JPH07174536A - Three dimensional shape-measuring apparatus - Google Patents

Abstract

PURPOSE:To read at a high velocity by shortening the time required for reading an image in a three-dimensional shape-measuring apparatus which measures a shape of an object. CONSTITUTION:In an area image sensor, when a signal setting a scanning start position is input, the content is transferred to a vertical scanning circuit 61 thereby to set the scanning start position. An image of a required line is read out through horizontal scanning. Thereafter, a one-shift signal for vertical scanning is input to shift the scanning position by one line, and an image of a line is read by horizontal scanning. A desired band-shaped image is read out by repeating the process.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional shape measuring apparatus for measuring a three-dimensional shape of a target object and displaying the measurement result on a screen.

[0002]

2. Description of the Related Art Three-dimensional information is used in various industrial fields such as measurement of natural objects and living bodies, and visual recognition of robots. If the shape of a stationary object is measured, it does not matter if the measurement takes several seconds. However, in a device that performs three-dimensional measurement of a moving body such as visual recognition of a mobile robot, a device that measures a three-dimensional shape with high speed and accuracy is required. Conventionally, among the means for recognizing the three-dimensional shape of an object, the light cutting method is often used as the most practical means. In the light cutting method, a target object is irradiated with slit-shaped laser light S as shown in FIG. 1, and a slit image of the target object 1 corresponding to the slit light S is captured on the imaging surface of the camera. Then, the spatial coordinate of the point p on the target object corresponding to a certain point p ′ on the slit is the plane S formed by the slit light.
Is obtained as coordinates of an intersection of a straight line L connecting the point p ′ and the center point O of the lens of the image pickup apparatus. Thus, the spatial coordinates of the point cloud on the object surface corresponding to each point on the slit image are obtained from one image, and the horizontal movement of the slit light and the image input are repeated to obtain the three-dimensional image of the entire target object. Information can be acquired.

A CCD area sensor is often used as an image pickup device. With this configuration, all pixels of the CCD are read for scanning the slit light of one line to read an image, and the entire surface of the target object is scanned. Takes a time several times as long as the time required for scanning one line. But,
Since a high-speed input device is required to perform three-dimensional measurement of a moving body, various devices with high-speed input have been proposed.

The device proposed in Japanese Examined Patent Publication No. 56-501704 divides a photoelectric conversion element into blocks, reads the blocks in parallel, and sequentially reads each block in series, thereby shortening the time required for reading the entire range and performing processing. We are trying to speed up. Further, in Japanese Patent Laid-Open No. 64-46605,
PSD (Position Sensitive Device) as an image sensor
A device using an array has been proposed. In this device, P
Since the output signal representing the incident position information of the slit image from the SD sensor is output in real time, high-speed measurement is possible without requiring a waiting time for one frame. Another proposed device is a device that obtains an entire image by illuminating four times with different patterns using 15 light sources and synthesizing the obtained data for four times. With this device, the control angle of the rotating mirror can be made small, so that the entire image can be obtained at high speed.

[0005]

However, in the above-mentioned first conventional example, although the blocks are read in parallel, the blocks are sequentially read in series, and the areas to which slit light is not incident are read. So it takes time for the number of blocks. The second prior art example can detect the position of the incident slit light because it uses a PSD array, but this does not pose a problem in the situation of only the projection slit light that is not affected by external light. However, when the influence of external light enters, the photocurrent due to external light becomes a noise component, so the detected position is a position different from the case of only slit light. Further, since the PSD detects the position, it cannot use the difference from the case where only the external light is used, and there is a problem that the accurate measurement cannot be performed. The third conventional example is 15
Since individual light sources are used, control and processing of these light sources are required, and there is a problem that the configuration becomes complicated and the device becomes large.

An object of the present invention is to solve these problems, to process a three-dimensional shape of a target object at high speed, and to provide a three-dimensional shape measuring apparatus which is effective for a moving body.

[0007]

In order to solve the above problems, the present invention relates to a three-dimensional shape measuring apparatus for projecting slit light onto a target object and capturing an image with a two-dimensional image sensor to measure the shape of the target object. The two-dimensional image pickup device is characterized in that a band-shaped image of a region where slit light is supposed to enter is selectively read out.

[0008]

In the above structure, the slit light is projected onto the target object, and the entire area of the two-dimensional image pickup device is not read at the time of image reading, but the slit light is supposed to enter the two-dimensional image pickup device. Only the strip-shaped image of is selected and read.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. First, FIG. 2 is a schematic block diagram of the entire apparatus according to the present invention. The present apparatus is roughly divided into a projection optical system 2 for irradiating the target object 1 with a laser beam output from a semiconductor laser 5 as a slit-shaped light beam, and a light-receiving optics for guiding the emitted laser beam to the image sensors 24, 12. There is a system 3, and these light projecting optical system and light receiving optical system are arranged on the same rotary mount 4. Other than the optical system, it is composed of a signal processing system that processes a signal output from a sensor to generate a pitch shift image and a color image, and a recording device that records the generated image. Solid arrows in FIG. 2 indicate the flow of electrical signals such as image signals and control signals, and broken arrows indicate the flow of light to be projected. A detailed description of these optical systems will be given later.

Explaining the outline of the signal processing system, the image obtained by the distance image sensor 12 is subtracted from the slit light projection image 18a and the slit light non-projection image 18b, and the image is obtained. Incident light center of gravity position calculation process 1
9, pitch deviation information calculation processing 20, and pitch deviation image generation processing 21 are performed. The obtained pitch shift image is NTS
It is used by being output to the output terminal 50 by the C conversion processing 27, or transferred to the SCSI terminal 49 or the built-in recording device 22 as it is in digital form. Further, the image obtained by the color image sensor 24 is processed by the analog processing 25.
The color image generation processing 26 is performed via the. The obtained color image is subjected to NTSC conversion processing 28 and output terminal 51.
It is used by being output to the SCSI terminal 49 or the recording device 22 as it is in digital form.

Next, FIG. 3 is a perspective view showing a schematic structure of the entire apparatus. In the present embodiment, 2 in the length direction of the slit light.
A 256 × 324 distance image generation system having 56 points and distance information of 324 points in the scanning direction of the slit will be described as an example. The LCD monitor 41 displays a color image picked up by the color image sensor 24, three-dimensional data recorded in a recording device inside or outside the device, or various information and a selection menu. A cursor key 42, a select key 43, and a cancel key 44 are operation members for selecting an image and setting various modes from a menu.
Reference numeral 45 is a zoom button for changing the focal length of the light projecting / receiving optical system, and 46 is an MF button for manual focusing. Reference numeral 47 is a shutter button that captures a distance image by turning on in a shutter mode described later. As a recording device for the captured image, a magneto-optical disc (hereinafter referred to as MO) or a mini disc (hereinafter referred to as MD) incorporated in the present device.
Drive device 48 such as). Terminal 4
9 is a terminal for digitally inputting / outputting signals such as images, SC
SI etc. The pitch shift image output terminal 50 and the color image output terminal 51 are terminals for outputting an image as an analog signal, for example, a video signal such as NTSC.

The projection optical system scans a slit light which is long in the horizontal direction in the vertical direction, and the light from the semiconductor laser 5 rotates a polygon mirror 7, a condenser lens 10,
It is projected onto a target object via the projection zoom lens 11 and the like. The light receiving optical system takes an image with the distance image sensor 12 and the color image sensor 24, which are arranged on the light receiving and imaging surface through the light receiving zoom lens 14, the beam splitter 15, and the like. A detailed description of these optical system and imaging system will be given later.

The slit light from the light projecting system is moved downward by one pixel pitch of the distance image sensor 12 by the polygon mirror 7 which is steadily rotating while the distance image sensor 12 accumulates one image. To be scanned. The range image sensor scans and outputs the stored image information and also stores the next image. The distance information of 256 points in the length direction of the slit light can be calculated from the image obtained by this one-time output. Further, by repeating mirror scanning and image capturing 324 times, a distance image of 256 × 324 points is generated.

Since the distance range to the target object measured for one slit light is limited to the closest measurement distance and the farthest measurement distance, the slit light is reflected by the object and enters the image pickup device. The range is limited within a range. This is because the light projecting system and the light receiving system are installed apart by the baseline length (length 1). Figure 17 shows this.
In addition, the direction perpendicular to the image pickup device surface for the distance image is the Z axis. The position of the broken line indicated by d is the measurement reference plane, and the distance from the element surface is d.

Therefore, first, in the measuring device, the barycentric position of the received laser beam in 256 lines from the input image is output as the object distance from the autofocus unit and the azimuth of the slit light projected, that is, the scanning start. Calculation is performed as the amount of deviation from the measurement reference plane, which is determined based on the time from. The calculation of the pitch shift amount will be described with reference to FIG. 4. First, FIG. 4 shows the light amount distribution generated by the slit light projected onto the target object surface. The squares shown in the lower part of the figure show the areas in which the respective elements of the range image sensor gaze, and the cells are numbered 1, 2, 3, 4, ... From the front. Since the slit light having an extremely narrow slit width is scanned by the rotation of the polygon mirror 7 by one pitch of the range image sensor during one image storage, the light amount distribution at the time of inputting one image corresponds to one pitch of the range image sensor. The light intensity distribution is rectangular with a width of.

In order to calculate the distance information in the Z-axis direction for each pixel of the distance image sensor, it is desirable to have such a rectangular light amount distribution of one pitch width. When the width of the light amount distribution is 1 pitch or more, the measured distance information is obtained as the weighted average of the received light intensity over the adjacent region, and accurate distance information cannot be obtained.

Under such a light amount distribution, assuming that there is a stepped object surface shown by halftone dots in FIG. 4, slit light is projected from a direction perpendicular to the object surface. The slit light amount distribution is shown by a slender rectangular parallelepiped, and the shaded area represents the projection slit image. Further, assuming that the positional relationship is such that the light receiving system optical axis Oxp is provided in the direction inclined to the left side of the light projecting system optical axis Oxa, the light receiving slit light amount distribution on the light receiving surface becomes a distribution as shown in FIG. Become. This received light quantity does not include the stationary light component,
It is desirable to remove the stationary light component other than the laser light component, and for that purpose, the image of the state where the laser light is not irradiated and the image of the irradiation state are input and the difference between the two is used. The squares shown below indicate the respective element regions of the range image sensor.

An optical filter having anisotropy is disposed on the front surface of the distance image sensor so as to reduce the resolution in the width direction of the slit light without decreasing the resolution in the length direction of the received slit light. This filter produces a Gaussian light amount distribution as shown in FIG.
The light receiving position can be calculated with finer resolution than the pixel pitch by obtaining the center of gravity of the light amount distribution from each sensor in each column 1, 2, 3, 4, ... For this light amount distribution. . As described above, in order to detect the slit light incident position, the width of slit light incident on the sensor is not narrowed and a filter is used to have a distribution having a width of about 5 to 6 pixels. This is because if the width is narrower than the width of one pixel, only position detection resolution equivalent to the pixel pitch can be obtained.

The barycentric position G1 of the first column is obtained from the distribution D1 of the amount of light incident on the first column. Similarly, the second, third, fourth, ...
The center of gravity is calculated for each column by obtaining the center of gravity positions G2, G3, G4, ... Of each column. As shown in the figure, the light axis of the light projecting system is perpendicular to the object plane, but the light axis of the light receiving system is tilted to the left. Therefore, in the case of a target object having a step as shown in FIG. The center of gravity of the portion (third and fourth rows) higher than the center of gravity of the portion (first and second rows) is located at a position displaced to the right. Although FIG. 5 shows only two kinds of distributions, that is, the first column distribution D1 and the fourth column distribution D4, the second column distribution D2 is the same as the first column distribution D1, The column distribution D3 is the same as the fourth column distribution D4. FIG. 6 is a plan view showing the relationship between the light amount distribution and the barycentric position. Since the distributions of the first and second columns are the same, the obtained centers of gravity G1 and G2 are detected at the same position, and the distributions of the third and fourth columns are the same, and the centers of gravity G3 and G4 are detected at the same position.

In this way, the incident light positions of 256 points are obtained from the strip image for one slit, and further, 324 positions are obtained.
By performing the same calculation for the slit projected in the azimuth direction, 324 images are obtained, and a pitch shift image composed of 256 × 324 points is obtained. The obtained pitch shift image is only an image of the position information of the slit light, and in order to obtain an accurate distance image from this, calibration (correction) from a table of detailed data such as correction of lens aberration is necessary. This calculates and corrects lens aberration estimated from the focal length f and the focus position d of the photographing lens, and corrects distortion in the vertical and horizontal directions with respect to the camera. The same process is performed for color images. The data required at this time is information on various measuring lenses, that is, the focal length f and the focus position d. In the system of the present embodiment, the calibration is performed on the computer system so that the measurement device (shown in FIG. 3) can be connected via a terminal such as SCSI or can share data with a recording medium such as MO. To

In this way, the color image and the pitch shift image are output as digital signals from terminals such as SCSI or analog video signals from output terminals such as NTSC from the measuring device main body, and data necessary for calibration is SCSI or the like. To a computer as a digital signal. Also, when recording on a recording medium using the drive device 48 such as MO or MD built in the main body, images and various data are recorded.

The captured pitch shift image and color image are transferred to a computer connected to the measuring device together with various kinds of photographing lens information, and the computer obtains information on the distance to the target object from the transferred pitch shift image and photographing lens information. Calibrate and convert the range image you have. After performing the calibration, for the pitch shift image, a conversion curve of the focal length f and the focus position d, the vertical and horizontal positions in the screen, the shift amount stored for each XY position and the measured distance is derived, and the conversion curve is obtained. The pitch shift image is converted into a distance image based on the.

Conversion to a range image is well known,
For details, please refer to IEICE Technical Committee Material PRU91-113
[Geometric correction of images without camera positioning] Onodera and Kanaya, IEICE Transactions D-II vol. J74
-D-II No.9 pp.1227-1235, '91 / 9 [High-precision calibration method of range finder based on three-dimensional model of optical system] Ushiba, Yoshimi, Oshima, etc. are disclosed.

Next, the measuring device according to the present invention will be described in detail. First, the optical system will be described. As shown in FIGS. 1 and 2, during capturing of a range image, the slit light irradiating device (projecting optical system) 2 irradiates the target object 1 with the slit light S. The slit light irradiating device 2 is composed of a light emitting source such as a semiconductor laser 5, a condenser lens 6, a polygon mirror 7, a cylindrical lens 8, a condenser lens 10, and an optical system for projecting a zoom lens 11. The polygon mirror 7 is not limited to this, and may be a rotary mirror such as a resonance mirror or a galvano mirror.

The cylindrical lens 8 is a lens that does not form a focal point but forms a focal line parallel to the cylinder axis because the convex surface side is not a spherical shape but a cylindrical shape. The polygon mirror 7 is formed by a large number of mirrors around a rotation axis, and rotates to scan incident light one by one on each mirror surface one after another.

The structure of the projection optical system will be described with reference to FIG.
7A is a side view of the light projecting system, and FIG. 7B is a top view. It should be noted that in FIG. 7B, a part of the overlapping structure is omitted. In FIG. 7A, the slit light has a length in the direction perpendicular to the paper surface, and the solid line from the semiconductor laser 5 to the condenser lens 10 indicates the optical path. Shows a drawing line by a broken line for showing a position where the slit light is re-imaged. In FIG. 7B, the slit light has a length in the vertical direction of the drawing, the solid line from the semiconductor laser 5 to the cylindrical lens 8 indicates the optical path, and the condenser lens 10 and thereafter re-image. The construction line for indicating the position to be set is shown by a broken line. What is shown by a chain line between the cylindrical lens 8 and the condenser lens 10 is
1 schematically shows how the laser light that has traveled in a substantially dot shape is converted by the cylindrical lens 8 into slit light having a width. 7 (a) and 7 (b)
Then, the slit light is re-imaged at the position indicated by the vertical straight line (two-dot chain line) at the left end.

Collimator lens 6 (condensing lens 6 in FIG. 2
(Corresponding to 1) has a lens power for condensing the output light of the semiconductor laser 5 (for example, the emission wavelength of 670 nm) on the condenser lens. The laser light passing through the collimator lens 6 is deflected by the polygon mirror 7 in a direction perpendicular to the length direction of the slit light. This deflection enables scanning of the slit light on the object plane. The laser light deflected by the polygon mirror 7 first enters the fθ lens 29. The fθ lens 29 is a lens arranged to correct the non-linear component because the slit light moving speed on the object plane becomes non-linear with respect to the constant rotation speed of the polygon mirror 7. The collimator lens 30 arranged next is for improving the projection efficiency by directing the light beam incident on the condenser lens 10 from the direction scanned by the polygon mirror 7 to the direction perpendicular to the condenser lens. The laser light is converted by the cylindrical lens 8 into slit light having a length in the horizontal direction (direction perpendicular to the paper surface in FIG. 7A), and the condenser lens 1
It is focused on the pupil plane of 0, forms an image, and is projected onto the object as slit light having an extremely narrow width.

The condenser lens 1 arranged on the image plane (image plane) 10p of the projection zoom lens 11.
The slit light imaged once at 0 is used for the projection zoom lens 1
After passing 1, the light is projected onto the target object. The size of the image plane is, for example, ½ inch, ⅓ inch, etc. according to the size of the image pickup element, and is ½ inch in this embodiment. This slit light has a length in the horizontal direction generated by the cylindrical lens 8, and is scanned at high speed in the direction perpendicular to the length direction of the projected slit light according to the rotation of the polygon mirror. At this time, the focus position of the projection zoom lens is determined by the autofocus sensor 31 provided in the image pickup system.
Based on the signal from, the AF drive system 17 controls the same value as the image pickup system at the same time according to the distance to the target object surface. The autofocus sensor 31 is the same as that generally used in still cameras. Also, the focal length is controlled to be the same value as that of the imaging system, and at the same time, based on an operation from the user or the system.

The polygon mirror 7 is connected to a projection scanning drive system 9 composed of a polygon mirror drive motor and a polygon mirror drive driver, and its rotation is controlled. Reference numeral 33 denotes a scanning start sensor using a photodiode arranged beside the condenser lens 10, which monitors the scanning start timing as to whether or not the laser scanning has reached a stable state.

This light projecting system has a zoom function, and it becomes possible to adjust the magnification of the target object 1 to the required magnification. The zoom function has two functions, a power zoom (PZ) that allows the user to arbitrarily select the angle of view, and an automatic zoom (AZ) that automatically adjusts the angle of view to a preset angle of view. In contrast to the zooming of the light receiving optical system 3, the projection optical system 2 is controlled by the AZ drive system 16 so that the angles of view always match, and zooming is performed so that the optical magnifications are always the same. Referring to the schematic view of FIG. 8, the relationship of slit light projection by zooming becomes as shown in Expressions (1) to (3). θ = α1 × 1 / f (1) φ = α2 × 1 / f (2) ψ = α3 × 1 / f (3) θ is a row of 256 pitch-shifted images based on one point with the projection system To obtain the angle, the angle at which the extremely thin slit light moves during the integration of one image, φ represents the length of the slit light on the target object, and ψ is the total of 324 slit light beams on the target object. At the scanning angle, the slit light is scanned from the position shown by the solid line to the position shown by the broken line in the direction of the arrow. f represents the focal length of the projection lens. The width of the slit light itself is set as thin as possible. α1, α2, α
3 is a proportional coefficient, and these angles θ, φ, and ψ are proportional to the reciprocal of the focal length f.

An image pickup device (light receiving optical system) including a color image pickup system and a distance image pickup system at a position separated from the slit light irradiation device 2 by a base line length 1 in the vertical direction of the slit light irradiation device (projection optical system) 2. ) 3 is arranged on one rotary mount 4, and the configuration of this light receiving optical system is shown in FIG. The light receiving optical system 3 includes an imaging zoom lens 14, an autofocus unit 31, a beam splitter 15, various filters 61,
62, color CCD image pickup device 24, range image sensor 1
It is composed of two.

The received light is split by the beam splitter 14s arranged in the image pickup system zoom lens 14, and a part of the light is guided to the autofocus unit 31. This A
The F unit 31 functions to measure an approximate distance to the object surface and adjust the focus of the light projecting system lens and the light receiving system lens. To use.

The other light beam split by the beam splitter 14s disposed in the image pickup system zoom lens 14 is further split into two light beams, a transmitted light beam and a reflected light beam, by a beam splitter 15 placed after the image pickup system zoom lens. It is guided to the range image sensor 12 and the color image sensor 24. This beam splitter 15 is used for the range image sensor 12
A long-wavelength component as a light beam incident on the laser beam, here a long-wavelength component including a laser wavelength component (670 nm) is about 650.
It has the optical property of transmitting wavelength components longer than nm and reflecting other wavelength components.

Since the reflected short-wavelength component has almost all wavelength components of visible light, it is impossible in normal cases to impair color information. The reflected light flux passes through a low-pass filter 61 such as a crystal filter for preventing false resolution and forms an image on the single-color sensor 24 for color image. The single-plate color image sensor 24 is a CCD image pickup device used in a video camera or the like, and an RG is provided on the device.
This is an image pickup device in which dye filters of B, or yellow of complementary colors, cyan Cy, magenta Mg, and green G are arranged on the mosaic to extract color information. Green can be used as a substitute for the luminance signal. FIG. 10 shows a wavelength band of light received by the complementary color image sensor. The color image pickup device receives the light in the wavelength region reflected by the beam splitter having the characteristic indicated by the reflectance h. Curves show yellow Ye and cyan C
The spectral sensitivities of pixels with dye filters of y, magenta Mg, and green G.

On the other hand, the light flux of the long wavelength component transmitted by the beam splitter 15 passes through an infrared ray (Infrared Ray, hereinafter referred to as IR) cut filter in order to extract only the laser light component (wavelength 670 nm). Further, a distance image sensor 12 that passes through a low-pass filter such as a crystal filter
Image on top. In the configuration of the light receiving optical system shown in FIG. 9, both IR cut and low pass characteristics are shown by one filter 62. FIG. 11 shows the wavelength band (hatched portion) of the light received by the distance image sensor 12. The beam splitter 15 (transmittance shown by a solid line) is used for a wavelength region shorter than the wavelength of the laser light, and the IR cut filter 62 is used for a wavelength region longer than the wavelength.
It is cut by (the transmittance shown by the broken line).

The low-pass filter 62 used here is for detecting with a finer resolution than the image pickup element pitch of the light-receiving laser beam position when calculating the distance data, unlike the purpose of preventing the false resolution for the color image described above. It has a complementary function. Therefore, unlike the isotropic optical characteristic of the low-pass filter 61 at the time of a color image, the resolution is not reduced in the length direction of the received slit light, and the resolution is reduced in the width direction of the slit light. It is desirable to have an optical characteristic having anisotropy.
A low-pass filter using diffraction such as a single-layer crystal filter or a grating can be used as a means for realizing such optical characteristics, but this low-pass filter is not essential in the system configuration, and an analog filter for the sensor output later, Alternatively, the function can be substituted by a digital filter after digital conversion of the sensor output.

Next, scanning of the image pickup devices 12 and 24 will be described. Reference numerals 12p and 24p, which are shown side by side with the image pickup devices 12 and 24 in FIG. 9, are image pickup devices 12 and 24 shown in a plan view for the sake of explanation. In the CCD image pickup device, the scanning speed in the vertical direction is generally lower than the scanning speed in the length direction (horizontal direction) of the horizontal registers 12h and 24h. Therefore, the color image obtained by the image pickup device 24 (24p) is normally subjected to analog signal processing in accordance with the output of the horizontal transfer line of the CCD which performs high-speed scanning, and the sequential NTSC is performed.
It is possible to output the image to the monitor after converting it to the signal of. When it is attempted to output a pitch-shifted image to this same monitor, it is necessary that the distance image data be generated in the same direction as the horizontal scanning direction of the color image and in the same position order, without having to store the position information. It is desirable to reduce the memory capacity and simplify the functions required for the memory.

Therefore, it is desirable that the direction of the length of the slit projected for distance data measurement is the high-speed scanning direction of the image sensor for color images, that is, generally the horizontal scanning direction. Further, it is desirable that the scanning direction in which the slit is projected is the vertical scanning direction of the color image. That is, it is desirable that the projected slit light be scanned from top to bottom.

Therefore, a three-dimensional shape measuring apparatus using a light-section method in which a measurement object as in this embodiment is captured by two types of image input sensors, a color image sensor and a range image sensor,
In the two-dimensional input camera, the slit light having a slit length in the horizontal scanning direction of the color image pickup device is projected and the slit is scanned in the same direction as the vertical scanning direction of the color image pickup device, thereby reducing the memory. , Leading to reduced memory requirements. In addition, the direction is limited to read the band-shaped image from the range image sensor at high speed with respect to such slit light, and the horizontal direction in which the range image sensor can perform high-speed scanning is parallel to the horizontal scanning direction of the color image sensor. Need to be in the right direction. That is, the positional relationship and the scanning direction relationship between these image sensors and the incident slit light are as shown in FIG.

In the optical system having the above-mentioned structure of the image pickup section, two structures described below are newly required.

First, a color image and an image for generating a distance image are input from the same lens, but the exposure light amount control is performed because there is no relation between the light amount obtainable from the wavelength for the color image and the light amount obtained from the wavelength for the distance image. It is necessary to do each independently. When measuring a close measuring object in a dark place, the lightness for distance is high, but the lightness for color image is low. Conversely, when measuring a distant measurement target in a bright place, the lightness for distance is low, but the lightness for color image is high. Therefore, in this light-receiving zoom lens, control is not performed by a diaphragm that is an exposure adjusting unit in a general lens, and the lens is always fixed in an open state.

To control the exposure of a color image, an electronic shutter function of a FIT-CCD or the like generally used as a color image sensor is used to make adjustment according to the accumulation time. Normally, an electronic shutter function such as a FIT-CCD used as a color image sensor enables storage time control of 1/60 to 1/10000 seconds. To ensure a wider dynamic range, under bright outdoor use conditions, an ND filter having the function of reducing the amount of transmitted light without changing the component of the incident light is inserted immediately before the color image sensor to make the sensor incident. It is possible to use in a higher luminance state without reducing the light amount and reducing the light amount incident on the distance image sensor.

On the other hand, the exposure control for the range image is performed by controlling the number of lasers used for projecting light, controlling the current supplied to the laser, and controlling the insertion of an ND filter at any optical position from the laser to the output lens. The output level is adjusted by adjusting the strength or the amplifier gain supplied to the output signal. In this control, the laser intensity control value is determined from the distance information Daf to the measurement target obtained from the AF control unit and the focal length f of the lens under the measurement conditions. FIG. 12 shows an example of the control map.

Normally, the output of the distance image sensor is inversely proportional to the square of the distance information Daf to the object to be measured. Further, as the focal length f becomes shorter, the area that requires illumination increases, so the output signal of the range image sensor becomes smaller. Therefore, in the apparatus of the present embodiment, the number of lasers is controlled in accordance with the focal length as the output level of the distance image calculation data.
In the example shown in (3), three lasers are used when the focal length f is up to 36.7 mm, and one laser is used when the focal length is longer than 36.7 mm. Furthermore, the focal length f
And the amplifier gain given to the output of the distance image sensor in the analog preprocessing circuit according to the image magnification β (= Daf / f) calculated from the distance information Daf to the measurement object determined by the output of the AF sensor. It is also controlled by changing. In the illustrated example, when β = 35 to 50, 1/2, β
= 50-75 is 1, β = 75-100 is 2, β = 1
The gain of the amplifier is set as 4 in 00 to 200. In addition to this, when using a laser light amount exceeding the safety standard stipulated by JIS in the measurement in a telephoto system with a short focal length and a long focal length, an ND filter is inserted at an arbitrary optical position from the laser to the output lens. Light intensity control is also an effective means.

However, when a good measurement result cannot be obtained even if the measurement is performed with the control value by the above control, the laser light intensity adjustment key is provided to adjust the laser intensity by the key operation or the sensor accumulation time. It is also possible to use means such as making changes. Further, as another means, there is a method of performing laser pre-scanning based on the estimated laser intensity control value obtained from the distance information and the estimated reflectance of the measuring object obtained from the color image. The maximum output value of the range image sensor during pre-scan is calculated, and this value is A /
The laser intensity and the image sensor storage time, which are signals within the dynamic range of D conversion and sufficient for distance information calculation in the subsequent stage, are calculated, and the distance image is captured based on the calculated control value. . In addition, if there is an auxiliary lighting device for AF, the AF sensor detects the amount of light reflected by the irradiation of this auxiliary lighting with respect to the central portion of the screen where the object to be measured is present, and the detected reflection is detected. It is also possible to capture the range image by calculating the laser intensity and the image sensor storage time based on the light amount.

The other is that parallax occurs when light is projected and received from different viewpoints (positions) (see FIG. 13).
(Refer) The means for solving this is needed. When light is projected and received by the same lens system having the same image plane size and focal length, the fields of view only match at a specific distance (indicated by a large arrow OBJ1). If there is no object at the matching distance, the three-dimensional shape measurement of the non-illuminated area is performed, and an unmeasurable area occurs. For example, when attempting to measure an object in a position where the fields of view do not match, as indicated by the small arrow OBJ2 in FIG. 13, there is a gap between the light projection range and the light reception range, so the upper end of the arrow is the non-light projection range. However, there is a problem that the light receiving system scans.

The above-mentioned problems can be solved by the following structure. (1) The elevation angle of the optical axis of the projection system is changed steplessly according to the distance to the target (see FIG. 14). The focal length of the light emitting and receiving system is set to the same value, and the scanning range of the light receiving system is fixed by changing the elevation angle of the optical axis (shown by the broken line) of the light emitting system according to the distance to the target object by autofocus measurement. It corresponds to. That is, the closer the distance is, the greater the influence of parallax becomes, so the elevation angle is increased and the scanning range is set to S1, and the far angle is decreased and the scanning range is set to S2. The change of the optical axis of the projection system is changed by mechanical means.

(2) The elevation angle of the optical axis of the projection system is continuously changed according to the distance to the object by the optical means provided with the prism whose refractive index is variable immediately after the projection of the projection lens system. However, the focal lengths f of the light emitting / receiving system are set equal. The refractive index changes and the elevation angle of the optical axis of the projection system changes when the prism with a curvature is moved in and out according to the autofocus measurement distance.

(3) Using the optical system having the same image plane size, the focal length fa of the light projecting system is controlled to be smaller than the focal length fp of the light receiving system. Alternatively, an optical system having a large image plane size is used as the light projecting system, and the light projecting and receiving system focal lengths fa and fp are controlled so as to have the same value. With such means, the scanning range of the light projecting system has a margin (about 1.5 times that of the light receiving system) with respect to the scanning range of the light receiving system, and at the same time, the distance to the target object is divided into a plurality of zones. Then, the elevation angle of the optical axis of the projection system is changed step by step according to each zone. For example, in the example shown in FIG. 15, the distance to the target is divided into two zones, the far side is zone Z1 and the near side is zone Z2. If it corresponds to the zone Z1, the elevation angle of the optical axis of the light projecting system is changed by a predetermined angle, and if it corresponds to the zone Z2 on the short distance side, the elevation angle is changed to a larger angle than that of the zone Z1.

(4) As in the above (3), the scanning range of the light projecting system is provided with a margin (about 1.5 times that of the light receiving system), the elevation angle of the light axis of the light projecting system is fixed, and the focal length f is adjusted. Set a limit on the closest measurement distance. In the example shown in FIG. 16, a small arrow OB
Since there is a region where the light receiving range is outside the light emitting range at a distance shorter than the distance where J2 is located, the distance at this time is set as the closest distance.

In the cases of (1) and (2) (FIG. 14), it is assumed that the fields of view are completely coincident with each other. Therefore, the distance image sensor is driven at the same time as the laser scanning is started to capture the image. You can start. On the other hand, in the cases of (3) and (4), as shown in FIGS. 15 and 16, the fields of view are not coincident with each other, and the scan area of the laser by the light projecting system is wide, resulting in a wasteful area. Therefore, the time required to scan this useless area is calculated from the autofocus calculation reference distance.
Since the scanning progresses from top to bottom, there is a wasteful area at the beginning,
After the lapse of the above calculation time from the start of scanning, the microcomputer starts data acquisition from the range image sensor. In this case, the scanning range is wide (1), (2)
The laser scanning time is required to be about 1.5 times longer than that in the above case, and the three-dimensional shape input time is extended accordingly.

Further, since the light projecting system and the light receiving system have different elevation angles, the laser does not move at a strict constant velocity on the object plane perpendicular to the optical axis of the light receiving system, and the laser beam is densely moved to the lower side of the object. Although it moves to the upper side roughly, this elevation angle itself is a small angle, so it does not matter much, and by having a conversion table from the position information in the vertical direction where the sensor is scanning and the pitch deviation amount to the distance information. Three-dimensional measurement having almost isotropic property is possible.

Next, a detailed description will be given of the image pickup system.
If the distance range to the object to be measured is limited with respect to the projected direction of one slit, the position on the sensor that receives the reflected light from the object of that slit is limited within a certain range. It This state is shown in FIG.

The farthest measurement distance is Df, and the shortest measurement distance is Dn. If the cutting plane by the slit light emitted from the light projecting system is the slit A, the range of the image pickup element surface that receives the slit light reflected by the object surface is the intersection PAn of the measurement closest distance Dn and the slit A. The point at which the three-dimensional position is projected on the image sensor is the lowest point in the figure, and the three-dimensional position of the intersection PAf of the measurement farthest distance Df and the slit A is centered on the lens principal point position of the image sensor. It is limited to the closed section Ar on the image sensor whose uppermost point is the point projected on the drawing. Similarly, in the case of the slit light B, the projected point of the intersection point PBn between the closest measurement distance Dn and the slit B is set as the lowest point in the figure, and the farthest measurement distance is maintained, while keeping the positional relationship between the light projecting system and the light receiving system. The point where the intersection PBf of Df and the slit B is projected is limited to the closed section Br on the image sensor whose uppermost point in the figure.

As described above, in order to generate the distance data for one row of 256 points by projecting one slit light, the entire range of the image pickup device is not scanned, but only the necessary range corresponding to the slit light is scanned. Therefore, the processing speed can be increased.

Further, in order to increase the speed of the apparatus for generating three-dimensional shape data, a function of outputting only a band-shaped image only in this area, for example, a device image of 256 × 16 pixels at a high speed is required. As a high-speed drive solid-state image sensor capable of selectively reading such a band-shaped region, the following 3 will be described.
Any type of solid-state image sensor can be used. The first is MO
This is a configuration in which a read start address setting function of an image sensor having an XY address scanning method such as S and CMD is added (FIG. 18). The second is a readout transfer path (generally a horizontal register) in an analog transfer system such as a CCD image sensor.
In this configuration, a charge discharging function is added in parallel when charges are transferred to (FIGS. 19 and 20). The third is a configuration in which blocks divided into strips are set in advance regardless of the scanning method, each block has an output function, and the parallel output thereof is used (FIG. 21).

FIG. 18 shows the configuration of the XY address scanning type sensor as the first configuration. Usually, scanning of each pixel is performed by a matrix-arranged switch of a vertical scanning circuit 61 and a horizontal scanning circuit 62. The vertical scanning circuit 61 and the horizontal scanning circuit 62 are composed of digital shift registers,
One row (256 pixels) can be scanned by inputting a horizontal shift signal of 256 shift signals to a vertical scan 1 shift signal input. In this embodiment, a band-shaped random access read is realized by installing a scan start set register 63 for supplying a scan start set signal, which is a register initial value, to the vertical scanning circuit 61. By inputting signals sgn1 and sgn2 indicating the scanning start position to the scanning start set register 63, it is instructed which position the band-shaped image is to be read out.

Further, when the number of pixels increases, the number of bits of this scanning start set signal also increases, and the number of input pins increases. Therefore, it is desirable to dispose the decoder 64 for the scanning start set signal. Then, the scanning start position (row) is set by transferring the contents of the scanning start set register 63 in parallel to the vertical scanning circuit 61 at the start of reading. After that, horizontal scanning is performed 256 times to obtain a signal from a desired row. Then, one shift signal for vertical scanning and 256 shift signals in the horizontal direction are input, the signal of the next row is read, and this is repeated to read the image of a desired strip area. By performing the above operation, the scanning of only the desired strip area is realized, and the required scanning is completed in a time (the number of read rows / the number of all area rows) much shorter than the time of scanning the entire area.

The area once read out is reset and the next accumulation is started, but the area not read out continues to accumulate charges. At that time, there is no problem if the next read is the same area, but when reading different areas, image information having different accumulation times are mixed.
In the case of a three-dimensional measuring device using optical cutting, it is necessary to read out while shifting a strip-shaped region that needs to be read out, along with scanning of a laser slit. Then, the image of the region that is read redundantly is the image of the integration time from the previous read to the present read, but the integration of the image of the newly read region becomes the image that was continued from before with the shift of the read region. Will end up. Therefore, in the present embodiment, this read-out strip area is set to an area including both the area required this time and the area required next time. By doing so, the integration is surely cleared in the area required for the next input the previous time, and it is possible to avoid the trouble of capturing an image composed of pixels having different integration times.

Next, as a second configuration, FIG. 19 shows a configuration for interline transfer of a CCD image pickup device, and FIG. 20 shows a configuration for frame transfer. In the CCD image pickup device of the present embodiment, the integration clear gate I for discharging charges to the overflow drain OD is provided in parallel with the transfer gate TG that performs parallel charge transfer to the horizontal register 66.
By installing the CG, band-shaped random access reading is realized.

In the case of interline transfer, normally, the accumulated charges of all pixels are transferred in parallel from the light receiving section to the transfer area at the time when the image storage of the entire area is completed. Scanning of charges generated in each pixel is performed by a vertical register and a transfer gate T.
One shift signal is input to G, each charge in the vertical register is shifted downward by one stage in parallel, and the charge in the bottom vertical register is read to the horizontal register 66. Thereafter, one row of charges can be scanned by supplying the 256 shift signal input of the horizontal shift signal. The entire area is read by repeating this operation for the number of rows (340 rows).

In the present embodiment, the charges generated in unnecessary rows at the stage of scanning the charges generated in each pixel are supplied in parallel by supplying one shift signal input to the vertical register and the integration clear gate ICG. Overflow drain OD
To discharge. As for the row that needs to be read, one shift signal is input to the vertical register and the transfer gate TG in the same manner as in the normal case, each charge of the vertical register is shifted downward by one stage in parallel, and at the same time in the bottom vertical register. Is read out to the horizontal register 66, and then a 256-shift signal input of the horizontal shift signal is supplied to scan one row of charges. By doing so, the random access function for each row is realized, and the required scanning is completed in a time (reading row number / total area row number) much shorter than the time for scanning the entire area of the image sensor. .

In the case of the frame transfer shown in FIG. 20, the structure is larger than the element in the case of the interline transfer, and the upper side is the photoelectric conversion area and the lower side is the storage area. Generally, the storage region has the same number of pixels as the photoelectric conversion unit. In a normal operation, the accumulated charges of all pixels are transferred in parallel from the photoelectric conversion regions to the accumulation regions by vertical transfer pulses for the number of rows when the image accumulation in all regions is completed. After the transfer, as in the case of the interline transfer, the scanning of the charges generated in each pixel is read out to the horizontal register 66 by the control of the vertical register and the transfer gate TG, and then the horizontal shift signal of 256 shift signal is input to make one row. Can be scanned.

In this embodiment, the charges accumulated in the pixels in all the regions are transferred from the photoelectric conversion region to the accumulation regions in parallel by vertical transfer pulses corresponding to the number of rows, and then generated in each pixel when transferred to the horizontal register 66. The charges in unnecessary rows at the stage of scanning the charges are discharged in parallel to the overflow drain OD only by inputting a 1-shift signal to the vertical register and the integration clear gate ICG. In addition, the storage area is prepared only for the required number of rows to be read (for example, 16 rows) every time, and the signal of the first read unnecessary pixel row is synchronized with the vertical transfer pulse when vertically transferring from the photoelectric conversion area to the storage area. The integration clear gate ICG may be opened to discharge the charges, and the charges may be read from the horizontal register 66 at the stage when only the charges of the pixel rows that need to be read are transferred to the accumulation region. By the above, the random access function in units of rows is realized, and the necessary scanning is completed in a time (the number of read rows / the number of all area rows) much shorter than the time for scanning the entire area.

Next, as a third example, FIG. 21 shows the structure of a sensor which is divided into a plurality of blocks and outputs for each block.
Here, the case of the XY address scanning type sensor will be described as an example, but it is easy to take the same configuration in an analog transfer system such as a CCD image pickup device. In the present embodiment, a block configuration is set in which the number of rows required for reading is set in advance, and the signals of each block are scanned in parallel and output. With respect to this parallel read output, the output is selected by the operation of the multiplexer 65 according to the area to be read, and the final output is performed. By performing such reading, random access is realized in row units although the output order is different, and the reading time is also compressed by the number of block divisions. FIG. 22 shows the relationship between the output form of the band-shaped image randomly read by this block-divided configuration and the block switching signal of the multiplexer.
Shown in. The numbers 1 to 6 in the figure correspond to the line numbers in FIG.

FIG. 21 shows an example of division into extremely simple two blocks (B1 and B2) and reading of arbitrary three rows. Based on the relationship diagram between this figure and the output signal of FIG. To explain. The sensor internally outputs 2 lines, lines 1 to 1.
It has a block B1 output that outputs 3 (Fig. 22a) and a block B2 output that outputs lines 4 to 6 (Fig. 22b), and these are sent to the multiplexer as analog signals and selected by the selection signal Sel and output. To be done. By operating the multiplexer 65, the block B is output as the sensor output Out.
When 1 output is selected, the output of the block B1 becomes the sensor output as it is, and the band-shaped images of lines 1, 2, 3 are sequentially output (FIG. 22C). When the block B2 output is selected as the sensor output, line 4,
Band images 5 and 6 are read (FIG. 22F).

On the other hand, during the first and fourth line outputs as the block output, the block B2 is selected and the line 4 is output, and then the multiplexer 65 is switched to the block B1 selection, whereby the sensor output is changed to the lines 4, 2 ,. The output of 3 is sequentially output, and the strip images of lines 2, 3, and 4 are read (FIG. 22D). For the sensor output, select block B2 until the first two lines,
5 is output, and then the block B1 is selected and the line 3 is output, the band-shaped images of the lines 3, 4, and 5 are read (FIG. 22E). In the figure, a black ∇ mark indicates that the output is switched from the block B2 to the block B1. By switching the block selection signal during scanning in this way, it is possible to selectively read out a band-shaped image at an arbitrary position having a different output sequence but the same size as a divided block.

As described above, the three types of range image sensors which can be randomly accessed in units of rows can be applied in this embodiment for speeding up the input time to the three-dimensional shape measuring apparatus.

Next, the electronic circuit will be described. FIG. 23 is a block diagram showing the configuration of the entire electronic circuit. The measuring apparatus main body of the present embodiment is provided with the light emitting / receiving system lens drive circuits 71, 7
2, AF circuit 73, electric pan head driving circuit 76, input / output 7
Microcomputer CPU 1 for controlling 5, 74, etc., image sensor drive circuits 13, 23, laser / polygon drive circuit 7
7, 78, timer 79, SCSI controller 80,
Memory controller MC, pitch shift image processing circuit 83
It is controlled by two microcomputers, that is, a microcomputer CPU2 that controls the above. Microcomputer C that controls the lens, input / output, etc.
Under the control of PU1, signals such as power supply operation and key operation in shooting mode are received from the control panel 75, and the microcomputer C
Control signals are transmitted to the PU 2, the light receiving system lens driving unit 71, the light projecting system lens driving unit 72, the AF driving unit 73, the display image generating unit 74, and the like, and control such as zooming, focusing, and imaging is performed.

For a color image, a color image sensor 24
There are blocks of the sensor drive circuit 23, the analog pre-processing circuit 81, and the image memory 84. For the range image, there are blocks of the range image sensor 12, the sensor drive circuit 13, the analog preprocessing circuit 82, the pitch shift image processing circuit 83, and the pitch shift image memory 85.

When the power is turned on, the color image sensor 24,
The color image capturing system of the color image sensor drive circuit 23 and the color image analog preprocessing circuit 81 is driven, and the captured color image is supplied to the display image generation unit 74 and displayed on the display 41. These color image pickup system circuits have the same circuit system as the circuits well known in conventional video cameras and the like. On the other hand, a sensor for capturing a distance image, a laser, etc. are initialized only when the power is turned on and are not driven.
For No. 8 only, it takes a long time to rotate the mirror at a constant speed, so that driving is started. In this state, while referring to the color image on the monitor screen 41, the user sets the field of view by the power zoom operation and prepares for release for image input. Release operation is performed and release signal is generated.
The distance image sensor 12, the distance image sensor driving circuit 13, the distance image capturing system of the distance image analog preprocessing circuit 82, and the laser driving circuit 77 are driven by the transmission, and the pitch image memory 85 and the color image memory 84 are respectively driven. The image information of is captured.

The color image is supplied as an analog signal to the monitor device, but the color image frame memory 85 is subjected to A / D conversion by the A / D converter AD1 and image input as digital information. I do. These processes are the same as well-known techniques for digital video, digital still video, and the like.

For the range image, the microcomputer CPU2 waits for a scanning start signal of the laser slit light transmitted from the scanning start sensor 33 shown in FIG. Then, the focal length f, the base line length l, and the distance d to the measurement reference plane described above are used.
Wait for the dead time Td required for the waste scanning due to After measuring the dead time Td from this scanning start signal,
The driving of the range image sensor 12 and its drive circuit 13 is started to start capturing data. These timing operations are performed by the timer 79.

When the sensor starts to be driven, the slit-shaped laser having a horizontal length starts scanning downward from the top of the scanning range of the light receiving system. At the same time, the image integration of the distance image sensor is started, and when the slit light is scanned by the scanning of the polygon mirror 7 with the amount of angular variation corresponding to one pixel of the distance image sensor, the image integration unit changes to the accumulation unit. High speed vertical transfer to. Next, the distance image sensor driving unit 13 is controlled so that the image of the uppermost row is captured at the center of the strip-shaped area, and the image is read.
At the same time when the vertical transfer from the image integration unit to the storage unit is completed, the image is sequentially read out from the storage unit as the output of the range image sensor, and the integration unit integrates the charge according to the input light amount for the next image read. Will be processed.

When the reading of one strip-shaped image is completed in this way, the laser slit light is also scanned at an angular variation corresponding to one pixel of the distance image sensor, and high-speed vertical transfer from the image integration unit to the storage unit is performed. Done. The band-shaped area of the distance image sensor is set to a position shifted by one pitch downward from the previous reading, and the band-shaped area of the distance image sensor is set to read the image.

A series of this operation is continuously performed, and the band-shaped image input is repeated successively to obtain 324 images. During this time,
Since the polygon mirror rotates at a constant speed, band-shaped images for slit light having different light cutting planes are input one after another. The output of this range image sensor is correlated 2
The analog image pre-processing circuit 82 for range image performs processing such as double sampling, offset, and output at dark, and then the digital image is converted by the A / D converter AD2 and transmitted to the pitch shift image processing circuit 83 as digital data.

In the pitch shift image processing circuit 83, a light receiving center of gravity position calculating circuit (described later) shown in FIG. 24 performs a center of gravity calculation for converting one band of image data (256 × 16 pixels) into 256 positions of the received laser beam center of gravity. The calculated pitch shift amount is stored in the pitch shift image memory 85. By repeating this 324 times, 256 × 32
A pitch shift image of 4 is obtained.

By the above processing, the respective images are stored in the pitch shift image memory 85 and the color image memory 84. These two images are transferred to the SCSI terminal 4 by the SCSI controller 80 via the memory controller MC under the control of the microcomputer CPU 2 which controls the memory.
9. Output as digital data to the built-in MO device 22 or the like, or convert to analog by the D / A converter DA1 and N
The TSC signal can be output to the LCD monitor 41 and the NTSC output terminals 50 and 51.

When outputting from the SCSI terminal 49, SC
When outputting according to the SI standard, it takes several seconds to complete the transmission of one set of output images of color / pitch-shifted images. Therefore, a color image is recorded in a video device as a color NTSC signal that is normally used in a video device, a pitch-shifted image is treated as a luminance signal of the NTSC signal, and a monochrome image is output as a pitch-shifted image NTSC signal. The image can be output. It is also possible to input these real-time video images to a computer using a high-speed image processing device.
As another means, it is possible to input this NTSC signal to a computer by connecting it to an ordinary video device for recording and then processing this grayscale image (pitch shift image) while advancing frame by frame during playback. . By using the color and pitch shift image of the moving body input to the computer in this way, it can be utilized in fields such as motion analysis of the moving body.

It is also possible to control by providing a rotary mount control unit 76 for controlling panning, tilting and other operations of the electric platform 4 in which the measurement device is installed, as an external device of the system. This control operation will be described later.

Next, FIG. 24 shows a detailed structure of the light receiving center of gravity position calculating circuit of the pitch shift image processing circuit 83. This circuit has a hardware configuration that calculates the center of gravity from the information of 5 points out of 16 points of one band of image data. The signal from the range image sensor 12 is extracted by the analog preprocessing circuit 82 only for effective pixels, A / D converted by the A / D converter AD1, and input to this circuit from the input terminal input at the left end of FIG. This input signal is stored in four registers 101a-1
With 01d, 256 × 8bit FIFO (FirstInFirstFirst)
Out) stores 256 × 4 lines and one line directly input and a total of five lines are used for the calculation. The registers 103 and 104 are the same as the register 101 256 ×
It is an 8-bit register. Register 109 is 256 × 5b
It is a FIFO register for it. These registers 10
Two of the three, 104, and 109 are prepared for the same purpose because the processing in the selection circuits 106, 108, the comparison circuit 107, and the like requires several pulses of clock pulses to increase the memory capacity to two. Are alternately used for odd number (O) and even number (E), and which is used is controlled by clock pulses RCLK_O and RCLK_E.

The calculation of the center of gravity of the received laser is calculated by the following formula based on the data of 5 points on 5 lines. First, since the amount of received light in the vicinity of the position of the center of gravity is maximum, the I-th row (I = 1 to 2
The center of gravity of 56) is Σ (I, n) = D (I, n + 2) + D (I, n + 1) + D (I, n) + D (I, n-1) + D ( I, n-2) (4) finds the maximum n = N (I) for each I. It is considered that the center of gravity is located near the N (I) th column, and then the complement amount of only the weighted average point Δ (I, N (I)) is calculated by the following formula. Δ (I, N (I)) = (2 * D (I, N (I) +2) + D (I, N (I) +1) -D (I, N (I) -1) -2 * D (I, N (I) -2)} / Σ (I, N (I)) (5) Finally, W (I) = N (I) + Δ (I, N (I)) The position of the center of gravity is calculated as (6).

Here, D (I, n) indicates the data in the I-th row and the n-th column. One column has 256 data, and register 101a has D (I, n-1) and register 101b has D (I, n-1).
n), D (I, n + 1) for register 101c, D for 101d
The data of (I, n + 2) is saved and used for calculation. Σ (I, n)
The arithmetic operation (equation (4)) is calculated by the adder circuit Σ and stored in the register 104. Then, the result of the next operation is calculated as MAX (Σ (I,
n)) (comparison circuit 107), and if larger, the contents of this register 104 are updated and simultaneously calculated.
The value of {2 * D (I, n + 2) + D (I, n + 1) -D (I, n-1) -2 * D (I, n-2)} (= (5) Numerator = R1) in register 103,
The column number n is updated and stored in the register 109. R1 is calculated by using the shift circuit 10 for the data of D (I, n + 2) and D (I, n-2).
The process of (× 2) is performed by shifting 1 bit to the left by 2. After that, the addition circuit (+) and the subtraction circuit (-) perform an operation to calculate R1 at point A, which is stored in the register 103.

In the column number n, the clock pulse PCLK is counted by the 5-bit binary counter 110, and when the maximum value is updated as a result of the comparison in the comparison circuit 107, the counter value at that time is stored in the register 109. Capture and store. In this embodiment, since the number n is 1 to 16, it is sufficient that the register 109 and the binary counter 110 have 5 bits.

By repeating this operation for one strip image, N (MAX (Σ (I, n)) necessary for the calculation of the above equation is obtained.
The values of (I), Σ (I, N (I)), and R1 are stored in the register 10 respectively.
9, 104, and 103 are stored. If Σ (I, N (I)) = R2, the dividing circuit (÷) calculates R1 / R2, and then the adding circuit (+) calculates R1 / R2 + N (I) = Δ (I, N (I )) + N (I)
= W (I) is calculated, and finally the value of W (I) for the 256th column is output from the output terminal output at the right end.

The 256 W (I) s are stored in the pitch shift image memory 85, and this process is repeated for 324 strip images, so that the pitch shift information of 256 × 324 points is stored in the pitch shift image memory 85. A pitch shift image composed of W (I) is formed.

Next, the operation of the apparatus will be described in detail with reference to the flow chart. FIG. 25 is a flowchart of the main routine executed when the main switch is on. First, in step # 1, the CPU, memory,
Initializes devices such as SCSI, MO, displays, and control panels. Next, in step # 3,
Determine the operation mode. The operation modes include a camera mode for performing three-dimensional measurement and a replay mode for reading out three-dimensional data from the memory device 22 such as an MO and displaying it on a built-in display, which can be selected by a switch operation. Alternatively, either mode may be set by default. If it is the replay mode, the process proceeds to step # 5 to perform the replay mode process described later. If it is the camera mode, the process proceeds to step # 6 to perform the later-described camera mode processing. When the camera mode is completed, the polygon mirror is stopped in step # 7, and AF / PZ is reset in step # 8 to return the lens to the initial position. Step #
In 9, the image sensor and the sensor drive circuit are stopped,
Returning to step # 3, the operation mode is determined.

Next, the operation of the camera mode will be described with reference to the flow chart shown in FIG. When the camera mode is selected, each device is initialized in step # 11, the color image sensor is activated in step # 13, and the color image is supplied to the monitor display 41. This image is designed such that the autofocus sensor 31 arranged in the light-receiving zoom lens is driven so that the image is always received in the optimum focus state and the optimum color image is obtained. Next, in step # 15, in order to prepare for distance image pickup, driving of the polygon mirror, which requires a long time to stabilize, is started first, and in step # 17, the AF / PZ subroutine processing is performed. Next, in step # 19, the process waits until the polygon mirror stabilizes, and when the polygon mirror stabilizes, the shutter mode in step # 21 is entered, and the shutter mode subroutine is executed. In step # 23, the data transfer mode is entered and the data transfer mode subroutine is executed. In step # 25, it is determined whether or not the camera mode is ended. If it is ended, the process proceeds to step # 27 and returns. If not completed, the process returns to step # 21.

AF / PZ Subroutine FIG.
As shown in (b), the lens position of the light projecting / receiving system is reset in step # 31, the laser scanning range is reset in step # 33, and the process returns in step # 35.

Next, the operation of the shutter mode will be described with reference to the flowchart of FIG. In this state, the user changes the measuring device position, posture, and zooming to set the composition, while the device changes the shutter release button 4
Wait until 7 is pressed and a release signal is output. First,
In step # 41, the AF / AE subroutine is executed to focus and perform photometry. This subroutine will be described later. Next, in step # 43, the select key 43 and A
Check the F / AE status. Here, first, it is determined whether or not the select key has been pressed. If it is pressed ([Select]), the process returns in step # 79 to exit the shutter mode. This corresponds to the release of the shutter release button down to the first step in a general single-lens reflex camera. AF / A if the select key is not pressed
The state of the E process is checked, and if the AF / AE process is in operation, the process returns to step # 41 to repeat the AF / AE process. If the AF / AE processing is completed, the process proceeds to the next step # 45. That is, during the above processing period, light reception, focusing and light measurement of the zoom lens of the light projecting system are repeatedly performed, and control is always performed so as to maintain the in-focus state.

Upon completion of AF / AE, the shutter button 47 is unlocked in preparation for photography in step # 45, and focusing / zooming driving is prohibited (AF / PZ lock). Then, in step # 47, it is determined whether or not the shutter button 47 has been pressed. If the shutter button is pressed, the process proceeds to step # 55.
If it has not been pressed, the routine proceeds to step # 51, where it is determined whether or not a predetermined time has elapsed.
If the predetermined time has elapsed, the shutter button operation is locked in step # 53, and the process returns to step # 41.

In step # 55, the laser beam is emitted, and in step # 57, the laser beam is oscillated until the laser beam normally oscillates and waits until the preparation of the polygon mirror is completed. When the preparation is completed, the driving of the sensor is started in step # 59. First, in step # 61, the process waits until the output from the scanning start sensor attached to the side of the condenser lens is received, and when the scanning start signal is received, step # 61.
At 63, the drive of the distance image sensor is started after waiting the dead time Td. The dead time Td is calculated from the focal length f, the base line length l, and the distance d to the measurement reference plane. In step # 65, the input band-shaped image position of the distance image sensor is set to the initial position, and the operation of capturing the pitch shift image and the color image is started. At the same time, the barycentric position of the input light is calculated.
In step # 67, it is determined whether scanning is completed. If not completed, the process returns to step # 65 to repeat the image capturing. While shifting the input band image position from the initial position by one pitch in response to the scanning of the laser slit light, 324 band images are captured.

When the sensor driving is started, the color image sensor is re-driven at step # 69 following the driving start of the distance image sensor, and the color image read at step # 71 is stored in the color image memory. take in. The driving of both image sensors and the incorporation into the memory are automatically processed simultaneously by the hardware configuration. After that, the process proceeds to step # 73.

When the capture of the pitch-shifted image and the color image is completed, the emission of the laser beam is stopped in step # 73, the prohibition of the zoom drive and the focus drive is released in step # 75, and the captured image is selected in step # 77. The display is performed according to the selected mode, and the process returns at step # 79.

Next, a flowchart of the AF / AE subroutine of step # 41 will be described with reference to FIG. 28. First, in step # 91, the lens drive amount is calculated from the information of the AF sensor 31, and the focus lens is calculated based on the calculation result. Is driven (step # 93). Step #
At 95, set the scan start laser position and step #
Laser power control is performed at 97. In step # 99, photometry (AE) is performed, and the process returns in step # 101.

Next, the operation of the data transfer mode will be described with reference to the flow chart shown in FIG. First, in step # 111, the display mode is determined. A flag check is performed as to whether the image to be displayed is a pitch-shifted image that is displayed in shades or a color image, which is in the selected state.
In this display mode, for example, color image display is set by default, and selection is possible by key operation. When there is no key operation or when a color image is selected by key operation, a color image is displayed in step # 113. If the pitch shift image display is selected, the pitch shift image is displayed in step # 115.
After the image is displayed, it is determined in step # 117 whether the display mode has been changed. If it has been changed, the process returns to step # 111 to display an image according to the selected mode. Step # if display mode has not changed
Proceed to 119.

At step # 119, it is determined whether data transfer is necessary. If data transfer is not necessary, the process proceeds to step # 133 to display a color image. If data transfer is necessary, a data header is created in step # 121. In step # 123, it is determined whether or not the SCSI output mode. If the SCSI output mode is selected, external output data is created in step # 125 and data transfer is performed in step # 131. SCSI
If it is not in output mode, it will be recorded with the built-in recording device,
In step # 127, the data for the built-in MO drive is created, and in step # 129, the data transfer command to MO is C
Sent from PU2 to SCSI controller, step #
Data transfer is performed at 131. Then, step # 133
The color image is displayed with and the process returns with step # 135. The selection of these data transfer destinations can be made by key operation.

Next, the replay mode will be described.
In step # 3, the switch for switching to the replay mode is checked. If the switch has not been performed, the standby state (camera mode) for inputting the next image is entered, and if the switch has been performed, the replay mode is entered. .

This replay mode is different from the above-mentioned camera mode, and replays the image data already recorded in the built-in recording device such as MO to reconfirm or re-enable the SCSI.
This is a mode for outputting to an external device via a terminal, and the operation will be described with reference to the flowchart of the operation in this replay mode shown in FIG.

First, in step # 151, a list of images recorded in the MO is displayed. In step # 153,
The user performs reconfirmation display from this list display screen or selects image data to be transferred to the outside. Next step # 1
At 55, the selected image data is loaded into the color image / pitch shift image memories 84 and 85 from the built-in MO in the color image / pitch shift image memories respectively, and step # 157.
Then, a flag check is performed as to whether the display mode of the image to be displayed is a color image or a pitch-shifted image. Step # 1 depending on the selected display mode
A color image is displayed at 59, or a pitch shift image is displayed at step # 161. After displaying the image, step #
At 163, it is determined whether the display mode has been changed. If the display mode has been changed, the process returns to step # 157 to display again.

If there is no change, it is determined in step # 165 whether or not the next image data is to be displayed. If it is to be displayed, the process returns to step # 151 at the beginning of this subroutine to repeatedly select and display the image. If the next image is not displayed, it is determined in step # 167 whether the image data read from the MO into the memory is transferred to the outside. If not transferred, the process jumps to step # 173. When transferring, external output data is created in step # 169, and data is transferred in step # 171. Then, in step # 173, it is determined whether to display the next image data, and if it is displayed, the process returns in step # 151,
If not displayed, the process returns at step # 175.

Next, FIG. 31 shows a state transition diagram of each key operation in the series of operations. In this figure, the up, down, left, and right triangles indicating the operation indicate the operation of the cursor key 42 in FIG. The operation of 44 is shown. Further, although the present embodiment has a clock function, it is also possible to automatically assign the time to the file name of the image file to be recorded.

On the menu screen, the reproduction display, the list display, and the clock function can be selected / executed by operating the left / right cursor keys and the select key 43. After the selection / execution, the cancel key 44 returns to the selectable state. . The clock function allows you to set the time, and the list display function allows you to change file names, delete files, and select files to display. With the playback display function, color image display is set by default, and you can switch between pitch-shifted image display and character screen display with the left and right cursor keys. In each display mode, the previous image and the next image can be displayed by operating the up and down cursor keys. In the character screen display, you can use the select key to change file names and delete files.

When the cancel key is operated from the menu screen, the photographing waiting state (camera mode) is entered and the select key can be used to return to the menu. When the shutter button is pressed in the shooting waiting state, shooting is possible, an image is captured in the memory, and after shooting, the cancel key can be used to return to the shooting waiting state. If the select key is operated from the state immediately after shooting, the image can be recorded, the image captured in the memory is transferred to the storage device, and after the recording, the state returns to the shooting standby state. The image at this time is set to a color image by default, and use the cursor left / right keys
A color image can be selected.

Next, the high-precision input by dividing and taking in the three-dimensional shape measuring apparatus will be described. When the distance between the light projecting system and the light receiving system, that is, the base line length 1 and the focal length f and the distance d to the measurement target are determined, the three-dimensional resolution and accuracy are determined. Therefore, in order to measure with high accuracy, it is achieved by setting the focal length f large and measuring. That is, the higher the telephoto, the higher the measurement accuracy. However, although it is possible to obtain a three-dimensional image with high measurement accuracy, the visual field area is narrowed as the focal length f increases.

Therefore, the resolution for which the focal length f is desired to be measured,
The value is set according to the accuracy, the rotary platform 4 such as an electric platform is operated to divide the field of view into a plurality of regions, the divided regions are measured, and the resulting images are pasted together. It is reconstructed into a single image. By having such a function, a three-dimensional shape measuring apparatus with variable resolution can be realized. Further, by making the best use of this function, the environment can be measured by performing the three-dimensional measurement on the omnidirectional space. The operation will be described below by showing a specific example.
Note that the example shown in FIG. 32 is a simplified explanatory diagram, and the light projecting system 2 and the light receiving system 3 are arranged in a horizontal positional relationship, which is different from the example shown in FIG. In this arrangement, the slit light has a length in the vertical direction and needs to scan in the horizontal direction.

FIG. 32 shows how the image stitching function is used.
FIG. 33 is a flow chart showing the operation of the image pasting function. FIG. 34 shows a display state when this function is used, and a display section showing the measurement accuracy is provided below the image display section.

First, as shown in FIG. 32 (a), a wide angle at which the target object 1 can be imaged within the visual field range by an operation by the user,
The zoom drive system 16 is driven so as to be in the wide state (focal length f0) and the visual field range is set (step # 20).
1). The resolution in the Z-axis direction (see FIG. 17, uneven direction of the object) assumed at this time is represented by a bar display below the image as shown in FIG. This Z-axis direction resolution ΔZ
When the base line length is fixed as in this system, the relationship between the distance d to the object to be measured and the focal length f at the time of measurement has the following relationship. ΔZ = K × d × (df) / f (7) Here, K is a coefficient for estimating the resolution in the Z-axis direction,
It is determined by the sensor pitch and the like. In addition, the above zooming operation is performed from the system computer via SCSI.
It is also possible to send commands via the terminal and set operations such as zoom operation and release operation by remote control.

When the user determines that the measurement is performed with the accuracy and resolution that satisfy the above setting operation (NO in the determination in step # 203), the measurement is started by the release operation by the user (step # 205). ), The result is displayed on the display (step # 207). In this display, as shown in FIG. 34 (a), the input pitch shift image or color image and the Z-axis direction measurement resolution obtained by the capture are displayed in the bar below the image.
As a result, when the measurement with higher measurement accuracy is not required (NO in the determination in step # 209), the user is requested to determine whether or not the measurement is completed and writing to the storage medium is performed, and the determination is made accordingly. The process is performed to complete the operation.

If the user determines that the measurement is not performed with satisfactory accuracy (YES in step # 203).
S), or the pitch shift image captured by the first release operation, or the Z-axis direction measurement resolution display, the user changes the precision with the key operation to set the desired Z-axis direction resolution and precision, and gives an instruction for re-measurement. Can be performed (YES in the determination in step # 209).

When this precision setting key input is performed, the system determines the state at that time, that is, the focal length f0 in the state in which the entire view of the measurement target is captured, and the approximate distance d to the measurement target obtained from the AF sensor. The memory is stored and the visual field range is stored (step # 210). Further, the focal length f1 to be set is calculated using the above equation (7) from the input desired Z-axis direction measurement resolution and the approximate distance d (step # 21).
1).

When the focal length f1 is calculated, the focal length f1 is automatically zoomed (step # 21).
3), the visual field range to be measured, the approximate distance d, the number of frames to be divided and input from the focal length f1, the corresponding pan and tilt angle calculation, and the pan and tilt pans and tilts of the visual field position Set up (Step # 2
15), measurement is performed on each divided input frame (step # 217). The images to be input separately when using the image stitching function can be stitched together and reconstructed into a single image.
It is set to include the overlap that should be the margin.

The obtained pitch shift image, color image, captured information indicating the viewing directions in the X and Y directions (for example,
The decode angle values of pan and tilt, or the order of capturing in the X and Y directions, the lens focal length, and the measured distance information are stored in the internal MO storage device (step # 21).
9). At this time, the directory information such as the file name and the file size is not written in the memory, but the directory information can be written after the user's confirmation at the end to temporarily store the information.

Next, at the visual field position slightly overlapped with the above visual field position, the visual field is controlled by the pan and tilt operations according to the calculated pan and tilt angles, the image of the adjacent area is input, and this operation is performed. The entire area is input by repeating (NO in step # 221, see FIG. 32B).

When the input of all areas is completed (step #
If the determination in step 221 is YES, the camera is returned to the initial camera posture and focal length before increasing the measurement accuracy (step # 22).
3) When the operation is completed, the writing judgment of the user is waited, the directory information is written in the case of the writing instruction, and when the writing is not instructed, the processing is terminated without writing the directory information. The information stored in the memory up to is deleted.

When the measurement is performed in advance and the measurement is performed again as in the above operation, the distance measurement to the target object and the distance distribution within the measurement angle of view are completed by the first measurement. is doing. Therefore, for areas that have a large difference in distance from the target object, that is, for divided input frames that are only the peripheral area (background) that is different from the measurement object, re-measurement is not performed due to pasting, and divided input that includes the object It is also possible to remeasure only the frame. FIG. 34
In the example shown in (b), the halftone dot area including the target object is an area where re-measurement is performed, and the other areas are areas where the target object is absent and re-measurement is not performed.

As described above, high-speed three-dimensional measurement becomes possible, and the three-dimensional shape measurement in which the resolution can be freely set by repeating partial input based on this three-dimensional measurement and performing the bonding work. Is possible.

In such a bonding measurement, the resolution of the entire screen is measured at a uniform resolution, but the shape and color information is complicated for the eyes, mouth and nose like a human face. Data with high resolution is required, but it is also possible to use measurement targets such as cheeks and foreheads that require sufficient measurement with low resolution. For such a measurement target, efficient data input can be realized by performing data bonding by a partial zooming operation. This partial zooming bonding function is realized by the following operation.

FIG. 35 is a flow chart showing the operation of this partial zooming laminating function. First, in step # 251, as in the case of the uniform resolution bonding, the visual field is set so as to capture the entire area of the measurement target, and then step # 25.
At 3, the partial zooming input mode is selected. When the selection is made, the currently set focal length f0 and the pan / tilt decoding angle values are stored (step # 25).
5) Then, the measurement is started in the state of the focal length f0 and the image is input as the rough image data (step # 257). The resulting pitch-shifted image, color image, and information indicating the viewing directions in the X and Y directions in which the image is captured (for example,
Pan and tilt decode angle values), lens focal length, and measured distance information are stored in an internal storage device (step #
259). Then, in step # 261, the maximum focal length fma
After performing zooming so as to be x, the above-described schematic image data is analyzed, and it is determined whether or not remeasurement is performed for each divided input frame input after zooming.

When zooming is performed and measurement is performed at the maximum focal length fmax, this rough data is divided into frame sizes that can be input. In step # 263, the pan / tilt positions X and Y are set to the initial start positions Xs and Ys. The pan / tilt is controlled to the X and Y positions set in step # 265. Next, in step # 267, X ± ΔX,
Color information R of the initial input color image in the area of Y ± ΔY,
Statistical processing is performed on the G and B values to calculate the standard deviations σR, σG, and σB for each area. In step # 269, it is determined whether or not all of the calculated standard deviations σR, σG, and σB are less than the set predetermined values, and if the values are less than the predetermined values, the small area has light and dark color information. Is a uniform region, zooming measurement is not performed, and the process proceeds to step # 271. On the contrary, the standard deviation σ that is more than the specified value
If R, σG, and σB are present, it is determined that the region has complicated color information and zooming measurement is performed (step #
275).

In step # 271, X ± ΔX, Y ± ΔY
The standard deviation σd is calculated from the information of the initial input distance value d of the area, and in step # 273 it is determined whether or not the calculated standard deviation σd is less than the set predetermined value. Since the small area is a flat area with little change in shape, zooming measurement is not performed, and step # 279 is performed.
Go to. On the contrary, if it is equal to or larger than the predetermined value, it is determined that the area has a complicated shape (distance information), and zooming measurement is performed (step # 275).

After the zooming measurement in step # 275, the obtained pitch shift image, color image, information indicating the viewing directions in the X and Y directions in which the image is captured (for example, pan and tilt decoding angle values), Information such as lens focal length and measurement distance information is stored in a storage device such as an internal MO (step # 277). After that, it progresses to step # 279.

Next, at step # 279, the pan / tilt position X is changed by 2ΔX. X at step # 281
It is determined whether or not the directional scanning is completed, and if not completed, the process returns to step # 265. Step if complete #
At 283, the pan / tilt position Y is changed by 2ΔY.
In step # 285, it is judged whether all the scans are completed,
If not completed, the process returns to step # 265, and if completed, the process proceeds to step # 287 to end this routine.

As described above, the general image data and the partial detailed image information whose position can be discriminated can be input, and the partial detailed image data at the position can be pasted to the general image data to obtain the shape and color information. It is possible to realize efficient three-dimensional input according to complexity.

[0125]

As described above, when the image picked up by the two-dimensional image pickup device is read out, not the entire region is read out, but the band-shaped image of the region where the projected slit light is estimated to be incident is read out. Therefore, the image can be read in a very short time compared with the case of reading the entire area. As a result, the shape of the target object can be measured at high speed even if the target is a moving body, and conversely, the shape of the target object can be measured at high speed even when the measuring device itself is installed on a moving body. You can

[Brief description of drawings]

FIG. 1 is an explanatory view showing the principle of a light cutting method.

FIG. 2 is a schematic block diagram of the entire apparatus according to the present invention.

FIG. 3 is a perspective view showing a schematic configuration of the entire apparatus according to the present invention.

FIG. 4 is an explanatory diagram of a light amount distribution generated on a target object surface.

FIG. 5 is an explanatory diagram of a light amount distribution generated on the light receiving surface of the image sensor.

FIG. 6 is an explanatory diagram of a light amount distribution generated on the light receiving surface of the image sensor.

FIG. 7 is a cross-sectional view showing the configuration of a projection optical system.

FIG. 8 is an explanatory diagram of projection slit light.

FIG. 9 is a cross-sectional view showing the configuration of a light receiving optical system.

FIG. 10 is an explanatory diagram showing characteristics of an incident wavelength of a color image sensor.

FIG. 11 is an explanatory diagram showing a light receiving wavelength of a range image sensor.

FIG. 12 is an explanatory diagram showing an example of output control of a distance sensor.

FIG. 13 is an explanatory diagram of parallax between a light projecting system and a light receiving system.

FIG. 14 is an explanatory diagram of stepless elevation angle control.

FIG. 15 is an explanatory diagram of multi-stage elevation angle control.

FIG. 16 is an explanatory diagram of fixed closest angle control of elevation angle.

FIG. 17 is an explanatory diagram of an incident range and a scanning range of reflected light that is incident on the image sensor.

FIG. 18 is an explanatory diagram of an XY address scanning type sensor.

FIG. 19 is an explanatory diagram of an analog transfer type sensor (during interline transfer).

FIG. 20 is an explanatory diagram of an analog transfer type sensor (during frame transfer type).

FIG. 21 is an explanatory diagram of a sensor of block division.

FIG. 22 is an explanatory diagram of row random access of a block division sensor.

FIG. 23 is a block diagram of a circuit configuration of the entire device.

FIG. 24 is a circuit diagram of a light receiving center of gravity position calculation circuit.

FIG. 25 is a flowchart showing the operation of the main routine.

FIG. 26 is a flowchart showing the operation of the camera mode.

FIG. 27 is a flowchart showing the operation in shutter mode.

FIG. 28 is a flowchart of an AF / AE subroutine.

FIG. 29 is a flowchart showing the operation of the data transfer mode.

FIG. 30 is a flowchart showing the operation of the replay mode.

FIG. 31 is an operation state transition diagram of the measurement device.

FIG. 32 is an explanatory diagram of an image stitching function.

FIG. 33 is a flowchart showing the operation of the image stitching function.

FIG. 34 is an explanatory diagram of a display state of an image combining function.

FIG. 35 is a flowchart showing the operation of the partial zooming bonding function.

[Explanation of symbols]

 1 target object 2 light projecting optical system 3 light receiving optical system 12 two-dimensional image sensor

Claims (4)

[Claims] 1. In a three-dimensional shape measuring apparatus for projecting slit light onto a target object and imaging the same with a two-dimensional image sensor to measure the shape of the target object, it is presumed that the slit light is incident on the two-dimensional image sensor. A three-dimensional shape measuring apparatus characterized by selectively reading a band-shaped image of a region. 2. The two-dimensional image pickup device is divided into a plurality of blocks, each block is read in parallel, and the signals read in parallel are selected and output. Three-dimensional shape measuring device. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein the two-dimensional image pickup device has one-row parallel discharge means and selects and outputs a band-shaped image. 4. The two-dimensional image pickup device according to claim 1, wherein the two-dimensional image pickup device is an XY address scanning type two-dimensional image pickup device and has a read start row setting means for selecting and outputting a band-shaped image. Three-dimensional shape measuring device.