JPH07174505A - Surface-defection measuring device - Google Patents

Abstract

PURPOSE:To provide a measuring device capable of measuring core deflection, which can measure the surface deflection accurately. CONSTITUTION:Sliders 34 and 35 are mounted on a pair of base stages 30 and 31 so that the sliders can freely be moved back and forth. V-shaped bearings 38 and 39 are respectively attached and fixed on these sliders 34 and 35. A shaft 22, which is attached to a rotor to be measured 20, is provided over the V-shaped bearings 38 and 39. Stoppers 50A and 50B are attached to the sliders 34 and 35, and the positions of the sliders are fixed. A core deflection detector 24 is brought into contact with the rotor 20. The rotor 20 is rotated, and the surface deflection of the rotor 20 is measured by the surface deflection detector 24. When the stoppers 50A and 50B are removed, the core deflection of the rotor 20 can directly be measured. At this time, the detector 24 is brought into contact with the V groove of the rotor 20. The reason why the shaft 22 is beared in the free state is to avoide the effect of the surface deflection.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring apparatus capable of measuring surface runout of a molding rotating body such as a pulley, and more particularly to a surface running measuring apparatus capable of measuring core deviation of a molding rotating body.

[0002]

2. Description of the Related Art In general, injection molded products are often used for V pulleys and the like having V-shaped grooves formed on their circumferential surfaces, which are used in the rotation transmission system of tape recorders. When forming the V-pulley by injection molding, the V-pulley is formed by using a pair of molds, so if a slight deviation occurs in the abutting state of the molds, a runout or runout of the molded product occurs. .

The runout occurs when the center (axis center) of the molded V-pulley deviates from the design value, and the runout occurs when the axis of the shaft is tilted. The runout and runout are each within the allowable range (usually plus or minus 1
If it is not within the range of 0 μm), the product is defective. In order to manufacture a good product, the mold must be finely adjusted so that the runout and runout are within the allowable range.

When the fine adjustment of the die is required, for example, the abutting position of the die (specifically, the slide core) and the core pin for forming the shaft hole of the V pulley (none of them are shown). The planting position of is corrected. To correct the core pin implantation position, a nest (not shown) may be remade.

[0005] The runout measurement and the surface runout measurement are performed prior to such die adjustment. this house,
FIG. 13 shows an example of a conventional surface blur measuring device 10.

As the rotating body to be measured, the above-mentioned injection-molded V pulley is shown. Reference numeral 11 is a measurement base, and an upper surface 12 of the measurement base is a mounting surface of the V pulley 20. Since the mounting surface 12 serves as a reference surface for measurement, it has high flatness. An insertion hole 13 for a shaft 22 penetrating the V-pulley 20 is bored in the upper surface of the center of the measurement base 11, and the shaft 22 is inserted and fixed in the insertion hole 13 as shown in the figure during surface runout measurement.

The V-pulley 20 is exemplified by a pulley main body 21a and a boss 21b having a predetermined length, but the rotating body to be measured is not limited to this shape.

When measuring the surface runout, as shown in the figure, the V pulley 20 having the shaft 22 penetrating is placed with its boss 21b side facing downward. Then, the front end portion 25 of the chamfer detector 24 is arranged so as to lightly contact a part of the plane of the pulley body 21a, that is, the outermost periphery of the plane in this example.

In this state, the data at a predetermined rotation position is measured while rotating the V pulley 20 in a fixed direction. When there is no surface wobbling, the tip portion 25 of the surface wobbling detector 24 always moves in the same plane. On the other hand, for example, when the shaft 22 is tilted by θ with respect to the reference rotation axis as shown in FIG. 13, the tip portion 25 moves up and down according to the surface deviation angle θ. That is, the movement loci are not on the same plane.

FIG. 14 shows an example of the measurement results, and the curve 23a is a locus when the pulley main body 21a has good flatness and there is no inclination of the shaft center, that is, when there is no runout.
In this case, the locus is centered on the point O. In the case of a plane deviation in which the flatness is good but the axis is inclined, the curve 23b is obtained, and the center point O'is displaced from the reference point O. Curve 23c in the case of runout with poor flatness and tilted axis
The measurement result is as follows.

When the measured data such as the curve 23c is expanded and illustrated, it becomes the curve La of FIG. The development view of FIG. 15 does not necessarily correspond to the measurement data of the curve 23c and is not necessarily the same.

[0012]

When molding a V-pulley by injection molding, as described above, runout or runout occurs due to the abutting state of the mold, and when paying attention to the runout, it is as shown in FIG. Since the measurement is performed by using the different measuring device 10, it is not possible to obtain very accurate measurement data. This is because it is difficult to collect the measurement data from the measurement points at constant intervals because the measurement data is obtained while manually rotating the V pulley 20 that is the rotating body to be measured. Since it is possible that a hand or the like comes into contact with the V pulley 20 during the measurement, this also shows that the measurement data is not very accurate.

Further, when the measurement result as shown in FIG. 15 is obtained, the mold position is corrected by the following method.

Assuming that the original data is the curve La, at this time, the displacement is 20 μm in the y-axis (0 ° -180 °) direction, x
Since there is a deviation of 10 μm in the axial (90 ° -270 °) direction, correction (correction) as shown in FIG. 16 is performed. Since the correction amount is corrected by averaging a pair of molds, the correction amount for one mold is half that in the figure.

When the y axis is corrected by 10 μm, the curve L in FIG.
b, and if the x-axis is corrected by 5 μm, the curve L
It becomes like c. Therefore, the amount of correction depends on many years of experience. According to the die correction method based on such an empirical rule, in addition to variations in the correction, the V pulley 20 within the standard cannot be molded unless the mold is corrected several times, which requires a correction time and an increase in cost. There is an adverse effect such as doing.

When a rotating body such as a V-pulley is molded by injection molding, runout as well as runout occurs. Therefore, it is necessary for the measuring device to measure runout as well as runout. Therefore, it is preferable that both the surface runout and the core runout can be measured by the same measuring device. For example, it would be very convenient if surface runout and runout can be measured simply by attaching and detaching parts.

Therefore, the present invention solves such a conventional problem, and proposes a surface blur measuring device which can be used for accurate surface blur measurement.

[0018]

In order to solve the above-mentioned problems, according to the present invention, sliders are mounted on a pair of bases so as to be movable back and forth, and V-shaped bearings are respectively mounted on these sliders. The V-shaped bearings are attached and fixed, and the shafts attached to the rotating body for measurement are passed over these V-shaped bearings, and detachable stoppers for fixing both ends of the slider and the shaft are provided. The surface runout of the measured rotary body is measured by the surface runout detector while rotating the measured rotary body in a state where the planar runout detector is in contact with a part of the flat surface of the measured rotary body. It is characterized by doing so.

[0019]

When the surface deviation occurs as shown in FIG. 13, the tip portion 25 of the detector 24 moves up and down with respect to the reference surface (the reference plane when the surface deviation is zero). FIG. 1 shows the runout of FIG.
In a state of being tapped, the shaft 22 and the slider 34,
Both 35 are fixed by stoppers 50A and 50B,
When the tip end portion 25 of the detector 24 is brought into contact with the measurement surface, the probe 25 moves left and right due to the surface deviation, and the measurement data corresponding to the surface deviation can be obtained.

The mold correction amount of the measurement data thus obtained is calculated according to the processing flow shown in FIG. In this case, the center of gravity (referred to as the measured center of gravity) O'when the measurement data is used as a reference is obtained from the obtained measurement data, and a correction value for correcting this to the reference center of gravity O is obtained. At this time, the correction value is corrected using the radius R of the V pulley 20 and the height H including the boss 21b.

Since the slider 35 becomes free when the stoppers 50A and 50B are removed, if the tip 25 of the detector 24 is brought into contact with the V-shaped groove 21 as shown in FIG. it can. This is because the tip portion 25 moves up and down when the V pulley 20 has a center deviation.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an example of the surface deviation measuring device according to the present invention applied to surface deviation measurement of a V pulley will be described in detail with reference to the drawings. In the present invention, the same measuring device is configured to measure both surface runout and core runout.

FIG. 1 is a plan view showing an example of a surface shake measuring apparatus 1 according to the present invention, which can be used in combination, and FIG. 2 showing a top view thereof and FIG. 3 showing a side view with a part thereof cross-sectioned, respectively. Describing with reference, brass and steel are used for the constituent parts of the surface shake measuring device 1. However, a synthetic resin such as so-called engineering plastic may be used as long as the conditions such as processing accuracy, assembly accuracy, expansion and contraction due to temperature can be satisfied.

The surface shake measuring device 1 has a pair of rectangular bases (tables) 30 and 31 arranged so as to face each other with a predetermined distance therebetween, and the bases are provided at the central portions of the respective upper surfaces. Rails 32 and 33 each having a square cross section parallel to the opposite direction are attached and fixed using pressing plates 32a, 32b, 33a and 33b and well-known means (not shown) such as screws (see FIG. 1).

Sliders 34 and 35 are attached to the rails 32 and 33 and slide using the rails as guides. As shown in FIG. 3, the sliders 34 and 35 have an inverted U-shaped cross section.
It is a V-shaped piece and has rails 32 and 33 and a slider 3.
The friction coefficient between the sliders 34 and 35 is designed to be extremely small, and even if a slight force is applied to the sliders 34 and 35, the sliders 34 and 35 move in the pressing direction (left and right direction in the figure).
35 is designed to slide.

The auxiliary member 3 is provided on the upper surfaces of the sliders 34 and 35.
6, 37 are attached, and bearings 38, 39 having V-shaped grooves as shown in FIG. 3 are attached to the mutually opposing side surfaces of the auxiliary members 36, 37. This bearing 38,3
A shaft 22 inserted through a V pulley 20 which is a rotating body for measurement as shown in FIG. An auxiliary pulley 44 for rotating and driving the V pulley 20 is further inserted and fixed to the shaft 22.

As shown in FIG. 1, a drive motor 40 is fixed to one of the bases 30, and a shaft pulley 42 is attached to a rotary shaft 41 of the base motor 30. A belt 47 is attached to the V-pulley 20, and the V-pulley 20 is rotationally driven at a predetermined speed during the measurement of the surface deviation.

As will be described later, when the V pulley 20 has a large number of measurement points, it is necessary to slow down the rotation speed of the V pulley 20. Therefore, it is preferable that the auxiliary pulley 44 has a large diameter.

In order to keep the facing distance between the pair of bases 30 and 31 constant, they are connected by a holding plate 46.
The size of the runout measuring device 1 is determined according to the size of the member to be measured.

A shaft 22 having a predetermined length is attached to the V-pulley 20 which is the member to be measured as described above. Both ends of the shaft 22 are fixed and the sliders 34 and 3 are provided.
Stoppers 50 (50A, 50B) for fixing 5 are arranged on rails 32, 33, respectively. Stopper 50
A and 50B are detachably configured, and their shapes are selected as shown in FIG. 4 in accordance with the constituent members of the measuring device.

As shown in FIG. 4, a main body 51 having a substantially inverted L shape.
On the other hand, a columnar abutting member 52 that abuts the shaft 22 is attached to the tip end portion thereof. The abutting member 52 is internally supported by a coil spring or the like so as to be able to move back and forth to some extent. The abutting child 52 can be omitted. in this case,
The shaft 22 is directly pressed by the end of the main body 51.

The lower portion of the main body 51 is formed with a step portion 54 that matches the side shapes of the slider 34 and the auxiliary member 36.
The length of the lower part of 1 is just selected to the length up to the holding plate 32a.

Since the engaging recess 55 that engages with the rail 32 is formed on the lower surface of the main body, if the main body 51 is placed so as to engage with the rail 32, the sliders 34 and 35 will be positioned farther from the positions shown in the drawing. Since it cannot move to the right (not shown), the sliders 34, 35 and the shaft 22 can be fixed in the state shown in FIG.

The surface runout is measured with the pair of stoppers 50A and 50B being used. Therefore, the shaft 22 inserted into the V pulley 20 that is the rotating body to be measured is passed between the bearings 38 and 39 as shown in FIG. Rotational force is transmitted from the drive motor 40 to the auxiliary pulley 44.

The V-pulley 20 is rotated at a predetermined speed while the tip 25 of the detector 24 as shown in FIG. 13 is brought into contact with the side surface of the V-pulley main body 21a, in this example, the outermost peripheral side of the side surface. The surface deviation of the V pulley 20 is measured by. When there is no surface deviation, the movement trajectory of the tip portion 25 does not deviate from the reference plane (vertical plane in the figure). If there is surface deviation, the movement locus of the tip portion 25 of the detector 24 shakes to the left and right across the reference plane, and therefore the degree of surface deviation can be known using the measurement data at that time.

When the measuring apparatus 1 is also used for measuring the runout, a pair of detachable stoppers 50 are provided.
Remove A and 50B before use. Then, as shown in FIG. 5, the pair of sliders 34 and 35 becomes free, and the shaft 22 also becomes free. The tip portion 25 of the detector 24 is arranged so as to contact the V-shaped groove 21 as shown in the figure.

When there is a runout, the tip portion 25 moves up and down in the same reference plane (a vertical plane passing through the V-shaped groove 21) in accordance with the amount of runout. Can be accurately measured.

The pair of sliders 34 and 35 are attached to the shaft 22.
The reason why each axis is made free in order to eliminate the influence of surface wobbling at the time of measuring the center wobbling. This will be explained below.

When there is a runout as well as a runout, the tip portion 25 of the detector 24 corresponds to the runout and the bottom portion p of the V-shaped groove 21.
Acts to move away from. When the tip portion 25 of the detector 24 separates from the bottom p of the V-shaped groove 21, the V-shaped groove 21
Due to the component force parallel to the shaft 22 in the load (pressing force) from the detector 24 applied to the shaft 22, the shaft 22 tends to move in the direction of the component force. Shaft 22 and shaft 2
The bearings 38, 39 on which 2 is mounted are substantially integrated in the axial direction by the force of the belt 47 pulling the auxiliary pulley 44 downward, and the component force on the shaft 22 is reduced by the sliders 34, 35.
Be transmitted to. Since the sliders 34 and 35 are free in the axial direction, the sliders 34 and 35 slide in the same direction as the component force until the component force becomes zero.

By this sliding operation, the tip portion 25 of the detector 24 faces the bottom portion p of the V-shaped groove 21, and the component force is zero when the tip portion 25 reaches the bottom portion p, whereby the surface runout becomes zero. . Even if the pair of sliders 34 and 35 are freed in this way, the tip 25 of the detector 24 always has the bottom portion p of the V-shaped groove 21 even if there is surface deviation.
Therefore, it is possible to remove the influence of the runout on the runout measurement.

Next, a specific example of the surface blur measurement will be described. V-pulley 2 with boss 21b as shown in FIG.
When 0 is a rotating body to be measured and there is runout,
The axis q'is displaced from the reference axis q by, for example, θ. At this time, the surface deviation is measured as the surface deviation when the point r at the center of the lower part of the boss 21b is regarded as the fixed point.

Therefore, as shown in FIG. 7, the actual axis q'is θ with respect to the reference plane (shown by the solid line) orthogonal to the reference axis q.
When it is tilted only by this, a plane (shown by a chain line) orthogonal to the axis q'becomes a measurement plane, and the tip portion 25 comes into contact with this measurement plane for data measurement. The amount actually inclined with respect to this measured amount ΔL is ΔM. The correction amount when correcting the die in its x-axis and y-axis directions is not ΔL but ΔM
Is. Therefore, the correction amount ΔM is obtained in consideration of the radius R of the V pulley main body 21a and the length H of the boss 21b. That is, since ΔM: ΔL = H: R ... (1), ΔM = (H / R) ΔL ... (2).

From the top view of FIG. 7, it is possible to know in which direction of the x and y axes the axis q'is tilted. FIG. 8 shows a top view thereof.

The center O'shown in FIG. 8 is obtained by calculating the center of gravity (measured center of gravity) from the actually measured data. The measured center of gravity can be obtained as follows.
First, as shown in FIG. 9, in this example, 500 measurement points are defined and measurement data is obtained from each. Two axes (x and y axes) of the V pulley 20 are obtained from these measurement data. For example, the measurement point with the largest surface deviation is the x-axis (0 ° -1
80 °) to pass.

Then, in this example, the center of gravity is calculated using measurement data for every 30 ° with reference to 0 ° on the x-axis. When the angle is 30 °, a dodecagonal figure is obtained over the entire circumference, so the area centroid obtained by calculation from these polygons is taken as the point O ′ of the measured centroid.

In the above description, the reference x-axis and y-axis are respectively obtained using the measurement data of 500 points, but the measurement center of gravity can be obtained without calculating the reference axis. In this case, it is also possible to measure only 12 points used for calculating the measured center of gravity. And in such a case, the axis passing through the first measurement point is the reference axis (0
Since the measurement may be performed by regarding it as (° -180 °),
The above numerical values are only examples. The number of measurement points for obtaining the measurement center of gravity is also an example, and the larger the number of points for calculating the center of gravity, the higher the calculation accuracy. However, the calculation time for that is unavoidably long, so
The number of measurement points will be set taking both factors into consideration. Experiments have confirmed that sufficient accuracy can be obtained even with the number of measurement points described above.

Now, the center O'indicating the measured center of gravity thus obtained is moved to the center O when the ideal V pulley having zero surface deviation is measured, so that the surface deviation of the V pulley 20 is caused. Can be modified. Since the line segment OO 'becomes parallel to the line segment AA' when O'is moved to O, the amount to be actually moved, that is, the mold correction amount ΔM, is ΔM = {(X ² + Y ² ) ^1/2 } (H / R) = line segment AA 'x (H / R) = line segment OO' x (H / R) (3) ∠CO'O is ∠CO'O = tan ^-1 (X / Y) ・ ・ ・ ・ (4) ∴∠A'Ab = φ-tan ^-1 (X / Y) ・ ・ ・ ・ (5) When the die correction amount is a minute value of about 0.05 mm or less. The mold correction amount (the approximate value) of line segment AB is: line segment AB = line segment AA′COS {φ−tan ⁻¹ (X / Y)} = {(X ² + Y ² ) ^1/2 }. COS {φ-tan ⁻¹ (X / Y)} · (H / R) ··· (6) The measured value (measurement data) at the angle φ is S = line segment OA,
If the predicted value after moving the center from O ′ to O is S ′, S ′ = S + segment AB = S + {(X ² + Y ² ) ^1/2 } · COS {φ-tan ⁻¹ (X / Y )} · (H / R) ··· (7). When the difference between the predicted value S ′ and the value of the ideal V-pulley without surface wobbling is within the allowable value (when the values are approximately similar), the above-mentioned mold correction amount ΔM is the correction value as it is. Used as. However, when the circle drawn by the measurement points shown in FIG. 9 is close to a perfect circle, it is possible to minimize the surface runout by moving O ′ to O, but in reality it shows a complicated shape, so O ′ is O Even if you move to, the face deviation does not always become the minimum.

When it is out of the allowable value, the correction value as shown in FIG. 10 (within several μm, 1 μm, −1 μm in this example)
m) is used to forcibly shift the center O ′ in the x-axis and y-axis directions to perform the above-described processing, and the center when the value is the closest to the ideal value is measured at the V-pulley 20. Used as the center of gravity, and the mold correction amount O at that time
O'is calculated.

FIG. 11 shows an example of a circuit system of the measuring device 1 used for the surface shake measurement. The measurement data detected by the detector 24 is supplied to the A / D converter 62 via the amplifier 61. Is converted into a digital signal having a predetermined number of bits, and the converted measurement data is supplied to the CPU 63, and the surface deviation measurement program including the step measurement provided therein is used for the x-axis (0 ° -180 °). , Y-axis (90 ° -270 °) calculation and surface shake correction amount calculation are automatically performed.

A rotation control signal for the drive motor 40 is generated from the CPU 63 via the driver 66. The rotation speed of the V-pulley 20 is determined by the rotation control signal. In synchronism with this rotation control signal, the timing at which measurement data is taken in from the detector 24 at a predetermined measurement point is further determined.

Reference numeral 64 is a display unit (CRT, liquid crystal element, etc.) for displaying measurement data and calculation results, and 65 is a printer for printing those data.

The above-described surface blur correction amount and the like are stored in a memory (RAM or the like) built in the CPU 63, and these are used as a mold correction amount or a correction amount for forming a mold.

FIG. 12 is an example of a flow chart showing the processing procedure for calculating the amount of surface blur correction.

When the above processing program is started,
Measurement data input processing is performed (step 71), and when this is completed, measurement centroid calculation processing is performed (step 7).
2). After the center O'indicating the measured center of gravity is calculated, the value (new measurement data) of the movement destination (point B) of the actual measurement point when the center O'is moved to the center O which is the ideal center of gravity ( Step 73). The calculation of the destination point B may be performed on all the measurement data, but simply may be performed only on the measurement data of 12 points used when the measurement center of gravity is obtained.

Next, the data when the surface deviation is zero and the new measurement data are compared at the same actual measurement points (step 74). If the comparison results show that both data match or are within the range of the allowable value (extremely approximated value), the value of the center O ', which is the calculated measurement center of gravity, is used as it is as the center of rotation (step 75), and the optimum center of gravity A surface shake correction amount OO ′ is calculated from O ′ and the ideal center of gravity O. Center O '
From the inclination of, the shifts X and Y in the x and y axis directions corresponding to the correction amount OO 'can be obtained.

On the other hand, when the comparison result is not within the range of this allowable value, it is determined that there is an error in the calculated measurement center of gravity, and the measurement center of gravity is corrected (step 76). As shown in FIG. 10, the correction of the center of gravity of the measurement is performed by shifting the center to points O1 'to O8' within a range of plus or minus 1 .mu.m, converting the data from that position to the point B from the measured data, and after shifting. New measurement data (total of 8 types) is obtained (step 76).

These eight kinds of new measurement data are compared with the above-mentioned data when the surface deviation is zero, and the center (O1 'to O8') associated with the new measurement data having the smallest error among them is compared. Is used as the optimum center of gravity. Using this optimum center of gravity, the surface blur correction amount OO 'is calculated (step 78).

In the embodiment described above, the present invention is applied to the V-pulley 2
Although it has been applied to the measurement of the surface runout of 0, it can be easily understood that the rotating body to be measured can be applied to rotating bodies other than the V-pulley as well as rotating bodies other than those used in tape recorders.

[0059]

As described above, in the surface shake measuring apparatus according to the present invention, the surface shake is measured by fixing the slider for passing the rotating body to be measured.

According to this, since the surface deviation of the rotating body to be measured can be accurately measured, as long as this measurement data is used, the mold position can be accurately corrected. Further, in this configuration, the measuring device can be used as a device for measuring the runout by simply removing the slider fixing stopper from the device.Therefore, the measuring device having a dual structure can be realized without increasing the number of parts. Have. In this case, even if there is a runout, the runout can be measured with the runout corrected to zero, so measure the runout of the rotating body for measurement without being affected by the runout. You can also
Therefore, it has a feature that the accuracy of the molded product to be calibrated thereby is significantly improved.

From the above, the present invention is very suitable for application to the surface runout measurement of pulleys of tape recorders and other rotating bodies for which precision of molded products is required to be relatively strict.

[Brief description of drawings]

FIG. 1 is a plan view showing an example of a surface deviation measuring device that also serves as a center deviation measurement according to the present invention.

FIG. 2 is a top view of FIG.

FIG. 3 is a side view in which a part of FIG. 1 is sectioned.

FIG. 4 is a perspective view of a stopper.

FIG. 5 is a plan view when used as a runout measuring device.

FIG. 6 is a diagram showing an example of surface blur measurement.

FIG. 7 is a diagram showing an example of surface blur measurement.

FIG. 8 is a flowchart showing a specific example of calculation of a surface shake correction amount.

FIG. 9 is a diagram showing a relationship between surface deviation measurement data and a measurement center of gravity O ′.

FIG. 10 is a diagram showing an example of correction of the measured center-of-gravity position.

FIG. 11 is a system diagram showing an example of a circuit system of the surface blur measuring device.

FIG. 12 is a flowchart showing an example of surface blur measurement.

FIG. 13 is an explanatory diagram of a conventional surface shake measuring device.

FIG. 14 is a diagram showing a typical runout.

FIG. 15 is a diagram showing surface blur measurement.

FIG. 16 is a diagram showing a surface blur correction direction.

[Explanation of symbols]

 1 Surface blur measuring device 20 V pulley 22 Shaft 34, 35 Slider 38, 39 V-shaped grooved bearing 50 (50A, 50B) Stopper

Claims (1)

[Claims] 1. A slider is mounted on a pair of bases so as to be movable back and forth, and V-shaped bearings are mounted and fixed on these sliders, respectively, and these V-shaped bearings are mounted on a rotating body to be measured. The shaft is passed over, and detachable stoppers are provided to fix both ends of the slider and shaft respectively.When measuring the surface deviation, the surface deviation detector is applied to a part of the flat surface of the rotating body to be measured. A surface shake measuring device, characterized in that the surface shake of the measured rotary body is measured by the surface shake detector while rotating the measured rotary body in a state of contact.