JPH0683452A - Position detecting device for actuator with speed reducer - Google Patents

Position detecting device for actuator with speed reducer

Info

Publication number
JPH0683452A
JPH0683452A JP23668192A JP23668192A JPH0683452A JP H0683452 A JPH0683452 A JP H0683452A JP 23668192 A JP23668192 A JP 23668192A JP 23668192 A JP23668192 A JP 23668192A JP H0683452 A JPH0683452 A JP H0683452A
Authority
JP
Japan
Prior art keywords
resolver
speed reducer
rotational position
output shaft
turned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23668192A
Other languages
Japanese (ja)
Inventor
Ken Onishi
献 大西
Atsushi Tokioka
淳 時岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP23668192A priority Critical patent/JPH0683452A/en
Publication of JPH0683452A publication Critical patent/JPH0683452A/en
Pending legal-status Critical Current

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  • Numerical Control (AREA)

Abstract

PURPOSE:To provide the device which precisely detect the rotational position of a speed reducer output shaft even when a resolver with relatively low precision is used and also correctly detects the rotational position on condition that the power source is turned-ON even if being turned OFF temporarily. CONSTITUTION:A 1st resolver 11 detects the rotational position of the speed reducer output shaft of the actuator 10 with the speed reducer 23 and a 2nd resolver 12 detects the rotational position of the output shaft of a motor 22 coupled with the speed reducer 23; and the position detection signals 11A and 12A of the 1st and 2nd resolvers are inputted to a computing element 13 and when the power source is turned ON, the rotational position detected by the 1st resolver 11 is regarded as an initial value. Then the difference of the rotational position detected by the 2nd resolver 12 after the power source is turned ON from the rotational position detected by the 2nd resolver 12 when the power source is turned ON is added to this initial value and then the position signal 20A of the speed reducer output shaft is outputted.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はロボット関節駆動用アク
チュエータなど、減速機を有するアクチュエータに適用
する位置検出装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detecting device applied to an actuator having a speed reducer such as a robot joint driving actuator.

【0002】[0002]

【従来の技術】多軸マニプレータなどのロボット関節に
は、関節駆動用アクチュエータとして、モータと減速機
を組み合せたものが内蔵されている。モータとしては、
ロボット関節の位置制御等のために、DCサーボモータ
やACサーボモータが使用される。このうちACサーボ
モータは、モータ出力軸の回転位置をレゾルバで検出
し、サーボドライバからステータ巻線に供給する電流
を、回転位置に応じて制御する、即ちコンミテーション
することにより、サーボ制御される。
2. Description of the Related Art In a robot joint such as a multi-axis manipulator, a combination of a motor and a speed reducer is incorporated as a joint driving actuator. As a motor,
A DC servo motor or an AC servo motor is used for controlling the position of the robot joint. Among these, the AC servomotor is servo-controlled by detecting the rotational position of the motor output shaft with a resolver and controlling the current supplied from the servo driver to the stator winding according to the rotational position, that is, by commutating. .

【0003】この種の減速機を有するアクチュエータで
は、ロボット関節の位置制御等のために減速機出力軸の
回転位置を検出する必要があり、従来は以下の2つの方
法がとられている。 (1)第1の従来方法:減速機の出力軸に高精度のレゾ
ルバを取り付けて直接的に回転位置を検出する方法。 (2)第2の従来方法:モータの出力軸の回転位置をレ
ゾルバで検出し、更にモータの幾回転にも対応するため
にレゾルバの回転数を積分して記憶することにより、減
速機出力軸の回転位置を間接的に検出する方法。
In an actuator having this type of speed reducer, it is necessary to detect the rotational position of the speed reducer output shaft in order to control the position of the robot joint, and the following two methods have been conventionally used. (1) First conventional method: a method in which a highly accurate resolver is attached to the output shaft of a speed reducer to directly detect the rotational position. (2) Second conventional method: The rotational position of the output shaft of the motor is detected by the resolver, and the number of revolutions of the resolver is integrated and stored to correspond to the number of rotations of the motor. Method to indirectly detect the rotational position of.

【0004】[0004]

【発明が解決しようとする課題】しかし、第1、第2の
各従来方法には、以下のような長所と短所がある。 (1)第1の従来方法:この方法は減速機出力軸を直接
的に検出することができるが、高精度が要求されるほど
レゾルバが高価になる。 (2)第2の従来方法:レゾルバの精度の減速比倍の精
度で減速機出力軸の回転位置を検出できるので、第1の
従来方法に比べて低精度のレゾルバを用いることができ
る。しかし、電源をオフしたときには記憶内容が消えて
しまい、また、電源オフの間に何らかの外力によりモー
タ出力軸が回転しても、これを補正することができな
い。この場合、電源オフを電池でバックアップすること
が考えられるが、可搬式マニプレータなど小型化、軽量
化が要求される場合には適用できない。
However, the first and second conventional methods have the following advantages and disadvantages. (1) First conventional method: Although this method can directly detect the output shaft of the speed reducer, the resolver becomes expensive as the higher accuracy is required. (2) Second conventional method: Since the rotational position of the output shaft of the speed reducer can be detected with an accuracy that is double the reduction ratio of the resolver accuracy, a resolver with a lower accuracy can be used as compared with the first conventional method. However, when the power is turned off, the stored contents are lost, and even if the motor output shaft rotates due to some external force while the power is off, this cannot be corrected. In this case, it is conceivable to back up the power supply with a battery, but this cannot be applied to cases such as portable manipulators that require downsizing and weight reduction.

【0005】本発明は上述した従来技術に鑑み、比較的
低精度なレゾルバを用いても減速機出力軸の回転位置を
精度良く検出でき、しかも電源が一旦オフになってもそ
の後オンになれば正しく回転位置を検出できる装置を提
出することを目的とする。
In view of the above-mentioned prior art, the present invention can accurately detect the rotational position of the output shaft of the speed reducer even if a resolver of relatively low accuracy is used, and even if the power is turned off once, it is turned on again. The purpose is to provide a device that can correctly detect the rotational position.

【0006】[0006]

【課題を解決するための手段】上記目的を達成する本発
明の減速機を有するアクチュエータ用位置検出装置は、
減速機を有するアクチュエータの前記減速機の出力軸の
回転位置を検出する第1のレゾルバと、前記アクチュエ
ータの減速機に連結したモータの出力軸の回転位置を検
出する第2のレゾルバと、第1及び第2のレゾルバの各
位置検出信号を入力し、電源がオンになった時に第1の
レゾルバで検出される回転位置を初期値とし、この初期
値に、電源がオンになった時に第2のレゾルバで検出さ
れる回転位置に対する電源オン後に同第2のレゾルバで
検出される回転位置の差分を加える演算により減速機出
力軸の位置信号を出力する演算器とを具備することを特
徴とするものである。
A position detecting device for an actuator having a speed reducer according to the present invention which achieves the above object,
A first resolver for detecting a rotational position of an output shaft of the speed reducer of an actuator having a speed reducer; a second resolver for detecting a rotational position of an output shaft of a motor connected to the speed reducer of the actuator; And the position detection signals of the second resolver are input, and the rotational position detected by the first resolver when the power is turned on is set as an initial value, and the rotation position detected by the first resolver is set to the second value when the power is turned on. And a calculator for outputting a position signal of the reduction gear output shaft by a calculation of adding a difference between the rotation position detected by the second resolver and the rotation position detected by the second resolver after the power is turned on. It is a thing.

【0007】[0007]

【作用】電源がオフからオンになった時、第2のレゾル
バの位置検出信号からは第2のレゾルバの回転数が不明
なので減速機出力軸の絶対位置が判らないが、第1のレ
ゾルバの位置検出信号から絶対位置が判るので、これを
電源オン時の初期値とする。電源オン以後の減速機出力
軸の回転位置は、第2のレゾルバの位置検出信号により
モータ出力軸の電源オン時の回転位置に対する差分が判
るから、この差分を初期値に加えたものとなる。従っ
て、第1、第2いずれのレゾルバも精度がさほど良くな
くても、減速機出力軸の回転位置を高精度に検出でき
る。また、電源オフを電池でバックアップしなくても、
電源オンになった時から正しく回転位置を検出できる。
When the power is turned on, the absolute position of the output shaft of the speed reducer cannot be known because the rotation speed of the second resolver is unknown from the position detection signal of the second resolver. Since the absolute position can be known from the position detection signal, this is set as the initial value when the power is turned on. The rotational position of the speed reducer output shaft after the power is turned on can be obtained by adding the difference to the initial value because the difference with respect to the rotational position of the motor output shaft when the power is turned on can be known from the position detection signal of the second resolver. Therefore, even if the accuracy of both the first and second resolvers is not so good, the rotational position of the speed reducer output shaft can be detected with high accuracy. Also, even if you do not backup the power off with a battery,
The rotation position can be detected correctly after the power is turned on.

【0008】[0008]

【実施例】以下、図面を参照して本発明の実施例を説明
する。図1は本発明の適用対象である減速機を有するア
クチュエータを備えた7軸の多関節マニプレータの一例
を示し、図2は位置検出装置の一実施例を示し、図3は
演算器の一例における動作タイミングを示す。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of a 7-axis articulated manipulator provided with an actuator having a speed reducer to which the present invention is applied, FIG. 2 shows an example of a position detection device, and FIG. 3 shows an example of an arithmetic unit. The operation timing is shown.

【0009】図1において、図示しない作業床面や作業
壁面等に固定される取付面1が形成された取付ベース2
には、前記取付面1に対して垂直な第1軸周りに旋回し
得る旋回台3が連結されており、この旋回台3には前記
第1軸に対して直交する第2軸周りに回動する腕スリー
ブ4の基端部が連結されている。又、この腕スリーブ4
の先端部には、前記第2軸に対して直交する第3軸周り
に回転する中間腕5の基端部が連結されており、この中
間腕5の先端部には前記第3軸に対して直交する第4軸
周りに回動する接続スリーブ6の基端部が連結されてい
る。更に、この接続スリーブ6の先端部には、前記第4
軸に対して直交する第5軸周りに回転する延長スリーブ
7の基端部が連結されており、この延長スリーブ7の先
端部には前記第5軸に対して直交する第6軸周りに回動
する手首部8が連結されている。そして、この手首部8
には前記第6軸に対して直交する第7軸周りに回転し且
つ各種作業機器等の負荷が組み付けられる面板9が取り
付けられている。これら第1軸〜第7軸の各関節にはそ
れぞれ関節駆動用の減速機を有するアクチュエータが内
蔵されている。
In FIG. 1, a mounting base 2 having a mounting surface 1 fixed to a work floor surface, work wall surface, or the like (not shown) is formed.
A swivel base 3 that can swivel around a first axis perpendicular to the mounting surface 1 is connected to the swivel base 3, and the swivel base 3 rotates around a second axis orthogonal to the first axis. The base end of the moving arm sleeve 4 is connected. Also, this arm sleeve 4
The base end portion of the intermediate arm 5 that rotates around a third axis orthogonal to the second axis is connected to the tip end portion of the. The base end portion of the connection sleeve 6 that rotates about the fourth axis orthogonal to each other is connected. Further, at the tip of the connecting sleeve 6, the fourth
A base end portion of an extension sleeve 7 that rotates around a fifth axis orthogonal to the axis is connected, and a distal end portion of the extension sleeve 7 rotates around a sixth axis orthogonal to the fifth axis. The moving wrist part 8 is connected. And this wrist 8
A face plate 9 that rotates around a seventh axis orthogonal to the sixth axis and to which loads such as various types of work equipment are attached is attached to this. Each of the joints of the first axis to the seventh axis has a built-in actuator having a speed reducer for driving the joint.

【0010】図2に示すように、減速機を有するアクチ
ュエータ10としては、モータ(M)22と、これに結
合した減速機(G)23を有するものであり、減速機出
力軸に第1のレゾルバ(RG)11が取り付き、モータ
出力軸に第2のレゾルバ(RM)12が取り付いてい
る。モータ22としてはACサーボモータを用い、第
1、第2の各レゾルバ11、12としては、いずれも、
通常ACサーボモータに用いられる比較的低精度のレゾ
ルバを用いている。これら各レゾルバ11、12の位置
検出信号11A,12Aを用いて演算器13により、減
速機出力軸の高精度な位置信号20Aを得るようにして
いる。
As shown in FIG. 2, the actuator 10 having a speed reducer includes a motor (M) 22 and a speed reducer (G) 23 coupled to the motor (M) 22, and a first speed reducer output shaft is provided. A resolver (RG) 11 is attached, and a second resolver (RM) 12 is attached to the motor output shaft. An AC servomotor is used as the motor 22, and each of the first and second resolvers 11 and 12 is
A relatively low-precision resolver normally used in an AC servomotor is used. Using the position detection signals 11A and 12A of the resolvers 11 and 12, the calculator 13 obtains a highly accurate position signal 20A of the speed reducer output shaft.

【0011】本実施例では演算器13を、図2に示すよ
うに、第1のレゾルバ11のアナログ位置検出信号11
Aと第2のレゾルバ12のアナログ位置検出信号12A
とを選択的に取り込むスイッチ14と、このスイッチ1
4で選択されたアナログ位置検出信号をパラレルのデジ
タル信号に変換する変換器(R/D)15と、デジタル
変換された第1のレゾルバ11からの位置検出データを
記憶する第1のメモリ16と、この第1のメモリ16か
ら読み出された位置検出データに減速機23の減速比を
掛ける乗算器17と、デジタル変換された第2のレゾル
バ12からの位置検出データを記憶する第2のメモリ1
8と、デジタル変換された第2のレゾルバ12からの位
置検出データの最上位ビットのパルス数をカウントする
カウンタ19と、乗算器17の出力、第2のメモリ18
の出力、変換器15の出力、並びにカウンタ19の出力
を基に減速機出力軸の位置信号20Aを算出する加減算
器20と、制御器21とで構成してある。
In this embodiment, as shown in FIG. 2, the arithmetic unit 13 is used to control the analog position detection signal 11 of the first resolver 11.
A and the analog position detection signal 12A of the second resolver 12
And a switch 14 for selectively capturing and
A converter (R / D) 15 for converting the analog position detection signal selected in 4 into a parallel digital signal; and a first memory 16 for storing the digitally converted position detection data from the first resolver 11. , A multiplier 17 for multiplying the position detection data read from the first memory 16 by the speed reduction ratio of the speed reducer 23, and a second memory for storing the digitally converted position detection data from the second resolver 12. 1
8, a counter 19 for counting the pulse number of the most significant bit of the position detection data from the digitally converted second resolver 12, the output of the multiplier 17, the second memory 18
2 and the output of the converter 15 and the output of the counter 19, and the adder / subtractor 20 for calculating the position signal 20A of the speed reducer output shaft, and the controller 21.

【0012】制御器21は電源がオフからオンになる
と、スイッチ14、第1のメモリ16、第2のメモリ1
8及びカウンタ19の動作を制御するものであり、それ
ぞれに対して指令信号21A〜21Dを出力する。図3
に指令信号21A〜21Dの発生例を示す。
When the power supply of the controller 21 is changed from OFF to ON, the switch 14, the first memory 16 and the second memory 1
8 and the counter 19, and outputs command signals 21A to 21D to them. Figure 3
Shows an example of generation of the command signals 21A to 21D.

【0013】スイッチ14は通常、a側に投入されてい
て第2のレゾルバ12の位置検出信号12Aを変換器1
5に与え、電源オン時に制御器21から切換指令信号2
1Aを受けて短時間だけb側に投入されて第1のレゾル
バ11の位置検出信号11Aを変換器15に与える。b
側投入後、a側投入に戻る。
The switch 14 is normally turned on to the side a and converts the position detection signal 12A of the second resolver 12 into the converter 1.
5 and the switching command signal 2 from the controller 21 when the power is turned on.
After receiving 1A, the signal is input to the b side for a short time, and the position detection signal 11A of the first resolver 11 is given to the converter 15. b
After side charging, return to a side charging.

【0014】第1のメモリ16は、スイッチ14がb側
に投入されている間に制御器21から書込指令信号21
Bを受け、変換器15によりデジタル変換された位置検
出信号11Aを記憶する。即ち第1のメモリ16には、
減速機出力軸の電源オン時の絶対位置RGO が初期値と
して記憶される。
The first memory 16 receives the write command signal 21 from the controller 21 while the switch 14 is closed to the side b.
B is received and the position detection signal 11A digitally converted by the converter 15 is stored. That is, in the first memory 16,
Absolute position RG O at power-on of the speed reducer output shaft is stored as an initial value.

【0015】乗算器17は、第1のメモリ16に記憶し
た減速機出力軸の電源オン時の絶対位置データに減速機
23の減速比Gを掛ける。これは減速機出力軸の電源オ
ン時の絶対位置RGO を、第2のレゾルバ12から見た
モータ出力軸の電源オン時の回転位置RGO ・Gに換算
するためである。
The multiplier 17 multiplies the absolute position data of the output shaft of the speed reducer stored in the first memory 16 when the power is turned on by the speed reduction ratio G of the speed reducer 23. This absolute position RG O at power-on of the speed reducer output shaft, in order to convert the rotational position RG O · G at power-on of the motor output shaft as viewed from the second resolver 12.

【0016】第2のメモリ18は、スイッチ14がb側
に投入される前後いずれでも良いが、a側に投入されて
いる間で電源オン時に極めて近い時点で制御器21から
書込指令信号21Cを受け、変換器15によりデジタル
変換された位置検出信号12Aを記憶する。即ち第2の
メモリ18には、モータ出力軸の電源オン時の回転位置
RMO が記憶される。
The second memory 18 may be provided either before or after the switch 14 is turned on to the side b, but during the time the switch 14 is turned on, the write command signal 21C is sent from the controller 21 at an extremely close time when the power is turned on. In response, the converter 15 stores the position detection signal 12A digitally converted. That is, the second memory 18, the rotational position RM O at power-on of the motor output shaft are stored.

【0017】カウンタ19は、スイッチ14がb側から
a側に投入された時に制御器21からリセット指令信号
21Dを受けてリセットされ、変換器15によりデジタ
ル変換された位置検出信号12Aの最上位ビットのパル
ス数をカウントする。即ち、カウンタ19は電源オン後
の第2のレゾルバ12換言すればモータ出力軸の回転数
Cをカウントする。
The counter 19 is reset by receiving the reset command signal 21D from the controller 21 when the switch 14 is turned from the b side to the a side, and the most significant bit of the position detection signal 12A digitally converted by the converter 15. Count the number of pulses. That is, the counter 19 counts the second resolver 12 after the power is turned on, in other words, the rotation speed C of the motor output shaft.

【0018】加減算器20は、乗算器17が出力する電
源オン時の減速機出力軸の回転位置RGO ・Gと、第2
のメモリ18が出力する電源オン時のモータ出力軸の回
転位置RMO と、変換器15が出力する電源オン後各時
点のモータ出力軸の回転位置RMと、カウンタ20が出
力するモータ出力軸の回転数Cとから、 RGO ・G+RM−RMO +C なる加減算を行い、位置検出信号20Aとする。RM−
RMO が電源オン後の第2のレゾルバ12による回転位
置の差分である。
The adder / subtractor 20 outputs the rotational position RG O · G of the speed reducer output shaft when the power is turned on, which is output from the multiplier 17, and the second position.
Of the rotational position RM O of the motor output shaft at power-on memory 18 outputs a rotational position RM of the motor output shaft of each time point after the power-on converter 15 outputs, of the motor output shaft counter 20 outputs and a rotational speed C, performs RG O · G + RM-RM O + C becomes subtraction, and the position detection signal 20A. RM-
RM O is a differential of the rotational position by the second resolver 12 after power-on.

【0019】なお、図2は演算器13の一構成例を示す
ものにすぎず、第1及び第2のレゾルバの各位置検出信
号11A,12Aを入力し、電源がオンになった時に第
1のレゾルバ11で検出される回転位置を初期値とし、
この初期値に、電源がオンになった時に第2のレゾルバ
12で検出される回転位置に対する電源オン後に同第2
のレゾルバ12で検出される回転位置の差分を加える演
算により減速機出力軸の位置信号20Aを出力する構成
であれば、何でも良い。また、動作タイミングも必ずし
も図3に限るものではない。
Note that FIG. 2 shows only one example of the configuration of the computing unit 13, and the first and second resolver position detection signals 11A and 12A are input, and when the power is turned on, the first The initial position is the rotational position detected by the resolver 11 of
This initial value is the same as the second value after the power is turned on for the rotational position detected by the second resolver 12 when the power is turned on.
Any configuration may be used as long as it is configured to output the position signal 20A of the output shaft of the speed reducer by the calculation of adding the difference between the rotational positions detected by the resolver 12. The operation timing is not necessarily limited to that shown in FIG.

【0020】[0020]

【発明の効果】本発明によれば、第1、第2いずれのレ
ゾルバの精度が良くなくても減速機出力軸の回転位置を
精度良く検出でき、しかも電池による電源のバックアッ
プがなくても、電源がオンになりさえすれば回転位置を
正しく検出できる。
According to the present invention, the rotational position of the output shaft of the speed reducer can be accurately detected even if the accuracy of the first and second resolvers is not good, and the power source backup by the battery is not required. The rotational position can be correctly detected as long as the power is turned on.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の適用対象の一例として示す多関節マニ
プレータの外観図。
FIG. 1 is an external view of a multi-joint manipulator shown as an example of an application target of the present invention.

【図2】本発明の一実施例の位置検出装置の構成図。FIG. 2 is a configuration diagram of a position detection device according to an embodiment of the present invention.

【図3】演算器の動作タイミングの一例を示す図。FIG. 3 is a diagram showing an example of operation timing of a computing unit.

【符号の説明】[Explanation of symbols]

10 減速機を有するアクチュエータ 11 第1のレゾルバ 12 第2のレゾルバ 13 演算器 22 モータ 23 減速機 10 Actuator having a reducer 11 First resolver 12 Second resolver 13 Arithmetic unit 22 Motor 23 Reducer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 減速機を有するアクチュエータの前記減
速機の出力軸の回転位置を検出する第1のレゾルバと、
前記アクチュエータの減速機に連結したモータの出力軸
の回転位置を検出する第2のレゾルバと、第1及び第2
のレゾルバの各位置検出信号を入力し、電源がオンにな
った時に第1のレゾルバで検出される回転位置を初期値
とし、この初期値に、電源がオンになった時に第2のレ
ゾルバで検出される回転位置に対する電源オン後に同第
2のレゾルバで検出される回転位置の差分を加える演算
により減速機出力軸の位置信号を出力する演算器とを具
備することを特徴とする減速機を有するアクチュエータ
用位置検出装置。
1. A first resolver for detecting a rotational position of an output shaft of the speed reducer of an actuator having a speed reducer,
A second resolver for detecting a rotational position of an output shaft of a motor connected to the speed reducer of the actuator;
Each resolver position detection signal is input, and the rotational position detected by the first resolver when the power is turned on is set as an initial value, and this initial value is set by the second resolver when the power is turned on. And a calculator for outputting a position signal of the speed reducer output shaft by a calculation for adding a difference between the detected rotational position and the rotational position detected by the second resolver after the power is turned on. A position detecting device for an actuator having the same.
JP23668192A 1992-09-04 1992-09-04 Position detecting device for actuator with speed reducer Pending JPH0683452A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23668192A JPH0683452A (en) 1992-09-04 1992-09-04 Position detecting device for actuator with speed reducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23668192A JPH0683452A (en) 1992-09-04 1992-09-04 Position detecting device for actuator with speed reducer

Publications (1)

Publication Number Publication Date
JPH0683452A true JPH0683452A (en) 1994-03-25

Family

ID=17004205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23668192A Pending JPH0683452A (en) 1992-09-04 1992-09-04 Position detecting device for actuator with speed reducer

Country Status (1)

Country Link
JP (1) JPH0683452A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035435A (en) * 1999-05-24 2001-02-09 Applied Materials Inc Ion implantation device
JP2002010578A (en) * 2000-06-22 2002-01-11 Nabco Ltd Actuator
JP2016124094A (en) * 2015-01-08 2016-07-11 ファナック株式会社 Robot controller for updating rotational angle by multiple rotational angle detectors

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425908A (en) * 1990-05-22 1992-01-29 Kobe Steel Ltd Detection of position for industrial robot
JPH04256108A (en) * 1991-02-08 1992-09-10 Kobe Steel Ltd Position detecting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425908A (en) * 1990-05-22 1992-01-29 Kobe Steel Ltd Detection of position for industrial robot
JPH04256108A (en) * 1991-02-08 1992-09-10 Kobe Steel Ltd Position detecting device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035435A (en) * 1999-05-24 2001-02-09 Applied Materials Inc Ion implantation device
JP2002010578A (en) * 2000-06-22 2002-01-11 Nabco Ltd Actuator
JP2016124094A (en) * 2015-01-08 2016-07-11 ファナック株式会社 Robot controller for updating rotational angle by multiple rotational angle detectors
CN105773604A (en) * 2015-01-08 2016-07-20 发那科株式会社 Robot control device
US9636823B2 (en) 2015-01-08 2017-05-02 Fanuc Corporation Robot control device for updating rotation angle by plurality of rotation angle detectors

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