JPH0713010U - Flow controller - Google Patents

Abstract

(57) [Summary] [Structure] A plurality of openings are provided in one flow path, and an opening / closing control valve is associated with each opening to sequentially control opening / closing. [Effect] The flow rate can be controlled without causing a sudden change.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a flow rate control device that controls the flow rate of a fluid.

[0002]

[Prior art]

 As disclosed in Japanese Patent Laid-Open No. 3-292479, a conventional flow rate control device has a valve capable of closing an opening provided in a valve box, and by moving the valve, the amount of these gaps can be reduced. To control the flow rate.

[0003]

[Problems to be solved by the device]

 In the conventional technique, the change in the opening area at that time is large with respect to the amount of movement of the valve on the side of the minimum flow rate at the time of opening and closing, so that the flow rate changes sharply as shown in FIG. I couldn't do it accurately. Therefore, the present invention aims to accurately control the flow rate.

[0004]

[Means for Solving the Problems]

 In order to solve the above problems, the present invention comprises an opening / closing means for opening / closing the opening and a driving means for driving the opening / closing means, and the same number of the opening / closing means is provided corresponding to the opening. Further, a plurality of openings are formed on surfaces having different heights, respectively, and an elastic member for urging the opening / closing means in a direction of closing the openings and a holder for holding the plurality of opening / closing means are provided, and the driving means is provided. The holding body is moved by. Further, the driving means includes a plurality of openings formed in the same plane in the height direction, an elastic member for urging the opening / closing means in the direction of closing the openings, and a holder for holding the plurality of opening / closing means. The holder was moved to open and close the opening, and the holder was held in the holder by changing the lengths of the opening and closing means protruding from the holder when the opening was fully opened. Further, the plurality of opening / closing means each have a driving means and can be independently controlled.

[0005]

Embodiment FIG. 1 shows an embodiment of the present invention and is a schematic cross-sectional view of a flow rate control device showing an example in which a shape memory alloy 8 is used for a drive device of a valve body 2. The flow rate control device has a structure in which the case 9 and the cylinder 1 can keep airtightness through the O-ring 3. A resin member 5 including a connector portion 4 is integrally formed with the cylinder 1 so that the inside and outside of the flow rate control device can be electrically connected. Inside the cylinder 1, three flow rate adjusting opening holes 1a, 1b, 1c are formed on different surfaces, respectively, so that the valve body 2 can slide in the cylinder by the power of the shape memory alloy 8 and the closing spring 7. ing. The flow rate is controlled by detecting the position of the valve body 2 with the potentiometer 6 and changing the current to the shape memory alloy 8 based on the information, and the valve 201 held in the valve body 2 and the inside of the cylinder 1 are controlled. The flow rate is controlled by ensuring the distance from the flow rate adjusting opening holes 1a, 1b, 1c.

FIG. 2 shows a detailed configuration of the valve body 2. The valve 201 is made of rubber and is fixed to the valve shaft 202. A flange 202a is provided on the valve shaft 202, and a valve spring 203 urges the valve 201 in a direction to close the diversion adjusting opening hole 1a. The other two valves have the same structure and are held by the valve holders 204 and 205. Further, the valve holders 204 and 205 are formed with through holes 206 through which fluid passes.

The operation of the valve body 2 will be described with reference to FIGS. 3, 4, and 5. The valve body 2 is usually in the form of a body for closing the flow rate adjusting opening holes 1a, 1b, 1c by a closing vane 7. As shown in FIG. 3, since the valve 201 closes the flow rate adjusting opening holes 1a, 1b, 1c on the surfaces having different heights, the valve spring 203 absorbs the step difference. By energizing the shape memory alloy 8 here, the valve body 2 moves in the direction to open the flow rate adjusting opening holes 1a, 1b, 1c, and the surface farthest from the valve body 2 as shown in FIGS. The valve 201 moves away from a certain flow rate adjusting opening 1c to the flow rate adjusting opening 1a in order. The closing operation is the reverse, and the flow adjustment hole 1a on the closest surface is closed to the flow adjustment hole 1c in order.

FIG. 6 is a sectional view showing another embodiment. The flow control opening hole 1a inside the cylinder 1 is formed on the same surface. The structure of the valve body 2 is almost the same as the above, but the lengths of the three valve shafts 212a, 212b, 212c are different. The operation is the same as that of the above-described embodiment, and the valve shaft 212c is sequentially opened from the short valve shaft 212c and the valve shaft 212a is closed from the long valve shaft 212a. As shown in Fig. 7, since the three openings are opened in sequence, the change in the flow rate is smaller than that controlled by one valve, and there is no large change in the flow rate from the minimum flow rate to the maximum flow rate. It is easy to control the flow rate. FIG. 8 is a sectional view showing another embodiment. Flow rate adjusting opening holes 101a, 101b, 101c having different opening diameters are formed on the same surface in the cylinder 101, and a valve holding body 214 having a through hole 206 is also integrally formed with the cylinder 101. . The valves 211a, 211b, 211c and the valve shaft 202 are individually configured as a plunger of a coil 207, and the shaft 202 is biased in the closing direction by a valve spring 203. Here, since the individual valves for the flow rate adjusting opening holes 101a, 101b, 101c having different opening diameters can be independently driven, it is possible to drive them in combination so that they have a proportional relationship with the valve displacement. It is possible to set the flow rate. For example, the three opening diameters are d, 21 / 2d, 22 / 2d, the valve drive is fully closed, fully open, and the valve is intermittently opened and closed so that the flow rate becomes 1/2 with 1 (duty1) when fully opened. When the flow rate is controlled by the combination of driving methods (duty 1/2), the result is as shown in FIG. 9 (here, the flow rate is replaced by the opening area). At this time, when the valve drive is performed only by the combination of fully closed and fully opened (duty1), the slope of the straight line becomes large, and if the duty is finely controlled to 1/3, the slope of the straight line becomes smaller and more accurate control is possible. Become.

More precise control can be achieved by determining whether the opening diameters of the flow rate adjusting opening holes are different or the same depending on the desired flow rate setting.

[0010]

[Effect of device]

 By having a plurality of valves, it is possible to reduce the opening diameter per one, so that the change in the flow rate due to the displacement of the valve also becomes small. Furthermore, by opening and closing those valves in order at intervals, it is possible to precisely control from the minimum flow rate to the maximum flow rate without a large change in the flow rate. Alternatively, by opening and closing valves with different opening diameters independently and controlling the flow rate by the combination, the flow rate can be set so as to be proportional to the valve displacement from the minimum flow rate to the maximum flow rate. It is possible. By using multiple valves in this way, abrupt changes in flow rate can be suppressed and flow rate control can be performed accurately. Further, since it can be driven by one actuator and has a simple structure, the cost does not increase significantly.

[Brief description of drawings]

FIG. 1 is a sectional view of a flow rate control device showing an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a support portion of the valve body of the present invention.

FIG. 3 is a cross-sectional view showing the operation of the support portion of the valve body of the present invention.

FIG. 4 is a cross-sectional view showing the operation of the support portion of the valve body according to the embodiment of the present invention.

FIG. 5 is a cross-sectional view showing the operation of the support portion of the valve body according to the embodiment of the present invention.

FIG. 6 is a cross-sectional view showing the operation of the support portion of the valve body according to the embodiment of the present invention.

FIG. 7 is a characteristic diagram showing displacement and flow rate of a valve body according to an embodiment of the present invention.

FIG. 8 is a sectional view of a valve body showing another embodiment of the present invention.

FIG. 9 is a characteristic diagram showing a combination of valve driving and an opening area of the present invention.

FIG. 10 is a characteristic diagram showing displacement and flow rate of a valve body of a conventional example.

[Explanation of symbols]

1,101 cylinders 1a, 1b, 1c, 101a, 101b, 101c
Flow rate adjusting opening 201 Valve 202, 212a, 212b, 212c Valve shaft 203 Valve spring 204, 205 Valve holder 3 O-ring 4 Connector part 5 Resin part 6 Potentiometer 7 Closing spring 8 Shape memory alloy 9 Case

Claims (4)

[Scope of utility model registration request] 1. A flow rate control device for controlling the flow rate of fluid by opening and closing an opening provided in a valve box through which the fluid flows, and driving the opening and closing means for opening and closing the opening and the opening and closing means. And a drive means for operating the same, and the same number of the opening / closing means are provided corresponding to the openings. 2. An elastic member for forming the plurality of openings on surfaces having different heights, and biasing the opening / closing means in a direction of closing the openings, and a holder for holding the plurality of opening / closing means. 2. The flow rate control device according to claim 1, further comprising: a drive means for moving the holding body. 3. A plurality of openings formed on the same plane in the height direction, an elastic member for urging the opening / closing means in a direction of closing the openings, and a holding member for holding the plurality of opening / closing means. A body, the holding member is moved by the driving means to open and close the opening, and the opening and closing means changes the projecting length from the holding body when the opening is fully opened. The flow rate control device according to claim 1, wherein the flow rate control device is held by a holding body. 4. The flow control device according to claim 1, wherein each of the plurality of opening / closing means has a driving means and can be independently controlled.