JPH069705Y2 - Mold carrier - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a die carrier truck used for detaching and carrying a die in a so-called press device such as a mold breathing device used in a semiconductor device manufacturing process.

[Outline of device]

The present invention provides a mold carrier used for loading and unloading molds in a press machine, and a mold supporting table is provided on the carrier main body via a vertical movement mechanism, and the mold can be moved on this table. Rollers that can be moved up and down based on the leveling and roller placement surface are arranged, and a slide-type safety cover is provided around the vertical movement mechanism and table, and dust collectors are installed inside this safety cover and near the wheels of the transport carriage main body. Furthermore, by providing a magnetic scale that determines the height position of the table on the main body of the carrier, it can be used in a so-called clean room such as a semiconductor manufacturing work room, and the mounting and dismounting of the mold and the transfer are safe, accurate, and quick. It is something that can be done.

[Conventional technology]

In the manufacturing process of a semiconductor device, there is a process of resin-molding a semiconductor element mounted on a lead frame, and a mold press device is used. Conventionally, attachment / detachment and transfer of a mold in such a mold press apparatus have been performed by various methods such as a forklift. FIG. 11 shows a mold press device (3) for a mold (2) using a forklift (1).
When transferring the mold (2) from the forklift (1) to the mold press machine (3),
(4) etc. are used.

[Problems to be solved by the invention]

All of the conventional transportation means such as forklifts lack safety, accuracy, speed, etc.Especially, in the case of a mold with a weight of 700 kg to 1.5 t, it is extremely dangerous and requires skill. It was

For example, when the die (2) is loaded on the forklift (1) shown in FIG. 11, rollers (4) and the like are laid under the die (2) and rolled. Since the mold (2) leans forward, the tilt and height are constantly adjusted. If the tilt cannot be adjusted, the die (2) must be held down so that it does not roll forward and that it does not fall. On the other hand, when transferring the mold (2) from the forklift (1) to the mold press device (3) as shown in FIG. 11, when the mold (2) advances, the fork (2) moves.
Since (5) tilts forward (position (5 ')), correct tilt and adjust the height. Then, the mold (2) moves from the fork (5) into the mold press device (3), and the fork (5) moves to the mold (2).
As the load on the fork (5) decreases sharply when it is further away, the fork (5) rebounds and violently floats ((5 ″)
Position of). In order to prevent this operation, tilt correction and height adjustment are repeated before the mold (2) is separated, and the load is transferred to the mold press device (3) and then reloaded. Therefore, it is dangerous and time-consuming.

In a clean room such as a semiconductor manufacturing work room, a small amount of dust is not allowed. Therefore, it is necessary to surely prevent dust generated due to friction between the wheels and the floor during the operation of the transportation means.

In view of the above-mentioned points, the present invention provides a mold carrier truck that can safely and accurately and quickly perform the mounting and demounting and transfer of a mold to and from a press machine and that can be used in a clean room. Is.

[Means for solving problems]

The present invention relates to a die carrier truck for transporting a die for manufacturing a semiconductor device in a clean room, and a vertically moving mechanism capable of moving up and down on a carrier carriage body (12), for example, by a hydraulic cylinder (36).
A mold support table (13) is provided via the (31), and a roller (23) is provided on the table (13) to make the mold movable and to move up and down on the basis of the roller arrangement surface. A slide type safety cover (43) is provided around the vertical movement mechanism (31) and the table (13), and a dust collector is arranged in the safety cover (43). Further, the transport vehicle main body (12) is provided with drive wheels (14) and wheels (15) having dust collectors (45) arranged in the vicinity thereof, respectively, so that they can be freely moved. A magnetic scale (42) for determining the height position of the table is provided on the side surface of the carrier body (12) facing the table (13) and the vertical movement mechanism (31).

The table (13) is firmly supported by the supports (34) (35) of the vertical movement mechanism (31) with respect to the main body (12). The rollers (23) are arranged so as to face at least two parallel rails (25),
In this case, the roller (23) is arranged so that it can move up and down (that is, project and retract) with respect to the surface of the rail (25). A pair of guide rails (27) that position-control the left and right of the mold so that the mold (2) does not move when the mold (2) is loaded on the table (13), and position control of the front and rear Although it is possible to provide a pair of stopper members (28), the stopper member (28) can be omitted because the roller (23) is vertically movable.

On the other hand, in the press device (3) for arranging the die (2), a similar roller (61) is arranged on the arrangement surface of the die (2), and in this case, the roller (61) moves vertically with respect to the arrangement surface. It is arranged so that it can be moved.

[Action]

The mold (2) is loaded on the table (13) of the mold carrier (11) and then transported to the side of the press device (3). Then, the table (13) is raised by the hydraulic cylinder (36), the height of the table (13) is adjusted by the scale (42), and the surfaces of the table (13) and the press device (3) are made the same, The mold (2) is transferred to the press device (3) side. At this time, the roller (23) projects above the placement surface,
Since (2) moves on the roller (23), the transfer can be performed lightly. Since the magnetic scale (42) is used as the scale, the table (13) can be automatically brought to a predetermined height.
Further, the table (13) does not tilt with respect to the movement of the load and is maintained in a horizontal state. Mold (2) press machine (3)
The same operation can be performed when transferring from the transfer carrier to the transfer vehicle (11). When the mold (2) is loaded on the carrier truck (11), it can be easily carried out by the roller (23). When the mold (2) is loaded at a predetermined position of the transport carriage (11), the roller (25) is retracted from its arrangement surface, so that the mold (2) comes into close contact with the roller arrangement surface and the mold (2 ) Weight stabilizes at that position. Further, since the mold (2) is stably held on the carrier, the mold (2) does not move while the carrier is operating, and the mold (2) and its mounting surface move. No dust is generated due to friction.

On the other hand, the sliding safety cover (43) allows the vertical movement mechanism (3
Accidents such as injuries caused by touching 1) are prevented and workers can work safely. Further, dust generated from the slide portion of the vertical movement mechanism (31) is collected by the dust collector inside the safety cover (43) and does not go outside. Also, drive wheels (14) and wheels (15) and floor (46)
Even a small amount of dust generated by friction with the dust collector (45) is collected.

Therefore, the attachment / detachment and transfer of the mold (2) to / from the press device (3) can be performed safely, reliably, and quickly. At the same time, the room is not polluted and is kept clean.

〔Example〕

Hereinafter, an embodiment of a mold carrier according to the present invention will be described with reference to the drawings.

1 to 3 show an example of the present invention, in which (3) is a mold press machine and (2) is a mold thereof. (11) shows the whole die carrier of the present invention, (12) shows the carrier body, and (13) shows the mold support table mounted on the body (12) so as to be vertically movable.

The carrier body (12) has urethane drive wheels (14) and wheels.
Equipped with (15), the forward and backward movements of this transport carriage (11) are handle parts.
It is performed by operating the lever in (16). The handle (16) has a forward / reverse selector switch (17) and a high / low speed selector switch.
(18) and a key switch (19) are provided. (20) is a battery. A large number of rollers (23) [(23a), (23b), (23c)] on the die supporting table (13) so as to cover the entire width of the table.
Two parallel roller parts (24) are arranged. The roller part (24) has two flat rails (25)
It is arranged to be buried in. In this case, the roller portion (24) is divided into, for example, three, and the central roller portion (24b)
The roller (23b) is an omnidirectional roller so that the mold (2) can be moved in all directions.
Rollers (23a) and (23c) of (24c) can move the mold (2) in one direction (rail (2
It is composed of a unidirectional roller so that it can move in the extension direction of 5). Each roller part (24a) divided into three
(24b) and (24c) are detachably arranged in the rail (25). Each roller part (24a) (24b) (24c) is fixed (See Fig. 6)
Alternatively, it can be arranged to be movable up and down (see FIG. 5), but in this example, it is arranged to be movable up and down via a hydraulic cylinder (26). That is, when it moves up, the rollers (23a) (23b) (23
c) projects upward from the surface of the rail (25), and when it moves downward, it is drawn inward from the surface of the rail (25). Further, the roller parts (24a) and (24c) move up and down in conjunction with each other, and the roller part (24b) moves up and down independently of the roller parts (24a) and (24c).
In order to hold the mold (2) on the table (13) at a predetermined position when it is placed, a pair of guide rails (27) for regulating the left and right of the mold (2) and the mold (2) Position control before and after
A pair of stopper members (28) are provided. Guide rail (2
7) is attached with screws (29) on both sides of the two roller parts (24), and the stopper member (28) is on the rail (25) on the guide rail.
Mounted with screws (30) in a direction orthogonal to (27). These guide rails (27) and stopper members (28) are displaced in their mounting positions according to the size of the mold (2) so that the distance between both guide rails (27) and the distance between both stopper members (28) can be increased. The spacing is adjusted.

On the other hand, the table (13) is connected to the main body (12) through the vertical movement mechanism (31).
Supported by. The vertical movement mechanism (31) includes a pair of supports (34) and (35) that are rotatably supported at the center so that the two members (32) and (33) intersect with each other. Hydraulic Cylinder (36)
Composed of. That is, the supports (34) and (35) are each a table.
It is provided on both sides between (13) and the body (12), and one member (3
The upper end of (2) is rotatably fixed to one end of the lower surface of the table (13), and the lower end of the upper end is rotatably contacted with the other end of the main body (12) via a roller (37). The lower end of 33) is the main body (1
It is rotatably fixed to one end of 2), and its upper end is in rolling contact with the lower surface of the table (13) via a roller (38). The shaft (39) extending between the one member (32) and the other member (3)
3) The hydraulic cylinder (36) is placed between the shafts ((40)
The support (34) (35) is expanded and contracted by the hydraulic cylinder (36) to move up and down. The vertical movement of the table (13) is operated by the switch (42).

The side surface of the main body (11) facing the vertical movement mechanism (31) and the table (13) is a so-called lift scale (which is used when the heights of the table (13) and the mold press device (3) are matched when the mold is attached and detached. 42) is provided. This scale (42) uses a magnetic scale. Also, the table (13) and the vertical movement mechanism (31)
A sliding safety cover (43) is provided around the entire circumference of the. At the same time, a dust collector is arranged in the safety cover (43) so that dust generated from the sliding portion of the vertical movement mechanism (31) is collected and is not discharged to the outside. On the outside of the safety cover (43), a safety frame (4
4) can be arranged. This safety frame (44) is a table (13)
It is formed to be slightly higher than the height of the upper part of the table (13) when it is lowered to the bottom. As a result, even if the stopper member (28) is damaged, the die (2) is prevented from falling. When loading and unloading the mold (2), the table (13) is moved to a position above the safety frame (44). The safety cover (43) and the safety frame (44) are fixed to the main body (12).

In the main body (12), the dust collector (45) is arranged in the vicinity of the drive wheel (14) and the wheel (15), and a very small amount of dust generated by the friction between the floor (46) and the wheels (14) and (15). The dust is collected by this dust collector (45). Further, fixing screws (47) for fixing are provided at four places of the main body (12) so that the carrier vehicle (11) can be stably fixed to the floor (46) even in a place where the floor (46) is unstable. Reference numeral (21) is a hydraulic pump of the vertical movement mechanism (31), and reference numeral (22) is a motor directly connected to the hydraulic pump (21). Hydraulic Pump (21)
Can also serve as a hydraulic pump for the hydraulic cylinder (26) of the roller portion (24), in which case a switching solenoid valve is provided.

Further, at least one end portion of the table (13), in this example both end portions, is provided with an auxiliary roller portion (50) corresponding to the roller portion (24).
Is provided with a mounting portion (51). The auxiliary roller portion (50) is provided with a plurality of rollers (49) that rotate in one direction as shown in FIG. 4, and is configured to be attachable to and detachable from the mounting portion (51). For example, a mold press device (3) When there is a large space between the main carrier vehicle (11) and the carriage (11), the auxiliary roller portion (50) is fitted into the mounting portion (51) to fill the gap. The mounting portion (51) can also be mounted on the mold pressing device (3) side.

On the other hand, in the mold press device (3) for installing the die (2), as shown in FIG. 1, a roller portion in which a plurality of unidirectional rollers (61) are formed on the arrangement surface of the die (2). (62) is placed. The roller portion (62) is arranged by a hydraulic cylinder so as to be movable up and down with respect to the arrangement surface.

Thus, when the mold (2) is loaded on the mold carrier (11), the vertical movement mechanism (31) is operated to bring the table (13) to a predetermined height, and then the roller (23a). (23b) (23c) so that the rollers (24) protrude above the surface of the rail (25).
Increase by (26). Then, while guiding the mold (2) to the guide rail (27), the mold (2) is transported in one direction on the roller portion (24) and loaded on the center position of the table (13). After that, a pair of stopper members (28) are attached on the guide rails (27) to fix the mold (2) at that position. With the mold in place, move the roller part (24) downwards via the hydraulic cylinder (26) to move the rollers (23a) (23b) (23c) below the surface of the rail (25). Mold (2) is flat rail (25)
Even if the stopper member (28) is not provided, the weight of the mold (2) can be stably held in that position. Mold (2)
The table (13) can be once lowered to the lowermost position after the pallets have been loaded onto the carrier vehicle (11). Next, the carrier vehicle (11) is operated to horizontally attach the mold (2) to the mold press device (3). Since the die (2) is stably held in close contact with the flat rail (25) surface, the die (2) does not move during the operation of the carrier vehicle (11), and the die (2) and its mounting surface are There is no generation of dust due to moving friction. Then, the vertical movement mechanism (31) is operated to adjust the table (13) to the height of the mold press device (3). At this time, the table (13) automatically stops at the set height position by the magnetic scale (42), and the heights of the table (13) and the mold press device (3) are accurately and easily adjusted. When the floor (46) is bad, the four fixing screws (47) for fixing are brought into contact with the floor surface to stably fix the carrier vehicle (11). In the mold press device (3), the roller portion (62) is raised so that the roller (61) faces the arrangement surface of the mold (2).
In addition, the roller portion of the table (13) surface is also used in the transport carriage (11).
(24) is lifted so that the rollers (23a) to (23c) face the rail (25) surface. In this state, remove one stopper member (28),
When the mold (2) is lightly pressed, the mold (2) passes through the roller portion (24) and is housed in the mold press device (3). Prior to the housing in the mold press device (3), even if the mold (2) is loaded in the reverse direction on the transport carriage (11), the mold is rotated on the omnidirectional roller (24b). (2) can rotate direction, mold
(2) can be easily transferred to the mold press device (3) in the correct orientation. Where mold press equipment (3)
Auxiliary roller (50) when the distance between the carriage and the carriage (11) is wide
Is fitted to the mounting portion (51) at the end of the table (13). This makes it easy to transfer the mold (2). Then, when the mold (2) is transferred from the carrier truck (11) to the mold press device (3), the load moves, but the table (13) is supported by the support bodies (34) (35) on both sides. Since the table (13) itself does not tilt and is maintained in a horizontal state, the molds can be easily transferred. The roller section (24) is
It is possible to move up and down in 6), so that stability during transfer and transfer of the mold (2) is secured. Even if dust is generated due to friction between the drive wheels (14) and wheels (15) and the floor (46) during die transfer, the dust collector (4
Since it is collected by 5), it can be used in a so-called clean room such as a semiconductor manufacturing work room. Further, the vertical movement speed of the table (13) can be easily adjusted according to the work by changing the hydraulic valve, so that the work can be performed safely.

In addition to the above example, the roller portion (24) may be constituted by a roller (23a) which rotates in one direction over the entire width of the table (13) as shown in FIG. 7, and in this case as well. The roller portion (24) can be fixed or can be moved up and down. In this configuration, the mold (2) cannot be turned on the table (13). Further, as the constitution of the roller portion (24a), as shown in FIG.
It is also possible to arrange the roller portion (24b) having the omnidirectional roller (23b) in the central portion between the two roller portions (24a) having a). In this case, each roller part (24a) (24b)
Can move up and down, but the two unidirectionally rotating roller portions (24a) and the omnidirectionally rotating roller portion (24b) can be driven independently of each other. Further, in each embodiment, when the roller portion (24) is formed by being divided into a plurality of parts, there is an advantage that the number of parts replacement is small.

In the configuration of the roller portion (24) of the above example, it is also possible to drive each of the divided regions independently as needed.

9 and 10 show another embodiment of the present invention. However, the portions corresponding to those in FIG. 1 and FIG. In this example, when a plurality of, for example, two sets of tables (13) (13 ') and vertical movement mechanisms (31) (31') having the same configuration as described above are provided on the main body of the carrier vehicle (12) Is. This transfer carriage (71) has a power control (72) and a temperature adjusting device (73) for expected heating of the mold (2).
Is built in.

In this carriage (72), two sets of tables (13) and (1
By providing 3 '), the mold (2) to be replaced is loaded on one table (13'), and the mold press device
After transferring to (3), first move the mold (2) in the mold press machine (3) to the other table (13), and then mold the mold (2) on one table (13 '). Transfer to a press machine. As a result, the work of attaching and detaching the mold can be completed in one reciprocation. Further, a heating means is incorporated in the mold.
Therefore, with the mold (2) to be replaced placed on one of the tables (13 '), connect the socket of the heating means of the mold (2) to the power supply control (72). The mold (2) can be preheated during the waiting period by inserting the power socket into an external power source in the room and setting the temperature to a predetermined temperature with the temperature adjusting device (72). Therefore, the heating time after placing the preheated mold (2) in the mold press device (3) can be shortened and the start of the work can be accelerated. Usually, the working temperature of the mold in the mold press machine is 175 ° C. ± 5 ° C., and the preheating can be about 175 ° C. ± 5 ° C.

Incidentally, the power source control (72) for preheating the mold and the temperature adjusting device (73) can also be incorporated in the transfer carriage (11) shown in FIGS. 2 and 3.

In the above example, the present invention is applied to the attachment / detachment and conveyance of the mold of the mold press machine, but the present carriage is applicable to the attachment / detachment and conveyance of the mold of other press machines.

[Effect of device]

According to the mold carrier truck of the present invention, it is possible to safely and accurately and quickly carry out the mounting and demounting of the mold to and from the press device, and it is possible to handle a heavy mold without danger.

In addition, the safety cover, the dust collector placed in the safety cover and near the wheels collects even a small amount of dust generated during operation, does not pollute the clean room, and can be used in a so-called clean room. Become. Further, since the height of the table can be easily and accurately set to a predetermined height by the magnetic scale, the work efficiency of attaching / detaching and transferring the mold in the clean room is improved.

[Brief description of drawings]

FIG. 1 is a block diagram showing a state of detaching and replacing a mold using the mold carrier of the present invention, FIG. 2 is a front view showing an example of the mold carrier of the present invention, and FIG. FIG. 4 is a plan view, FIG. 4 is a perspective view of an essential part, FIGS. 5 and 6 are sectional views of the essential part including the roller part of the present invention, and FIGS. 7 and 8 are other configurations of the roller part. An example plan view, FIGS. 9 and 10 are a front view and a plan view showing another example of the mold carrier of the present invention,
FIG. 11 is a configuration diagram showing a state in which a mold is attached and detached and replaced using a conventional forklift. (2) is a mold, (3) is a mold press device, (11) (71) is a mold carrier, (12) is a carrier body, (13) is a table, (14) is a drive wheel, (15) Is a wheel, (24) is a roller portion, (31) is a vertical movement mechanism, (42) is a magnetic scale, (43) is a safety cover, and (45) is a dust collector.

Claims (1)

[Scope of utility model registration request] 1. A mold carrier for transporting a mold for manufacturing a semiconductor device in a clean room, wherein a mold supporting table is provided on a main body of the carrier via a vertical movement mechanism, and the mold is mounted on the table. Rollers that are movable and vertically movable based on the roller arrangement surface are arranged, and a slide-type safety cover is provided around the vertical movement mechanism and the table, and inside the safety cover and near the wheels of the transport carriage main body. A die carrier truck in which dust collectors are provided respectively, and a magnetic scale for determining the height position of the table is provided in the carrier body.