JPH07183586A - Multilayer piezoelectric actuator - Google Patents
Multilayer piezoelectric actuatorInfo
- Publication number
- JPH07183586A JPH07183586A JP5348087A JP34808793A JPH07183586A JP H07183586 A JPH07183586 A JP H07183586A JP 5348087 A JP5348087 A JP 5348087A JP 34808793 A JP34808793 A JP 34808793A JP H07183586 A JPH07183586 A JP H07183586A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- laminated piezoelectric
- upper plate
- plate
- spherical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の利用分野】本発明は積層形圧電アクチュエータ
に係り、特に積層形圧電素子の電歪効果を利用した積層
形圧電アクチュエータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated piezoelectric actuator, and more particularly to a laminated piezoelectric actuator utilizing the electrostrictive effect of a laminated piezoelectric element.
【０００２】[0002]
【従来の技術】従来、この種の積層形圧電アクチュエー
タは、積層形圧電素子の下端がケーシングの底板に固着
した状態で支持されると共に、積層形圧電素子の上端に
加圧上板が固着した状態で支持されていた。そして、積
層形圧電素子に駆動電圧を印加して積層形圧電素子を積
層方向に伸縮駆動させて加圧上板を動作させることによ
り、積層形圧電素子が発生する駆動力を駆動源として外
部に対して仕事をする。2. Description of the Related Art Conventionally, a laminated piezoelectric actuator of this type is supported in a state where a lower end of a laminated piezoelectric element is fixed to a bottom plate of a casing, and a pressure upper plate is fixed to an upper end of the laminated piezoelectric element. It was supported by the state. Then, a driving voltage is applied to the laminated piezoelectric element to expand / contract the laminated piezoelectric element in the laminating direction to operate the pressing upper plate, so that the driving force generated by the laminated piezoelectric element is externally used as a driving source. Work against.
【０００３】[0003]
【発明が解決しようとする課題】ところで、積層形圧電
素子は、積層方向上端面及び下端面が平坦状に形成さ
れ、端面隅部に圧縮力や引張力が集中すると積層形圧電
素子が破壊され易い性質がある。この為、従来の積層形
圧電アクチュエータのように、積層形圧電素子の上端面
と加圧上板及び積層形圧電素子の下端面と底板とが直接
固着されていると、加圧上板に偏荷重や回転力が加わっ
た時に、積層形圧電素子の端面隅部に圧縮力や引張力が
生じ、積層形圧電素子が破壊されるという欠点がある。By the way, in the laminated piezoelectric element, the upper end surface and the lower end surface in the laminating direction are formed flat, and when the compressive force or the tensile force is concentrated at the corners of the end surface, the laminated piezoelectric element is destroyed. It has an easy property. For this reason, if the upper end surface of the laminated piezoelectric element and the pressure upper plate and the lower end surface of the laminated piezoelectric element and the bottom plate are directly fixed to each other, as in the conventional laminated piezoelectric actuator, the pressure upper plate is biased. When a load or a rotational force is applied, a compressive force or a tensile force is generated at the corners of the end faces of the laminated piezoelectric element, and the laminated piezoelectric element is broken.
【０００４】本発明は、このうような事情に鑑みてなさ
れたもので、加圧上板に偏荷重や水平方向の回転力が加
わっても積層形圧電素子が破壊されない積層形圧電アク
チュエータを提供することを目的とする。The present invention has been made in view of the above circumstances, and provides a laminated piezoelectric actuator in which the laminated piezoelectric element is not destroyed even when an unbalanced load or a horizontal rotating force is applied to the pressure upper plate. The purpose is to do.
【０００５】[0005]
【課題を解決する為の手段】本発明は、前記目的を達成
する為に、底板と側板とで筒状に形成されたケーシング
と、前記ケーシング内で前記底板の中央部にその積層方
向下端が支持され、駆動電圧が印加されることにより積
層方向に伸縮駆動する積層形圧電素子と、その中央部が
前記積層形圧電素子の積層方向上端に支持され、前記積
層形圧電素子の伸縮駆動と共に動作する加圧上板と、前
記ケーシングの側板と前記加圧上板の側面との間に挟持
され、前記積層形圧電素子の伸縮駆動を阻害しないよう
に加圧上板を水平に支持する弾性部材と、から成る積層
形圧電アクチュエータに於いて、前記積層形圧電素子と
前記加圧上板の間と、積層形圧電素子と底板の間との少
なくとも一方の間を、球面接合したことを特徴とする。In order to achieve the above object, the present invention provides a casing formed by a bottom plate and a side plate in a tubular shape, and a lower end in the stacking direction at the center of the bottom plate in the casing. A laminated piezoelectric element that is supported and that expands and contracts in the stacking direction when a drive voltage is applied, and a central portion thereof is supported by the upper end of the laminated piezoelectric element in the stacking direction, and operates in parallel with the expansion and contraction of the laminated piezoelectric element. Elastic member that is sandwiched between the pressing upper plate and the side plate of the casing and the side surface of the pressing upper plate, and horizontally supports the pressing upper plate so as not to hinder the expansion and contraction drive of the laminated piezoelectric element. In a laminated piezoelectric actuator comprising: and, a spherical bond is formed between at least one of the laminated piezoelectric element and the pressure upper plate and at least one of the laminated piezoelectric element and the bottom plate.
【０００６】[0006]
【作用】本発明によれば、前記積層形圧電素子と前記加
圧上板の間と、積層形圧電素子と底板の間との少なくと
も一方の間を、球面接合した。これにより、加圧上板に
偏荷重が加わった場合、偏荷重は球面接合部を介して積
層形圧電素子に伝達されるので、偏荷重は積層形圧電素
子に対して積層方向に均等な荷重として作用する。ま
た、加圧上板に水平方向の回転力が加わった場合、加圧
上板は球面接合部を支点として回転するので、加圧上板
に加わった回転力が吸収される。According to the present invention, spherical bonding is performed between the laminated piezoelectric element and the pressure upper plate and between at least one of the laminated piezoelectric element and the bottom plate. As a result, when an eccentric load is applied to the pressing upper plate, the eccentric load is transmitted to the laminated piezoelectric element via the spherical joint, so that the eccentric load is evenly applied to the laminated piezoelectric element in the laminating direction. Acts as. Further, when a rotational force in the horizontal direction is applied to the pressure upper plate, the pressure upper plate rotates about the spherical joint, so that the rotational force applied to the pressure upper plate is absorbed.
【０００７】従って、加圧上板に偏荷重や回転力が加わ
っても積層形圧電素子の端面隅部に圧縮力や引張力が生
じないので、積層形圧電素子が破壊されることがない。Therefore, even if an unbalanced load or a rotational force is applied to the pressing upper plate, no compressive force or tensile force is generated at the corners of the end face of the laminated piezoelectric element, so that the laminated piezoelectric element is not destroyed.
【０００８】[0008]
【実施例】以下添付図面に従って本発明に係る積層形圧
電アクチュエータの好ましい実施例について詳説する。
図１は本発明の積層形圧電アクチュエータの縦方向の断
面図である。図１に示すように、本発明の積層形圧電ア
クチュエータ１０は、主として底板１２と側板１４とで
筒状に形成されたケーシング１６と、ケーシング１６内
に設けられ駆動源としての積層形圧電素子１８と、積層
形圧電素子１８の駆動と共に動作する加圧上板２０と、
ケーシング１６の側板１４と加圧上板２０の側面との間
に挟持され、積層形圧電素子１８の伸縮駆動を阻害しな
いように加圧上板２０を水平に支持する弾性部材２２
と、積層形圧電素子１８の上端と加圧上板２０との間に
介在される上部受け部材２４と、積層形圧電素子１８の
下端と底板１２との間に介在される下部受け部材２６と
で構成されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the laminated piezoelectric actuator according to the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a vertical sectional view of a laminated piezoelectric actuator of the present invention. As shown in FIG. 1, a laminated piezoelectric actuator 10 of the present invention includes a casing 16 mainly formed by a bottom plate 12 and a side plate 14 in a cylindrical shape, and a laminated piezoelectric element 18 provided in the casing 16 as a drive source. And a pressure upper plate 20 that operates together with driving of the laminated piezoelectric element 18,
An elastic member 22 which is sandwiched between the side plate 14 of the casing 16 and the side surface of the pressure upper plate 20 and horizontally supports the pressure upper plate 20 so as not to hinder the expansion and contraction drive of the laminated piezoelectric element 18.
An upper receiving member 24 interposed between the upper end of the laminated piezoelectric element 18 and the pressure upper plate 20, and a lower receiving member 26 interposed between the lower end of the laminated piezoelectric element 18 and the bottom plate 12. It is composed of.
【０００９】積層形圧電素子１８は複数の矩形状の圧電
板１８Ａ、１８Ａ…が積層された構造を有し、積層形圧
電素子１８に駆動電圧を印加することにより、積層方向
（図中矢印２７方向）に伸長又は収縮する。この積層形
圧電素子１８を駆動源として加圧上板２０を動作させる
ことにより、外部に対して仕事を行う。また、積層形圧
電素子１８の下端と底板１２との間に介在される下部受
け部材２６は、上面が積層形圧電素子１８の下端面に固
着されると共に、下面中央部に球面状の凹部２６Ａが形
成され、底板１２中央部に形成された球面状の凸部１２
Ａと球面接合している。また、下部受け部材２６と底板
１２とは間隙２８を有するように球面接合され、これに
より球面接合部が遊動できるようになっている。また、
積層形圧電素子１８の上端と加圧上板２０との間に介在
される上部受け部材２４は、下面が積層形圧電素子１８
の上端面に固着されると共に、上面中央部に球面状の凹
部２４Ａが形成され、加圧上板２０の下面中央部に形成
された球面状の凸部２０Ａと球面接合している。また、
上部受け部材２４と加圧上板２０とは間隙３０を有する
ように球面接合され、これにより球面接合部が遊動でき
るようになっている。従って、積層形圧電素子１８は下
部受け部材２６を介して遊動自在に床板１２に支持され
ると共に、加圧上板２０は上部受け部材２４を介して遊
動自在に積層形圧電素子１８に支持される。The laminated piezoelectric element 18 has a structure in which a plurality of rectangular piezoelectric plates 18A, 18A ... Are laminated, and by applying a drive voltage to the laminated piezoelectric element 18, the laminated direction (arrow 27 in the figure). Direction). By operating the pressure upper plate 20 using the laminated piezoelectric element 18 as a drive source, work is performed to the outside. Further, the lower receiving member 26 interposed between the lower end of the laminated piezoelectric element 18 and the bottom plate 12 has its upper surface fixed to the lower end surface of the laminated piezoelectric element 18 and has a spherical concave portion 26A at the center of the lower surface. And a spherical convex portion 12 formed in the center of the bottom plate 12
It is spherically joined to A. Further, the lower receiving member 26 and the bottom plate 12 are spherically joined so as to have a gap 28 therebetween, so that the spherical joint portion can move freely. Also,
The upper receiving member 24 interposed between the upper end of the laminated piezoelectric element 18 and the pressing upper plate 20 has the lower surface of the laminated piezoelectric element 18.
While being fixed to the upper end surface of the above, a spherical concave portion 24A is formed in the central portion of the upper surface, and is spherically joined to the spherical convex portion 20A formed in the central portion of the lower surface of the pressing upper plate 20. Also,
The upper receiving member 24 and the pressing upper plate 20 are spherically joined to each other so as to have a gap 30, whereby the spherical joining portion can move freely. Therefore, the laminated piezoelectric element 18 is movably supported by the floor plate 12 via the lower receiving member 26, and the pressure upper plate 20 is movably supported by the laminated piezoelectric element 18 via the upper receiving member 24. It
【００１０】また、加圧上板２０の側面とケーシング１
６の側板１４との間に挟持された弾性部材２２は、ゴム
部材、板バネ等が用いられ、これにより、加圧上板２０
が積層形圧電素子１８により積層方向に動作する際に、
積層形圧電素子１８の伸縮駆動を阻害しないように加圧
上板２０を水平に支持する。また、加圧上板２０の上に
は支持ラバー３２を介してフランジ３４が接合され、積
層形圧電素子１８の駆動により動作する加圧上板２０
は、支持ラバー３２及びフランジ３４を介してフランジ
３４上の物体３６に対して仕事をする。The side surface of the pressure upper plate 20 and the casing 1
A rubber member, a leaf spring, or the like is used as the elastic member 22 sandwiched between the side plate 14 of FIG.
Is operated in the stacking direction by the stacked piezoelectric element 18,
The upper pressing plate 20 is supported horizontally so as not to hinder the expansion and contraction drive of the laminated piezoelectric element 18. Further, a flange 34 is joined to the pressing upper plate 20 via a support rubber 32, and the pressing upper plate 20 operated by driving the laminated piezoelectric element 18 is operated.
Work on the object 36 on the flange 34 via the support rubber 32 and the flange 34.
【００１１】また、積層形圧電素子１８は配線（図示せ
ず）で駆動アンプ（図示せず）に接続され、積層形圧電
素子１８に所定の駆動電圧を印加できるようになってい
る。次に、上記の如く構成された本発明の積層形圧電ア
クチュエータ１０の作用について説明する。積層形圧電
素子１８に所定の駆動電圧を印加して積層形圧電素子１
８を駆動すると、加圧上板２０は弾性部材２２で水平に
支持されながら支持ラバー３２及びフランジ３４を介し
て、フランジ３４上の物体３６を動かす。この時、物体
３６の荷重が加圧上板２０に均等に加わらずに所謂、偏
荷重となった場合、偏荷重は加圧上板２０と上部受け部
材２４との球面接合部を介して積層形圧電素子１８に伝
達される。これにより、偏荷重は積層形圧電素子１８に
対して積層方向の均等な荷重として作用する。従って、
加圧上板２０に偏荷重が加わっても積層形圧電素子１８
の端面隅部３８に圧縮力が集中することがないので、積
層形圧電素子１８が破壊されることがない。The laminated piezoelectric element 18 is connected to a drive amplifier (not shown) by a wiring (not shown) so that a predetermined drive voltage can be applied to the laminated piezoelectric element 18. Next, the operation of the laminated piezoelectric actuator 10 of the present invention configured as described above will be described. By applying a predetermined drive voltage to the laminated piezoelectric element 18, the laminated piezoelectric element 1
When 8 is driven, the pressing upper plate 20 moves the object 36 on the flange 34 via the supporting rubber 32 and the flange 34 while being horizontally supported by the elastic member 22. At this time, when the load of the object 36 does not evenly apply to the pressing upper plate 20 and becomes a so-called eccentric load, the eccentric load is laminated via the spherical joint portion between the pressing upper plate 20 and the upper receiving member 24. To the piezoelectric element 18. As a result, the unbalanced load acts on the laminated piezoelectric element 18 as a uniform load in the laminating direction. Therefore,
Even if an unbalanced load is applied to the pressure upper plate 20, the laminated piezoelectric element 18
Since the compressive force does not concentrate on the end face corner portion 38, the laminated piezoelectric element 18 is not broken.
【００１２】また、フランジ３４上の物体３６が回転し
て、加圧上板２０に水平方向の回転力が加わった場合、
加圧上板２０は、加圧上板２０と上部受け部材２４の球
面接合部、及び下部受け部材２６と底板１２の球面接合
部を支点として物体３６の回転方向に回転するので、加
圧上板２０に加えられた回転力が吸収される。これによ
り、加圧上板２０に水平方向の回転力が加わっても、積
層形圧電素子１８の端面隅部３８に引張力が発生しない
ので、積層形圧電素子１８が破壊されることがない。When the object 36 on the flange 34 is rotated and a horizontal rotating force is applied to the pressure upper plate 20,
Since the pressing upper plate 20 rotates in the rotation direction of the object 36 with the spherical joint between the pressing upper plate 20 and the upper receiving member 24 and the spherical joint between the lower receiving member 26 and the bottom plate 12 as fulcrums, The rotational force applied to the plate 20 is absorbed. As a result, even if a horizontal rotational force is applied to the pressing upper plate 20, no tensile force is generated at the end face corner portion 38 of the laminated piezoelectric element 18, so that the laminated piezoelectric element 18 is not destroyed.
【００１３】以上のように、本発明の積層形圧電アクチ
ュエータ１０は、積層形圧電素子１８と加圧上板２０の
間と、積層形圧電素子１８と底板１２の間を、球面接合
する受け部材２４、２６を介在させて、加圧上板２０に
偏荷重や回転力が加わっても積層形圧電素子１８の端面
隅部３８に圧縮力や引張力が生じない構造にしたので、
積層形圧電素子の破壊を防止することができる。As described above, the laminated piezoelectric actuator 10 of the present invention has a receiving member for spherically bonding the laminated piezoelectric element 18 and the pressure upper plate 20 and the laminated piezoelectric element 18 and the bottom plate 12 together. With the structure in which the compressive force and the tensile force are not generated in the end face corner portion 38 of the laminated piezoelectric element 18 even if an unbalanced load or a rotational force is applied to the upper pressing plate 20 with 24 and 26 interposed,
It is possible to prevent breakage of the laminated piezoelectric element.
【００１４】尚、本実施例では、積層形圧電素子と加圧
上板の間、及び積層形圧電素子と底板の間の両方に受け
部材を介在させるようにしたが、積層形圧電素子と加圧
上板の間、及び積層形圧電素子と底板の間のうち、何方
か一方に受け部材を設けるようにしてもよい。また、上
部受け部材及び下部受け部材に球面状の凹部を形成し、
加圧上板及び底板に球面状の凸部を形成したが、上部受
け部材及び下部受け部材に球面状の凸部を形成し、加圧
上板及び底板に球面状の凹部を形成してもよい。要は、
加圧上板と上部受け部材、及び下部受け部材と底板とが
遊動自在に係合できる組み合わせであればよい。In this embodiment, the receiving members are provided both between the laminated piezoelectric element and the pressure upper plate and between the laminated piezoelectric element and the bottom plate. The receiving member may be provided on one of the plates or between the laminated piezoelectric element and the bottom plate. Further, spherical recesses are formed in the upper receiving member and the lower receiving member,
Spherical convex portions are formed on the pressing upper plate and the bottom plate, but spherical convex portions are formed on the upper receiving member and the lower receiving member, and spherical concave portions are formed on the pressing upper plate and the bottom plate. Good. In short,
Any combination may be used as long as the pressing upper plate and the upper receiving member and the lower receiving member and the bottom plate are movably engaged with each other.
【００１５】[0015]
【発明の効果】以上説明したように、本発明に係る積層
形圧電アクチュエータによれば、積層形圧電素子と加圧
上板の間と、積層形圧電素子と底板の間との少なくとも
一方の間を、球面接合して、加圧上板に加わる偏荷重が
積層形圧電素子の積層方向の均等な荷重として作用する
ようにすると共に、加圧上板に加わる水平方向の回転力
を吸収するようにした。As described above, according to the laminated piezoelectric actuator of the present invention, at least one of the laminated piezoelectric element and the pressure upper plate and the laminated piezoelectric element and the bottom plate is provided. Spherical bonding is performed so that the unbalanced load applied to the pressing upper plate acts as a uniform load in the stacking direction of the laminated piezoelectric element, and the horizontal rotating force applied to the pressing upper plate is absorbed. .
【００１６】これにより、加圧上板に偏荷重や回転力が
加わっても、積層形圧電素子の端面隅部に圧縮力や引張
力が集中しないので、積層形圧電素子の破壊を防止する
ことができる。As a result, even if an unbalanced load or a rotational force is applied to the pressure upper plate, the compressive force or the tensile force is not concentrated at the end face corners of the laminated piezoelectric element, so that the laminated piezoelectric element is prevented from being broken. You can
【図１】本発明に係る積層形圧電アクチュエータの縦方
向の断面図FIG. 1 is a longitudinal sectional view of a laminated piezoelectric actuator according to the present invention.
１０…積層形圧電アクチュエータ １２…底板 １４…側板 １６…ケーシング １８…積層形圧電素子 ２０…加圧上板 ２２…弾性部材 ２４…上部受け部材 ２６…下部受け部材 ３２…支持ラバー ３４…フランジ DESCRIPTION OF SYMBOLS 10 ... Laminated piezoelectric actuator 12 ... Bottom plate 14 ... Side plate 16 ... Casing 18 ... Laminated piezoelectric element 20 ... Pressing upper plate 22 ... Elastic member 24 ... Upper receiving member 26 ... Lower receiving member 32 ... Support rubber 34 ... Flange
Claims (1)
グと、 前記ケーシング内で前記底板の中央部にその積層方向下
端が支持され、駆動電圧が印加されることにより積層方
向に伸縮駆動する積層形圧電素子と、 その中央部が前記積層形圧電素子の積層方向上端に支持
され、前記積層形圧電素子の伸縮駆動と共に動作する加
圧上板と、 前記ケーシングの側板と前記加圧上板の側面との間に挟
持され、前記積層形圧電素子の伸縮駆動を阻害しないよ
うに加圧上板を水平に支持する弾性部材と、から成る積
層形圧電アクチュエータに於いて、 前記積層形圧電素子と前記加圧上板の間と、積層形圧電
素子と底板の間との少なくとも一方の間を、球面接合し
たことを特徴とする積層形圧電アクチュエータ。1. A casing formed by a bottom plate and a side plate into a tubular shape, and a lower end of the bottom plate in the stacking direction is supported by a central portion of the bottom plate in the casing, and a driving voltage is applied to expand and contract in the stacking direction. A laminated piezoelectric element, a central portion of which is supported at the upper end in the laminating direction of the laminated piezoelectric element, and a pressure upper plate which operates together with the expansion and contraction drive of the laminated piezoelectric element; a side plate of the casing; A laminated piezoelectric actuator comprising: an elastic member that is sandwiched between the plate and a side surface of the laminated piezoelectric element and horizontally supports the pressing upper plate so as not to hinder the expansion and contraction drive of the laminated piezoelectric element. A laminated piezoelectric actuator, characterized in that a spherical joint is provided between at least one of the element and the pressure upper plate and between the laminated piezoelectric element and the bottom plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5348087A JP2940376B2 (en) | 1993-12-24 | 1993-12-24 | Stacked piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5348087A JP2940376B2 (en) | 1993-12-24 | 1993-12-24 | Stacked piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07183586A true JPH07183586A (en) | 1995-07-21 |
| JP2940376B2 JP2940376B2 (en) | 1999-08-25 |
Family
ID=18394658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5348087A Expired - Fee Related JP2940376B2 (en) | 1993-12-24 | 1993-12-24 | Stacked piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2940376B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1010366C2 (en) * | 1998-10-21 | 2000-04-25 | Hoogovens Corporate Services B | Device for precise position control of a power transmission system. |
| DE19928177A1 (en) * | 1999-06-19 | 2001-01-11 | Bosch Gmbh Robert | Piezo actuator |
| US6448692B1 (en) * | 1999-03-04 | 2002-09-10 | Robert Bosch Gmbh | Piezoelectric actuator |
| JP2007007679A (en) * | 2005-06-29 | 2007-01-18 | Yaskawa Electric Corp | Back-pressure device for laminated core, and progressive press die equipped with the same |
| JP2007019472A (en) * | 2005-06-10 | 2007-01-25 | Ngk Insulators Ltd | Laminated piezoelectric/electrostrictive element |
| CN111140663A (en) * | 2018-11-01 | 2020-05-12 | 株式会社电装 | Valve member and evaporated fuel treatment system |
-
1993
- 1993-12-24 JP JP5348087A patent/JP2940376B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1010366C2 (en) * | 1998-10-21 | 2000-04-25 | Hoogovens Corporate Services B | Device for precise position control of a power transmission system. |
| WO2000023204A1 (en) * | 1998-10-21 | 2000-04-27 | Corus Technology Bv | Device for accurate position control of a force-transmitting system |
| US6373171B1 (en) | 1998-10-21 | 2002-04-16 | Corus Technology Bv | Device for accurate position control of a force-transmitting system |
| US6448692B1 (en) * | 1999-03-04 | 2002-09-10 | Robert Bosch Gmbh | Piezoelectric actuator |
| DE19928177A1 (en) * | 1999-06-19 | 2001-01-11 | Bosch Gmbh Robert | Piezo actuator |
| DE19928177C2 (en) * | 1999-06-19 | 2001-04-26 | Bosch Gmbh Robert | Piezo actuator |
| JP2007019472A (en) * | 2005-06-10 | 2007-01-25 | Ngk Insulators Ltd | Laminated piezoelectric/electrostrictive element |
| JP2007007679A (en) * | 2005-06-29 | 2007-01-18 | Yaskawa Electric Corp | Back-pressure device for laminated core, and progressive press die equipped with the same |
| CN111140663A (en) * | 2018-11-01 | 2020-05-12 | 株式会社电装 | Valve member and evaporated fuel treatment system |
| CN111140663B (en) * | 2018-11-01 | 2023-03-10 | 浜名湖电装株式会社 | Valve member and evaporated fuel treatment system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2940376B2 (en) | 1999-08-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |