JPH07121856A - Magnetic recording medium and its production - Google Patents
Magnetic recording medium and its productionInfo
- Publication number
- JPH07121856A JPH07121856A JP28723993A JP28723993A JPH07121856A JP H07121856 A JPH07121856 A JP H07121856A JP 28723993 A JP28723993 A JP 28723993A JP 28723993 A JP28723993 A JP 28723993A JP H07121856 A JPH07121856 A JP H07121856A
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- Japan
- Prior art keywords
- film
- magnetic
- recording medium
- magnetic recording
- substrate
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- Magnetic Record Carriers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、非磁性基板上に各種膜
を順次積層して一体状とした磁気記録媒体に関し、さら
に詳しくは高記録密度化に対応可能な磁気記録媒体及び
その製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium in which various films are sequentially laminated on a non-magnetic substrate so as to be integrated, and more specifically, a magnetic recording medium which can cope with high recording density and a manufacturing method thereof. It is about.
【0002】[0002]
【従来の技術】従来の磁気記録媒体は、Ni−Pをメッ
キしたAl基板上に、下地膜、磁性膜、保護膜などを順
次スパッタリング法などで成膜させた後、潤滑剤を表面
にコーティングして作製されている。2. Description of the Related Art In a conventional magnetic recording medium, a base film, a magnetic film, a protective film and the like are sequentially formed on an Al substrate plated with Ni-P by a sputtering method or the like, and then a lubricant is coated on the surface. It is made by.
【0003】そして、上記各種の膜のうち、磁性膜は、
例えば特開昭61−292219号公報、特開昭62−
239420号公報、或いは特開昭62−137720
号公報等に示されるようにCoを主成分としてPt,N
b,Ta,Cr,Ni等を含む3元素系または4元素系
合金をスパッタリング法などにより成膜させることが提
案されている。また、下地膜には、例えば特開昭62−
257618号公報、特開昭63−106917号公
報、或いは前記特開昭61−292219号公報等に示
されるようにCrまたはCr合金が使用されている。Among the above various films, the magnetic film is
For example, JP-A-61-292219 and JP-A-62-1922
239420, or Japanese Patent Laid-Open No. 62-137720.
As disclosed in Japanese Patent Publication No.
It has been proposed to form a three-element or four-element alloy containing b, Ta, Cr, Ni, etc. by a sputtering method or the like. Further, as the base film, for example, Japanese Patent Laid-Open No.
Cr or Cr alloys are used as shown in JP-A-257618, JP-A-63-106917, or JP-A-61-292219.
【0004】さらに、最近になって非磁性基板として、
高記録密度化を指向して従来のAl基板から、軽くて強
く、しかも平坦性に優れるガラスまたはカーボン系基板
へと材質変換することが検討されている。Furthermore, recently, as a non-magnetic substrate,
In order to increase the recording density, it is considered to change the material from a conventional Al substrate to a glass or carbon substrate which is light and strong and has excellent flatness.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、従来の
非磁性基板としてのAl基板に代えて、単にそのままガ
ラスまたはカーボン基板を使用したとしても、ガラスま
たはカーボン系基板の表面に存在する元素の一部がCr
またはCr合金からなる下地膜中へ拡散したり、ガラス
またはカーボン系基板内に存在する気孔や粒界に保持
(内包)されているH2 O、H2 が放出され、特にガラ
ス系基板ではOイオンの拡散があるため、例えば磁性膜
での保磁力(Hc)が低下して角型比で代表される磁化
のヒステリシスが適当でなくなり、高記録密度化を達成
することができないこともある。However, even if the glass or carbon substrate is used as it is instead of the conventional Al substrate as the non-magnetic substrate, some of the elements present on the surface of the glass or carbon substrate are used. Is Cr
Alternatively, H 2 O and H 2 which are diffused into a base film made of a Cr alloy or retained (included) in pores or grain boundaries existing in a glass or carbon-based substrate are released. Due to the diffusion of ions, for example, the coercive force (Hc) in the magnetic film is lowered and the hysteresis of the magnetization represented by the squareness ratio becomes unsuitable, so that high recording density may not be achieved.
【0006】そこで、その改良として提案された特開昭
61−222021号公報に記載の磁気記録媒体は非磁
性基板と下地膜との間にZrO2 、MgF2 、In2 O
3 、SnO2 等を介在させ、特開平1−173427号
公報に記載の磁気記録媒体はCr,Mo,Ta,W,
V,Ti,Zr,Cuから選択された異なる二層の膜を
介在させるものであり、それぞれ磁気特性を向上させる
と共に機械的特性を改善するものである。しかし、Cr
下地膜と非磁性基板との間に形成させる介在膜は、単に
非磁性基板からの外乱元素又はイオンの磁性膜への移動
を抑制するだけでなく、介在膜の成膜条件を制御して下
地膜及び磁性膜が磁気記録に適した形でなければならな
い。特にCo磁性膜の配向として、垂直磁化に寄与する
Co(002)面の配向を抑えながら水平磁化に寄与す
るCo(110)面の配向を優先させる必要がある。Therefore, the magnetic recording medium disclosed in Japanese Patent Laid-Open No. 61-222021 proposed as an improvement is ZrO 2 , MgF 2 , In 2 O between the non-magnetic substrate and the underlying film.
3, the SnO 2 or the like are interposed, the magnetic recording medium described in JP-A-1-173427 is Cr, Mo, Ta, W,
Two different layers of films selected from V, Ti, Zr, and Cu are interposed to improve magnetic properties and mechanical properties, respectively. However, Cr
The intervening film formed between the base film and the non-magnetic substrate not only suppresses the movement of disturbance elements or ions from the non-magnetic substrate to the magnetic film, but also controls the film forming conditions of the intervening film. The ground film and the magnetic film must be in a shape suitable for magnetic recording. In particular, as the orientation of the Co magnetic film, it is necessary to give priority to the orientation of the Co (110) plane contributing to the horizontal magnetization while suppressing the orientation of the Co (002) plane contributing to the vertical magnetization.
【0007】[0007]
【課題を解決するための手段】本発明者らは、上記問題
を解決し、且つさらに高い記録密度を達成するために鋭
意研究した結果、非磁性基板、下地膜、磁性膜、保護膜
及び潤滑膜を基本構成とする磁気記録媒体であって、非
磁性基板と下地膜との間に、非磁性基板、下地膜、磁性
膜、保護膜及び潤滑膜を基本構成とする磁気記録媒体で
あって、非磁性基板と下地膜との間に介在させる介在膜
が、a=1,b=0.1〜1.4であるCra Ob 、c
=1,d=0.8〜1.8であるTic Od 、e=1,
f=0.05〜0.25,g=0.002〜0.02で
あるNie Pf Og から選ばれる一種の組成を有するこ
とを特徴とする磁気記録媒体及びその製造方法を見出し
たものである。DISCLOSURE OF THE INVENTION The inventors of the present invention have conducted extensive studies to solve the above problems and achieve a higher recording density. As a result, a non-magnetic substrate, a base film, a magnetic film, a protective film and a lubrication film A magnetic recording medium having a film as a basic structure, wherein a non-magnetic substrate, a base film, a magnetic film, a protective film, and a lubricating film are basically formed between a non-magnetic substrate and a base film. , The intervening film interposed between the non-magnetic substrate and the base film is Cr a O b , c in which a = 1 and b = 0.1 to 1.4.
= 1, d = 0.8 to 1.8, Ti c O d , e = 1,
A magnetic recording medium having a composition selected from Ni e P f O g in which f = 0.05 to 0.25 and g = 0.002 to 0.02 and a manufacturing method thereof have been found. It is a thing.
【0008】本発明の磁気記録媒体の各構成を説明する
と、非磁性基板、下地膜、磁性膜、保護膜及び潤滑膜
は、特にその材質や組成等を限定するものではなく、公
知のものを適宜に選定して使用することができ、その成
膜方法も特に限定するものではない。例えば非磁性基板
はカナサイトガラス、強化ガラス等のガラス系基板やカ
ーボン系基板等を使用することができる。また、前記の
ように下地膜としてはCrまたはCr合金からなるもの
を使用してもよいし、磁性膜としてはCoを主成分とす
るものをスパッタリング法で成膜してもよい。Each component of the magnetic recording medium of the present invention will be described. The non-magnetic substrate, undercoating film, magnetic film, protective film and lubricating film are not particularly limited in their materials and compositions, but may be known ones. It can be appropriately selected and used, and the film forming method is not particularly limited. For example, as the non-magnetic substrate, a glass-based substrate such as canasite glass or tempered glass or a carbon-based substrate can be used. Further, as described above, a base film made of Cr or a Cr alloy may be used, and a magnetic film containing Co as a main component may be formed by a sputtering method.
【0009】また、上記非磁性基板と下地膜との間に形
成される介在膜は、前記のように、Cra Ob (a=
1,b=0.1〜1.4),Tic Od (c=1,d=
0.8〜1.8),Nie Pf Og (e=1,f=0.
05〜0.25,g=0.002〜0.02)から選ば
れる一種の組成を有するものであり、ガスまたはイオン
の拡散を防止する機能を果たし、しかも水平磁気記録に
適したCo(110)配向した磁性膜が成長する素地を
つくる。The intervening film formed between the non-magnetic substrate and the base film is Cr a O b (a =
1, b = 0.1~1.4), Ti c O d (c = 1, d =
0.8~1.8), Ni e P f O g (e = 1, f = 0.
Co (110), which has a composition selected from the range of 05 to 0.25, g = 0.002 to 0.02), has a function of preventing diffusion of gas or ions, and is suitable for horizontal magnetic recording. ) Create a substrate on which an oriented magnetic film grows.
【0010】a=1,b=0.1〜1.4であるCra
Ob の組成を有する介在膜は、酸素を0.2〜2%添加
したアルゴンガス雰囲気中での反応性スパッター、また
は0.1〜2vol%のO2 を添加したCrターゲット
を使用してのスパッター等により成膜される。尚、この
Cra Ob 膜の成膜温度は100〜300℃に設定さ
れ、Cr下地膜の成膜温度は300〜500℃に設定さ
れる。c=1,d=0.8〜1.8であるTic Od の
組成を有する介在膜は、酸素を0.2〜2%添加したア
ルゴンガス雰囲気中での反応性スパッター、または0.
1〜2vol%のO2 を添加したTiターゲットを使用
してのスパッター等により成膜される。尚、このTic
Od 膜の成膜温度は30〜300℃に設定され、Cr下
地膜の成膜温度は300〜500℃に設定される。e=
1,f=0.05〜0.25,g=0.002〜0.0
2であるNie Pf Og の組成を有する介在膜は、酸素
を0.2〜2%添加したアルゴンガス雰囲気中での反応
性スパッター、または0.1〜2vol%のO2 を添加
したNiPターゲットを使用してのスパッター等により
成膜される。尚、このNie Pf Og 膜の成膜温度は3
0〜100℃に設定され、Cr下地膜の成膜温度は15
0〜300℃に設定される。Cr a with a = 1 and b = 0.1-1.4
The intervening film having a composition of O b is formed by reactive sputtering in an argon gas atmosphere containing 0.2 to 2% of oxygen or a Cr target containing 0.1 to 2 vol% of O 2 . The film is formed by a sputter or the like. The film forming temperature of the Cr a O b film is set to 100 to 300 ° C., and the film forming temperature of the Cr base film is set to 300 to 500 ° C. The intervening film having a composition of Ti c O d in which c = 1 and d = 0.8 to 1.8 is reactive sputtered in an argon gas atmosphere containing 0.2 to 2% of oxygen, or 0.
A film is formed by sputtering or the like using a Ti target to which 1 to 2 vol% O 2 is added. In addition, this Ti c
The film forming temperature of the Od film is set to 30 to 300 ° C, and the film forming temperature of the Cr underlayer film is set to 300 to 500 ° C. e =
1, f = 0.05 to 0.25, g = 0.002 to 0.0
Interlayer having a composition of a 2 Ni e P f O g was added reactive sputtering or 0.1~2Vol% of O 2, the oxygen and argon gas atmosphere was added 0.2 to 2% The film is formed by sputtering using a NiP target. The film forming temperature of this Ni e P f O g film was 3
The temperature is set to 0 to 100 ° C., and the Cr underlayer deposition temperature is 15
It is set to 0 to 300 ° C.
【0011】[0011]
【作用】本発明の磁気記録媒体は、前記Cra Ob ,T
ic Od ,Nie Pf Og から選ばれる一種の組成を有
する介在膜がガスまたはイオンの拡散を防止し、その直
上の下地膜を確実に保護することができる。しかも、上
記構成の介在膜によって磁性膜内でCo(110)軸が
非磁性基板に垂直に配向し、その結果として水平磁化性
能を改善することができる。The magnetic recording medium of the present invention has the above-mentioned Cr a O b , T
The intervening film having a kind of composition selected from i c O d and Ni e P f O g prevents diffusion of gas or ions, and can reliably protect the underlying film immediately above. Moreover, the Co (110) axis is oriented perpendicularly to the non-magnetic substrate in the magnetic film by the intervening film having the above-mentioned configuration, and as a result, the horizontal magnetization performance can be improved.
【0012】[0012]
【実施例】以下、本発明の実施例を示す。EXAMPLES Examples of the present invention will be shown below.
【0013】[実施例1〜3,比較例1〜3];通常の
スパッタリング法により、3.5インチ非磁性基板上に
介在膜(Cra Ob 又はTic Od 又はNie Pf O
g )、下地膜、磁性膜、保護膜を順次成膜し、最上面に
パーフロロポリエーテル系潤滑剤を塗布して実施例1〜
3の磁気記録媒体を製造し、高密度化の指標としてB−
shiftを測定して表2に示した。尚、上記非磁性基
板並びに各種膜の構成内容は表1に示した。また、B−
shiftの測定条件は、ギャップ長0.35μm、ト
ラック幅6.9μmの薄膜ヘッドを使用し、浮上高さ
2.5マイクロインチ、半径20mmにて測定した。変
調コードはM.F.M.、記録パターンはB6D9にて
評価した。一方、各磁気記録媒体より3×4cmの試片
を切り出し、X線回折装置でCo(110)面(2θ=
74°)の配向、及びCo(002)面(2θ=44
°)の配向を測定し、水平磁気記録に適した状態である
か否かを測定した。さらに、磁気特性は、各磁気記録媒
体より7mm角の試片を切り出し、振動式磁気特性装置
(VSM)にて保磁力(Hc)、残留磁化*膜厚(Br
・δ)、角型比(S* )を測定した。表1中、各種膜に
おける成膜温度は、放射型温度計により測定したもので
ある。さらに、上記介在膜を設けない以外は全く同一の
構成の比較例1〜3の磁気記録媒体を製造し、同一の試
験を行った結果を表2に並記した。[0013] [Examples 1-3, Comparative Examples 1-3]; by conventional sputtering, the interlayer 3.5-inch non-magnetic substrate (Cr a O b or Ti c O d or Ni e P f O
g ), a base film, a magnetic film, and a protective film are sequentially formed, and a perfluoropolyether-based lubricant is applied on the uppermost surface of Examples 1 to 1.
The magnetic recording medium of No. 3 was manufactured, and B-
The shift was measured and shown in Table 2. The constitutional contents of the above-mentioned non-magnetic substrate and various films are shown in Table 1. Also, B-
The shift measurement conditions were a thin film head having a gap length of 0.35 μm and a track width of 6.9 μm, and a flying height of 2.5 microinches and a radius of 20 mm. The modulation code is M.I. F. M. The recording pattern was evaluated by B6D9. On the other hand, a 3 × 4 cm test piece was cut out from each magnetic recording medium, and the Co (110) plane (2θ =
74 °) orientation and Co (002) plane (2θ = 44
Orientation) was measured to determine whether or not it was in a state suitable for horizontal magnetic recording. Further, regarding magnetic characteristics, a 7 mm square sample was cut out from each magnetic recording medium, and coercive force (Hc), remanent magnetization * film thickness (Br) were measured by a vibration type magnetic characteristic device (VSM).
.Delta.) And squareness ratio (S * ) were measured. In Table 1, the film forming temperatures of various films are measured with a radiation thermometer. Further, the magnetic recording media of Comparative Examples 1 to 3 having exactly the same configuration except that the above-mentioned intervening film was not formed were manufactured, and the same test was performed.
【0014】[0014]
【表1】 [Table 1]
【0015】[0015]
【表2】 [Table 2]
【0016】[実施例4];介在膜用のターゲットを酸
素0.5%入りのCrターゲットに代えた以外は、前記
実施例1と全く同様に実施例4の磁気記録媒体を製造
し、同一の試験を行った結果を表3に示した。尚、比較
のために前記比較例1の結果を表3に並記した。[Embodiment 4] The magnetic recording medium of Embodiment 4 was manufactured in the same manner as in Embodiment 1 except that the Cr target containing 0.5% oxygen was used as the target for the intervening film. Table 3 shows the result of the test. The results of Comparative Example 1 are shown in Table 3 for comparison.
【0017】[0017]
【表3】 [Table 3]
【0018】[実施例5〜7];介在膜用のターゲット
を純Ti(酸素1.0%入りAr雰囲気)に代えた以外
は、前記実施例1〜3と全く同様に実施例5〜7の磁気
記録媒体を製造し、同一の試験を行った結果を表4に示
した。尚、比較のために前記比較例1〜3の結果を表4
に並記した。[Examples 5 to 7] Examples 5 to 7 are exactly the same as Examples 1 to 3 except that the target for the intervening film is replaced by pure Ti (Ar atmosphere containing 1.0% of oxygen). Table 4 shows the results of manufacturing the magnetic recording medium of No. 1 and performing the same test. For comparison, the results of Comparative Examples 1 to 3 are shown in Table 4.
It was written side by side.
【0019】[0019]
【表4】 [Table 4]
【0020】[実施例8];介在膜用のターゲットを酸
素0.5%入りのTiターゲットに代えた以外は、前記
実施例1と全く同様に実施例8の磁気記録媒体を製造
し、同一の試験を行った結果を表5に示した。尚、比較
のために前記比較例1の結果を表5に並記した。[Embodiment 8] The magnetic recording medium of Embodiment 8 was manufactured in the same manner as in Embodiment 1 except that the Ti target containing 0.5% oxygen was used as the target for the intervening film. Table 5 shows the result of the test. The results of Comparative Example 1 are also shown in Table 5 for comparison.
【0021】[0021]
【表5】 [Table 5]
【0022】[実施例9〜11];介在膜用のターゲッ
トをNi1 P0.2 (酸素1.0%入りAr雰囲気)に代
えた以外は、前記実施例1〜3と全く同様に実施例9〜
11の磁気記録媒体を製造し、同一の試験を行った結果
を表6に示した。尚、比較のために前記比較例1〜3の
結果を表6に並記した。[Examples 9 to 11] Example 9 was exactly the same as Examples 1 to 3 except that the target for the intervening film was changed to Ni 1 P 0.2 (Ar atmosphere containing 1.0% oxygen). ~
11 magnetic recording media were manufactured and the same test was performed. The results are shown in Table 6. The results of Comparative Examples 1 to 3 are also shown in Table 6 for comparison.
【0023】[0023]
【表6】 [Table 6]
【0024】[実施例12];介在膜用のターゲットを
酸素0.5%入りのNi1 P0.2 ターゲットに代えた以
外は、前記実施例1と全く同様に実施例12の磁気記録
媒体を製造し、同一の試験を行った結果を表7に示し
た。尚、比較のために前記比較例1の結果を表7に並記
した。[0024] [Example 12]; except that the target for the intervening film was changed to Ni 1 P 0.2 target oxygen 0.5% containing, producing a magnetic recording medium of Example 1 in exactly the same manner as in Example 12 The results of the same tests are shown in Table 7. The results of Comparative Example 1 are also shown in Table 7 for comparison.
【0025】[0025]
【表7】 [Table 7]
【0026】[0026]
【発明の効果】以上説明したように、本発明の磁気記録
媒体は、高密度記録に適した磁気特性を有するものであ
る。As described above, the magnetic recording medium of the present invention has magnetic characteristics suitable for high density recording.
【0027】また、介在膜がガスまたはイオンの拡散を
防止し、しかも、上記介在膜によって磁性膜内でCo
(110)軸が非磁性基板に垂直に配向し、その結果と
して水平磁化性能を改善することができる。Further, the intervening film prevents diffusion of gas or ions, and moreover, the intervening film prevents Co in the magnetic film.
The (110) axis can be oriented perpendicular to the non-magnetic substrate, resulting in improved horizontal magnetization performance.
【図1】本発明の磁気記録媒体を模式的に示す断面図で
ある。FIG. 1 is a sectional view schematically showing a magnetic recording medium of the present invention.
Claims (4)
び潤滑膜を基本構成とする磁気記録媒体であって、非磁
性基板と下地膜との間に介在させる介在膜が、a=1,
b=0.1〜1.4であるCra Ob 、c=1,d=
0.8〜1.8であるTic Od 、e=1,f=0.0
5〜0.25,g=0.002〜0.02であるNie
Pf Og から選ばれる一種の組成を有することを特徴と
する磁気記録媒体。1. A magnetic recording medium having a non-magnetic substrate, a base film, a magnetic film, a protective film, and a lubricating film as a basic structure, wherein an intervening film interposed between the non-magnetic substrate and the base film is a = 1,
Cr a O b where b = 0.1 to 1.4, c = 1, d =
Ti c O d of 0.8 to 1.8, e = 1, f = 0.0
5 to 0.25, which is g = 0.002~0.02 Ni e
A magnetic recording medium having a composition selected from P f O g .
板である請求項1に記載の磁気記録媒体。2. The magnetic recording medium according to claim 1, wherein the non-magnetic substrate is a glass or carbon-based substrate.
たは2記載の磁気記録媒体。3. The magnetic recording medium according to claim 1, wherein the underlayer film contains Cr as a main component.
1.4であるCra Ob 、c=1,d=0.8〜1.8
であるTic Od 、e=1,f=0.05〜0.25,
g=0.002〜0.02であるNie Pf Og から選
ばれる一種の組成を有する介在膜を形成させ、上記介在
膜の表面に下地膜、磁性膜、保護膜及び潤滑膜を成膜す
るようにしたことを特徴とする磁気記録媒体の製造方
法。4. A = 1, b = 0.1 on a non-magnetic substrate.
Cr a O b of 1.4, c = 1, d = 0.8 to 1.8
Ti c O d , e = 1, f = 0.05 to 0.25,
interlayer is formed that comprises a composition selected from a g = 0.002~0.02 Ni e P f O g, underlying film on the surface of the interlayer, a magnetic film, a protective film and a lubricant film formed A method of manufacturing a magnetic recording medium, characterized in that a film is formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28723993A JPH07121856A (en) | 1993-10-25 | 1993-10-25 | Magnetic recording medium and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28723993A JPH07121856A (en) | 1993-10-25 | 1993-10-25 | Magnetic recording medium and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH07121856A true JPH07121856A (en) | 1995-05-12 |
Family
ID=17714840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28723993A Pending JPH07121856A (en) | 1993-10-25 | 1993-10-25 | Magnetic recording medium and its production |
Country Status (1)
Country | Link |
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JP (1) | JPH07121856A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6849164B2 (en) | 2001-05-11 | 2005-02-01 | Fuji Electric Co., Ltd. | Magnetic recording medium and method of manufacturing the same |
-
1993
- 1993-10-25 JP JP28723993A patent/JPH07121856A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6849164B2 (en) | 2001-05-11 | 2005-02-01 | Fuji Electric Co., Ltd. | Magnetic recording medium and method of manufacturing the same |
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