JPH07135346A - Multilayer peizoelectric actuator - Google Patents
Multilayer peizoelectric actuatorInfo
- Publication number
- JPH07135346A JPH07135346A JP5162679A JP16267993A JPH07135346A JP H07135346 A JPH07135346 A JP H07135346A JP 5162679 A JP5162679 A JP 5162679A JP 16267993 A JP16267993 A JP 16267993A JP H07135346 A JPH07135346 A JP H07135346A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- external electrode
- side external
- piezoelectric actuator
- laminate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電気的エネルギーを変
位や力の機械的エネルギーに変換する積層型圧電アクチ
ュエータに関し、特に内部電極と外部電極との接続構造
に特徴を有する積層型圧電アクチュエータに関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated piezoelectric actuator for converting electric energy into mechanical energy such as displacement or force, and more particularly to a laminated piezoelectric actuator characterized by a connection structure between internal electrodes and external electrodes. It is a thing.
【０００２】[0002]
【従来の技術】積層型圧電アクチュエータは、圧電性セ
ラミックスの電界誘起歪みを利用したデバイスで、電極
とセラミックスを多層積層した積層セラミックスコンデ
ンサーと類似の構造が一般的である。積層セラミックコ
ンデンサーと類似の構造において、大きな変位量を得た
い場合には、セラミックスと内部電極の積層数を多くし
て積層方向に長い構造とすれば良いが、積層数を多くす
ると脱バインダーや焼結工程において、デラミネーショ
ンやクラック等の欠陥が発生するので、積層長さ寸法
は、２０ｍｍ程度が限界であった。2. Description of the Related Art A laminated piezoelectric actuator is a device utilizing electric field induced strain of piezoelectric ceramics, and generally has a structure similar to a laminated ceramics capacitor in which electrodes and ceramics are laminated in multiple layers. If you want to obtain a large displacement in a structure similar to a monolithic ceramic capacitor, you can increase the number of layers of ceramics and internal electrodes to make the structure longer in the stacking direction. Defects such as delamination and cracks occur in the binding step, so the stack length dimension is limited to about 20 mm.
【０００３】セラミックスと内部電極の積層方向に直角
な方向を長さ方向とすれば、長い寸法の積層型圧電アク
チュエータの実現が可能で、各種の構造の提案がなされ
ている。例として、特願平３−２７１９１３号や特願平
５−７１３７５号に記載された積層型圧電アクチュエー
タがある。If the direction perpendicular to the laminating direction of the ceramics and the internal electrodes is taken as the length direction, a long-sized laminated piezoelectric actuator can be realized, and various structures have been proposed. As an example, there is a laminated piezoelectric actuator described in Japanese Patent Application No. 3-27913 and Japanese Patent Application No. 5-71375.
【０００４】この従来の積層型圧電アクチュエータを図
４に示す。図４から明らかな様に、従来の積層型圧電ア
クチュエータは、圧電セラミックシート６と電極層７と
を交互に積層して成る棒杆状の積層体２と、積層体２の
幅方向の一端面ａに設けられた第１側外部電極３と、積
層体２の幅方向の他端面ｂに設けられた第２側外部電極
４とを含み、電極層７は、第１側内部電極８と第２側内
部電極９とから成り、第１側内部電極８は、積層体２の
幅方向に延在し、間隔を開けて圧電セラミックシート６
上に複数配置された第１側横帯状電極８０と、積層体２
の長手方向に延在し、第１側横帯状電極８０に接続され
た第１側縦帯状電極８１とを有し、第２側内部電極９
は、積層体２の幅方向に延在し、間隔を開けて圧電セラ
ミックシート６上に複数配置された第２側横帯状電極９
０と、積層体２の長手方向に延在し、第２側横帯状電極
９０に接続された第２側縦帯状電極９１とを有してい
る。FIG. 4 shows this conventional laminated piezoelectric actuator. As is apparent from FIG. 4, the conventional laminated piezoelectric actuator includes a rod-shaped laminated body 2 formed by alternately laminating piezoelectric ceramic sheets 6 and electrode layers 7, and one end surface in the width direction of the laminated body 2. The first-side external electrode 3 provided on a and the second-side external electrode 4 provided on the other end face b in the width direction of the laminated body 2 are included, and the electrode layer 7 includes the first-side internal electrode 8 and the first-side internal electrode 8. The first-side internal electrode 8 is formed of the second-side internal electrode 9 and extends in the width direction of the laminated body 2, and the first-side internal electrode 8 is spaced from the first-side internal electrode 8.
A plurality of first lateral strip-shaped electrodes 80 arranged on the upper side and the laminated body 2
And a first side vertical strip electrode 81 connected to the first side horizontal strip electrode 80 and extending in the longitudinal direction of the second side internal electrode 9
Are the second lateral strip electrodes 9 extending in the width direction of the laminate 2 and arranged in plural at intervals on the piezoelectric ceramic sheet 6.
0 and a second side vertical strip electrode 91 extending in the longitudinal direction of the laminated body 2 and connected to the second side horizontal strip electrode 90.
【０００５】そして、従来の場合、第１側内部電極８
は、第１側縦帯状電極８１と第１側外部電極３とを接続
する略Ｌ字状の第１側引出導体をも有しており、同様
に、第２側内部電極９も、第２側縦帯状電極９１と第２
側外部電極４とを接続する略Ｌ字状の第２側引出導体９
２を有している。In the conventional case, the first side internal electrode 8
Also has a substantially L-shaped first side lead conductor that connects the first side vertical strip electrode 81 and the first side external electrode 3, and similarly, the second side internal electrode 9 also has a second side Side vertical strip electrode 91 and second
Second L-shaped second side conductor 9 for connecting to the side external electrode 4
Have two.
【０００６】[0006]
【発明が解決しようとする課題】この様に、従来の積層
型圧電アクチュエータは、内部電極と外部電極との接続
の為に、第１側引出導体及び第２側引出導体が必要であ
り、これらは互いに反対方向に延びているので、圧電セ
ラミックシートの引出導体周辺部分は、分極されない。
この為、引出導体周辺部分は、圧電的に不活性であり、
この部分によって単位長さ当りのアクチュエータの変位
量が低下すると言う問題がある。更に、従来の積層型圧
電アクチュエータの場合、第１側及び第２側外部電極
は、単に、積層体の幅方向端面に互いに対向する様に設
けられているだけなので、リード線を外部電極に接続す
る際の自由度が小さく、リード線の取り扱いが煩雑にな
る場合がある。As described above, the conventional laminated piezoelectric actuator requires the first side lead conductor and the second side lead conductor for connecting the internal electrode and the external electrode. Since they extend in opposite directions, the peripheral portions of the lead-out conductor of the piezoelectric ceramic sheet are not polarized.
Therefore, the peripheral portion of the lead conductor is piezoelectrically inactive,
There is a problem that the displacement amount of the actuator per unit length is reduced by this portion. Furthermore, in the case of the conventional laminated piezoelectric actuator, since the first side and second side external electrodes are simply provided so as to face each other on the end faces in the width direction of the laminated body, the lead wire is connected to the external electrode. There is a small degree of freedom when doing, and handling of the lead wire may be complicated.
【０００７】それ故に、本発明の課題は、圧電不活性部
分が無く、単位長さ当りのアクチュエータの変位量の大
きな積層型圧電アクチュエータを提供することにある。Therefore, an object of the present invention is to provide a laminated piezoelectric actuator having no piezoelectric inactive portion and a large displacement amount of the actuator per unit length.
【０００８】また、本発明のもう一つの課題は、リード
線の取り扱いの容易な積層型圧電アクチュエータを提供
することにある。Another object of the present invention is to provide a laminated piezoelectric actuator in which lead wires can be easily handled.
【０００９】[0009]
【課題を解決するための手段】本発明によれば、圧電セ
ラミックシートと電極層とを交互に積層して成る棒杆状
の積層体と、該積層体の幅方向の一端面に設けられた第
１側外部電極と、上記積層体の幅方向の他端面に設けら
れた第２側外部電極とを含み、上記電極層は、第１側内
部電極と第２側内部電極とから成り、上記第１側内部電
極は、上記積層体の幅方向に延在し、間隔を開けて上記
圧電セラミックシート上に複数配置された第１側横帯状
電極と、上記積層体の長手方向に延在し、上記第１側横
帯状電極に接続された第１側縦帯状電極とを有し、上記
第２側内部電極は、上記積層体の幅方向に延在し、間隔
を開けて上記圧電セラミックシート上に複数配置された
第２側横帯状電極と、上記積層体の長手方向に延在し、
上記第２側横帯状電極に接続された第２側縦帯状電極と
を有している積層型圧電アクチュエータにおいて、上記
第１側横帯状電極の少なくとも一部が、上記積層体の幅
方向の一端面で上記第１側外部電極に接続され、上記第
２側外部電極の近傍に位置する上記第１側横帯状電極の
端部と上記第２側外部電極との間に絶縁の為の空隙が設
けられており、上記第２側横帯状電極の少なくとも一部
が、上記積層体の幅方向の他端面で上記第２側外部電極
に接続され、上記第１側外部電極の近傍に位置する上記
第２側横帯状電極の端部と上記第１側外部電極との間に
絶縁の為の空隙が設けられていることを特徴とする積層
型圧電アクチュエータが得られる。According to the present invention, a rod-and-rod-shaped laminate formed by alternately laminating piezoelectric ceramic sheets and electrode layers, and provided on one end face in the width direction of the laminate. A first-side external electrode and a second-side external electrode provided on the other end face in the width direction of the laminated body, wherein the electrode layer includes a first-side internal electrode and a second-side internal electrode, and The first-side internal electrodes extend in the width direction of the laminate, and a plurality of first-side lateral strip-shaped electrodes arranged on the piezoelectric ceramic sheet at intervals and extending in the longitudinal direction of the laminate. A first side vertical strip electrode connected to the first side horizontal strip electrode, the second side internal electrode extending in the width direction of the laminate and spaced apart from the piezoelectric ceramic sheet. A plurality of second lateral strip electrodes arranged on the upper side, and extending in the longitudinal direction of the laminate,
In a laminated piezoelectric actuator having a second side vertical strip electrode connected to the second side horizontal strip electrode, at least a part of the first side horizontal strip electrode is located in a width direction of the laminate. A gap for insulation is provided between the end portion of the first side lateral strip electrode, which is connected to the first side external electrode at the end face and is located in the vicinity of the second side external electrode, and the second side external electrode. At least a part of the second-side lateral strip electrode is provided, is connected to the second-side external electrode at the other end face in the width direction of the laminated body, and is located in the vicinity of the first-side external electrode. A laminated piezoelectric actuator is obtained in which an air gap for insulation is provided between the end of the second lateral strip electrode and the first external electrode.
【００１０】また、本発明によれば、上記積層型圧電ア
クチュエータにおいて、上記積層体の積層方向両端面に
それぞれセラミック層が形成され、上記第１側外部電極
及び上記第２側外部電極が上記セラミック層表面にまで
延在していることを特徴とする積層型圧電アクチュエー
タが得られ、更に、上記積層型圧電アクチュエータにお
いて、上記積層体の積層方向両端面にそれぞれ柔軟性を
有する絶縁層が形成され、上記第１側外部電極及び上記
第２側外部電極が上記絶縁層表面にまで延在しているこ
とを特徴とする積層型圧電アクチュエータが得られる。Further, according to the present invention, in the above-mentioned laminated piezoelectric actuator, ceramic layers are formed on both end surfaces of the laminated body in the laminating direction, and the first side external electrode and the second side external electrode are the ceramics. A laminated piezoelectric actuator is obtained which is characterized in that it extends to the layer surface, and further, in the laminated piezoelectric actuator, flexible insulating layers are formed on both end faces of the laminated body in the laminating direction. A laminated piezoelectric actuator is obtained in which the first-side external electrode and the second-side external electrode extend to the surface of the insulating layer.
【００１１】[0011]
【作用】本発明の積層型圧電アクチュエータの場合、複
数の第１側横帯状電極の少なくとも一部は、第１側外部
電極に接続されているので、第１側縦帯状電極を通じて
全ての第１側横帯状電極は、第１側外部電極に導通する
ことになる。一方、複数の第１側横帯状電極の内、第２
側外部電極の近傍に位置するものは、その端部と第２側
外部電極との間に空隙が設けられているので、第２側外
部電極に接続されることは無く、第１側外部電極と第２
側外部電極とが短絡することが無い。同様に、複数の第
２側横帯状電極の少なくとも一部は、第２側外部電極に
接続されているので、第２側縦帯状電極を通じて全ての
第２側横帯状電極は、第２側外部電極に導通することに
なり、また、複数の第２側横帯状電極の内、第１側外部
電極の近傍に位置するものは、その端部と第１側外部電
極との間に空隙が設けられているので、第１側外部電極
に接続されることは無い。上述の空隙部分は、極小さな
ものであるので、たとえ、この空隙部分が分極されなく
とも問題と成らない。In the laminated piezoelectric actuator of the present invention, at least a part of the plurality of first-side lateral strip electrodes is connected to the first-side external electrode, and therefore all the first-side vertical strip electrodes are provided. The lateral lateral strip electrode is electrically connected to the first external electrode. On the other hand, of the plurality of first side lateral strip electrodes, the second
Since the one located near the side external electrode has a gap between its end and the second side external electrode, it is not connected to the second side external electrode, and the first side external electrode And the second
There is no short circuit with the side external electrode. Similarly, since at least a part of the plurality of second side horizontal strip electrodes is connected to the second side external electrode, all the second side horizontal strip electrodes are connected to the second side external electrode through the second side vertical strip electrodes. Among the plurality of second side lateral strip electrodes located near the first side external electrode, a gap is provided between the end of the second side lateral strip electrode and the first side external electrode. Therefore, it is not connected to the first side external electrode. Since the above-mentioned void portion is extremely small, it does not matter even if this void portion is not polarized.
【００１２】[0012]
【実施例】図１は本発明の第１の実施例に係る積層型圧
電アクチュエータの要部の分解斜視図、図２は図１に示
す積層型圧電アクチュエータの全体の斜視図である。1 is an exploded perspective view of an essential part of a laminated piezoelectric actuator according to a first embodiment of the present invention, and FIG. 2 is a perspective view of the entire laminated piezoelectric actuator shown in FIG.
【００１３】図１及び図２を参照して、この積層型圧電
アクチュエータ１は、積層体２と、第１側外部電極３
と、第２側外部電極４と、セラミック層５とから成る。Referring to FIGS. 1 and 2, the laminated piezoelectric actuator 1 includes a laminated body 2 and a first side external electrode 3.
And a second side external electrode 4 and a ceramic layer 5.
【００１４】積層体２は、略帯状の圧電セラミックシー
ト６と長尺な電極層７とを交互に積層して成り、棒杆状
を呈する。The laminated body 2 is formed by alternately laminating the substantially strip-shaped piezoelectric ceramic sheets 6 and the long electrode layers 7, and has a rod-like shape.
【００１５】電極層７には、第１側内部電極８と第２側
内部電極９とがあり、これらは、交互に積層されてい
る。第１側内部電極８は、積層体２の幅方向に延在し、
一定間隔に圧電セラミックシート６上に複数配置された
第１側横帯状電極８０と、積層体２の長手方向に延在
し、第１側横帯状電極８０に接続された第１側縦帯状電
極８１とから成る。第２側内部電極９は、積層体２の幅
方向に延在し、一定間隔に圧電セラミックシート６に複
数配置された第２側横帯状電極９０と、積層体２の長手
方向に延在し、第２側横帯状電極９０に接続された第２
側縦帯状電極９１とから成る。第２側横帯状電極９０
は、隣り合う第１側横帯状電極８０の間に位置してい
る。The electrode layer 7 has a first-side internal electrode 8 and a second-side internal electrode 9, which are alternately laminated. The first-side internal electrode 8 extends in the width direction of the stacked body 2,
A plurality of first side lateral strip electrodes 80 arranged on the piezoelectric ceramic sheet 6 at regular intervals and a first side vertical strip electrode extending in the longitudinal direction of the laminated body 2 and connected to the first side lateral strip electrodes 80. And 81. The second-side internal electrodes 9 extend in the width direction of the laminated body 2, and the second-side lateral strip electrodes 90 arranged in plural on the piezoelectric ceramic sheet 6 at regular intervals and extend in the longitudinal direction of the laminated body 2. , Second side connected to the second lateral strip electrode 90
It is composed of a side vertical strip electrode 91. Second side lateral strip electrode 90
Are located between the adjacent first side lateral strip electrodes 80.
【００１６】図１において、積層体２の右端近傍にある
第１側横帯状電極８０′は、他の第１側横帯状電極８０
よりも若干短く成っており、これらの第１側横帯状電極
８０′の一端は、積層体２の幅方向の一端面（以下、第
１側の側面と言う）ａにおいて露出し、他端は、積層体
２の幅方向の他端面（以下、第２側の側面と言う）ｂに
おいて露出しないように成っている。また、これらの第
１側横帯状電極８０′の一端は、第１側の側面ａで第１
側外部電極３に接続され、他端は、第２側の側面ｂに露
出しないように成っているので、この他端と第２側外部
電極４との間には空隙ｃが生じている。この空隙ｃによ
って、右端近傍の第１側横帯状電極８０′と第２側外部
電極４との間が絶縁され、これらの第１側横帯状電極８
０′が第２側外部電極４に接続されない様に成ってい
る。これらの第１側横帯状電極８０′以外の第１側横帯
状電極８０は、その両端がそれぞれ第１側の側面ａ、及
び第２側の側面ｂで露出する様に成っている。In FIG. 1, the first lateral strip electrode 80 'near the right end of the laminated body 2 is another first lateral strip electrode 80'.
The one end of each of the first side horizontal strip electrodes 80 'is exposed at one end face (hereinafter referred to as the first side face) a in the width direction of the laminated body 2, and the other end is The other end surface (hereinafter referred to as the second side surface) b of the laminate 2 in the width direction is not exposed. In addition, one end of each of the first lateral strip electrodes 80 'has a first side surface a at the first side.
Since the other end is connected to the side external electrode 3 and the other end is not exposed to the side surface b on the second side, a gap c is formed between the other end and the second external electrode 4. The gap c insulates between the first side lateral strip electrode 80 ′ and the second side external electrode 4 near the right end, and these first side lateral strip electrode 8
0'is not connected to the second side external electrode 4. The first side lateral strip electrodes 80 other than the first side lateral strip electrodes 80 'are configured such that both ends thereof are exposed at the side surface a on the first side and the side surface b on the second side, respectively.
【００１７】第２側横帯状電極９０も第１側横帯状電極
８０と同様である。即ち、図１において、積層体２の右
端近傍にある第２側横帯状電極９０′は、他の第２側横
帯状電極９０よりも若干短く成っており、これらの第２
側横帯状電極９０′の一端は、積層体２の第１側の側面
ａにおいて露出しないように成っており、他端は、積層
体２の第２側の側面ｂにおいて露出するように成ってい
る。また、これらの第２側横帯状電極９０′の一端は、
第２側の側面ｂに露出しないように成っているので、こ
の一端と第１の外部電極３との間には空隙ｄが生じてお
り、この空隙ｄによって、右端近傍の第２側横帯状電極
９０′と第１側外部電極３との間が絶縁され、これらの
第２側横帯状電極９０′が第１側外部電極３に接続され
ない様に成っており、また、他端は、第２側の側面ｂで
第２側外部電極４に接続されている。これらの第２側横
帯状電極９０′以外の第２側横帯状電極９０は、その両
端がそれぞれ第１側の側面ａ、及び第２側の側面ｂで露
出する様に成っている。The second lateral strip electrode 90 is similar to the first lateral strip electrode 80. That is, in FIG. 1, the second lateral strip electrode 90 ′ near the right end of the laminated body 2 is slightly shorter than the other second lateral strip electrodes 90.
One end of the lateral lateral strip electrode 90 ′ is not exposed on the side surface a on the first side of the laminated body 2, and the other end is exposed on the side surface b on the second side of the laminated body 2. There is. In addition, one end of each of the second lateral strip electrodes 90 'is
Since it is formed so as not to be exposed on the side surface b on the second side, a gap d is formed between this one end and the first external electrode 3. Due to this gap d, the second side lateral strip shape near the right end is formed. The electrode 90 'and the first side external electrode 3 are insulated from each other so that the second side lateral strip electrodes 90' are not connected to the first side external electrode 3 and the other end is The side surface b on the second side is connected to the second side external electrode 4. The second side lateral strip electrodes 90 other than the second side lateral strip electrodes 90 'are configured such that both ends thereof are exposed at the side surface a on the first side and the side surface b on the second side, respectively.
【００１８】第１側外部電極３は、短冊状を呈し、第１
側の側面ａに設けられている。第２側外部電極４は、第
２側の側面ｂに設けられている。The first-side external electrode 3 has a strip shape, and
It is provided on the side surface a on the side. The second side external electrode 4 is provided on the side surface b on the second side.
【００１９】セラミック層５は、積層体２の積層方向両
端面、即ち積層体２の上下面にそれぞれ設けられてお
り、積層体２の上下面を絶縁している。The ceramic layers 5 are provided on both end faces of the laminated body 2 in the laminating direction, that is, on the upper and lower surfaces of the laminated body 2, respectively, and insulate the upper and lower surfaces of the laminated body 2.
【００２０】第１側外部電極３は、略帯状で、積層体２
の第１側の側面ａに設けられ、その一端部３０は、積層
体２の上面に設けられたセラミック層５まで延びてい
る。同様に、第２側外部電極４は、略帯状で、積層体２
の第２側の側面ｂに設けられ、その一端部４０は、積層
体２の上面に設けられたセラミック層５まで延びてい
る。これら第１側外部電極３及び第２側外部電極４にそ
れぞれリード線が半田付けされる。The first-side external electrode 3 has a substantially strip shape and has a laminated body 2.
Is provided on the side surface a on the first side of, and one end portion 30 thereof extends to the ceramic layer 5 provided on the upper surface of the laminate 2. Similarly, the second-side external electrode 4 has a substantially strip shape, and
Is provided on the side surface b on the second side of, and one end portion 40 thereof extends to the ceramic layer 5 provided on the upper surface of the laminate 2. Lead wires are soldered to the first side external electrode 3 and the second side external electrode 4, respectively.
【００２１】次に、本実施例の材質、寸法等について説
明する。Next, the material, dimensions, etc. of this embodiment will be described.
【００２２】圧電セラミックシート６は、化学組成式が
Ｐｂ（Ｎｉ・Ｎｂ）0.5 Ｔｉ0.35Ｚｒ0.15Ｏ3 で表され
るチタン酸ジルコン酸鉛系磁器であり、これを出発原料
として、断面寸法５mm×５mm、長さ７０mmの積層型圧電
アクチュエータ１を試作した。圧電セラミックシート６
一層の厚さは、５０ミクロン、積層数は１００層であ
る。一層毎に１／２ピッチずれた第１側横帯状電極８０
と第２側横帯状電極９０の一層当りの数は８５本で、こ
れらは、積層体２の長手方向で等間隔に配置されてい
る。横帯状電極８０，９０の寸法は、幅１００ミクロ
ン、長さは、８０本が５mm、積層体２の長さ方向の右端
近傍の５本の長さが４．５mmで、横帯状電極間隔は、７
００ミクロンである。第１側及び第２側縦帯状電極８
１，９１は、幅２００ミクロン、長さ６８mmである。セ
ラミック層５の厚さは、２５０ミクロンである。The piezoelectric ceramic sheet 6 is a lead zirconate titanate porcelain having a chemical composition formula represented by Pb (Ni.Nb) 0.5 Ti 0.35 Zr 0.15 O 3 , and a cross-sectional dimension of 5 mm × using this as a starting material. A prototype of a laminated piezoelectric actuator 1 having a length of 5 mm and a length of 70 mm was manufactured. Piezoelectric ceramic sheet 6
The thickness of one layer is 50 microns, and the number of laminated layers is 100 layers. First-side lateral strip electrode 80 shifted by 1/2 pitch for each layer
The number of the second side lateral strip electrodes 90 per layer is 85, and these are arranged at equal intervals in the longitudinal direction of the laminate 2. The horizontal strip electrodes 80, 90 have a width of 100 μm, a length of 80 pieces is 5 mm, the length of the five near the right end of the laminate 2 is 4.5 mm, and the distance between the horizontal strip electrodes is 90 mm. , 7
It is 00 microns. First-side and second-side vertical strip electrodes 8
1,91 has a width of 200 μm and a length of 68 mm. The thickness of the ceramic layer 5 is 250 microns.
【００２３】本実施例の積層型圧電アクチュエータの外
径寸法とＤＣ３００ボルトの電圧印加時変位量を表１に
示した。比較のため、特願平５−７１３７５号の構造の
積層型圧電アクチュエータの外径寸法、ＤＣ３００ボル
トの電圧印加時変位量を表１に示す。Table 1 shows the outer diameter dimension of the laminated piezoelectric actuator of this embodiment and the amount of displacement when a voltage of DC 300 V is applied. For comparison, Table 1 shows the outer diameter dimension of the laminated piezoelectric actuator having the structure of Japanese Patent Application No. 5-71375 and the amount of displacement when a voltage of 300 VDC is applied.
【００２４】[0024]
【表１】 [Table 1]
【００２５】表１より明らかなように、本実施例の積層
型圧電アクチュエータ１は、従来の積層型圧電アクチュ
エータに比較し長さが短く、単位長さ当りの変位量が大
きいことが分かる。また、リード線の取り出し方向に選
択性があるので、リード線の取り扱いが容易である。As is clear from Table 1, the laminated piezoelectric actuator 1 of this embodiment has a shorter length and a larger displacement amount per unit length than the conventional laminated piezoelectric actuator. In addition, since the lead-out direction of the lead wire is selective, it is easy to handle the lead wire.
【００２６】図３は本発明の第２の実施例に係る積層型
圧電アクチュエータの斜視図である。FIG. 3 is a perspective view of a laminated piezoelectric actuator according to the second embodiment of the present invention.
【００２７】図３を参照して、この積層型圧電アクチュ
エータ１は、図１及び図２の示す積層型圧電アクチュエ
ータと略同構成であるので、同じ構成部分については同
じ参照番号を付してその説明を省略し、構成の異なる部
分についてのみ説明する。Referring to FIG. 3, since the laminated piezoelectric actuator 1 has substantially the same structure as the laminated piezoelectric actuator shown in FIGS. 1 and 2, the same components are designated by the same reference numerals. The description is omitted, and only different parts of the configuration will be described.
【００２８】積層体２の上下面に設けられている絶縁層
１０，１０は、柔軟性を有するものであり、これら絶縁
層１０，１０の材質として、プラスチックが用いられて
いる。The insulating layers 10 and 10 provided on the upper and lower surfaces of the laminated body 2 are flexible, and plastic is used as the material of these insulating layers 10 and 10.
【００２９】第１側外部電極３は、積層体２の第１側の
側面ａに設けられ、その一端部３０は、積層体２の下面
に設けられた絶縁層に１０まで延びている。第２の外部
電極４は、積層体２の第２側の側面ｂに設けられ、その
一端部は、積層体２の上面に設けられた絶縁層１０にま
で延びている。The first-side external electrode 3 is provided on the side surface a on the first side of the laminated body 2, and one end portion 30 thereof extends up to 10 on the insulating layer provided on the lower surface of the laminated body 2. The second external electrode 4 is provided on the side surface b on the second side of the multilayer body 2, and one end thereof extends to the insulating layer 10 provided on the upper surface of the multilayer body 2.
【００３０】[0030]
【発明の効果】以上説明したように、本発明の積層型圧
電アクチュエータによれば、内部電極と外部電極の接続
のために圧電的に不活性な部分が生じることが無く、単
位長さ当りの変位量を大きくすることができる。As described above, according to the laminated piezoelectric actuator of the present invention, there is no occurrence of a piezoelectrically inactive portion due to the connection between the internal electrode and the external electrode, and the unit length per unit length is reduced. The amount of displacement can be increased.
【００３１】また、本発明の積層型圧電アクチュエータ
は、リード線の取り扱いを容易に行うことができる。Further, in the laminated piezoelectric actuator of the present invention, the lead wire can be easily handled.
【図１】図１は本発明の第１の実施例に係る積層型圧電
アクチュエータの要部の分解斜視図である。FIG. 1 is an exploded perspective view of a main part of a laminated piezoelectric actuator according to a first embodiment of the present invention.
【図２】図２は図１に示す積層型圧電アクチュエータの
全体の斜視図である。FIG. 2 is a perspective view of the entire laminated piezoelectric actuator shown in FIG.
【図３】図３は本発明の第２の実施例に係る積層型圧電
アクチュエータの斜視図である。FIG. 3 is a perspective view of a laminated piezoelectric actuator according to a second embodiment of the present invention.
【図４】図４は従来の積層型圧電アクチュエータの斜視
図である。FIG. 4 is a perspective view of a conventional laminated piezoelectric actuator.
【符号の説明】 １ 積層型圧電アクチュエータ ２ 積層体 ３ 第１側外部電極 ４ 第２側外部電極 ５ セラミック層 ６ 圧電セラミックシート ７ 電極層 ８ 第１側内部電極 ９ 第２側内部電極 ８０ 第１側横帯状電極 ９０ 第２側横帯状電極 ａ 積層体２の幅方向の一端面 ｂ 積層体２の幅方向の他端面 ｃ 空隙 ｄ 空隙[Explanation of reference numerals] 1 laminated piezoelectric actuator 2 laminated body 3 first side outer electrode 4 second side outer electrode 5 ceramic layer 6 piezoelectric ceramic sheet 7 electrode layer 8 first side inner electrode 9 second side inner electrode 80 first Side horizontal strip electrode 90 Second side horizontal strip electrode a One end face in the width direction of the laminate 2 b Other end face in the width direction of the laminate 2 c Gap d Gap
Claims (3)
に積層して成る棒杆状の積層体と、該積層体の幅方向の
一端面に設けられた第１側外部電極と、上記積層体の幅
方向の他端面に設けられた第２側外部電極とを含み、上
記電極層は、第１側内部電極と第２側内部電極とから成
り、上記第１側内部電極は、上記積層体の幅方向に延在
し、間隔を開けて上記圧電セラミックシート上に複数配
置された第１側横帯状電極と、上記積層体の長手方向に
延在し、上記第１側横帯状電極に接続された第１側縦帯
状電極とを有し、上記第２側内部電極は、上記積層体の
幅方向に延在し、間隔を開けて上記圧電セラミックシー
ト上に複数配置された第２側横帯状電極と、上記積層体
の長手方向に延在し、上記第２側横帯状電極に接続され
た第２側縦帯状電極とを有している積層型圧電アクチュ
エータにおいて、上記第１側横帯状電極の少なくとも一
部が、上記積層体の幅方向の一端面で上記第１側外部電
極に接続され、上記第２側外部電極の近傍に位置する上
記第１側横帯状電極の端部と上記第２側外部電極との間
に絶縁の為の空隙が設けられており、上記第２側横帯状
電極の少なくとも一部が、上記積層体の幅方向の他端面
で上記第２側外部電極に接続され、上記第１側外部電極
の近傍に位置する上記第２側横帯状電極の端部と上記第
１側外部電極との間に絶縁の為の空隙が設けられている
ことを特徴とする積層型圧電アクチュエータ。1. A rod-and-rod-shaped laminated body formed by alternately laminating piezoelectric ceramic sheets and electrode layers, a first-side external electrode provided on one end face in the width direction of the laminated body, and the laminated body. A second side external electrode provided on the other end surface in the width direction of the above, the electrode layer includes a first side internal electrode and a second side internal electrode, and the first side internal electrode is the laminated body. A plurality of first-side lateral strip-shaped electrodes that extend in the width direction of the piezoelectric ceramic sheet and are arranged on the piezoelectric ceramic sheet at intervals, and that extend in the longitudinal direction of the laminated body and are connected to the first-side lateral strip-shaped electrode. The second side internal electrodes extend in the width direction of the laminate, and a plurality of second side lateral electrodes are arranged on the piezoelectric ceramic sheet at intervals. A strip-shaped electrode and a second side vertical strip electrode extending in the longitudinal direction of the laminate and connected to the second side horizontal strip electrode. In the multi-layer piezoelectric actuator having at least a part of the first side lateral strip electrode is connected to the first side external electrode at one end face in the width direction of the multilayer body, and the second side external electrode An air gap for insulation is provided between the end of the first lateral strip electrode located near the electrode and the second external electrode, and at least a part of the second lateral strip electrode is provided. An end portion of the second side lateral strip electrode that is connected to the second side external electrode at the other end face in the width direction of the laminate and is located in the vicinity of the first side external electrode, and the first side external electrode. A laminated piezoelectric actuator characterized in that an air gap for insulation is provided therebetween.
セラミック層が形成され、上記第１側外部電極及び上記
第２側外部電極が上記セラミック層表面にまで延在して
いることを特徴とする請求項１記載の積層型圧電アクチ
ュエータ。2. A ceramic layer is formed on each end surface of the laminate in the stacking direction, and the first-side external electrode and the second-side external electrode extend to the surface of the ceramic layer. The laminated piezoelectric actuator according to claim 1.
柔軟性を有する絶縁層が形成され、上記第１側外部電極
及び上記第２側外部電極が上記絶縁層表面にまで延在し
ていることを特徴とする請求項１記載の積層型圧電アク
チュエータ。3. An insulating layer having flexibility is formed on both end faces of the laminate in the stacking direction, and the first-side external electrode and the second-side external electrode extend to the surface of the insulating layer. The laminated piezoelectric actuator according to claim 1, wherein:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16267993A JP3318686B2 (en) | 1993-06-30 | 1993-06-30 | Multilayer piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16267993A JP3318686B2 (en) | 1993-06-30 | 1993-06-30 | Multilayer piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07135346A true JPH07135346A (en) | 1995-05-23 |
| JP3318686B2 JP3318686B2 (en) | 2002-08-26 |
Family
ID=15759240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16267993A Expired - Lifetime JP3318686B2 (en) | 1993-06-30 | 1993-06-30 | Multilayer piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3318686B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004266154A (en) * | 2003-03-03 | 2004-09-24 | Tdk Corp | Stacked piezoelectric element |
-
1993
- 1993-06-30 JP JP16267993A patent/JP3318686B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004266154A (en) * | 2003-03-03 | 2004-09-24 | Tdk Corp | Stacked piezoelectric element |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3318686B2 (en) | 2002-08-26 |
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