JPH0718503B2 - Air operated valve - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air-operated valve, which controls the supply of clean fluid to various target devices that are operated by using a fluid. The cleaning of the members is facilitated, the cleaning fluid is not contaminated during use, the operation of the piston rod is accurately transmitted to the valve, and the number of working steps is greatly simplified. It is intended to improve the work precision.

2. Description of the Related Art A conventional air-operated valve has a valve portion provided on a piston rod, which constantly opens a fluid flow passage by an urging force of a piston that is urged in a fixed direction and senses an opening / closing signal to detect an air pressure. By a normally open air actuated valve that constantly opens the fluid flow passage from the open state to the closed state by adding to the piston against the biasing force, and the valve portion that is normally provided by the piston biasing force on the piston rod, A normally closed air-operated valve that constantly closes the fluid flow passage, senses an open / close signal, and applies air pressure to the piston against the urging force to open the fluid flow passage from the normally closed to open state. And exist. When using pure water as a fluid whose flow is controlled by this air-operated valve, such as for cleaning the IC board, or when passing pure gas, make sure that dust or other contaminants do not occur. Therefore, it is necessary to surely clean the members before assembling. However, since a large number of soft elastic members such as O-rings are used for the valve member, strong cleaning with ultrasonic waves will destroy these soft elastic members due to ultrasonic waves, which is not preferable. Further, if the soft elastic material such as the O-ring is separated and washed, it is necessary to incorporate the O-ring and the like, so that the member is frequently contacted during assembly, and dust and the like are adhered so much.

Then, for the purpose of eliminating such a defect, JP-A-61-1 is used.
As described in 09973 and JP-A-61-130682, a piston rod having an O-ring or the like that may be damaged by ultrasonic cleaning contacts the cleaning fluid with ultrasonic cleaning such as O-ring. By forming the circulation member that is not likely to be damaged by a separate member and performing the cleaning work during manufacturing separately for the piston rod and the circulation member, the circulation member that comes into contact with the clean content liquid is secured. Washed to
A method is later known in which the piston rod and the flow member are assembled and connected. However, when it is necessary to shorten the opening / closing stroke of the valve part, for example, when only an opening / closing stroke of about 0.5 mm can be taken, if the piston rod and the flow member are assembled and connected to form one piston rod, Many members such as piston, fixing ring, each member for connection, abutting positions between members, etc. are connected, and even if the manufacturing error of each member is small, it will be a big one when assembled As a result, assembling errors, rattling, etc. are added, and the opening and closing stroke of about 0.5 mm may be absorbed or multiplied, resulting in the fact that the valve part cannot be opened and closed. It was expensive.

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention The present invention relates to an air actuated valve in which the above-mentioned drawbacks are eliminated, and a piston rod direction having an O-ring or the like that may be damaged by ultrasonic cleaning, A flow member that is not likely to be damaged by ultrasonic cleaning such as O-ring due to contact with a cleaning fluid is formed as a separate member, and the cleaning work during manufacturing is performed separately for the piston rod and the flow member. By doing so, it is possible to reliably clean the flow member that comes into contact with the content liquid to be cleaned, prevent the clean cleaning liquid, pure gas, and the like from being contaminated, and without assembling and connecting the piston rod and the flow member. , Keeping separated state, the opening and closing stroke is not absorbed by the assembly and connection of the circulation member and the piston rod, and the valve part can be opened and closed reliably with a small stroke. It is possible to open and close parts, and it is possible to obtain high-precision products without much trouble in manufacturing accuracy and assembly accuracy of these members, and to try to sufficiently cope with even minute opening and closing strokes. It is a thing.

Means for Solving the Problems In order to solve the above-mentioned problems, the present invention causes the flow passage of the fluid to be always open or closed at the valve portion by the urging force of the piston urged in a fixed direction. At the same time, by detecting an opening / closing signal and applying air pressure to the piston against the biasing force, the fluid flow passage is made from the normally open to the closed state or from the normally closed to the open state. In addition to forming a holding part for connecting to the machine tool at the time of machining work, the valve part is connected to face the opening and closing part of the flow passage, and the valve part is opened and closed. In order to be able to cut an arbitrary amount of surface,
At least the predicted cutting amount is formed to be thick.

Action As described above, the present invention separately forms the piston rod in the air pressure introducing direction and the circulation member in the flow passage direction, so that the circulation member that comes into contact with a clean fluid must be reliably cleaned before assembly. You can In addition, at the time of assembly, it is not necessary to connect the piston rod and the flow member, and at least the estimated cutting amount is formed to be thick so that the flow passage surface of the valve can be cut by an arbitrary amount. After that, by holding the holding portion of the flow member on the machine tool and cutting the valve portion, the overall dimension of the flow member composed of a combination of a plurality of members can be strictly determined. And even if the individual dimensions of each member related to this are non-uniform, a minute and accurate opening and closing stroke of the valve section can be produced, and all members connected to the piston rod as in the past Since it is not necessary to strictly manufacture and assemble the product, it is possible to obtain a product at a low cost and without variation. Therefore, by installing a metal diaphragm or the like, a reliable opening / closing valve is possible even when the movement stroke of the valve portion is extremely small. When a closing signal is sensed, the air pressure is applied to the piston against the biasing force, and in the normally open air actuated valve, the piston pushes the flow member through the piston rod. The fluid passage is always closed from the open state by the section.

Further, in the normally closed air operated valve, when an opening signal is sensed, the air pressure is applied to the piston against the urging force to release the pressing of the piston rod against the circulating member. Moves toward the piston rod by its own urging force, opens the valve portion from the opening / closing portion, and changes the fluid flow passage from the normally closed state to the opened state.

EXAMPLE An example of a normally open air operated valve used in a normally open state according to the present invention will be described below with reference to FIG.
Is a cylinder, the upper end of which is hermetically fixed by a sealing body (3) via an O-ring (2), and the upper surface of the sealing body (3) is covered by a lid body (5) provided with an engaging projection (4). A control air inlet (6) is formed on the side surface in the axial direction while covering. Further, the piston rod (7) is inserted into the cylinder (1) and the piston rod (7) is inserted into the cylinder (1).
O-ring (8) on the outer circumference of the cylinder (1)
Two pistons (10) (1) that slide closely on (9)
1) is fixed, and the piston (10) (11) is formed by projecting from the cylinder (1) in an inward annular shape.
In 3), the control fluid inlet (6) that is airtightly divided and opened on the side surface in the cylinder Iino axis direction is
Formed on one surface of each piston (10) (11), 2
It is connected to each inflow chamber (14) (15). The control fluid is injected into the two inflow chambers (14) and (15) by introducing the control passage in the piston rod (7) from the upper end surface in the axial direction.
In the embodiment shown in FIG. 1,
The first inflow chamber (14) is formed in a space between the first piston (10) and the sealing body (3), and the first inflow chamber (14) is formed.
Therefore, the inflow passage (16) formed in the axial direction from the upper end of the piston rod (7) is opened to the second inflow chamber (15).

Further, the cylinder (1) has one end connected and fixed to the main body (17) through a lock ring (18), so that the main body (1) is
7) is rotatably fixed to the first piston (10) and the separator (13), and the pressing spring (20) is provided between the piston (10) and the separator (13).
The first and second pistons (10) and (11) are urged toward the first and second inflow chambers (14) and (15) by the pressing spring (20), and the pistons are normally provided. Attach the engaging part (21) protruding to the outer periphery of the lower end of the rod (7) to the main body (1
It engages with the end portion (23) of the inner cylinder (22) which protrudes inward from the (7). Then, when control air is injected from the inflow port (6), the introduction passage (16) formed in the piston rod (7)
The control air flows through the pistons (10) and (11) in a direction of pressing the pistons (10) and (11) against the restoring force of the pressing bar (20), and moves the piston rod (7). A connecting body (25) having a control fluid flow passage (24) is provided on the inner periphery of the main body (17).
A connecting member (25) is screwed and fixed via a screw portion (26), and a connecting member (25), which is formed separately from the piston rod (7), is provided with a flow member (27) formed to be movable back and forth.

The flow member (27) is provided with a member body (30) having a polygonal shape or a two-sided deviation, the engagement receiving portion (28) projecting to the outer periphery,
A holder (32) is screwed and fixed above the member body (30) via a screw portion (31), and the upper end of the holder (32) is
A metal diaphragm (34) made of a material such as stainless steel and an engaging collar (35) are formed between the holding body (32) and the member body (30) while forming a holding portion (33) provided with a screw groove.
With the metal diaphragm (34) on the member body (30) side and the engaging collar (35) on the holding body (32) side.
The annular pressing part (36) of (0) is clamped and fixed to the metal diaphragm (34) by pressure. Also the flow passage (24)
The valve body (38) that does not normally close the flow passage (24) is fixed to the member main body (30) facing the opening / closing part (37) of the valve body (38). In order to be able to cut, at least the predicted cutting amount is formed thick, and when the assembly of the member body (30), the holding body (32), the engaging collar (35), and the metal diaphragm (34) is completed, The jig (40) is screwed and fixed to the holding part (33), the jig (40) is fixed to the chuck (41) of a machine tool such as a lathe, and the surface of the valve part (38) is cut. For example, the dimension (a) from the upper surface of the engaging collar (35) to the lower surface of the valve portion (38) can be set extremely strictly even if the dimensions of the above-mentioned members are low. Therefore, the distribution member (27) can be made highly accurate by a simple working means.

Next, the flow member (27) removed from the jig (40) is located with the outer periphery of the metal diaphragm (34) on the upper surface of the connecting body (25), and the connecting body (2) is placed on the upper surface of the metal diaphragm (34).
5) A ring-shaped insertion member (4
2) is located and the inner peripheral projection (3) of the insertion member (42)
9) Contact the upper surface of the engaging collar (35). A restoration spring (44) is interposed between the inner circumferential protrusion (39) and the annular collar (43) fixed to the holding portion (33), and the flow member (27) is arranged in the piston rod (7) direction. ). Further, as described above, by locating the metal diaphragm (34), the direction of the pistons (10) (11) and the direction of the flow passage (24) are liquid-tightly divided, and a clean passage that flows through the flow passage (24) is obtained. The control objective fluid is protected against contamination by contact with the piston rod (7) direction. By installing this metal diaphragm (34), the moving member (27) has a very limited movement stroke, and in one embodiment, it is about 0.5 mm. Then, in a state where the valve portion (38) connected to the flow member (27) opens the opening / closing portion (37) of the flow passage (24), the engaging flange (35) of the flow member (27) and the insertion member ( 42) comes into abutting contact by the restoring force of the restoring spring (44).

In order to assemble the above-mentioned structure, first, each member in the piston rod (7) direction and each member of the flow member (27) are washed separately. This cleaning is particularly reliable for the flow member (27) and the connecting body (25) that come into direct contact with a clean fluid, and each member in the direction of the piston rod (7) has a large number of used O-rings (2). ) Perform appropriate washing within a range that does not damage (8).
The piston rod (7) and the flow member (27) that have been washed are assembled together with other members so as not to connect to each other. Since this assembly is performed without connecting the piston rod (7) and the flow member (27), the assembly is easy, and the engaging and fixing work can be performed by the cleaned automatic machine. It is possible to reduce the contact of each member constituting 7) during the assembling work and prevent dust from adhering to the flow member (27) during the assembling.

Moreover, the movable stroke becomes extremely short, about 0.5 mm in one embodiment by installing the metal diaphragm (34), but the piston rod (7) and the flow member (2
Since 7) is formed separately, it is not affected by the dimensions of many members such as the piston rod (7), pistons (10) (11), and the flow member (27) is as described above. If the valve part (38) is cut after assembly,
Since strict dimensions can be secured, if the dimensions of the rising part (46) of the connection body (25) and the insertion member (42) are accurately manufactured and assembled, the valve part (38) and the opening / closing part can be opened and closed. The open space (47) formed between the parts (37) is naturally formed accurately, and it is necessary to strictly manufacture and assemble all the many members as in the conventional case.
It is possible to reduce waste and improve product reliability,
The movement stroke corresponding to the opening interval (47) is absorbed,
It is possible to prevent an accident in which the valve section (38) cannot be operated, and to reliably operate the valve section (38) with an extremely small moving stroke of about 0.5 mm.

Explaining the operation of the air operated valve configured as described above, the piston rod (7) normally presses the flow member (27) by the urging force of the pressing spring (20) to the pistons (10) (11). Therefore, the flow member (27) causes the valve portion (38) to be always opened by the restoring force of the restoring spring (44). When a closing signal is detected, the control fluid is introduced from the control fluid inlet (6) opened in the cylinder (1) into two inflow chambers formed between the two pistons (10) and (11). (14) If it is made to flow into (15), the control fluid pressure becomes 2
Pistons (10) added to individual pistons (10) (11)
The pressure receiving area of (11) is compared with the case of one piston,
It is nearly doubled, and a large output can be added to the flow member (27) via the piston rod (7), and the restoration spring (4
Even if the flow member (27) is pressed against the restoring force of 4) and the fluid flowing through the flow passage (24) has a high pressure, the valve portion (38) can be used to easily remove the flow passage (24) from the flow passage (24). The opening / closing part (37) can be closed.

In the above embodiment, the embodiment in which the present invention is used as the normally open air operated valve has been described. However, when it is used as the normally closed air operated valve, as shown in FIG. ) Between the piston (10) and the closed body (3),
The flow member (27) is pressed by the pressing end surface (45) of the piston rod (7) in the closing direction of the flow passage (24) to open and close the opening (37).
Is always closed by the valve (38). In this closed state, if the open space (48) formed between the flow member (27) and the insertion member (42) is strictly formed,
By installing the metal diaphragm (34), even if the movement stroke of the valve portion (38) is extremely small, a reliable on-off valve can be achieved. When the release signal is detected, the air pressure is applied to the pistons (10) and (11) against the urging force of the pressing spring (20), and the piston rod (7) applies the force to the flow member (27). Since the pressure is released,
The flow member (27) moves in the direction of the piston rod (7) by the urging force of the restoring spring (44), opens the valve portion (38) from the opening / closing portion (37), and keeps the fluid flow passage (24) open. Change from the closed state to the open state.

EFFECTS OF THE INVENTION As described above, the present invention has a possibility that a clean fluid may come into contact with a piston rod having an O-ring that may be damaged by ultrasonic cleaning and may be damaged by ultrasonic cleaning such as O-ring. The flow member that does not have a member is formed as a separate member, and the cleaning work during manufacturing is performed separately for the piston rod and the flow member, so that the flow member that comes into contact with the clean contents liquid is reliably washed. However, the cleaning solution will not be contaminated.

Even if the movable stroke of the valve is shortened by installing a metal diaphragm, etc., the piston rod and the flow member are formed separately, so many members such as the piston rod, piston, and fixing ring can be used as before. Since the flow member is not affected by the size and the valve part is cut after assembly, it is formed between the valve part and the opening / closing part even if the working accuracy of each component is relatively low. The open interval is naturally formed accurately, and an inexpensive and highly reliable product can be obtained.

[Brief description of drawings]

The drawings show one embodiment of the present invention. FIG. 1 is a sectional view of a normally open air operated valve, FIG. 2 is a sectional view of a normally closed air operated valve,
FIG. 3 is an enlarged cross-sectional view of the flow member, and FIG. 4 is a cross-sectional view showing a cutting state of the valve portion by the machine tool. (7) …… Piston rod (10) (11) …… Piston (24) …… Flow passage, (27) …… Flowing member (30) …… Member body, (33) …… Holding part (34)… … Metal diaphragm (35) …… Engagement collar, (37) …… Opening and closing part (38) …… Valve part, (42) …… Insert member (43) …… Annular collar, (44) …… Restoring spring ( 47) (48) …… Opening interval

Front page continued (72) Inventor Juichi Aoki 1-840 Mitsuhashi, Omiya-shi, Saitama Fujikura Rubber Industrial Co., Ltd. Omiya Plant (72) Inventor Noboru Hoshi, 840, Mitsuhashi, Omiya-shi, Saitama Fujikura Rubber Industrial Co., Ltd. Omiya Factory (72) Inventor Takashi Ejiri 3-13-16 Nakano, Nakano-ku, Tokyo (56) References JP-A-63-88387 (JP, A) Actual exploitation Sho 55-181074 (JP, U) Actual exploitation Sho 62-82477 (JP, U)

Claims (6)

[Claims] 1. A urging force of a piston which is urged in a fixed direction causes a valve portion to always open or close a fluid flow passage and sense an opening / closing signal to apply an air pressure to the piston against the urging force. In this way, the flow passage of the fluid is changed from the normally open to the closed state or the normally closed to the open state. A holding part for connecting to the valve is formed, and the valve part is connected so as to face the opening / closing part of the flow passage, and at least the predicted cutting amount is made thick so that the face of the valve part facing the opening / closing part can be cut by an arbitrary amount. An air operated valve characterized by being formed. 2. The circulating member is attached to the piston rod by interposing a restoring rib between the annular flange of the circulating member fixed to the holding portion and the inserting member slidably inserted through the circulating member. The air actuated valve according to claim 1, wherein the air actuated valve forms a force. 3. An engaging collar is projected on the outer periphery of the flow member, and the engaging collar is positioned so as to face the side opposite to the restoration spring installation side of the inserting member, and between the engaging collar and the member main body. The air actuated valve according to claim 2, wherein the center of the metal diaphragm is clamped and fixed. 4. A metal diaphragm having a central portion sandwiched and fixed between the engaging collar of the flow member and the member main body is inserted and fixed between the flow member and the insertion member, and the piston direction and the flow passage direction are liquid-tight. The air actuated valve according to claim 2, wherein the air actuated valve is divided into 5. A normally-open air-operated valve, wherein the engaging flange of the flow member and the insertion member are acted upon by the restoring force of the restoring spring when the valve portion of the flowing member opens the opening / closing portion of the flow passage. The air actuated valve according to claim 2, wherein the air actuated valve is in pressure contact. 6. A normally closed air-operated valve, wherein a valve portion connected to a flow member closes an opening / closing portion of a flow passage, and an open gap is provided between an engaging collar of the flow member and an insertion member. The air actuated valve according to claim 2, characterized in that