JPH0687602B2 - Magnetic levitation type transportation equipment - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a levitation electromagnet that attracts a levitation magnetic body that is provided on a moving body along a longitudinal direction of a guide rail on which the moving body travels. And a stopping magnetic body for stopping and holding the moving body on the guide rail, and a magnetic levitation in which the stopping electromagnet attracting to the stopping magnetic body is provided on the guide rail. Type of transportation equipment.

[Conventional technology]

In this type of magnetic levitation type transportation facility, for example,
When carrying out a load transfer operation with a moving body at a station, it is necessary to stop and hold the moving body so that it does not move from a predetermined stop position. It is considered that the magnetic material for stopping is provided on the side to attract and hold the magnetic body for stopping on the side of the moving body. However, if the moving body is stopped and held while levitating, there is a disadvantage that a position shift easily occurs.

Therefore, conventionally, when stopping the moving body, it has been considered to stop the energization of the levitation electromagnet to land the moving body on the guide rail (Japanese Patent Laid-Open No. 62-166706). reference).

[Problems to be Solved by the Invention]

However, stopping the levitation of the moving body has an advantage that the power consumption of the levitation electromagnet during the stop can be suppressed, but dust may be generated due to the contact between the guide rail and the moving body.

Further, a means for cutting off the power supply to the levitation electromagnet is required for the moving body that is not in contact with the guide rail, which has the disadvantage of complicating the device configuration.

By the way, in a clean room of a semiconductor manufacturing facility or the like, even a slight amount of dust generated from a transport facility poses a problem, and therefore it is desired to stop and hold the moving body as much as possible.

However, in the levitation type, it is difficult to supply power to the moving body from the outside, so in general, a battery that supplies operating power to the levitation electromagnet is supplied to the moving body. It will be installed.

Therefore, when the stopping electromagnet is provided so as to attract the stopping magnetic body in the direction in which the moving body is landed as in the conventional case, the power consumption of the levitation electromagnet during stopping is higher than that during moving, This has the disadvantage of shortening the time during which the moving body can be levitated.

The present invention has been made in view of the above circumstances, and a first object thereof is to enable a moving body to be stopped while being levitated while suppressing power consumption of a levitation electromagnet. A second object is to allow the displacement of the stop position to be suppressed as much as possible when the movable body is stopped while floating.

[Means for Solving the Problems]

A magnetic levitation type transportation facility according to the present invention is characterized in that a moving body is provided with a levitation electromagnet that attracts a moving magnetic body provided along a longitudinal direction of a guide rail on which the moving body travels. A stop magnetic body for stopping and holding on the guide rail is provided, and a stop electromagnet that attracts to the stop magnetic body is provided on the guide rail. It is as follows.

A first characteristic configuration is that the stop electromagnet is provided so as to attract the stop magnetic body toward a direction in which the moving body is levitated.

A second characteristic configuration is that the levitation electromagnets are arranged in the lateral width direction of the moving body and have different magnetic poles so as to form a magnetic loop in the lateral width direction of the guide rail with respect to the levitation magnetic body. The stopping electromagnet is configured to include a pair of magnetic action portions that generate a magnetic loop, and the stopping electromagnet forms a magnetic loop in the front-rear direction of the moving body with respect to the stopping magnetic body. It is configured to include a pair of magnetic action portions that are arranged in the longitudinal direction and generate different magnetic poles.

[Action]

In the first characteristic configuration, the attraction force of the stopping electromagnet acts so as to act in the direction to levitate the moving body. Therefore, while the moving body is stopped, the moving body is stopped by both the stopping electromagnet and the levitation electromagnet. Will be raised.

Therefore, the load on the levitation electromagnet is reduced while the moving body is stopped, and the power consumption of the levitation electromagnet can be suppressed during the stop.

By the way, if the electromagnet is provided with a pair of magnetic action portions that generate different magnetic poles so as to form a magnetic loop with respect to a magnetic body that attracts the magnetic substance, the magnetic loop generated from the electromagnet will be the shortest. It is known that a force that pulls the magnetic body toward the center of the pair of magnetic action portions is generated.

That is, the position of the moving body with respect to the guide rail can be regulated by using the force of pulling the magnetic body toward the center of the pair of magnetic action portions.

Therefore, in the second characteristic configuration, each of the levitation electromagnet and the stop electromagnet is provided with a pair of magnetic action portions that generate mutually different magnetic poles, and the levitation electromagnet regulates the position of the moving body in the lateral width direction. In order to generate a magnetic loop from the levitation electromagnet in the lateral direction of the moving body and to restrict the position of the moving body in the front-rear direction with the stopping electromagnet, the magnetic loop from the stopping electromagnet is moved forward and backward of the moving body. When the moving body is stopped, the positional deviations in the left, right, front, and rear directions are suppressed by both the levitation electromagnet and the stopping electromagnet.

〔The invention's effect〕

In the first characteristic configuration, the attraction force of the stopping electromagnet can also be used as the levitation force during the stop, so that the power consumption by the levitation electromagnet during the stop can be suppressed, so that the time during which the moving body can be levitated is reduced to the conventional one. Came to be able to be longer than.

Further, in the second characteristic configuration, the directions of the magnetic loops generated from the levitation electromagnet and the stop electromagnet are reasonably combined, so that even if the moving body is levitated, It became possible to suppress the deviation.

〔Example〕

 Embodiments of the present invention will be described below with reference to the drawings.

As shown in FIG. 4, a guide rail (B) on which the moving body (A) floats is provided along the moving path of the moving body (A) for article transportation.

As will be described in detail later, the moving body (A) is magnetically levitated, and is driven by a linear motor to move between the load transfer stations (ST).

Explaining the guide rail (B), as shown in FIGS. 1 to 4, a non-magnetic material such as aluminum is formed by injection molding or the like into a rectangular tube shape whose upper end surface is opened along the longitudinal direction. The pair of left and right levitation magnetic bodies (3) on which the levitation electromagnet (Ma) of the moving body (A) attracts from below along the longitudinal direction of the opening of the main body (2) A state in which the main body (1) of the moving body (A) is accommodated in the lower portion of the rail, being attached to the rear surface of the upper end of the main body (2) of the guide rail (B) while being spaced apart from each other in the lateral width direction. It is configured to be moved by. A primary coil (4) of the linear motor is attached to the inner bottom of the guide rail (B).

However, the primary coil (4) is connected to the station (S
In order to accelerate and decelerate the moving body (A) in T) and to accelerate between the stations (ST), a plurality of moving bodies (A) are spaced at intervals along the longitudinal direction of the guide rail (B). Will be provided.

Also, at the station (ST), the moving body (A)
A stop electromagnet (Mb) attached to the moving body (A) for attracting the stop magnetic body (5) from above in order to stop and hold the same is provided at a position lateral to the levitation magnetic body (3). It is provided in a position.

That is, the stopping electromagnet (Mb) is the moving body (A).
Is provided so as to attract the stopping magnetic body (5) toward the direction in which the magnetic field is levitated.

The stop magnetic body (5) is provided at each of the front, rear, left and right ends of the moving body (A), and the stop electromagnet (Mb) is provided on the stop magnetic body (5). On the other hand, a total of four pieces are provided in accordance with the mounting positions of the stopping magnetic bodies (5) so that they act separately.

The moving body (A) will be described with reference to FIGS.
As shown in the figure, a flat plate-shaped loading section (6) is provided on the upper end thereof.
And the levitation electromagnet (Ma) attracts the levitation magnetic body (3) from the lower side to the upper side so that one is provided on each of the front, rear, left and right sides of the moving body (A). The central portion in the lateral width direction is provided so that the secondary conductor (D) that is provided and acts on the primary coil (4) is positioned horizontally at the lower end of the moving body (A). The main body (1) of (A) is attached to a column (8) that is suspended from the center in the widthwise direction.

Although not described in detail, the levitation electromagnet (Ma) is set so that the distance between the levitation magnetic body (3) and the upper end of the levitation electromagnet (Ma) is maintained within a set range. The energizing power is controlled based on the information of the gap sensor (not shown) that detects the distance between the floating magnetic body (3) and the lower surface thereof. On the other hand, the stopping electromagnet (Mb) is energized only while the moving body (A) is stopped and held in the station (ST).

However, each of the levitation electromagnet (Ma) and the stop electromagnet (Mb) is configured to include a pair of magnetic action portions that generate different magnetic poles.

If the description of the levitation electromagnet (Ma) is added, the fifth
As shown in the figure, it is configured to include two electromagnets (M ₁ ) and (M ₂ ) arranged side by side in the lateral width direction of the moving body (A), and these two electromagnets (M ₁ ), (M ₂ ) generate magnetism with different magnetic poles. In other words, one of the electromagnets (M ₁ ) produces S-pole magnetism,
Further, by causing the other electromagnet (M ₂ ) to generate magnetism of the N pole, the magnetism generated from the both electromagnets (M ₁ ) and (M ₂ ) is changed to the levitation magnetic body (3). A magnetic loop extending in the lateral width direction of the moving body (A) is formed between and.

As a result, the position of the levitation magnetic body (3) in the lateral width direction of the moving body (A) is located between the _two electromagnets (M ₁ ) and (M ₂ ) in the levitation electromagnet (Ma). A suction force that regulates the position is generated. Further, since two levitation electromagnets (Ma) are provided in the lateral width direction of the moving body (A), even if the moving body (A) is stopped, the guide rail (B) The horizontal position of the moving body (A) with respect to (4) can be held in the middle of the left and right floating magnetic bodies (3).

Similarly, the stopping electromagnet (Mb) is also provided with two electromagnets (M ₃ ) and (M ₄ ) that generate different magnetic poles side by side in the front-back direction of the moving body (A). The position of the stopping magnetic body (5) of the moving body (A) in the front-rear direction is restricted to the middle of the two electromagnets (M ₃ ) and (M ₄ ) (see FIG. 2). .

That is, the two electromagnets (M ₁ and M ₂ ) and (M ₃ and M ₄ )
Will correspond to a pair of magnetic action parts that generate different magnetic poles. When the moving body (A) is stopped at the station (ST), the levitation electromagnet (Ma) and the stop electromagnet (Mb) are stopped.
By levitating the moving body (A) with both
The load on the levitation electromagnet (Ma) during stoppage is reduced so that the power consumption can be suppressed as much as possible, and the position in the width direction is restricted by the levitation electromagnet (Ma), and the front-back direction is set. By restricting the position at 2 by the stopping electromagnet (Mb), the deviation from the set proper stop position can be suppressed as much as possible while the moving body (A) is kept floating.

In order to maximize the use of the position regulating force, the lateral width of the levitation magnetic body (3) is made substantially equal to the lateral width of the levitation electromagnet (Ma), and the stopping magnetic body ( The width in the front-rear direction of 5) is made to approximately match the width in the front-rear direction of the stop electromagnet (Mb).

By the way, in a linear motor, by arranging a non-magnetic conductor in a magnetic loop generated from the primary coil (4), an eddy current is generated in the non-magnetic conductor to give a thrust force. A so-called composite type secondary conductor in which a non-magnetic conductor such as aluminum and a magnetic substance such as iron forming a magnetic loop between the primary Cory (4) are bonded together is used as the magnetic substance. It suffices that the primary coil (4) is only a portion that acts on the non-magnetic conductor, and does not need to be integrated with the non-magnetic conductor.

Therefore, the secondary conductor (D) is formed only by a non-magnetic conductor (7) such as aluminum, and the primary coil (4) is formed.
The magnetic material portion that acts on is provided only on the guide rail (B) side and at the installation location of the primary coil (4).

In addition, as shown in FIG. 1, an iron plate (9) acting as a magnetic material portion of the secondary conductor (D) is provided with the primary coil (4) provided on the guide rail (B) side.
It is attached to the upper part of the primary coil (4) so as to be positioned with respect to the moving body (A),
Attach only non-magnetic conductor (7) such as aluminum,
Thrust is applied while the non-magnetic conductor (7) passes through the space formed between the upper side surface of the primary coil (3) and the lower side surface of the iron plate (9). .

Therefore, since the moving body (A) is provided only with the non-magnetic conductor (7) of the secondary conductor (D), the moving body (A)
The weight can be reduced.

However, since the iron plate (9) acting as the magnetic body is provided with an interval through which the columns (8) of the non-magnetic conductor (7) as the secondary conductor (D) pass, the iron plate (9) of the guide rail (B) is provided. It is divided into two parts on the left and right at the center part in the width direction. The thrust applied to the secondary conductor (D) increases as the magnetic force generated from the primary coil (4) increases, and the primary coil has a space between (4) and the iron plate (9). The smaller it is, the larger it is, but the primary coil (4)
The position of the non-magnetic conductor (7) between the iron plate (9) and the iron plate (9) is irrelevant.

In FIG. 1, (10A) is a detection function for the non-slit forming portion of the encoder plate (11) having a large number of slit holes attached to the moving body (A), and detects the moving body (A). ) Is located on the primary coil (4), the seating detection sensor (10B) detects the slit forming portion of the encoder plate (11) and detects the moving body (A). ) Two-phase sensor that detects the moving direction of
(12) is a speed detection sensor that acts on a speed detection plate (13) attached to the moving body (A) to detect the speed of the moving body (A), and (14) is the levitation electromagnet (Ma). ) Is a guide roller for keeping the vertical gap between the levitation magnetic body (3) and the levitation electromagnet (Ma) constant when the energization of the moving body (A) is stopped. One is provided for each. Further, (15) keeps the distance in the lateral direction with respect to the guide rail (B) smaller than a set value so that the moving body (A) and the inner lateral surface of the levitation magnetic body (3) do not collide. It is a guide roller for making it.

Further, in FIG. 2, (16) is a battery for supplying operating power to the levitation electromagnet (Ma).

By the way, although not described in detail, the detection information of the seat detection sensor (10A) and the two-phase sensor (10B) is
The moving body (A) is used as information for controlling energization to the primary coil (4) for stopping at the station (ST) or for accelerating or decelerating at the installation location of the primary coil (4). Therefore, the detection information of the speed detecting sensor (12) is used to control the stop position of the moving body (A), and to control the speed of the moving body (A) during deceleration stop and acceleration start. It will be used as information for controlling the energization of the primary coil 4.

[Another embodiment]

In the above embodiment, each of the levitation electromagnet (Ma) and the stopping electromagnet (Mb) is provided with a pair of magnetic action portions that generate different magnetic poles, so that a pair of electromagnets (M ₁ and M ₁₎ that generate different magnetic poles are provided. Although the case where M ₂ ) and (M ₃ and M ₄ ) are provided is illustrated, for example, as shown in FIG. 6, one electromagnet is mounted sideways and its magnetic core (M) is attached.
May be bent upward at both ends to generate different magnetic poles at both ends of the magnetic core (M).
That is, the magnetic core (M) is bent upward at both ends, and both ends of the magnetic core (M) function as a pair of magnetic action parts.

In addition, various changes can be made to the specific configuration of each unit necessary for carrying out the present invention.

It should be noted that reference numerals are added to the claims for convenience of comparison with the drawings, but the present invention is not limited to the structures of the accompanying drawings by the entry.

[Brief description of drawings]

The drawings show an embodiment of a magnetic levitation type transportation facility according to the present invention. Fig. 1 is a front view of a moving body and a guide rail, Figs. 2 and 3 are the same side cutaway views, and Fig. 4 is a guide rail. Is a schematic plan view of the layout of FIG. 5, FIG. 5 is an explanatory view of a magnetic loop formed between an electromagnet and a magnetic body, and FIG. 6 is a side view showing a structure of another embodiment of a levitation electromagnet and a stopping electromagnet. is there. (A) ... moving body, (B) ... guide rail, ((Ma) ...
… Elevation electromagnet, (Mb) …… Stopping electromagnet, (M ₁ ),
(M ₂ ) ... a pair of magnetic action parts of the levitation electromagnet, (M ₃ ),
(M ₄ ) ... a pair of magnetic action parts of the stopping electromagnet, (3) ...
... Magnetic material for levitating, (5) ... Magnetic material for stopping.

Claims (2)

[Claims] 1. A levitation electromagnet (Ma) for attracting to a levitation magnetic body (3) provided on a moving body (A) along a longitudinal direction of a guide rail (B) on which the moving body travels. A stop magnetic body (5) for stopping and holding the moving body (A) on the guide rail (B), and the guide rail (B) and the stop magnetic body (5). A magnetic levitation type transportation facility provided with a stopping electromagnet (Mb) that attracts the moving body (A), wherein the stopping electromagnet (Mb) is for stopping in the direction in which the moving body (A) is levitated. A magnetic levitation type transportation facility provided so as to attract the magnetic body (5). 2. The magnetic levitation type conveyance facility according to claim 1, wherein the levitation electromagnet (Ma) is arranged in a lateral direction of the guide rail (B) with respect to the levitation magnetic body (3). A pair of magnetic action parts (M ₁ ) and (M ₂ ) arranged in the lateral direction of the moving body (A) and generating different magnetic poles so as to form a magnetic loop toward The stop electromagnets (Mb) are arranged in the longitudinal direction of the guide rail (B) so as to form a magnetic loop with respect to the stop magnetic body (5) in the front-back direction of the moving body (A). In addition, a magnetic levitation type transfer facility configured to include a pair of magnetic action parts (M ₃ ) and (M ₄ ) that generate different magnetic poles.