JPH07185362A - Cover structure - Google Patents

Abstract

PURPOSE:To provide a cover structure of high safety having a heating and cooling mechanism serving as a press-contacting mechanism. CONSTITUTION:A heating plate 14 is fitted to the surface of a cover structure 30 opposite to an object 10. A pressing plate 18 of good heat conductivity is mounted on the 1st surface of the heating plate 14 opposite to the object 10. A heat sink 20 is mounted on the 2nd main surface of the heating plate 14, and the object 10 is cooled when air is sent from a blower. The cover structure 30 is moved parallel by a link mechanism to open and close the cover body while the heating mechanism is prevented from being exposed to an operator. The operation of the heating plate 14 and the blower is controlled by a control means, such as an operating panel. When the cover body 30 is closed, the pressing plate 18 is press-fixed to the object 10. Thus in both heating and cooling, effective heat receiving and giving between the pressing plate 18 and the object 10 is performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lid structure, and more particularly to a lid structure capable of heating and cooling an object while ensuring safety.

[0002]

2. Description of the Related Art When measuring the physical and electrical characteristics of an object (object to be measured), it is often necessary to measure not only the characteristics at room temperature but also the characteristics at high temperature. For example, when the object is an electric element, if it is used for a long time, the temperature of the object becomes high due to its own heat generation, so it is necessary to know the characteristics at this high temperature. In measuring, it takes time to wait for its own heat generation, so it is sufficient to apply heat from the outside to create a similar state. Therefore, the measurement of the high temperature characteristics is generally performed by heating an object to be measured by a heating mechanism such as a heating wire heater. At this time, if the object to be measured and the heating mechanism reach a temperature high enough to pose a danger to the human body, a lid is provided on the measuring device main body, and the lid structure is closed to cover the object to be measured and the heating mechanism at the time of measurement.
The lid is opened when the object to be measured is replaced.

FIG. 5 shows an example of a high temperature characteristic measuring device. A heating wire heater (heating plate) 14 is provided at the center of the mounting table 12 in the measuring apparatus main body 100, and the object (object to be measured) 10 is mounted thereon. This heater 14
For example, a heating wire sandwiched between rubber sheets having excellent heat resistance and insulation is used. Due to its excellent insulating property, a semiconductor element can be applied as the DUT 10 and the electrical characteristics at high temperature can be measured. In this case, the mounting table 12 is provided with a plurality of detection terminals for detecting voltage and the like, and a detection circuit is provided inside the apparatus main body 100.
Further, when the object (measurement object) 10 itself does not have sufficient weight, a pressure bonding mechanism for pressing the measurement object 10 to the heat generating plate 14 may be provided in order to smoothly transfer heat. Good.

When the object 10 and the heat generating plate 14 become high in temperature during measurement, a cover structure is provided especially when it is dangerous to measure the object 10 to be measured.
Need to cover. The lid structure shields the object 10 and the heat generating plate 14 from the outside world, and prevents the operator from being in danger.

[0005]

However, in the conventional example of FIG. 5, since the heating mechanism is adjacent to the object to be measured, the object to be measured may be replaced immediately after the measurement of the high temperature characteristics is finished, or the measurement may be erroneously performed. If you open the lid inside (and thus heat it up) and touch the DUT, there is a risk of burns. In addition, since the heating plates are adjacent to each other without touching the object, heat remains in the periphery, which hinders quick replacement of the object.

[0006] Therefore, an object of the present invention is to provide a lid structure capable of heating an object while ensuring safety. Another object of the present invention is to provide a lid structure capable of heating an object as well as cooling it.

[0007]

MEANS FOR SOLVING THE PROBLEMS AND ACTION The present invention is a lid structure 200 which is openably and closably attached to an apparatus main body 100 on which an object 10 is placed, and is constructed as follows. The heat generating plate 14 is attached to the surface of the lid body 30 facing the object 10. The pressure bonding plate 18 having good thermal conductivity is mounted on the first main surface of the heat generating plate 14 facing the object 10. The heat sink 20 is mounted on the second main surface of the heat generating plate 14 and cools the target object 10 when air is blown from the air blowing means 50.
The link mechanism moves the lid 30 in parallel, and enables opening and closing of the lid while preventing the heating mechanism from being exposed to the operator. The operations of the heat generating plate 14 and the blowing unit 50 are controlled by the control unit such as the operation panel 150. And the lid 3
When 0 is closed, the crimping plate 18 crimps the object 10 and enables efficient heat exchange with the object 10 in both heating and cooling.

[0008]

1 is an exploded perspective view of a preferred embodiment of a lid structure 200 of the present invention. FIG. 2 shows a state where the lid body 30 of the lid structure 200 attached to the apparatus body 100 is opened. The same numbers are assigned to the configurations corresponding to the conventional example. In the present invention, the lid structure 200 is the lid 30.
Indicates the one including the link mechanism 40 and the like. The lid 30 is
It is composed of a mounting portion 34 for mounting the heat generating plate 14 and a front surface portion 32. In the lid structure 200 of the present invention, the heating plate 14 is provided on the back side (the surface side facing the target object) of the mounting portion 34 of the lid body 30. That is, the heat generating plate 14 is provided not on the lower side of the DUT 10 but on the upper side thereof. It is preferable that the heating plate 14 has a heating wire sandwiched between rubber sheets as described above.

In order to transfer heat smoothly when the lid 30 is closed, it is necessary to press the heating plate 14 against the object to be measured 10. In order to uniformly apply heat to the object 10, a metal plate (compression plate) 18 having good heat conductivity such as copper is attached to the front surface (first main surface) of the heat generating plate 14, that is, the main surface facing the object. Attach to the surface. A heat sink (heat dissipation device) 20 is provided on the surface (second main surface) of the heat generating plate 14 opposite to the surface on which the pressure bonding plate 18 is mounted. For example, the heat generating plate 14 may be sandwiched between the heat sink 20 and the crimping plate 18 may be fixed with screws. Since the heating plate 14 has a smaller area than the pressure bonding plate 18 and the heat sink 20, the pressure bonding plate 18 and the heat sink 2
There is a gap between 0. A spacer may be sandwiched between the two in order to fill this gap. If a metal having good thermal conductivity is used for this spacer, heat can be transferred between the pressure bonding plate 18 and the heat sink 20 more efficiently.

The heat sink 20 serves to dissipate heat and at the same time to function as a "weight" to enhance the pressure bonding. The heat sink 20 has the screw 2 when the lid 30 is opened.
Although it is supported by 1 (see FIG. 3), a load is applied to the object 10 in combination with the elasticity of the spring 23 when the lid 30 is closed. The heat generating plate 14 is attached to the heat sink 20 and the pressure bonding plate 18.
With the structure sandwiched by, heat can be efficiently transferred to and from the object 10 in both heating and cooling. The heating plate 14 and the pressure bonding plate 18 constitute a heating mechanism, and this heating mechanism also functions as a pressure bonding mechanism. Therefore, it is not necessary to provide another crimping mechanism. Reference numeral 16 is an electric wire for supplying electricity for heat generation to the heat generating plate 14. In addition, the main surface of the heat generating plate 14 in the present invention is a so-called front or back surface of the plate, and is distinguished from four side surfaces.

The heating mechanism including the heating plate 14 and the pressure bonding plate 18 is supported and mounted on the mounting portion 34 by the heating mechanism supporting structures 25 and 26. FIG. 3 is a cross-sectional view showing how the corners of the heating mechanism are mounted on the mounting portion 34 of the lid 30. Each of the four corners is a heat-resistant plastic plate 2
It is fastened to the support structure 25 with screws 21 and four nuts 24 through the two and the coil springs 23. Since the springs 23 at the four corners have elasticity independently of each other, the surface of the crimping plate 18 facing the object to be measured 10 is flexed to some extent, and an appropriate pressure is applied to the object 10 to generate heat accurately. Can be transmitted to. The four heat-resistant plastic plates 22 heat the lid 3
It is prevented from being transmitted to 0.

The lid 30 is attached to the measuring device main body 100 so as to be openable and closable by a well-known link mechanism 40. The link mechanism 40 is configured such that the lid body 30 always moves in parallel with the object 10. As a result, the back surface of the mounting portion 34 of the lid body 30, that is, the surface on which the heat generating plate 14 is mounted, always faces the object 10 (that is, downward). Similarly, the front surface portion 32 always moves vertically with respect to the mounting table 12. Therefore, the heating mechanisms 14 and 18 are not exposed to the operator.

The lid structure of the present invention uses the cooling mechanism composed of the heat sink 20, the air blower 50, etc.
Not only can 0 be heated, but it can be cooled if necessary.
FIG. 4 is an exploded perspective view of the support structure 26 and the blower device 50. The blower device 50 is fixed to the support structure 26 with screws. The air blower 50 has an air hose (not shown).
Compressed air is supplied in the direction of the arrow. As a result, a flow (wind) of air blown from the blower device 50 is created toward the inside of the support structure 26. As can be seen from FIG. 1, this wind passes through a plurality of gaps in the heat sink 20 and is discharged to the outside from the exhaust port 36 in the mounting portion 34 of the lid 30. Since the mounting portion 34 is moved in parallel by the link mechanism 40, the exhaust port 36 is always kept upward. Therefore, the hot air from the exhaust port 36 does not blow toward the operator. Moreover, when the lid 30 is opened, the exhaust port 36 moves in a direction away from the operator.

FIG. 4 shows the case where there is one blower device 50, but if there are two or more blower devices, the amount of blown air per one can be reduced, so that the noise generated during the blower can be reduced. Since the crimping plate 18 is fixed to the heat sink 20 with screws, the heat of the object 10 is radiated from the heat sink 20 through the crimping plate, contrary to the case of heating. The operation of heating and cooling may be arbitrarily set by the operator using the operation panel 150. The operator operates the apparatus while standing near the position indicated by "x" in FIG. 2 in front of the apparatus main body. Alternatively, a microprocessor or the like may be used to automatically switch from heating to cooling when the lid 30 is opened, or the temperature change of an object may be arbitrarily set and automatically switched along with it. . In this case, a temperature sensor is provided on the object 10 or the lid 30, and the data is processed by a microprocessor for control.

[0015]

According to the above-mentioned configuration of the present invention, the lid 3
When 0 is opened, the heating plate 14 and the object 10 are automatically separated. Further, since the link mechanism 40 moves the lid 30 in parallel, the heat generating plate 14 and the pressure bonding plate 18 always face the direction of the object 10 and are not exposed to the operator. Therefore, even if the lid 30 is opened during heating, the risk of the operator touching the heating plate 14 is greatly reduced, and the safety is high. Moreover,
The heat generating plate 14 is equipped with a pressure bonding plate 18 having good thermal conductivity, and these heating mechanisms also function as the pressure bonding mechanism.
The heat can be effectively conducted at the same time when the pressure is applied to. Further, the present invention is based on the heat sink 20 and the blower 50.
It has a cooling mechanism consisting of
With the structure sandwiched between 0 and the crimp plate 18, heat can be efficiently transferred to and from the object 10 in both heating and cooling.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of a preferred embodiment of a lid structure according to the present invention.

FIG. 2 is a diagram showing a state in which a lid body 30 is opened.

FIG. 3 is a cross-sectional view showing a connection structure between the four corners of the crimping plate 18 and the support structure 25.

FIG. 4 is an exploded perspective view of a support structure 26 and a blower device 50.

FIG. 5 is a perspective view of an example of a conventional high temperature characteristic measuring device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Target object 12 Mounting table 14 Heating plate 18 Crimping plate 20 Heat sink 30 Lid body 36 Exhaust port 40 Link mechanism 50 Blower means 100 Device body 150 Operation panel 200 Lid structure

Claims (1)

[Claims] 1. A lid structure attached to an apparatus main body on which an object is placed so as to be openable and closable, a lid body, and a heating plate attached to a surface of the lid body facing the object. A heat-bonding plate having good thermal conductivity, which is mounted on the first main surface of the heat-generating plate facing the object, a heat sink mounted on the second main surface of the heat-generating plate, and a blowing unit for blowing air to the heat sink, It comprises a link mechanism for moving the lid in parallel and a control means for controlling the operation of the heat generating plate and the blower means, and when the lid is closed, the object is crimped by the crimping plate. A lid structure to be used.