JPH07123741A - Electrostatic film actuator - Google Patents

Abstract

(57) [Abstract] [Purpose] By stacking the mover on the stator, the carrier speed of the mover can be set arbitrarily, and the mover can be stably obtained without depending on the physical properties of the mover. To obtain an electrostatic film actuator capable of transporting. [Structure] A mover 15 provided with three-pole strip electrodes is laminated on a stator 1, and a mover 10 is arranged on the upper surface thereof. Only the movable element on the uppermost surface applies a constant voltage without switching the applied voltage, and the other movable elements and the stator 1 switch the applied voltage. Since the mover to which a constant voltage is applied attracts and fixes the mover 10, the mover on the uppermost surface conveys the mover 10 with the mover 10 attracted by the driving force generated by switching the applied voltage of the stator and another mover. Therefore, the transfer can be performed regardless of the physical property value of the mover.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic actuator for driving or conveying paper or film.

[0002]

2. Description of the Related Art FIG. 13 is a perspective view showing a conventional electrostatic film actuator disclosed in Japanese Patent Laid-Open No. 2-285978, FIG. 14 is a configuration diagram for explaining the function of the electrostatic film actuator, and FIG. It is sectional drawing of the specific structural example which shows the conventional electrostatic film actuator. Figure 1
In FIG. 3, reference numeral 1 denotes a stator, which is an insulator 2 to be described later provided with a strip electrode 4. Reference numeral 2 is an insulator forming the stator 1, and for example, a PET film or the like is used. Reference numeral 4 denotes a plurality of strip electrodes provided on the insulator 2, and 10 denotes a moving element that moves on the stator 1. The strip electrode 4 includes three strip electrodes 4a, 4b and 4c which are insulated from each other.
It is composed of poles and is insulated and embedded in the stator 1. The mover 10 includes an insulator layer 11 and a high resistance layer 12.

A specific configuration example will be described in detail with reference to FIG. In the figure, 3 is a glass epoxy substrate on which strip electrodes 4a, 4b, 4c are provided on the same surface. Reference numeral 5 denotes an epoxy resin applied to the surfaces of the glass epoxy substrate 3 and the strip electrode 4, which forms a part of the insulator 2 and insulates the strip electrodes 4a, 4b and 4c. 6 and 7 are PET films, which together with the glass epoxy substrate 3 and the epoxy resin 5 constitute the insulator 2.

Next, the operation will be described with reference to FIG. 14 for explaining the function of the electrostatic actuator. First, a positive or negative voltage is applied to each of the strip electrodes 4a, 4b, 4c. The strip electrodes 4a, 4b, 4c are charged with positive and negative charges according to the electrodes of the applied voltage, and the strip electrodes 4 of the high resistance layer 12 are formed.
Opposite electric potentials are dielectrically induced at positions facing a, 4b, and 4c, respectively. In this state, the stator 1 and the mover 10 are charged to opposite electric potentials, so that an attractive force is exerted.

Next, by appropriately switching the potentials of the strip electrodes 4a, 4b, 4c, the stator 1 and the mover 10
Is moved by one pitch of the strip electrodes 4a, 4b, 4c by the above force. By repeating the switching of the applied voltage electrodes, the mover 10 can be driven to the predetermined position with respect to the stator 1 at a predetermined speed.

[0006]

In the conventional electrostatic film actuator as described above, in order to increase the driving speed, the speed at which the applied voltage is switched is increased or the distance between the electrode pitches of the strip electrodes 4a, 4b, 4c is increased. Need to spread. In this conventional example, if the switching speed of the applied voltage to the strip electrodes 4a, 4b, 4c is set too fast, the high resistance layer 12 of the moving element 10 will not be sufficiently dielectrically charged, so that a driving force sufficient to convey the moving element will be obtained. Can't get In addition, due to the structure of the stator, the mover 10 in one switching of the applied voltage is performed.
The moving distance of is determined by the distance between the electrode pitches.
However, since the distance between the electrode pitches of the strip electrodes 4 is determined at the manufacturing stage, the switching speed of the applied voltage must be changed in order to change the driving speed, and a sufficient driving force as described above is required at the time of high speed switching. There is a problem that it cannot be obtained.

Further, in the conventional electrostatic film actuator, there is a constraint condition on the physical property value of the moving element 10 that drives on the surface of the stator 1, and the surface resistance value of the high resistance layer 12 constituting the moving element 10 ( If [Ω / □] is not within a predetermined range (about 10 ¹² to 10 ¹⁵ [Ω / □]), the moving element 10 cannot be transported. That is, the mover 1
If the surface resistance value of 0 is not within the predetermined range, when a voltage is applied to the strip electrode 4, the electric charge that is dielectricized in the portion of the high resistance layer 12 facing the strip electrode 4 is Since it moves at the same time as switching and is not sufficiently dielectricized, the levitation force and suction force necessary for conveyance are not generated, and the moving element 10 cannot obtain a sufficient driving force.

Further, in this conventional example, since the moving element 10 is stepping drive by repeating feeding and stopping by one pitch according to the distance between the electrode pitches of the strip electrodes 4 by switching the applied voltage, the moving element 10 is smoothly fed. Can not do it.

Further, in the conventional electrostatic film actuator, since the strip electrodes 4 of the stator 1 are arranged in parallel in the same direction, the mover 10 drives or switches electrodes in a direction perpendicular to the strip electrodes 4. Can only reciprocate in the same direction.

The present invention has been made to solve the above problems, and the drive speed of the moving element can be arbitrarily changed without depending on the electrode pitch distance or the electrode switching speed. The purpose is to obtain a simple electrostatic film actuator.

Another object of the present invention is to obtain an electrostatic film actuator capable of transporting a moving element without being affected by the physical properties of the moving element.

Another object of the present invention is to obtain an electrostatic film actuator having a structure capable of smoothly transporting a moving element.

Another object of the present invention is to obtain an electrostatic film actuator having a structure capable of stably transporting a moving element in multiple directions.

[0014]

According to a first aspect of the present invention, there is provided an electrostatic film actuator having at least three poles formed in a parallel pattern on a surface of a film-shaped insulating base material at a predetermined pitch interval. A stator having a strip electrode, and a strip electrode having at least two poles formed in a parallel pattern on the surface of a film-like insulating base material moving on the surface of the stator with a predetermined pitch interval,
A plurality of movers having a high resistance layer on the surface, and a mover having a high resistance layer on the surface of the sheet-shaped insulator adsorbed or conveyed on the uppermost surface of the plurality of movers, By applying and switching a voltage to each strip-shaped electrode of the stator or the mover, the mover or the mover adjacent to the stator or the mover is floated and driven, or sucked and positioned. It is provided with a means for performing.

According to a second aspect of the present invention, a lower stator having strip electrodes of at least three poles formed in a parallel pattern on the upper surface of a film-shaped insulating base material at a predetermined pitch, and a lower stator. A stator having an upper stator having strip electrodes of at least three poles formed in a parallel pattern on a lower surface of a film-shaped insulating base material at a predetermined pitch interval, and a stator arranged so that the strip electrodes face each other;
The mover is conveyed by switching the voltage applied to the mover moving on the surface of the stator and the strip electrodes of the upper stator and the lower stator.

Further, according to a third aspect of the present invention, a stator having strip electrodes of at least three poles formed in a parallel pattern on the surface of a film-shaped insulating base material at a predetermined pitch interval, and on the surface of the stator. In a electrostatic film actuator including a moving element that moves, a plurality of the stators are connected to each other by changing their directions to two or more directions to form one stator group. It provides a driving direction with a degree of freedom.

[0017]

In the electrostatic film actuator according to the present invention, according to the first aspect, the mover is laminated on the stator, and the voltage applied to each strip electrode is similarly switched to change each mover. In order to drive, the moving distance of the mover for one electrode switching can be set arbitrarily regardless of the electrode pitch distance of the strip electrodes, and the mover is attracted and fixed by the mover so that the mover and the mover are aligned. Since it is configured to be conveyed by the stator, it does not depend on the physical property value of the mover that is the conveyed object.

Further, according to the second aspect, the moving element is configured to be conveyed by the agitating motion of the upper and lower stators.
It does not depend on the physical properties of the mover that is the transported object.

Further, according to the third aspect of the invention, since the plurality of stators are arranged with the strip-shaped electrodes turned in different directions, the moving element is not limited in the carrying direction.

[0020]

EXAMPLES Example 1. Hereinafter, the present invention will be described with reference to the drawings. 1 is a schematic view showing an electrostatic film actuator according to a first embodiment of the present invention, FIG. 2 is a perspective view of the electrostatic film actuator, and FIG. 3 is a sectional view of a stator. Figure 1
In the above, 20 is a computer for controlling the switching of the power source, 21 is a circuit for switching the power source, 22 is a DC power source device for giving a positive voltage, and 23 is a DC power source device for giving a negative voltage.

In FIG. 2, 1 is a stator and 4 is a stator 1.
Strip-shaped electrodes arranged on the upper side, 15a and 15b are movers laminated on the stator 1, and 40 and 41 are movers 15a and 15
The strip-shaped electrodes 10 respectively provided in b are movable elements 15
The moving element is arranged in contact with the upper surface of b. The stator 1 is shown in detail in the cross-sectional view of FIG. 3, and the strip-shaped electrode 4 is provided on the PET film 6 by etching. The strip-shaped electrode 4 has three poles 4a, 4b, and 4c in order to improve the insulation performance between the electrodes. A PET film 7 is applied as a cover sheet to apply silicon 13 and to keep the applied surface smooth.
Is laid. The insulating material may be varnish, elep coat or the like other than silicon.

Reference numeral 15a denotes a movable element which is arranged on the upper surface of the stator 1 so as to maintain a predetermined gap without positioning. Reference numeral 40 denotes a strip electrode provided on the mover 15a, which has three poles 40a, 40b and 40c, and is provided on the PET film 6a by etching as in the case of the stator 1. Silicon 13 is applied as an insulating material to sufficiently insulate the three pole electrodes 41a, 41b, 41c from each other, and a PET film 7a is laid as a cover sheet to keep the coated surface of the silicon 13 smooth. Also,
Since the mover 15a also serves as a product to be carried by the stator 1, a high resistance layer 16a is provided on the upper surface thereof.

Reference numeral 15b denotes a mover conveyed by the mover 15a, which is arranged on the upper surface of the mover 15a with a predetermined gap maintained. Reference numeral 41 is a strip electrode, which is a movable element 15.
Similar to the case a, three poles 41a, 41b and 41c are provided on the PET film 6b by etching. Further, silicon 13a is applied to sufficiently insulate the strip electrodes 41a, 41b, 41c. Also, the mover 15b
Is carried by the mover 15a, a high resistance layer 16b is provided on the upper surface thereof.

Numeral 10 is a moving element which is arranged on the upper surface of the movable element 15b with a predetermined gap maintained, and is composed of an insulator 11 and a high resistance layer 12, and is attracted or conveyed by the movable element 15b. The mover is, for example, paper, film, glass, or the like.

Next, the operation of this electrostatic actuator will be described. FIG. 5 is a switching diagram of applied voltages, and FIGS. 5A, 5B, and 5C are diagrams showing switching of voltages applied to the strip electrodes 4, 40, 41 of the first embodiment. Is. First, + V is applied to the strip electrode 4a of the stator 1,
A voltage of -V is applied to 4b and a voltage of 0V is applied to 4c, and the state is maintained for a while. At this time, the high resistance layer 16a of the mover 15a
The portions facing the upper strip electrodes 4a, 4b, 4c are charged with opposite potentials. This is called a charging operation. Then, by switching the voltage applied to the strip electrodes 4a, 4b, 4c as shown in FIG. 5 (a), the charge charged on the strip electrode 4 and the strip electrode 4 on the high resistance layer 16a of the mover 15a are changed. The charges that are dielectrically opposed to each other attract or repel each other and carry the movable element 15a.

Similar to the above operation, a voltage of −V is applied to the strip electrode 40a of the mover 15a, a voltage of + V is applied to 40b, and a voltage of 0V is applied to 40c, which is maintained for a while. At this time, the strip electrodes 40a, 4a on the high resistance layer 16b of the mover 15b.
Opposite electric potentials are charged on the portions facing 0b and 40c, respectively. Then, as shown in FIG. 5B, the strip electrodes 40a, 40
By switching the voltage applied to b and 40c,
Similar to the mover 15a, the charge charged on the strip electrode 40 and the strip electrode 40 on the high-resistivity layer 16b of the mover 15b.
The electric charges which are dielectrically opposed to each other attract or repel each other and carry the movable element 15b.

Further, the strip electrode 41 of the mover 15b.
When + V is applied to a, -V is applied to 41b, and 0V is applied to 41c, a charging operation is performed, so that opposite potentials are applied to the portions of the moving element 10 facing the strip electrodes 41a, 41b, and 41c on the high-resistance layer 12 respectively. Get charged. Then, as shown in FIG. 5C, the voltage applied to the strip electrodes 41a, 41b, 41c is switched to switch between the charges charged in the strip electrode 41 and the strip electrode on the high resistance layer 12 of the mover 10. The electric charges that are dielectrically opposed to 41 are attracted or repelled from each other and carry the mover 10 on the uppermost surface.

Thereafter, the stator 1 is moved to the movable element 15a by switching the voltage applied to each strip electrode in the same manner.
The mover 15a conveys the mover 15b, and the mover 15b conveys the mover 10. In addition, by stacking the mover 15 of the first embodiment in many layers, the mover 10 at the top when the applied voltage is switched once.
The transport distance is increased, and the number of layers to be laminated can be arbitrarily selected according to the application. However, the method of switching the applied voltage according to the first embodiment is only one embodiment, and an AC waveform may be applied as shown in FIG. 5D instead of the DC pulse waveform.

The electrostatic film actuator comprises a moving element 1
In order to increase the driving speed of the above, it is necessary to reduce the distance between the pitches of the strip electrodes 4 in the stator 1 and to increase the switching speed of the applied voltage. In the first embodiment, by stacking the mover 15, it is possible to increase the drive speed of the mover without increasing the switching speed of the applied voltage and reducing the distance between the electrode pitches of the strip electrodes. .

Example 2. FIG. 6 is a cross-sectional view showing an electrostatic film actuator according to a second embodiment of the present invention. In the first embodiment, the movers 15a and 15b are arranged on the stator 1 and the movement is arranged on the uppermost surface thereof. The child 10 is transported by switching the voltage applied to the strip electrodes 4, 40, 41 provided in the stator 1 and the movers 15a, 15b, respectively. The electrostatic film actuator with various configurations is used.

As shown in FIG. 6, 1 is a stator, 15a is a mover arranged on the stator 1, 40 is a strip electrode provided in the mover 15a, and 10 is the upper surface of the mover 15a. It is a mover arranged in a state. The strip-shaped electrode 4 in the stator 1 has three poles 4a, 4b and 4c. Silicon 13 is applied to enhance the insulating performance between the electrodes, and a PET film is used as a cover sheet to keep the applied surface smooth. 7 is laid. The strip electrode 40 in the mover 15a is
There are three poles 41a, 41b, 41c, and silicon 13 is applied to each of them in order to enhance the insulating performance between the electrodes. Further, in order to keep the coated surface smooth, a PET film 7 is laid on the upper surface of the silicon 13 as a cover sheet.

Next, the operation of the electrostatic film actuator of the second embodiment will be described (not shown). Stator 1
In addition to the strip-shaped electrode 4 of FIG.
A voltage of -V is applied to V and 4b, and a voltage of 0V is applied to 4c. Also,
The strip electrodes 41a, 41b, 41c of the mover 15a include
A constant voltage of +1/2 V is applied to each. Then, by switching the applied voltage to the strip electrodes 4a, 4b, 4c of the stator 1, the stator 1 obtains a repulsive force and an attractive force with respect to the electric charge dielectrically induced in the high resistance layer 16a of the movable element 15a, and the movable element 15a moves. The child 15a is conveyed. At this time, the mover 10 on the mover 15a has the strip electrodes 41a, 41a inside the mover 15a.
The mover 15 is moved by +1/2 V applied to b and 41c.
It is attracted to a and is conveyed by the stator 1 at the same time as the mover 15a. In addition, as shown in FIG.
It is also possible to adsorb the mover 10 at a portion where 5a is separated from the stator 1.

Although the electrostatic film actuator is subject to many restrictions on the transported object due to the physical properties of the moving element, in this embodiment, the moving element 10 is not directly transported, but is attracted to the movable element 15a and then indirectly. Conventionally, a high-resistivity layer was required for the conveyed object, but even if the conveyed object does not have a high-resistor layer or the surface resistance value is not within the predetermined range, it can be conveyed. .

Example 3. 8 is a sectional view showing an electrostatic film actuator according to a third embodiment of the present invention, and FIG.
10A to 10C are operation principle diagrams, and FIGS. 10A to 10C are operation model diagrams. In FIG. 8, 17 is an upper stator, 42 is a strip electrode arranged in the upper stator 17,
Reference numeral 0 denotes a mover arranged in contact with the upper surface of the upper stator. The upper stator 17 has a strip-shaped electrode 42 formed on the PET film 8 by etching.
In No. 2, silicon 30 is applied in order to improve the insulating performance between electrodes, and a PET film 9 is laid on it as a cover sheet to keep the applied surface smooth. Reference numeral 18 denotes a lower stator, in which the strip electrodes 43 are provided on the PET film 8 by etching, and the strip electrodes 43a, 43b, 4 having three poles are provided.
Silicon 31 is applied to improve the insulation performance between the electrodes of 3c, and a PET film 9 is laid on it as a cover sheet to keep the applied surface smooth. Then, the upper stator 17 and the lower stator 18 are connected to the respective strip electrodes 4
The two and 43 are arranged in contact with each other so as to face each other.

Next, the operating principle of this electrostatic film actuator will be described. First, as shown in FIG. 10A, a voltage of + V is applied to the strip electrode 42 of the upper stator 17, and + V, 43 is applied to the strip electrode 43 a of the lower stator 18.
-V is applied to b and -V is applied to 43c. A diagram modeling this state is shown in FIG. At this time, the strip-shaped electrode 43a and the strip-shaped electrode 4 in the portion facing it
Since 2 and 2 are both charged with + V, a repulsive force is generated, the upper stator 17 is distorted, and the mover 10 is levitated as illustrated. Next, while the voltage applied to the strip electrode 42 of the upper stator 17 remains at + V, the voltage applied to the strip electrode 43 of the lower stator 18 is changed to 43a as shown in FIG. 9B.
Switches to -V, 43b switches to + V, and 43c switches to -V. A diagram modeling this state is shown in FIG. At this time, since the strip-shaped electrode 43b of the lower stator 18 and the strip-shaped electrode 42 of the upper stator 17 in the portion facing the strip-shaped electrode 43 are both charged with + V, a repulsive force is generated, which is illustrated in FIG. As described above, the upper stator 17 is distorted and the mover 10 is levitated. Furthermore, the voltage applied to the strip electrode 42 of the upper stator 17 remains + V, and the voltage applied to the strip electrode 43 of the lower stator 18 is -V and 43b as shown in FIG. 9C. -V and 43c are switched to + V. A diagram modeling this state is shown in FIG. At this time, since the strip electrode 43c of the lower stator 18 and the strip electrode 42 of the upper stator 17 at the portion facing the strip electrode 43c are both charged with + V, a repulsive force is generated, and FIG.
As shown in (c), the upper stator 17 is distorted, and the mover 10 is levitated. Hereinafter, as described above, the lower stator 18
By switching the voltage applied to the strip electrodes 43a, 43b, 43c, the moving element 10 is conveyed rightward in the figure due to the frictional force received from the distorted portion of the surface of the upper stator 17.

The electrostatic film actuator includes a moving element 1
There was a problem that the surface resistance value of the high resistance layer 12 of 0 has a great influence on the driving force, but the electrostatic film actuator of the present embodiment induces electric charges to the high resistance layer 12 of the moving element 10. Since it is not necessary to carry out such movement, it is possible to stably convey the moving element without depending on the physical properties of the moving element or without moving the high resistance layer.

Example 4. Fourth Embodiment FIG. 11 is a perspective view of an electrostatic film actuator showing a fourth embodiment of the present invention. The fifth embodiment uses a stator having the same structure as that of the first embodiment. In the figure, 51 is a square-shaped stator,
Reference numeral 44 is a strip electrode provided in the stator 51.
The stator 51 is composed of a square PET film 6 on which the strip electrodes 4 are formed.
4 is provided by etching. 4 strip electrodes
4a, 44b, and 44c, which have three electrodes, are coated with silicon 13 in order to enhance the insulation performance between electrodes, and a PET film 7 is laid as a cover sheet on it to keep the coated surface smooth (not shown). There are two types of stators 51a and 51b depending on the arrangement direction of the strip electrodes. The two types of stators 51a and 51b as a whole serve as one stator 50a.

As shown in FIG. 11, five stators 51a are arranged in the x direction, four stators 51b are arranged in the y direction, and the respective strip electrodes 44 are arranged vertically in the x direction or the y direction. is there. Since the electrostatic film actuator having the parallel strip electrodes conveys the moving element only in the direction perpendicular to the strip electrodes, in the present embodiment, the moving element 10 has two directions of reciprocating conveyance in the x direction and reciprocating conveyance in the y direction. It enables reciprocal transport. When carrying in the other direction, it can be carried by changing the magnitude of the voltage applied to the strip electrode or the switching speed of the electrodes.

Example 5. FIG. 12 is a perspective view showing an electrostatic film actuator according to the fifth embodiment of the present invention.
In the figure, reference numeral 52 denotes a stator having a regular hexagonal shape. Reference numeral 45 is a strip electrode provided in the stator 52,
It consists of three poles 45a, 45b and 45c. The stator 52 is formed by etching the PET film 6 on the strip electrode 45.
Is provided. Silicon 13 is applied as an insulating material in order to enhance the insulating performance between the strip electrodes 45a, 45b, 45c. A PET film 7 is laid as a cover sheet to keep the upper surface of the silicon 13 smooth (not shown). The stator 51 is 5 depending on the arrangement direction of the strip electrodes.
There are three types, 2a, 52b and 52c. These stators 52
The entire a, 52b, 52c play the role of one stator 50b.

As shown in FIG. 12, eight stators 52a are arranged in the y direction and 52b are arranged in the direction of 60 ° with respect to the x direction.
Eight sheets 52c are arranged in a direction of −60 ° with respect to the x direction so that stators facing the same direction are not adjacent to each other. In the case of the fourth embodiment, the stator is arranged in the xy directions, but in the present embodiment, since the stator 52 is arranged in the direction shown in the figure, it is sufficient in the ± 60 ° direction with respect to the x direction. The driving force can be obtained. Also, in the other direction, as in the fourth embodiment, it is possible to change the magnitude of the voltage applied to the strip electrode and the switching speed of the electrodes.

When the mover is transported in the other direction, the shape of the stator is changed according to the application, and small stators are stuck together to obtain a stator that can transport the mover in the required direction. You can Further, similarly to the fourth and fifth embodiments, by changing the shape of the stator to a regular polygon such as a regular octagon or a regular dodecagon, the magnitude of the applied voltage can be changed or the switching speed of the electrodes can be changed. By switching the stator to which a voltage is applied without changing it, it is possible to stably transport the mover.

[0042]

As described above, according to the present invention, the stator having the strip electrodes of three poles and the mover laminated in a plurality of layers on the upper surface of the stator are arranged in contact with each other and laminated. In the electrostatic film actuator in which the mover is arranged on the uppermost surface of the mover, the mover is configured to be driven arbitrarily, so that it does not depend on the switching speed of the applied voltage or the distance between the electrode pitches. There is an effect that the drive speed of can be set.

Further, a stator having three-pole strip electrodes and a mover laminated in a plurality of layers on the upper surface of the stator are arranged in contact with each other, and the mover is arranged on the uppermost surface of the laminated mover. In the arranged electrostatic film actuator, the moving element at the top of the stacked moving elements is not switched, but a constant voltage is applied to the moving element to attract the moving element. There is an effect that it can be transported without depending on it.

Further, an upper stator provided with a strip electrode of 3 poles and a lower stator provided with a strip electrode of 3 poles are arranged at positions where the strip electrodes face each other, and a mover is installed on the uppermost surface. In the electrostatic film actuator described above, by applying a constant voltage to the upper stator and switching the applied voltage to the lower stator, the moving member is conveyed by agitating the upper stator, There is an effect that it can be transported without depending on the physical properties of the mover.

Further, in the electrostatic actuator in which the stators having arbitrary shapes are connected to each other to form one stator, since the strip electrodes are oriented in multiple directions, the moving element can be sufficiently moved in any direction. There is an effect that it can be stably transported with various driving forces.

[Brief description of drawings]

FIG. 1 is a schematic view showing an electrostatic film actuator according to a first embodiment of the present invention.

FIG. 2 is a perspective view of the electrostatic film actuator according to the first embodiment.

FIG. 3 is a cross-sectional view of the stator according to the first embodiment.

FIG. 4 is a cross-sectional view of the electrostatic film actuator of Example 1.

FIG. 5 is a switching diagram of applied voltage according to the first embodiment.

FIG. 6 is a sectional view showing an electrostatic film actuator according to a second embodiment of the present invention.

FIG. 7 is a cross-sectional view showing an electrostatic film actuator that is an application example of the second embodiment.

FIG. 8 is a sectional view showing an electrostatic film actuator according to a third embodiment of the present invention.

FIG. 9 is a diagram illustrating an operation principle of the electrostatic film actuator according to the third embodiment.

FIG. 10 is an operation model diagram of the electrostatic film actuator according to the third embodiment.

FIG. 11 is a schematic view of a stator of an electrostatic film actuator according to a fourth embodiment of the present invention.

FIG. 12 is a schematic view of a stator of an electrostatic film actuator according to a fifth embodiment of the present invention.

FIG. 13 is a perspective view showing a conventional electrostatic film actuator.

FIG. 14 is a configuration diagram for explaining a function of a conventional electrostatic film actuator.

FIG. 15 is a cross-sectional view of a specific configuration example of a conventional electrostatic film actuator.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Stator 2 Insulator 3 Glass epoxy substrate 4, 15, 40-45 Strip-shaped electrode 5 Epoxy resin 6-9 PET film 10 Mobile element 11 Insulator layer 12 High resistance layer 13, 30, 31 Silicon 16 High resistance layer 17 Upper Stator 18 Lower Stator 20 Computer 21 Electrode Switching Circuit 22 DC Power Supply (Positive Voltage) 23 DC Power Supply (Negative Voltage) 50-52 Stator

[Procedure amendment]

[Submission date] March 11, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0021

[Correction method] Change

[Correction content]

In FIG. 2, 1 is a stator and 4 is a stator 1.
Strip-shaped electrodes arranged on the upper side, 15a and 15b are movers laminated on the stator 1, and 40 and 41 are movers 15a and 15
The strip-shaped electrodes 10 respectively provided in b are movable elements 15
The moving element is arranged in contact with the upper surface of b. The stator 1 is shown in detail in the cross-sectional view of FIG. 3, and the strip-shaped electrode 4 is provided on the PET film 6 by etching. The strip-shaped electrode 4 has three poles 4a, 4b, and 4c in order to improve the insulation performance between the electrodes. A PET film 7 is applied as a cover sheet to apply silicon 13 and to keep the applied surface smooth.
Is laid. Insulating material is good in addition to the silicon even etc. varnish.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Name of item to be corrected] 0029

[Correction method] Change

[Correction content]

The electrostatic film actuator comprises a moving element 1
In order to increase the driving speed of 0, the distance between the pitches of the strip electrodes 4 in the stator 1 must be narrowed and the switching speed of the applied voltage must be increased. In the first embodiment, by stacking the mover 15, it is possible to increase the drive speed of the mover without increasing the switching speed of the applied voltage and reducing the distance between the electrode pitches of the strip electrodes. .

[Procedure 3]

[Document name to be corrected] Drawing

[Correction target item name] Figure 9

[Correction method] Change

[Correction content]

[Figure 9]

Claims (3)

[Claims] 1. A stator having a strip-shaped electrode having at least three poles formed in a parallel pattern on a surface of a film-shaped insulating base material at a predetermined pitch, and a film-shaped member which moves on the surface of the stator. A plurality of movable elements having at least two-pole electrode strips formed in a parallel pattern at a predetermined pitch interval on the surface of the insulating base material and having a high resistance layer on the surface; It consists of a mover having a high resistance layer on the surface of a sheet-like insulator that is adsorbed or conveyed on the uppermost surface of the mover, and by applying and switching a voltage to the strip electrodes of each of the stator or the mover. , An electrostatic film actuator comprising means for levitating and driving the movable element or the movable element adjacent to the stator or the movable element, or adsorbing and positioning the movable element or the movable element. Eta. 2. A lower stator having strip electrodes of at least three poles formed in a parallel pattern on the upper surface of a film-shaped insulating base material at a predetermined pitch, and a film-shaped lower stator. A stator in which an upper stator having strip electrodes of at least three poles formed in a parallel pattern on a lower surface of an insulating base material at a predetermined pitch is arranged so that the strip electrodes face each other, and a surface of the stator. An electrostatic film actuator characterized in that the moving element is moved by switching a voltage applied to a moving element moving upward and a strip-shaped electrode of each of the upper stator and the lower stator. 3. A stator having strip electrodes of at least three poles formed in a parallel pattern on a surface of a film-shaped insulating base material at a predetermined pitch, and a mover moving on the surface of the stator. In the electrostatic film actuator provided with, the plurality of the stators are changed in direction in two or more directions and are connected to each other to form one stator group, so that the mover has two or more degrees of freedom. An electrostatic film actuator characterized by giving a driving direction.