JPH0681952A - Sliding material and piston ring, and manufacture of sliding material - Google Patents
Sliding material and piston ring, and manufacture of sliding materialInfo
- Publication number
- JPH0681952A JPH0681952A JP28954992A JP28954992A JPH0681952A JP H0681952 A JPH0681952 A JP H0681952A JP 28954992 A JP28954992 A JP 28954992A JP 28954992 A JP28954992 A JP 28954992A JP H0681952 A JPH0681952 A JP H0681952A
- Authority
- JP
- Japan
- Prior art keywords
- oxygen
- sliding
- coating
- film
- piston ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pistons, Piston Rings, And Cylinders (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、摺動部における硬質皮
膜を有する摺動材料およびその摺動材料の製造方法に関
するものであり、更に詳しく述べるならば、内燃機関、
動弁部品などの各種機械部品の摺動部において使用され
る摺動材料とその製造方法に関するものである。これら
各種機器の高回転化や高出力化により機械部品などの摺
動部は益々過酷な条件下での耐摩耗性、耐焼付性等の摺
動特性の改善が期待されており、本発明はかかる要請に
応えるものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sliding material having a hard coating on a sliding portion and a method of manufacturing the sliding material.
The present invention relates to a sliding material used in sliding parts of various mechanical parts such as valve operating parts and a manufacturing method thereof. Due to higher rotation and higher output of these various devices, sliding parts such as machine parts are expected to have improved sliding characteristics such as wear resistance and seizure resistance under increasingly severe conditions. It is in response to such a request.
【0002】さらに本発明は、ピストンリングに関する
ものであり、さらに詳しく述べるならば摺動面の耐摩耗
性、耐焼付性並びに初期なじみを向上させたイオンプレ
ーティング皮膜を被覆した内燃機関用ピストンリングに
関するものである。Further, the present invention relates to a piston ring, more specifically, a piston ring for an internal combustion engine coated with an ion plating film having improved wear resistance, seizure resistance and initial familiarity of a sliding surface. It is about.
【0003】[0003]
【従来の技術】従来より主として鉄系摺動材料の摺動特
性改善策として、硬質クロムめっきによる耐摩耗性の改
善、窒化またはモリブデン溶射による耐焼付性の向上な
どの表面処理が挙げられる。しかしながらこれらの方法
では摺動材料としての十分な摺動特性が得られず、最近
物理的蒸着(PVD)法あるいは化学気相析出(CV
D)法により化学的にも比較的安定なCr−N系、Ti
−N系硬質皮膜を作製する方法が検討されている。2. Description of the Related Art Conventionally, as a measure for improving sliding characteristics of iron-based sliding materials, surface treatment such as improvement of wear resistance by hard chrome plating and improvement of seizure resistance by nitriding or molybdenum spraying can be mentioned. However, these methods cannot obtain sufficient sliding properties as a sliding material, and recently physical vapor deposition (PVD) method or chemical vapor deposition (CV) method has been used.
Cr) -N system, Ti, which is chemically relatively stable by the method D)
A method for producing an N-based hard coating has been studied.
【0004】しかしながらCr−N系皮膜は硬さが比較
的低いため摩耗が起こりやすく、いまだ十分な摺動特性
は得られていない。さらに皮膜硬さが高く、摺動特性に
優れた皮膜のとしてTi−N系皮膜が提案されている。
このTi−N系皮膜は、切削工具として使用実績はある
が、機械部品等の摺動部材として利用する場合には皮膜
硬さが高すぎて相手材を摩耗させてしまう欠点がある。However, since the Cr-N-based coating has a relatively low hardness, it is apt to be worn, and sufficient sliding characteristics have not yet been obtained. Further, a Ti-N-based coating has been proposed as a coating having high coating hardness and excellent sliding characteristics.
This Ti-N-based coating has a track record of use as a cutting tool, but when used as a sliding member such as a machine part, it has a drawback that the coating hardness is too high and the mating material is abraded.
【0005】また、Ti−N系皮膜との摩耗により粗く
なった相手材表面が今度はTi−N系皮膜をアブレーシ
ブ摩耗させ、両者の間の摺動条件が悪化して遂には焼き
付きが発生してしまうことがある。また皮膜硬さが高す
ぎるために、皮膜と接する相手材との「初期なじみ」が
悪い欠点がある。ここで「初期なじみ」とは、摺動部材
の表面において摺動開始後の短時間内に摺動接触する表
面が微小かつ平滑に摩耗することにより接触面圧を低減
させて、潤滑油膜切れを起こし難くすることにより摩耗
や焼き付きの発生を防ぐことである。Ti−N系皮膜は
初期なじみが悪いことにより、摺動初期において摩耗や
焼き付き現象を起こし易い。Further, the surface of the mating material, which has become rough due to abrasion with the Ti-N-based coating, abrasively wears the Ti-N-based coating, the sliding condition between the two deteriorates, and finally seizure occurs. It may happen. Further, since the hardness of the coating is too high, there is a drawback in that the "initial familiarity" with the mating material in contact with the coating is poor. The term "initial familiarity" used here means that the contact surface pressure is reduced due to minute and smooth wear of the sliding contact surface on the surface of the sliding member within a short period of time after the start of sliding, causing the lubricating oil film to run out. This is to prevent the occurrence of abrasion and seizure by making it difficult to cause. Since the Ti-N-based coating has poor initial familiarity, it tends to cause wear and seizure at the initial stage of sliding.
【0006】このような摺動特性上の問題点に加えて、
Cr−N系、Ti−N系皮膜には製造上の問題がある。
一般に硬質の薄い皮膜を被覆した後には、初期なじみを
良好にしかつ相手材の過度の摩耗を招かないようにポリ
シング等で皮膜の摺動面を平滑化する必要があるが、皮
膜硬さが高いために平滑化が困難である。したがってこ
のポリシング加工には長時間を要し、しかも一様な仕上
取り代にならず、膜厚が不均一になり部分的には皮膜を
無くしてしまい、不良品となる率が高い。In addition to such problems in sliding characteristics,
The Cr-N type and Ti-N type coatings have manufacturing problems.
Generally, after coating a hard thin film, it is necessary to smooth the sliding surface of the film by polishing etc. so as to improve initial running-in and prevent excessive wear of the mating material, but the film hardness is high. Therefore, smoothing is difficult. Therefore, this polishing process takes a long time, does not result in a uniform finishing allowance, the film thickness becomes non-uniform, and the film is partially lost, resulting in a high rate of defective products.
【0007】さらにCr−N系皮膜は銀色ないし銀白
色、Ti−N系は皮膜は金色ないし薄黄色であり、摺動
部材の下地の金属色との色調差が少ないため、皮膜の微
小な剥離や、前述のポリシングによって皮膜が無くなっ
た部分を検出する手段として、画像解析装置等で自動化
することができなかった。このため顕微鏡で拡大し肉眼
で検査する方法をとる必要があり、性能保証面で大きな
問題があった。Further, the Cr-N-based coating is silver or silver-white, and the Ti-N-based coating is gold or light yellow, and there is little difference in color tone from the metallic color of the base of the sliding member. Moreover, it has not been possible to automate it with an image analysis device or the like as a means for detecting a portion where the film is lost by the above-mentioned polishing. For this reason, it is necessary to use a method of enlarging with a microscope and inspecting with the naked eye, which is a big problem in terms of performance assurance.
【0008】ピストンリングは、主に内燃機関の燃焼室
の気密化、シリンダーライナー表面に形成される潤滑用
油膜の膜厚制御、および燃料が燃焼することによって加
熱されたピストンの熱をシリンダーライナーへ伝えて冷
却する等の働きをする。このような働きをするにはピス
トンリングは、それ自体が自己の持つ張力でシリンダー
ライナーに張り出して密着しなければならないので、摺
動面には必然的に大きな面圧が発生し、したがって摩耗
や焼付の発生しやすい状況に曝されて摺動している。ま
た、燃焼工程中に生成する硬い燃焼生成物がピストンリ
ングとシリンダーライナー間の摺動面に達し、アブレッ
シブな摩耗を発生させ、さらにガソリン中に含まれる硫
黄や窒素分が酸化し、硝酸や硫酸になりエンジンオイル
中に混入し腐食摩耗を促進するようになるので、ピスト
ンリングはこのような点でも摩耗や焼付きが発生しやす
い状況に曝されて摺動している。The piston ring mainly seals the combustion chamber of the internal combustion engine, controls the film thickness of the lubricating oil film formed on the surface of the cylinder liner, and transfers the heat of the piston heated by the combustion of fuel to the cylinder liner. It works by transmitting and cooling. In order to perform such a function, the piston ring itself must overhang and adhere to the cylinder liner by its own tension, so that a large surface pressure is inevitably generated on the sliding surface, and therefore wear and wear. Sliding due to exposure to seizure. In addition, the hard combustion products generated during the combustion process reach the sliding surface between the piston ring and the cylinder liner, causing abrasive wear, and the sulfur and nitrogen components contained in gasoline are oxidized, and nitric acid and sulfuric acid are added. Therefore, the piston ring is mixed with the engine oil and promotes corrosive wear, and therefore the piston ring is exposed to a situation in which wear and seizure are likely to occur and slides.
【0009】上記のような摺動条件から起こる摩耗や焼
付きの問題を解消するため、ピストンリングはその摺動
面に何らかの表面処理が施されている。従来より行われ
てきた表面処理方法の代表的なものとしては、硬質クロ
ムめっきによる耐摩耗性の改善、窒化またはモリブデン
溶射による耐焼付性の向上が挙げられる。しかしなが
ら、これらの方法で処理されたピストンリングの摺動特
性は現在の要求水準に対しては不十分であるので、最近
イオンプレーティング法によりCr−N系、Ti−N系
の化学的に比較的安定な化合物をピストンリングに硬質
皮膜として施すことが検討されている。In order to solve the problems of wear and seizure caused by the above sliding conditions, the piston ring has its sliding surface subjected to some surface treatment. Typical surface treatment methods that have been conventionally performed include improvement of wear resistance by hard chromium plating and improvement of seizure resistance by nitriding or molybdenum spraying. However, since the sliding characteristics of the piston rings treated by these methods are not sufficient for the current required level, the chemical comparison between the Cr-N system and the Ti-N system was recently conducted by the ion plating method. It has been considered to apply a chemically stable compound to the piston ring as a hard coating.
【0010】しかしながらCr−N系皮膜は硬さが比較
的低いため摩耗が起こりやすく、いまだ十分な摺動特性
は得られていない。さらに皮膜硬さが高く、摺動特性に
優れた皮膜のとしてTi−N系イオンプレーティング皮
膜が提案されている(特公平4−19412号参照)。However, since the Cr-N type coating has a relatively low hardness, it is apt to be worn and the sliding characteristics have not yet been obtained. Further, a Ti—N-based ion plating film has been proposed as a film having high film hardness and excellent sliding characteristics (see Japanese Patent Publication No. 4-19412).
【0011】[0011]
【発明が解決しようとする課題】本発明は、上記の問題
点に鑑みて比較的安価なCrを主成分とし、初期なじみ
性に優れたCr−N−O系皮膜を被覆した摺動材料の開
発を目的として検討を行ったものであり、特にその皮膜
の耐摩耗性および耐焼付性等の摺動特性を改良するとと
もに、下地金属との色調差を大きくすることで工業生産
における性能保証面の問題を解決することを目的として
いる。SUMMARY OF THE INVENTION In view of the above problems, the present invention relates to a sliding material containing a relatively inexpensive Cr as a main component and a Cr--N--O system coating excellent in initial conformability. This was conducted for the purpose of development.In particular, by improving the sliding characteristics such as wear resistance and seizure resistance of the coating, and increasing the color difference with the base metal, performance assurance in industrial production The purpose is to solve the problem.
【0012】同様に、本発明は、上記の問題点に鑑みて
比較的安価なCrを主成分とし、初期なじみ性に優れた
Cr−N−O系皮膜を被覆した内燃機関用ピストンリン
グの開発を目的として検討を行ったものであり、特にそ
の皮膜の耐摩耗性および耐焼付性等の摺動特性を改良す
るとともに、下地金属との色調差を大きくすることで工
業生産における性能保証面の問題を解決することを目的
としている。Similarly, in view of the above problems, the present invention develops a piston ring for an internal combustion engine, which is composed of a relatively inexpensive Cr as a main component and which is coated with a Cr—N—O type coating excellent in initial conformability. The purpose of this study is to improve the sliding characteristics such as wear resistance and seizure resistance of the coating, and to increase the color difference with the underlying metal to improve the performance assurance in industrial production. The purpose is to solve the problem.
【0013】[0013]
【課題を解決するための手段】本発明は、機械部品の摺
動部に、耐摩耗性および耐焼付性等の摺動特性に優れ且
つ初期なじみが良好で、下地金属との色調差が大きい皮
膜を設けることにより、上記課題を解決するものであ
る。すなわち、本発明に係わる摺動材料は、摺動面に、
クロム、窒素および酸素からなり、ビッカース硬さが1
000以上2000以下の皮膜を形成させることを特徴
とする。The present invention has excellent sliding characteristics such as abrasion resistance and seizure resistance, good initial familiarity, and a large color tone difference with a base metal, in sliding parts of machine parts. The above problem is solved by providing a film. That is, the sliding material according to the present invention has
Consisting of chromium, nitrogen and oxygen, with a Vickers hardness of 1
It is characterized in that a film of 000 or more and 2000 or less is formed.
【0014】また本発明は、少なくともシリンダーライ
ナーと摺動するピストンリングの摺動面に、耐摩耗性お
よび耐焼付性等の摺動特性に優れ且つ初期なじみが良好
で、下地金属との色調差が大きい皮膜を設けることによ
り、上記課題を解決するものである。すなわち、本発明
に係わる内燃焼機関用ピストンリングは、少なくともシ
リンダーライナーとの外周摺動面に、クロム、窒素およ
び酸素からなり、ビッカース硬さが1000以上200
0以下であり、厚さが1〜50μmのイオンプレーティ
ング皮膜を形成させることを特徴とする。Further, according to the present invention, at least the sliding surface of the piston ring which slides on the cylinder liner has excellent sliding characteristics such as wear resistance and seizure resistance, good initial familiarity, and a color tone difference from the base metal. The above problem is solved by providing a large coating film. That is, the piston ring for an internal combustion engine according to the present invention is made of chromium, nitrogen and oxygen at least on the outer peripheral sliding surface with the cylinder liner, and has a Vickers hardness of 1000 or more and 200 or more.
It is characterized in that an ion plating film having a thickness of 0 or less and a thickness of 1 to 50 μm is formed.
【0015】本発明によれば、イオンプレーティング、
真空蒸着、スパッタなどのPVD法により、クロムの蒸
気と、窒素ガス及び酸素ガスあるいは少なくとも窒素と
酸素を含むガスとを混合した気相と基体接触させること
により上記摺動材料を製造することができる。イオンプ
レーティングは陰極イオンプレーティングが好ましい
が、これに限定されず改訂5版金属便覧第903頁に例
示されているような各種方式を使用することができる。According to the present invention, ion plating,
The sliding material can be produced by bringing the vapor of chromium and a gas phase of a mixture of nitrogen gas and oxygen gas or a gas containing at least nitrogen and oxygen into a substrate by a PVD method such as vacuum deposition or sputtering. . Cathode ion plating is preferable as the ion plating, but the ion plating is not limited to this, and various systems such as those illustrated on page 903 of the revised 5th edition metallurgical handbook can be used.
【0016】皮膜を施す基材は鉄系材料が好ましく使用
できるがチタン系、アルミニウム系などであっても使用
可能である。さらに摺動材料の相手材は鉄系材料、アル
ミニウム系材料など各種材料からなるものであってよ
い。ピストンリングの摺動面に形成されるイオンプレー
ティング皮膜は厚さが1μm未満ではその効果がなく、
50μmを越えるても特に性能の向上がないので、1〜
50μmの範囲とする。The base material on which the coating is applied is preferably an iron-based material, but a titanium-based material, an aluminum-based material or the like can also be used. Further, the mating material of the sliding material may be made of various materials such as iron-based materials and aluminum-based materials. If the thickness of the ion plating film formed on the sliding surface of the piston ring is less than 1 μm, it has no effect.
Even if it exceeds 50 μm, there is no particular improvement in performance.
The range is 50 μm.
【0017】[0017]
【作用】クロムは窒素及び酸素と安定した硬質物質を作
る。特に窒素はクロムの硬度を著しく高める。その量が
少な過ぎても多過ぎても皮膜の硬さが低下し、皮膜の耐
摩耗性が低下するので、ビッカース硬さが1000未満
とならないように、窒素含有量を定める必要がある。酸
素は窒素と共存すると、皮膜の硬度を高め、かつ摺動特
性を改良しさらに皮膜色調を暗色(非金属色)にする。
酸素の量は微量でも摺動特性向上に有効ではあるが少な
過ぎると色調変化の作用が十分に発揮されないから、色
調の変化が検出できるように酸素を添加する必要があ
る。一方酸素の量が多過ぎると皮膜の硬さがビッカース
硬さで2000を超えると相手材の摩耗が多くなるの
で、窒素添加量はこの硬さ以下となるようにする必要が
ある。上記したクロム、窒素および酸素の比率は原子%
比でCr:N:O=l:0.9〜0.1:0.1〜1.
2の範囲であることが好ましい。Function Chromium forms a stable hard substance with nitrogen and oxygen. In particular, nitrogen significantly increases the hardness of chromium. If the amount is too small or too large, the hardness of the coating decreases and the wear resistance of the coating decreases. Therefore, it is necessary to determine the nitrogen content so that the Vickers hardness does not become less than 1000. When oxygen coexists with nitrogen, it enhances the hardness of the film, improves the sliding characteristics, and makes the film color dark (non-metallic).
Even if the amount of oxygen is small, it is effective for improving the sliding characteristics, but if it is too small, the effect of changing the color tone is not sufficiently exerted. Therefore, it is necessary to add oxygen so that the change in the color tone can be detected. On the other hand, when the amount of oxygen is too large, the hardness of the coating exceeds Vickers hardness of 2000, the wear of the mating material increases, so the amount of nitrogen added needs to be less than this hardness. The above-mentioned ratio of chromium, nitrogen and oxygen is atomic%
The ratio of Cr: N: O = 1: 0.9-0.1: 0.1-1.
It is preferably in the range of 2.
【0018】またイオンプレーティング皮膜を形成する
ためにはクロムとその他の成分は別別の供給源からガス
化する必要がある。窒素と酸素は別々のガスとして供給
してもよくあるいはNO2 、NOなどの化合物として供
給してもよい。In order to form the ion plating film, chromium and other components must be gasified from another source. Nitrogen and oxygen may be supplied as separate gases or may be supplied as compounds such as NO 2 and NO.
【0019】以下、Cr−N−O系イオンプレーティン
グ皮膜を比較対象として酸素を導入することによる作用
をより詳しく説明する。Hereinafter, the effect of introducing oxygen will be described in more detail with reference to a Cr-NO system ion plating film.
【0020】表1に実施例の方法により作製されたCr
−N系またはCr−N−O系の皮膜の一例を示す。C
r,NおよびOの原子%比は皮膜中の比率であり、ES
CA分析により決定した。表面粗さおよび成膜速度(R
dep)は、酸素原子%比の大小に関わらず同程度であ
った。皮膜硬さは酸素原子%比が大きくなるにしたがっ
て向上する傾向を示した。また皮膜の色調は酸素原子%
比が大きくなるにしたがって黒色が濃くなった。その他
の特性は酸素原子%比との関連はなかった。 表1 ガス比 表面粗さ μm 膜厚 Rdep 皮膜硬さ 色調 NoCr: N: O Ra Rmax Rz μm μm /min HmV 1:0.5:0.0 0.07 2.13 1.48 2.28 0.18 1320 銀色 1:0.5:0.5 0.09 1.66 1.20 2.24 0.17 1740 黒灰色 1:0.1:1.2 0.11 2.02 1.24 2.75 0.21 1860 黒色Table 1 shows the Cr produced by the method of Example.
An example of a -N-based or Cr-NO-based coating is shown. C
The atomic% ratio of r, N and O is the ratio in the film,
Determined by CA analysis. Surface roughness and deposition rate (R
Dep) was about the same regardless of the oxygen atomic% ratio. The coating hardness tended to increase as the oxygen atomic percentage increased. The color tone of the film is oxygen atom%
The black color became darker as the ratio increased. Other properties were not related to the atomic percentage of oxygen. Table 1 Gas ratio Surface roughness μm Film thickness Rdep Film hardness Color NoCr: N: O Ra Rmax Rz μm μm / min HmV 1: 0.5: 0.0 0.07 2.13 1.48 2.28 0.18 1320 Silver 1: 0.5: 0.5 0.09 1.66 1.20 2.24 0.17 1740 Black Gray 1: 0.1: 1.2 0.11 2.02 1.24 2.75 0.21 1860 Black
【0021】これらの皮膜について、200から700
℃の温度で空気中において1時間の熱処理を行った。熱
処理温度と皮膜硬さの関係を図3に示す。Cr−N系皮
膜およびCr−N−O系皮膜のいずれの皮膜も200℃
で熱処理を行うことにより熱処理を施さないas−de
poの皮膜に比べ皮膜硬さは向上した。更にその皮膜硬
さは、500℃までの温度でほとんど低下がみられなか
った。ところがCr−N系皮膜は熱処理温度500から
700℃の間で約50%程度の皮膜硬さの低下がみられ
た。これに対し、酸素原子%比が1.2のCr−N−O
系皮膜の皮膜硬さの低下は約25%程度であり、700
℃においてもCr−N−O系皮膜は高い皮膜硬さを有し
ている。従来、Cr−N系イオンプレーティング皮膜の
ビッカース硬さは1500程度と言われていたが、酸素
の導入により700℃で熱処理した後でもCr−N系イ
オンプレーティング皮膜に匹敵する硬さが得られた。し
たがってCr−N−O系イオンプレーティング皮膜は摺
動面の昇温に伴う摺動特性の劣化を十分に防げる摺動材
料であることがわかった。以下、実施例により本発明を
詳しく説明する。For these coatings, 200 to 700
The heat treatment was performed in air at a temperature of ° C for 1 hour. The relationship between the heat treatment temperature and the film hardness is shown in FIG. Both Cr-N-based coating and Cr-N-O-based coating are 200 ° C
As-de without heat treatment by performing heat treatment in
The film hardness was improved compared to the po film. Furthermore, the hardness of the film was hardly decreased at temperatures up to 500 ° C. However, the Cr-N-based coating showed a decrease in coating hardness of about 50% between the heat treatment temperatures of 500 and 700 ° C. On the other hand, Cr-N-O having an oxygen atom% ratio of 1.2
The decrease in film hardness of the system-based film is about 25%.
The Cr-N-O-based coating has a high coating hardness even at 0 ° C. Conventionally, the Vickers hardness of a Cr-N ion plating film was said to be about 1500, but even after heat treatment at 700 ° C by introducing oxygen, a hardness comparable to that of a Cr-N ion plating film was obtained. Was given. Therefore, it was found that the Cr-N-O type ion plating film is a sliding material capable of sufficiently preventing the deterioration of the sliding characteristics due to the temperature rise of the sliding surface. Hereinafter, the present invention will be described in detail with reference to examples.
【0022】[0022]
実施例1 鏡面仕上げされた高クロム鋼(JIS SUJ2)から
なる基体を予めフロン液中で超音波洗浄を行い、以下に
説明する手順でシリンダーライナーとの摺動面にアーク
式イオンプレーティング法によりCr−N−O系硬質皮
膜を形成した。Example 1 A mirror-finished high-chromium steel (JIS SUJ2) substrate was previously ultrasonically cleaned in a fluorocarbon solution, and the sliding surface with the cylinder liner was subjected to an arc ion plating method in the procedure described below. A Cr-NO hard coating was formed.
【0023】基体を超音波洗浄した後、イオンプレーテ
ィング装置の真空容器(チャンバ)内に取り付け、続い
てチャンバ内圧力が1.3×10-3Pa(パスカル)と
なるまで真空引きを行った。この真空度が達成された時
点から、チャンバ内に内蔵されているヒーターにより基
体を300〜600℃まで加熱して、基体表面に付着あ
るいは吸着しているガス成分を放出させ、その後200
℃まで冷却した。チャンバ内圧力が4×10-3Pa以下
となった時点で、陰極としたCrタ−ゲットの表面でア
ーク放電を発生させ、Crの大部分がイオン化された状
態でターゲット表面から飛出させた。この時基体を取り
付けた治具には−700〜−1000Vのバイアス電圧
を印加しておき、タ−ゲットから飛出したイオン化した
Crを基体と治具の表面に吸引し、さらにこれらのイオ
ンを高速で被処理面に衝突させた。After ultrasonically cleaning the substrate, the substrate was mounted in a vacuum container (chamber) of an ion plating apparatus, and then vacuumed until the pressure in the chamber reached 1.3 × 10 −3 Pa (pascal). . From the time when this degree of vacuum is achieved, the substrate is heated to 300 to 600 ° C. by the heater incorporated in the chamber to release the gas component adhering to or adsorbing on the substrate surface, and then 200
Cooled to ° C. When the pressure in the chamber became 4 × 10 −3 Pa or less, arc discharge was generated on the surface of the Cr target serving as the cathode, and most of the Cr was ejected from the target surface in the ionized state. . At this time, a bias voltage of -700 to -1000 V was applied to the jig to which the substrate was attached, the ionized Cr ejected from the target was attracted to the surfaces of the substrate and the jig, and these ions were further absorbed. It collides with the surface to be processed at high speed.
【0024】このようなイオン化した金属の衝突により
被処理面の酸化物などを削るいわゆるスパッタクリーニ
ングにより表面の活性化処理を行った。また、アーク放
電発生と同時に少量の窒素ガスをチャンバ内に導入する
ことにより一部のイオン化したCrは、窒素ガスと結合
し基体表面にCr−N系皮膜となって析出される。その
後、さらに窒素ガス流量を増やし、酸素ガスを所定量導
入し1.3Pa程度の圧力として、−20〜−100V
のバイアス電圧を印加して基体表面にCr−N−O系硬
質皮膜を形成させた。所定の膜厚形成後、チャンバ内温
度が150℃以下になるまで冷却してから、膜被覆され
た基体をチャンバ外に取り出した。比較のため、従来よ
り行われてきた酸素を導入しないCr−N系皮膜につい
ても同じ条件で作製した。The surface activation treatment was carried out by so-called sputter cleaning, in which oxides and the like on the surface to be treated were scraped by the collision of the ionized metal. Further, when a small amount of nitrogen gas is introduced into the chamber simultaneously with the occurrence of arc discharge, a part of ionized Cr is combined with the nitrogen gas and deposited as a Cr-N-based film on the surface of the substrate. Then, the flow rate of nitrogen gas is further increased, a predetermined amount of oxygen gas is introduced, and the pressure is set to about 1.3 Pa.
Was applied to form a Cr—N—O type hard coating on the surface of the substrate. After forming a predetermined film thickness, the temperature inside the chamber was cooled to 150 ° C. or lower, and then the film-coated substrate was taken out of the chamber. For comparison, a Cr—N-based coating that does not introduce oxygen, which has been conventionally used, was also prepared under the same conditions.
【0025】これらの膜をねずみ鋳鉄(FC25)を相
手材としてピンオンディスク型摩擦試験機によりスカッ
フ試験を行い耐焼付性を焼付加重で評価した。スカッフ
試験条件は以下の通りであった。 潤滑方法:モーターオイル#30、油温80℃、油量4
cc/sec 摩擦速度:8m/sec 接触荷重:初期2MPaから1MPaごとに増加させ、
焼付まで 摩擦時間:各荷重で180sec保持These films were subjected to a scuff test using a gray cast iron (FC25) as a mating material with a pin-on-disc type friction tester to evaluate the seizure resistance by baking load. The scuff test conditions were as follows. Lubrication method: Motor oil # 30, oil temperature 80 ° C, oil amount 4
cc / sec Friction speed: 8 m / sec Contact load: Increased from 2 MPa in the initial stage in steps of 1 MPa,
Friction time until baking: Holds for 180 seconds at each load
【0026】上記方法により得られた結果を図1に示
す。酸素を導入しないCr−N系皮膜では22MPa程
度のスカッフ値を示したが、酸素原子%比が0.5のC
r−N−O系皮膜では30MPa、酸素原子%比が1.
2のCr−N−O系皮膜では36MPaのスカッフ値を
示し、酸素を導入することにより耐焼付性は向上するこ
とがわかった。また、ピン−ドラム式摩耗試験機によ
り、ドラムにねずみ鋳鉄(FC25)を用いて摩耗試験
を行った。摩耗試験条件は、以下の通りであった。 潤滑方法:モーターオイル#30、油温80℃、油量8
cc/sec ドラム回転速度:5m/sec 接触荷重:1.5MPa 試験時間:30ksecThe results obtained by the above method are shown in FIG. The Cr-N based film in which oxygen was not introduced showed a scuff value of about 22 MPa, but the oxygen atomic% ratio was 0.5%.
The r-N-O-based film has a pressure of 30 MPa and an oxygen atom% ratio of 1.
The Cr—N—O based coating of No. 2 showed a scuff value of 36 MPa, and it was found that the introduction of oxygen improves the seizure resistance. Further, a wear test was conducted by using a pin-drum type wear tester and using gray cast iron (FC25) for the drum. The wear test conditions were as follows. Lubrication method: Motor oil # 30, oil temperature 80 ° C, oil amount 8
cc / sec Drum rotation speed: 5 m / sec Contact load: 1.5 MPa Test time: 30 ksec
【0027】皮膜を被覆したピンの摩耗量とドラムの摩
耗量をまとめて図2に示す。ここで、ピンの摩耗量は摩
耗した接触面のドラム回転方向の幅、ドラムの摩耗量は
ドラムの摩耗深さより求めた。ドラムの摩耗量に着目す
ると、Cr−N系皮膜に対してCr−N−O系皮膜にお
いても、ほぼ同程度の摩耗量であった。一方、ピンの摩
耗量に着目すると、酸素原子%比を大きくするにしたが
ってその摩耗量は減少した。The amount of wear of the pin coated with the coating and the amount of wear of the drum are shown together in FIG. Here, the wear amount of the pin was obtained from the width of the worn contact surface in the drum rotation direction, and the wear amount of the drum was obtained from the wear depth of the drum. Focusing on the amount of wear of the drum, the amount of wear was almost the same in the Cr—N—O based coating as compared with the Cr—N based coating. On the other hand, focusing on the wear amount of the pin, the wear amount decreased as the oxygen atomic% ratio was increased.
【0028】以上のスカッフ試験および摩耗試験の結果
からCr−N系皮膜よりも酸素導入したCr−N−O系
皮膜は、耐焼付性に優れ、初期なじみが良好であり、ま
た皮膜硬さが高いことから、皮膜自体の摩耗を抑えるこ
とがわかった。また、これらの皮膜の色調をみると、酸
素を導入しないCr−N系皮膜では銀色であったのに対
し、酸素原子%比が0.5のCr−N−O系皮膜では黒
灰色、酸素原子%比が1.2のCr−N−O系皮膜では
黒色を呈しており、酸素原子%比が大きくなるに従って
黒色になっていた。Cr−N−O系皮膜とすることによ
り下地金属と皮膜との色調差が大きい。From the results of the above scuffing test and abrasion test, the Cr-N-O based film in which oxygen is introduced is superior to the Cr-N based film in seizure resistance, good initial familiarity, and film hardness. Since it is high, it was found that the wear of the coating itself was suppressed. Further, the color tone of these films was silver in the Cr-N-based film in which oxygen was not introduced, whereas it was black gray and oxygen in the Cr-N-O-based film having an oxygen atomic ratio of 0.5. The Cr-N-O based film having an atomic% ratio of 1.2 was black, and became blacker as the oxygen atomic% ratio increased. The Cr-N-O type coating causes a large difference in color tone between the underlying metal and the coating.
【0029】実施例2 ステンレス鋼(JIS規格SUS440C)からなるピ
ストンリングで呼び径×幅×厚さ=φ86mm×2mm
×3mmのものを非処理材とし、実施例1と同様にアー
ク式イオンプレーティング法によるCr−N−O系硬質
皮膜を行った。また、実施例と同様な試験方法により皮
膜の特性を評価した。Example 2 Piston ring made of stainless steel (JIS standard SUS440C) Nominal diameter × width × thickness = 86 mm × 2 mm
A non-treated material having a size of 3 mm was used to perform a Cr-NO hard coating by the arc ion plating method in the same manner as in Example 1. In addition, the characteristics of the film were evaluated by the same test method as in the examples.
【0030】耐焼付き性を図4に、耐摩耗性を図5にそ
れぞれ示す。これらの結果はそれぞれ図1、2と同様で
あった。FIG. 4 shows seizure resistance and FIG. 5 shows wear resistance. These results were similar to those in FIGS.
【0031】[0031]
【発明の効果】以上のように、摺動面にCr−N−O系
皮膜を被覆することにより、従来より行われてきたCr
−N系皮膜を被覆するよりも初期なじみが良好であり、
耐摩耗性および耐焼付性に優れた摺動材料が得られる。
さらに、皮膜と下地金属との色調差が大きいことからポ
リシング後の皮膜の自動検査が可能となり、性能保証面
や経済的な面で優位性の高い摺動材料が得られる。As described above, by coating the sliding surface with the Cr--N--O type coating, the conventional Cr treatment has been performed.
Initial familiarity is better than coating with -N-based film,
A sliding material having excellent wear resistance and seizure resistance can be obtained.
Further, since the color tone difference between the coating and the base metal is large, it is possible to automatically inspect the coating after polishing, and a sliding material having a superior performance guarantee and economical advantages can be obtained.
【0032】また、ピストンリングの少なくとも外周摺
動面にCr−N−O系皮膜を被覆することにより、従来
のCr−N系皮膜よりも耐摩耗性および耐焼付性などの
摺動特性に優れ、且つシリンダーライナーを摩耗させる
ことなく、初期なじみが良好なピストンリングが得られ
る。また、Cr−N−O系皮膜を被覆したピストンリン
グは、高温領域での皮膜硬さの低下率が小さく、摺動面
の昇温に伴う摺動特性の劣化を防ぐことができる。さら
に、皮膜と下地金属との色調差が大きいことから皮膜の
自動検査が可能となり、性能保証面で優位性の高いピス
トンリングが得られる。Further, by coating at least the outer peripheral sliding surface of the piston ring with a Cr--N--O type coating, the sliding characteristics such as wear resistance and seizure resistance are superior to those of the conventional Cr--N type coating. In addition, a piston ring with good initial familiarity can be obtained without wearing the cylinder liner. Further, the piston ring coated with the Cr—N—O type coating has a small rate of decrease in coating hardness in the high temperature region, and can prevent deterioration of sliding characteristics due to temperature rise of the sliding surface. Furthermore, since the color tone difference between the coating and the base metal is large, automatic inspection of the coating is possible, and a piston ring with a superior performance guarantee can be obtained.
【図1】実施例1のスカッフ試験結果を示す図である。FIG. 1 is a diagram showing a result of a scuff test in Example 1.
【図2】実施例1の摩耗試験結果を示す図である。FIG. 2 is a diagram showing a result of a wear test of Example 1.
【図3】陰極アークプラズマ方式イオンプレーティング
により作製されたCr−N−O系皮膜の熱処理温度と皮
膜硬さの関係を示す図である。FIG. 3 is a diagram showing a relationship between a heat treatment temperature and a film hardness of a Cr—N—O based film produced by cathodic arc plasma type ion plating.
【図4】実施例1のスカッフ試験結果を示す図である。FIG. 4 is a diagram showing a result of a scuff test in Example 1.
【図5】実施例1の摩耗試験結果を示す図である。5 is a diagram showing the results of an abrasion test of Example 1. FIG.
Claims (5)
カース硬さが1000以上2000以下であるCr−N
−O系皮膜を基体に被覆したことを特徴とする摺動材
料。1. A Cr-N composed of chromium, nitrogen and oxygen and having a Vickers hardness of 1000 or more and 2000 or less.
A sliding material having an -O-based coating on a substrate.
が、Cr:N:O=l:0.9〜0.1:0.1〜1.
2の範囲であることを特徴とする請求項1記載の摺動材
料。2. The atomic% ratio of chromium, nitrogen and oxygen is Cr: N: O = 1: 0.9 to 0.1: 0.1 to 1.
The sliding material according to claim 1, wherein the sliding material has a range of 2.
および酸素からなり、ビッカース硬さが1000以上2
000以下であるイオンプレーティング皮膜が1〜50
μmの厚さに形成されていることを特徴とするピストン
リング。3. A Vickers hardness of 1000 or more 2 made of chromium, nitrogen and oxygen on at least the outer peripheral sliding surface.
Ion plating film of 000 or less is 1 to 50
A piston ring having a thickness of μm.
が、Cr:N:O=1:0.9〜0.1:0.1〜1.
2の範囲であることを特徴とする請求項3記載のピスト
ンリング。4. The atomic% ratio of chromium, nitrogen and oxygen is Cr: N: O = 1: 0.9 to 0.1: 0.1 to 1.
The piston ring according to claim 3, wherein the piston ring has a range of 2.
ガス及び酸素ガスあるいは少なくとも窒素と酸素を含む
ガスとを混合した気相と基体接触させることを特徴とす
る請求項1又は2記載の摺動材料の製造方法。5. The slide according to claim 1 or 2, wherein a vapor phase of chromium and a gas phase in which nitrogen gas and oxygen gas or a gas containing at least nitrogen and oxygen are mixed are brought into contact with the substrate by the PVD method. Method of manufacturing moving materials.
Priority Applications (1)
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JP4289549A JP2757974B2 (en) | 1992-07-17 | 1992-10-02 | piston ring |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP21236192 | 1992-07-17 | ||
JP4-212361 | 1992-07-17 | ||
JP4289549A JP2757974B2 (en) | 1992-07-17 | 1992-10-02 | piston ring |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0681952A true JPH0681952A (en) | 1994-03-22 |
JP2757974B2 JP2757974B2 (en) | 1998-05-25 |
Family
ID=26519177
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JP4289549A Expired - Lifetime JP2757974B2 (en) | 1992-07-17 | 1992-10-02 | piston ring |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08247287A (en) * | 1995-03-09 | 1996-09-24 | Ckd Corp | Piston in cylinder and manufatrue thereof |
US5582414A (en) * | 1993-06-07 | 1996-12-10 | Teikoku Piston Ring Co., Ltd. | Sliding member and method for manufacturing the same |
CN103695843A (en) * | 2013-12-25 | 2014-04-02 | 湖南中航超强金刚石膜高科技有限公司 | Preparation technology of diamond-like film coated spheroidal graphite cast iron piston ring |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007084840A (en) * | 2005-09-20 | 2007-04-05 | Nagaoka Univ Of Technology | High hardness material and its manufacturing method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60224773A (en) * | 1984-04-24 | 1985-11-09 | Seiko Epson Corp | Ornamental parts |
JPS6283461A (en) * | 1985-10-09 | 1987-04-16 | Seiko Epson Corp | External parts for timepiece |
JPH01159449A (en) * | 1987-12-15 | 1989-06-22 | Riken Corp | Piston ring with compound nitriding layer |
JPH024954A (en) * | 1988-04-30 | 1990-01-09 | Seiko Epson Corp | Outer ornament parts for watch |
-
1992
- 1992-10-02 JP JP4289549A patent/JP2757974B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60224773A (en) * | 1984-04-24 | 1985-11-09 | Seiko Epson Corp | Ornamental parts |
JPS6283461A (en) * | 1985-10-09 | 1987-04-16 | Seiko Epson Corp | External parts for timepiece |
JPH01159449A (en) * | 1987-12-15 | 1989-06-22 | Riken Corp | Piston ring with compound nitriding layer |
JPH024954A (en) * | 1988-04-30 | 1990-01-09 | Seiko Epson Corp | Outer ornament parts for watch |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5582414A (en) * | 1993-06-07 | 1996-12-10 | Teikoku Piston Ring Co., Ltd. | Sliding member and method for manufacturing the same |
JPH08247287A (en) * | 1995-03-09 | 1996-09-24 | Ckd Corp | Piston in cylinder and manufatrue thereof |
CN103695843A (en) * | 2013-12-25 | 2014-04-02 | 湖南中航超强金刚石膜高科技有限公司 | Preparation technology of diamond-like film coated spheroidal graphite cast iron piston ring |
Also Published As
Publication number | Publication date |
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JP2757974B2 (en) | 1998-05-25 |
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