JPH0687931B2 - Exhaust gas purification device - Google Patents
Exhaust gas purification deviceInfo
- Publication number
- JPH0687931B2 JPH0687931B2 JP61054331A JP5433186A JPH0687931B2 JP H0687931 B2 JPH0687931 B2 JP H0687931B2 JP 61054331 A JP61054331 A JP 61054331A JP 5433186 A JP5433186 A JP 5433186A JP H0687931 B2 JPH0687931 B2 JP H0687931B2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- gas
- liquid
- tower
- white smoke
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は微細なミストやヒュームを有害成分として含有
する排ガスの浄化装置に関する。TECHNICAL FIELD The present invention relates to an exhaust gas purifying apparatus containing fine mist or fumes as harmful components.
〔従来技術〕 最近の金属や半導体の表面処理工程においては塩酸、硫
酸、硝酸などの酸洗浄液を使用して高温浴下で表面処理
することが多いが、この排ガス系統では反応生成ガスの
他に前記酸洗浄液の蒸気（以下、酸性ガスという）が絶
えず、排ガス中に同伴して排出されている。そして、こ
れらの酸性ガスを同伴する排ガスは、従来、比較的簡易
な充填塔や多孔板塔などの湿式洗浄処理塔で処理するの
が一般的であった。[Prior Art] In recent surface treatment processes for metals and semiconductors, acid cleaning solutions such as hydrochloric acid, sulfuric acid, and nitric acid are often used for surface treatment in a high-temperature bath. The vapor of the acid cleaning liquid (hereinafter referred to as acid gas) is constantly discharged along with the exhaust gas. Exhaust gas accompanied with these acidic gases has conventionally been generally treated in a wet cleaning treatment tower such as a relatively simple packed tower or perforated plate tower.
しかしながら、上記湿式洗浄処理塔によれば前記排ガス
の大部分は処理できるものの、処理塔内の湿分と酸性ガ
スとが会合して生成するエアロゾル状の微細なミストは
排出側のミストセパレータでも補集することができず、
排突で白煙霧化し、視界を妨げたり、周辺地域にたれこ
めたりして公害問題になっていた。この白煙霧化したエ
アロゾルを除去するためには湿式洗浄処理塔の後段に、
高性能フィルターや電気集塵機などの高性能な除塵機能
を持つ装置を付加的に設置する以外に解決手段がなく、
これによれば、あらたに大きな設置スペースを必要と
し、処理設備のイニシャルおよびランニングコストなど
の経費が高くつき、既設排気設備を改良して実施する場
合は勿論、新規排気設備の公害防止上の対策としても容
易に実施しえないものであり、これまで他に適当な解決
策がないといわざるをえなかったのが現状であった。However, although most of the exhaust gas can be treated by the wet cleaning treatment tower, aerosol-like fine mist produced by association of moisture and acid gas in the treatment tower is also supplemented by the mist separator on the discharge side. Unable to gather,
It was a smoke pollution that caused white smoke and obstructed the visibility and hung up in the surrounding area, causing pollution problems. In order to remove this aerosol of white smoke, in the latter stage of the wet cleaning treatment tower,
There is no solution except to additionally install a device with high-performance dust removal function such as a high-performance filter or an electric dust collector.
According to this, a new installation space is required, the initial cost of the treatment equipment and the running cost are high, and the measures to prevent pollution of the new exhaust equipment are of course required when improving the existing exhaust equipment. However, it could not be implemented easily, and it was the current situation that until now there was no other suitable solution.
本発明は上述の問題点にかんがみ、発明されたものであ
って、湿式洗浄処理塔に若干の改良を加えるだけで白煙
霧化したエアロゾルを効率的に除去でき、あらたに高性
能な除塵性能を有する装置を付加的に設置する必要のな
い排ガス浄化装置を提供することを目的としている。The present invention has been conceived in view of the above problems, and it is possible to efficiently remove aerosols that have been atomized as white smoke simply by adding a slight improvement to the wet cleaning treatment tower, and to newly provide high performance dust removal performance. It is an object of the present invention to provide an exhaust gas purifying device that does not require additional installation of the device.
上記目的を達成するために、本発明の要旨は、排ガスの
吸込口と吐出口を有する渦巻き筒体内に遠心回転羽根車
を回転可能に配設すると共に吸込口前方に洗浄液ノズル
を配設した排ガス浄化装置において、上記渦巻き筒体に
至る配管の途中に排ガスをあらかじめ加湿するための増
湿塔を配設したことを特徴とする。また、渦巻き筒体内
壁に複数のひれ状突起を形成することができる。In order to achieve the above-mentioned object, the gist of the present invention is an exhaust gas in which a centrifugal rotary impeller is rotatably arranged in a spiral cylinder having an inlet and an outlet for exhaust gas and a cleaning liquid nozzle is disposed in front of the inlet. In the purifying device, a humidifying tower for preliminarily humidifying the exhaust gas is arranged in the middle of the pipe leading to the spiral tube. Further, a plurality of fin-shaped projections can be formed on the inner wall of the spiral cylinder.
つぎに、本発明の実施例を図面により説明する。 Next, an embodiment of the present invention will be described with reference to the drawings.
第１図は本発明の最も望ましい場合の実施例を説明する
ための図であり、第２図は第１図の要部である渦巻き筒
体の内部構造を示す図、第３図は同じく渦巻き筒体の内
部構造を示す図、第４図は渦巻き筒体の変形例で二重内
壁となったものの内部構造を示す図である。FIG. 1 is a view for explaining the most preferable embodiment of the present invention, FIG. 2 is a view showing an internal structure of a spiral tube body which is a main part of FIG. 1, and FIG. FIG. 4 is a diagram showing the internal structure of the cylindrical body, and FIG. 4 is a diagram showing the internal structure of a modification of the spiral cylindrical body having a double inner wall.
これらの図面において、１は渦巻き筒体であって、これ
には排ガスの吸込口２と吐出口３が設けられている。ま
た、４は該渦巻き筒体１内に回転可能に配設された遠心
回転羽根車、５は前記吸込口２の前方に配設された洗浄
液ノズルであって、吸込口全断面に均一に噴霧されるよ
うに少なくとも１つ以上設けるものとする。また、６は
渦巻き筒体１に至る配管6aの途中に配設された、排ガス
をあらかじめ加湿しておくための増湿塔である。この増
湿塔としてはスプレー塔、充填塔、多孔板塔などいずれ
でもよく、飽和度が70％以上とれる装置であって、加湿
噴霧ノズルを付加した装置であることが望ましく、スプ
レー圧は1.5kg/cm2以上で噴霧すれば、より安定した白
煙霧化が行われる。さらに、７は前記渦巻き筒体の内壁
に形成され、同筒体内に導入される排ガスの流れ状態に
乱流を発生させるための複数のひれ状突起である。特
に、このひれ状突起は第４図のように二重内壁に形成さ
れたものが、より変化に富んだ乱流を発生させることが
できるので好ましい。８はエリミネーター、９・９′は
いずれも循環タンクであって、その中に水やアルカリ溶
液が充填されており、所定経路9a1、9a2に循環利用され
る。In these drawings, reference numeral 1 denotes a spiral cylinder, which is provided with an exhaust gas suction port 2 and a discharge port 3. Further, 4 is a centrifugal rotary impeller rotatably arranged in the spiral cylinder 1, 5 is a cleaning liquid nozzle arranged in front of the suction port 2, and sprays uniformly over the entire cross section of the suction port. As described above, at least one or more are provided. Reference numeral 6 denotes a humidification tower, which is arranged in the middle of the pipe 6a leading to the spiral tube body 1, for humidifying the exhaust gas in advance. The humidification tower may be any of a spray tower, a packed tower, a perforated plate tower, etc., and it is desirable that the saturation degree is 70% or more and that a humidification spray nozzle is added, and the spray pressure is 1.5 kg. A more stable white smoke atomization can be achieved by spraying at / cm 2 or more. Further, 7 is a plurality of fin-shaped projections formed on the inner wall of the spiral tube for generating turbulent flow in the flow state of the exhaust gas introduced into the same. In particular, it is preferable that the fin-shaped protrusions are formed on the double inner wall as shown in FIG. 4 because a turbulent flow rich in variation can be generated. Reference numeral 8 denotes an eliminator, and 9 and 9'denotes circulation tanks, which are filled with water or an alkaline solution and are circulated and used in predetermined paths 9a 1 and 9a 2 .
なお、前記回転羽根車は具体的には図示しないが、主
板、副板および羽根から構成され、羽根車中心から排ガ
スを吸い込み、遠心方向に吐き出す働きを有し、翼形状
としては放射状に延びる径向き羽根、後向き羽根、、前
向き羽根等を用いることができるが、特に、ガス中に付
着性の粉体や不純物が同伴する場合には羽根付着時のア
ンバランスを防止するために径向き羽根が望ましい。ま
た、前記渦巻き筒体は水平あるいは垂直のいずれの方向
でもかまわないが、気液の分離を容易にするため、渦巻
き筒体が垂直の場合は液流が停滞しないように吐出口は
横吐き出しか、下吐き出しが望ましい。さらに、洗浄液
の噴霧方法としては微細な洗浄液を作り出す手段であれ
ばどのような手段でも差支えなく、洗浄液のみを噴霧す
る一流体ノズル、圧縮空気と洗浄液を混合して出す二流
体ノズル、超音波微粒子ノズルなどを用いることができ
る。また、ひれ状突起の態様として種々のものが考えら
れるが、要するに排ガスに乱流を発生せしめる形状であ
ればどのような形状のものでもよく、たとえば、板状の
ものをはじめ、コルゲート状のもの、断面円形もしくは
楕円形あるいは角形状の部材（中実・中空を含む）、半
割パイプ状のもの、更に、ネット状のもの等、あるいは
これらの組合せのものが考えられるが、本発明で「ひれ
状突起」という用語はこれらのすべてを包含する意味で
使用している。Although not specifically shown, the rotary impeller is composed of a main plate, a sub plate, and a blade, has a function of sucking exhaust gas from the center of the impeller and discharging it in the centrifugal direction, and a diameter extending radially as a blade shape. Directional blades, rearward blades, forward blades, etc. can be used, but in particular when radial particles are attached to the gas in order to prevent imbalance when adhering powder or impurities, desirable. The spiral tube may be either horizontal or vertical, but in order to facilitate the separation of gas and liquid, if the spiral tube is vertical, the discharge port should be a side discharge so that the liquid flow does not become stagnant. Lower exhalation is desirable. Further, as a method of spraying the cleaning liquid, any means may be used as long as it is a means for producing a fine cleaning liquid, and a one-fluid nozzle for spraying only the cleaning liquid, a two-fluid nozzle for mixing compressed air and the cleaning liquid, and ultrasonic fine particles. A nozzle or the like can be used. There are various possible fin-shaped projections, but any shape may be used as long as it is a shape that causes turbulent flow in the exhaust gas. A member having a circular or elliptical or square cross section (including solid and hollow), a half pipe, a net, etc., or a combination thereof is conceivable. The term "fins" is used to mean all of these.
また、本発明による排ガス浄化性能を高めるためには発
生源の発生ガスならびに同伴物質の種類や濃度により各
構成要素での気液接触効果及び凝集分離効果を良好な状
態に維持することが肝要である。洗浄液の噴霧状態はで
きるだけ均等な粒径分布をもち、粒子径はサブミクロン
サイズの微細なほうが好ましい。Further, in order to enhance the exhaust gas purification performance according to the present invention, it is essential to maintain the gas-liquid contact effect and the coagulation separation effect in each constituent element in a good state depending on the type and concentration of the generated gas of the generation source and the accompanying substances. is there. The sprayed state of the cleaning liquid has a particle size distribution as uniform as possible, and the particle size is preferably submicron size.
渦巻き筒体内の遠心羽根車を通過するガス流速度は気液
接触、凝集分離効果を高めるためには速いほうが性能が
高く、羽根車の周速度は高いほど望ましく、特に50m/se
c以上が望ましい。また、羽根と渦巻き筒体内壁との間
隔は気液接触時間を長く保持するほうが望ましいので、
前記間隔は大きいほうが好ましい。The gas flow velocity passing through the centrifugal impeller in the spiral cylinder is higher in order to enhance gas-liquid contact and coagulation separation effects, and the higher the peripheral speed of the impeller, the more preferable it is, especially 50 m / se.
c or higher is desirable. Also, since it is desirable to maintain the gas-liquid contact time for a long time between the blade and the inner wall of the spiral cylinder,
It is preferable that the interval is large.
また、本装置に用いる洗浄水としては酸性ガスに対して
水あるいは苛性ソーダ、炭酸ソーダなどアルカリを用い
ることができる。アンモニア、アルカリミスト含有ガス
などのアルカリ性ガスに対しては硫酸、塩酸などを添加
した酸性液を用いることができる。悪臭成分を含むガス
に対しては次亜塩素酸を含む液等その他排ガス成分に反
応しやすい洗浄液を選択することができる。なお、本発
明による装置の各構成材料はプラスチック、金属、セラ
ミックその他の耐蝕性材料でつくる。特に、耐蝕性プラ
スチックとしては塩化ビニルやFRPその他の複合材料な
どを用いることができる。Further, as the washing water used in this apparatus, water or alkali such as caustic soda and sodium carbonate can be used against acidic gas. For an alkaline gas such as a gas containing ammonia or an alkali mist, an acidic liquid added with sulfuric acid, hydrochloric acid or the like can be used. For a gas containing a malodorous component, a cleaning liquid that easily reacts with other exhaust gas components such as a liquid containing hypochlorous acid can be selected. The constituent materials of the device according to the present invention are made of a corrosion-resistant material such as plastic, metal, ceramic and the like. In particular, vinyl chloride, FRP, or other composite materials can be used as the corrosion-resistant plastic.
しかして、本発明は上述のように構成したのでつぎのよ
うな作用がある。Since the present invention is configured as described above, it has the following effects.
酸性ガスを含有する排ガスは増湿塔による加湿効果で酸
性ガスの一部吸収および酸性ガスを核とした水分の凝集
作用により、ほぼ完全に安定した白煙霧化が行われる。
続いて、排ガス浄化装置の吸込口前段において、洗浄液
ノズルより噴霧された液滴と気液接触を行い、気液混合
された状態で遠心回転羽根車に吸い込まれていく。該遠
心回転羽根車は高速で回転しているので、前記ガスと液
滴の混合流体はきわめて激しい遠心回転力を付与されな
がら、円周方向に流れるとともに羽根車先端で微細な液
滴に分離し、流れ方向に分散される。その際、気液は筒
内できわめて激しい混合撹拌が行われるため、羽根車に
より微細化した液滴と排ガスの接触により、有害ガス成
分の吸収および白煙霧体の凝集成長がおこなわれ、前記
有害成分を吸収した液成分は渦巻き筒体内でガス成分と
の質量差により分別される。その場合、渦巻き筒体内壁
にひれ状突起が形成されていると円周流れにそってその
まま排ガスとともに排出される白煙霧体がひれ状突起に
よってガス成分の吸収および白煙霧体の凝集成分が促進
される。すなわち、渦巻き筒体内では高速度でガスが流
れているために、その後部で渦流を形成し、それが渦巻
き筒体内の乱流度をさらに増加せしめるとともに、円周
方向に流れる液滴と排ガス中の白煙霧体の接触機会が増
え、吸収及び凝集成分がさらに進行していき、白煙霧体
の液側への移行が著しく増長される。このようにして、
渦巻き筒体の吐出口よりガス成分は清浄なガスとなって
排出されていき、液成分は液流となって分離排出され
る。Exhaust gas containing acid gas is almost completely stable as white smoke atomization due to the partial absorption of acid gas due to the humidification effect of the humidification tower and the coagulation of moisture centered on acid gas.
Subsequently, in the preceding stage of the suction port of the exhaust gas purifying apparatus, the liquid droplets sprayed from the cleaning liquid nozzle are brought into gas-liquid contact with each other and are sucked into the centrifugal rotary impeller in a gas-liquid mixed state. Since the centrifugal rotating impeller rotates at high speed, the mixed fluid of the gas and the droplets flows in the circumferential direction and is separated into fine droplets at the tip of the impeller while being applied with an extremely vigorous centrifugal rotating force. , Distributed in the flow direction. At that time, since the gas-liquid undergoes extremely vigorous mixing and stirring in the cylinder, the contact between the droplets atomized by the impeller and the exhaust gas causes the absorption of harmful gas components and the aggregation and growth of the white fumes, which causes The liquid component that has absorbed the component is separated by the mass difference from the gas component in the spiral cylinder. In that case, if fin-shaped projections are formed on the inner wall of the spiral cylinder, the white smoke discharged along with the circumferential flow as it is along with the exhaust gas promotes absorption of gas components and coagulation of white smoke by the fin-shaped projections. To be done. That is, since the gas flows at a high speed in the spiral cylinder, a vortex is formed at the rear part of the spiral cylinder, which further increases the turbulence in the spiral cylinder, and the droplets and the exhaust gas flowing in the circumferential direction. The chance of contact of the white smoke body is increased, the absorption and coagulation components are further advanced, and the transfer of the white smoke body to the liquid side is significantly increased. In this way
The gas component is discharged as a clean gas from the discharge port of the spiral tube, and the liquid component is separated and discharged as a liquid flow.
以上のように構成される本発明によれば、つぎのような
効果を奏する。According to the present invention configured as described above, the following effects can be obtained.
すなわち、本発明の排ガス浄化装置は、従来の湿式洗浄
装置では完全に除去不可能であった白煙霧化する酸性成
分を含む排ガスを高い除去効率で除き、排突で白煙を目
立たなくすることができるので、高価な電気集塵機を付
加する必要もないので公害防止対策費も少なくてすみ、
きわめて経済効果も大きい。That is, the exhaust gas purifying apparatus of the present invention removes exhaust gas containing an acidic component that atomizes white smoke with high removal efficiency, which could not be completely removed by a conventional wet cleaning apparatus, and makes white smoke inconspicuous by an exhaust. Since there is no need to add an expensive electrostatic precipitator, the cost of pollution prevention measures is low,
It has a great economic effect.
遠心回転羽根車の吸込口前段の手前の増湿塔は、排ガス
を加湿することでほぼ完全に白煙霧化するために遠心回
転羽根車内での洗浄液滴と排ガス中の白煙霧体との接触
効果をたやすくさせる効果がある。The humidification tower in front of the suction port of the centrifugal rotary impeller almost completely atomizes the white gas by humidifying the exhaust gas, so the contact effect between the cleaning liquid droplets in the centrifugal rotary impeller and the white smoke in the exhaust gas It has the effect of making it easier.
また、入口濃度が以上に高い場合でも、前処理塔として
の働きも併用できる。Further, even when the inlet concentration is higher than that, the function as a pretreatment tower can be used together.
さらに、渦巻き筒体内壁にひれ状突起を設けることによ
って、渦流を形成せしめ、液滴と白煙霧体がそこでも接
触凝集され、渦巻き筒体内で、ほぼ完全に白煙霧体は液
側に移り、気液が分離される。Furthermore, by providing fin-shaped projections on the inner wall of the spiral cylinder, a swirl flow is formed, and the droplets and the white smoke body are also contact-agglomerated there, and the white smoke body is almost completely transferred to the liquid side in the spiral cylinder body. Gas-liquid is separated.
また、吸込口に多数の微孔を有する部材を併設すれば、
相乗効果をもたらし、高度の処理が可能である。Moreover, if a member having a large number of fine holes is provided side by side with the suction port,
It produces a synergistic effect and allows a high degree of processing.
また、遠心回転羽根車は液により常時洗浄されているの
でガス中に粘着製の粉塵があても洗い流され、粉体付着
によるアンバランスも防止でき、流体輸送能力も維持で
き、かつ保守管理も容易である。In addition, the centrifugal rotary impeller is always washed with liquid, so even if there is adhesive dust in the gas, it can be washed away, imbalance due to powder adhesion can be prevented, fluid transport capacity can be maintained, and maintenance management is easy. Is.
後続には筒体内で分離しきれない液滴をとるエリミネー
ターを設置することにより、より排ガス洗浄効果を高め
ることができる。The exhaust gas cleaning effect can be further enhanced by installing an eliminator that follows to remove the liquid droplets that cannot be separated in the cylinder.
このように、本発明装置では従来の充填塔その他の湿式
洗浄装置に比較して排ガス中の有害ガス成分を高能率に
除去できるだけではなく、同伴するサブミクロンサイズ
のエアロゾル状の白煙霧体も有効に除去できる。また、
硝酸、塩酸、硫酸などの蒸気発生ガスの他、微粒子のエ
アロゾルを生じ、通常、除去困難とされている過塩素酸
の煮沸時の発生ガスに対しても本発明装置は有効に働
き、各種エアロゾルに対しても洗浄化効果を期待でき
る。さらに、排ガスに同伴する粉塵に対しても除去効果
を高く、従来の湿式洗浄処理塔ではほとんど素通りして
いたサブミクロンサイズのシリカ、塩化アンモニウム、
硝酸アンモニウムなどの固体エアロゾルに対しても除去
効果を有している。As described above, in the device of the present invention, not only the harmful gas components in the exhaust gas can be removed with high efficiency as compared with the conventional packed tower and other wet cleaning devices, but also the entrained submicron-sized aerosol-like white fumes are effective. Can be removed. Also,
In addition to vapor generating gases such as nitric acid, hydrochloric acid, and sulfuric acid, fine particle aerosols are generated, and the device of the present invention also works effectively against gas generated during boiling of perchloric acid, which is usually difficult to remove. Also, a cleaning effect can be expected. In addition, it has a high effect of removing dust that accompanies exhaust gas, and the submicron-sized silica, ammonium chloride, which has almost passed through in the conventional wet cleaning tower,
It also has a removing effect on solid aerosols such as ammonium nitrate.
このように、本発明により提供される装置によれば、半
導体製造、金属酸洗、メッキなどの工程のように各種有
害ガスのほかに液体エアロゾルや固体エアロゾルが同伴
するケースが多い場合の排気洗浄装置として従来の湿式
洗浄処理塔に比べ、浄化機能面ですぐれており、高性能
の電気集塵機の付加も不要であるので、経済的メリット
も大きい。As described above, according to the apparatus provided by the present invention, exhaust cleaning when there are many cases in which liquid aerosol or solid aerosol is entrained in addition to various harmful gases such as semiconductor manufacturing, metal pickling, and plating processes. Compared with the conventional wet-cleaning treatment tower as a device, it is superior in terms of purification function and does not require the addition of a high-performance electrostatic precipitator, so it has great economic merit.
（実験） 実験例１ 増湿塔と内壁にひれ状突起を配設した渦巻き筒体を用い
た上記排ガス浄化装置の吐出側にプラスチック製充填材
を充填したエリミネーターを取り付けた装置を用いて、
63％濃硝酸溶液を120℃に加熱し、最も微細な白煙霧を
生じやすい苛酷な沸騰状態で本発明装置に吸引し、排ガ
ス除去（特に、白煙霧分）性能を測定した。(Experiment) Experimental Example 1 Using an apparatus equipped with an eliminator filled with a plastic filler on the discharge side of the above exhaust gas purifying apparatus using a humidification tower and a spiral tube having fin-shaped projections on its inner wall,
A 63% concentrated nitric acid solution was heated to 120 ° C. and sucked into the apparatus of the present invention in a severe boiling state where the finest white fumes are likely to be generated, and the exhaust gas removal (particularly white fumes) performance was measured.
条件としては、処理ガス量・・10m3/min、洗浄水量・・
20/min、増湿塔条件・・充填物は塩化ビニル製マット
0.4m高さ、スプレー量200/min・m3、飽和度・・94
％、また、渦巻き筒体に形成したひれ状突起の条件はプ
レートを14枚取り付けたものとした。The conditions, the process gas amount ... 10 m 3 / min, amount of wash water ..
20 / min, Humidification tower conditions ... Filling material is vinyl chloride mat
0.4m height, spray rate 200 / min ・ m 3 , saturation degree ... 94
%, And the condition of the fin-like protrusions formed on the spiral cylinder was that 14 plates were attached.
上記条件で排ガスの除去性能を測定した結果、入口濃度
450ppmであったのが、出口濃度では0.5ppmとなってお
り、除去率は99.9％ときわめて高効率であった。また、
増湿塔出口透明ダクト内では全く不透明になるほど白煙
霧化が行われていたが、エリミネーター出口では白煙は
全く見えなかった。As a result of measuring the exhaust gas removal performance under the above conditions, the inlet concentration
Although it was 450 ppm, it was 0.5 ppm at the outlet concentration, and the removal rate was 99.9%, which was extremely high efficiency. Also,
White smoke was being atomized to such an extent that it became completely opaque inside the transparent duct at the outlet of the humidification tower, but no white smoke was visible at the outlet of the eliminator.
実験例２ 実験例１の場合と基本的に同様の条件で、異なる点は渦
巻き筒体内壁にひれ状突起を形成しないものを使用した
場合である。（増湿塔は使用した） この場合には、入口濃度380ppmであったのが、出口濃度
6.2ppmとなり、除去率は98.4％であった。また、増湿塔
出口透明ダクト内では全く不透明になるほど白煙霧化が
行われていたが、エリミネーター出口ではわずかに白煙
が目視できる程度であった。Experimental Example 2 Basically, the same conditions as in Experimental Example 1 were used, but the difference was in the case where a spiral cylindrical inner wall without fins was used. In this case, the inlet concentration was 380ppm, but the outlet concentration was
The amount was 6.2 ppm, and the removal rate was 98.4%. Also, in the transparent duct at the outlet of the humidification tower, white smoke was atomized so that it became completely opaque, but at the outlet of the eliminator, white smoke was slightly visible.
比較実験例 実験例１の条件から増湿塔をなくし、かつひれ状突起を
形成していない渦巻き円筒体を使用し、洗浄水を直接羽
根車に噴霧する状態で硝酸の除去性能を測定した場合で
ある。Comparative Experimental Example When the humidification tower is removed from the conditions of Experimental Example 1 and a spiral cylinder having no fin-like projections is used, the removal performance of nitric acid is measured in the state where the washing water is directly sprayed on the impeller. Is.
入口濃度が280ppmであったのが、出口濃度では34ppmに
しかならず、除去率は87.8％でしかなかった。なお、エ
リミネーター出口での白煙は顕著であり、周囲に漂う状
況であった。The inlet concentration was 280 ppm, but the outlet concentration was only 34 ppm, and the removal rate was only 87.8%. The white smoke at the exit of the eliminator was remarkable, and it was in the condition of floating around.
考察するに、渦巻き筒体内で白煙霧化と浄化を同時に行
うことになり、白煙霧化させるための気液接触時間が不
充分となり、浄化能力に限界があるものと考えられる。In consideration, it is considered that the white smoke atomization and the purification are performed at the same time in the spiral cylinder, and the gas-liquid contact time for atomizing the white smoke becomes insufficient, and the purification capacity is considered to be limited.
第１図は本発明の最も好ましい場合の装置を説明するた
めの図、第２図は第１図の要部である渦巻き筒体の内部
構造を示す図、第３図は同じく渦巻き筒体の内部構造を
示す図、第４図は渦巻き筒体の変形例で二重内壁となっ
たものの内部構造を示す図である。 １……渦巻き筒体、２……吸込口、３……吐出口、４…
…遠心回転羽根車、５……洗浄液ノズル、６……増湿
塔、6a……配管、７……ひれ状突起、８……エリミネー
ター、９・９′……循環タンク、9a1・9a2……経路。FIG. 1 is a view for explaining an apparatus in the most preferable case of the present invention, FIG. 2 is a view showing an internal structure of a spiral tube body which is a main part of FIG. 1, and FIG. FIG. 4 is a view showing the internal structure, and FIG. 4 is a view showing the internal structure of a modification of the spiral tube body having a double inner wall. 1 ... Swirl cylinder, 2 ... Suction port, 3 ... Discharge port, 4 ...
... centrifugal impellers, 5 ... liquid nozzle, 6 .... increase tower, 6a ... pipe, 7 ... fin-like projection, 8 ... Eliminator, 9.9 '... circulation tank, 9a 1, 9a 2 ...... Route.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−222126（ＪＰ，Ａ) 特公 昭42−2752（ＪＰ，Ｂ１) 実公 昭41−15887（ＪＰ，Ｙ１) ─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP 60-222126 (JP, A) JP 42-2752 (JP, B1) JP 41-15887 (JP, Y1)
Claims (2)
体内に遠心回転羽根車を回転可能に配設すると共に吸込
口前方に洗浄液ノズルを配設した排ガス浄化装置におい
て、上記渦巻き筒体に至る配管の途中に排ガスをあらか
じめ加湿するための増湿塔を配設したことを特徴とする
排ガス浄化装置。1. An exhaust gas purifying apparatus in which a centrifugal impeller is rotatably disposed in a spiral cylinder having an exhaust gas inlet and outlet, and a cleaning liquid nozzle is disposed in front of the inlet, wherein the spiral tubular member is provided. An exhaust gas purifying device, characterized in that a humidification tower for humidifying exhaust gas in advance is arranged in the middle of the piping.
されたことを特徴とする特許請求の範囲第１項記載の排
ガス浄化装置。2. The exhaust gas purifying apparatus according to claim 1, wherein a plurality of fin-shaped projections are formed on the inner wall of the spiral cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61054331A JPH0687931B2 (en) | 1986-03-11 | 1986-03-11 | Exhaust gas purification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61054331A JPH0687931B2 (en) | 1986-03-11 | 1986-03-11 | Exhaust gas purification device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62210029A JPS62210029A (en) | 1987-09-16 |
| JPH0687931B2 true JPH0687931B2 (en) | 1994-11-09 |
Family
ID=12967611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61054331A Expired - Lifetime JPH0687931B2 (en) | 1986-03-11 | 1986-03-11 | Exhaust gas purification device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0687931B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101443345B1 (en) * | 2012-10-30 | 2014-09-19 | 현대제철 주식회사 | apparatus for mixing exhaust gas |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4654510B2 (en) * | 2000-12-07 | 2011-03-23 | 栗田工業株式会社 | Deodorizing device and deodorizing method using the deodorizing device |
| JP2009112905A (en) * | 2007-11-02 | 2009-05-28 | Seikow Chemical Engineering & Machinery Ltd | Exhaust treatment device |
| JP6638451B2 (en) * | 2016-02-15 | 2020-01-29 | 住友電気工業株式会社 | Exhaust gas treatment method for quartz glass manufacturing equipment |
| CN107158819B (en) * | 2017-06-22 | 2019-11-08 | 西安交通大学 | A kind of automatically cleaning fume dust remover and method |
| CN107185335B (en) * | 2017-06-22 | 2019-11-08 | 西安交通大学 | A kind of self-loopa fume dust remover and method |
| CN107433099A (en) * | 2017-10-05 | 2017-12-05 | 申青林 | A kind of wet type impeller deduster |
| WO2023127144A1 (en) * | 2021-12-28 | 2023-07-06 | カンケンテクノ株式会社 | Exhaust gas purification device |
| CN115463532A (en) * | 2022-07-25 | 2022-12-13 | 芜湖中铁轨道装备有限公司 | A workshop environmental protection system for getting rid of casting waste gas |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4115887Y1 (en) * | 1964-06-13 | 1966-07-25 | ||
| JPS60222126A (en) * | 1984-04-19 | 1985-11-06 | Seiko Kakoki Kk | Purifying method of waste gas and purifying apparatus of waste gas used for it |
-
1986
- 1986-03-11 JP JP61054331A patent/JPH0687931B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101443345B1 (en) * | 2012-10-30 | 2014-09-19 | 현대제철 주식회사 | apparatus for mixing exhaust gas |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62210029A (en) | 1987-09-16 |
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