JPH0686755B2 - Ceiling frame fittings for air filter installation - Google Patents

Ceiling frame fittings for air filter installation

Info

Publication number
JPH0686755B2
JPH0686755B2 JP62314467A JP31446787A JPH0686755B2 JP H0686755 B2 JPH0686755 B2 JP H0686755B2 JP 62314467 A JP62314467 A JP 62314467A JP 31446787 A JP31446787 A JP 31446787A JP H0686755 B2 JPH0686755 B2 JP H0686755B2
Authority
JP
Japan
Prior art keywords
joint
screw hole
air filter
ceiling frame
suspended
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62314467A
Other languages
Japanese (ja)
Other versions
JPH01154937A (en
Inventor
良治 目徳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitta Corp
Original Assignee
Nitta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitta Corp filed Critical Nitta Corp
Priority to JP62314467A priority Critical patent/JPH0686755B2/en
Publication of JPH01154937A publication Critical patent/JPH01154937A/en
Publication of JPH0686755B2 publication Critical patent/JPH0686755B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、クリーンルームにおいて、エアフィルタを
設置するために天井に吊り下げられた格子状の天井フレ
ームのチャンネル材を相互に接続するために用いる継手
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is used in a clean room to connect channel members of a grid-like ceiling frame suspended on a ceiling for installing an air filter to each other. It concerns a joint.

〔従来の技術〕[Conventional technology]

半導体工業、電子工業、精密機械工業、製薬工業、病院
手術室等で使用されるクリーンルームの天井には、格子
状に形成された天井フレーム(53)が吊り下げられてお
り、その上にエアフィルタ(57)が設置されている。さ
らに、エアフィルタ(57)と天井フレーム(53)の接続
部分には、シール材(60)が充填され、空気が漏れない
ようになっている。
A ceiling frame (53) formed in a lattice shape is hung on the ceiling of a clean room used in the semiconductor industry, electronics industry, precision machinery industry, pharmaceutical industry, hospital operating room, etc., and an air filter is mounted on it. (57) is installed. Further, the connecting portion between the air filter (57) and the ceiling frame (53) is filled with a sealing material (60) to prevent air from leaking.

第4図及び第5図は、上記天井フレーム(53)の継手
(52)部分を示しており、継手(52)は十字形に溝を形
成した本体部(52a)と、本体部(52a)の上面に立設さ
れたボス(54)からなり、本体部(52a)の溝にチャン
ネル材(51)を接続するようにしている。
4 and 5 show the joint (52) portion of the ceiling frame (53), and the joint (52) includes a main body (52a) having a cross-shaped groove, and a main body (52a). The channel member (51) is connected to the groove of the main body (52a).

ボス(54)にはネジ穴(55)が形成されており、天井か
ら吊り下げられた吊りボルト(56)を螺着することによ
り天井フレーム(53)を天井に吊り下げできるようにな
っている。
A screw hole (55) is formed in the boss (54), and the ceiling frame (53) can be suspended on the ceiling by screwing a suspension bolt (56) suspended from the ceiling. .

そして、照明器具、間仕切り、垂れ壁、ウエハー搬送装
置などを天井から吊り下げる必要がある場合には、天井
フレーム(53)のチャンネル材(51)に吊り下げられて
いた。
Then, when it is necessary to suspend the lighting fixture, the partition, the hanging wall, the wafer transfer device, etc. from the ceiling, they are suspended from the channel material (51) of the ceiling frame (53).

尚、図中符号59はエアフィルタ(57)のフィルタ枠(5
8)に設けられたスカート部であり、チャンネル材(5
1)に充填されたシール材(60)の中に挿入されるよう
になっている。
In addition, reference numeral 59 in the figure denotes a filter frame (5
8) is the skirt provided on the channel material (5
It is designed to be inserted into the seal material (60) filled in 1).

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

チャンネル材(51)は、照明器具などの軽いものであれ
ば吊り下げることができるが、間仕切り、垂れ壁、特に
ウエハー搬送装置などの重量の重いものを吊り下げると
チャンネル材(51)の強度が不充分であるので、歪むと
いう問題点があった。従って、上記のような重量の重い
ものを吊り下げるには、直接天井から吊りボルトで吊り
下げる必要があり、そのために吊りボルトを挿通するた
めの孔をチャンネル材(51)に明ける必要があった。し
かしながらこの場合、コーキング材によるシールが完全
に行なわれないと、エアフィルタ上流側の汚れた空気が
エアフィルタ下流の清浄空間側に漏洩する恐れがあると
いう問題点があった。さらに、チャンネル材(51)に孔
を明けると天井フレーム(53)の強度を低下させるとい
う問題点があった。
The channel material (51) can be suspended if it is light such as a lighting fixture, but if a heavy material such as a partition, a hanging wall, or a wafer transfer device is suspended, the strength of the channel material (51) will increase. Since it is insufficient, there was a problem of distortion. Therefore, in order to suspend a heavy object such as that described above, it is necessary to suspend it directly from the ceiling with suspension bolts. Therefore, it is necessary to open a hole for inserting the suspension bolt in the channel member (51). . However, in this case, unless the caulking material is completely sealed, there is a problem that dirty air on the upstream side of the air filter may leak to the clean space side on the downstream side of the air filter. Furthermore, there is a problem that the strength of the ceiling frame (53) is reduced when a hole is formed in the channel material (51).

この発明は、上記問題点を解決すべくなされたもので、
その目的とするところは、空気が漏洩する恐れがなく重
量の重いものを吊り下げできるようにすることにある。
The present invention has been made to solve the above problems,
The purpose is to enable the suspension of a heavy object without the risk of air leakage.

〔問題点を解決するための手段〕[Means for solving problems]

このため、この発明では、十字形に溝を形成し、それぞ
れの溝にチャンネル材(2)を接続するようにした本体
部(3a)の中心に、吊りボルト(8)を螺合するネジ穴
(7)で形成したボス(6)を立設したエアフィルタ設
置用天井フレームの継手であって、被吊下物(16)を吊
り下げるための止めビス(15)を螺合するネジ穴(13)
をボス(6)に前記ネジ穴(7)と貫通しないように非
貫通部(6a)を設けて同軸に形成したものとした。
Therefore, in the present invention, a cross-shaped groove is formed, and a screw hole for screwing the suspension bolt (8) is screwed into the center of the main body (3a) in which the channel material (2) is connected to each groove. A joint for an air filter installation ceiling frame in which a boss (6) formed in (7) is erected, and a screw hole (for screwing a stop screw (15) for suspending a suspended object (16) ( 13)
The boss (6) is coaxially formed with a non-penetrating portion (6a) so as not to penetrate the screw hole (7).

〔作用〕[Action]

継手(3)は、吊りボルト(8)係止用のネジ穴(7)
を利用して天井に吊り下げられ、被吊下物(16)は継手
(3)のネジ穴(13)を利用して吊り下げられる。ネジ
穴(7)とネジ穴(13)の間には、非貫通部(6a)を設
けているので、この部分から空気が洩れることがない。
The fitting (3) has a screw hole (7) for locking the hanging bolt (8).
The object to be suspended (16) is suspended by using the screw hole (13) of the joint (3). Since the non-penetrating portion (6a) is provided between the screw hole (7) and the screw hole (13), air does not leak from this portion.

また、ネジ穴(7)とネジ穴(13)は同軸に形成されて
いるので、ウエハー搬送装置等の重量の重い被吊下物
(16)を継手(3)に吊り下げても、継手(3)に接続
したチャンネル材(2)に影響を与えることがない。
Further, since the screw hole (7) and the screw hole (13) are formed coaxially, even if a heavy object to be suspended (16) such as a wafer carrier is hung on the joint (3), the joint ( It does not affect the channel material (2) connected to 3).

〔実施例〕〔Example〕

以下、この発明の一実施例を図面に従って説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第1図は、この発明に係るエアフィルタ設置用天井フレ
ームの継手を示す斜視図である。エアフィルタ設置用天
井フレーム(1)は、上方が開放されたチャンネル材
(2)と、チャンネル材(2)同志を格子状に接続する
継手(3)からなり、さらに、チャンネル材(2)と継
手(3)はリベット(4)で固着されている。
FIG. 1 is a perspective view showing a joint of a ceiling frame for installing an air filter according to the present invention. The ceiling frame (1) for installing an air filter comprises a channel material (2) whose upper part is open, a joint (3) for connecting the channel materials (2) to each other in a grid pattern, and further, a channel material (2). The joint (3) is fixed with rivets (4).

継手(3)は、十字形に溝を形成した本体部(3a)と、
本体部(3a)の中心に立設したボス(6)からなり、ボ
ス(6)の上部には天井から吊り下げられた吊りボルト
(8)と螺着するネジ穴(7)が形成されている。ま
た、前記ボス(6)の下部にはネジ穴(13)が形成され
ており、さらに前記ネジ穴(7)とネジ穴(13)との間
には非貫通部(6a)が設けられている。尚、(5)はチ
ャンネル材(2)を嵌合する際の位置決め用の突起であ
る。
The joint (3) includes a body portion (3a) having a cross-shaped groove,
It consists of a boss (6) standing upright in the center of the main body (3a), and a screw hole (7) screwed into a hanging bolt (8) suspended from the ceiling is formed in the upper part of the boss (6). There is. A screw hole (13) is formed in the lower part of the boss (6), and a non-penetrating portion (6a) is provided between the screw hole (7) and the screw hole (13). There is. Incidentally, (5) is a projection for positioning when the channel material (2) is fitted.

チャンネル材(2)の内側及び継手(3)の溝内にはシ
ール材(9)が充填され、さらにこのシール材(9)に
エアフィルタ(10)のフィルタ枠(11)のスカート部
(12)が挿入されて空気洩れが生じないようになってい
る。
The inside of the channel material (2) and the groove of the joint (3) are filled with a sealing material (9), and the sealing material (9) further has a skirt portion (12) of the filter frame (11) of the air filter (10). ) Is inserted to prevent air leakage.

この継手(3)を使用して格子状に形成された天井フレ
ーム(1)は、ネジ穴(7)に吊りボルト(8)が螺着
されて天井に吊り下げられる。
The ceiling frame (1) formed in a lattice shape by using the joint (3) is hung on the ceiling by screwing a hanging bolt (8) into the screw hole (7).

垂れ壁、カーテン、ウエハー搬送装置等の被吊下物(1
6)の継手(3)への固着は、被吊下物(16)の端部に
固着した吊下部材(14)に止めビス(15)を通し、ボス
(6)の下部のネジ穴(13)に螺着することによってな
される。
Suspended objects such as hanging walls, curtains, and wafer transfer devices (1
To fix 6) to the joint (3), pass a stop screw (15) through the hanging member (14) fixed to the end of the suspended object (16), and screw holes ( 13) by screwing on.

尚、前記継手(3)の下部に被吊下物(16)を吊り下げ
ない場合は、第3図に示すように、ネジ穴(13)を化粧
ビス(17)等で閉塞しても良い。
When the object to be suspended (16) is not suspended under the joint (3), the screw hole (13) may be closed with a decorative screw (17) or the like as shown in FIG. .

〔発明の効果〕〔The invention's effect〕

この発明の継手は上述のような構成を有しており、この
発明の継手(3)を使用すれば、被吊下物(16)の重量
が継手(3)に接続したチャンネル材(2)にかからな
いので、従来吊り下げ不可能であった。間仕切り、垂れ
壁、ウエハー搬送装置等の重量の重いものでも吊り下げ
ることができるようになる。また、ボス(6)のネジ穴
(7)(13)は非貫通部(6a)を設けているので、汚れ
た空気がネジ穴(7)(13)を通って下流の洗浄域に漏
洩することは全くない。
The joint of the present invention has the above-mentioned structure. When the joint (3) of the present invention is used, the weight of the suspended object (16) is connected to the joint (3) to the channel material (2). Since it does not take a long time, it has not been possible to hang it. Even heavy objects such as partitions, hanging walls, and wafer transfer devices can be suspended. Further, since the screw holes (7) and (13) of the boss (6) are provided with the non-penetrating portion (6a), dirty air leaks through the screw holes (7) and (13) to the downstream cleaning area. There is no such thing.

【図面の簡単な説明】[Brief description of drawings]

第1図は、この発明の継手を使用した天井フレームの斜
視図。第2図はそのA-A線断面図。第3図はボスに化粧
ビスを螺合した状態を示す断面図。第4図は従来の継手
を使用した天井フレームの斜視図。第5図はそのA-A線
断面図。 (2)……チャンネル材 (3)……継手 (3a)……本体部 (6)……ボス (6a)……非貫通部 (7)……ネジ穴 (8)……吊りボルト (13)……ネジ穴 (15)……止めビス (16)……被吊下物
FIG. 1 is a perspective view of a ceiling frame using the joint of the present invention. Fig. 2 is a sectional view taken along the line AA. FIG. 3 is a sectional view showing a state in which a cosmetic screw is screwed onto the boss. FIG. 4 is a perspective view of a ceiling frame using a conventional joint. Fig. 5 is a sectional view taken along the line AA. (2) ...... Channel material (3) ...... Joint (3a) …… Main body (6) …… Boss (6a) …… Non-penetrating part (7) …… Screw hole (8) …… Hanging bolt (13 ) …… Screw hole (15) …… Set screw (16) …… Hanging object

フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 7521−2E E04B 5/55 K Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location 7521-2E E04B 5/55 K

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】十字形に溝を形成し、それぞれの溝にチャ
ンネル材(2)を接続するようにした本体部(3a)の中
心に、吊りボルト(8)を螺合するネジ穴(7)を形成
したボス(6)を立設したエアフィルタ設置用天井フレ
ームの継手であって、被吊下物(16)を吊り下げるため
の止めビス(15)を螺合するネジ穴(13)をボス(6)
に前記ネジ穴(7)と貫通しないように非貫通部(6a)
を設けて同軸に形成したことを特徴とするエアフィルタ
設置用天井フレームの継手。
1. A screw hole (7) into which a hanging bolt (8) is screwed, is formed at the center of a main body (3a) in which cross-shaped grooves are formed and a channel material (2) is connected to each groove. ) Is formed, the joint of the ceiling frame for air filter installation in which the boss (6) is formed upright, and the screw hole (13) into which the locking screw (15) for suspending the suspended object (16) is screwed The boss (6)
The non-penetrating part (6a) so that it does not penetrate the screw hole (7)
A joint for a ceiling frame for installing an air filter, wherein the joint is formed coaxially.
JP62314467A 1987-12-12 1987-12-12 Ceiling frame fittings for air filter installation Expired - Fee Related JPH0686755B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62314467A JPH0686755B2 (en) 1987-12-12 1987-12-12 Ceiling frame fittings for air filter installation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62314467A JPH0686755B2 (en) 1987-12-12 1987-12-12 Ceiling frame fittings for air filter installation

Publications (2)

Publication Number Publication Date
JPH01154937A JPH01154937A (en) 1989-06-16
JPH0686755B2 true JPH0686755B2 (en) 1994-11-02

Family

ID=18053686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62314467A Expired - Fee Related JPH0686755B2 (en) 1987-12-12 1987-12-12 Ceiling frame fittings for air filter installation

Country Status (1)

Country Link
JP (1) JPH0686755B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07259241A (en) * 1994-03-26 1995-10-09 Pilot Corp:The Grated ceiling fitting structure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59216612A (en) * 1983-05-25 1984-12-06 Nitta Kk Filter bank apparatus
JPS6058709U (en) * 1983-09-30 1985-04-24 富士精工株式会社 clean room ceiling
SE456260B (en) * 1985-01-29 1988-09-19 Flaekt Ab ROOF ROOFING RECTANGULAR FILTER ELEMENT

Also Published As

Publication number Publication date
JPH01154937A (en) 1989-06-16

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