JPH07130116A - Load quantity correcting method and load quantity correcting device for loading spring for floating magnetic head assembly - Google Patents

Abstract

PURPOSE:To easily and surely correct the load quantity of the loading spring of a floating magnetic head assembly with which an assembling stage and inspecting stage end by plastically deforming the loading spring fixed at one end. CONSTITUTION:One end of the loading spring 10 mounted with a slider 12 is held and supported by a clamping rod 24 and a supporting part 22 by operating a clamping button 26. A load measuring instrument is risen in this state by means of an actuator to bring the contact surface of a sensitive part 34 into contact with the slider, by which a reverse bending effect is acted on the spring 10 and the spring 10 is plastically deformed. The displacement quantity DELTAZup of the spring 10 of this time is measured by a contactless displacement meter 50 and the load is measured by the load measuring instrument. The displacement quantity and load are determined as desired from a displacement- load curve. The load quantity of the magnetic head assembly with which the assembling stage and inspecting stage end are easily and surely corrected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load correction method for a plate-shaped load spring for a floating magnetic head assembly, and a load correction apparatus suitable for carrying out the load correction method.

[0002]

2. Description of the Related Art A floating magnetic head assembly incorporated in a hard disk drive or the like comprises a plate-shaped load spring, and a slider incorporating the magnetic head is usually attached to one end of the load spring. . In such a floating magnetic head assembly, the amount of load applied to the slider by the load spring is a very important factor in evaluating durability, quality control, and research and development of the floating magnetic head assembly. Therefore, for the floating magnetic head assembly or the load spring alone, measurement of the load amount and load-loss (lo
Ad-loss) tests and other evaluations are being conducted.

The load amount means that one end of the load spring is fixed,
A plane including one end of the fixed load spring (also referred to as a mounting reference surface) and a plane including a surface of the slider facing the magnetic recording medium (hereinafter also referred to as a slider contact surface) and parallel to the mounting reference surface. The force exerted on the slider by the load spring when the distance between them (hereinafter, this distance is referred to as Z-height) is set to a certain value. In the case of the load spring alone, one end of the load spring is fixed, and the distance between the plane including the other end of the load spring and parallel to the mounting reference plane and the mounting reference plane (in this case, this distance is Z -Called height) is a certain value, which is the force exerted by the load spring on the outside. Here, the plane at the other end of the load spring and the mounting reference plane are on the same side of the load spring.

[0004] Z- height and the load amount when the predetermined value (Z _0), called the weight specific load (W _0). When defining the specified load amount (W ₀ ), the predetermined value (Z ₀ ) of the Z-height in the floating magnetic head assembly is usually between the surface of the load spring on which the slider is mounted and the contact surface of the slider. It is set to a value equal to the distance between them and the thickness of the load spring in the part where the slider is attached. Further, the predetermined value (Z ₀ ) of Z-height in the load spring alone is usually
Set to 0. That is, in either case, the predetermined value of Z-height (Z ₀ ) is usually the value of Z-height when the load spring extends substantially straight. However, the predetermined value of Z-height (Z ₀ ) is not limited to this, and can be appropriately defined according to the standard of the load spring or the floating magnetic head assembly.

The load-loss test is an evaluation test of the spring characteristics of a load spring that supports a slider. After measuring the specified load amount (W ₀ ) of the load spring, the load spring is removed from the test apparatus and the load is applied. Reverse bending is applied to the spring using a dedicated jig, then the load spring is attached to the test device again, the specified load (W ₀ ') is measured, and the change in specified load after reverse bending ΔW _This is a test for measuring ₀ (= W ₀ −W ₀ ′).

At present, a single load spring whose prescribed load amount is out of the standard range is discarded as a defective product. Alternatively, the load spring alone is subjected to heat treatment (annealing) while maintaining a predetermined shape, and the specified load amount of the load spring is corrected so that the specified load amount of the load spring falls within the specified range.

[0007]

In recent years, the thinning of magnetic heads has progressed and the magnetic heads have been made smaller and more accurate, and accordingly, the load springs have also been required to be smaller and more accurate. Further, it is difficult for the load spring alone to keep the specified load amount within the standard range. Further, even if the specified load amount of the load spring alone is within the standard range, the load spring is deformed in the assembly process such as mounting the slider and wiring to the load spring, or the inspection process after assembly,
There is also a defect that the specified load amount of the load spring in the floating magnetic head assembly deviates from the standard range. Further, there is a problem that the conventional method of correcting the load amount of the load spring by the heat treatment method cannot be applied to the floating magnetic head assembly which has been assembled.

Further, in the conventional load-loss test, when the load spring is detached from the test apparatus, the specified load amount of the load spring may change, and it is not possible to know an accurate specified load amount. is there.

Therefore, it is an object of the present invention to provide a load spring for a floating magnetic head assembly, and further, without heat treatment.
Suitable for implementing the load amount correction method that can correct the load amount of the load spring in the floating magnetic head assembly that has completed the assembly process such as attaching sliders and wiring to the load spring and various inspection processes, and the implementation of such load amount correction method To provide a load correction device.

[0010]

SUMMARY OF THE INVENTION To achieve the above object, a method of correcting the load amount of a plate-shaped load spring for a floating magnetic head assembly according to the present invention is applied with a load spring fixed at one end. The method is characterized in that it comprises a step of displacing the spring to cause plastic deformation of the load spring, thereby making the load amount of the load spring a desired amount.

In the load spring correction method of the present invention, the load spring may be a single body or a slider may be attached to the other end. That is, the load amount correction method of the load spring of the present invention can be applied to the load spring incorporated in the floating magnetic head assembly or the completed product of the floating magnetic head assembly inspection.

The load spring correction method of the present invention has the following aspects. Aspect 1-A: The amount of displacement of the surface of the slider facing the magnetic recording medium is measured. Aspect 1-B: The amount of displacement of the surface of the load spring to which the slider is attached is measured. Aspect 1-C: The amount of displacement at one predetermined measurement point of the load spring is measured. Aspect 1-D: The displacement amount at a predetermined plurality of measurement points of the load spring is measured, and the bending angle of the load spring is obtained from the measurement result of the displacement amount. Aspect 1-E: An external force for displacing the load spring is measured.

The load amount correction method for the load spring according to the aspects 1-A to 1-C may include the following aspect 4-A. That is, Aspect 4-A: A minute change in the load amount of the load spring with respect to a minute change in the displacement amount of the load spring in the elastic deformation region of the load spring is measured, and the displacement amount to be applied to the load spring is determined based on the measurement result. To do.

The method of correcting the load amount of the load spring according to the aspect 1-D can include the following aspect 7-A.
Aspect 7-A: Measure a minute change in the load amount of the load spring with respect to a minute change in the bending angle of the load spring within the elastic deformation region of the load spring, and determine the amount of displacement to be applied to the load spring based on the measurement result. To do.

The load amount correction method for the load spring according to the aspects 1-A to 1-D can include the following aspect 9-A. That is, Aspect 9-A: The load spring is displaced by a desired displacement amount, and the load spring is held in the displaced state for a predetermined time.

The load amount correction method for the load spring according to the aspect 1-E can include the following aspect 12-A. Aspect 12-A: A desired external force is applied to the load spring to displace the load spring, and the load spring is held in the displaced state for a predetermined time.

In the load amount correction method for the load spring according to the aspects 1-A to 1-C, the following aspect 2-A can be included. Aspect 2-A: Before displacing the load spring, with the one end of the load spring fixed, the initial distance between the plane including the one end of the load spring and the plane including the predetermined portion of the load spring is taking measurement.

In this mode 2-A, as mode 2-B, it is desirable to determine the displacement amount to be applied to the load spring based on the measurement result of the initial distance.

Further, the load amount correction method of the load spring of the aspect 2-A and the aspect 2-B can include the following aspect 2-C. Aspect 2-C: Plastic deformation between a plane including one end of the load spring and a plane including a predetermined portion of the load spring in a state where one end of the load spring is fixed after the load spring is plastically deformed. Measure the distance after deformation.

In this aspect 2-C, the following aspect 2-
It is desirable to include D. Aspect 2-D: The displacement amount to be applied to the load spring is determined based on the measurement result of the distance after the plastic deformation, and the load spring is displaced again based on this displacement amount to cause the load spring to be plastically deformed.

Aspect 2-B and aspect 2-D may include aspect 8-A below. Aspect-8A: The load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

Alternatively, the load amount correction method for the load spring according to the aspects 1-A to 1-C may include the following aspect 3-A. That is, Aspect 3-A: Before displacing the load spring, one end of the load spring is fixed and the other end of the load spring is arranged at a predetermined position, and the load amount of the load spring is measured.

In this mode 3-A, as mode 3-B, the load spring is displaced based on the load amount of the load spring obtained in the step of measuring the load amount of the load spring to cause plastic deformation of the load spring. It is desirable to determine the amount of displacement to be applied to the load spring in the step of performing.

Furthermore, the load amount correction method of the load spring of the aspect 3-A and the aspect 3-B can include the following aspect 3-C. That is, Aspect 3-C: Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation in a state where the other end of the load spring is arranged at the predetermined position. To measure.

In this aspect 3-C, the following aspect 3-
It is desirable to include D. That is, Aspect 3-D: The amount of displacement to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the amount of displacement to make the load spring plastic. Cause deformation.

Aspect 3-B and aspect 3-D may include the following aspect 8-A. Aspect-8A: The load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

Further, the load amount correction method for a load spring according to the aspect 1-D can include the following aspect 5-A. Aspect 5-A: Before displacing the load spring, an initial distance between a plane including one end of the load spring and a plane including a plurality of predetermined portions of the load spring is fixed with one end of the load spring fixed. The measurement is performed, and the initial bending angle of the load spring is obtained from these initial distance values.

In this mode 5-A, as mode 5-B, it is preferable to determine the amount of displacement to be applied to the load spring based on the result of the initial bending angle of the load spring.

Furthermore, in the load amount correcting method of the load spring of the aspects 5-A and 5-B, the following aspect 5-C is provided.
Can be included. Aspect 5-C: Plasticity between a plane including one end of the load spring and a plane including a plurality of predetermined portions of the load spring in a state where one end of the load spring is fixed after the load spring is plastically deformed. The distance after the deformation is measured, and the bending angle after the plastic deformation of the load spring is obtained from the value of the distance after the initial plastic deformation.

In this aspect 5-C, the following aspect 5-
It is desirable to include D. Aspect 5-D: The amount of displacement to be applied to the load spring is determined based on the result of the bending angle after the plastic deformation of the load spring, and the load spring is displaced again based on this displacement amount so that the load spring is plastically deformed. Give rise to.

Aspect 5-B and aspect 5-D may include the following aspect 8-A. Aspect-8A: The load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

Alternatively, the load amount correction method for a load spring according to aspect 1-D may include the following aspect 6-A. Aspect 6-A: Before displacing the load spring, one end of the load spring is fixed and the other end of the load spring is arranged at a predetermined position, and the load amount of the load spring is measured.

In this mode 6-A, as mode 6-B, the load spring is displaced based on the load amount of the load spring obtained in the step of measuring the load amount of the load spring to cause plastic deformation of the load spring. It is preferable to determine the amount of displacement to be applied to the load spring in the step of performing.

Furthermore, in the load amount correction method for the load spring of the aspects 6-A and 6-B, the following aspect 6-C is used.
Can be included. Aspect 6-C: Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation is measured with the other end of the load spring arranged at the predetermined position. To do.

In this aspect 6-C, the following aspect 6-
It is desirable to include D. That is, Aspect 6-D: The amount of displacement to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on this amount of displacement to plasticize the load spring. Cause deformation.

Aspect 6-B and Aspect 6-D can include the following Aspect 8-A. Aspect-8A: The load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

In each of these aspects (1-A to 1-D), the load spring can be displaced by applying an external force to one point of the load spring. Alternatively, the load spring can be displaced by linearly applying an external force to the load spring. The external force is preferably measured with a precision actuator equipped with a load cell. It is desirable to measure the displacement amount using a non-contact displacement meter.

The method of correcting the load amount of the load spring according to the aspect 1-E can include the following aspect 10-A. Aspect 10-A: Before displacing the load spring, one end of the load spring is fixed and the other end of the load spring is arranged at a predetermined position, and the load amount of the load spring is measured.

In this aspect 10-A, aspect 10-B
Therefore, it is desirable to determine the magnitude of the external force to be applied to the load spring based on the load amount of the load spring. Aspect 10
-B can include the following aspects 11-A. Aspect 11-A: The load spring is displaced based on the determined external force to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

Further, this aspect 10-A and aspect 10-B
In the method of correcting the load amount of the load spring of No. 1,
0-C can be included. Aspect 10-C: Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation is measured in a state where the other end of the load spring is arranged at the predetermined position. To do.

In this aspect 10-C, the following aspect 1
It is desirable to include 0-D. Aspect 10-D: The magnitude of the external force to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the magnitude of the external force. Causes plastic deformation of the load spring. Aspect 10-D
Can include the above-mentioned aspect 11-A.

In each of the aspects (1-E), the external force for displacing the load spring can be applied to one point of the load spring. Alternatively, the external force for displacing the load spring can be linearly applied to the load spring. The external force is preferably measured with a precision actuator equipped with a load cell.

In all of the above load spring load correction methods, the load spring may be subjected to heat treatment in the step of causing plastic deformation of the load spring, preferably at the final stage of displacement of the load spring. The heat treatment is, for example, 50
This can be performed by irradiating the bent portion of the load spring with laser light at 0 to 600 ° C. for about 0.2 seconds.
In order to obtain a stable load correction of the load spring, it is desirable to keep the displacement speed constant at least in the elastic region when displacing the load spring. Furthermore, when the load spring is plastically deformed, it is desirable to maintain that state for a certain period of time.

A first aspect of the present invention for achieving the above object
The load amount correction device for a load spring according to the aspect (1) has (a) a load spring mounting surface, a support portion to which the load spring for the floating magnetic head assembly is mounted, and (b) a load spring mounting surface. A contact element that is moved up and down and contacts the load spring at a point or a line to displace the load spring.

Second aspect of the present invention for achieving the above object
The load amount correction device for a load spring according to the aspect (1) has (a) a load spring mounting surface, a support portion to which the load spring for the floating magnetic head assembly is mounted, and (b) a load spring mounting surface. And a contact for displacing the load spring by contacting the load spring at a point, a line, or a surface.

It is desirable that the load amount correction device for a load spring according to the first and second aspects of the present invention further includes a displacement gauge for measuring the amount of displacement of the load spring. In this case, the displacement gauge preferably comprises a non-contact type displacement gauge. Further, it is preferable that a load amount measuring device for measuring a force applied to the contactor by the load spring is further provided, and the contactor is attached to the load amount measuring device.

[0047]

In the load spring load correction method of the present invention, the load spring is displaced with one end of the load spring being fixed to cause plastic deformation of the load spring. Therefore, there is no need to perform heat treatment as in the conventional load amount correction method, and not only the load spring alone, but also the load spring in the floating magnetic head assembly that has completed the assembly and inspection processes, the specified load amount within the predetermined range. Can be modified to

Further, by using a non-contact type displacement gauge and / or a precision actuator, it is possible to give an accurate load amount to the load spring, and an accurate specified load amount of the load spring can be obtained. Moreover, the load spring is unlikely to be defective.

[0049]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described based on embodiments with reference to the drawings.

(First Load Amount Correcting Device) First, a first load amount correcting device for a plate-shaped load spring for a floating magnetic head assembly will be described below. For details of the first load correction device, refer to 1992 Patent Application No. 150977 filed by the present applicant on June 10, 1992.

As shown in FIGS. 1 and 2 which are schematic views with a part cut away, the first load correction device includes a support portion 20.
Is equipped with. The support portion 20 includes a support portion 22, a clamp rod 24, and a clamp button 26. One end of the load spring 10 having the slider 12 attached to the other end is supported by the support 20 while being sandwiched between the clamp rod 24 and the support 22. Load spring 1
In the case of a single unit of 0, one end of the support unit 20 is sandwiched between the clamp rod 24 and the support unit 22.
Supported by. The clamp rod 24 is moved up and down by operating the clamp button 26.

The first load amount correcting device further includes a load amount measuring device 30. The load amount measuring device 30 includes a sensing unit 34 including a load cell and the like, and a conversion unit 32 that converts the force applied to the sensing unit 34 into an electric signal.
The load amount measuring device 30 is attached to an electric lift actuator 36 such as a linear actuator, and can move up and down. Further, the load amount measuring device 30 and the lifting actuator 36 can be moved in the front-rear direction and the left-right direction so that the contact position of the sensing unit 34 with the slider 12 can be appropriately set. In addition, in FIG.
Although an electric lifting actuator is shown as the lifting means of the load amount measuring device 30, a manual lifting actuator may be used.

In the first load correction device, the slider 12 is in contact with the contact surface 34A of the sensing portion 34,
The load amount measuring device 30 senses the load amount applied to the slider 12 by the load spring 10 as pressure. Load measurement device 3
The load amount sensed as pressure by 0 is converted by the conversion unit 32.
Is converted into an electric signal by and is displayed on the load amount display section 40 provided in the main body 1 via the amplifier 38.

The first load correction device is further provided with a non-contact type displacement gauge 50. Examples of the non-contact type displacement gauge 50 include ultrasonic type, auto focus type, eddy current type, electrostatic capacitance type, magnetic type displacement gauges as well as optical displacement gauges such as laser displacement gauges. To be The displacement meter 50 is supported by a base having a slide mechanism, for example, a support body 52 attached to an electric slide table 54. The displacement amount measured by the displacement meter 50 is displayed on the displacement amount display unit 42 provided on the main body 1. A contact type displacement meter such as a digital micrometer can be used instead of the non-contact type displacement meter.

Load spring 10, slider 12, support portion 2
2, an enlarged view of the arrangement state of the clamp rod 24, the sensing unit 34, the displacement meter 50, etc. is shown in FIG. With the displacement gauge 50,
The position (height) of the mounting reference surface 10A of the load spring 10, which is substantially the same surface as the load spring mounting surface 22A of the support portion 22, the position (height) of the measurement point 10C of the load spring 10, or the load amount measuring device 30. The position (height) of the contact surface 34A of the sensing unit 34 can be measured. Further, based on these measurement results, the amount of displacement of the measurement point 10C of the load spring 10 and the sensing unit 34
Amount of displacement of the contact surface 34A, or the mounting reference surface 10A
The distance (Z-height, which is indicated by "Z" in FIG. 2) between the contact surface 34A and the contact surface 34A of the sensing unit 34 can be measured.

For example, when the non-contact type displacement gauge 50 is a laser displacement gauge, the Z-height is measured by the displacement gauge 50 as follows. First, the sensing unit 34 of the load amount measuring device 30 is removed from the conversion unit 32, and as shown in FIG. 3A, the block gauge 44 is attached to the upper surface 1A of the main body 1 corresponding to the position where the sensing unit 34 is attached. Deploy. The block gauge 44 includes an upper surface 1A of the main body 1 and a support portion 22.
It has the same height as the height difference between the load spring mounting surface 22A and the load spring mounting surface 22A. Next, the block gauge 44 is irradiated with laser light from the displacement gauge 50, and the distance between the block gauge 44 and the displacement gauge 50 is measured by the laser light LS ₀ , which is set as the reference value A ₀ . The reference value A ₀ corresponds to the distance (height) from the displacement gauge 50 to the mounting reference surface 10A of the load spring 10.

After that, as shown in FIG. 3B, the sensing unit 34 is attached to the conversion unit 32, and the load amount measuring device 30 is moved by an elevating actuator (not shown in FIG. 3).
It is moved up and down as shown by the arrow M in FIG. Then, by irradiating the displacement meter 50 at a desired position with laser light sensing part 34 measures the distance Z ₁ between the sensing part 34 and the displacement meter 50 by the laser beam LS _1, the laser beam LS Distance difference (height difference) from the distance measured at ₀ (reference value A ₀ ).
Calculate ΔZ ₁ (= Z ₁ −A ₀ ). This ΔZ ₁ corresponds to the Z-height value. Further, by repeating this operation, various Z-height values can be obtained.

When the height of the sensing portion 34 is changed in the first load amount correction device shown in FIGS. 1 and 2, the force (load amount) applied by the load spring 10 to the sensing portion 34 is naturally obtained. ) Changes. The amount of load measured by the sensing unit 34 and the sensing unit 3 for the mounting reference surface 10A of the load spring.
The Z-height corresponding to the displacement amount in the height direction of 4 is sent to the calculation unit via an amplifier (not shown), and is displayed on the displacement amount display unit 42 as desired data.

The LB-400 manufactured by KEYENCE CORPORATION is used as the non-contact type displacement gauge 50 as described above, the LB-1000 manufactured by KEYENCE CORPORATION is used as the amplifier, and the RV2-52 manufactured by KEYENCE Corporation is used as the arithmetic unit. You can

In the description of the first load amount correction device, the displacement amount-load amount of the load spring 10 to which the slider 12 is attached has been described, but the same measurement can be performed with the load spring 10 alone. As described above, in the case of the load spring 10 to which the slider 12 is attached, an external force is applied to the slider 12 by the displacement of the sensing unit 34,
In the case of the load spring 10 alone, an external force is applied to the other end of the load spring 10 by the displacement of the sensing unit 34.

First, a method of correcting the load amount of the load spring using the first load amount correcting device shown in FIGS. 1 and 2 will be described below.

(First Load Amount Correction Method for Load Spring) This first load amount correction method for a load spring is an aspect of the load amount correction method for a plate-shaped load spring for a floating magnetic head assembly according to the present invention. Regarding 1-A or 1-B. That is, Aspect 1-A: The amount of displacement of the surface of the slider facing the magnetic recording medium is measured. Or aspect 1-B: The amount of displacement of the surface of the load spring to which the slider is to be attached is measured. Here, aspect 1-A or aspect 1-B
In other words, the displacement amount of the sensing unit 34 of the load amount measuring device 30 is measured. Specified load of load spring (W
_When there is little variation in ₀ ), this first load amount correction method is effective.

In the first load amount correction method for the load spring, the displacement amount ΔZ _UP of the sensing portion 34 of the load amount measuring device 30 is measured by the displacement meter 50. That is, the non-contact type displacement meter 50 is arranged so that the position (height) of the sensing unit 34 of the load amount measuring device 30 can be measured. In the first load amount correction method, the displacement amount ΔZ of the sensing unit 34 of the load amount measuring device 30.
It is desirable to previously obtain the relationship between _UP and the specified load amount of the load spring 10. Thereby, the load amount of the load spring can be corrected.

The load spring may be a single unit, a slider may be attached to the other end, or a load spring incorporated in the floating magnetic head assembly. In the first load amount correction method, the other end of the load spring or the vicinity of the other end is displaced.

In the first to sixth load amount correcting methods, it is not necessary to measure the load amount.
Therefore, in the first load amount correction device, the load measuring unit 3
Instead of 0, a plate having a contact surface with a load spring or a slider may be attached to the tip of the elevating actuator 36. Further, these load spring correction methods do not include the electric slide table 54,
That is, it is also possible to use the first load amount correction device in which the positional relationship of the displacement gauge 50 with respect to the load spring is fixed.

The first load amount correction method of the load spring will be described below with reference to the schematic diagram of FIG. 4 and FIG. 5 showing the relationship between the displacement amount and the load amount.

[Step-100] First, the clamp button 2
6 to operate the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 in the floating magnetic head assembly so that the clamp rod 24 and the support portion 2 are connected.
It is supported by being sandwiched by 2 (see FIG. 4A).

[Step-110] Next, the load spring 10 is subjected to a reverse bending action. Specifically, the load amount measuring device 30 is moved upward by an appropriate amount by the elevating actuator, and the contact surface 34A of the sensing portion 34 of the load amount measuring device 30 and the slider 12 (in the case of a load spring alone, the load spring The other end)
Contact with.

[Step-120] Next, as schematically shown in FIG. 4B, the load amount measuring device 30 is moved further upward by a predetermined amount (ΔZ _UP ). In this case, for example, the predetermined amount ΔZ _UP means a constant upward movement amount of the load amount measuring device 30 based on the predetermined value Z ₀ of the Z-height. That is, when the distance Z between the sensing unit 34 and the displacement meter 50 is measured by the displacement meter 50, the predetermined amount ΔZ _UP is (Z
_0- Z). By the upward movement of the load amount measuring device 30, the load spring 10 warps upward, and the load spring 1
At 0, plastic deformation occurs.

It is desirable to previously obtain the relationship between the predetermined amount ΔZ _UP (= Z ₀ −Z) for moving the load amount measuring device 30 upward and the specified load amount of the load spring 10. That is,
Explaining with reference to FIG. 5A showing the relationship between the displacement amount and the load amount, the displacement amount ΔZ when the standard value W _0a 'of the specified load amount is obtained.
_UPa , or the displacement amount ΔZ _UPb for obtaining the standard value W _0b ′ of the specified load amount, is preferably obtained in advance by a test. In addition, in FIG. 5A, [Step-110]
The state of is represented by a point O ', and the state of [Step-120] is represented by a point Ka or Kb. In FIG. 5A, an example is shown in which two different specified load amounts are achieved. Accordingly, if the load amount measuring device 30 is moved upward by a predetermined amount ΔZ _UP (ΔZ _UPa or ΔZ _UPb in FIG. _5A ), the specified load amount W of the load spring 10 is increased.
₀ (W _0a 'or W _0b ' in FIG. 5A) can be within the standard range. In this case, the load spring 10 is held in the same state at the point Ka or Kb.

Alternatively, the displacement amount-load amount characteristics of the load spring immediately after being manufactured through the press working and the subsequent heat treatment step have the characteristics shown by the broken line A in FIG. 5B. However, in some cases, the load spring receives the bending action at the time of assembling the floating magnetic head, and the state of [Step-110] is the state represented by the point O ″. If the load amount measuring device 30 is moved upward by a predetermined amount ΔZ _UP and brought to the state of [Step-120] represented by the point Kb, the specified load amount W ₀ ′ of the load spring 10 is kept within the standard range. You can

[Step-130] After the specified load amount of the load spring is corrected, the load amount measuring device 30 is moved downward so that the contact surface of the load amount measuring device 30 moves to the slider 12 (in the case of the load spring alone, the load is applied). Away from the other end of the spring). The load spring 10
Since the other end of the load spring is detached from the support portion 20 and the other end of the load spring is removed from the load correction device is substantially the same in each correction method described below, description thereof will be omitted in some cases. .

Aspect 9-A can be included in the first load amount correction method for the load spring. That is, Aspect 9-A: The load spring is displaced by a desired displacement amount, and the load spring is held in the displaced state for a predetermined time.

As shown in FIG. 5C, the load spring in the O'state is displaced by a desired displacement amount, and the load spring 10 is held in the displaced state (indicated by point K) for a predetermined time. In this case, the specified load amount changes depending on the holding time. By utilizing such characteristics, the load spring can be displaced to a desired displacement ΔZ.
If the load spring is displaced by _UP and is held in the displaced state for a predetermined time, the standard value W _0a ′ or W _{0 b} ′ of the specified load amount can be obtained depending on the length of the holding time. The desired displacement amount can be constant.

(Second Load Correction Method for Load Spring) FIG. 6
The second load amount correction method for the load spring schematically shown in FIG. 2 is a modification of the first load amount correction method and includes Aspect 2-A.
Aspect 2-A: Before displacing the load spring, with the one end of the load spring fixed, the initial distance between the plane including the one end of the load spring and the plane including the predetermined portion of the load spring is taking measurement.

Even in the second load amount correcting method, the non-contact type displacement gauge 50 is arranged so that the position (height) of the sensing portion 34 of the load amount measuring device 30 can be measured. The distance between the displacement meter 50 and the sensing unit 34 is measured.

The second load amount correcting method differs from the first load amount correcting method in that one end of the load spring is fixed and one end of the load spring is included before the load spring 10 is displaced. It is at a point including measuring an initial distance between the plane and a plane including a predetermined portion of the load spring (Aspect 2-A). In the second load amount correction method, it is desirable to previously obtain the relationship between the initial distance of the sensing unit 34, the displacement amount ΔZ _{UP in the} height direction, and the specified load amount of the load spring 10. Thereby, the load amount of the load spring can be corrected.

Further, in the second load amount correction method,
It is desirable to include Aspect 2-B. Aspect 2-B: Determine the amount of displacement to be applied to the load spring based on the measurement result of the initial distance.

A second load amount correction method for the load spring will be described below with reference to the schematic diagram of FIG. 6 and FIG. 7 showing the relationship between the displacement amount and the load amount.

[Step-200] First, the clamp button 2
6 to operate the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 in the floating magnetic head assembly so that the clamp rod 24 and the support portion 2 are connected.
It is supported by being sandwiched by 2.

[Step-210] Between the non-contact type displacement gauge 50 and the sensing unit 34 when the load measuring device 30 is raised and the contact surface 34A of the sensing unit 34 comes into contact with the slider 12. The distance Z _F0 is measured (see FIG. _6A ). The difference between the initial distance Z _F0 and the predetermined value Z ₀ of Z-height described above (the difference in height, Z _F0 −Z ₀ ) is also called the initial distance difference ΔZ _F0 . Here, the mounting reference surface 10A of the load spring 10 corresponds to a plane including one end of the load spring.
In addition, the slider 1 that contacts the contact surface 34A of the sensing unit 34
A plane including the portion of the two contact surfaces and parallel to the mounting reference surface 10A corresponds to a plane including a predetermined portion of the load spring.

This state in the two types of load springs C and D having different characteristics is shown by the point Z _F0c or the point Z _F0d in FIG.

[Step-220] Then, as shown in FIG. 6B, the load measuring device 30 is moved upward by a predetermined amount (ΔZ).
_UP ) Move. In this case, for example, the predetermined amount ΔZ _UP is the load amount measuring device 30 based on the initial distance Z _F0.
Means a certain amount of upward movement. That is, the sensing unit 34
When the distance Z between the displacement meter 50 and the displacement meter 50 is measured by the displacement meter 50, the predetermined amount ΔZ _UP is represented by (Z _F0 −Z). By moving the load amount measuring device 30 upward, the load spring 1
When 0 is warped upward, the load spring 10 is plastically deformed. This state is indicated by point Kc or point Kd in FIG. Further, the displacement amount is indicated by ΔZ _UPc or ΔZ _{U Pd} .
That is, the value obtained by subtracting the distance between the displacement gauge 50 and the predetermined measurement point 10C of the load spring 10 from the distance Z _F0 is ΔZ _UP . The predetermined amount ΔZ _UP may be a constant upward movement amount (ΔZ _UP = Z ₀ −Z) of the load amount measuring device 30 based on the predetermined value Z ₀ of the Z-height. In this case,
The time for holding the load spring 10 in the state of the point Kc or Kd is the same time.

It is desirable that the displacement amount ΔZ _UP be determined based on the initial distance Z _F0 or the initial distance difference ΔZ _F0 . Thereby, a more appropriate value of the displacement amount ΔZ _UP can be determined. That is, it is desirable to determine the value of ΔZ _UPc or ΔZ _UPd based on the values of Z _F0c and Z _F0d in FIG. 7A, for example.

In the second load amount correcting method, the load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time (aspect 8-A). Can be included. That is, the load amount measuring device 30 is moved upward by a predetermined amount (ΔZ _UPc 'or ΔZ
_UPd ') Move. This state is indicated by a point Kc 'or a point Kd' in FIG. 7 (B). Then, the time for holding the load spring 10 in the state of the point Kc ′ or the point Kd ′ is Z _F0c or the point Z
_Change depending on _F0d . As a result, the standard value W ₀ ′ of the specified load amount can be obtained depending on the length of the holding time.

(Third Load Correction Method for Load Spring) The third load correction method for the load spring is a modification of the second load correction method for the load spring and includes aspect 2-C. Aspect 2-C: Plastic deformation between a plane including one end of the load spring and a plane including a predetermined portion of the load spring in a state where one end of the load spring is fixed after the load spring is plastically deformed. Measure the distance after deformation.

In this case, it is desirable to further include mode 2-D. Aspect 2-D: The displacement amount to be applied to the load spring is determined based on the measurement result of the distance after the plastic deformation, and the load spring is displaced again based on the displacement amount to cause the load spring to be plastically deformed.

Also in the third load amount correcting method, the non-contact type displacement gauge 50 is arranged so that the position (height) of the sensitive portion 34 of the load amount measuring device 30 can be measured, and the non-contact type displacement is arranged. The distance between the total 50 and the contact surface 34A of the sensing unit 34 is measured.

In the third load amount correction method, the initial distance Z _F0 or the initial distance difference ΔZ _F0 of the sensing unit 34, the displacement amount in the height direction ΔZ _UP , the specified load amount of the load spring 10 and the plastic deformation It is desirable to obtain the relationship of the distances in advance. Thereby, the load amount of the load spring can be corrected.

The third load amount correcting method for the load spring will be described below with reference to the schematic view of FIG.

[Step-300] to [Step-320] These steps are substantially the same as [Step-200] to [Step-220] in the second load correction method,
Detailed description is omitted.

[Step-330] [Step-320]
The load measuring device 30 is moved downward to measure the distance after the plastic deformation between the plane including one end of the load spring and the plane including a predetermined portion of the load spring. Specifically, the sensing unit 34 of the load amount measuring device 30 is separated from the slider 12 (the other end of the load spring in the case of the load spring alone). That is, the load spring 1
The other end of 0 is set to the free state again. Then, the sensing unit 34
The displacement gauge 50 and the sensing unit 3 at the moment when the
Displacement meter 5 is used to measure the distance Z _F0 '(distance after plastic deformation)
Measure at 0. The mounting reference surface 10A of the load spring 10 is
It corresponds to a plane including one end of the load spring. Further, a plane including the contact surface of the slider and parallel to the mounting reference surface 10A is
It corresponds to a plane including a predetermined portion of the load spring. The difference between the distance Z _F0 'and the predetermined value Z ₀ of the Z-height described above (the difference in height, Z _F0 ' -Z ₀ ) is the distance difference after plastic deformation ΔZ _F0 '. Also called (see FIG. 8).

It is desirable to previously find the relationship between the distance Z _F0 'after plastic deformation or the distance difference ΔZ _F0 ' after plastic deformation and the specified load amount of the load spring 10. By this, the third
In the load correction method of (1), since the distance Z _F0 'after the plastic deformation of the load spring is measured, the value of the load after plastic deformation is
It can be easily confirmed that it is within the standard range.

Alternatively, in the third load amount correction method, the initial load amount value W ₀ and the initial distance difference Δ are previously set.
It is desirable to find the relationship among Z _F0 , the displacement amount ΔZ _UP in the height direction of the sensing portion 34, the post plastic deformation distance difference ΔZ _F0 ′, and the post plastic deformation load amount W ₀ ′. Then, the value when the value of the distance Z _F0 'or after the plastic deformation range difference [Delta] Z _F0' after the plastic deformation is outside the range of standard distance after the plastic deformation Z _F0 'or plastically deformed range difference [Delta] Z _F0' [Process-320] and [Process-320] as necessary so that
330] is repeated. As a result, the value of the load amount after plastic deformation can be surely kept within the standard range. This is shown in FIG. In FIG. 9A, by changing the load spring 10 to ZF0, K1, ZF01 ', K1, K2, and ZF02', the value of the load amount after plastic deformation can be surely kept within the standard range. .

In this case, when performing the [Step-310] of the third load correction method, the following [Step-320]
(That is, the displacement amount ΔZ _UP to be applied to the load spring 10 in the first [step-320]) may be determined,
The displacement amount ΔZ _UP (corresponding to ΔZ _UP1 in FIG. 9A) does not have to be determined. Furthermore, in the third load amount correction method, whether the value of the distance Z _F0 'after plastic deformation or the distance difference ΔZ _F0 ' after plastic deformation is out of the standard range is determined in [Step-330]. Since it can be confirmed by the above, [Step-310] can be omitted.

In the third load amount correction method, based on the value of the distance after plastic deformation Z _F0 'or the distance difference after plastic deformation ΔZ _F0 ' obtained in [Step-330], the following [ A step (320-) in which a displacement amount to be applied to the load spring is determined, the load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displacement state for a predetermined time (aspect 8- A) can be included. This is shown in FIG. 9 (B). In FIG. 9B, the load spring 10 is set to ZF0, K1 ', K2', ZF01 ', K.
By changing 1 ', K3', and ZF02 ', the value of the load amount after plastic deformation can be surely kept within the standard range. The amount of load after plastic deformation depends on the holding time of the load spring 10 in the state of the point K1 '.

(Fourth Load Correction Method of Load Spring) This fourth load correction method of the load spring is an embodiment of the load correction method of the plate-shaped load spring for the floating magnetic head assembly of the present invention. Regarding 1-C. That is, Aspect 1-C: The displacement amount at one predetermined measurement point of the load spring is measured. When the specified load amount (W ₀ ) of the load spring has little variation, this fourth load amount correction method is effective.

In the fourth load amount correcting method for the load spring, the displacement amount ΔH _UP in the height direction at the predetermined measurement point 10C of the load spring 10 is measured by the displacement meter 50. This point is different from the first load amount correction method. In the fourth load amount correction method, it is desirable to previously obtain the relationship between the displacement amount ΔH _UP in the height direction at the predetermined measurement point 10C of the load spring 10 and the specified load amount of the load spring 10. Thereby, the load amount of the load spring can be corrected. Hereinafter, the fourth load amount correction method for the load spring will be described with reference to the schematic diagram of FIG. 10.

The load spring may be a single unit, a slider may be attached to the other end, or a load spring incorporated in the floating magnetic head assembly. Also in this first load amount correction method, the other end of the load spring or the vicinity of the other end is displaced.

[Step-400] First, the clamp button 2
6 to operate the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 in the floating magnetic head assembly so that the clamp rod 24 and the support portion 2 are connected.
It is supported by being sandwiched by 2 (see FIG. 10A).

[Step-410] Next, the load spring 10 is given a reverse bending action. Specifically, the load amount measuring device 30
Is moved upward by an appropriate amount to bring the contact surface of the load measuring device 30 into contact with the slider 12 (the other end of the load spring in the case of the load spring alone).

[Step-420] Then, FIG.
As schematically shown in FIG. 3, the load amount measuring device 30 is moved further upward by a predetermined amount. Here, the predetermined amount ΔH _UP is a constant amount of upward movement of the load amount measuring device 30 with reference to the reference value A ₀ . That is, the distance H between the predetermined measuring point 10C of the load spring 10 and the displacement meter 50 is set to the displacement meter 50.
When measured by, the predetermined amount ΔH _UP is represented by (A ₀ −H). The upward movement of the load measuring device 30 causes the load spring 10 to warp upward, and the load spring 10 is plastically deformed.

It is desirable to previously obtain the relationship between the predetermined amount ΔH _UP (= A ₀ -H) for moving the load measuring device 30 upward and the specified load of the load spring 10. That is,
The displacement amount ΔH _UP when obtaining the standard value of the specified load amount may be obtained in advance by a test. Thus, by moving the load amount measuring device 30 upward by the predetermined amount ΔH _UP , the specified load amount of the load spring 10 can be kept within the standard range.

[Step-430] After the specified load amount of the load spring is corrected, the load amount measuring device 30 is moved downward so that the contact surface of the load amount measuring device 30 moves to the slider 12 (in the case of the load spring alone, the load is applied). Away from the other end of the spring).

In the fourth load amount correcting method of the load spring, similarly to the first load amount correcting method, the load spring is displaced by a desired displacement amount, and the load spring is brought into the displaced state. Can be included for a predetermined time (aspect 9-A).

(Fifth Load Amount Correction Method of Load Spring) A fifth load amount correction method of the load spring is a modification of the fourth load amount correction method of the load spring and includes Aspect 2-A. Aspect 2-A: Before displacing the load spring, with the one end of the load spring fixed, the initial distance between the plane including the one end of the load spring and the plane including the predetermined portion of the load spring is taking measurement.

In the fifth load amount correcting method for the load spring, it is desirable to further include Aspect 2-B. Aspect 2-B: Determine the amount of displacement to be applied to the load spring based on the measurement result of the initial distance.

In the fifth load amount correction method for the load spring, the displacement amount ΔH _UP in the height direction at the predetermined measurement point 10C of the load spring 10 is measured by the displacement meter 50. This point is similar to the fourth load amount correction method.

The fifth load amount correction method is different from the fourth load amount correction method in that one end of the load spring is fixed and one end of the load spring is included before the load spring 10 is displaced. It is at a point including measuring an initial distance between the plane and a plane including a predetermined portion of the load spring (Aspect 2-A). In the fifth load amount correction method, the initial distance at the predetermined measurement point 10C of the load spring 10 and the displacement amount Δ in the height direction Δ
It is desirable to previously obtain the relationship between H _UP and the specified load amount of the load spring 10. Thereby, the load amount of the load spring can be corrected.

Further, the displacement amount to be applied to the load spring is determined on the basis of the measurement result of the initial distance (aspect 2-
B) is desirable.

A fifth load amount correction method for the load spring will be described below with reference to the schematic view of FIG.

[Step-500] First, the clamp button 2
6 to operate the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 in the floating magnetic head assembly so that the clamp rod 24 and the support portion 2 are connected.
It is supported by being sandwiched by 2.

[Step-510] Next, before displacing the load spring 10, with one end of the load spring fixed, between the plane including one end of the load spring and the plane including a predetermined portion of the load spring. Measure the initial distance. That is, the load spring 1
With the other end of 0 being free, the initial distance H between the non-contact type displacement gauge 50 arranged above the predetermined measurement point 10C of the load spring 10 and the predetermined measurement point 10C of the load spring 10 Measure _F0 . The difference between the initial distance H _F0 and the reference value A ₀ described above (the difference in height, which is H _F0 −A ₀ ) is also called the initial distance difference ΔH _F0 ((A in FIG. 11). )reference). Here, the mounting reference surface 10A of the load spring 10 corresponds to a plane including one end of the load spring. A plane including the predetermined portion 10C of the load spring and parallel to the mounting reference surface 10A corresponds to a plane including the predetermined portion of the load spring.

[Step-520] After that, the load spring 10 is given a reverse bending action. Specifically, the load amount measuring device 30
Is moved upwards, and the sensing unit 34 of the load measuring device 30 is moved.
And the slider 12 (in the case of the load spring alone, the other end of the load spring) are brought into contact with each other. Then, the load measuring device 30 is moved further upward by an appropriate amount. The upward movement of the load amount measuring device 30 causes the load spring 10 to warp upward, and the load spring is plastically deformed. At this time, the load spring 10
Amount of displacement ΔH _UP in the height direction at a predetermined measurement point 10C of
Is measured by the displacement meter 50 (see FIG. 11B). Note that ΔH _UP is based on the distance H _F0 . That is, the value obtained by subtracting the distance H between the displacement gauge 50 and the predetermined measurement point 10C of the load spring 10 from the distance H _F0 is ΔH _UP . Further, ΔH _UP may be obtained with reference value A ₀ as a reference.
That is, the value obtained by subtracting the distance between the displacement gauge 50 and the predetermined measurement point 10C of the load spring 10 from the reference value A ₀ can be set as ΔH _UP .

It is desirable that this displacement amount ΔH _UP be determined based on the initial distance H _F0 or the initial distance difference ΔH _F0 . This makes it possible to determine a more appropriate value for the displacement amount ΔH _UP .

In the fifth load correction method, the second
In the same manner as described in the load amount correction method of No. 6, a mode in which the load spring is displaced by the determined displacement amount to be applied to the load spring and the load spring is held in the displaced state for a predetermined time (Aspect 8)
-A) can be included. That is, the initial distance H _F0
Alternatively, the displacement amount ΔH _UP is determined based on the initial distance difference ΔH _F0 , the load spring is displaced by this displacement amount ΔH _UP, and the load spring is held in that displacement state for a predetermined time.

(Sixth Load Amount Correction Method of Load Spring) A sixth load amount correction method of the load spring is a modification of the fifth load amount correction method of the load spring, and further includes aspect 2-C. . Aspect 2-C: Plastic deformation between a plane including one end of the load spring and a plane including a predetermined portion of the load spring in a state where one end of the load spring is fixed after the load spring is plastically deformed. Measure the distance after deformation.

Moreover, the aspect 2-D can be included. Aspect 2-D: The displacement amount to be applied to the load spring is determined based on the measurement result of the distance after the plastic deformation, and the load spring is displaced again based on this displacement amount to cause the load spring to be plastically deformed.

In the sixth load amount correcting method, the load spring 10
It is desirable to previously obtain the relationship among the initial distance difference ΔH _{F0 at} the predetermined measurement point 10C, the displacement amount in the height direction ΔH _UP , the specified load amount of the load spring 10, and the distance after plastic deformation. Thereby, the load amount of the load spring can be corrected.

A sixth load amount correcting method for the load spring will be described below with reference to the schematic view of FIG.

[Step-600] to [Step-620] These steps are substantially the same as [Step-500] to [Step-520] in the fifth load correction method,
Detailed description is omitted.

[Step-630] After [Step-620],
The load measuring device 30 is moved downward to measure the distance after the plastic deformation between the plane including one end of the load spring and the plane including a predetermined portion of the load spring. Specifically, the sensing unit 34 of the load amount measuring device 30 is separated from the slider 12 (the other end of the load spring in the case of the load spring alone). That is, the load spring 1
The other end of 0 is set to the free state again. The distance H _F0 'between the displacement gauge 50 and the predetermined measurement point 10C of the load spring 10
The (distance after plastic deformation) is measured by the displacement meter 50. Here, the mounting reference surface 10A of the load spring 10 corresponds to a plane including one end of the load spring. Also, the predetermined portion 1 of the load spring
A plane including 0C and parallel to the mounting reference plane 10A corresponds to a plane including a predetermined portion of the load spring. This distance H
The difference between _F0 'and the reference value A ₀ described above (the difference in height,
H _F0 '-A ₀ ) is also referred to as distance difference after plastic deformation ΔH _F0 ' (see FIG. 12).

It is desirable to previously find the relationship between the distance H _F0 'after plastic deformation or the distance difference ΔH _F0 ' after plastic deformation and the specified load amount of the load spring 10. By this, the sixth
In the load correction method of _{No. 1, since} the distance H _F0 'after the plastic deformation of the load spring is measured, the value of the load after plastic deformation is
It can be easily confirmed that it is within the standard range.

Alternatively, in the sixth load amount correction method, the initial load amount value W ₀ and the initial distance difference Δ are previously set.
It is desirable to find the relationship between H _F0 , the displacement amount ΔH _UP in the height direction at a predetermined measurement point 10C of the load spring 10, the post plastic deformation distance difference ΔH _F0 ′, and the post plastic deformation load amount W ₀ ′. If the value of the post-plastic deformation distance H _F0 'or the post-plastic deformation distance difference ΔH _F0 ' is outside the standard range, the value of the post-plastic deformation distance H _F0 'or the post-plastic deformation distance difference ΔH _F0 ' [Step-620] and [Step-630] are repeated as necessary so that the value is within the range of the standard. As a result, the value of the load amount after plastic deformation can be surely kept within the standard range.

In this case, when executing the [Step-610] of the sixth load amount correction method, the following [Step-620]
(That is, the displacement amount ΔH _UP to be applied to the load spring 10 in the first [step-620]) may be determined,
The displacement amount ΔH _UP need not be determined. Furthermore, the sixth
In the load correction method of, the distance H _F0 'after plastic deformation
Alternatively, since it is possible to confirm in [step-630] whether the value of the distance difference ΔH _F0 'after plastic deformation is out of the standard range, [step-610] can be omitted.

Incidentally, in the sixth load quantity correction method,
In the same manner as described in the method of correcting the load amount, the load spring is displaced by the displacement amount to be applied to the load spring determined based on the value of the distance difference ΔH _F0 'after plastic deformation, and the load spring is set to the predetermined displacement state. A mode for holding for a time (mode 8-A) can be included.

(Seventh Load Amount Correction Method for Load Spring) A seventh load amount correction method for the load spring relates to mode 1-A or 1-B in the load amount correction method for the load spring.
Aspect 3-A is included. Moreover, it is desirable to include the aspect 3-B. That is, Aspect 1-A: The amount of displacement of the surface of the slider facing the magnetic recording medium is measured. Or aspect 1-B: The amount of displacement of the surface of the load spring to which the slider is to be attached is measured. Aspect 3-A: Before displacing the load spring, one end of the load spring is fixed and the other end of the load spring is arranged at a predetermined position, and the load amount of the load spring is measured. Aspect 3-B: Based on the load amount of the load spring obtained in the step of measuring the load amount of the load spring, a displacement amount to be applied to the load spring in the process of displacing the load spring to cause plastic deformation of the load spring. decide.

Furthermore, embodiment 8-A can be included. Aspect-8A: The load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

Here, the mode 1-A or the mode 1-B means
In other words, it is equivalent to measuring the displacement amount of the sensing unit 34 of the load amount measuring device 30. In the seventh load amount correcting method, the other end of the load spring or the vicinity of the other end is displaced.

The seventh load amount correction method will be described below with reference to FIGS. 13, 14 and 15. Note that FIG. 15 is a diagram showing the relationship between the displacement amount and the load amount of the two load springs E and F having different characteristics.

[Step-700] First, the clamp button 2
6 is operated to support one end of the load spring alone, the load spring to which the slider is attached, or the load spring 10 of the floating magnetic head assembly sandwiched between the clamp rod 24 and the support portion 22 (FIG. 13). (A)). This state is indicated by a point Oe or a point Of in FIG. 15 showing the relationship between the displacement amount and the load amount.

[Step-710] Next, the load amount of the load spring 10 is measured with the other end of the load spring 10 arranged at a predetermined position. Specifically, the reference surface 1 of the load spring 10
0B is the mounting reference surface 10A of the load spring 10 (support portion 22
(Substantially the same as the load spring mounting surface 22A) of FIG. 13) (see FIG. 13B). Here, the reference surface 10B of the load spring 10 refers to a surface opposite to the surface of the load spring 10 to which the slider 12 is attached. That is, the load amount measuring device 30 is moved up and down by an elevating actuator (not shown) to bring the contact surface 34A of the sensing portion 34 into contact with the slider 12, and the reference surface 10B of the load spring 10 is
It is arranged to be substantially in the same plane as the load spring mounting surface 22A of the support portion 22. In this way, the state where the other end of the load spring 10 is arranged at a predetermined position can be obtained. The value of Z-height at this time is Z ₀ . Further, the load amount of the load spring 10 is measured by the sensing unit 34. This load amount is a specified load amount, and this value is W ₀ . The W ₀ measured here is called the initial load amount. When the load amount is corrected by the load spring alone, the other end of the load spring 10 and the contact surface 34A of the sensing unit 34 are brought into contact with each other. The same applies to the following description. This state is indicated by a point e or a point f in FIG. 15 showing the relationship between the displacement amount and the load amount.

The initial load amount W _{0 of} the load spring 10 and the displacement amount (Z-height displacement amount) to be applied to the load spring 10 in advance.
It is desirable to find the relationship between ΔZ _UP and the load amount after plastic deformation described below based on various load spring samples. still,
These relationships are shown in FIG. FIG. 15 (A)
Some load springs E exhibit changes such as Oe, e, Ke, O, X. Further, another load spring F is Of, f, Kf,
It shows changes like O and X. Then, from these relationships, the value of the initial load amount W ₀ of the load spring 10 obtained in [Step-710] (in FIG. 15A, W _0e and W _0f
It is preferable to determine the displacement amount ΔZ _UP (indicated by ΔZ _UPe or ΔZ _UPf in FIG. _15A ) to be applied to the load spring 10 in the next [Step-720].

[Step-720] Next, the load spring 10 is subjected to a reverse bending action. Specifically, the load amount measuring device 30 is moved upward by an appropriate amount (ΔZ _UP ) (see FIG. 14).
In FIG. _15A, it is indicated by ΔZ _UPe or ΔZ _UPf . As a result, the load spring 10 warps upward, and the load spring 10 is plastically deformed. The time for maintaining this state is the same for the load springs E and F. The amount of ΔZ _{UP is} the amount of displacement in the height direction of the sensing unit 34 of the load amount measuring device 30, that is, the amount of change in Z-height, and is measured by the displacement meter 50.

By causing the load spring 10 to be plastically deformed by such a method, the specified load amount of the load spring 10 can be changed.

After the load amount of the load spring is corrected, the load amount measuring device 30 is moved downward to move the sensing portion 34 of the load amount measuring device 30 to the slider 12 (in the case of the load spring alone, the other end of the load spring). (See FIG. 14B).

In the seventh load amount correcting method, the load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time (aspect 8-A). Can be included. That is, the load amount measuring device 30 is moved upward by a predetermined amount (ΔZ _UP ′).
This state is indicated by a point Ke 'or a point Kf' in FIG. Then, the load spring 1 is brought to the state of the point Ke 'or the point Kf'.
The time to hold 0 is changed depending on W _0e and W _0f . As a result, the standard value W ₀ ′ of the specified load amount can be obtained depending on the length of the holding time.

(Eighth Load Amount Correction Method of Load Spring) The eighth load amount correction method of the load spring is a modification of the seventh load amount correction method, and further includes mode 3-C. That is, Aspect 3-C: Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation in a state where the other end of the load spring is arranged at the predetermined position. To measure.

Specifically, in the eighth load amount correcting method, after the [Step-720] of the seventh load amount correcting method, the other end of the load spring is arranged at the predetermined position. The method further includes the step of measuring the load amount of the load spring after plastic deformation. Hereinafter, the eighth load amount correction method will be described with reference to FIGS. 16 and 15.

[Step-800] to [Step-820] These steps are [Step-70] of the seventh load amount correction method.
0] to [Step-720], and detailed description thereof will be omitted.

[Step-830] Following [Step-820], the load amount of the load spring after plastic deformation is measured with the other end of the load spring 10 arranged at a predetermined position. That is,
As schematically shown in FIG. 16, the load amount measuring device 30 is moved downward, and the reference surface 10B of the load spring 10 is again moved.
However, it is arranged to be substantially in the same plane as the mounting reference surface 10A of the load spring 10 (substantially the same as the load spring mounting surface 22A of the support portion 22). That is, the Z-height value is set to Z ₀ again.
Thus, with the other end of the load spring 10 arranged at a predetermined position, the specified load amount W ₀ ′ of the load spring 10 after plastic deformation is measured, and the specified load amount change amount ΔW ₀ (= W ₀ − W ₀ ')
Ask for. Note that W ₀ ′ is called a load amount after plastic deformation. Since the load spring 10 is plastically deformed, the initial load W ₀
And the value of the load amount W ₀ 'after plastic deformation are different. Note that this state is indicated by a point X in FIG.

In the eighth load amount correcting method as described above, since the load amount W ₀ 'after the plastic deformation of the load spring is measured,
It can be easily confirmed that the value of the load amount W ₀ 'after plastic deformation is within the standard range (this value is determined by the standard of the load spring or the floating magnetic head assembly).

(Ninth Load Amount Correcting Method of Load Spring) A ninth load amount correcting method of the load spring is a modification of the eighth load amount correcting method, and further includes mode 3-D. That is, Aspect 3-D: The amount of displacement to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the amount of displacement to make the load spring plastic. Cause deformation.

Specifically, in the ninth load amount correcting method, following the [Step-830] of the eighth load amount correcting method, if necessary, the load amount of the load spring after plastic deformation ( Based on the measurement result of (load amount after plastic deformation), the load spring is displaced again to cause plastic deformation in the load spring.
That is, subsequent to [Step-830] of the eighth load amount correction method, as necessary, [Step-820] and [Step-8]
30] is repeated.

That is, when the value of the load amount W ₀ 'after plastic deformation is out of the standard range, [step-820] and [step-820]
830] is repeated. That is, while measuring ΔZ _UP and the load amount W ₀ ′ after plastic deformation by in-situ observation, the load amount W ₀ ′ after plastic deformation is kept within the specified range [step-820. ] And [Step-830] are repeated. In this way, the load amount of the load spring after plastic deformation can be surely kept within the specified range.

In the ninth load amount correcting method, until the load amount after plastic deformation of the load spring falls within the specified range,
If necessary, [Step-82] of the eighth load amount correction method
0] and [step-830] are repeated. Therefore, when executing [Step-810] of the eighth load amount correction method, the following [Step-820] (that is, the first [Step-82]
0]) the amount of displacement ΔZ _{UP to} be applied to the load spring 10
May be determined, or the displacement amount ΔZ _UP may not be determined.

In the ninth load amount correction method, substantially the same as in the seventh load amount correction method, [Step-83
0], the load amount W ₀ 'after the plastic deformation of the load spring 10
Based on the value of, the amount of displacement to be applied to the load spring in the next [Step-820] is determined, the load spring is displaced by the determined amount of displacement (ΔZ _UP ) to be applied to the load spring, and the displacement state Can include a mode in which the load spring is held for a predetermined time (mode 8-A).

Seventh to ninth using the first load correction device
In the load amount correction method (1), the Z-height can be continuously changed. Therefore, it is possible to continuously measure the amount of load at various Z-heights,
It is possible to obtain continuous load amount-displacement amount data. Therefore, in two types of load springs E and F having different characteristics, as shown in FIG. 17, a predetermined value Z _{0 of} Z-height is obtained.
And the prescribed load amount W ₀ (load amount at point e or f in FIG. 17) as a reference, the load spring is displaced by a certain amount ΔZ _UPe '(shown at point e') or ΔZ _{UPf in} the elastic deformation region of the load spring. By displacing by '(indicated by point f), the amount of change in load ΔW _e or ΔW _f in this state is measured. Then, the displacement amount ΔZ _UP (indicated by ΔZ _UPe or ΔZ _{UPf in} FIG. 17) is obtained from the load amount change amount / displacement amount inclination and the specified load amount W ₀ . In this way, the standard load amount of the load spring can be corrected with higher accuracy.

In the seventh, eighth and ninth load amount correction methods for the load spring, the first load which does not include the electric slide table 54, that is, the positional relationship of the displacement gauge 50 with respect to the load spring 10 is fixed. It is also possible to use a quantity correction device.

(Tenth Load Amount Correction Method of Load Spring) In the tenth load amount correction method of the load spring, the load amount of the load spring is basically corrected by the same method as the seventh load amount correction method. To do. The tenth load amount correction method for the load spring is related to Aspect 1-C and further includes Aspect 3-A. That is, Aspect 1-C: The displacement amount at one predetermined measurement point of the load spring is measured. Aspect 3-A: Before displacing the load spring, one end of the load spring is fixed and the other end of the load spring is arranged at a predetermined position, and the load amount of the load spring is measured.

Further, it is preferable to include the embodiment 3-B.
Aspect 3-B: Displacement to be applied to the load spring in the step of displacing the load spring to cause plastic deformation of the load spring based on the load amount of the load spring obtained in the step of measuring the load amount of the load spring Determine the amount.

Furthermore, embodiment 8-A can be included. Aspect-8A: The load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

In the tenth load amount correcting method, the load spring 10 warps upward when the load spring 10 is subjected to the reverse bending action, and the amount of this warp is measured at a predetermined measuring point 10C of the load spring 10. Displacement meter 50 as displacement in the height direction
To measure by. This point is different from the seventh load amount correction method in which the displacement amount (ΔZ _UP ) in the height direction of the sensing unit 34 of the load amount measuring device 30 is measured by the displacement meter 50. Hereinafter, the tenth load amount correction method of the load spring will be described with reference to the schematic diagrams of FIGS. 18 and 19. The tenth
Also in the method of correcting the load amount, the other end of the load spring or the vicinity of the other end is displaced.

[Step-1000] First, by operating the clamp button 26, one end of the load spring alone, the load spring to which the slider is attached, or the load spring 10 in the floating magnetic head assembly is connected to the clamp rod 24 and the supporting portion. It is supported by being sandwiched by 22.

[Step-1010] Next, the load spring 10
The load amount of the load spring 10 is measured in a state where the other end of the load spring 10 is arranged at a predetermined position. Specifically, the reference surface 10B of the load spring 10 is made to substantially coincide with the mounting reference surface 10A of the load spring 10. That is, the reference surface 10B of the load spring 10 is moved in a state where the load measuring device 30 is moved up and down to bring the sensing unit 34 into contact with the slider 12 (the other end of the load spring in the case of a single load spring). It is arranged to be substantially in the same plane as the load spring mounting surface 22A of the support portion 22. The value of Z-height at this time is set to Z ₀ (see FIG. 18A). In this way, the load amount W ₀ of the load spring 10 is measured by the sensing unit 34 while the other end of the load spring 10 is arranged at a predetermined position. This load amount W ₀ is the initial load amount. When the load amount is corrected by the load spring alone, the other end of the load spring 10 and the contact surface 34A of the sensing unit 34 are brought into contact with each other. The same applies to the following description.

[Step-1020] Next, the non-contact type displacement gauge 50 supported by the support body 52 attached to the electric slide table 54 is moved above the predetermined measuring point 10C of the load spring 10. Then, the distance H ₀ between the displacement meter 50 and the predetermined measurement point 10C of the load spring 10 is measured (see FIG. 18B).

The relationship between the displacement amount ΔH _UP in the height direction at a predetermined measurement point 10C of the load spring 10 based on the initial load amount values W ₀ and H ₀ and the post-plastic deformation load amount W ₀ ′ is shown in advance. It is desirable to ask for it. Then, the value of the initial load amount (W
₀ ) Based on the measurement result of
It is preferable to determine the amount of displacement ΔH _UP in the height direction at 0C.

[Step-1030] Thereafter, the load spring 10
Gives a reverse bending action to. Specifically, the load amount measuring device 3
Move 0 upward by an appropriate amount. The time for maintaining this state is the same for load springs of the same type.
The upward movement of the load measuring device 30 causes the load spring 10 to warp upward, and the load spring 10 is plastically deformed. At this time, the displacement amount ΔH _UP in the height direction at the predetermined measurement point 10C of the load spring 10 is measured by the displacement meter 50 with reference to the distance H ₀ (see FIG. 19A).

By causing the load spring 10 to be plastically deformed by such a method, the specified load amount of the load spring can be changed.

After the load amount of the load spring is corrected, the load amount measuring device 30 is moved downward so that the sensing portion 34 of the load amount measuring device 30 is moved to the slider 12 (in the case of the load spring alone, the other end of the load spring). (See (B) of FIG. 19). That is, the other end of the load spring 10 is set to the free state, and the load spring is supported by the support portion 2
Remove from 0.

In the tenth load amount correcting method, the load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time (aspect 8-A). Can be included. That is, the load amount measuring device 30 is moved upward by a predetermined amount (ΔH _UP ).
Then, the time for holding the load spring 10 in this state is changed depending on the initial load amount W ₀ . As a result, the standard value W ₀ ′ of the specified load amount can be obtained depending on the length of the holding time.

(Modification of Tenth Load Amount Correcting Method of Load Spring) A modification of the tenth load amount correcting method will be described below with reference to FIG.
This will be described with reference to 0.

[Step-1000A] The non-contact type displacement gauge 50 is previously arranged above the predetermined measurement point 10C of the load spring 10. The clamp button 26 is operated to support one end of the load spring 10 or the load spring 10 in the floating magnetic head assembly in a state of being sandwiched between the clamp rod 24 and the support portion 22.

[Step-1010A] After that, the displacement meter 50
And the distance H ₀ between the load spring 10 and the predetermined measurement point 10C.
Is measured (see FIG. 20). In the state where the sensing unit 34 and the slider 12 (the other end of the load spring in the case of the load spring alone) are in contact with each other so that the distance H ₀ matches the reference value A ₀ described above, the load amount The measuring device 30 is moved up and down.
As a result, the reference surface 10B of the load spring 10 is substantially in the same plane as the load spring mounting surface 22A of the support portion 22.
Thus, with the other end of the load spring 10 arranged at a predetermined position, that is, with the reference surface 10B of the load spring 10 substantially in the same plane as the load spring mounting surface 22A of the support portion 22, the sense of The load W ₀ of the load spring 10 is measured by the portion 34. This load amount W ₀ is the initial load amount.

After that, [Step-1020] and [Step-1030] of the tenth load amount correcting method are executed.

In a modification of the tenth load amount correction method for the load spring, the first load amount correction device which does not include the electric slide table 54, that is, the positional relationship of the displacement gauge 50 with respect to the load spring 10 is fixed. It is also possible to use

(Eleventh Load Amount Correction Method of Load Spring) The eleventh load amount correction method of the load spring is a modification of the tenth load amount correction method, and further includes aspect 3-C. That is, Aspect 3-C: Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation in a state where the other end of the load spring is arranged at the predetermined position. To measure.

More specifically, in the eleventh load amount correction method, the [step-1
030], the method further includes the step of measuring the load amount of the load spring after plastic deformation while the other end of the load spring is arranged at the predetermined position. The eleventh load amount correction method will be described below with reference to FIG.

[Step-1100] to [Step-1130] These steps are the same as those in [Step-1] of the tenth load amount correction method.
000] to [Step-1030], and detailed description thereof will be omitted.

[Step-1140] After [Step-1130], the load amount measuring device 30 is moved downward, and the reference surface 10B of the load spring 10 is again substantially equal to the load spring mounting surface 22A of the support portion 22. Be in the same plane. In this way, the distance between the displacement gauge 50 and the predetermined measurement point 10C of the load spring 10 is set to H ₀ with the other end of the load spring being arranged at the predetermined position (see FIG. 21). Then, the load amount W ₀ 'after plastic deformation is measured, and the change amount ΔW ₀ (= W ₀
-W ₀ '). Since the load spring 10 is plastically deformed, the values of the initial load amount W ₀ and the post-plastic deformation load amount W ₀ 'are different.

As described above, in the eleventh load amount correction method, since the load amount W ₀ 'after plastic deformation of the load spring is measured, the value of the load amount W ₀ ' after plastic deformation falls within the standard range. You can easily confirm that

The eleventh load correction method is the first
It can also be applied to a modification of the load amount correction method of 0.

(Twelfth Load Amount Correction Method of Load Spring) A twelfth load amount correction method of the load spring is a modification of the eleventh load amount correction method, and further includes aspect 3-D. That is, Aspect 3-D: The amount of displacement to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the amount of displacement to make the load spring plastic. Cause deformation.

More specifically, in the twelfth load amount correcting method, [Step-1 of the eleventh load amount correcting method is used.
140], based on the measurement result of the load amount of the load spring after plastic deformation (load amount after plastic deformation), the load spring is displaced again to cause plastic deformation of the load spring, if necessary. That is, [Step-
1140], if necessary, [Step-113
0] and [step-1140] are repeated.

That is, when the value of the load amount W ₀ 'after plastic deformation is out of the specified range, [step-1130] and [step-1140] are repeated. That, [Delta] H _UP and plastic deformation after the load weight W ₀ 'measurements, while at situ observation, the plastic deformation after the load weight W _0' is to fall within a standard range, if necessary, [Step - 1130] and [step-1140] are repeated. In this way, the load amount of the load spring after plastic deformation can be surely kept within the specified range.

In the twelfth load amount correction method,
The first load until the post-plastic deformation load W ₀ 'is within the specified range.
[Step-1130] and [Step-
1140] is repeated. Therefore, when performing [Step-1110] of the eleventh load amount correction method, the following [Step-1
120] (that is, the displacement amount ΔH _UP to be applied to the load spring 10 in the first [step-1120]) may be determined, or the displacement amount ΔH _UP may not be determined.

In the twelfth load correction method,
Substantially the same as the tenth load amount correction method, [Process-
1140], the displacement amount to be applied to the load spring in the next [Step-1130] is determined based on the value of the load amount W ₀ 'after plastic deformation of the load spring 10, and the determined load spring is determined. It is possible to include a mode (mode 8-A) of displacing the load spring by an amount of displacement to be added to and maintaining the load spring for a predetermined time in the displaced state.

In the tenth to twelfth load amount correcting methods using the first load amount correcting device, since the displacement amount ΔH can be continuously changed, various displacement amounts ΔH can be obtained.
It is possible to continuously measure the load amount at
It is possible to obtain continuous load amount-displacement amount data. Therefore, the load amount change amount ΔW at the displacement amount ΔH in the elastic deformation region of the load spring is measured with reference to the predetermined value Z ₀ or H _{0 of the} Z-height and the specified load amount W ₀ . Then, the displacement amount ΔZ _UP is obtained from the slope of (load amount change amount ΔZ) / (displacement amount ΔH) and the specified load amount W ₀ . Thereby, the standard load amount of the load spring can be corrected with higher accuracy.

(Thirteenth Load Amount Correction Method of Load Spring) The load spring load amount correction method described in the first to twelfth load amount correction methods of the load spring should include the following mode 4-A. You can That is, Aspect 4-A: A minute change in the load amount of the load spring with respect to a minute change in the displacement amount of the load spring in the elastic deformation region of the load spring is measured, and the displacement amount to be applied to the load spring is determined based on the measurement result. To do. In this aspect, it is desirable to continuously measure the displacement amount and the load amount of the load spring.

For example, taking the first load amount correcting method of the load spring as an example, the load amount correcting method of the load spring of mode 4-A is shown in the schematic diagram of FIG. 4 and FIG. 2 showing the relationship between the displacement amount and the load amount.
This will be described below with reference to FIG. The second to the second of the load spring
Also in the twelfth load amount correction method, the load amount can be corrected by the same method.

[Step-1300] First, by operating the clamp button 26, the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 in the floating magnetic head assembly is connected to the clamp rod 24 and the supporting portion. It is supported by being sandwiched by 22.

[Step-1310] Next, the load spring 10
Gives a reverse bending action to. Specifically, the load amount measuring device 30 is moved upward by an appropriate amount by the elevating actuator to contact the contact surface 34A of the sensing unit 34 of the load amount measuring device 30.
And the slider 12 (in the case of the load spring alone, the other end of the load spring) are brought into contact with each other.

It is assumed that the characteristics of the displacement amount-load amount of the load spring immediately after being manufactured through the press working and the subsequent heat treatment process have the characteristics shown by the broken line A in FIG. Further, it is assumed that the load spring receives the bending action at the time of assembling the floating magnetic head, and the state of [Step-1310] is the state represented by the point O. Further, a predetermined amount ΔZ _UP (= Z ₀ −) for moving the load measuring device 30 upward.
Z) and the specified load amount W ₀ ′ of the load spring 10 are preferably obtained in advance. That is, referring to FIG. 22 showing the relationship between the displacement amount and the load amount, the standard value W ₀ 'of the specified load amount
It is desirable to previously obtain the displacement amount ΔZ _UP for obtaining

[Step-1320] Next, FIG.
As schematically shown in, the load amount measuring device 30 is moved further upward. At this time, the sensing unit 34 measures a minute change in the load amount of the load spring 10 with respect to a minute change in the displacement amount of the load spring 10 within the elastic deformation region of the load spring 10 (region indicated by B in FIG. 22). In this way, the slope of the amount of change in load / the amount of displacement can be obtained. A load amount / displacement straight line (indicated by C in FIG. 22) having a slope of the load amount change amount / displacement amount thus obtained and passing through the specified load amount W ₀ 'and a load amount indicated by a broken line A / The intersection K2 with the characteristic curve of the amount of displacement can be calculated. By moving the load amount measuring device 30 upward by an amount corresponding to the intersection K2, the load spring 10 warps upward and the load spring 10 is plastically deformed. The time for maintaining this state is the same for load springs of the same type. still,
Depending on the type of the load spring, the gradient of the amount of change in the amount of load / the amount of displacement may change in a region where the amount of displacement is large, but the point K2 can be obtained by processing such as a correction coefficient.

[Step-1330] After the specified load amount of the load spring is corrected, the load amount measuring device 30 is moved downward so that the contact surface of the load amount measuring device 30 moves to the slider 12 (in the case of the load spring alone, the load is applied). Away from the other end of the spring).

In the thirteenth load amount correction method of the load spring, the load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time (aspect 8). -A) can be included. Further, it is possible to include a mode (mode 9-A) of displacing the load spring by a desired displacement amount and holding the load spring in the displaced state for a predetermined time. In this aspect 9-A, the desired range amount can be made substantially constant.

(14th to 18th load amount correction methods for load springs) In the 4th to 6th and 10th to 12th load amount correction methods for load springs (Aspect 1-C described above), The displacement amount in the height direction at a predetermined measurement point 10C of the load spring 10 is measured by the displacement meter 50. The predetermined measurement point 10C of the load spring 10 is one in these load amount correction methods.

On the other hand, the fourteenth to eighteenth load amount correcting methods relate to mode 1-D. That is, aspect 1-D: The displacement amount at a predetermined plurality of measurement points of the load spring is measured, and the bending angle of the load spring is obtained from the measurement result of the displacement amount.

Specifically, the predetermined measurement points of the load spring 10 are at least two points 10C and 10D. The number of measurement points may be three or more. By measuring the amount of displacement at a plurality of points in this way, the mounting reference surface 1 of the load spring 10
Bending angle (θ) of the load spring 10 with respect to 0 A (hereinafter,
The bending angle (θ) of the load spring 10 can be simply obtained.

The displacement amount (h) in the height direction at the predetermined measurement point 10C of the load spring 10 and the external force (F) applied to the load spring 10 have a non-linear relationship in the elastic region. That is, dF / dh is not a constant value, and the value of dF / dh decreases as h increases. On the other hand, the bending angle (θ) of the load spring 10 and the external force (F) applied to the load spring 10 have a linear relationship in the elastic region. That is, dF / dθ is constant. Therefore, the accuracy of the correction can be further improved by correcting the specified load amount of the load spring based on the bending angle (θ) of the load spring 10.

(Fourteenth Load Amount Correction Method of Load Spring) The fourteenth load amount correction method of the load spring is a modification of the fourth load amount correction method of the load spring and relates to Aspect 1-D. That is, aspect 1-D: The displacement amount at a predetermined plurality of measurement points of the load spring is measured, and the bending angle of the load spring is obtained from the measurement result of the displacement amount.

Specifically, in the fourteenth load amount correction method for the load spring, two predetermined measurement points 10C, 10 of the load spring 10 are produced in the same step as [Step-420].
Each of the displacement amount [Delta] H _UP1 in D, by measuring [Delta] H _UP2,
Load spring 10 for mounting reference surface 10A of load spring 10
The bending angle (θ) is calculated (see FIG. 23).

In the fourteenth load amount correction method, it is desirable to previously obtain the relationship among the initial load amount value W ₀ , the bending angle θ of the load spring 10, and the post-plastic deformation load amount W ₀ ′. Then, the load measuring device 30 is moved upward so that the desired bending angle θ of the load spring 10 is obtained. As a result, the specified load amount of the load spring 10 can be kept within the standard range.

The fourteenth load amount correction method for the load spring is as follows:
It is possible to include a mode (mode 9-A) of displacing the load spring by a desired displacement amount and holding the load spring for a predetermined time in the displaced state. That is, when the load spring is displaced by a desired displacement amount (this value is almost constant) and the load spring is held in the displaced state for a predetermined time, the holding time is changed as shown in FIG. 5C. Dependent load changes. By utilizing such characteristics, the load spring is set to a desired bending angle (θ), and if the load spring is held in this displacement state for a predetermined time, the standard value W of the specified load amount depends on the length of the holding time. You can get ₀ '.

(Fifteenth Load Amount Correction Method of Load Spring) A fifteenth load amount correction method of a load spring is the fourteenth load spring correction method.
It is a modification of the load amount correction method of No. 1 and is similar to the fifth load amount correction method of the load spring. That is, including Aspect 5-A,
Furthermore, it is desirable to include Aspect 5-B.

Specifically, in the fifteenth load amount correcting method of the load spring, the predetermined measuring point 10 of the load spring 10 is
Amount of displacement in the height direction at C and 10D ΔH _UP1 , ΔH _UP2
Is measured by the displacement meter 50. This point is the same as the fourteenth load amount correction method.

The fifteenth load amount correcting method is different from the fourteenth load amount correcting method in that one end of the load spring is fixed and one end of the load spring is included before the load spring 10 is displaced. An initial distance between the plane and a plane including a plurality of predetermined portions of the load spring is measured, and the initial bending angle θ _F0 of the load spring 10 with respect to the plane including one end of the load spring is obtained from these initial distances ( Aspect 5-A). That is, the distances H _F01 and H _F02 between the predetermined two measurement points 10C and 10D of the load spring 10 and the displacement meter 50 are measured, and the load is determined based on the measurement results of these distances H _F01 and H _F02. Initial bending angle θ of the load spring 10 with respect to the mounting reference surface 10A of the spring 10
_{Find F0} .

In the fifteenth load amount correcting method, the load spring 1
0 of predetermined measurement points 10C, initial bending angle theta _F0 of load spring 10 based on the initial distance in 10D, the height direction of the displacement amount [Delta] H _UP1 or [Delta] H _UP2, advance the specific load of relationship between the load spring 10 It is desirable to ask for it. As a result, the load amount of the load spring can be corrected more accurately.

Further, based on the measurement results of the initial distances H _F01 and H _F02 , the displacement amount (ΔH _UP1
Alternatively, it is desirable to determine ΔH _UP2 ) (Aspect 5-B).

The fifteenth load amount correcting method of the load spring will be described below with reference to the schematic view of FIG.

[Step-1500] First, by operating the clamp button 26, the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 in the floating magnetic head assembly is connected to the clamp rod 24 and the supporting portion. It is supported by being sandwiched by 22.

[Step-1510] Next, the load spring 10
Before displacing, with one end of the load spring fixed,
An initial distance between a plane containing one end of the load spring and a plane containing a plurality of predetermined portions of the load spring is measured. That is, with the other end of the load spring 10 being free, between the non-contact type displacement gauge 50 arranged above the predetermined measurement point 10C of the load spring 10 and the predetermined measurement point 10C of the load spring 10. Measure the initial distance H _F01 . Further, the non-contact type displacement meter 50 is moved above the predetermined measurement point 10D of the load spring 10 to measure the initial distance H _F02 between the predetermined measurement point 10D of the load spring 10 and the displacement meter 50. (See FIG. 24A). Based on the measurement results of these distances H _F01 and H _F02 , the initial bending angle θ _F0 of the load spring 10 with respect to the mounting reference surface 10A of the load spring 10 is obtained. Here, the mounting reference surface 10A of the load spring 10 corresponds to a plane including one end of the load spring. Also, the predetermined portion 10C or 10D of the load spring
And a plane parallel to the mounting reference surface 10A corresponds to a plane including a predetermined portion of the load spring.

[Step-1520] Thereafter, the load spring 10
Gives a reverse bending action to. Specifically, the load amount measuring device 3
0 is moved upward and the sensing unit 34 of the load measuring device 30 is moved.
And the slider 12 (in the case of the load spring alone, the other end of the load spring) are brought into contact with each other. Next, the load measuring device 30 is moved upward by an appropriate amount. The upward movement of the load amount measuring device 30 causes the load spring 10 to warp upward, and the load spring is plastically deformed. The time for maintaining this state is the same for load springs of the same type. At this time, the displacement amount ΔH _UP2 in the height direction at the predetermined measurement point 10D of the load spring 10 is measured by the displacement meter 50. Further, the non-contact type displacement meter 50 is moved above the predetermined measurement point 10C of the load spring 10 to measure the displacement amount ΔH _UP1 in the height direction at the predetermined measurement point 10C of the load spring 10 by the displacement meter 5
0 (see FIG. 24B).

Based on these displacement amounts ΔH _UP1 and ΔH _UP2 , the bending angle θ of the load spring 10 with respect to the mounting reference surface 10A of the load spring 10 is obtained.

The bending angle θ of the load spring 10 is preferably determined based on the initial bending angle θ _F0 of the load spring 10. This makes it possible to determine a more appropriate value of the displacement amount [Delta] H _UP1 or [Delta] H _UP2.

In the fifteenth load amount correcting method, the load spring is displaced by the determined displacement amount (corresponding to the bending angle θ of the load spring 10) to be applied to the load spring, and the load spring is placed in the displaced state. Mode for holding for a predetermined time (Mode 8)
-A) can be included. That is, the load amount measuring device 30 is moved upward by a predetermined amount (corresponding to the bending angle θ of the load spring 10). Then, in this state, the load spring 10
The holding time is changed depending on the initial bending angle θ _F0 . As a result, the standard value W ₀ ′ of the specified load amount can be obtained depending on the length of the holding time.

(Sixteenth Load Amount Correction Method of Load Spring) The sixteenth load amount correction method of the load spring is the fifteenth load spring correction method.
It is a modification of the load amount correction method of (1) and is similar to the sixth load amount correction method of the load spring. That is, including Aspect 5-C,
Furthermore, it is desirable to include Aspect 5-D.

Specifically, in the sixteenth load amount correcting method for the load spring, after the load spring 10 is plastically deformed, one end of the load spring 10 is fixed and one end of the load spring is included. The distance after the plastic deformation between the plane and the plane including the plurality of predetermined portions of the load spring is measured (Aspect 5-
C). This point is different from the fifteenth load amount correction method.
In the 16th load magnitude correction method, 'I seek, this plastic deformation after bending angle of the load spring theta _F0' skew angle theta _F0 after the plastic deformation of the load spring on the basis of the measurement result of the distance after the plastic deformation again Determine the amount of displacement that should be applied to the load spring,
It is desirable to displace the load spring again based on this displacement amount to cause plastic deformation of the load spring (Aspect 5-D).

In the sixteenth load amount correction method, the load spring 1
0 of predetermined measurement points 10C, initial bending angle theta _F0 based on the measurement of the initial distance in 10D, the displacement amount in the height direction [Delta] H _UP1 or [Delta] H _UP2, specific load amount of the load springs 10, and plastic deformation of the load spring It is desirable to obtain the relationship of the back bending angle θ _F0 'in advance. Thereby, the load amount of the load spring can be corrected.

The sixteenth load amount correcting method for the load spring will be described below with reference to the schematic view of FIG.

[Step-1600] to [Step-1620] These steps are substantially the same as [Step-1500] to [Step-1520] in the fifteenth load correction method, and detailed description thereof will be given. Omit it.

[Step-1630] After [Step-1620], the load amount measuring device 30 is moved downward so as to be between the plane including one end of the load spring and the plane including a plurality of predetermined portions of the load spring. The distance after plastic deformation of is measured. Specifically, the sensing unit 34 of the load amount measuring device 30 is attached to the slider 12.
(In the case of the load spring alone, separate it from the other end of the load spring). That is, the other end of the load spring 10 is made free again. Then, the distance H _F01 ′ (distance after plastic deformation) between the displacement meter 50 and the predetermined measurement point 10C of the load spring 10 is measured by the displacement meter 50. Next, the displacement meter 50 is moved to move the displacement meter 50.
Between the load spring 10 and a predetermined measurement point 10D of the load spring 10
_F02 '(distance after plastic deformation) is measured by the displacement meter 50 (see FIG. 25). The mounting reference surface 10A of the load spring 10 is
It corresponds to a plane including one end of the load spring. A plane including the predetermined portion 10C or 10D of the load spring and parallel to the mounting reference surface 10A corresponds to a plane including the predetermined portion of the load spring.

From these distances H _F01 ′ and H _F02 ′, the bending angle θ _F0 ′ after the plastic deformation of the load spring 10 is obtained.

It is desirable to previously find the relationship between the bending angle θ _F0 'after the plastic deformation of the load spring 10 and the specified load amount of the load spring 10. As described above, in the sixteenth load correction method, the bending angle θ of the load spring after plastic deformation is changed.
_{Since F0} 'is measured, it can be easily confirmed that the value of the load amount after plastic deformation is within the standard range.

Alternatively, in the sixteenth load amount correction method, the value W ₀ of the initial load amount, the initial bending angle θ _F0 , the bending angle θ of the load spring 10, the bending angle θ _F0 ′ after plastic deformation, and It is desirable to obtain the relationship of the load amount W ₀ 'after plastic deformation. Further, the displacement amount ΔH _UP1 or Δ in the height direction at a predetermined measurement point 10C or 10D
It is preferable to find the relationship between H _UP2 and the bending angle θ of the load spring 10.

If the value of the bending angle after plastic deformation θ _F0 'is out of the standard range, the value of the bending angle after plastic deformation θ _F0 ' is within the standard range, if necessary. [Step-1620] and [Step-1630] are repeated. As a result, the value of the load amount after plastic deformation can be surely kept within the standard range.

In this case, when executing the [step-1610] of the sixteenth load amount correction method, the following [step-162]
0] (that is, the displacement amount ΔH _UP1 or ΔH to be applied to the load spring 10 in the first [step-1620]).
The value of _UP2 may be determined, or these displacement amounts may not be determined. Furthermore, in the sixteenth load amount correction method, it is possible to confirm in [Step-1630] whether or not the value of the bending angle θ _F0 'after plastic deformation is out of the standard range. Step-1610] can be omitted.

Incidentally, in the sixteenth load amount correction method,
Based on the value of the bending angle after plastic deformation θ _F0 'obtained in [Process-1630], the amount of displacement to be applied to the load spring in the next [Process-1620] is determined, and the determined load spring is determined. It is possible to include a mode (mode 8-A) in which the load spring is displaced by the amount of displacement to be applied and the displacement state is maintained for the predetermined time.

(17th Load Amount Correction Method for Load Spring) The 17th load amount correction method for a load spring is the 10th load spring correction method.
Which is a modification of the method for correcting the amount of load, described in Embodiment 1-D.
Regarding It also includes Aspect 3-A, and further Aspect 3-
Including B.

Specifically, the same steps as [Step-1000] to [Step-1030] are performed. In the seventeenth load amount correction method, in [Step-1030], as shown schematically in FIG. 23, two predetermined measurement points 10C and 10D of the load spring 10 are set. In this way, the displacement amount ΔH _UP1 , at each of the multiple points 10C and 10D,
ΔH _UP2 is measured and the mounting reference surface 10A of the load spring 10 is measured.
The bending angle (θ) of the load spring 10 with respect to is calculated.

In the seventeenth load amount correction method, it is desirable to previously obtain the relationship among the initial load amount value W ₀ , the bending angle θ of the load spring 10 and the post-plastic deformation load amount W ₀ ′. Further, the bending angle θ of the load spring 10 and H
It is preferable to determine the height direction of the displacement amount [Delta] H _UP1 or [Delta] H _UP2 at a predetermined measurement point 10C or 10D of the load spring 10 relative to the _zero. Then, based on the measurement results of the initial load by which the value (W _0), it is desirable to determine the predetermined height direction at the measurement point 10C or 10D of the displacement amount [Delta] H _UP1 or [Delta] H _UP2 of load spring 10. As a result, the specified load amount of the load spring 10 can be kept within the standard range.

In the seventeenth load amount correction method, the load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time (aspect 8-A). Can be included. That is, the load amount measuring device 30 is moved upward by a predetermined amount (corresponding to the bending angle θ of the load spring 10). Then, the time for holding the load spring 10 in this state is changed depending on the value W ₀ of the initial load amount. As a result, the standard value W ₀ ′ of the specified load amount can be obtained depending on the length of the holding time.

(Eighteenth Load Amount Correction Method for Load Spring) The eighteenth load amount correction method for a load spring is the eleventh load spring correction method.
Which is a modification of the method for correcting the amount of load, described in Embodiment 1-D.
And also includes Aspect 3-C.

Specifically, the same steps as [Step-1100] to [Step-1140] are performed. In the eighteenth load amount correction method, in [Step-1130], similarly to the seventeenth load amount correction method, the respective displacement amounts ΔH at the two predetermined measurement points 10C and 10D of the load spring 10. _UP1 and ΔH _UP2 are measured to determine the bending angle (θ) of the load spring 10.

As described above, in the eighteenth load amount correction method, since the load amount after plastic deformation W ₀ 'of the load spring is measured, the value of the load amount after plastic deformation W ₀ ' is within the standard range. You can easily confirm that

The eighteenth load amount correction method is the first
It can also be applied to a modification of the load amount correction method of 0.

Furthermore, the eighteenth load amount correction method for the load spring can include the same steps as the twelfth load amount correction method for the load spring. That is, the aspect 3-D may be included.

Specifically, when the value of the load amount W ₀ 'after plastic deformation is out of the standard range, the same steps as [Step-1130] and [Step-1140] are repeated as necessary. . That is, instead of ΔH _UP , the bending angle θ of the load spring 10 and the load amount W ₀ ′ after plastic deformation are measured by in-situ observation, while the load amount W ₀ ′ after plastic deformation falls within the standard range. [Step-1130] and [Step-1
140] is repeated. Alternatively, in advance,
It is desirable to obtain the relationship among the value W ₀ of the initial load amount, the bending angle θ of the load spring 10, and the load amount W ₀ ′ after plastic deformation. Then, based on the measurement result of the load amount W ₀ 'after plastic deformation, the bending angle θ of the load spring 10 in the next [Step-1130] is determined, and the load amount measuring device 30 is set by the amount based on the angle θ. It can also be moved upwards.

Incidentally, in the eighteenth load amount correcting method,
Based on the value of the post-plastic deformation load W ₀ 'obtained in the same process as [Process-1140], the next [Process-1130]
The amount of displacement to be applied to the load spring (corresponding to the bending angle θ of the load spring 10) in the same process as above is determined, and the load spring is displaced by the determined amount of displacement to be applied to the load spring, and the displacement state is A mode (mode 8-A) of holding the load spring for a predetermined time can be included.

(Nineteenth Load Amount Correction Method of Load Spring) The fifteenth to eighteenth load amount correction methods of the load spring can include the following Aspect 7-A. Aspect 7-A: Measure a minute change in the load amount of the load spring with respect to a minute change in the bending angle of the load spring within the elastic deformation region of the load spring, and determine the amount of displacement to be applied to the load spring based on the measurement result. To do. In this aspect, it is desirable to continuously measure the bending angle and the load amount of the load spring.

For example, taking the load amount correction method substantially the same as the fifteenth load amount correction method of the load spring as an example, the load spring load correction method of aspect 7-A will be described with reference to the schematic diagram of FIG. 23 and the displacement amount. It demonstrates below with reference to FIG. 26 which shows the relationship of load amount. The load amount can be corrected by the same method in the sixteenth to eighteenth load amount correction methods for the load spring.

[Step-1900] First, the clamp button 26 is operated to connect the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 in the floating magnetic head assembly to the clamp rod 24 and the supporting portion. It is supported by being sandwiched by 22.

Immediately after the press spring and the subsequent heat treatment process, the load spring has a displacement amount-load amount characteristic which has characteristics shown by a broken line A in FIG. Further, it is assumed that the load spring receives the bending action at the time of assembling the floating magnetic head, and the state of [Step-1910] is represented by the point O. In addition, a predetermined amount (bending angle Δθ that should move the load measuring device 30 upward).
_UP ) and the prescribed load amount W ₀ ′ of the load spring 10 is preferably obtained in advance. That is, when described in displacement (angle theta) and shows a load of relationship 26, the bending angle [Delta] [theta] _UP in obtaining a standard value W ₀ of the specific load volume '(corresponding to [Delta] H _UP), pre-test It is desirable to ask for it.

[Step-1910] Then, the load spring 10
Gives a reverse bending action to. Specifically, the load amount measuring device 3
0 is moved upward and the sensing unit 34 of the load measuring device 30 is moved.
And the slider 12 (in the case of the load spring alone, the other end of the load spring) are brought into contact with each other. Next, the load measuring device 30 is moved upward by an appropriate amount. At this time, the sensing unit 34 measures a minute change in the load amount of the load spring with respect to a minute change in the bending angle of the load spring within the elastic deformation region of the load spring 10 (region indicated by B in FIG. 26). In this way, the slope of the amount of change in load / the amount of bending angle can be obtained.

A straight line (shown by C in FIG. 26) of the load amount / bending angle amount having the inclination of the load amount changing amount / bending angle amount and passing through the specified load amount W ₀ 'and the broken line A The intersection K2 with the characteristic curve of load amount / displacement amount (angle θ) shown can be calculated. Then, with reference to the amount corresponding to this intersection K2, that is, θ = 0 degree, Δ
By moving the load amount measuring device 30 upward by θ _UP (corresponding to ΔH _UP ), the load spring 10 warps upward, and the load spring 10 is plastically deformed. In addition, depending on the type of the load spring, the slope of the load amount change amount / displacement amount may change in a region where the displacement amount is large, but the point K2 can be obtained by processing such as a correction coefficient.

Bending angle Δθ corresponding to this point K2
_By moving the load amount measuring device 30 upward by _UP (corresponding to ΔH _UP ) based on θ = 0 degree, the load spring 10 warps upward, and the load spring 10 is plastically deformed. The time for maintaining this state is the same for load springs of the same type. It should be noted that the load amount change amount / bending angle amount inclination may change in a region where the displacement amount is large depending on the type of the load spring.
You can ask for 2. The displacement amount ΔH _UP2 in the height direction at a predetermined measurement point 10D of the load spring 10 is measured by a displacement gauge 50
And the predetermined measurement point 1 of the load spring 10
The non-contact type displacement meter 50 is moved above 0C, and the displacement amount ΔH _UP1 in the height direction at the predetermined measurement point 10C of the load spring 10 is measured by the displacement meter 50 ((B) in FIG. 23).
See), based on these displacement amounts [Delta] H _UP1 and [Delta] H _UP2,
Load spring 10 for mounting reference surface 10A of load spring 10
The bending angle θ can be obtained.

[Step-1920] After the specified load amount of the load spring is corrected, the load amount measuring device 30 is moved downward so that the contact surface of the load amount measuring device 30 moves to the slider 12 (in the case of a load spring alone, Away from the other end of the spring).

In the nineteenth load amount correcting method of the load spring, the load spring is displaced by the determined displacement amount to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time (Aspect 8). -A) can be included. Further, it is possible to include a mode (mode 9-A) of displacing the load spring by a desired displacement amount and holding the load spring in the displaced state for a predetermined time. In this aspect 9-A, the desired range amount can be made substantially constant.

(Twentieth Load Amount Correction Method of Load Spring) This twentieth load amount correction method of the load spring relates to the above-mentioned mode 1-E. That is, Aspect 1-E: The external force for displacing the load spring is measured.

The method of correcting the load amount of the load spring according to the aspect 1-E can include the following aspect 12-A. Aspect 12-A: A desired external force is applied to the load spring to displace the load spring, and the load spring is held in the displaced state for a predetermined time.

In the twentieth load amount correction method, the load spring 1 is applied by applying a predetermined external force to the load spring 10.
0 warps upward, and the warp of the load spring 10 changes the amount of load applied to the sensing unit 34. This change in the load amount corresponds to the external force for displacing the load spring. The load amount measuring device 30 uses the change of the load amount as the change amount of the load amount.
When the amount of change in the load amount, that is, the magnitude of the external force reaches a predetermined value, the displacement of the load spring is stopped. This point is different from the aspects 1-A to 1-D.

The twentieth load amount correction method for the load spring will be described below with reference to FIGS. 27 and 28. The 20th
In the load amount correcting method, the external force is applied to the other end of the load spring or in the vicinity of the other end to displace the load spring.

The load spring may be a single unit, a slider may be attached to the other end, or a load spring incorporated in the floating magnetic head assembly.

In the twentieth load amount correcting method, the amount of change in the load amount is constantly measured by the sensing unit 34 of the load amount measuring device 30.

[Step-2000] First, by operating the clamp button 26, the load spring alone, the load spring to which the slider is attached, or one end of the load spring 10 of the floating magnetic head assembly is connected to the clamp rod 24 and the supporting portion. It is supported by being sandwiched by 22 (see FIG. 27A).
This state is indicated by a point Og or a point Oh in FIG. 28A showing the relationship between the displacement amount and the load amount. still,
FIG. 28A is a diagram showing the relationship between the displacement amount and the load amount of two load springs G and H having different characteristics.

It is desirable to previously obtain the relationship between the magnitude of the predetermined external force to be finally applied (load change amount) ΔW and the load amount after plastic deformation based on various load spring samples. Note that these relationships are shown in FIG. Figure 2
8 (A), a certain load spring G has Og, g, Kg, O,
It shows a change like X. Further, another load spring H is O
Shows changes such as h, h, Kh, O, X.

[Step-2010] Next, a predetermined external force is applied to the load spring 10 to exert a reverse bending action. In particular,
While moving the load amount measuring device 30 upward, the load amount measuring device 30 continuously measures the load amount change amount (external force). Then, when the magnitude of the predetermined external force (load amount change amount) ΔW to be finally applied is reached, the upward movement of the load amount measuring device 30 is stopped (see FIG. 27B). Note that in FIG. 28A, the magnitude of the predetermined external force (load change amount) to be finally applied is ΔW _g or Δ
_Denote by Wh. As a result, the load spring 10 warps upward, and the load spring 10 is plastically deformed. The time for maintaining this state is the same for load springs of the same type.

After the load amount of the load spring is corrected, the load amount measuring device 30 is moved downward to move the sensing portion 34 of the load amount measuring device 30 to the slider 12 (in the case of the load spring alone, the other end of the load spring). Keep away from. That is, the other end of the load spring 10 is set in a free state, and the load spring is removed from the support portion 20. Incidentally, in each of the correction methods described below, the operation after the correction of the load amount of the load spring is almost the same, and thus the description thereof will be omitted.

By causing the load spring 10 to be plastically deformed by such a method, the specified load amount of the load spring 10 can be changed. In the twentieth load amount correction method, the displacement gauge is unnecessary.

In the twentieth load amount correcting method of the load spring, a desired external force is applied to the load spring to displace the load spring, and the load spring is held in the displaced state for a predetermined time (mode 12-A). Can be included. As shown in FIG. 28B, a desired external force is applied to the load spring to displace the load spring, and the load spring is held in the displaced state (indicated by point K in FIG. 28B) for a predetermined time. In this case, the specified load amount changes depending on the holding time. By utilizing such characteristics, the load spring is displaced by applying a desired external force ΔW, and if the load spring is held in the displaced state for a predetermined time,
The standard value W ₀ 'or W ₀ "of the specified load amount can be obtained depending on the length of the holding time.

(Modification of the twentieth load amount correction method for the load spring) It is preferable that the twentieth load amount correction method for the load spring includes the following mode 10-A. That is, Aspect 10-A: Before displacing the load spring, one end of the load spring is fixed and the other end of the load spring is arranged at a predetermined position, and the load amount of the load spring is measured.

Specifically, after [Step-2000], as in [Step-110] of the first load amount correction method, the reference surface 10B of the load spring 10 is changed to the mounting reference surface 1 of the load spring 10.
0A (substantially the same as the load spring mounting surface 22A of the support portion 22)
And are substantially matched (see FIG. 13B). Thus
It is possible to obtain a state in which the other end of the load spring 10 is arranged at a predetermined position. The value of Z-height at this time is Z ₀ . Further, the load amount of the load spring 10 is measured by the sensing unit 34. This load amount is the initial load amount (W ₀ ). This state is indicated by a point g or a point h in FIG. 28A showing the relationship between the displacement amount and the load amount.

Furthermore, it is preferable that the twentieth load amount correction method for the load spring also includes the following mode 10-B. That is, Aspect 10-B: The magnitude of the external force to be applied to the load spring is determined based on the load amount of the load spring.

Specifically, the relationship between the initial load amount W ₀ of the load spring 10, the magnitude of the predetermined external force to be finally applied (load amount change amount) ΔW, and the load amount after plastic deformation is variously determined in advance. It is desirable to obtain it based on the load spring sample. Then, from these relationships, the initial load amount W of the load spring 10
_{Based on} the value of ₀ (indicated by W _0g and W _0h in (A) of FIG. 28), the magnitude of a predetermined external force (load amount change) to be finally applied to the load spring 10 in the next [Step-2020]. Amount) (ΔW _1g or ΔW _{1h in} FIG. _28A ) is preferably determined. A displacement meter is required in this method.

The twentieth load amount correction method for a load spring including the aspect 10-B can include the following aspect 11-A. Aspect 11-A: The load spring is displaced based on the determined external force to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time.

That is, based on the value of the initial load amount W ₀ of the load spring 10, the load spring 1 in the next [Step-2020]
The magnitude of the predetermined external force (the amount of change in the amount of load) to be finally applied to 0 is determined, and the load spring is held in the displaced state for a predetermined time. This predetermined time is the initial load amount W of the load spring 10.
Depends on a value of ₀ . That is, the larger the value of the initial load amount W ₀ , the longer the predetermined time. As a result, the standard value W ₀ ′ of the specified load amount can be obtained.

(Twenty-first load amount correction method of load spring) The twenty-first load amount correction method of the load spring is a modification of the twentieth load amount correction method, and may include the following modes 10-C. . Aspect 10-C: Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation is measured in a state where the other end of the load spring is arranged at the predetermined position. To do.

Specifically, in the twenty-first load amount correction method, [Step-202] of the twentieth load amount correction method is used.
[0], the method further includes the step of measuring the load amount of the load spring after plastic deformation while the other end of the load spring is arranged at a predetermined position. The twenty-first load amount correction method can also be applied to a modification of the twentieth load amount correction method. Hereinafter, the twenty-first load amount correction method will be described with reference to FIGS.
This will be described with reference to FIG.

[Step-2100] to [Step-2110] These steps are [Step-2 of the twentieth load amount correcting method].
000] to [Step-2010], and detailed description thereof will be omitted.

[Step-2120] Following [Step-2110], the load amount of the load spring after plastic deformation is measured with the other end of the load spring 10 arranged at a predetermined position. That is, as schematically shown in FIG.
Of the load spring 10 again to move the reference surface 10 of the load spring 10 downward.
B is the mounting reference surface 10A of the load spring 10 (support portion 22
(Substantially the same as the load spring mounting surface 22A). That is, the Z-height value is set to Z ₀ again. Thus, with the other end of the load spring 10 arranged at a predetermined position, the prescribed load amount W of the load spring 10 after plastic deformation
₀ ′ is measured, and the load amount after plastic deformation ΔW ₀ (= W ₀ −W ₀ ′), which is the change amount of the specified load amount, is obtained. Since the load spring 10 is plastically deformed, the values of the initial load amount W ₀ and the post-plastic deformation load amount W ₀ 'are different. This state is shown in FIG.
In (A) of, it is indicated by a point X.

In the twenty-first load amount correction method as described above, since the load amount W ₀ 'after plastic deformation of the load spring is measured, the value of the load amount W ₀ ' after plastic deformation is within the standard range (this value is , Which is determined by the standard of the load spring or the floating magnetic head assembly) can be easily confirmed.

(Twenty-second load amount correcting method of load spring) The twenty-second load amount correcting method of the load spring is a modification of the twenty-first load amount correcting method and includes the following modes 10-D. Aspect 10-D: The magnitude of the external force to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the magnitude of the external force. Causes plastic deformation of the load spring.

Specifically, in the twenty-second load amount correction method, [Step-212] of the twenty-first load amount correction method is used.
0], if necessary, based on the measurement result of the load amount of the load spring after plastic deformation (load amount after plastic deformation), a predetermined external force is applied to the load spring again to cause plastic deformation of the load spring. Let That is, subsequent to [Step-2120] of the 21st load amount correction method, if necessary, [Step-21
10] and [Step-2120] are repeated. Usually, the predetermined external force applied again is different from the magnitude of the predetermined external force applied before that.

That is, when the value of the post-plastic-deformation load amount W ₀ 'is out of the standard range, as required, [Step-211]
0] and [Step-2120] are repeated. That is, while the load change amount ΔW and the post-plastic deformation load amount W ₀ ′ are measured in-situ, the post-plastic deformation load amount W ₀ ′ falls within the standard range. [Step-2110] and [Step-2120] are repeated as necessary. In this way, the load amount of the load spring after plastic deformation can be surely kept within the specified range.

In the 22nd load amount correction method,
Until the load amount after the plastic deformation of the load spring falls within the specified range, the [Step-
2110] and [step-2120] are repeated. Therefore, the steps described in the modification of the twentieth load amount correction method may or may not be performed.

In a twenty-second load amount correction method for a load spring including aspect 10-D, the load spring is displaced based on the determined external force to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time. Aspects (Aspect 11-A) can be included.

That is, the load W after the plastic deformation of the load spring 10
Based on the value of ₀ ', the magnitude of the predetermined external force (change amount of load amount) to be finally applied to the load spring 10 in the next [Step-2110] is determined, and the load spring is held for a predetermined time in the displacement state. To do. This predetermined time depends on the value of the load amount W ₀ 'after the plastic deformation of the load spring 10. In this way, by holding the load spring in the displaced state for a predetermined time, the standard value W ₀ ′ of the specified load amount can be obtained.

In the twentieth, twenty-first and twenty-second load amount correction methods of the load spring, the first load which does not include the electric slide table 54, that is, the positional relationship of the displacement gauge 50 with respect to the load spring 10 is fixed. It is also possible to use a quantity correction device.

(Second Load Amount Correction Device) The first to twenty-second load amount correction methods for the load spring described above were carried out using the first load amount correction device shown in FIGS. 1 and 2. . These first to nineteenth load amount correcting methods and, if necessary, the twentieth to twenty-second load amount correcting methods are the second load amount correcting device which is the first aspect of the load amount correcting device of the present invention. Can also be carried out. The second load correction device will be described below with reference to FIG.

The second load correction device according to the first aspect of the present invention has (a) a support portion 20 having a load spring mounting surface 22A, on which the load spring 10 for the floating magnetic head assembly is mounted, And (b) a contactor 34B which is moved up and down with respect to the load spring mounting surface 22A and contacts the load spring at a point or a line to displace the load spring.

In the first load amount measuring device, the load amount measuring device is used in a state where the sensing portion 34 having the contact surface 34A of the load amount measuring device 30 is in contact with the slider 12 or the other end of the load spring 10. By moving 30 up and down, the load spring 10 is displaced or an external force is applied to the load spring 10. On the other hand, in the second load amount correction device according to the first aspect of the present invention, the load amount measurement device 30
The contactor 34B is attached to the sensing unit 34 of. Depending on the load correction method, the load measuring device may be omitted and the contact 34
B may be attached to a lifting actuator or the like. Further, it is desirable to have a non-contact type displacement gauge 50. Examples of the non-contact type displacement gauge 50 include ultrasonic type, auto focus type, eddy current type, electrostatic capacitance type, magnetic type displacement gauges as well as optical displacement gauges such as laser displacement gauges. To be A contact type displacement meter such as a digital micrometer can be used instead of the non-contact type displacement meter.

With the contact 34B in line contact or point contact with a predetermined region of the load spring 10, the load amount measuring device 30 is moved up and down to cause displacement of the load spring 10 or to apply an external force to the load spring 10. Add. Here, the predetermined region of the load spring 10 with which the contactor 34B attached to the sensing unit 34 of the load measuring device 30 contacts is the load spring 10 to which the slider 12 is attached. Any portion of the load spring 10 other than the slider may be used as long as it can be displaced. Further, in the case of the load spring 10 alone, it may be any part of the load spring 10 as long as it can appropriately displace the load spring 10.

The shape of the portion where the contactor 34B comes into contact with the load spring 10 can be knife-edge-shaped, needle-shaped (pin-shaped) or the like, but it is needle-shaped (pin-shaped).
Most preferable from the viewpoint of highly accurate correction of the load amount.
The reason will be described later. Other components of the second load amount correction device can be the same as those of the first load amount correction device, and detailed description thereof will be omitted.

The slider 12 is usually attached to the load spring 10 via a flexure. Through the flexure, the slider 12 can freely rotate with respect to the load spring 10 within a limited range. In this way, when the flexure is used, as shown in FIG.
As shown in 0, the load amount may change stepwise with respect to the displacement amount of the load spring 10.

This phenomenon can be explained as follows. The angle of the load spring 10 with respect to the mounting reference surface 10A of the load spring 10 is θ. As the sensing portion 34 rises from the state (θ = θ ₁ ) shown in FIG. 31 (A), the load spring 10 is displaced and θ increases. When the sensing unit 34 is further raised, the flexure flexure increases as shown in FIG. 31B (θ = θ ₂ ). When the sensing unit 34 is further raised, the flexure flexure becomes too large and the flexure flexure is released at once, and the slider 12 slips on the sensing unit 34 as shown in FIG. The angle of the load spring 10 is θ ₃ (θ ₁ <θ ₃ <θ ₂ ). The load amount of the load spring 10 at this time is smaller than that in the case of FIG.

In the second load amount correction device shown in FIG. 29, since the contactor 34B has a knife edge shape, a needle shape (pin shape), or the like, the load amount with respect to the displacement amount of the load spring 10 is It is possible to prevent a step change.

Further, by using such a second load amount correcting device, it is possible to prevent the contactor from directly contacting the slider, and prevent the slider from being scratched or damaged.

The load amount correction method for the load spring using the second load amount correction device can be the same as the first to twenty-second load amount correction methods, and detailed description thereof will be omitted. In addition, as an example, the value of (W ₀ −W ₀ ′) / W ₀ in the eleventh load amount correcting method using the first load amount correcting device and the eleventh value using the second load amount correcting device. The values of (W ₀ −W ₀ ′) / W ₀ (these values are the measured values of the load amount in the sensing unit 34 to which the contactor 34B is attached) in the load amount correction method of _1. It was That is, instead of measuring the load amount of the load spring 10 at the portion where the slider 12 is attached, or in the case of the load spring 10 alone, the load spring 1
By measuring the displacement amount of the load spring 10 at a predetermined measurement point of the load spring 10 and measuring the load amount in a predetermined region of the load spring 10 instead of measuring the load amount at the other end of 0. Also, the specified load amount can be corrected.

An outline of an eleventh load amount correcting method using the second load amount correcting device is shown in FIGS. 32 and 33. Figure 32
32A is a diagram showing a state of [Step-1110], and FIG.
33B is a diagram showing a state of [Step-1120], FIG.
33A is a diagram showing a state of [Step-1130], FIG.
(B) is a diagram showing a state of [Step-1140].

As another example, in the eighth load amount correction method using the first load amount correction device, (W ₀ −
The value of W ₀ ′) / W _{0 and} the value of (W ₀ −W ₀ ′) / W ₀ in the eighth load amount correction method using the second load amount correction device (these values are the contact 34B). Sensing part 3 with attached
4), which is the measured value of the load amount in Example 4, was almost in agreement. That is, instead of measuring the load amount of the load spring 10 in the portion where the slider 12 is attached, or in the case of the load spring 10 alone, instead of measuring the load amount at the other end of the load spring 10, the slider abuts. The amount of displacement of the surface can be measured, or the amount of displacement of the surface of the load spring to which the slider is to be attached can be measured, and the amount of load in a predetermined region of the load spring 10 can be measured.

An outline of an eighth load amount correcting method using the second load amount correcting device is shown in FIGS. 34 and 35. 34A is a diagram showing a state of [process-810], FIG. 34B is a diagram showing a state of [process-820], and FIG. 35 is a diagram showing a state of [process-830]. is there.

(Third Load Amount Correction Device) Instead of the second load amount correction device, a third load amount correction device which is the second aspect of the load amount correction device of the present invention can be used.
The third load correction device will be described below with reference to FIG.

The third load amount correcting device according to the second aspect of the present invention has (a) a support portion 20 having a load spring mounting surface 22A, on which a load spring 10 for a floating magnetic head assembly is mounted. And (b) a contactor 60 which is rotated with respect to the load spring mounting surface 22A and contacts the load spring at a point, line or surface to displace the load spring.

In the second load amount correcting device, the contactor 34B is moved up and down in a line contact state or a point contact state with a predetermined region of the load spring 10 to cause the load spring 10 to be displaced. In the third load correction device, the load spring 1
The contact element 60, which contacts a predetermined area of 0, is attached to the load spring 10.
It is characterized by rotating about an axis including the displacement center point 10E. Further, it is desirable to have a non-contact type displacement gauge 50. Examples of the non-contact type displacement gauge 50 include ultrasonic type, auto focus type, eddy current type, electrostatic capacitance type, magnetic type displacement gauges as well as optical displacement gauges such as laser displacement gauges. To be A contact type displacement meter such as a digital micrometer can be used instead of the non-contact type displacement meter.

Here, the load spring 1 with which the contactor 60 contacts
The predetermined area of 0 is the slider 1 if it is a portion of the load spring 10 to which the slider 12 is attached or the load spring 10 alone can be appropriately displaced.
It may be part of any load spring 10 including 2.

The shape of the portion where the contactor 60 contacts the load spring 10 is a flat plate shape, a knife edge shape, a needle shape (pin shape),
The shape can be an arc or the like. Any mechanism may be used to rotate the contactor 60 about the axis including the displacement center point 10E of the load spring 10.

The contact 60 is replaced with a sensing unit (load cell), or the contact 60 is attached to a sensing unit composed of a load cell, and the same load amount measurement as that of the first load amount correcting device with the sensing unit attached is performed. The device can also be rotated about an axis containing the displacement center point 10E of the load spring 10. With such a configuration, the rotation angle-load amount can be measured.

The other components of the third load amount correction device can be the same as those of the first load amount correction device, and detailed description thereof will be omitted.

By configuring the third load amount correcting device in this manner, it is possible not only to prevent the stepwise change of the load amount with respect to the displacement amount of the load spring 10, but also to improve the load of the load spring with higher accuracy. The amount can be modified.
As described above, this is because the displacement amount (h) in the height direction at the predetermined measurement point of the load spring 10 and the external force (F) applied to the load spring 10 have a non-linear relationship in the elastic region. On the other hand, the bending angle (θ) of the load spring 10 and the external force (F) applied to the load spring 10 are
This is because there is a linear relationship in the elastic region.

The load amount correction method of the load spring using the third load amount correction device can be the same as the first to twenty-second load amount correction methods, and detailed description thereof will be omitted. Note that, as an example, an outline of a sixth load amount correcting method using the third load amount correcting device is shown in FIGS. 37 and 38. 37A is a diagram showing a state of [step-610], FIG. 37B is a diagram showing a state of [step-620], and FIG. 38 is a diagram showing a state of [step-630]. is there.

FIG. 39 shows a flow chart of the load spring correction method of the present invention. From FIG. 39, it is understood that according to the present invention, the load amount of the load spring 10 can be easily and accurately measured and corrected.

Although the present invention has been described above based on the preferred embodiments, the present invention is not limited to these embodiments. In the examples, exclusively (initial load amount - after the plastic deformation load weight) = W ₀ -W ₀ '> has been described with respect to the case of 0, (initial load weight - plastic deformation after the load weight) = W ₀ -W ₀ '<
It may be necessary to set it to 0. In this case, the support part 2
The attachment of the load spring 10 to 0 may be reversed. The relationship between the displacement amount and the load amount in this case is schematically shown in FIG.

Although the embodiment has been described based on the combination of the elevating actuator 36 and the non-contact type displacement gauge 50, the displacement amount (vertical movement distance) of the elevating actuator 36 using the motor is detected by detecting the rotation speed of the motor, etc. It may be detected by any method. As a result, the non-contact type displacement meter 50 can be omitted. The sensing unit 34 may receive the force from the load spring 10 and sink, and the actual displacement amount of the lift actuator 36 may differ from the measured displacement amount. In this case, the non-contact type It is necessary to correct the amount of subduction with a displacement meter.

The mounting position of the displacement meter 50 can be changed appropriately. For example, it may be attached at a position as shown in FIG. Further, instead of moving the sensing unit 34 up and down, as shown in FIG. 42 or 43, the support unit 20 is attached to the lifting actuator 36, and the sensing unit 34 is mounted.
It is also possible to fix. Then, the vertical movement of the support portion 20 is measured by the displacement meter 50.

In the load correction method of the present invention described above, the value of Z ₀ is used as the predetermined value of Z-height.
That is, in the floating magnetic head assembly, the value is equal to the sum of the distance between the surface of the load spring to which the slider is attached and the contact surface of the slider, and the thickness of the load spring at the portion to which the slider is attached. . In addition, the load spring alone is set to 0. That is, in either case, the predetermined value of Z-height (Z ₀ ) is usually the value of Z-height when the load spring extends substantially straight.

[0296] Using the second load quantity correcting device was determined from the Z _F0 and Z ₀ at Z _0, and [Step -210] (Z ₀
+ Z _F0 ) / 2, the load amount before and after the load amount correction was measured. The results are shown below. Position Z ₀ (Z ₀ + Z _F0 ) / 2 Load amount before load amount correction 6.80 g 3.18 g Load amount after load amount correction 6.07 g 2.49 g Difference 0.73 g 0.69 g Also before and after load amount correction The spring constant of the load spring was calculated. Spring constant before load correction 4.68 g / mm Spring constant after load correction 4.63 g / mm

From these results, it is understood that the predetermined value of Z-height (Z ₀ ) is not limited to this value and can be appropriately defined according to the standard of the load spring or the floating magnetic head assembly.

Further, in the first and second load amount correction devices, the load amount at Z ₀ before and after the load amount correction was measured. The results are shown below. Load amount correction device 1st 2nd Load amount before correction 6.80g 4.81g Load amount after correction 6.07g 4.32g Change ratio of load amount 0.89 0.90

From this result, it is found that the load amount change ratio before and after the load amount correction is constant regardless of the type of the load amount correction device and the position of the load spring at which the load amount is measured. It was That is, by measuring the load amount at an arbitrary position of the load spring, the load amount applied to the slider by the load spring can be obtained.

[0300]

According to the load correction method of the present invention, the load spring is displaced without applying heat treatment, or an external force is applied to the load spring to complete not only the load spring itself but also the assembly and inspection steps. A load spring having a specified load amount can be obtained even in the floating magnetic head assembly.

When using a non-contact type displacement meter,
Since the amount of displacement of the predetermined portion or the sensitive portion of the load spring is measured, it is possible to give the load spring an accurate amount of displacement, obtain an accurate specified amount of load, and its industrial value is very high.

Further, since the Z-height can be continuously changed, the load-loss test can be continuously performed while the load spring 10 is attached to the supporting portion 20. Then, the load amount of the load spring at various Z-heights can be continuously measured by in-situ observation, and continuous load amount-displacement amount data can be obtained.

Alternatively, a continuous load-loss test can be carried out on a predetermined measuring point of the load spring, and the load spring is given a reverse bending action based on this test data.
It is possible to correct the specified load amount. That is, it is possible to correct the specified load amount of the load spring while confirming the load amount.

Even if the Z-height is not measured,
It can be modified to a load spring having a specified load amount, and its industrial value is very high.

By using a non-contact type displacement gauge and measuring the bending angle of the load spring, a more precise specified load amount can be applied to the load spring.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a first load amount correction device.

FIG. 2 is an enlarged view of a part of a first load amount correction device.

FIG. 3 is a schematic diagram for explaining a method of setting a reference value A _{0 and} a method of measuring Z-height when measuring the Z-height in the first load correction device.

FIG. 4 is a diagram illustrating each step of the first load amount correction method for the load spring.

FIG. 5 is a diagram showing an example of a relationship between a displacement amount and a load amount in the first load amount correction method for the load spring.

FIG. 6 is a diagram illustrating a step of the second load amount correction method for the load spring.

FIG. 7 is a diagram showing an example of a relationship between a displacement amount and a load amount in a second load amount correction method for a load spring.

FIG. 8 is a diagram illustrating a step of a third load amount correction method for the load spring.

FIG. 9 is a diagram showing an example of a relationship between a displacement amount and a load amount in a third load amount correction method for a load spring.

FIG. 10 is a diagram illustrating a step of a fourth load amount correction method for a load spring.

FIG. 11 is a diagram illustrating a step of a fifth load amount correction method for the load spring.

FIG. 12 is a diagram illustrating a step of a sixth load amount correction method for a load spring.

FIG. 13 is a diagram illustrating each step of the seventh load amount correction method for the load spring.

FIG. 14 is a view for explaining the seventh load amount correction method for the load spring, continuing from FIG. 14;

FIG. 15 is a diagram showing an example of a relationship between a displacement amount and a load amount in a seventh load amount correction method for a load spring.

FIG. 16 is a diagram illustrating each step of the eighth load amount correction method for the load spring.

FIG. 17 is a diagram showing an example of the relationship between the displacement amount and the load amount in the seventh to ninth load amount correction methods for the load spring.

FIG. 18 is a diagram illustrating each step of the tenth load amount correction method for the load spring.

FIG. 19 is a view for explaining the tenth load amount correction method for the load spring, continuing from FIG. 18;

FIG. 20 is a diagram for explaining a modification of the tenth load amount correction method for the load spring.

FIG. 21 is a diagram for explaining a modification of the eleventh load amount correction method for the load spring.

FIG. 22 is a diagram showing an example of the relationship between the displacement amount and the load amount in the thirteenth load amount correction method for the load spring.

FIG. 23 is a diagram illustrating a step of a fourteenth load amount correction method for the load spring.

FIG. 24 is a diagram illustrating a step of the seventeenth load amount correction method for the load spring.

FIG. 25 is a diagram illustrating a step of an eighteenth load amount correction method for the load spring.

FIG. 26 is a diagram showing an example of a relationship between a displacement amount and a load amount in a nineteenth load amount correction method for a load spring.

FIG. 27 is a diagram illustrating a step of the twentieth load amount correction method for the load spring.

FIG. 28 is a diagram showing an example of the relationship between the displacement amount and the load amount in the twentieth load amount correction method for the load spring.

FIG. 29 is a diagram showing a configuration of a second load amount correction device according to the first aspect of the present invention.

FIG. 30 is a diagram of displacement amount-load amount showing a state in which the load amount changes stepwise with respect to the displacement amount of the load spring 10.

FIG. 31 is a diagram for explaining the reason why the load amount changes stepwise with respect to the displacement amount of the load spring 10.

FIG. 32 is a diagram illustrating a step of an eleventh load amount correction method for a load spring using a second load amount correction device.

FIG. 33 is a view for explaining the process of the eleventh load amount correcting method for the load spring using the second load amount correcting device, following FIG. 32;

FIG. 34 is a diagram illustrating a step of an eighth load amount correction method for a load spring using the second load amount correction device.

FIG. 35 is a view for explaining a step of the eighth load amount correction method for the load spring using the second load amount correction device, following FIG. 34;

FIG. 36 is a diagram showing a configuration of a third load amount correction device according to the second aspect of the present invention.

FIG. 37 is a diagram illustrating a step of a sixth load amount correction method for a load spring using a third load amount correction device.

FIG. 38 is a view for explaining the step of the sixth load amount correction method for the load spring using the third load amount correction device, following FIG. 37;

FIG. 39 is a diagram showing a flowchart of a method for correcting a load amount of a load spring.

FIG. 40 (initial load amount-load amount after plastic deformation) = W ₀ −
It is a figure which shows typically the relationship of the displacement amount and load amount when it is necessary to be _W0 '<0.

FIG. 41 is a view showing a modification of the second load amount correction device according to the first aspect of the present invention.

FIG. 42 is a view showing a modification of the second load amount correcting device according to the first aspect of the present invention.

FIG. 43 is a view showing a modification of the second load amount correcting device according to the first aspect of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Main body 1A Upper surface of main body 10 Load spring 10A Reference mounting surface of load spring 10B Reference surface of load spring 10C Predetermined measurement point of load spring 12 Slider 20 Support portion 22 Support portion 22A Load spring mounting surface of support portion 24 Clamp rod 26 Clamp button 30 Load measuring device 32 Converting section 34 Sensing section 34A Sensing section contact surface 34B Contact element 36 Lifting actuator 38 Amplifier 40 Load quantity display section 42 Displacement display section 44 Block gauge 50 Displacement meter 52 Support 54 Electric slide table 60 contact

Claims (45)

[Claims] 1. A method for correcting the load of a plate-shaped load spring for a floating magnetic head assembly, the method comprising: displacing the load spring while fixing one end of the load spring to cause plastic deformation of the load spring. The load amount correction method for a load spring according to claim 1, wherein the load amount of the load spring is set to a desired amount. 2. The load spring correction method according to claim 1, wherein a slider is attached to the other end of the load spring. 3. The method of correcting the load amount of a load spring according to claim 2, wherein the amount of displacement of the surface of the slider facing the magnetic recording medium is measured. 4. The load amount correction method for a load spring according to claim 1, wherein the displacement amount of the surface of the load spring to which the slider is to be attached is measured. 5. The load amount correction method for a load spring according to claim 1, wherein the displacement amount at one predetermined measurement point of the load spring is measured. 6. An initial distance between a plane including one end of the load spring and a plane including a predetermined portion of the load spring is measured while the one end of the load spring is fixed before the load spring is displaced. The load amount correction method for a load spring according to any one of claims 3 to 5, wherein: 7. The load amount correction method for a load spring according to claim 6, wherein the amount of displacement to be applied to the load spring is determined on the basis of the result of measuring the initial distance. 8. After the plastic deformation of the load spring, after the plastic deformation between a plane including one end of the load spring and a plane including a predetermined portion of the load spring, with one end of the load spring fixed. The load amount correction method of the load spring according to claim 6 or 7, wherein the distance is measured. 9. A displacement amount to be applied to the load spring is determined based on a measurement result of the distance after plastic deformation, and based on the displacement amount,
9. The load amount correction method for a load spring according to claim 8, wherein the load spring is displaced again to cause plastic deformation of the load spring. 10. A step of measuring the load amount of the load spring with one end of the load spring fixed and the other end of the load spring being arranged at a predetermined position before the load spring is displaced. The load amount correction method for a load spring according to any one of claims 3 to 5. 11. A displacement to be applied to the load spring in the step of displacing the load spring and causing plastic deformation of the load spring based on the load amount of the load spring obtained in the step of measuring the load amount of the load spring. The load amount correction method for a load spring according to claim 10, wherein the amount is determined. 12. Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation is set in a state where the other end of the load spring is arranged at the predetermined position. The method for correcting a load amount of a load spring according to claim 10 or 11, further comprising a step of measuring. 13. A displacement amount to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the displacement amount to plastically deform the load spring. The method for correcting the load amount of a load spring according to claim 12, wherein the method is to generate the load. 14. A method of measuring a minute change of a load amount of a load spring with respect to a minute change of a displacement amount of the load spring within an elastic deformation region of the load spring, and determining a displacement amount to be applied to the load spring based on the measurement result. The load amount correction method for a load spring according to any one of claims 3 to 5, wherein: 15. The method according to claim 1 or 2, wherein displacement amounts at a plurality of predetermined measurement points of the load spring are measured, and a bending angle of the load spring is obtained from measurement results of the displacement amounts. Method of correcting the load amount of the load spring. 16. A plane including one end of the load spring in a state where one end of the load spring is fixed before the load spring is displaced,
The load spring according to claim 15, wherein an initial distance from a plane including a plurality of predetermined portions of the load spring is measured, and an initial bending angle of the load spring is obtained from the values of these initial distances. Load amount correction method. 17. The load spring correction method according to claim 16, wherein the displacement amount to be applied to the load spring is determined based on the result of the initial bending angle of the load spring. 18. After the load spring is plastically deformed,
With one end of the load spring fixed, measure the distance after plastic deformation between the plane containing one end of the load spring and the plane containing multiple predetermined parts of the load spring, and measure the distance after these initial plastic deformations. The method of correcting the load amount of the load spring according to claim 16 or 17, wherein the bending angle after plastic deformation of the load spring is obtained from the value of. 19. A displacement amount to be applied to the load spring is determined based on the result of the bending angle of the load spring after plastic deformation, and the load spring is displaced again based on the displacement amount to cause the load spring to be plastically deformed. The method for correcting the load amount of a load spring according to claim 18, characterized in that. 20. Before displacing the load spring, the method comprises the step of measuring the load amount of the load spring while fixing one end of the load spring and arranging the other end of the load spring at a predetermined position. The load amount correction method for a load spring according to claim 15. 21. A displacement to be applied to the load spring in the step of displacing the load spring to cause plastic deformation of the load spring based on the load amount of the load spring obtained in the step of measuring the load amount of the load spring. The load amount correction method for a load spring according to claim 20, wherein the amount is determined. 22. Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation is set in a state where the other end of the load spring is arranged at the predetermined position. The method of correcting a load amount of a load spring according to claim 20 or 21, further comprising a step of measuring. 23. The displacement amount to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the displacement amount so that the load spring is plastically deformed. 23. The method for correcting the load amount of a load spring according to claim 22, wherein the load spring is corrected. 24. Measuring a minute change of a load amount of the load spring with respect to a minute change of a bending angle of the load spring within an elastic deformation region of the load spring, and determining a displacement amount to be applied to the load spring based on the measurement result. The load amount correction method for a load spring according to claim 15, wherein. 25. The load spring is displaced by an amount of displacement to be applied to the determined load spring, and the load spring is held in the displaced state for a predetermined time.
The load amount correction method for a load spring according to any one of claim 11, claim 13, claim 14, claim 17, claim 19, claim 21, claim 23, and claim 24. 26. The load spring is displaced by a desired displacement amount,
The load spring correction method according to any one of claims 3 to 5, wherein the load spring is held in the displaced state for a predetermined time. 27. The load spring is displaced by applying an external force to one point of the load spring.
A method for correcting a load amount of a load spring according to any one of 1. 28. The load spring is displaced by linearly applying an external force to the load spring.
A method for correcting a load amount of a load spring according to any one of 1. 29. The load correction method for a load spring according to claim 27, wherein the external force is measured by a precision actuator equipped with a load cell. 30. The load amount correction method for a load spring according to claim 3, wherein the displacement amount is measured using a non-contact type displacement gauge. 31. The load amount correction method for a load spring according to claim 1, wherein an external force for displacing the load spring is measured. 32. Prior to displacing the load spring, the method further comprises the step of measuring the load amount of the load spring while fixing one end of the load spring and arranging the other end of the load spring at a predetermined position. 32. The load amount correction method for a load spring according to claim 31, characterized in that 33. The load amount correction method for a load spring according to claim 32, wherein the magnitude of the external force to be applied to the load spring is determined based on the load amount of the load spring. 34. Subsequent to the step of displacing the load spring to cause plastic deformation of the load spring, the load amount of the load spring after plastic deformation is set in a state where the other end of the load spring is arranged at the predetermined position. 34. The load amount correction method for a load spring according to claim 32 or claim 33, further comprising a step of measuring. 35. The magnitude of the external force to be applied to the load spring is determined based on the measurement result of the load amount of the load spring after plastic deformation, and the load spring is displaced again based on the magnitude of the external force. The method of correcting a load amount of a load spring according to claim 34, characterized in that plastic deformation is caused in the. 36. The load spring according to claim 33 or 35, wherein the load spring is displaced based on the determined external force to be applied to the load spring, and the load spring is held in the displaced state for a predetermined time. Load amount correction method. 37. The load spring is displaced by applying a desired external force to the load spring, and the load spring is held in the displaced state for a predetermined period of time.
Item 5. A load spring correction method according to item. 38. The load amount correction method for a load spring according to claim 31, wherein an external force for displacing the load spring is applied to one point of the load spring. 39. The load amount correction method for a load spring according to claim 31, wherein an external force for displacing the load spring is linearly applied to the load spring. 40. The method for correcting the load amount of a load spring according to claim 31, wherein the external force is measured by a precision actuator equipped with a load cell. 41. (a) A support portion having a load spring mounting surface, to which a load spring for a floating magnetic head assembly is mounted, and (b) a load spring which is moved up and down with respect to the load spring mounting surface. A contact for displacing the load spring by contacting it with a point or line,
A load amount correction device for a load spring, comprising: 42. (a) A support portion having a load spring mounting surface, to which a load spring for a floating magnetic head assembly is mounted, and (b) a load spring which is rotated with respect to the load spring mounting surface. And a contact for displacing the load spring by making contact with each other at a point, a line, or a surface, and a load amount correction device for the load spring. 43. A displacement gauge for measuring the displacement amount of the load spring is further provided.
2. The load correction device for a load spring according to item 2. 44. The load correction device for a load spring according to claim 43, wherein the displacement gauge comprises a non-contact type displacement gauge. 45. A load amount measuring device for measuring a force applied to the contactor by a load spring is further provided, and the contactor is attached to the load amount measuring device.
A load amount correction device for a load spring according to any one of claims 44 to 44.