JPH07113424B2 - Branch valve - Google Patents

Description

TECHNICAL FIELD The present invention relates to a branch valve, and particularly to pure water / ultra pure water used in a manufacturing line of semiconductor integrated circuits such as IC, LSI, and VLSI, and manufacturing of pharmaceuticals. The present invention relates to a novel branch valve suitable for use as a branch of a pipeline for transporting aseptic water used for preparation or a fluid related to food.

(Prior Art) Conventionally, when a branch portion having an opening / closing valve is provided in a pipeline, branch piping is performed by the method shown in FIG. That is, the main pipe lines 1'and 2'are connected by a T-shaped joint 3 ', and an on-off valve such as a ball valve 5'is connected to a branch portion 31' of the joint 3'through a connecting short pipe 4 '. A branch line 6'is connected to 5'and a branch portion is piped. Reference numeral 7'denotes a spherical valve body, and 8'denotes a packing for sealing between the valve body 7'and the valve body.

(Problems to be Solved by the Invention) However, in the above conventional piping, the valve 5 '
When is closed, a fluid retention portion 9'is formed between the branch portion 31 'and the valve body 7'of the valve 5'. As a result, the retention section 9 '
The fluid that stagnates in the soil deteriorates due to the generation of bacteria and becomes unsanitary, which is not preferable as a valve used for branch pipes of food-related fluids and pipelines that transport sterile water used in the manufacture and formulation of pharmaceutical products. . Further, when the above valve is used for a branch pipe of a pipe line for transporting pure water / ultra pure water used in a production line of semiconductor integrated circuits such as IC, LSI, and VLSI, pure water is not added to the retention part 9 '. Due to the retention of water / ultra pure water, there are problems that the purity of water is reduced and bacteria are generated. Furthermore, by repeatedly opening and closing the valve body 7 ', the sliding friction with the valve body 7'makes the surface layer of the packing 8'particulate and pure water.
It flows out into ultrapure water. This has been a major obstacle to the performance and yield of VLSI products, which are said to have a circuit width of several μm.

As a branch valve that eliminates the drawbacks of the above conventional valves,
For example, in Japanese Utility Model Publication No. Sho 59-125666, the valve body 1
A connecting pipe having a flow passage 41 'at one end of the flow passage 11' of 0 ', which is in close proximity to the spherical valve body 20' and communicates with the flow passage 11 'so as to communicate therewith.
A branch valve of the ball valve type provided with 40 'is described (see Fig. 6). However, in this case, no matter how the connecting pipe 40 'is provided close to the valve body 20', it is impossible to completely eliminate the fluid retention portion. Moreover, the flow path 21 'of the spherical valve body 20' becomes a stagnation portion when the valve is closed. Moreover, there is a slight gap between the outer peripheral surface of the valve body 20 'and the inner peripheral surface of the valve body. Therefore, when the valve body 20 'is closed for a long time, the fluid remaining in the flow passage 21' and the gap remains as it is, and the fluid is generated due to the generation of bacteria in the retention part as in the conventional case. The problem of spoiling and becoming unsanitary, or the purity of pure water / ultra pure water, is still unsolved.
Further, it is essentially impossible to prevent the outflow of fine particles into the fluid due to the sealing packing attached to the inner peripheral surface of the valve body 10.

Further, in Japanese Utility Model Laid-Open No. 60-110775, a three-way switching type branch valve in which the flow passage 21 'of the spherical valve body 20' does not become a retention portion by rotating the valve body around the flow passage. , That is, the flow path passing through the center of the spherical valve body 4 "
41 ″ and a branch flow passage opened at a right angle to the through flow passage 41 ″
Ball valve type valve for ultrapure water device comprising 42 ", a mechanism 5" for rotating the valve body 4 "around the through flow passage 41", and a valve box 2 "surrounding the valve body 4" Is described (see FIG. 7). However, in this case, the structure is complicated and expensive because the sealing portion is three-way, and the number of sealing portions increases, so that leakage is likely to occur, and moreover, between the outer peripheral surface of the valve body and the inner peripheral surface of the valve box. The gap that occurs in the area becomes a fluid retention area, and as in the conventional case, the problem that the fluid decomposes due to the generation of bacteria in the retention area and becomes unsanitary, or the purity of pure water decreases remains unsolved. is there. Also in this case, like the conventional valve, it is essentially impossible to prevent the fine particles from flowing into the fluid due to the sealing packing.

The present invention has been made in order to solve the above-mentioned conventional problems, and an object thereof is to be able to directly incorporate a branch portion into a pipe passage to provide a branch portion, and also to open and close the valve body. It is an object of the present invention to provide a branch valve in which a fluid accumulating portion where bacteria are likely to occur does not occur and an outflow into the fluid does not occur.

(Means for Solving the Problems) The gist of the present invention is a branch valve which is incorporated in a pipeline to provide a branch portion, and which has a substantially straight tubular main flow path and a branch that communicates with the main flow path by intersecting the main flow path. A valve seat having a flow passage, extending from the inner wall of the main flow passage in the vicinity of a branch portion between the main flow passage and the branch flow passage, and the branch flow passage side of the valve seat being a smooth flow passage. The present invention resides in a branch valve in which a valve body is integrally molded, and a valve seat of the valve body is pressed and separated by a diaphragm to open and close between a main flow path and a branch flow path.

An embodiment of the present invention will be described below with reference to the drawings.

1 is a longitudinal sectional view showing an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II of FIG. 1, and FIG.

In the figure, reference numeral 1 denotes a valve body having a substantially straight tubular main flow path 2 and a branch flow path 3, which is made of a synthetic resin such as vinyl chloride resin, polyvinylidene fluoride or polybutene. The branch flow passage 3 is integrally formed with the main flow passage 2, and as shown in FIG.
Is branched in a direction substantially perpendicular to the main flow path 2. Then, as shown in FIG. 1, above the valve body 1,
A substantially circular opening is provided which connects the main flow path 2 and the branch flow path 3, and each opening of the main flow path 2 and the branch flow path 3 is divided into substantially equal parts at the approximate center of the opening. A weir is provided across. The weir rises from the inner wall of the main flow path 2 and smoothly connects to the inner peripheral bottom wall of the branch flow path 3 via the upper end surface of the weir. Further, as shown in FIG. 2, the upper end surface of the weir is formed into a substantially concave surface in the axial direction of the main flow path.
The upper end surface of the weir is a valve seat A. The valve seat 4A is provided near the branch portions of the main flow passage 2 and the branch flow passage 3. 4B is a peripheral portion of the opening of the valve body 1. Reference numeral 5 denotes a valve element, which in this case is a diaphragm made of an elastic body made of synthetic resin.
It has the action of adjusting or blocking the flow of the fluid from the main flow path 2 side to the branch flow path 3 side by being pressed and separated by.
The diaphragm 5 is connected to the compressor 8 via the embedded metal fitting 7. Reference numeral 9 denotes a bonnet, which holds the diaphragm 5 and is fixed to the opening peripheral edge portion 4B of the main body 1 with bolts and nuts 10. Reference numeral 11 denotes a spindle, which is pivotally supported by the bonnet 9 via a sleeve 12. sleeve
12 is screwed with the spindle 11. 13 and 13 are TS type sockets and 14 are union sockets. The arrow in the figure indicates the flow direction of the fluid in the flow path.

Next, the usage state of the branch valve of the above embodiment will be described. For example, in the branch valve, the main flow path 2 side is a circulation path system,
That is, it is connected to a circulation system such as ultrapure water that has been processed through an impurity removing device, a sterilizing device, an ultrafiltration membrane and a reverse osmosis membrane device, while the branch flow passage 3 side is connected to each use point. Used.

By rotating the handle 6, the sleeve 12 rotates,
As a result, the spindle 11 that is screwed into the sleeve 12 moves downward without rotating, and the diaphragm 5 is pressed against the valve seat 4A as shown in FIG. The flow of fluid to the 3 side is blocked. On the contrary, in order to communicate the fluid to the side of the branch channel 3, the handle 6 may be turned in the opposite direction.

In this way, press the valve body (diaphragm) 5 against the valve seat 4A.
By simply separating the two, the flow of the fluid to the side of the branch flow passage 3 can be arbitrarily adjusted or completely shut off without affecting the main flow passage 2 side by pressure loss or the like.

In the present invention, the material of the valve body is not limited to the synthetic resin material of the above embodiment, but may be a corrosion resistant metal such as stainless steel or a material such as ceramic. Also, when used in a pipeline for transporting fluid such as sterile water or ultrapure water, the inner surface of the flow passage of the valve body is flat, the effective surface area is as small as possible, and the elution amount into the fluid is possible. It is preferably as low as possible. Further, the main channel may have a screw type or a flange type, and similarly, the branch channel may have a screw type, a flange type or a TS type. Further, in the above embodiment, the manual valve using the handle has been described, but it goes without saying that the present invention can be applied to an automatic valve equipped with an actuator for automatic operation.

(Effects of the Invention) As described above, the branch valve of the present invention has a substantially straight tubular main flow passage and a branch flow passage that communicates with the main flow passage by intersecting the main flow passage and the main flow passage and the branch flow passage. A valve seat extending from the inner wall of the main flow passage is provided in the vicinity of the branch portion, and a valve body having a smooth flow passage on the branch flow passage side of the valve seat is integrally formed,
Since the valve seat of the valve body is pressed by the diaphragm to block the flow of fluid to the side of the branch flow passage, the branch portion can be directly incorporated in the pipe passage to provide the branch portion. Even when the diaphragm is opened and closed, there is no stagnation part for the fluid in which bacteria are likely to occur. Moreover, since the flow of the fluid to the side of the branch flow path can be adjusted or shut off simply by pressing the diaphragm against the valve seat and separating it, the diaphragm is not subject to wear and there is no outflow of fine particles into the fluid. Product performance and yield are not affected. Therefore, the branch valve of the present invention is a branch portion of a pipeline for transporting pure water / ultra pure water used in a semiconductor integrated circuit manufacturing line, sterile water used for manufacturing / blending a drug, or a fluid related to foodstuffs. It is suitable for use in.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II in FIG. 1, FIG. 3 is a plan view of a valve body, and FIG. 4 is a valve body closed. FIG. 5 is a longitudinal cross-sectional view showing a conventionally known branch valve, FIG. 5 is a reference view showing a usage state in which a branch portion is provided by using a conventional valve, and FIGS. It is a figure. It is a figure which shows an example of a composing method. 1 ... Valve body, 2 ... Main flow path, 3 ... Branch flow path, 4A
…… Valent seat, 5 …… Valve disc.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Bibliography Sho 53-67128 (JP, U) Shokoku 41-522 (JP, Y1)

Claims (1)

[Claims] 1. A branch valve having a branch portion incorporated into a pipe passage, the main valve having a substantially straight tubular main flow passage and a branch flow passage that communicates with the main flow passage by crossing the main flow passage. A valve seat extending from the inner wall of the main flow passage is provided in the vicinity of a branch portion with the branch flow passage, and a valve main body having a smooth flow passage on the branch flow passage side of the valve seat is integrally molded, A branch valve in which the main seat and the branch passage are opened and closed by pressing and separating the valve seat of the main body by the diaphragm.