JPH07169021A - Thin film magnetic head - Google Patents

Thin film magnetic head

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Publication number
JPH07169021A
JPH07169021A JP31055193A JP31055193A JPH07169021A JP H07169021 A JPH07169021 A JP H07169021A JP 31055193 A JP31055193 A JP 31055193A JP 31055193 A JP31055193 A JP 31055193A JP H07169021 A JPH07169021 A JP H07169021A
Authority
JP
Japan
Prior art keywords
magnetic
film
thin film
layer
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31055193A
Other languages
Japanese (ja)
Inventor
Izumi Yamamoto
泉 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP31055193A priority Critical patent/JPH07169021A/en
Publication of JPH07169021A publication Critical patent/JPH07169021A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To reduce the reproduced waveform interference when a line recording density is high by constituting the magnetic layer of a thin film magnetic head with a layer-built body composed of two magnetic films having different polishing characteristics. CONSTITUTION:A magnetic layer 19 has a layer-built structure which is composed of a first magnetic film 43 and a second magnetic film 45 which has polishing characteristic different from that of the first magnetic film 43 and is built up on the outer side of the first magnetic film 43. Two such magnetic layers 19 are provided with a magnetic gap 23 in between. The first magnetic film 43 is made of CoZnNb-based amorphous material and the second magnetic film 45 is made of FeNi alloy. The second magnetic film 45 is shaved off so that its surface retreats from a sliding plane 47 and, by the influence of the retreat, the end parts of the first magnetic film 43 are selectively shaved to form smooth curves and the distribution of the invasion of fluxes from the end parts is spread to reduce a false output. By composing the magnetic layer of a thin film magnetic head of the layer-built structure of the first and second magnetic films having different polishing characteristics, the smooth curves are formed on the end parts of the magnetic layer, so that a false output such as an undershoot can be suppressed and a peak-shift can be reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、コンピュータ等の外部
記憶装置として用いられる磁気ディスク装置に使用され
る薄膜磁気ヘッドに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head used in a magnetic disk device used as an external storage device such as a computer.

【0002】[0002]

【従来の技術】表面に磁気記録膜を有する磁気ディスク
を回転し、磁気ヘッドを用いて記録・再生を行う磁気デ
ィスク装置がコンピュータ等の外部記憶装置として広範
囲に用いられている。近年、記憶容量の増加による記録
周波数の増大および狭トラック化にともないスパッタリ
ングやメッキなどの薄膜形成技術を用いて形成される薄
膜磁気ヘッドの重要性が増している。
2. Description of the Related Art A magnetic disk device that rotates a magnetic disk having a magnetic recording film on its surface and performs recording / reproducing using a magnetic head is widely used as an external storage device such as a computer. 2. Description of the Related Art In recent years, with an increase in recording frequency due to an increase in storage capacity and a narrower track, the importance of a thin film magnetic head formed by using a thin film forming technique such as sputtering or plating is increasing.

【0003】誘導型薄膜磁気ヘッドは図2のような形状
をしており、スライダ11の後端面にヘッド素子13が
薄膜工程によって形成され、摺動面47は図7の工程の
示すとうりに基板15を切断した後、レールの加工がな
され、その後、研磨加工されている。ヘッド素子13の
断面は図3に示す構造になっており、基板15の上に付
着されたAl23などの下地層17の上にヘッド素子1
3が積層されている。ヘッド素子13は、磁束の検出素
子であるコイル25を層間絶縁層21を介して挟み込む
ように、磁性層19が形成されている。さらにヘッド素
子13はAl23などの保護層27で保護されている。
また磁性層19に設けられた磁気ギャップ23によって
磁気ディスクから拾われた磁束がコイル25と鎖交し、
その鎖交磁束の変化によって出力が得られる。
The inductive type thin film magnetic head has a shape as shown in FIG. 2, the head element 13 is formed on the rear end surface of the slider 11 by a thin film process, and the sliding surface 47 is as shown in the process of FIG. After cutting the substrate 15, the rail is processed and then polished. The cross section of the head element 13 has the structure shown in FIG. 3, and the head element 1 is formed on a base layer 17 such as Al 2 O 3 deposited on the substrate 15.
3 are stacked. In the head element 13, the magnetic layer 19 is formed so as to sandwich the coil 25, which is a magnetic flux detecting element, with the interlayer insulating layer 21 interposed therebetween. Further, the head element 13 is protected by a protective layer 27 such as Al 2 O 3 .
Further, the magnetic flux picked up from the magnetic disk by the magnetic gap 23 provided in the magnetic layer 19 interlinks with the coil 25,
An output is obtained by the change in the interlinkage magnetic flux.

【0004】薄膜磁気ヘッドから磁気ディスクに記録さ
れた一つの磁化反転から得られる出力は図4に示す様で
あり、主出力29の両側にアンダーシュート31が生じ
る。このため線記録密度が増加するとアンダーシュート
31と主出力29とが干渉して、主出力29のピーク位
置が時間軸上で移動するいわゆるピークシフトが生じる
ことにより、これが原因で読み取りエラー率を増大させ
る。また図5に見られるような出力の線記録密度依存性
にうねりが生じる。このうねりを補正するためには、磁
気ディスク装置の再生回路にアンダーシュート31をキ
ャンセルするような波形等価回路を挿入し、アンダーシ
ュート31による効果を軽減している。
The output obtained from one magnetization reversal recorded on the magnetic disk from the thin film magnetic head is as shown in FIG. 4, and undershoots 31 occur on both sides of the main output 29. For this reason, when the linear recording density increases, the undershoot 31 interferes with the main output 29, causing a so-called peak shift in which the peak position of the main output 29 moves on the time axis, which increases the read error rate. Let Further, as shown in FIG. 5, undulation occurs in the linear recording density dependence of the output. In order to correct this undulation, a waveform equivalent circuit that cancels the undershoot 31 is inserted in the reproducing circuit of the magnetic disk device to reduce the effect of the undershoot 31.

【0005】薄膜磁気ヘッドにおいて、アンダーシュー
ト31が生じる原因の一つに磁気ヘッドの形状に依存す
るコンター効果と呼ばれるものがある。これを図6を用
いて説明する。図6は磁気ディスクに記録された一つの
磁化反転33を再生する過程を時間を追って示した模式
図である。磁気ディスクが図の右側から左側に向かって
進行し、磁化反転33がヘッド素子13の右側の磁性層
19の端部まで来る(時刻t=t0 )、それまで磁性層
に流れていなかった磁束がコイル25と鎖交するように
なるため、アンダーシュート31が生じる。続いて磁化
反転33が磁気ギャップ23を通過すると磁束の流れる
向きが急に変わるために主出力29が生じる(時刻t=
t1 )。最後に磁化反転33が左側の磁性層19の端部
を離れるとそれまでコイル25に鎖交していた磁束が流
れなくなるため、アンダーシュート31が生じる。以上
のようにアンダーシュート31は磁性層19の両端部で
の磁束の出入りによって生じることが解っている。
In the thin film magnetic head, one of the causes of the undershoot 31 is called a contour effect depending on the shape of the magnetic head. This will be described with reference to FIG. FIG. 6 is a schematic diagram showing the process of reproducing one magnetization reversal 33 recorded on the magnetic disk over time. The magnetic disk progresses from the right side to the left side of the drawing, the magnetization reversal 33 reaches the end of the magnetic layer 19 on the right side of the head element 13 (time t = t0), and the magnetic flux that has not flowed in the magnetic layer up to that point is generated. Since the coil 25 interlinks with the coil 25, an undershoot 31 occurs. Subsequently, when the magnetization reversal 33 passes through the magnetic gap 23, the flow direction of the magnetic flux suddenly changes, so that the main output 29 is generated (time t =
t1). Finally, when the magnetization reversal 33 leaves the end portion of the magnetic layer 19 on the left side, the magnetic flux that has been linked to the coil 25 does not flow until then, and the undershoot 31 occurs. As described above, it is known that the undershoot 31 is generated by the flow of magnetic flux at both ends of the magnetic layer 19.

【0006】誘導型薄膜磁気ヘッド以外の他のタイプの
薄膜磁気ヘッド、例えば磁気抵抗効果素子(以下MR素
子とする。)を用いたシールド型磁気抵抗効果型薄膜磁
気ヘッドや、誘導型薄膜磁気ヘッドと同様に磁気ギャッ
プから磁束を拾うタイプである引き込み型磁気抵抗効果
型薄膜磁気ヘッド、さらには垂直記録に用いられ、主磁
極によって記録再生を行い、リターンパスとしてリター
ン磁極を用いる単磁極薄膜磁気ヘッドなどにおいても、
同様に磁性層の端部からの磁束の出入りによって誘導型
薄膜磁気ヘッドのアンダーシュートに相当するような疑
似出力波形が生じるために波形等価回路等でその影響を
軽減させている。
A thin film magnetic head of a type other than the inductive thin film magnetic head, for example, a shield type magnetoresistive effect thin film magnetic head using a magnetoresistive effect element (hereinafter referred to as an MR element) and an inductive thin film magnetic head. A pull-in type magnetoresistive effect thin film magnetic head that is a type that picks up a magnetic flux from a magnetic gap, and a single magnetic pole thin film magnetic head that is used for perpendicular recording and performs recording / reproduction by a main magnetic pole and uses a return magnetic pole as a return path. Also in
Similarly, since a magnetic flux flows in and out from the end of the magnetic layer to generate a pseudo output waveform corresponding to the undershoot of the inductive thin film magnetic head, its influence is reduced by a waveform equivalent circuit or the like.

【0007】[0007]

【発明が解決しようとする課題】従来の技術では、上述
したように再生回路にアンダーシュートなどの疑似出力
波形をキャンセルするような波形等価回路を挿入しなけ
ればならないため、磁気ディスク装置の構成回路が複雑
になるという問題があった。また、製造上における薄膜
磁気ヘッドの寸法や、浮上量のバラツキによって疑似出
力の位置や、波形が変化するため、全ての装置に対して
波形等価回路のパラメータを適切に設定することが困難
であり、結果としてエラーレートの悪化を招いていた。
In the prior art, as described above, a waveform equivalent circuit for canceling a pseudo output waveform such as an undershoot must be inserted in the reproducing circuit, and therefore, the constituent circuit of the magnetic disk device. There was a problem that became complicated. Further, since the pseudo output position and the waveform change due to the dimension of the thin film magnetic head in manufacturing and the variation of the flying height, it is difficult to appropriately set the parameters of the waveform equivalent circuit for all devices. As a result, the error rate was deteriorated.

【0008】これらの問題を解決するため、本発明の目
的は、アンダーシュートなどの疑似出力波形が小さく、
波形干渉の影響が少ない薄膜磁気ヘッドを提供すること
である。
To solve these problems, the object of the present invention is to reduce the pseudo output waveform such as undershoot,
An object of the present invention is to provide a thin film magnetic head that is less affected by waveform interference.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するため
に、本発明は、薄膜磁気ヘッドの磁性層を、磁気ギャッ
プを挟んで、研磨特性の異なる2種類の磁性膜である、
第1の磁性膜と第2の磁性膜とを順次積層させたことに
より、第2の磁性膜の端部は、研磨特性に依存してスラ
イダの摺動面より後退しており、第1の磁性膜の端部
は、第2の磁性膜との接触面側において、研磨特性に依
存して滑らかな曲面が構成されていることを特徴とす
る。
In order to achieve the above-mentioned object, the present invention is a magnetic layer of a thin film magnetic head comprising two kinds of magnetic films having different polishing characteristics with a magnetic gap interposed therebetween.
By sequentially stacking the first magnetic film and the second magnetic film, the end portion of the second magnetic film is retracted from the sliding surface of the slider depending on the polishing characteristics. The end portion of the magnetic film is characterized in that a smooth curved surface is formed on the contact surface side with the second magnetic film depending on the polishing characteristics.

【0010】[0010]

【作用】薄膜磁気ヘッドの機械加工工程の流れ図を図1
0を例に説明する。製造工程において行われるスライダ
の摺動面に対する研磨によって、研磨特性の低い第2の
磁性膜の端部が、摺動面より多く削れるために第1の磁
性膜との間に段差が生じる。さらに第1の磁性膜の接触
面側の端部が選択的に削られるため、その端部の角には
研磨特性に応じて滑らかな曲線が形成される。このこと
により、薄膜磁気ヘッドの形状に依存する形状効果が改
善される。さらに詳しくは、図8に示す従来の薄膜磁気
ヘッドの鎖交磁束変化に比べて、本発明の薄膜磁気ヘッ
ドでは図9に示す様に磁性層端部からの出入りによる鎖
交磁束変化は緩やかな曲線になるために、アンダーシュ
ートなどの疑似出力は必然的に小さくなる。
[Operation] A flow chart of the machining process of the thin film magnetic head is shown in FIG.
0 will be described as an example. By polishing the slider sliding surface in the manufacturing process, the end portion of the second magnetic film having low polishing characteristics is scraped more than the sliding surface, so that a step is formed between the slider and the first magnetic film. Furthermore, since the end of the first magnetic film on the contact surface side is selectively shaved, a smooth curve is formed at the corner of the end according to the polishing characteristics. This improves the shape effect depending on the shape of the thin film magnetic head. More specifically, as compared with the change in the interlinking magnetic flux of the conventional thin film magnetic head shown in FIG. 8, in the thin film magnetic head of the present invention, the interlinking magnetic flux change due to the entry and exit from the magnetic layer end is gentle as shown in FIG. Due to the curve, the pseudo output such as undershoot is inevitably small.

【0011】[0011]

【実施例】以下、本発明による実施例を図面に基づいて
説明する。図1は本発明を用いた誘導型薄膜磁気ヘッド
の一実施例である。磁性層19は磁気ギャップ23を挟
んで、第1の磁性膜43と、その外側に研磨特性が違う
第2の磁性膜45を順次積層した積層体としている。第
1の磁性膜43としてはCoZrNb系アモルファスを
用い、第2の磁性膜45としてはFeNi合金を用い
る。各材料の硬度を表1に示す。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an embodiment of an inductive thin film magnetic head using the present invention. The magnetic layer 19 is a laminated body in which a first magnetic film 43 and a second magnetic film 45 having different polishing characteristics are sequentially laminated outside the first magnetic film 43 with the magnetic gap 23 interposed therebetween. CoZrNb-based amorphous is used for the first magnetic film 43, and FeNi alloy is used for the second magnetic film 45. The hardness of each material is shown in Table 1.

【表1】 [Table 1]

【0012】図10は本実施例の磁気ギャップ部の要部
拡大図である。第2の磁性膜45が削れて摺動面47よ
り引っ込んでおり、その影響で第1の磁性膜43の端部
が選択的に削られて滑らかな曲線が形成され、端部から
の磁束の侵入分布が広がって疑似出力が減少するように
なっている。図11に薄膜磁気ヘッドからの出力の線記
録密度依存性を示す。本実施例による特性は実線で示
し、ほぼ同様の寸法形状を持つ従来の薄膜磁気ヘッドに
よる特性は破線で示す。本発明の薄膜磁気ヘッドの特性
にはほとんどうねりが見られず、疑似出力による波形干
渉が少ないことを示している。本実施例では第2の磁性
膜45として、磁性体であるFeNi合金を用いたがA
u等の非磁性材料を用いても同様の効果が得られる。
FIG. 10 is an enlarged view of the main part of the magnetic gap portion of this embodiment. The second magnetic film 45 is scraped and retracted from the sliding surface 47, and the effect is that the end of the first magnetic film 43 is selectively shaved to form a smooth curve, and the magnetic flux from the end is removed. The penetration distribution is widened and the pseudo output is reduced. FIG. 11 shows the linear recording density dependence of the output from the thin film magnetic head. The characteristic according to the present embodiment is shown by a solid line, and the characteristic by a conventional thin film magnetic head having substantially the same size and shape is shown by a broken line. The characteristics of the thin film magnetic head of the present invention show almost no undulation, which indicates that waveform interference due to pseudo output is small. In this embodiment, a FeNi alloy, which is a magnetic material, is used as the second magnetic film 45.
The same effect can be obtained by using a non-magnetic material such as u.

【0013】図12は本発明を適用したシールド型磁気
抵抗効果型薄膜磁気ヘッドの一実施例である。MR素子
35を挟んで内側を第1の磁性膜43とし、外側を第2
の磁性膜45とした積層体としている。第1の磁性膜4
3、第2の磁性膜45としては先に示した各材料を用い
る。各磁性膜の周辺部の詳細については先の実施例と同
様であり、端部からの磁束の侵入分布が広がって疑似出
力が減少するようになっている。
FIG. 12 shows an embodiment of a shield type magnetoresistive effect thin film magnetic head to which the present invention is applied. The MR element 35 is sandwiched between the first magnetic film 43 on the inner side and the second magnetic film 43 on the outer side.
Of the magnetic film 45. First magnetic film 4
3. As the second magnetic film 45, the above-mentioned materials are used. The details of the peripheral portion of each magnetic film are the same as in the previous embodiment, and the distribution of the penetration of the magnetic flux from the end portion is widened to reduce the pseudo output.

【0014】また、引き込み型磁気抵抗効果型薄膜磁気
ヘッドや、垂直磁気記録に用いられる単磁極薄膜磁気ヘ
ッドについても同様な構成となっており、端部からの磁
束の侵入分布が広がって疑似出力が減少するようになっ
ている。
Further, the pull-in type magnetoresistive effect type thin film magnetic head and the single magnetic pole thin film magnetic head used for perpendicular magnetic recording have the same structure, and the distribution of the penetration of the magnetic flux from the end portion is widened to give a pseudo output. Is decreasing.

【0015】[0015]

【発明の効果】以上の説明で明かなように、本発明によ
れば薄膜磁気ヘッドの磁性層を研磨特性の違う第1の磁
性膜43と、第2の磁性膜45との積層体とすることで
磁性層端部に滑らかな曲線が形成されることにより、形
状効果が改善され、アンダーシュートなどの疑似出力を
低減できるため、高線記録密度時の再生波形干渉を低減
し、ピークシフトを低減できるという効果がある。さら
に、磁気ヘッドの寸法や浮上量等のばらつきによる疑似
出力の変動を小さくできるので、安定した特性の磁気デ
ィスク装置を提供できるという効果がある。さらに、疑
似出力の低減により磁気ディスク装置の再生回路に波形
等価回路を用いるなどの必要がなくなり、回路系を簡略
化することにより、磁気ディスク装置を小型化、低価格
化できるという効果がある。
As is apparent from the above description, according to the present invention, the magnetic layer of the thin film magnetic head is a laminated body of the first magnetic film 43 and the second magnetic film 45 having different polishing characteristics. By forming a smooth curve at the end of the magnetic layer, the shape effect is improved, and pseudo output such as undershoot can be reduced.Therefore, reproduction waveform interference at high linear recording density can be reduced and peak shift can be reduced. There is an effect that it can be reduced. Further, since it is possible to reduce the fluctuation of the pseudo output due to the variation of the size and the flying height of the magnetic head, it is possible to provide a magnetic disk device having stable characteristics. Further, since the pseudo output is reduced, it is not necessary to use a waveform equivalent circuit in the reproducing circuit of the magnetic disk device, and the circuit system is simplified, so that the magnetic disk device can be downsized and the cost can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す説明図であり、誘導型
薄膜磁気ヘッドのヘッド素子部の要部断面図である。
FIG. 1 is an explanatory view showing an embodiment of the present invention, and is a cross-sectional view of a main part of a head element portion of an inductive thin film magnetic head.

【図2】従来の薄膜磁気ヘッドの全体の形状を示す概観
図である。
FIG. 2 is a schematic view showing the overall shape of a conventional thin film magnetic head.

【図3】従来の誘導型薄膜磁気ヘッドのヘッド素子部の
要部断面図である。
FIG. 3 is a cross-sectional view of a main part of a head element portion of a conventional induction type thin film magnetic head.

【図4】従来の技術を示す説明図であり、磁気ディスク
の一つの磁化反転から得られる誘導型薄膜磁気ヘッドの
出力波形を示す図である。
FIG. 4 is an explanatory diagram showing a conventional technique, showing an output waveform of an inductive thin film magnetic head obtained from one magnetization reversal of a magnetic disk.

【図5】従来の技術を示す説明図であり、誘導型薄膜磁
気ヘッドの出力の線記録密度依存性を示す線図である。
FIG. 5 is an explanatory diagram showing a conventional technique, and is a diagram showing the linear recording density dependence of the output of the inductive thin film magnetic head.

【図6】従来の技術を説明する説明図であり、誘導型薄
膜磁気ヘッドの出力にアンダーシュートが生じるメカニ
ズムを説明する模式図である。
FIG. 6 is an explanatory diagram illustrating a conventional technique, and is a schematic diagram illustrating a mechanism in which an undershoot occurs in the output of the inductive thin film magnetic head.

【図7】薄膜磁気ヘッドの機械加工工程を示す流れ図で
ある。
FIG. 7 is a flowchart showing a machining process of the thin film magnetic head.

【図8】従来の技術を説明する説明図であり、誘導型薄
膜磁気ヘッドのコイルの鎖交磁束と出力を示す模式図で
ある。
FIG. 8 is an explanatory diagram illustrating a conventional technique, and is a schematic diagram showing an interlinkage magnetic flux and an output of a coil of an inductive thin film magnetic head.

【図9】本発明の作用を説明するための説明図で、誘導
型薄膜磁気ヘッドのコイルの鎖交磁束と出力を示す模式
図である。
FIG. 9 is an explanatory diagram for explaining the operation of the present invention, and is a schematic diagram showing the interlinkage magnetic flux and the output of the coil of the inductive thin film magnetic head.

【図10】本発明の一実施例を示す説明図であり、誘導
型薄膜磁気ヘッドの磁気ギャップ部分の要部拡大断面図
である。
FIG. 10 is an explanatory view showing an embodiment of the present invention, and is an enlarged cross-sectional view of a main part of a magnetic gap portion of the inductive thin film magnetic head.

【図11】本発明の一実施例を説明する説明図であり、
誘導型薄膜磁気ヘッドの出力の線記録密度依存性を示す
線図である。
FIG. 11 is an explanatory diagram illustrating an embodiment of the present invention,
It is a diagram showing the linear recording density dependence of the output of the induction type thin film magnetic head.

【図12】本発明の一実施例を示す説明図であり、シー
ルド型磁気抵抗効果型薄膜磁気ヘッドの素子部の要部断
面図である。
FIG. 12 is an explanatory view showing an embodiment of the present invention, and is a cross-sectional view of a main part of an element part of a shield type magnetoresistive thin film magnetic head.

【符号の説明】[Explanation of symbols]

11 スライダ 13 ヘッド素子 15 基板 17 下地層 19 磁性層 21 層間絶縁層 23 磁気ギャップ 25 コイル 27 保護層 35 磁気抵抗効果素子 43 第1の磁性膜 45 第2の磁性膜 47 摺動面 11 Slider 13 Head Element 15 Substrate 17 Underlayer 19 Magnetic Layer 21 Interlayer Insulating Layer 23 Magnetic Gap 25 Coil 27 Protective Layer 35 Magnetoresistive Effect Element 43 First Magnetic Film 45 Second Magnetic Film 47 Sliding Surface

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 薄膜コイルあるいは磁気抵抗効果型(M
R)薄膜からなる誘導型あるいはMR型の書き込みある
いは磁束変化を検出するための検出素子と、該検出素子
を層間絶縁層を介して挟持し、所定間隔の磁気ギャップ
を有する磁性層とからなるヘッド素子と、該ヘッド素子
が後端面に配設され、磁気ディスク面上で摺動されるス
ライダとから構成され、該スライダの摺動面が研磨加工
されている磁気ディスク装置の薄膜磁気ヘッドにおい
て、前記磁性層は、研磨特性の異なる2種類の磁性膜か
らなり、前記磁気ギャップを挟んで第1の磁性膜と第2
の磁性膜が順次積層され、該第2の磁性膜の端部は、研
磨特性に依存して前記スライダの摺動面より後退してお
り、前記第1の磁性膜の端部は、前記スライダの摺動面
と同一であり、かつ研磨特性に依存して滑らかな曲面が
構成されていることを特徴とする薄膜磁気ヘッド。
1. A thin film coil or a magnetoresistive effect type (M
R) A head composed of a thin film inductive or MR type detecting element for detecting writing or magnetic flux change, and a magnetic layer sandwiching the detecting element with an interlayer insulating layer and having a magnetic gap at a predetermined interval. A thin-film magnetic head of a magnetic disk device, which comprises an element and a slider in which the head element is disposed on a rear end surface and slides on a magnetic disk surface, and the sliding surface of the slider is polished. The magnetic layer is made of two kinds of magnetic films having different polishing characteristics, and the first magnetic film and the second magnetic film are sandwiched by the magnetic gap.
Magnetic films are sequentially stacked, the end of the second magnetic film is recessed from the sliding surface of the slider depending on the polishing characteristics, and the end of the first magnetic film is the slider. The thin-film magnetic head is characterized in that it has a smooth curved surface that is the same as the sliding surface of (1) and that depends on the polishing characteristics.
【請求項2】 前記第1の磁性膜はCoZr系アモルフ
ァス合金からなり、前記第2の磁性膜はFeNiからな
ることを特徴とする請求項1に記載の薄膜磁気ヘッド。
2. The thin-film magnetic head according to claim 1, wherein the first magnetic film is made of a CoZr-based amorphous alloy, and the second magnetic film is made of FeNi.
JP31055193A 1993-12-10 1993-12-10 Thin film magnetic head Pending JPH07169021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31055193A JPH07169021A (en) 1993-12-10 1993-12-10 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31055193A JPH07169021A (en) 1993-12-10 1993-12-10 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH07169021A true JPH07169021A (en) 1995-07-04

Family

ID=18006604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31055193A Pending JPH07169021A (en) 1993-12-10 1993-12-10 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH07169021A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0916904A (en) * 1995-06-30 1997-01-17 Nec Corp Thin-film magnetic head and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0916904A (en) * 1995-06-30 1997-01-17 Nec Corp Thin-film magnetic head and its manufacture

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