JPH069009Y2 - Centrifugal evaporation source - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a centrifugal evaporation source used in a vacuum evaporation apparatus, a vacuum evaporation apparatus and the like.

(Prior Art) Conventionally, as an evaporation source used in a vacuum vapor deposition apparatus,
For example, as shown in FIG. 1, it is known that a stationary crucible b is provided in a vacuum chamber a, and a resistance heating heater or a heating means c of an induction heating coil is provided around the crucible b. Evaporated material d contained in crucible b is heated by heating means c.
It is carried out by heating by means of the above to evaporate, form a vapor deposition film on the substrate placed above the crucible b, or evaporate fine particles are solidified as they are and collected as ultrafine powder.

Further, as shown in FIG. 2, a heat-resistant container e such as a water-cooled copper hearth is rotated in an oblique direction, and the evaporation material d is heated by a heating means such as an electron beam f to evaporate in an oblique direction. It is known in JP-A-60-135566.

(Problems to be Solved by the Invention) In the stationary evaporation source as shown in the first diagram, the evaporation surface of the evaporation material d decreases as the evaporation progresses, and the contact area between the crucible b and the evaporation material d, that is, There is a disadvantage that the heating area is reduced and the evaporation rate is lowered and the evaporation distribution is changed. Further, since the evaporation material d in the crucible b is deep, bumping is likely to occur, and it is difficult to obtain a high evaporation rate, which is inconvenient because the evaporation port of the crucible b can only be set upward.

On the other hand, in the rotary type evaporation source shown in FIG. 2, since it is possible to prevent the contact area between the heat-resistant container e and the vaporized material d from being reduced, the evaporation rate is not lowered and the evaporation distribution is little changed, and the evaporation port is inclined. Although there is an advantage that it can be directed, if the vaporized substance d is a substance such as aluminum, silicon, or tin that easily wets the crucible wall,
At the time of evaporation, these melted substances flow out from the upper part of the crucible along the outer wall of the crucible and contaminate the periphery of the evaporation source. Has the inconvenience of being scattered.

The present invention aims to solve the above-mentioned drawbacks and the like of a rotary evaporation source.

(Means for Solving the Problem) In the present invention, an evaporation material contained in a crucible is heated in a vacuum chamber, and the melting evaporation material is evaporated by rotating the crucible. The above-mentioned object was achieved by providing a brim that protrudes inward at the evaporation port. The brim may protrude toward the inside of the evaporation port and further extend to the inner part of the crucible to form a space surrounded by the side wall of the crucible and the crucible.

(Operation) In the vacuum chamber, the evaporation material contained in the crucible is heated by the heating means, and when the evaporation material is in a molten state, the crucible is rotated by the rotating mechanism.

The vaporized substance in the molten state moves to the inner wall side of the crucible under the action of centrifugal force due to rotation, and forms, for example, a paraboloid of revolution according to the crucible shape and the number of revolutions.

The brim of the crucible prevents the evaporate from scattering or flowing out of the crucible when rotating or heating, and can evaporate the evaporating port of the crucible toward the side or the downward direction to prevent evaporation. Prevents the surrounding pollution. Evaporation occurs from the paraboloid of revolution of the evaporation material in the crucible, and its evaporation rate can be kept almost constant because the change in the contact area between the crucible and the molten evaporation material is small.
Since there is no decrease in the melting surface, there is little change in the evaporation distribution and vapor deposition with a uniform film thickness is possible.

(Embodiment) An embodiment of the present invention will be described with reference to FIGS. 3 to 5 in which reference numeral (1) indicates a vacuum chamber exhausted by a vacuum pump, and (2) indicates an evaporation port (3). ) Is shown, and the crucible (2) is attached to the rotating mechanism (4), and the evaporation port
The rotation about the rotation axis passing through (3) is given. (5) is a heating means for heating and melting the evaporated material (6) contained in the crucible (2), and the heating means (5) irradiates a resistance heating type heater, an induction heating type coil or an electron beam. You can use an electron gun that does.

The rotating mechanism (4) has a rotating shaft (8) having a heat insulating portion (7) in the middle.
Through the vacuum-atmosphere shaft seal portion (10) provided on the chamber wall (9) of the vacuum chamber (1), and the external motor (11) rotates the rotary shaft.
(8) is configured to be connected.

Reference numeral (12) denotes a collar provided so as to project inward at the evaporation port (3) of the crucible (2), and the collar (12) is the evaporation port (3) as shown in FIG. Not only stick out inward, but also crucible (2)
It is also possible to form an extension portion (13) extending toward the inner part of the wall and form a space (14) surrounded by the collar (12) and the crucible side wall (2a).

The solid evaporation material (6) is placed in the stationary crucible (2), the heating means (5) is operated to heat and melt the evaporation material (6), and the molten metal is melted to the position of the chain line in FIG. 3, for example. When it is made and the rotation mechanism (4) is activated, the dissolved evaporate (6) is suspended by the centrifugal force.
Along the inner wall of (2), the shape of the molten metal such as a paraboloid of revolution will be provided. Then, the evaporate (6) evaporates as vapor from the evaporating port (3) and adheres to a substrate prepared in front of the evaporating port (3) or is cooled and solidified as it is to be recovered as ultrafine particles. .

In this case, since the flange (12) is provided at the evaporation port (3) of the crucible (2), the melted evaporated material (6) does not jump out of the crucible (2) by centrifugal force, Even if the evaporation material is a substance such as aluminum that easily travels up the crucible wall, there is no inconvenience that the evaporation can be carried out with the crucible (2) facing sideways or downward, and installation is restricted as in the conventional one. Tsuba (1
It is pushed back due to the centrifugal force acting on 2) and its propagation is prevented, and pollution around the evaporation source is prevented.

Further, by providing the collar (12), it is possible to increase the number of rotations of the crucible (2) and widen the evaporation surface of the evaporation material (6), and as a result, the evaporation area is increased and the evaporation area of the crucible (2) is increased. Since the distance between the inner wall and the evaporation surface becomes short, the evaporation material (6) is heated with a small temperature difference and a large evaporation rate can be obtained without causing bumping.

In order to correct the evaporation distribution from the evaporation port (3), a plate-shaped evaporation distribution correction plate (15) may be provided in the crucible (2) as shown in FIG.

Incidentally, for example, a water-cooled copper hearth may be used as the crucible (2), and the evaporate (6) may be heated by irradiation with an electron beam.

(Effect of the Invention) As described above, according to the present invention, since the evaporating port of the rotating crucible is provided with the brim that protrudes inward, the crucible can be rotated at a high rotational speed to evaporate. ,
The evaporation rate can be increased, there is no inconvenience that the molten metal of the evaporation flows out or scatters to the outside of the crucible and pollutes the surroundings, and the evaporation direction can be directed laterally or downward, so that the evaporation source can be installed freely. It has the effect of increasing the degree.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 and FIG. 2 are sectional side views of a conventional example, FIG. 3 is a sectional side view of an embodiment of the present invention, and FIGS. It is a cutaway side view of the embodiment of FIG. (1) …… vacuum chamber, (2) …… crucible (3) …… evaporation port, (4) …… rotating mechanism (5) …… heating means, (6) …… evaporated matter (12) …… tsuba , (14) …… Space

Claims (3)

[Scope of utility model registration request] 1. A method in which an evaporated material contained in a crucible is heated in a vacuum chamber, and the molten evaporated material is evaporated by rotating the crucible, and the crucible is extruded inwardly into an evaporation port of the crucible. A centrifugal evaporation source characterized by having a tsuba. 2. The crucible brim protrudes inward of the evaporation port and further extends to the inner part of the crucible to form a space surrounded by a side wall of the crucible. The centrifugal evaporation source described. 3. The centrifugal evaporation source according to claim 1, wherein an evaporation distribution correction plate is provided so as to face the evaporation port of the crucible.