JPH07174706A - Impurity collecting apparatus - Google Patents

Abstract

PURPOSE:To simply the constitution of the entire apparatus, to reduce the amount of impurity remaining on the surface of inner wall and to make it possible to perform accurate monitoring, by providing a cooler for cooling the inside of the container in a collecting container. CONSTITUTION:A cooler 3 is provided at the lower part of a collecting container 2. The cooler 3 cools the wall surface of the container 2, cools collected liquid A in the container 2, decreases the pressure of saturated vapor and prevents vaporization. Even if the collected liquid A is vaporized, the collected liquid A is cooled and liquefied by cooling the entire surface of the inner wall of the container 2 with the cooler 3. The collected liquid A flows down along the inner surface of the container 2 and refluxed to the collected liquid A retained at the lower part, that is, the container 2 can make the amount of the collected liquid A in the apparatus constant with the cooler 3. Thus, the constitution of the entire apparatus is not complicated as in an apparatus, wherein an exclusive gas cooler is separately provided. The amount of the impurity remaining on the inner wall surface is reduced, and the accurate monitoring can be performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an impurity trapping device capable of accurately monitoring clean air in a clean room used for semiconductor manufacturing.

[0002]

2. Description of the Related Art Conventionally, as this type of impurity trapping device, one shown in Japanese Patent Application No. 3-238382 is known. This impurity trapping device has a trapping liquid in which the trapping liquid is stored, and the gas to be measured supplied through the gas to be measured suction pipe is blown into the trapping liquid, and the trapping liquid in the trapping container. A connecting pipe that discharges the measured gas that has passed through the inside, and a measured gas that is provided at the end of the connecting pipe and that is cooled through the connecting pipe to liquefy the collected liquid contained in the measured gas. It has a gas cooler for controlling and a reflux pipe for returning the collected liquid in the gas to be measured liquefied in the gas cooling container to the collecting container.

Further, in the above-mentioned impurity collecting apparatus, the collection liquid is bubbled by the measurement gas supplied through the measurement gas suction pipe in the collection container, and the collection liquid is contained in the measurement gas. The impurities that had dissolved therein, while the gas to be measured which has passed through the collection liquid in the collection container is introduced into the gas cooling container through the connecting pipe and then cooled in the gas cooling container, whereby the target gas is cooled. The collection liquid contained in the measurement gas in a vaporized state is liquefied, and the collection liquid is refluxed into the collection container through the reflux pipe together with the impurities dissolved in the collection liquid. The collected liquid in the collection container is supplied to the impurity analyzer after collecting the impurities, and the impurity concentration in the collected liquid is measured by the impurity analyzer.

[0004]

By the way, in the impurity collecting apparatus configured as described above, the collecting container and the gas cooler which are individually provided are connected to each other by the connecting pipe and the reflux pipe. Therefore, when the process of blowing the measured gas into the collected liquid is completed, the collected liquid contained in the measured gas is liquefied on the inner wall surfaces of the gas cooler, the connecting pipe, and the reflux pipe. Therefore, the impurities that should originally be collected in the collected liquid remain in the state of adhering to the inner wall surfaces of the gas cooler, the connecting pipe, and the reflux pipe, and the accurate impurity concentration There was a problem that measurement could not be performed. Further, in the above-mentioned impurity collecting apparatus, since the collecting container and the gas cooler are connected to each other by the connecting pipe and the reflux pipe, there is a problem that the entire structure becomes complicated.

The present invention has been made in view of the above circumstances. The gas cooler which has been conventionally required is eliminated to simplify the entire structure and reduce the amount of impurities remaining on the inner wall surface. The object of the present invention is to provide an impurity collecting apparatus that can perform accurate monitoring.

[0006]

In order to solve the above problems, in the first aspect of the invention, the gas to be measured supplied through the gas to be measured suction pipe is blown into the collected liquid in the collection container to collect the gas. In an impurity collecting device adapted to collect impurities contained in a gas to be measured in a liquid collecting device, the collecting container is provided with a cooler for cooling the inside of the collecting container. .

In the second aspect of the invention, the gas to be measured supplied through the gas to be measured suction pipe is blown into the collected liquid in the collection container, and the impurities contained in the gas to be measured are injected into the collected liquid. In an impurity collecting device configured to collect, a first space part for storing a collecting liquid,
Above the space portion, the second space portion having a diameter larger than that of the first space portion, and a diaphragm provided between the first space portion and the second space portion. In addition, a cooling device for cooling the inside of the collection container is provided integrally with the collection container.

[0008]

According to the first aspect of the invention, since the collected liquid itself is cooled by the cooler, the amount of evaporation of the collected liquid caused by bubbling can be reduced.

According to the second aspect of the invention, since the cooler for cooling the inside of the collection container is integrally provided in the collection container for storing the collection liquid, like the first invention.
When the amount of evaporation of the collected liquid caused by bubbling can be reduced and the gas to be measured is blown into the first space,
The pressure rises in the first space portion, and thus the evaporation amount of the collected liquid can be reduced.

By means of a throttle provided in the upper part of the first space, the droplets of the collected liquid scattered by the gas to be measured bubbling the collected liquid in the first space,
It is prevented that the second space portion is reached. Since a large-diameter second space portion having a large contact area with the gas to be measured is provided above the first space portion, in the second space portion, the gas to be measured is vaporized. The collected liquid contained can be efficiently liquefied. Also, this second
Since the flow velocity of the gas to be measured can be made slower in the space portion than in the first space portion, the contact time between the gas to be measured and the inner wall surface of the second space portion must be lengthened. Also in this respect, the collected liquid contained in the gas to be measured in a vaporized state can be efficiently liquefied.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIG. First, the basic configuration of the first embodiment will be described with reference to FIG. In FIG. 1, reference numeral 1 denotes a measured gas suction pipe into which clean air or a semiconductor gas in a semiconductor clean room (not shown) is sucked as a measured gas. And the tip thereof extends to the vicinity of the bottom of the collection container 2 so that the collection container 2 can be placed in the collection liquid A such as pure water stored in the collection container 2. ing. When the gas to be measured is supplied through the gas to be measured suction pipe 1 by such arrangement of the gas to be measured suction pipe 1,
The trapping liquid A is bubbled by the gas to be measured, and the impurities in the gas to be measured are dissolved in the trapping liquid A.

A cooler 3 is provided below the collection container 2. The cooler 3 cools the wall surface of the collection container 2 to cool the collection liquid A in the collection container 2, and thereby lowers the saturated vapor pressure of the collection liquid A. Thus, the collection liquid A is prevented from vaporizing, and even if the collection liquid A is vaporized, since the entire wall surface of the collection container 2 is cooled by the cooler 3, The vaporized collected liquid A is cooled on the inner wall surface and liquefied. Then, the collected liquid A liquefied in the collection container 2 flows down on the inner wall surface of the collection container 2 and is thereby returned to the collected liquid A stored in the lower portion. That is, in the collection container 2, the amount of the collection liquid A stored in the collection container 2 can be constantly kept constant by the cooler 3. As the cooler 3, for example, a Peltier element or heat pump is used.

A pipe 5 having a solenoid valve 4 in the middle is provided at the bottom of the collection container 2, and an impurity analyzer 6 is provided at the end of the pipe 5. The impurity analyzer 6 is for measuring the amount of impurities contained in the collection liquid A in the collection container 2, and is, for example, an absorptiometer for measuring the degree of turbidity of the collection liquid A, a collector. A carbon amount measuring device for measuring the amount of carbon contained in the liquid A, a metal component analyzer for analyzing metal components or metal ion components contained in the collecting liquid A, and the like are used.

A pipe 7 for introducing the collected liquid A into the collection container 2 is provided above the collection container 2, and a collected liquid flow meter is provided in the middle of the pipe 7. 8 and a solenoid valve 9 are sequentially provided. The collected liquid flow meter 8
Is to measure the flow rate of the collection liquid A put in the collection container 2 and thereby detect the amount of the collection liquid A supplied into the collection container 2.

A pipe 10 for discharging the gas to be measured is provided at the upper end of the collection container 2, and a gas flow meter 11 to be measured for measuring the flow rate of the gas to be measured is provided in the middle of the pipe 10. And the gas to be measured as the gas to be measured suction pipe 1 described above.
And a blower 12 for sucking into the apparatus through. In addition, the reference numeral 13 in the drawing is a drive signal for controlling the solenoid valve 4, the impurity analyzer 6, the solenoid valve 9 and the blower 12 based on the detection signals of the collected liquid flow meter 8 and the measured gas flow meter 11. Is a control device that outputs
Signal lines 14 through which signals are transmitted between the collected liquid flow meter 8, the measured gas flow meter 11, the solenoid valve 4, the solenoid valve 9, the impurity analyzer 6, the blower 12, and the control device 13. 19
Are provided respectively.

Next, the operation performed by the impurity trap will be described in the order of steps. The following operation is performed by a signal output from the control device 13. (1) The control device 13 outputs a drive signal for operating the blower 12 through the signal line 19 so that clean air or semiconductor gas in a semiconductor clean room (not shown) serves as a gas to be measured and is a gas suction pipe to be measured. 1 is sucked into the collection container 2. As a result, the collected liquid A in the collection container 2 is bubbled by the gas to be measured, and the impurities in the gas to be measured are dissolved in the collected liquid A. Also,
In this collection container 2, vaporization of the collected liquid A is prevented by the cooler 3 and even if vaporized, the cooler 3
Is liquefied by and is returned to the collected liquid A stored in the lower part.

(2) In the measured gas flow meter 11, the flow rate of the measured gas passing through the pipe 10 is detected,
Moreover, this detection signal is supplied to the control device 13 through the signal line 15. The controller 13 integrates the amount of the measured gas supplied through the pipe 10, and when the integrated value reaches a preset value, the blower 12 is fed through the signal line 19.
The supply of the drive signal to is stopped.

(3) After the blower 12 is stopped, a control signal for opening the solenoid valve 4 is output to the solenoid valve 4 through the signal line 16, whereby all the collected liquid A in the collection container 2 is output. Is supplied to the impurity analyzer 6 through the pipe 5. At the same time, the control device 13 outputs an analysis signal for causing the impurity analyzer 6 to detect the amount of impurities in the collected liquid A through the signal line 18. When the impurity analysis is completed by the impurity analyzer 6, the controller 1
3, a signal for closing the solenoid valve 4 is output through the signal line 16.

(4) A control signal for opening the solenoid valve 9 from the control device 13 is supplied to the solenoid valve 9 through the signal line 17, whereby the collected liquid is put into the collection container 2 through the pipe 7. . In addition, the flow rate of the collected liquid passing through the pipe 7 is detected by the collected liquid flow meter 8, and the detection signal is supplied to the control device 13 through the signal line 14. In this control device 13, the amount of the collected liquid supplied through the pipe 7 is integrated, and when the integrated value reaches a preset value, a signal for closing the solenoid valve 9 is output through the signal line 17. Then, the supply of the collection liquid to the collection container 2 is stopped. That is, based on the detection signal of the collected liquid flow meter 8, a fixed amount of collected liquid is supplied into the collection container 2 through the pipe 7. (5) A drive signal for operating the blower 12 is output from the control device 13 through the signal line 19, and clean air or semiconductor gas in a semiconductor clean room (not shown) is captured as a measured gas through the measured gas suction pipe 1. It is sucked into the collection container 2, and the operations (1) to (4) are repeated again.

Further, according to the impurity trapping device constructed as described above, the cooler 3 for cooling the inside of the collection container 2 for storing the collected liquid A is integrally provided, and the cooler 3 is used. Since the amount of evaporation of the collected liquid A in the collection container 2 is reduced, the entire structure of the device does not become complicated unlike the conventional impurity collection device in which a dedicated gas cooler is separately provided, Compared with the conventional impurity collector, it becomes possible to reduce the amount of impurities remaining on the inner wall surface and perform accurate monitoring. In the above embodiment, the blower 12 is controlled to introduce a certain amount of the gas to be measured into the collection container 2, but the present invention is not limited to this, and a leak occurs between the flow meter 11 and the blower 12. A valve 20 may be provided to control the blower 12 and the leak 20 to introduce a fixed amount of the gas to be measured into the collection container 2.

Next, a second embodiment of the present invention will be described with reference to FIG. The following examples (second to fourth examples)
In the above, the same reference numerals are given to the portions having the same configurations as those in the first embodiment, and the duplicated description will be omitted. The impurity collecting device of the present embodiment differs from that of the first embodiment in that reference numeral 25
In the configuration of the collection container shown in. That is, the collection container 25 has a vertically long first space portion 26 in which the collected liquid A is stored and a position above the first space portion 26, which is higher than the first space portion 26. The second space portion 27 is formed to have a large diameter, and the diaphragm 28 is formed between the first space portion 26 and the second space portion 27. A pipe 5 for discharging the collected liquid A is connected to the bottom of the space 26, and a pipe 7 for supplying a new collected liquid A is connected to the second space 27. There is. In addition, the collection container 25 is
The first space 26, the diaphragm 28, the Peltier element for cooling the inclined surface 27A of the second space 27, the cooler 29 including a heat pump, etc. are integrally provided.

The second space 27 of the collection container 25
Has an inclined surface portion 27A whose inner wall surface on the lower side inclines toward the throttle 28, and the inclined surface 27A causes the collected liquid A condensed in the space portion 27 to flow down toward the throttle 28. . The tip of the measured gas suction pipe 1 that supplies the measured gas to the collection container 25 reaches near the bottom of the first space 26.

In the collection container 25 constructed as described above, as in the first embodiment, a cooler 29 for cooling the collection container 25 for storing the collection liquid A is integrally provided. Since the cooler 29 prevents vaporization of the collected liquid A, the entire structure of the apparatus does not become complicated unlike the conventional impurity trapping apparatus provided with a gas cooler separately, and the conventional impurity trapping is not performed. Compared with the device, the amount of impurities remaining on the inner wall surface can be reduced and accurate monitoring can be performed, and the following effects (1) to (3) are also exhibited.

(1) Since the inner diameter of the first space portion 26 in which the collected liquid A is stored is made small, when the fixed amount of the collected liquid A is stored, the space portion has a large diameter. In comparison, the water surface of the collected liquid A stored in the space 26 can be set at a high position, and as a result, the ejection port of the measured gas suction pipe 1 located at the bottom of the first space 26. And the distance between the collected liquid A and the surface of the water becomes long, and the collected liquid A becomes
Can be bubbled violently, and the impurities in the gas to be measured can be collected with high efficiency.

(2) Since the air pressure in the first space 26 is increased by the throttle 28 provided in the upper part of the first space 26, the evaporation amount of the collected liquid A can be reduced, This makes it possible to suppress the decrease of the collected liquid A. (3) Since the large-diameter second space portion 27 having a large contact area with the gas to be measured is provided above the first space portion 26, the measured space is measured in the second space portion 27. The collected liquid A contained in the gas in a vaporized state can be efficiently liquefied due to the cooling effect of the gas itself due to the adiabatic expansion, and the amount of the collected liquid A can be constantly kept constant. Also, this second
Since the flow velocity of the gas to be measured can be slowed in the space portion 27 of the first space portion 26 compared to the first space portion 26, the contact time between the gas to be measured and the inner wall surface of the second space portion 27. Can be made longer, and the vapor of the collected liquid condensed as water droplets having a relatively small diameter can be dropped in this second space portion 27, and in this respect also, it is included in the gas to be measured. The effect that the collected liquid A can be efficiently liquefied is obtained.

In the second embodiment, the cooler 29 allows the first space portion 26, the throttle 28, and the second space portion 27.
Although the inclined surface portion 27A is cooled, the invention is not limited to this, and the first space portion 26, the diaphragm 28, and the second space portion 2 are not limited thereto.
The whole 7 may be cooled.

Next, a third embodiment of the present invention will be described with reference to FIG. An impurity collecting apparatus shown in the third embodiment;
The difference from the impurity trapping device shown in the first embodiment lies in the trapping container 30 and the cooler 31. The collection container 30 has a cross-sectional shape of a perfect circle, and a lower container 32 in which the collection liquid A is stored, and a sliding portion 3 on the lower container 32.
3 is composed of an upper container 34 that can be detached via the upper container 34. In the upper container 34, the measured gas suction pipe 1 into which the measured gas is sucked, and the target gas that has passed the collected liquid A are collected. The pipe 10 through which the measurement gas is discharged is connected together.
The cooler 31 is removably provided in the lower container 32 of the collection container 30 via a sliding portion 35, and is provided with a water absorption pipe 36 and a water absorption pipe 36 for supplying cooling water to the side part thereof. The discharge pipes 37 for discharging the generated cooling water are connected to each other. In addition, these collection containers 3
Although both 0 and the cooler 31 are made of glass, they are not limited to this, and may be made of fused quartz, PEEK resin, or the like.

In the impurity collecting apparatus having the above-mentioned structure, the collecting liquid A stored in the collecting container 30 in a fixed amount is
The gas to be measured supplied through the gas to be measured 1 is bubbled to collect impurities contained in the gas to be measured in the collected liquid A. At this time,
In this collection container 30, the cooler 31 attached to the outer peripheral portion prevents the collected liquid A from vaporizing, and even when the collected liquid A is vaporized, it is liquefied by the cooler 31 and the collected liquid A is liquefied. Is returned to. Further, after performing such an impurity collecting process for a certain period of time, the sliding portions 33 and 35 are removed, the lower container 32 of the collecting container 30 is removed, and then the collected liquid A in the lower container 32 is removed. Are transported to the impurity analyzer 6, and the impurities in the collected liquid A are analyzed by the impurity analyzer 6. In addition, after performing such an impurity analysis process, a certain amount of new pure water is stored in the lower container 32, and then, as shown in FIG. , The cooler 31 is assembled, and in this state, the above-mentioned impurity collecting process is performed again.

Next, a fourth embodiment of the present invention will be described with reference to FIG. An impurity collector shown in the fourth embodiment;
The difference from the impurity trapping device shown in the third embodiment lies in the trapping container 40 and the cooler 41. Explaining these components, the collection container 40 has substantially the same configuration as the collection container 30 shown in the third embodiment except that the sliding portion 35 is omitted.

The cooler 41 includes a metal outer cylinder 42 and an inner cylinder 43.
The lower container 32 of the collection container 40 is housed in the inner cylinder 43, and the lower container 32 is fixed by the detaching means 44 in a further housed state. It is like this. In addition, the inner cylinder 4 of this cooler 41
A water suction pipe 45 for supplying cooling water and a discharge pipe 46 for discharging the cooling water supplied by the water suction pipe 45 are connected to the side portions of the outer cylinder 42.
A gap 47 between the inner cylinder 43 and the inner cylinder 43 is filled with a heat insulating material 48 that prevents dew condensation on the outer surface of the outer cylinder 42.

The attachment / detachment means 44 is a ring-shaped end member 49 fixed to the upper end of the cooler 41 so as to close the gap 47 between the outer cylinder 42 and the inner cylinder 43, and this end member 49.
O-ring 50 provided along the inner peripheral surface of the
And a ring-shaped tightening member 52 screwed onto the inner peripheral surface of the screw member 9 via a thread groove 51.
The opening 53 at the center of 2 is the lower container 32 of the collection container 40.
Is formed to have an inner diameter slightly larger than the diameter. Further, a drainage path 54 for discharging the cooling water in the inner cylinder 43 is provided in the lower part of the cooler 41.
A stopper 55 is usually attached to the.

In the impurity trapping device having the above-described structure, when the trapping container 40 is mounted in the cooler 41, first, the fastening member 52 is loosened and the fastening member 5 is released.
The lower container 32 of the collection container 40 is inserted into the second opening 53 by a predetermined length, and then the fastening member 52 is fastened to deform the O-ring 50 between the fastening member 52 and the end member 49. Accordingly, the opening 53 of the fastening member 52 and the collection container 4
The inner container 43 of the cooler 41 is sealed by eliminating the gap between the lower container 32 and the lower container 32. Then, in this state, if the cooling water is supplied and drained through the water suction pipe 45 and the discharge pipe 46,
The inner cylinder 43 of the cooler 41 is filled with cooling water, and the collection container 40 is cooled by the cooling water.

In the cooler 41, the insertion length of the lower container 32 into the inner cylinder 43 (the insertion length along the arrows (a)-(b)) is determined by the tightening of the tightening member 52 to the lower container 32. It is possible to freely adjust by setting the position, and as a result, the cooling range of the lower container 32 can be arbitrarily set, that is, the cooler 4 described above.
In 1, the lower container 32 of the collection container 40 can be arranged at a predetermined position in the inner cylinder 43 so as to obtain the optimum cooling efficiency, whereby impurities in the gas to be measured are collected in the collection liquid A. It is also possible to improve the collection efficiency and the reflux efficiency of the vaporized collection liquid A. In this embodiment, the outer cylinder 42
Although the heat insulating material 48 is provided in the gap 47 between the inner cylinder 43 and the inner cylinder 43, the present invention is not limited to this, and the outer cylinder 42 may be prevented from dew condensation by making the gap 47 a vacuum.

Next, a fifth embodiment of the present invention will be described with reference to FIG. An impurity collecting apparatus shown in the fifth embodiment;
The difference from the impurity trapping device shown in the third embodiment is the reference numeral 6
As shown by 0, it is in the gas suction pipe to be measured and its peripheral structure. The gas to be measured suction pipe 60 shown in this embodiment is integrally fixed to the upper container 34 of the collection container 30 and is provided with a chamber 61 having a constant volume in the middle thereof. A three-way solenoid valve 62 is further provided on the upstream side of the chamber 61 of the suction pipe 60. In addition,
Reference numeral 62 is not limited to a three-way solenoid valve, and may be a manual valve. The three-way solenoid valve 62 is provided with a first pipe 63 to which the gas to be measured is supplied and a second pipe communicating with the chamber 61.
The pipe 64 (these are a part of the gas suction pipe 60 to be measured) and the third pipe 66 leading to the vacuum pump 65 are connected.

In the impurity trapping device constructed as described above, the first pipe 63 and the second pipe 64 are connected by the three-way solenoid valve 62, and the trapping is performed through the gas suction pipe 60 to be measured. The gas to be measured can be introduced into the collecting container 30, but at this time, the gas to be measured is temporarily stored in the chamber 61 having a constant volume. Can be made uniform, and as a result, the measurement gas containing extremely high-concentration impurities can be prevented from being temporarily supplied to the collection container 30. Impurities are prevented from reaching the pipe 10 without being recovered, and the efficiency of collecting impurities in the collection container 30 can be improved. Further, when the introduction of the gas to be measured into the collection container 30 is completed, the three-way solenoid valve 62 is operated to connect the second pipe 64 and the third pipe 66. By the vacuum pressure of the vacuum pump 65, the collected liquid A in the collection container 30 is sucked up into the chamber 61 through the measured gas suction pipe 60.

Then, the collected liquid A is placed in the chamber 61.
When all of the collected liquid A has been sucked up, the three-way solenoid valve 62 is operated to close the conduit of the second pipe 64 leading to the chamber 61 to maintain the state where the collected liquid A is stored in the chamber 61. After that, the sliding 33 is removed, the measured gas suction pipe 60 is removed from the lower container 32 together with the upper container 34 of the collection container 30, and the three-way solenoid valve 62 is operated to depressurize the inside of the second pipe 64. By doing so, the collected liquid A in the chamber 61 can be supplied to the impurity analyzer 6, and the impurity in the collected liquid A can be analyzed by the impurity analyzer 6.

After performing such an impurity analysis process, a certain amount of new pure water is stored in the lower container 32,
After that, the measured gas suction pipe 60 is attached to the lower container 32 together with the upper container 34 through the sliding 33, and in this state, the above-mentioned impurity collecting process is performed again. Further, the present invention is not limited to this, and after performing the impurity analysis processing of the collected liquid A in the lower container 32, the lower container 32 is integrated with the upper container 34 in an empty state, and then the first container
A large amount of pure water is supplied through the pipe 63 and the second pipe 64 to fill the inside of the collection container 30 and overflow through the pipe 10, thereby cleaning the inside of the collection container 30 and further performing such cleaning. After a certain period of time, the water level of pure water in the collection container 30 may be adjusted, and then the above-described impurity collection process may be performed.

As described in detail above, according to the third to fifth impurity traps, the trapping vessels 30 and 40 for trapping the impurities in the gas to be measured are collected. It is provided integrally with coolers 31 and 41 for cooling the inside, and by this cooler 31 and 41, the collection container 3 at the time of bubbling
Since the vaporization of the collected liquid A in the 0.40 is prevented, like the first and second embodiments, the entire apparatus can be constructed like a conventional impurity collector provided with a dedicated gas cooler. The structure is not complicated, and it is possible to reduce the amount of impurities remaining on the inner wall surface and perform accurate monitoring, as compared with the conventional impurity trapping device. In addition, in the third to fifth embodiments, the operator supplies the collection liquid A in the collection containers 30 and 40 to the impurity analyzer 6, and a new collection liquid A is contained in the collection containers 30 and 40. The electromagnetic valve 4, the pipe 5, the pipe 7, the collected liquid flowmeter 8, and the electromagnetic valve 9 shown in the first and second embodiments may be omitted.

[0039]

As described above in detail, according to the first aspect of the invention, the collection container for storing the collection liquid is integrally provided with the cooler for cooling the inside of the collection container. The overall structure of the device does not become complicated unlike the conventional impurity collector that has a dedicated gas cooler separately installed, and the amount of evaporated trapped liquid generated by bubbling is reduced compared to the conventional impurity collector. Therefore, it becomes possible to accurately monitor impurities.

According to the second aspect of the invention, since the cooler for cooling the inside of the collecting container is integrally provided in the collecting container for storing the collecting liquid, like the first invention.
It is possible to reduce the evaporation amount of the collected liquid caused by bubbling, and when the gas to be measured is blown into the first space portion, the pressure in the first space portion rises, which causes the evaporation amount of the collected liquid. Can be reduced and the impurities can be accurately monitored.

The liquid droplets of the collected liquid scattered by the gas to be measured bubbling the collected liquid in the first space by the throttle provided in the upper part of the first space,
It is prevented that the second space portion is reached, which makes it possible to suppress a decrease in the collected liquid. Since a large-diameter second space portion having a large contact area with the gas to be measured is provided above the first space portion, in the second space portion, the gas to be measured is vaporized. The contained liquid can be efficiently liquefied, the amount of the collected liquid can be kept constant at all times, and the flow velocity of the gas to be measured in the second space portion is higher than that in the first space portion. The contact time between the gas to be measured and the inner wall surface of the second space portion can be lengthened because the temperature can be slowed down. In this respect as well, the collection liquid contained in the gas to be measured can be increased. The effect of efficiently liquefying can be obtained.

[Brief description of drawings]

FIG. 1 is a piping diagram showing a first embodiment of the present invention.

FIG. 2 is a piping diagram showing a second embodiment of the present invention.

FIG. 3 is a front sectional view of a collection container and a cooler showing a characteristic part of a third embodiment of the present invention.

FIG. 4 is a front sectional view of a collection container and a cooler showing a characteristic part of a fourth embodiment of the present invention.

FIG. 5 is a front sectional view of a collection container and a cooler showing a characteristic part of a fifth embodiment of the present invention.

[Explanation of symbols]

 1 Measured Gas Suction Pipe 2 Collection Container 3 Cooler 10 Piping 25 Collection Container 26 First Space Part 27 Second Space Part 28 Throttling 29 Cooler 30 Collection Container 31 Cooler 40 Collection Container 41 Cooler 44 Desorption means 60 Gas to be measured introduction pipe

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Terumi Iwata 1-3-6 Fujimi, Kawasaki-ku, Kawasaki-shi, Kanagawa Tokiko Co., Ltd. (72) In Tsutomu Koinuma 1-3-6 Fujimi, Kawasaki-ku, Kawasaki-shi, Kanagawa Issue Tokiko Co., Ltd.

Claims (2)

[Claims] 1. A measurement gas supplied through a measurement gas suction pipe is blown into the collection liquid in the collection container so that the collection liquid collects impurities contained in the measurement gas. The impurity trapping device according to claim 1, wherein the trapping container is provided with a cooler for cooling the inside of the trapping container. 2. A measurement gas supplied through a measurement gas suction pipe is blown into the collection liquid in the collection container so that the collection liquid collects impurities contained in the measurement gas. In the impurity collection device according to the above, the collection container includes a first space portion in which a collection liquid is stored,
A second space portion formed above the first space portion and having a diameter larger than that of the first space portion, and a diaphragm provided between the first space portion and the second space portion. And a cooler for cooling the inside of the collection container, which is integrated with the collection container.