JPH07176088A - Recording and reproducing device - Google Patents

Abstract

PURPOSE:To provide the recording and reproducing device capable of high density recording of information by utilizing the high resolution of scanning probe microscope technology. CONSTITUTION:While a disk 1 is rotated in the direction of an arrow 2, a holding body 3 of a probe is positioned in the normal direction 4 of the disk 1 by a linear slide 5. Recording or reproducing is performed by making the probe 6 provided at the tip of the holding body 3 close to or contact with a recording surface 1a of the disk 1. The structure of the holding body 3 of the probe is twistable around an axis 8 that is approximately parallel to the direction 7 of a recording information train, and the probe 6 is twisted in accordance with an inclination of a side surface of a guide groove formed in the front surface of the disk 1. A light reflecting surface 9 of the holding body 3 is irradiated with a laser beam from a laser diode 10, and its reflected light is received by a quadripartite photodetector 11. Thus, torsion of the probe 6 is detected as a quantity of unbalance of the received light in light intensity, and hence feedback control is performed on the probe 6 by a linear slide 5 or a triaxial piezoelectric actuator 12.

Description

Detailed Description of the Invention

[0001]

The present invention relates to a scanning tunneling microscope,
The present invention relates to a recording / reproducing device to which a technique of a scanning probe microscope such as an atomic force microscope is applied.

[0002]

2. Description of the Related Art An optical recording / reproducing apparatus is capable of recording / reproducing at a relatively high density and recording / reproducing in a non-contact manner, and therefore has excellent durability and reliability. It has become widespread recently.

However, in such conventional optical recording / reproducing, there is a physical limit that the spot size for converging light cannot be reduced to a fraction of the wavelength of the light or less, and thus high density is required. There was a limit.

On the other hand, the scanning probe microscope technique in which a probe is traced to a sample at a distance of atomic order or nanometer unit is a technique for observing a fine region far exceeding the above light spot size. In addition to the above, the potential as a technology for processing or manipulating the sample surface with resolution of atomic or molecular order, and further as a technology for recording and reproducing information on the sample surface is drawing attention.

An atomic force microscope (AF), which is one of the deep scanning probe microscopes (SPM) related to the present invention, will be described below.
The principle of M) will be briefly described. In general, forces such as Van der Waals force and Coulomb force act between the material surfaces. The AFM detects a local force that acts when a probe provided on a minute cantilever approaches the sample surface as deflection of the cantilever, and keeps this force constant between the probe and the sample. The sample is scanned along the surface of the sample while controlling the distance, and this control amount is imaged as a sample surface image.

Although these SPMs have been completed as a technique for observing a specific minute area on the sample surface with high resolution, in order to apply this to recording / reproducing technology, the probe is moved at high speed over a wide sample surface. In addition, a technology for highly accurate positioning control is required.

As a needle positioning method in a recording / reproducing system using a needle, a guide groove for the needle is provided on the surface of the disk like a pure mechanical disk phonograph, and the needle is guided along with the rotation of the disk. There is something that can be traced mechanically along. In this trace method, the recording signal of the unevenness recorded in the V groove is
It is also used as a recording method for a video disc, which detects a difference in electrostatic capacitance between a recording medium and an electrode attached to a reproducing needle. Also, one of the tracing methods of electrostatic video discs using a needle is one in which there is no guide groove on the disc and a pilot signal is recorded separately from the recording signal for signals and tracking control is performed by this. .

As an example of performing high-density recording / reproducing with the probe using the AFM, a bullet (RC Barret)
t) etc. are Ultra Microscopy (Ultrami
42) (44) (1992) 262-2
67, a dielectric film on a conductor or semiconductor substrate (specifically, a nitride film (ni) on a silicon substrate).
and NOS consisting of oxide film (oxide)
Structure () is used as a recording medium, and a voltage is applied to the conductor probe of the AFM cantilever to record a charge dot on the interface. Furthermore, in this paper, a grating is provided on the surface of a dielectric film (nitride film), information is read out by detecting the electrostatic capacity of charge dots by a probe, and surface irregularity information obtained by AFM is obtained. It also describes ideas to use for tracking.

[0009]

In applying the SPM to the recording / reproducing apparatus, the method described in the above-mentioned conventional example is not sufficient for controlling the positioning of the probe over a wide sample surface at high speed and with high accuracy. .

First, the method of simply mechanically tracing the probe along the guide groove provided on the surface of the recording medium, which has been described as the conventional example, cannot be applied to the SPM. Because
In the case of SPM, the distance between the probe and the sample is controlled to be kept at a distance of about 10 angstroms, so almost no force acts on the probe from the sample surface, and in the case of AFM, it also acts on the probe. Since such force (repulsive force or attractive force) is controlled within a very weak range of 10 ^-4 to 10 ^-8 N (atomic force), the centripetal force that mechanically traces the probe along the guide groove is substantial. Because it doesn't work.

Further, as described in the conventional example, there is an idea that a grating is provided on the surface of the recording medium and this unevenness information obtained by the AFM is used for tracking, but a concrete example of the error signal including the direction to be controlled is provided. It does not disclose a method for obtaining the target. Considering the operating principle of the AFM, it is considered that such an error signal cannot be obtained by one scanning of the probe, and it cannot be said that a practical tracking method is proposed.

As one method of obtaining the error signal including the direction to be controlled, as described above, the pilot signal is recorded separately from the recording signal for the signal, and the tracking control is applied thereby. However, this method has a problem that the recording density and the recording / reproducing speed are reduced by that amount because an extra pilot signal is recorded.

In order to solve the above-mentioned problems of the prior art, it is an object of the present invention to provide a recording / reproducing apparatus capable of high density recording of information by utilizing the high resolution of the scanning probe microscope technique.

[0014]

In order to achieve the above object, the structure of the recording / reproducing apparatus according to the present invention is such that a probe held by a holder is positioned and the probe is positioned relative to a recording surface of a recording medium. A recording / reproducing apparatus for recording or reproducing information on or from the recording medium by bringing the holding body into proximity with or in contact with the recording medium, wherein the holding body can be twisted at least around an axis substantially parallel to the direction of the recorded information sequence. A detection unit configured to detect a twist of the probe about the axis, and a moving unit configured to move the probe in a direction orthogonal to a direction of a recorded information sequence;
And a control means for performing tracking control of the probe by moving the probe in a direction orthogonal to the direction of the recorded information sequence based on the twist detection signal.

Further, in the above structure, a part of the holding body is a flexible elastic body that bends due to the force received by the probe from the recording surface, and the probe is detected by detecting the bending or distortion of the holding body. Detecting means for detecting an attractive force or repulsive force acting between the recording surface and the recording surface, a moving means for moving the probe in a direction perpendicular to the recording surface, and the probe on the recording surface based on a force detection signal. On the other hand, it is preferable to provide a control means for controlling the force of the probe by moving it in the vertical direction. In this case, further, the detection means for detecting the twist of the probe and the detection means for detecting the force received by the probe from the recording surface are irradiated with light rays on the light reflecting surface provided on the holder of the probe. However, it is preferable that the intensity of the reflected light is detected by a 4-division photodetector, and the twist of the probe and the force received from the recording surface are calculated by these signals.

Further, in the above structure, the detecting means for detecting the twist of the probe or the detecting means for detecting the force received by the probe from the recording surface detects the resistance change of the semiconductor strain resistance element provided on the holder. It is preferable to do so.

Further, in the above structure, the detecting means for detecting the twist of the probe or the detecting means for detecting the force received by the probe from the recording surface are provided on the electrode provided on the holding body so as to face the electrode. Preferably by detecting the capacitance between the electrodes.

In the above structure, it is preferable to provide a guide groove for tracking on the recording surface of the recording medium.
In this case, the tracking guide groove is provided with a grating-like unevenness by irradiating the surface of the photosensitive organic thin film provided on the recording surface of the recording medium with two-beam interference light of coherent light. It is preferable that the grating-shaped irregularities are concentrically formed.

Further, in the above constitution, it is preferable that the probe is made of needle crystals of zinc oxide, silicon carbide or zinc selenide. Further, in the above structure, it is preferable that the recording medium is an organic thin film, and the recording medium is heated by means such as light irradiation through a probe to cause unevenness in the recording medium. Further, in the above structure, the recording medium is a thin film of a conductor or a semiconductor, and a physical property is changed in the recording medium by heating or applying a voltage to the recording medium by means such as light irradiation through a probe. Is preferred.

[0020]

According to the above-mentioned structure of the present invention, the probe is twisted about the axis substantially parallel to the direction of the recording information sequence in accordance with the unevenness of the surface of the recording medium. Since the twisting direction differs depending on the inclination direction of the unevenness of the surface of the recording medium, the twisting directions are opposite to each other depending on the inclination direction of both side surfaces of the V-shaped guide groove provided on the surface of the recording medium. Therefore, tracking control of the probe can be performed by detecting this twist and moving the probe in the direction orthogonal to the recorded information sequence based on this detection signal.

Further, in the above structure, a part of the holding body is a flexible elastic body which is bent by a force which the probe receives from the recording surface, and the probe and the probe are detected by detecting the bending or distortion of the holding body. Detecting means for detecting an attractive force or repulsive force acting between the recording surface, moving means for moving the probe in a direction perpendicular to the recording surface, and the probe for the recording surface based on a force detection signal. According to a preferable configuration in which the control means for controlling the force of the probe by moving the probe in the vertical direction is provided, this is equivalent to focusing control in optical recording, and for example, the probe can be applied to surface wobbling of a rotating recording disk. Can be followed. And since the force control of the probe in this case is usually performed in the repulsive force region,
Although the probe comes into contact with the surface of the recording medium, as can be seen from the fact that the atomic arrangement can be observed with an atomic force microscope without damaging the surface, the probe and the surface of the recording medium by this contact Even if damage or wear occurs, it is extremely small. Further, since the probe is held by the holder having a small spring constant, even if the probe collides with the minute protrusion on the surface, the probe and the surface of the recording medium are not excessively applied to each other. . Further, in this case, further, a detecting means for detecting the twist of the probe and a detecting means for detecting the force received by the probe from the recording surface are irradiated with a light beam on the light reflecting surface provided on the holder of the probe. However, according to a preferable configuration in which the intensity of the reflected light is detected by the four-division photodetector and the twist of the probe and the force received from the recording surface are calculated by these signals, tracking control of the probe is performed. An error signal for force control can be simultaneously obtained with a simple configuration.

Further, in the above structure, the detecting means for detecting the twist of the probe or the detecting means for detecting the force received by the probe from the recording surface detects the resistance change of the semiconductor strain resistance element provided on the holder. According to the preferable configuration, the error signal for tracking control and force control of the probe can be obtained with a compact configuration.

Further, in the above structure, the detecting means for detecting the twist of the probe or the detecting means for detecting the force received by the probe from the recording surface are provided on the electrode provided on the holder and opposite thereto. According to the preferable configuration in which the capacitance between the electrodes is detected, the error signal for the probe tracking control and the force control can be obtained with a compact configuration.

Further, in the above structure, according to the preferable structure in which the guide groove for tracking is provided on the recording surface of the recording medium, a stable tracking error signal can be obtained. Also, in this case, the guide groove for tracking is
According to a preferable configuration in which the surface of the photosensitive organic thin film provided on the recording surface of the recording medium is provided with grating-like unevenness by irradiating the two-beam interference light of coherent light, A narrow pitch guide groove suitable for high density recording can be formed by a simple process. Further, according to a preferable configuration in which the grating-shaped concavities and convexities are formed concentrically, this recording medium can be applied to a rotary disk type recording / reproducing apparatus.

Further, in the above structure, according to a preferable structure in which the probe is made of needle crystals of zinc oxide, silicon carbide or zinc selenide, these needle crystals have a sharp tip and extend in the crystal axis direction. Since it has a high aspect ratio, it is possible to perform tracking control capable of stably tracing a narrow pitch guide groove.

Further, according to the preferable constitution, in which the recording medium is an organic thin film, and the recording medium is heated by means such as light irradiation through a probe to cause unevenness in the recording medium. It is possible to perform write-once recording / reproduction of density. Further, in the above structure, the recording medium is a thin film of a conductor or a semiconductor, and a physical property is changed in the recording medium by heating or applying a voltage to the recording medium by means such as light irradiation through a probe. According to a preferable configuration, high density erasable recording / reproducing can be performed.

[0027]

EXAMPLES The present invention will be described in more detail below with reference to examples. FIG. 1 is a perspective view showing an embodiment of a recording / reproducing apparatus according to the present invention. Hereinafter, the configuration will be described together with the operation with reference to FIG.

As shown in FIG. 1, first, while rotating a recording medium disk (hereinafter referred to as “disk”) 1 in the direction of arrow 2, the probe holder 3 is moved in the radial direction 4 of the disk 1.
The linear slide 5 is used for positioning. Next, the probe 6 provided at the tip of the holder 3 is attached to the recording surface 1a of the disk 1.
The recording or reproducing is performed by bringing it into close proximity or contact with.

As will be described later, the holder 3 of the probe has a structure capable of being twisted around an axis 8 which is substantially parallel to the direction 7 of the recorded information sequence, and a laser diode is provided on the light reflecting surface 9 of the holder 3. A laser beam is emitted from 10 and the reflected light is received by the 4-division photodetector 11. Further, a guide groove is formed on the surface of the disk 1 as described later, and the probe is twisted around the shaft 8 according to the inclination of the side surface of the guide groove. Then, this twist can be detected as an unbalance amount of the intensity of the received light. Further, based on this twist detection signal, the linear slide 5 or the triaxial piezoelectric actuator 12 can perform feedback control so that the probe 6 traces the guide groove.

Further, the probe holder 3 is constructed so as to be bent by a force acting between the probe 6 and the recording surface 1a, as will be described later, and this bending amount, that is, the force acting on the probe 6 is also received. It can be detected as an unbalanced amount of the intensity of the generated light. Then, based on the detected force, the force of the probe 6 is controlled by moving the probe 6 along the normal direction 13 of the recording surface 1a by the triaxial piezoelectric actuator 12 so that this force becomes constant. be able to. This force control corresponds to focusing control in optical recording, and it is not always necessary to follow the minute irregularities of the recording surface 1a, and the response frequency is limited so as to follow the surface wobbling accompanying the rotation of the disk 1. You can also

Incidentally, it is desirable that the entire apparatus is covered with a box 14 except for the electric control section and enclosed in a dry gas or a reduced pressure gas.

Next, the structure of the holder of the probe will be described in more detail. 2 is a plan view showing an embodiment of a holder for a probe, FIG. 3 is a side view of FIG. 2, and FIG. 4 is a view taken in the direction of arrow A in FIG. As shown in FIGS. 2, 3, and 4, the probe holder 3
Has a structure in which a constriction 23 is provided in a part of a cantilever 22 protruding from the substrate 21, and can be twisted around an axis 8 substantially parallel to the direction 7 of the recorded information sequence. The cantilever 22 is made by photolithography and has a thickness of 1 to 2 μm, a width of 30 to 50 μm, and a length of 100 to.
The probe 6 is made of a silicon oxide thin film having a thickness of 200 μm, and the tip of the probe 6 is attached to the back surface of the probe 6 to form a light reflecting surface 9 by depositing gold. A guide groove 24 is provided on the surface of the disc 1.
The probe 6 is twisted around the shaft 8 according to the inclination of the side surface of the guide groove 24. As described above, the twist of the probe 6 and the force applied to the probe 6 irradiate the light reflecting surface 9 of the cantilever 22 with a laser beam from the laser diode 10, and the reflected light thereof is divided into four photodetectors 11.
It can be detected by receiving light.

FIG. 5 is a layout view of the four-division photodetector, and FIG. 6 is a block diagram of an arithmetic circuit for the tracking error signal and the force error signal. As shown in FIG. 5, four light-receiving surfaces 31, 32, 33, and 34 of the four-division photodetector 11 are arranged on an axis 8 that is substantially parallel to the direction 7 of the recorded information sequence. From the light intensity signals obtained by these light receiving surfaces 31, 32, 33, 34, the addition and subtraction circuits of FIG.
Two error signals 35, 36 can be obtained. here,
The error signal 35 is an error signal of the bending of the holding body 3, that is, the force applied to the probe 6, because of the bias of the reflected light in the plane of the paper of FIG. Further, since the error signal 36 is due to the deviation of the reflected light within the paper surface of FIG.
That is, it is a tracking error signal.

FIG. 7 is a plan view showing another embodiment of the holder for the probe, FIG. 8 is a sectional view taken along line I--I of FIG. 7, and FIG. 9 is taken along line II-- of FIG.
II is a side view. As shown in FIGS. 7, 8 and 9, the probe holder 3 is made of a thin film elastic body formed on a hollowed surface of the substrate 41, and the probe 6 is attached to a part of the thin film elastic body. A cantilever 42 having is formed. Also,
Twisting and deforming portions 44 are formed at both ends of the frame portion 43 constituting the fixed end portion of the cantilever 42 so that the probe 6 can be twisted around an axis 8 parallel to the direction 7 of the recorded information sequence. There is.

In the above embodiment, light reflection is used as a means for detecting the twist of the probe 6 and the force that the probe 6 receives from the recording surface 1a, but the present invention is not limited to this. For example, it can be performed by detecting the resistance change of the semiconductor strain resistance element provided on the holding body, or by detecting the capacitance between the electrode provided on the holding body and the electrode provided opposite thereto. it can. Since these sensors are integrated and formed on the holder of the probe described above, the manufacturing process is complicated, but there is an advantage that the error signal can be obtained with a compact structure.

Further, in the above-mentioned embodiment, the case where the guide groove is provided on the surface of the recording medium has been described. However, when the recording information sequence has pit-shaped or mound-shaped surface irregularities,
In principle, it is also possible to obtain the tracking error signal by detecting the twist of the probe obtained from these recorded information strings. However, since the twist detection signal becomes weak with the miniaturization of the recording information bit, it is preferable to provide the guide groove as in the above embodiment in order to obtain a stable tracking error signal.

As the probe, it is preferable to use needle crystals of zinc oxide, silicon carbide or zinc selenide. This is because these needle-like crystals have sharp tips and have a high aspect ratio in the crystal axis direction, so that tracking control capable of stably tracing a narrow pitch guide groove can be performed.

Next, the structure of the recording medium will be described in more detail. FIG. 10 is a sectional view showing an embodiment of a recording medium. As shown in FIG. 10, a photosensitive organic thin film 52 is formed on the substrate 51. By irradiating the surface of the photosensitive organic thin film 52 with the two-beam interference light of the coherent light, the grating-shaped unevenness 53 is formed as a guide groove for tracking. In order to obtain a narrow pitch guide groove suitable for ultra-high density recording by SPM, it is preferable to use short wavelength ultraviolet light or X-rays as the coherent light for exposure. Further, if a conical lens is used in this interference optical system, the grating-shaped unevenness 53 can be formed concentrically. By forming this on a disk-shaped recording medium, a recording disk having narrow pitch guide grooves suitable for high density recording can be manufactured by a simple process.

In FIG. 10, the organic thin film 52 itself on which the grating-like unevenness 53 is formed is a recording layer, and this recording layer is heated by means such as light irradiation through a probe to form unevenness on the surface of the recording layer. By generating the data, high-density write-once recording / reproducing can be performed. still,
The light irradiation for heating can be performed through a transparent body such as a zinc oxide needle crystal and the like. The heating of the recording dots can also be performed by simply irradiating the vicinity of the tip with light from outside the probe to cause the probe to absorb and radiate heat.

Although FIG. 10 shows the case where the organic thin film 52 itself is the recording layer, the structure is not necessarily limited to this structure. For example, as shown in FIG. Organic thin film 5 with 53 formed
2, a recording layer 54 may be further formed. As shown in FIG. 12, the recording layer 54 is formed on the substrate 51, and the photosensitive organic thin film 52 is further formed on the recording layer 54. Alternatively, a part thereof may be completely removed, and the grating-like unevenness 53 may be formed so that a part of the recording layer 54 is exposed on the surface.

If a material consisting of a conductor or a semiconductor thin film is used as the recording layer, heating or voltage is applied to the recording medium by means such as light irradiation through a probe to change physical properties such as phase change in the recording medium. By generating the data, high density erasable recording / reproducing can be performed.

[0042]

As described above, according to the recording / reproducing apparatus of the present invention, the probe is twisted about the axis substantially parallel to the direction of the recorded information sequence depending on the unevenness of the surface of the recording medium. Occur. Since the twisting direction differs depending on the inclination direction of the unevenness of the surface of the recording medium, the twisting directions are opposite to each other depending on the inclination direction of both side surfaces of the V-shaped guide groove provided on the surface of the recording medium. Therefore, detecting this twist,
Tracking control of the probe can be performed by moving the probe in the direction orthogonal to the recorded information sequence based on this detection signal.

Further, in the above structure, a part of the holding body is a flexible elastic body which is bent by a force received by the probe from the recording surface, and the probe is connected to the probe by detecting the bending or distortion of the holding body. Detecting means for detecting an attractive force or repulsive force acting between the recording surface, moving means for moving the probe in a direction perpendicular to the recording surface, and the probe for the recording surface based on a force detection signal. According to a preferable configuration in which the control means for controlling the force of the probe by moving the probe in the vertical direction is provided, this is equivalent to focusing control in optical recording, and for example, the probe can be applied to surface wobbling of a rotating recording disk. Can be followed. And since the force control of the probe in this case is usually performed in the repulsive force region,
Although the probe comes into contact with the surface of the recording medium, as can be seen from the fact that the atomic arrangement can be observed with an atomic force microscope without damaging the surface, the probe and the surface of the recording medium by this contact Even if damage or wear occurs, it is extremely small. Further, since the probe is held by the holder having a small spring constant, even if the probe collides with the minute protrusion on the surface, the probe and the surface of the recording medium are not excessively applied to each other. . Further, in this case, further, a detecting means for detecting the twist of the probe and a detecting means for detecting the force received by the probe from the recording surface are irradiated with a light beam on the light reflecting surface provided on the holder of the probe. However, according to a preferable configuration in which the intensity of the reflected light is detected by the four-division photodetector and the twist of the probe and the force received from the recording surface are calculated by these signals, tracking control of the probe is performed. An error signal for force control can be simultaneously obtained with a simple configuration.

In the above structure, the detecting means for detecting the twist of the probe or the detecting means for detecting the force received by the probe from the recording surface detects the resistance change of the semiconductor strain resistance element provided on the holder. According to the preferable configuration, the error signal for tracking control and force control of the probe can be obtained with a compact configuration.

Further, in the above structure, the detecting means for detecting the twist of the probe or the detecting means for detecting the force received by the probe from the recording surface is provided on the electrode provided on the holding body so as to face the electrode. According to the preferable configuration in which the capacitance between the electrodes is detected, the error signal for the probe tracking control and the force control can be obtained with a compact configuration.

Further, in the above structure, according to the preferable structure in which the guide groove for tracking is provided on the recording surface of the recording medium, a stable tracking error signal can be obtained. Also, in this case, the guide groove for tracking is
According to a preferable configuration in which the surface of the photosensitive organic thin film provided on the recording surface of the recording medium is provided with grating-like unevenness by irradiating the two-beam interference light of coherent light, A narrow pitch guide groove suitable for high density recording can be formed by a simple process. Further, according to a preferable configuration in which the grating-shaped concavities and convexities are formed concentrically, this recording medium can be applied to a rotary disk type recording / reproducing apparatus.

Further, in the above-mentioned constitution, according to a preferable constitution in which the probe is made of needle crystals of zinc oxide, silicon carbide or zinc selenide, these needle crystals have a sharp tip and extend in the crystal axis direction. Since it has a high aspect ratio, it is possible to perform tracking control capable of stably tracing a narrow pitch guide groove.

Further, in the above constitution, according to a preferable constitution, in which the recording medium is an organic thin film, and the recording medium is heated by means such as light irradiation through a probe to cause unevenness in the recording medium, It is possible to perform write-once recording / reproduction of density. Further, in the above structure, the recording medium is a thin film of a conductor or a semiconductor, and a physical property is changed in the recording medium by heating or applying a voltage to the recording medium by means such as light irradiation through a probe. According to a preferable configuration, high density erasable recording / reproducing can be performed.

As described above, according to the recording / reproducing apparatus of the present invention, it is possible to provide the recording / reproducing apparatus which breaks the limit of the recording density of the conventional optical system and enables the super-high density mass information recording. , Of great industrial value.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a recording / reproducing apparatus according to the present invention.

FIG. 2 is a plan view showing an embodiment of a holder for a probe.

FIG. 3 is a side view of FIG.

FIG. 4 is a view on arrow A in FIG.

FIG. 5 is a layout view of a four-division photodetector according to an embodiment of the present invention.

FIG. 6 is a block diagram of a calculation circuit for a tracking error signal and a force error signal.

FIG. 7 is a plan view showing another embodiment of a holder for a probe.

8 is a cross-sectional view taken along the line I-I of FIG. 7.

9 is a sectional view taken along line II-II of FIG. 7.

FIG. 10 is a cross-sectional view showing an example of a recording medium.

FIG. 11 is a sectional view showing another embodiment of the recording medium.

FIG. 12 is a sectional view showing still another embodiment of the recording medium.

[Explanation of symbols]

 1 recording medium disc 1a recording surface 2 rotation direction of recording medium disc 3 probe holder 4 recording medium disc radial direction 5 linear slide 6 probe 7 recording information row direction 8 substantially parallel to recording information row direction 7 Axis 9 Light-reflecting surface 10 Laser diode 11 4-division photodetector 12 3-axis piezoelectric actuator 13 Normal direction of recording surface 14 Box 21, 41, 51 Substrate 22, 42 Cantilever 23 Constriction 24 Guide groove 31, 32, 33, 34 Light receiving surface 35, 36 Error signal 43 Frame portion 44 Twisting and deforming portion 52 Photosensitive organic thin film 53 Grating-like unevenness 54 Recording layer

Continued Front Page (72) Inventor Takao Nita 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (13)

[Claims] 1. Positioning a probe held by a holder,
A recording / reproducing apparatus for recording or reproducing information on a recording medium by bringing a probe relatively close to or in contact with the recording surface of the recording medium, wherein the holding body is at least substantially parallel to the direction of the recorded information sequence. Detecting means that is configured by a flexible elastic body that can be twisted around an axis and that detects twist of the probe around the axis, and moving means that moves the probe in a direction orthogonal to the direction of the recorded information sequence. And a control means for performing tracking control of the probe by moving the probe in a direction orthogonal to the direction of the recorded information sequence based on the twist detection signal. 2. A part of the holding body is a flexible elastic body that is bent by a force that the probe receives from the recording surface, and the bending of the holding body is detected to detect the bending of the holding body and the recording surface. A detection unit that detects an attractive force or a repulsive force that acts in between, a moving unit that moves the probe in a direction perpendicular to the recording surface,
The recording / reproducing apparatus according to claim 1, further comprising: a control unit that controls the force of the probe by moving the probe in a direction perpendicular to the recording surface based on a force detection signal. 3. A detection means for detecting the twist of the probe, and a detection means for detecting the force received by the probe from the recording surface.
The light reflecting surface provided on the holder of the probe is irradiated with a light beam, and the intensity of the reflected light is detected by a four-division photodetector,
The recording / reproducing apparatus according to claim 2, wherein the twist of the probe and the force received from the recording surface are calculated based on these signals. 4. The recording / reproducing apparatus according to claim 1, wherein the detecting means for detecting the twist of the probe is based on detecting the resistance change of the semiconductor strain resistance element provided on the holder. 5. The detection means for detecting the twist of the probe or the detection means for detecting the force that the probe receives from the recording surface is obtained by detecting the resistance change of the semiconductor strain resistance element provided on the holder. The recording / reproducing apparatus according to claim 2. 6. The method according to claim 1, wherein the detecting means for detecting the twist of the probe detects the capacitance between the electrode provided on the holder and the electrode provided opposite to the electrode. Recording and reproducing device. 7. A detecting means for detecting a twist of the probe or a detecting means for detecting a force received by the probe from a recording surface is provided between an electrode provided on a holder and an electrode provided opposite to the electrode. The recording / reproducing apparatus according to claim 2, which is based on detecting the capacity of the. 8. The recording / reproducing apparatus according to claim 1, wherein a guide groove for tracking is provided on the recording surface of the recording medium. 9. The tracking guide groove is provided with a grating-like unevenness by irradiating the surface of a photosensitive organic thin film provided on the recording surface of a recording medium with two-beam interference light of coherent light. The recording / reproducing apparatus according to claim 8. 10. The recording / reproducing apparatus according to claim 9, wherein the grating-shaped unevenness is formed in a concentric shape. 11. The recording / reproducing apparatus according to claim 1, wherein the probe is made of a needle crystal of zinc oxide, silicon carbide or zinc selenide. 12. The recording / reproducing apparatus according to claim 9, wherein the recording medium is an organic thin film, and the recording medium is made uneven by heating the recording medium by means such as light irradiation through a probe. 13. The recording medium is a thin film of a conductor or a semiconductor, and a physical property is changed in the recording medium by heating or applying a voltage to the recording medium by means such as light irradiation through a probe. 1. The recording / reproducing apparatus according to 1.