPH07190912A (en) 1993-12-27 1993-12-27 Heater for creep tester excellent in temperature retaining performance

Publications (1)

Publication Number Publication Date
JPH07190912A true JPH07190912A (en) 1995-07-28

Family

ID=18245541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33160693A Withdrawn JPH07190912A (en) 1993-12-27 1993-12-27 Heater for creep tester excellent in temperature retaining performance

Country Status (1)

Country Link
JP (1) JPH07190912A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107270A (en) * 2008-10-29 2010-05-13 Toyo Seiki Seisakusho:Kk Creep testing machine
JP2017075814A (en) * 2015-10-14 2017-04-20 株式会社島津製作所 High temperature test device and high temperature test method
CN111811957A (en) * 2019-11-11 2020-10-23 上海交通大学 Temperature rising method based on temperature rising device for controlling thermal tensile test

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107270A (en) * 2008-10-29 2010-05-13 Toyo Seiki Seisakusho:Kk Creep testing machine
JP2017075814A (en) * 2015-10-14 2017-04-20 株式会社島津製作所 High temperature test device and high temperature test method
CN111811957A (en) * 2019-11-11 2020-10-23 上海交通大学 Temperature rising method based on temperature rising device for controlling thermal tensile test

Similar Documents

Publication Publication Date Title
KR100956535B1 (en) Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device
EP1600043B1 (en) Analytical furnace with predictive temperature control
JPH0623935B2 (en) Heat treatment control method with improved reproducibility
CN108427452B (en) Temperature control method and device
US4937434A (en) Heat treatment apparatus and heat treatment method
JP4426024B2 (en) Temperature calibration method for heat treatment equipment
KR20090040210A (en) Temperature control method, method of obtaining a temperature correction value, method of manufaturing a semiconductor device and substrate treatment apparatus
JPH07190912A (en) Heater for creep tester excellent in temperature retaining performance
JP5176536B2 (en) Reliability test method for furnace and control thermocouple
US7744273B2 (en) Thermal analysis apparatus
JPH03145121A (en) Temperature controller for heat treatment of semiconductor
US6123452A (en) Method and apparatus for carrying out a thermal shock test on ceramics
JPH1123505A (en) Thermal analysis device
US4070148A (en) Apparatus for monitoring product temperature in an open ended, secondary emission, product carrying conveyor furnace
KR20010078070A (en) Temperature-detecting element
JP2005091110A (en) Analyzer and method for analyzing mechanical heat characteristic
JPS6124646B2 (en)
CN110863102B (en) Method and device for correcting thermocouple value of heating section of annealing furnace
JPH06213841A (en) Equipment for differential thermal analysis
JPH1140321A (en) Controller for semiconductor manufacturing device
JP2001304968A (en) Method and device for measuring temperature of heated object
JPH03225819A (en) Temperature measurement at the time of taking profile data of substrate heat treat furnace and substrate boat used therefor
JP2001092537A (en) Method for controlling temperature of furnace body or the like and device provided with the furnace body or the like
JP2599671B2 (en) Method for determining firing conditions for ceramic products and electric furnace used for the method
JPH01309318A (en) Heat treatment apparatus

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20010306