JPH07105860A - Multi-cavity klystron - Google Patents

Multi-cavity klystron

Info

Publication number
JPH07105860A
JPH07105860A JP24964593A JP24964593A JPH07105860A JP H07105860 A JPH07105860 A JP H07105860A JP 24964593 A JP24964593 A JP 24964593A JP 24964593 A JP24964593 A JP 24964593A JP H07105860 A JPH07105860 A JP H07105860A
Authority
JP
Japan
Prior art keywords
cavity
klystron
side plate
drift
end plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24964593A
Other languages
Japanese (ja)
Other versions
JP2551352B2 (en
Inventor
Yoshiji Maruyama
芳史 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP5249645A priority Critical patent/JP2551352B2/en
Publication of JPH07105860A publication Critical patent/JPH07105860A/en
Application granted granted Critical
Publication of JP2551352B2 publication Critical patent/JP2551352B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To easily and precisely set the resonance frequency of the cavity resonator of a multi-cavity klystron, simplify the structure, and reduce the number of part items and the number of assembling processes. CONSTITUTION:A multi-cavity klystron has a local changing means of space dimensions a1, a2, a3 of drift tubes 5, 6, 7, 12 integrated with the end plates of a cavity resonator opposed thereto in assembling process, and at least two cavity resonators are formed of the same cavity side plates 8. The bore diameters of the cavity side plates 8 are varied every drift tube 5, 6, 7, 12 integrated with the corresponding end plates, and the drift tubes 5, 6, 7, 12 integrated with the end plates are installed to the resulting stepped parts 9, 10, 11 through spacer parts 43, 44, 45. The space dimensions are regulated to be a1,a2, a3, respectively, by the plate thicknesses of the spacer parts 43, 44, 45.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は多空胴クライストロンに
関し、特に空胴共振器の精密な共振周波数が設定可能な
多空胴クライストロンに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multicavity klystron, and more particularly to a multicavity klystron in which a precise resonance frequency of a cavity resonator can be set.

【0002】[0002]

【従来の技術】一般に、多空胴クライストロンは、電子
ビームを射出形成する電子銃と、電子ビームと高周波信
号を相互作用させて高周波信号の増幅を行なう複数個の
空胴共振器から成る高周波回路部と、電子ビームを収集
し電子の運動エネルギーを熱エネルギーに変換し放熱さ
せるコレクタを主な構成要素としている。ここで、空胴
共振器は対向するドリフト管と空胴端板及び空胴側板か
ら成り、空胴共振器の共振周波数は対向するドリフト管
の間隔と空胴共振器の容積で決まる。すなわち、前者は
空胴共振器のキャパシタンスC、後者はインダクタンス
Lを決定し、空胴共振周波数はLCに逆比例して決ま
る。空胴共振周波数を固定して使用する多空胴クライス
トロンや一般に動作周波数範囲が狭いダイアフラムを用
いた多空胴クライストロンにおいては、空胴共振器組立
て時に空胴共振器の間隔寸法を調整している。従来、こ
の調整はドリフト管先端を切削加工してドリフト管の間
隔寸法を決めている。一方、切削加工によらない方法と
しては実開平4−94248号公報がある。これによる
と、各空胴共振器を構成するドリフト管の外側及び空胴
端板のドリフト管かん合部をねじ構造とし、対向するド
リフト管の位置出しをねじの螺合により行ないろう付け
することでドリフト管間隔寸法を決めている。
2. Description of the Related Art In general, a multi-cavity klystron is a high-frequency circuit including an electron gun for injecting and forming an electron beam and a plurality of cavity resonators for amplifying the high-frequency signal by interacting the electron beam with the high-frequency signal. The main components are the part and the collector that collects the electron beam and converts the kinetic energy of the electrons into heat energy for heat dissipation. Here, the cavity resonator is composed of a drift tube, a cavity end plate, and a cavity side plate facing each other, and the resonance frequency of the cavity resonator is determined by the distance between the drift tubes facing each other and the volume of the cavity resonator. That is, the former determines the capacitance C of the cavity resonator and the latter determines the inductance L, and the cavity resonance frequency is determined in inverse proportion to LC. In a multicavity klystron that uses a fixed cavity resonance frequency and in a multicavity klystron that uses a diaphragm that generally has a narrow operating frequency range, the cavity cavity spacing is adjusted when the cavity resonator is assembled. . Conventionally, this adjustment involves cutting the tip of the drift tube to determine the distance between the drift tubes. On the other hand, as a method that does not rely on cutting, there is JP-A-4-94248. According to this, the outside of the drift tube that constitutes each cavity resonator and the drift tube engaging part of the cavity end plate have a screw structure, and the position of the opposite drift tube is brazed by screwing the screws. Determines the distance between drift tubes.

【0003】次に、これらの従来技術について図面を参
照して説明する。図4は従来の多空胴クライストロンの
一例の概略構成図、図5は図4の高周波回路部の断面
図、図6は多空胴クライストロンの他の例の空胴共振器
の部分拡大断面図である。図4に示すように、電子銃1
で射出形成された電子ビーム2は高周波回路部25で高
周波信号の増幅を行ないコレクタ47で収集される。図
5に示すように、高周波回路部25は、ドリフト管2
7,28,29及び空胴端板30,31,32並びに空
胴側板33,34,35から成る複数個の空胴共振器2
6から構成され、組立て時それぞれのドリフト管27,
28,29の先端を切削加工し間隔寸法C1,C2 が決
められる。通常、このドリフト管27,28,29の先
端の切削は共振周波数を測定しながら行なわれていた。
Next, these conventional techniques will be described with reference to the drawings. FIG. 4 is a schematic configuration diagram of an example of a conventional multicavity klystron, FIG. 5 is a cross-sectional view of the high frequency circuit part of FIG. 4, and FIG. 6 is a partially enlarged cross-sectional view of a cavity resonator of another example of the multicavity klystron. Is. As shown in FIG. 4, the electron gun 1
The electron beam 2 formed by injection is amplified by the high-frequency circuit section 25 and is collected by the collector 47. As shown in FIG. 5, the high-frequency circuit unit 25 includes the drift tube 2
7, 28, 29, a plurality of cavity resonators 2 including cavity end plates 30, 31, 32 and cavity side plates 33, 34, 35.
6 and each of the drift tubes 27,
The tip ends of 28 and 29 are cut, and the distances C 1 and C 2 are determined. Usually, cutting of the tips of the drift tubes 27, 28, 29 is performed while measuring the resonance frequency.

【0004】一方、実開平4−94248号公報では、
図6に示すように、空胴共振器26は外側におねじ3
9,40を有するドリフト管36,37とめねじ41,
42を設けた空胴壁38から成りドリフト管36,37
と空胴壁38のねじの螺合によりドリフト管36と37
の間隔寸法dが決められ空胴共振周波数が設定される。
On the other hand, in Japanese Utility Model Laid-Open No. 4-94248,
As shown in FIG. 6, the cavity resonator 26 has an external male thread 3
Drift tubes 36, 37 having 9, 40 and internal threads 41,
Drift tubes 36, 37 comprising a cavity wall 38 provided with 42
And the drift wall 36 and 37 by screwing the screws of the cavity wall 38.
And the cavity resonance frequency is set.

【0005】[0005]

【発明が解決しようとする課題】この従来の多空胴クラ
イストロンにおいては、各空胴毎にそれぞれ空胴側板を
有しており部品点数が多いことに加え、共振周波数を測
定しながらドリフト管の切削加工を行なうので時間がか
かるという欠点があり、共振周波数の設定精度は2GH
z帯で数MHzが限界であった。また、実開平4−94
248号公報の実施例については出力数kW程度の多空
胴のクライストロンでは実施されているが、ドリフト管
と空胴端板の熱伝導がろう付け部を介して行なわれるた
め数十kWから数百kW出力の高出力の多空胴クライス
トロンではドリフト管の発熱の熱伝導が十分に行なわれ
ず熱ドリフト等の問題点が発生していた。
In this conventional multi-cavity klystron, each cavity has a cavity side plate, and in addition to having a large number of parts, the drift tube of the drift tube is measured while measuring the resonance frequency. There is a drawback that it takes time because cutting is performed, and the setting accuracy of the resonance frequency is 2 GH.
The limit was a few MHz in the z band. In addition, the actual Kaihei 4-94
The embodiment of Japanese Patent No. 248 is implemented in a klystron with a multi-cavity having an output of several kW, but since the heat conduction between the drift tube and the cavity end plate is performed through the brazing portion, it is several tens to several kW. In a multi-cavity klystron with a high output of 100 kW, heat conduction of heat generation of the drift tube is not sufficiently performed, and problems such as thermal drift occur.

【0006】また、これらの多空胴クライストロンは部
品数が多く複数個の空胴共振器を組上げて行く為、作業
性が悪い上ろう付け後位置出しにずれを生じやすく、空
胴共振周波数がずれるという問題点があった。
In addition, since these multi-cavity klystrons have a large number of parts and are assembled with a plurality of cavity resonators, the workability is poor and the positioning is likely to be misaligned after brazing. There was a problem of slippage.

【0007】本発明の目的は、部品点数が低減でき組立
て作業が容易で、空胴共振周波数を容易に精度良く設定
できる多空胴クライストロンを提供することにある。
An object of the present invention is to provide a multi-cavity klystron in which the number of parts can be reduced, the assembling work is easy, and the cavity resonance frequency can be easily and accurately set.

【0008】[0008]

【課題を解決するための手段】本発明は、電子ビームを
射出形成する電子銃と、対向するドリフト管と空胴端板
と空胴側板とを有する複数個の空胴共振器によって構成
され前記電子ビームと高周波信号を相互作用させ高周波
信号の増幅を行う高周波回路部と、前記電子ビームを捕
捉収集し電子の持つエネルギーを熱エネルギーに変換し
放散させるコレクタとを有する多空胴クライストロンに
おいて、前記空胴共振器のドリフト管と空胴端板は一体
に作られており、前記空胴端板の少くとも2個が内径の
異った段差部を有する同一の空胴側板を共有し、それぞ
れの前記段差部にスペーサ部品を介して接着されるか、
または、前記空胴端板の少くとも2個がそれぞれ異る外
径で同一の空胴側板を共有し、この空胴側板の内周にめ
ねじと前記空胴端板の外周におねじが設けられ、外径が
前記空胴側板の開口の一方の側から他方の側へ次第に小
さくなるように螺合して配置され、対向するドリフト管
それぞれの間隔が局部的に変更可能に構成されているこ
とを特徴とする。
The present invention comprises an electron gun for emitting and forming an electron beam, and a plurality of cavity resonators having a drift tube, a cavity end plate and a cavity side plate facing each other. In a multi-cavity klystron having a high-frequency circuit unit that interacts an electron beam and a high-frequency signal to amplify a high-frequency signal, and a collector that captures and collects the electron beam, converts the energy of the electron into thermal energy and dissipates it, The drift tube of the cavity resonator and the cavity end plate are integrally formed, and at least two of the cavity end plates share the same cavity side plate having a stepped portion with a different inner diameter, Is adhered to the stepped portion of
Alternatively, at least two of the cavity end plates share the same cavity side plate with different outer diameters, and internal threads of the cavity side plate and external threads of the cavity end plate have internal threads. It is provided so as to be screwed so that the outer diameter gradually decreases from one side of the opening of the cavity side plate to the other side, and the distance between the opposing drift tubes is locally changeable. It is characterized by being

【0009】[0009]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0010】図1は本発明の第1の実施例の概略構成
図、図2は図1の高周波回路部の断面図である。本発明
の第1の実施例は図1に示すように、従来の多空胴クラ
イストロンと同様、電子ビーム2を射出形成する電子銃
1と、複数個の空胴共振器4によって構成され電子ビー
ム2と高周波信号を相互作用させ高周波信号の増幅を行
う高周波回路部3と、電子ビーム2を捕捉収集し電子の
持つエネルギーを熱エネルギーに変換し放散させるコレ
クタ47を主な構成要素としている。
FIG. 1 is a schematic configuration diagram of a first embodiment of the present invention, and FIG. 2 is a sectional view of the high frequency circuit portion of FIG. As shown in FIG. 1, the first embodiment of the present invention is similar to the conventional multi-cavity klystron in that it is composed of an electron gun 1 for injecting and forming an electron beam 2 and a plurality of cavity resonators 4. The main components are a high-frequency circuit unit 3 that interacts with the high-frequency signal 2 to amplify the high-frequency signal, and a collector 47 that captures and collects the electron beam 2, converts the energy of the electron into heat energy and dissipates it.

【0011】図2に示すように、高周波回路部3を構成
する空胴共振器4は、図5に示す従来の空胴端板30と
ドリフト管27,31と28,32と29が一体化さ
れ、それぞれ端板と一体化されたドリフト管5,6,
7,12により構成されている。この端板と一体化され
たドリフト管5,6,7,12は段差部9,10,11
が設けられた共通の空胴側板の側面及び段差部9,1
0,11にスペーサ部品43,44,45を介して組立
てられろう付けにより固定される。このとき、端板と一
体化されたドリフト管5,6,7,12の間隔寸法がそ
れぞれa1 ,a2 ,a3 になるようスペーサ部品43,
44,45の板厚によって調整する。
As shown in FIG. 2, in the cavity resonator 4 constituting the high frequency circuit section 3, the conventional cavity end plate 30 and the drift tubes 27, 31 and 28, 32 and 29 shown in FIG. 5 are integrated. And the drift tubes 5, 6 integrated with the end plates, respectively.
It is composed of 7 and 12. The drift tubes 5, 6, 7 and 12 integrated with this end plate are provided with step portions 9, 10, 11
Side surface of the common cavity side plate provided with
0 and 11 are assembled via spacer parts 43, 44 and 45 and fixed by brazing. At this time, the spacer parts 43, so that the distance dimensions of the drift tubes 5, 6, 7, 12 integrated with the end plate become a 1 , a 2 , a 3 respectively.
Adjust according to the plate thickness of 44 and 45.

【0012】図3は本発明の第2の実施例の高周波回路
部の断面図である。本発明の第2の実施例は図3に示す
ように、空胴側板46の内周にはめねじ17,18,1
9,20が設けられ、めねじ部の径は空胴側板46の開
口の一方のめねじ20側から他方のめねじ17側へ次第
に小さくなるように形成されている。一方、端板と一体
化されたドリフト管13,14,15,16の外周には
それぞれおねじ21,22,23,24が設けられ、お
ねじ部の径はめねじ17,18,19,20の径に対応
して空胴側板46の一方のおねじ24側から他方のおね
じ21側へ次第に小さくなるように形成されている。こ
のおねじ21,22,23,24を有する端板と一体化
されたドリフト管13,14,15,16はおねじ2
1,22,23,24をそれぞれめねじ17,18,1
9,20に螺合することにより空胴側板46に組立てら
れろう付けにより固定される。このとき、端板と一体化
されたドリフト管13,14,15,16の間隔寸法が
それぞれb1 ,b2 ,b3 になるようにおねじ21,2
2,23,24とめねじ17,18,19,20の螺合
によって調整する。
FIG. 3 is a sectional view of a high frequency circuit section according to a second embodiment of the present invention. In the second embodiment of the present invention, as shown in FIG. 3, internal threads 17, 18, 1 are provided on the inner circumference of the cavity side plate 46.
9 and 20 are provided, and the diameter of the female thread portion is formed so as to gradually decrease from one female thread 20 side of the opening of the cavity side plate 46 to the other female thread 17 side. On the other hand, male threads 21, 22, 23, and 24 are provided on the outer circumferences of the drift tubes 13, 14, 15, and 16 integrated with the end plates, respectively. The cavity side plate 46 is formed so as to become gradually smaller from the one external thread 24 side to the other external thread 21 side in accordance with the diameter of the. The drift tubes 13, 14, 15, 16 integrated with the end plate having the male screws 21, 22, 23, 24 are the male screws 2
1, 2, 23, 24 are respectively female screws 17, 18, 1
It is assembled to the cavity side plate 46 by being screwed onto the members 9 and 20, and fixed by brazing. At this time, the screws 21, 2 are adjusted so that the distances between the drift tubes 13, 14, 15, 16 integrated with the end plates are b 1 , b 2 , b 3 , respectively.
Adjustment is made by screwing 2, 23, 24 and female screws 17, 18, 19, 20.

【0013】[0013]

【発明の効果】以上説明したように本発明は、高周波回
路部の組立て工程において対向するドリフト間の間隔寸
法を局部的に変更可能な手段を持たせることにより、空
胴共振周波数の設定が容易に精度良く行えるという効果
がある。
As described above, according to the present invention, it is possible to easily set the cavity resonance frequency by providing a means capable of locally changing the interval dimension between the drifts facing each other in the assembling process of the high frequency circuit. The effect is that it can be performed with high precision.

【0014】さらに、変更可能な手段を空胴側板に段差
を設けドリフト管をスペーサを介して開口の一方の側か
ら挿入して装着する手段とすることにより、組立てが容
易で部品点数が低減できるという効果がある。
Further, the changeable means is a means for mounting the drift tube by providing a step on the cavity side plate and inserting the drift tube from one side of the opening through the spacer, so that the assembly is easy and the number of parts can be reduced. There is an effect.

【0015】一方、変更可能な手段をねじの螺合による
手段とすることにより、組立て時に連続的に可変調整が
できるので共振周波数の設定が容易に精度良く行えると
いう効果がある。この場合には間隔寸法が0.01mm
を連続可変でき、2GHz帯で0.5MHz以下の設定
精度が可能であることが実験的に確かめられた。
On the other hand, when the variable means is a means by screwing a screw, there is an effect that the resonance frequency can be set easily and precisely because variable adjustment can be continuously performed at the time of assembly. In this case, the interval dimension is 0.01 mm
It has been experimentally confirmed that the value can be continuously varied and a setting accuracy of 0.5 MHz or less in the 2 GHz band is possible.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の概略構成図である。FIG. 1 is a schematic configuration diagram of a first embodiment of the present invention.

【図2】図1の高周波回路部の断面図である。FIG. 2 is a cross-sectional view of the high frequency circuit unit of FIG.

【図3】本発明の第2の実施例の高周波回路部の断面図
である。
FIG. 3 is a sectional view of a high frequency circuit section according to a second embodiment of the present invention.

【図4】従来の多空胴クライストロンの一例の概略構成
図である。
FIG. 4 is a schematic configuration diagram of an example of a conventional multi-cavity klystron.

【図5】図4の高周波回路部の断面図である。5 is a cross-sectional view of the high frequency circuit unit of FIG.

【図6】従来の多空胴クライストロンの他の例の空胴共
振器の断面図である。
FIG. 6 is a sectional view of a cavity resonator of another example of the conventional multicavity klystron.

【符号の説明】[Explanation of symbols]

1 電子銃 2 電子ビーム 3,25 高周波回路部 4,26 空胴共振器 5,6,7,12,13,14,15,16 端板と
一体化されたドリフト管 8,33,34,35,46 空胴側板 9,10,11 段差部 17,18,19,20,41,42 めねじ 21,22,23,24,39,40 おねじ 27,28,29,36,37 ドリフト管 38 空胴壁 43,44,45 スペーサ部品
DESCRIPTION OF SYMBOLS 1 Electron gun 2 Electron beam 3,25 High frequency circuit part 4,26 Cavity resonator 5,6,7,12,13,14,15,16 Drift tube integrated with end plate 8,33,34,35 , 46 Cavity side plate 9, 10, 11 Step part 17, 18, 19, 20, 41, 42 Female thread 21, 22, 23, 24, 39, 40 Male thread 27, 28, 29, 36, 37 Drift pipe 38 Cavity wall 43,44,45 Spacer parts

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 電子ビームを射出形成する電子銃と、対
向するドリフト管と空胴端板と空胴側板とを有する複数
個の空胴共振器によって構成され前記電子ビームと高周
波信号を相互作用させ高周波信号の増幅を行う高周波回
路部と、前記電子ビームを捕捉収集し電子の持つエネル
ギーを熱エネルギーに変換し放散させるコレクタとを有
する多空胴クライストロンにおいて、前記空胴共振器の
ドリフト管と空胴端板は一体に構成され、対向するドリ
フト管の間隔を共振器組立の際に局部的に変更できる手
段を備えたことを特徴とする多空胴クライストロン。
1. An electron gun for injecting and forming an electron beam, and a plurality of cavity resonators each having a drift tube, a cavity end plate, and a cavity side plate facing each other. The electron beam interacts with a high-frequency signal. In a multi-cavity klystron having a high-frequency circuit unit for amplifying a high-frequency signal, and a collector for capturing and collecting the electron beam, converting the energy of the electrons into thermal energy and dissipating the drift beam of the cavity resonator, A multi-cavity klystron, characterized in that the cavity end plates are formed integrally and are provided with means capable of locally changing the distance between opposing drift tubes during resonator assembly.
【請求項2】 前記空胴端板の少くとも2個が内径の異
った段差部を有する同一の空胴側板を共有し、それぞれ
の前記段差部にスペーサ部品を介して装着されているこ
とを特徴とする請求項1記載の多空胴クライストロン。
2. At least two of the cavity end plates share the same cavity side plate having step portions having different inner diameters, and are attached to the respective step portions via spacer parts. The multi-cavity klystron according to claim 1, wherein:
【請求項3】 前記空胴端板の少くとも2個がそれぞれ
異る外径で同一の空胴側板を共有し、この空胴側板の内
周にめねじと前記空胴端板の外周におねじが設けられ、
外径が前記空胴側板の開口の一方の側から他方の側へ次
第に小さくなるように螺合して配置されていることを特
徴とする請求項1記載の多空胴クライストロン。
3. At least two of the cavity end plates share the same cavity side plate with different outer diameters, and a female screw and an outer periphery of the cavity end plate are provided on the inner periphery of the cavity side plate. A male screw is provided,
2. The multi-cavity klystron according to claim 1, wherein the multi-cavity klystron is arranged so as to be screwed so that the outer diameter gradually decreases from one side of the opening of the cavity side plate to the other side.
JP5249645A 1993-10-06 1993-10-06 Multi-cavity klystron Expired - Lifetime JP2551352B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5249645A JP2551352B2 (en) 1993-10-06 1993-10-06 Multi-cavity klystron

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5249645A JP2551352B2 (en) 1993-10-06 1993-10-06 Multi-cavity klystron

Publications (2)

Publication Number Publication Date
JPH07105860A true JPH07105860A (en) 1995-04-21
JP2551352B2 JP2551352B2 (en) 1996-11-06

Family

ID=17196107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5249645A Expired - Lifetime JP2551352B2 (en) 1993-10-06 1993-10-06 Multi-cavity klystron

Country Status (1)

Country Link
JP (1) JP2551352B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696048A3 (en) * 1994-08-03 1998-03-18 Eev Limited Electron beam tubes
WO2022060470A1 (en) * 2020-09-17 2022-03-24 Applied Materials, Inc. System, apparatus and method for multi-frequency resonator operation in linear accelerator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0696048A3 (en) * 1994-08-03 1998-03-18 Eev Limited Electron beam tubes
US5821693A (en) * 1994-08-03 1998-10-13 Eev Limited Electron beam tubes having a unitary envelope having stepped inner surface
WO2022060470A1 (en) * 2020-09-17 2022-03-24 Applied Materials, Inc. System, apparatus and method for multi-frequency resonator operation in linear accelerator
US11388810B2 (en) 2020-09-17 2022-07-12 Applied Materials, Inc. System, apparatus and method for multi-frequency resonator operation in linear accelerator

Also Published As

Publication number Publication date
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