JPH07106346B2 - Ultrasonic cleaning equipment - Google Patents

Ultrasonic cleaning equipment

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Publication number
JPH07106346B2
JPH07106346B2 JP61137079A JP13707986A JPH07106346B2 JP H07106346 B2 JPH07106346 B2 JP H07106346B2 JP 61137079 A JP61137079 A JP 61137079A JP 13707986 A JP13707986 A JP 13707986A JP H07106346 B2 JPH07106346 B2 JP H07106346B2
Authority
JP
Japan
Prior art keywords
jig
cleaning
case
cleaning tank
lifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61137079A
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Japanese (ja)
Other versions
JPS62294477A (en
Inventor
純司 羽田
Original Assignee
株式会社羽田製作所
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Application filed by 株式会社羽田製作所 filed Critical 株式会社羽田製作所
Priority to JP61137079A priority Critical patent/JPH07106346B2/en
Publication of JPS62294477A publication Critical patent/JPS62294477A/en
Publication of JPH07106346B2 publication Critical patent/JPH07106346B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は超音波洗浄装置に関し、詳しくは、電子機器等
の製造における洗浄工程に使用される超音波振動を利用
した装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device, and more particularly, to an ultrasonic vibration device used in a cleaning process in manufacturing electronic devices and the like.

従来の技術 従来、精密機械や電子機器等の製造工程には、超音波振
動をかけた溶剤中に部品類を浸して、これら表面から破
片や削り屑を除去する洗浄工程があり、この洗浄工程
は、溶剤予備洗浄、冷浴洗浄、蒸気洗浄等の複数の工程
から成り立っている。
Conventional technology Conventionally, in the manufacturing process of precision machinery and electronic equipment, there is a cleaning process of immersing parts in a solvent subjected to ultrasonic vibration to remove debris and shavings from the surface. Is composed of a plurality of steps such as solvent preliminary cleaning, cold bath cleaning, steam cleaning and the like.

発明が解決しようとする問題点 ところで、上述するように洗浄工程は複数の工程から成
り、しかも通常、洗浄槽には人体で直接触れると危険な
有機溶剤を満たすので、複数の工程を単一で、人手を介
さずに実現できる装置の開発が要望されていた。しか
し、安全性、生産性及び耐久性等の面で要望を充分に満
足する装置が提供されていないのが現状であった。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention By the way, as described above, the cleaning step is composed of a plurality of steps, and normally, the cleaning tank is filled with a dangerous organic solvent when it is directly touched by a human body. There has been a demand for the development of a device that can be realized without human intervention. However, at present, there has not been provided an apparatus that sufficiently satisfies the needs in terms of safety, productivity and durability.

問題点を解決するための手段 本発明は被洗浄物が挟持された水平状態の治具を吊り上
げて垂下保持する昇降機構を具備したローダ部と、上記
治具を収納する昇降ケース及び固定ケースを並置された
複数の洗浄槽に、昇降ケースは洗浄槽の内外を昇降する
ように、固定ケースは洗浄槽内に固定されるように配設
した洗浄処理部と、洗浄処理された垂下状態の治具をケ
ース本体に収納して方向転換させて水平保持する移送機
構を具備したアンローダ部と、上記洗浄槽と対向する箇
所に垂下支持された爪部材を有し、且つ、洗浄処理部の
上方に昇降自在に配設された昇降フレームと、横送り機
構を介して上記昇降フレームを水平方向に間欠動させる
送りフレームと、上記アンローダ部から搬出された治具
をローダ部へ搬入する搬送機構とから成る超音波装置を
提供することにより上記問題点を解決するものである。
Means for Solving the Problems The present invention provides a loader unit having an elevating mechanism for hoisting and holding a jig in a horizontal state in which an object to be cleaned is sandwiched, an elevating case and a fixed case for accommodating the jig. The cleaning case is arranged so that the elevating case moves up and down inside and outside the cleaning tank, and the fixed case is fixed to the cleaning tank in a plurality of juxtaposed cleaning tanks. An unloader section having a transfer mechanism for storing the tool in the case body, changing its direction, and holding it horizontally, and a claw member hung and supported at a position facing the cleaning tank, and above the cleaning processing section. From an elevating frame arranged to be vertically movable, a feeding frame for intermittently moving the elevating frame in the horizontal direction via a lateral feeding mechanism, and a carrying mechanism for carrying the jig unloaded from the unloader section into the loader section. Consisting of The problem is solved by providing a sound wave device.

作用 本発明の超音波洗浄装置では、側壁内に一連に並置され
た複数の洗浄槽に、被洗浄物が挟持された治具を昇降ケ
ース,固定ケースに適宜に収納,脱出させながら順次に
転送することができ、複数の工程からなる洗浄工程の自
動化が可能となる。更に、治具の搬送機構により一定数
の治具のみで連続して大量の被洗浄物の処理が可能とな
る。
Effect In the ultrasonic cleaning apparatus of the present invention, the jig holding the object to be cleaned is sequentially stored in the plurality of cleaning tanks arranged side by side in the side wall and sequentially transferred while being housed in the elevating case and the fixed case and escaping. Therefore, it is possible to automate the cleaning process including a plurality of processes. Further, the jig transport mechanism allows a large number of objects to be cleaned to be continuously processed with only a fixed number of jigs.

実施例 本発明に係る超音波洗浄装置の一実施例を第1図乃至第
22図を参照しながら説明する。同図に於いて、(1)は
洗浄室(2)の搬入側に配設されたローダ部、(3)は
被洗浄物、例えば電子部品が搭載されたプリント配線体
(4)を挟持した治具で、端部に2対の凹部(3a)(3
a)(3b)(3b)が形成される。(5)は上記治具
(3)を水平状態で搬入する搬入用コンベヤ、(6)は
水平状態の治具(3)を吊り上げて垂下保持する昇降機
構で、垂設した1対のチェーン(6a)(6a)と、このチ
ェーン(6a)(6a)の一部に取り付けられた一対の爪材
(6b)(6b)と、チェーン(6a)(6a)を駆動させる駆
動源(6c)とで構成される。上記爪材(6b)(6b)は治
具(3)の外側1対の凹部(3b)(3b)を引掛けて、治
具(3)を垂直状態に吊下保持する。(7)は複数(図
では6槽)の洗浄槽(7a)〜(7f)が一連に並置された
洗浄処理部で、上記洗浄槽(7a)〜(7f)は、例えば
(7a)は噴流洗浄槽、(7b)は蒸気洗浄槽、(7c)は噴
射洗浄槽、(7d)は噴流洗浄槽、(7e)は噴射洗浄槽、
(7f)は蒸気洗浄槽である。これら6槽式の洗浄槽(7
a)〜(7f)の周囲は側壁(8)より囲われ、側壁
(8)内の気化した有機溶剤が洗浄室(2)の他の空間
に漏れ出ないようにしている。(9)(9)は両端の洗
浄槽(7a)(7f)、即ち噴流洗浄槽(7a)と蒸気洗浄槽
(7f)とに昇降自在に配設された昇降ケースで、垂設さ
れた一対のチェーン(9a)(9a)…の一部にケース本体
(9b)(9b)の上端部が取り付けられている。(10)
(10)…は両端以外の洗浄槽(7b)〜(7e)内に固定保
持された固定ケースである。(11)は洗浄室(2)の搬
出側に配設されたアンローダ部、(12)は洗浄処理され
た垂直状態の治具(3)を方向転換させて水平保持する
移送機構で、一端部が回動自在に取り付けられたプレー
ト(12a)と、このプレート(12a)の上面に配置された
第1のシリンダ(12b)と、このシリンダ(12b)のロッ
ド先端に取り付けられたケース本体(12c)と、プレー
ト(12a)の下面略中央にロッド先端が取り付けられた
第2のシリンダ(12d)とから構成される。(13)(1
3)は水平保持された治具(3)を送り出す送りローラ
である。(14)は上記洗浄処理部(7)の上方に昇降自
在に配設された昇降フレーム、(15)(15)…はこの昇
降フレーム(14)の上記洗浄槽(7a)〜(7f)と対向す
る箇所に垂下支持された爪部材で、両端の爪部材(15)
(15)は直接昇降フレーム(14)に取り付けられるが、
両端以外の爪部材(15)(15)…は突出フレーム(14
a)を介して昇降フレーム(14)に取り付けられる。6
槽式の場合、上記爪部材(15)(15)…は7箇所に取り
付けられる。また、上記爪部材(15)(15)の凹部(15
a)は第2図の拡大図で示すように、所定角度θ゜傾斜
させて形成され、この傾斜により治具(3)が案内され
て略垂直に吊下保持される。(16)は横送り機構(17)
を介して上記昇降フレーム(14)を水平方向に間欠動さ
せる送りフレームで、昇降フレーム(14)はこの送りフ
レーム(16)に垂設されたロッド(16a)(16a)…を介
して昇降自在に一体的に配設される。また、上記横送り
機構(17)は、一端が送りフレーム(16)の一部に回動
自在に取り付けられた第1のレバー(17a)と、このレ
バー(17a)の他端に一端が回動自在に連結された第2
のレバー(17b)と、このレバー(17b)の他端に取り付
けられた駆動源(17c)とで構成される。(18)は上記
アンローダ部(11)から搬出された治具(3)をローダ
部(1)へ搬入する搬送機構で搬入及び搬出側にチェー
ン(19)(19)を介して移動可能に配設された搬送台
(18a)(18b)と、これら搬送台(18a)(18b)同士を
連絡して治具(3)を搬送するコンベヤ(18c)とで構
成される。
Embodiment An embodiment of an ultrasonic cleaning apparatus according to the present invention is shown in FIGS.
It will be described with reference to FIG. In the figure, (1) is a loader section arranged on the carry-in side of the cleaning chamber (2), and (3) is an object to be cleaned, for example, a printed wiring body (4) on which electronic parts are mounted. With the jig, use two pairs of recesses (3a) (3
a) (3b) (3b) is formed. (5) is a conveyor for carrying in the jig (3) in a horizontal state, and (6) is an elevating mechanism for hoisting and holding the jig (3) in a horizontal state. 6a) (6a), a pair of claw members (6b) (6b) attached to a part of this chain (6a) (6a), and a drive source (6c) for driving the chain (6a) (6a) Composed of. The claw members (6b) (6b) hook the outer pair of recesses (3b) (3b) of the jig (3) to suspend and hold the jig (3) in a vertical state. (7) is a cleaning processing unit in which a plurality of (six tanks in the figure) cleaning tanks (7a) to (7f) are juxtaposed in series. The cleaning tanks (7a) to (7f) are, for example, (7a) are jets. Cleaning tank, (7b) steam cleaning tank, (7c) jet cleaning tank, (7d) jet cleaning tank, (7e) injection cleaning tank,
(7f) is a steam cleaning tank. These 6 tank type cleaning tanks (7
The periphery of a) to (7f) is surrounded by the side wall (8) so that the vaporized organic solvent in the side wall (8) does not leak to the other space of the cleaning chamber (2). (9) (9) is an elevating case that is vertically movable in the cleaning tanks (7a) and (7f) at both ends, that is, the jet cleaning tank (7a) and the steam cleaning tank (7f), and is a vertically extending pair. The upper ends of the case bodies (9b) and (9b) are attached to a part of the chains (9a) (9a). (Ten)
(10) ... are fixed cases fixedly held in the cleaning tanks (7b) to (7e) other than both ends. (11) is an unloader unit arranged on the carry-out side of the cleaning chamber (2), and (12) is a transfer mechanism that changes the direction of the vertically processed jig (3) and horizontally holds it, one end of which is Rotatably attached to the plate (12a), a first cylinder (12b) arranged on the upper surface of the plate (12a), and a case body (12c attached to the rod tip of the cylinder (12b). ) And a second cylinder (12d) having a rod tip attached to substantially the center of the lower surface of the plate (12a). (13) (1
3) is a feed roller for feeding the jig (3) held horizontally. (14) is an elevating frame which is arranged above the cleaning processing section (7) so as to be able to ascend and descend, and (15) (15) ... are the cleaning tanks (7a) to (7f) of the elevating frame (14). Claw members that are hung and supported at opposite locations. Claw members at both ends (15)
(15) is directly attached to the lifting frame (14),
Claw members (15) (15) other than both ends are protruding frames (14
It is attached to the lifting frame (14) via a). 6
In the case of the tank type, the claw members (15) (15) ... Are attached at seven positions. Further, the concave portions (15) of the claw members (15) (15) are
As shown in the enlarged view of FIG. 2, a) is formed by inclining by a predetermined angle θ °, and the jig (3) is guided by this inclination and is suspended and held substantially vertically. (16) is a lateral feed mechanism (17)
Is a feed frame for intermittently moving the elevating frame (14) in the horizontal direction via the elevating frame (14), and the elevating frame (14) can be raised and lowered via rods (16a) (16a) ... Are integrally arranged in the. The lateral feed mechanism (17) has a first lever (17a) whose one end is rotatably attached to a part of the feed frame (16), and one end of which is rotated to the other end of the lever (17a). Second movably connected
(17b) and a drive source (17c) attached to the other end of the lever (17b). (18) is a transport mechanism for loading the jig (3) unloaded from the unloader section (11) into the loader section (1) and is movably arranged on the loading and unloading sides via chains (19) and (19). The conveyors (18a) and (18b) are provided, and the conveyors (18c) that connect the conveyors (18a) and (18b) to each other and convey the jig (3).

次に、上記構成の6槽式超音波洗浄装置(20)の動作例
を第4図乃至第22図を参照しながら説明する。先ず、第
4図に示すようにプリント配線体(4)を挟持した水平
状態の治具(3)が搬入用コンベヤ(5)により定位置
まで搬入される。次に、第5図に示すように治具(3)
の外側1対の凹部(3b)(3b)に爪材(6b)(6b)を引
掛け、この状態で爪材(6b)(6b)を最上端まで上昇さ
せることにより、治具(3)を吊り上げて垂下保持す
る。そして、第6図に示すように昇降フレーム(14)を
最下端まで降下させた後、治具(3)の内側1対の凹部
(3a)(3a)に端部の爪部材(15)(15)を引掛ける。
この状態で、第7図に示すように昇降フレーム(14)を
最上端まで上昇させる。この時、治具(3)の下端部は
側壁(8)よりも高い位置にある。次に、第8図に示す
ように送りフレーム(16)を水平方向に間欠動させて、
ローダ部(1)上の治具(3)が噴流洗浄槽(7a)の真
上まで転送されると、第9図に示すように昇降ケース
(9)が最上端まで上昇する。そして、第10図に示すよ
うに昇降フレーム(14)を最下端まで降下させると、爪
部材(15)(15)に垂下保持された治具(3)は昇降ケ
ース(9)内に収納され、この状態で治具(3)の凹部
(3a)(3a)から爪部材(15)(15)をはずす。次に、
第11図に示すように昇降フレーム(13)を最上端まで上
昇させると共に、治具(3)が収納された昇降ケース
(9)を最下端まで降下させると、噴流洗浄槽(7a)内
に昇降ケース(9)を介して治具(3)が収納される。
更に、第12図に示すように送りフレーム(16)を水平方
向に間欠動させて最初の位置まで戻し、この状態で新た
に治具(3)が定位置まで搬入されると、上述と同様な
動作が繰り返され、第13図に示すように治具(3)
(3)…は各洗浄槽(7a)〜(7f)に順次転送される。
そして、第14図に示すように、最終槽、即ち蒸気洗浄槽
(7f)に転送された治具(3)は、昇降ケース(9)を
上昇させると共に昇降フレーム(14)を降下させること
により端部の爪部材(15)(15)へ受け渡される。次
に、第15図に示すように昇降ケース(9)を降下させる
と共に昇降フレーム(14)を上昇させると、昇降フレー
ム(14)の各爪部材(15)(15)…には治具(3)
(3)…が一連に垂下保持された状態になる。そして、
第16図に示すように送りフレーム(16)を水平方向に間
欠動させることにより最終の蒸気洗浄槽(7f)の治具
(3)はアンローダ部(10)の移送機構(11)上に転送
される。この状態で第1のシリンダ(12b)のケース本
体(12c)を上昇させ、第17図に示すように昇降フレー
ム(14)を降下させると、上記ケース本体(12c)に治
具(3)が収納される。そして、第18図に示すように各
治具(3)(3)…を各爪部材(15)(15)…からはず
して、昇降フレーム(14)を上昇させると共にケース本
体(9b)を降下させる。次に、第19図に示すように第2
のシリンダ(12d)のロッドを退入させると、アンロー
ダ部(11)の垂直保持された治具(3)は水平状態に方
向転換されると共に、送出ローラ(13)により、搬出側
の搬送台(18b)上に搬出される。この状態で治具
(3)からプリント配線体(4)を取りはずした後、第
20図乃至第22図に示すように搬送台(18b)上の治具
(3)は、コンベヤ(18c)を介して搬入側の搬送台(1
8a)上に搬入される。上述するような動作を繰り返すこ
とにより、一定数の治具(3)(3)…で連続して大量
のプリント配線体(4)(4)…を各洗浄槽(7a)〜
(7f)に転送させることが可能となる。
Next, an operation example of the 6-tank type ultrasonic cleaning device (20) having the above configuration will be described with reference to FIGS. 4 to 22. First, as shown in FIG. 4, the horizontal jig (3) holding the printed wiring body (4) is carried in to a fixed position by the carry-in conveyor (5). Next, as shown in FIG. 5, the jig (3)
The hooks (6b) (6b) are hooked on the pair of recesses (3b) (3b) on the outside of the jig, and in this state, the hooks (6b) (6b) are raised to the uppermost end, thereby the jig (3) And hold it down. Then, as shown in FIG. 6, the elevating frame (14) is lowered to the lowermost end, and then the pair of concave portions (3a) (3a) inside the jig (3) are provided with end claw members (15) ( 15).
In this state, the elevating frame (14) is raised to the uppermost end as shown in FIG. At this time, the lower end of the jig (3) is located higher than the side wall (8). Next, as shown in FIG. 8, the feed frame (16) is intermittently moved in the horizontal direction,
When the jig (3) on the loader section (1) is transferred to just above the jet cleaning tank (7a), the elevating case (9) rises to the uppermost end as shown in FIG. Then, as shown in FIG. 10, when the lifting frame (14) is lowered to the lowermost end, the jig (3) suspended from the claw members (15) (15) is stored in the lifting case (9). In this state, the claw members (15) (15) are removed from the recesses (3a) (3a) of the jig (3). next,
As shown in FIG. 11, when the elevating frame (13) is raised to the uppermost end and the elevating case (9) accommodating the jig (3) is lowered to the lowermost end, the jet cleaning tank (7a) is placed. The jig (3) is stored through the lifting case (9).
Further, as shown in FIG. 12, the feed frame (16) is intermittently moved in the horizontal direction and returned to the initial position, and when the jig (3) is newly loaded to the fixed position in this state, the same as above. The above operation is repeated, and as shown in Fig. 13, the jig (3)
(3) ... Are sequentially transferred to the cleaning tanks (7a) to (7f).
Then, as shown in FIG. 14, the jig (3) transferred to the final tank, that is, the steam cleaning tank (7f), raises the lifting case (9) and lowers the lifting frame (14). It is delivered to the end claw members (15) (15). Next, as shown in FIG. 15, when the lifting case (9) is lowered and the lifting frame (14) is raised, the jigs (15), (15), ... 3)
(3) ... is suspended and held in a series. And
The jig (3) of the final steam cleaning tank (7f) is transferred onto the transfer mechanism (11) of the unloader section (10) by intermittently moving the feed frame (16) horizontally as shown in FIG. To be done. When the case body (12c) of the first cylinder (12b) is raised in this state and the lifting frame (14) is lowered as shown in FIG. 17, the jig (3) is attached to the case body (12c). It is stored. Then, as shown in FIG. 18, the jigs (3) (3) are removed from the claw members (15) (15), the lifting frame (14) is raised, and the case body (9b) is lowered. Let Then, as shown in FIG.
When the rod of the cylinder (12d) is retracted, the vertically held jig (3) of the unloader part (11) is turned to the horizontal state, and the delivery roller (13) causes the delivery platform on the delivery side to move. (18b) It is carried to the top. After removing the printed wiring body (4) from the jig (3) in this state,
As shown in FIGS. 20 to 22, the jig (3) on the transfer table (18b) is mounted on the transfer table (1) on the loading side via the conveyor (18c).
8a) It is loaded on top. By repeating the above-mentioned operation, a large number of printed wiring bodies (4) (4) ... are continuously transferred to the cleaning tanks (7a) through a fixed number of jigs (3) (3).
It is possible to transfer to (7f).

尚、上記実施例に記載されている構成部品の寸法、材
質、形状、その相対配置等は、特定的な記載がない限り
は、この発明の範囲をそれらのみに限定する趣旨のもの
ではない。
It should be noted that the dimensions, materials, shapes, relative positions, etc. of the components described in the above embodiments are not intended to limit the scope of the present invention to these unless otherwise specified.

発明の効果 本発明の超音波洗浄装置によれば、複数の工程から成
り、危険な作業を伴う洗浄工程の自動化を、単一の装置
により実現できる。しかも、一定数の治具で大量の被洗
浄物を連続して処理できるので、生産性を著しく向上さ
せ得ると共に、安全性、耐久性に優れた装置を提供でき
る。
EFFECTS OF THE INVENTION According to the ultrasonic cleaning apparatus of the present invention, it is possible to realize automation of a cleaning step including a plurality of steps and a dangerous work with a single apparatus. Moreover, since a large number of objects to be cleaned can be continuously processed with a fixed number of jigs, the productivity can be remarkably improved, and a device having excellent safety and durability can be provided.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明に係る超音波洗浄装置を示す概略平面
図、第2図は第1図の概略正面図、第3図は第2図の概
略側面図、第4図乃至第19図は超音波洗浄装置の動作を
説明するための概略正面図、第20図乃至第22図は超音波
洗浄装置の動作を説明するための概略側面図である。 (1)……ローダ部、(3)……治具、 (4)……被洗浄物(プリント配線体)、 (6)……昇降機構、(7)……洗浄処理部、 (7a)〜(7f)……洗浄槽、(9)……昇降ケース、 (10)……固定ケース、(11)……アンローダ部、 (12)……移送機構、(12c)……ケース本体、(14)
……昇降フレーム、 (15)……爪部材、(16)……送りフレーム、 (17)……横送り機構、(18)……搬送機構、 (20)……超音波洗浄装置。
1 is a schematic plan view showing an ultrasonic cleaning apparatus according to the present invention, FIG. 2 is a schematic front view of FIG. 1, FIG. 3 is a schematic side view of FIG. 2, and FIGS. 20 is a schematic front view for explaining the operation of the ultrasonic cleaning apparatus, and FIGS. 20 to 22 are schematic side views for explaining the operation of the ultrasonic cleaning apparatus. (1) …… loader section, (3) …… jig, (4) …… object to be cleaned (printed wiring body), (6) …… elevating mechanism, (7) …… cleaning processing section, (7a) ~ (7f) …… Cleaning tank, (9) …… Lift case, (10) …… Fixed case, (11) …… Unloader, (12) …… Transfer mechanism, (12c) …… Case body, ( 14)
...... Lifting frame, (15) …… Claw member, (16) …… Feed frame, (17) …… Horizontal feed mechanism, (18) …… Transport mechanism, (20) …… Ultrasonic cleaning device.

フロントページの続き (56)参考文献 特開 昭53−62365(JP,A) 特開 昭60−82512(JP,A) 特開 昭62−121128(JP,A) 特開 平2−63119(JP,A) 特開 昭55−157280(JP,A) 特開 昭59−219985(JP,A) 特開 昭58−104823(JP,A) 実開 昭50−47180(JP,U) 実開 昭61−106388(JP,U) 特公 昭45−40764(JP,B1)Continuation of the front page (56) Reference JP-A-53-62365 (JP, A) JP-A-60-82512 (JP, A) JP-A-62-121128 (JP, A) JP-A-2-63119 (JP , A) JP-A-55-157280 (JP, A) JP-A-59-219985 (JP, A) JP-A-58-104823 (JP, A) Actual development S50-47180 (JP, U) Actual development 61-106388 (JP, U) JP-B-45-40764 (JP, B1)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】被洗浄物が挟持された水平状態の治具を吊
り上げて垂下保持する昇降機構を具備したローダ部と、
上記治具を収納する昇降ケース及び固定ケースを並置さ
れた複数の洗浄槽に、昇降ケースは洗浄槽の内外を昇降
するように、固定ケースは洗浄槽内に固定されるように
配設した洗浄処理部と、洗浄処理された垂下状態の治具
をケース本体に収納して方向転換させて水平保持する移
送機構を具備したアンローダ部と、上記洗浄槽と対向す
る箇所に垂下支持された爪部材を有し、かつ洗浄処理部
の上方に昇降自在に配設された昇降フレームと、横送り
機構を介して上記昇降フレームを水平方向に間欠動させ
る送りフレームと、上記アンローダ部から搬出された治
具をローダ部へ搬入する搬送機構とからなることを特徴
とする超音波洗浄装置。
1. A loader section having an elevating mechanism for hoisting and holding a jig in a horizontal state in which an object to be cleaned is clamped,
Cleaning in which a lifting case and a fixed case for accommodating the jig are arranged side by side in a plurality of cleaning tanks arranged so that the lifting case moves up and down inside and outside the cleaning tank and the fixed case is fixed in the cleaning tank. A processing unit, an unloader unit equipped with a transfer mechanism that stores a hanging jig that has been cleaned in a case body, changes its direction, and horizontally holds it, and a claw member that is hung and supported at a position facing the cleaning tank. And a lifting frame disposed above the cleaning processing section so as to be lifted and lowered, a feed frame for intermittently moving the lifting frame in the horizontal direction via a lateral feed mechanism, and a jig carried out from the unloader section. An ultrasonic cleaning device, comprising: a transfer mechanism that loads a tool into a loader section.
JP61137079A 1986-06-12 1986-06-12 Ultrasonic cleaning equipment Expired - Lifetime JPH07106346B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61137079A JPH07106346B2 (en) 1986-06-12 1986-06-12 Ultrasonic cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61137079A JPH07106346B2 (en) 1986-06-12 1986-06-12 Ultrasonic cleaning equipment

Publications (2)

Publication Number Publication Date
JPS62294477A JPS62294477A (en) 1987-12-21
JPH07106346B2 true JPH07106346B2 (en) 1995-11-15

Family

ID=15190402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61137079A Expired - Lifetime JPH07106346B2 (en) 1986-06-12 1986-06-12 Ultrasonic cleaning equipment

Country Status (1)

Country Link
JP (1) JPH07106346B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02111489A (en) * 1988-10-19 1990-04-24 Hitachi Ltd Substrate washing device
JP2791534B2 (en) * 1993-07-27 1998-08-27 鬼頭工業株式会社 Cleaning equipment
JP2791535B2 (en) * 1993-07-29 1998-08-27 鬼頭工業株式会社 Cleaning equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5362365A (en) * 1976-11-17 1978-06-03 Chiyoda Seisakusho Automatic supersonic wave cleaning apparatus
JPS6082512A (en) * 1983-10-06 1985-05-10 Sonitsuku Fueroo Kk Holding and conveying method and apparatus for lamellar work of automatic cleaning device

Also Published As

Publication number Publication date
JPS62294477A (en) 1987-12-21

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