JPH067882Y2 - Peripheral surface grinding machine for hard and brittle materials - Google Patents

Description

TECHNICAL FIELD The present invention relates to an apparatus for copying and grinding the outer peripheral surface of a hard brittle material such as a wafer used for an IC chip or a photomask for printing a circuit pattern on the wafer. is there.

Prior Art This wafer is made of silicon and the photomask is made of fused silica. Therefore, since the material of the wafer and the photomask is expensive, it is desirable to reduce the outer peripheral surface processing and the chamfering processing as much as possible to improve the material yield. However, in the conventional outer peripheral surface grinding machine, the work feeding mechanism that transfers the work from the stocker portion to the grinding portion merely pushes the work from the rear, so that the work can be accurately fed to the grinding portion. For this reason, the center of the work is displaced and the outer peripheral surface has to be shaved off by a large amount. As described above, increasing the cutting allowance of the work increases the grinding time and increases the wear of the grindstone, which gives a certain limit to the life of the grindstone.

Further, a hard brittle material such as a wafer is arranged coaxially with a model having a shape after the outer peripheral surface is processed in the outer peripheral surface processing step, and is ground so that the outer peripheral surface has the same shape as this model. In the conventional peripheral surface grinding machine, the rotational angle position of the model is controlled by a limit switch, as described in, for example, Japanese Patent Application Laid-Open No. 52-127692. However, the positioning control by the limit switch has an error due to the inertia of the mechanism for rotating the model and the like, and therefore cannot be said to be sufficiently accurate for grinding an expensive material such as a wafer.

SUMMARY OF THE INVENTION In consideration of the above points, the present invention has an outer peripheral surface that allows the model to be easily and accurately positioned, and that the workpiece to be ground is always coaxial with the model and oriented in the same angular direction. The purpose is to provide a grinding machine.

Configuration of the Invention An outer peripheral surface grinding apparatus according to the present invention is characterized by having the following constituent requirements (a) to (g).

That is, (a) a fixed frame having a stocker portion for holding the workpiece before processing and a guide rail extending from the stocker portion, and (b) a model provided on the fixed frame and having a peripheral shape after grinding the workpiece. A work support mechanism that coaxially and integrally supports the work, (c) a rotation drive mechanism that rotates the work support mechanism around the axis of the model, and (d) is integrally connected to the work support mechanism. An engaging portion formed on the outer peripheral surface of the fixed disc, a locking pin that engages with the engaging portion when the work supporting mechanism is stopped and adjusts the rotational angle position of the supporting mechanism, and the rotation driving mechanism. A stopper mechanism having a clutch for transmitting and shutting off the rotational driving force to the work supporting mechanism and for shutting off the rotational driving force when the locking pin engages with the engaging portion, (e) Reciprocating to the fixed frame. Movement A stylus that is rotatably supported by the housing around the axis and is engageable with the outer peripheral surface of the model, and has the same outer shape as the stylus, and is coaxial with the stylus in the housing. A grindstone that is rotatably supported to grind the outer peripheral surface of the work, and a copying mechanism that includes a drive motor that rotates the grindstone, (f) Reciprocally supported along the guide rail,
There is one claw capable of gripping the outer peripheral surface of the work by expanding and contracting by the same amount in the orthogonal direction of the guide rail, and these claws position and receive the work at the stocker portion, and the work is received. A work supply mechanism that supplies the support mechanism, and (g) a work discharge mechanism that removes the ground work from the work support mechanism.

Embodiments The present invention will be described below with reference to illustrated embodiments.

FIGS. 1 (a) and 1 (b) show examples of the shape of a work, and a wafer and a photomask made of a hard and brittle material have a square shape or a partially cut round shape as shown in these figures. Initially, these workpieces are formed to be slightly larger as indicated by an imaginary line I, and the outer peripheral surface is ground and chamfered by an outer peripheral surface grinding device to be described below to be formed into a shape indicated by a solid line R. The outer peripheral surface grinding apparatus according to the present embodiment has an imaginary line I and a solid line R.
The cutting allowance corresponding to the portion between the two can be markedly reduced as compared with the conventional device.

2 and 3 show the entire apparatus of this embodiment. In these figures, a work support mechanism 200, a rotation drive mechanism 300, and a stopper mechanism 400 are arranged in the approximate center of the fixed frame 100, the copying mechanism 500 is on the right side, the work supply mechanism 600 is on the left side, and the front side is the work supply mechanism 600. Each is provided with a work discharge mechanism 700. One of the flat plate-shaped works W stacked and stored in the stocker 601 of the work supply mechanism 600 is taken out and transferred to the work support mechanism 200, and the grindstone of the copying mechanism 500.
After being ground to 501, it is taken out by the work discharge mechanism 700 and discharged into the water tank 701 fixed to the front surface of the fixed frame 100.

The work supporting mechanism 200 has a fixed frame 1 as shown in FIG.
A lower shaft portion 201 provided in 00 and an upper shaft portion 202 provided above the fixed frame 100, and a chuck 203 provided at an upper end portion of the lower shaft portion 201 and a lower end of the upper shaft portion 202. The work W is clamped by the upper plate 204 provided in the section.

A cylinder device 205 is located at the lower end of the lower shaft portion 201, and a rotary shaft 208 is connected via a joint 207 to a rod 206 supported by the cylinder device 205 so as to be vertically movable and extending upward. The rotating shaft 208 is supported by a sleeve 209 fixed to the fixed frame 100, is rotatable about a vertical axis with respect to the upper member 210 of the joint 207, and moves up and down together with the rod 206. The upper end of the rotary shaft 208 projects upward from the sleeve 209, and the chuck 203 is fixed to the projecting end. Numerous holes (not shown) are formed on the upper surface of the chuck 203, and negative pressure can be supplied to these holes from a vacuum source (not shown) provided in the fixed frame 100. This negative pressure is generated by the joint 207. It is supplied via the upper member 210 and the rotating shaft 208. This negative pressure serves to attract the work W transferred by the work supply mechanism 600 and prevent the work W from being displaced.

The upper shaft portion 202 of the work supporting mechanism 200 is rotatably supported by the casing 10 about the axis, as shown in FIG. A lower portion of the rotary shaft 212 rotatably supported by the casing 10 via bearings 211 and 213 projects from the casing 10, and the model M and the upper plate 204 are fixed to the projecting portion.
The outer peripheral shape of the model M has a shape after grinding the work, while the work W is supplied by the work supply mechanism 600 so as to face the same angle just below the model M as described later.

Then, when the work W is sent to the upper surface of the chuck 203 of the work support mechanism 200, a negative pressure is induced on the upper surface of the chuck 203, and the work W is adsorbed on this surface, and then the work of the cylinder device 205 is performed. W is the upper plate 204 of the upper shaft portion 202
Rise until it touches. Here, the negative pressure of the chuck 203 is released, and the work W is clamped by the chuck 203 and the upper plate 204, and is supported coaxially at the same angular position as the model M. The model M and the work W are coaxially and integrally rotated by a rotary drive mechanism 300 described below, and the work W is ground during the rotation.

The rotary drive mechanism 300 includes a gear 302 fitted to the upper part of the rotary shaft 212 via a bearing 301 and a drive motor (not shown), and via the clutch 401, the rotary shaft 212, that is, the model M and the workpiece W. And are driven to rotate.

The stopper mechanism 400 is for determining the initial stop position of the rotary shaft 212. Therefore, the stopper mechanism 400 includes the fixed disc 402 fixed above the bearing 211 of the rotary shaft 212.
And a locking pin 404 that engages with the notch 403 formed on the outer peripheral surface of the fixed disc 402. The locking pin 404 is attached to the tip of the piston rod 406 of the cylinder device 405 fixed to the business trip section 11 of the casing 10, and can be brought into contact with and separated from the outer peripheral surface of the fixed disc 402. Notch 403 is a fixed disc 402
It is a conical groove formed at one location on the outer peripheral surface of the, and the tip of the locking pin 404 has a conical shape corresponding to the shape of the notch 403 (see FIG. 4 (b)). As a result, the rotary shaft 2
Even if the positions of the notch 403 and the locking pin 404 are slightly displaced when the 12 is stopped, the displacement is corrected by the locking pin 404 moving forward and engaging with the notch 403. That is, the rotating shaft 212
Is designed to stop at a substantially predetermined position in response to a rotational position signal detected by an encoder provided coaxially therewith. Modified by stop pin 404.
The cylinder device 405 is driven by the action of the cam dog 412 fixed to the upper part of the rotary shaft 212 and the proximity switch 413.

In order to facilitate the action of correcting the positional deviation of the rotary shaft 212 by the locking pin 404, the stopper mechanism 400 is provided with the clutch 401.
With this, the connection between the rotary shaft 212 and the gear 302 can be cut off. Fixed clutch plate for clutch 401 4
07 is integrally fixed to the gear 302, and the movable clutch 408
Is fitted to the rotary shaft 212 via a key 409 so as to be movable back and forth in the axial direction. The movable clutch plate 408 is coupled to the fixed clutch plate 407 in the raised position, released from the fixed clutch plate 407 in the lowered position, and the ascending / descending operation is performed by the solenoid 410. The solenoid 410 is attached to the inner wall of the casing 10. An annular groove 411 formed on the lower surface of the movable clutch plate 408.
The movable clutch plate is fitted inside and is energized.
408 is urged upward to bring the clutch 401 into the connected state.

Then, while the grinding of the work W is completed and the next work is supplied, the clutch 401 cuts off the rotation drive mechanism 300 and the rotary shaft 212 by stopping the power supply of the solenoid 410, thereby rotating the work. The locking pin 404 causes the shaft 212 to rotate easily. When the locking pin 404 moves forward and engages with the notch 403 in this state, the rotary shaft 212 easily rotates and the model M is accurately positioned.

The copying mechanism 500 basically has a conventionally known configuration. That is, as shown in FIGS. 2 and 3, the housing 502 is a guide rail 503 mounted on the upper surface of the fixed frame 100.
The cylinder device 504 performs rapid feed between a work position close to the work W and a retracted position away from the work W, and the reciprocating motion at the work position is performed by an air balance 505 as will be described later. And the stylus 506 acts. The stylus 506 is rotatably fitted to the support shaft 507 (see FIG. 5) of the housing 502, and has the same outer shape as the grindstone 501 coaxially provided immediately therebelow. The grindstone 501 is rotationally driven at high speed by the drive motor 521, while the stylus 506 is rotated by the frictional force received from the model M unlike the grindstone 501. Stylus 50
The 6 and the grindstone 501 are integrally connected in the vertical direction, and these are driven up and down by a lifting motor 508.

As shown in detail in FIG. 5, the stylus 506 has a disc shape, and the outer peripheral surface of the stylus 506 is engageable with the outer peripheral surface of the model M.
Further, the grindstone 501 has upper and lower slope portions 509 and 510 so as to chamfer the workpiece W while the outer peripheral surface of the grindstone 501 slidably contacts the outer peripheral surface of the workpiece W and has a cylindrical portion 511 therebetween. .

Next, the grinding action of the work W will be described.

When a new work W is supplied to the work support mechanism 200,
The cylinder device 504 operates to advance the housing 502 at a relatively high speed. When the housing 502 is moved to the advanced end, that is, the working position, the housing 502, an elongated hole (not shown) formed therein, and a piston rod 512 of the cylinder device 504.
And the housing 502 can be moved back and forth within a range in which the pin can move in the long hole even when the piston rod 512 is stopped. That is, the wire 513 having the air balance 505 connected to one end is connected to the bolt 514 of the housing 502, and the middle of the wire 513 is the roller 51 of the fixed frame 100.
The housing 502 is air balanced.
The stylus 506 is constantly urged to the left in the figure by 505, and the stylus 506 is pressed by the model M to move to the right. Therefore, the model M
Stylus 50 that engages with this model M with the rotation of
By the action of 6, the housing 502 reciprocates, whereby the grindstone 501 also reciprocates to grind the work W to the same outer shape as the model M.

6 (a), (b), and (c) show the process of grinding the work W. As shown in FIG. As shown in FIG. 6A, the grindstone 501 first rough-grinds the outer peripheral surface of the work W. That is, while the workpiece W slowly rotates together with the model M, the grindstone 501 rotates at high speed and slowly rises, during which rough grinding is performed. When the inclined surface portion 510 below the grindstone 501 engages with the lower peripheral edge of the work W, the ascending operation of the grindstone 501 is stopped, and FIG.
Chamfering of this lower peripheral edge is performed as shown in FIG. When the work W is rotated one to one and a half times and the lower chamfering is completed, the grindstone 501 descends at a relatively high speed, and the outer peripheral surface of the work W is subjected to finish grinding. Slope 5 above grindstone 501
When 09 is engaged with the upper peripheral edge of the work W, the lowering operation of the grindstone 501 is stopped, and as shown in FIG. 6 (c), the upper peripheral edge is chamfered during the rotation of the work W. After that, the grindstone 501 is retreated at high speed by the action of the cylinder device 504, and the work of grinding the work W is completed.

Next, the chuck 203 is lowered by the action of the cylinder device 205 of the work supporting mechanism 200. At this time, air is supplied to the lower surface of the upper plate 204 through the rotary shaft 212, so that the work W is easily moved from the upper plate 204. It will be released. That is, the rotary shaft 212 from a pressure source (not shown) via the inlet pipe 214.
The air fed to the shaft passage (not shown) of the above is sent to the recessed portion 215 of the upper plate 204 through this passage to urge the work W from the upper side to the lower side, and the work W will be described later. Ejection mechanism
Delivers smoothly to 700.

Now, in the above work grinding process, the work support mechanism 20
The rotation speed of 0, that is, the rotation speed of the model M is not constant but speed switching is performed, and when the model M is a prism,
During one rotation of the model M, the rotation speed is continuously switched between high speed and low speed. This will be explained with reference to FIG.
When the rotation speed of the model M is constant, the corner C of the model M,
Alternatively, when the central portion S of the side contacts the stylus 506, the stylus 506 does not move back and forth so fast due to the rotation of the model M, but when the portion P slightly away from the corner C contacts the stylus 506, The rotation causes stylus 506 to move relatively quickly. In this embodiment,
The corner portion C and the center portion S of the model M have the stylus 506 so that the moving speed of the stylus 506 is substantially uniform.
The rotation speed of the model M is increased when the stylus 506 contacts the stylus 506, and the rotation speed of the model M is decreased when the stylus 506 contacts the stylus 506. Therefore, in order to switch the rotation speed of the drive motor, the casing 1 of the rotary shaft 212 is changed.
A non-contact type dog 303 is provided on the protruding portion from 0 and a sensor 304 is attached in the vicinity thereof, and when a protrusion (not shown) of the dog 303 approaches the sensor 304, an electric signal is generated. ) The speed of the drive motor is relatively changed. The dog 303 and the sensor 304 are also part of the rotary drive mechanism 300.

In this way, the stylus 506, that is, the grindstone 501, moves at a substantially uniform speed and does not move at a relatively high speed. Therefore, the grindstone 501 does not escape from the work W quickly, and sufficient grinding can be performed. Chipping at the edge of W can be prevented.

FIG. 8 shows the work supply mechanism 600 and the work discharge mechanism 700.

The stocker 601 superimposes and supports the work W on the flat plate, and four side contact portions 602 support each side surface of the superposed work W, and are suitable for the size of the work W. The position can be adjusted laterally. In this embodiment, the case where the stocker 601 supports the rectangular work W is shown.

Below the stocker 601, a pair of claws 60 for taking out one work W and supplying it to the work support mechanism 200.
3,604 are provided. The claws 603 and 604 are configured such that the inner peripheral portions of the "dogleg shape" are opposed to each other and the corner portion of the work W is fitted in the center of the inner peripheral portion. These claws 603, 604 are movably supported by a plate member 605 via a guide member (not shown), and the plate member 605 is reciprocally movable along a guide rail 606 provided on the upper surface of the fixed frame 100. This plate member 605
A support plate 607 extending along the longitudinal direction of the guide rail 606 is fixed to the upper surface of the plate member 605 and the support plate 607.
It reciprocates by being driven by the cylinder device 608.

9 and 10 show the support plate 607 removed to explain the principle of expansion / contraction operation of the claws 603 and 604, and a guide member 609 is shown on the upper surface of the plate member 605. Guide member
609 is supported so as to be relatively movable in the left-right direction in the drawing with respect to the plate member 605, and by this relative movement, the claws 603,
Each 604 is moved by the same amount. L-shaped levers 612 and 613 are pivotally supported on the lower surface of the plate member 605 via pins 610 and 611, respectively, and one end of the lever 612 is engaged with a recess 615 of the guide member 609 via a drive roller 614. The other end of the lever 612 is connected to the claw 603 via a connecting roller 616. That is, the drive roller 614 moves integrally with the guide member 609 in the left-right direction in the figure, whereby the lever 612 is rotationally displaced and the claw 603 moves in the up-down direction in the figure. Similarly, the other claw 604 is also connected to the lever 613 via the connecting roller 617, and
613 is connected to a guide member 609 via a guide roller 618. A guide member 609 is attached to the support plate 605.
Guide rollers 619, 620, 621, for translation with respect to
622 are provided, and these rollers are the guide grooves of the guide member 609.
623, 624, 625, 626 respectively.

FIG. 10 shows a connecting structure of the plate member 605 and the piston rod 628 of the cylinder device 608. The end plate 627 is integrally fixed to the plate member 605 via a connecting member (not shown), and the end plate 6
The connecting rod 634 formed at the tip of the piston rod 628 penetrates the hole 633 formed in the hole 27. This connecting rod 634
A collar member 631 for retaining is fixed to the protruding portion of the hole 633 of the rod 633, and a collar 629 is fitted to the piston rod 628 side of the connecting rod 634 and the collar 629 and the end plate 627 are attached.
A spring 630 is provided between and. Since the spring 630 has a large elastic force, the end plate 627 is positioned relatively forward with respect to the connecting rod 634 and is locked to the collar member 631 when the claws 603 and 604 do not grip the work. That is, the piston rod 628 and the plate member 605 are connected by the collar 629, the spring 630, the connecting rod 634, the flange member 631, and the end plate 627.

The flange portion 629a of the collar 629 fits into the engagement groove 632 formed on the lower surface of the guide member 609 with some play. FIG. 10 shows a state in which the piston rod 628 advances and the end plate 627 abuts on the stopper 635 attached to the fixed frame 100. In this state, the flange portion 629a of the collar 629 is engaged with the engaging groove 632.
It is in a neutral state in the central part of. That is, the guide member 60
9 can move freely with respect to the plate member 605 within a range until the flange portion 629a hits the inner wall of the engaging groove 632.
Within this range, the claws 603 and 604 can freely expand and contract. On the other hand, when the piston rod 628 retracts to the left in the drawing from this state, the collar 629 moves the end plate 627 by the action of the spring 630.
Then, the flange portion 629a of the collar 629 comes into contact with the inner wall on the left side of the engagement groove 632 to move the guide member 609 to the left side in the drawing with respect to the plate member 605. As a result, the claws 603 and 604 are closed.

11 (a) and 11 (b) show the expansion / contraction operation of the claws 603 and 604. FIG. 11 (a) shows a state in which the work W is gripped and transferred, and as can be understood from this figure, the edge of the work W has a claw.
It is placed on the stepped portions 636 and 637 formed inside the 603 and 604. That is, the step portions 636 and 637 are formed slightly lower than the other portions, and the peripheral surface of the work W is supported by the wall surfaces 638 and 639 formed at the base of the step portions 636 and 637. When the work W is transferred to the work supporting mechanism 200, the end plate 627 abuts on the stopper 635 as shown in FIG. 10, whereby the engagement between the guide member 609 and the collar 629 is released and the guide is performed. The member 609 no longer receives the elastic force of the spring 630,
The force to close 603, 604 is released. Then, the work W is received by the work supporting mechanism 200, and then the claws 603 and 604 are received.
Retracts with piston rod 628.

When the claws 603 and 604 retract to the position of the stocker 601, the fixed frame
Open cylinders 640 and 641 provided on 100 (Fig. 11 (b))
Piston rods 642 and 643 (located in the lower side of the support plate 607 in FIG. 8) protrude to guide the guide member.
Press 609 and move it relatively forward to
As shown in FIG. 1 (b), the claws 603 and 604 are opened. At this time, the next work is falling between the claws 603 and 604.
Next, when the piston rods 642, 643 retract and release the guide member 609, the guide member 609 relatively retracts under the force of the spring 630, and the pawls 603, 604 close again to grip the work.
Hereinafter, the same operation as above is repeated.

The operation of the support plate 607 will be described with reference to FIG. 8 again. The support plate 607 is for preventing other works stacked on the stocker 601 from dropping while the works W are transferred by the claws 603 and 604. That is, the claws 603 and 604 take out the bottom one of the stacked works, but the support plate 607 moves forward together with the claws 603 and 604 to support the works stacked on the taken out works. Hand nail
When the 603 and 604 return to the retracted position again, the support plate 607 retracts from below the work and drops the work between the claws 603 and 604. The support plate 607 is formed with long holes 752 and 753 that engage with the bolts 750 and 751 fixed to the plate member 605 so that the position can be adjusted according to the size of the work. The work discharge mechanism 700 is
As shown in FIG. 8, it has a conventionally known structure, and the work W after grinding is taken out from the work supporting mechanism 200 and discharged to the water tank 701. The transfer member 702 supports the work W from below, and a guide rod 703 provided on the fixed frame 100.
Is supported by a support member 705 which is supported so as to be reciprocally movable along the axis. This reciprocating drive is performed by a piston 704. The transfer member 702 is swingable with respect to the support member 705 via a pin 706 fixed to the support member 705. In order to perform this swing, the transfer member 702 is provided with a cam follower 707 and a guide rod. Cam 708 on the work support side of 703
Is provided. The transfer member 702 is biased counterclockwise in the figure by a spring (not shown), and when it is on the water tank 701 side, the end plate 709 is directed to the water tank 701 side as shown in the figure, and moves to the work support mechanism side. When the cam follower 707 is the cam 708
It rotates about 90 degrees clockwise by engaging the
709 is directed toward the work support mechanism side, that is, the work side, and enters below the work. Then, when the work is received, it retreats to the original position, and the end plate 709 is again directed toward the water tank 701 side to the discharge plate.
It stops at the ground of 710. The piston 704 is electrically driven and stopped at the moving end by the action of the limit switches 711 and 712.

The discharge plate 710 is for moving the work into the water tank 701. The discharge plate 710 is fitted into the notch 713 of the transfer member 702, rocks around the pin 714 to scoop up the work from below, and the work is transferred to the transfer member 702. Take out from. Then, the work slides on the upper surface of the discharge plate 710, falls into the water tank 701, and is stored in the water.

Since the apparatus of this embodiment has the above configuration, the work is ground as follows.

First, the bottom work of the works supported by the stocker 601 is gripped by the claws 603 and 604, and the work support mechanism 200
Be transferred to. The work W is placed on the chuck 203, where the gripping force of the claws 603 and 604 is released. At the same time, a negative pressure is generated on the upper surface of the chuck 203, and the work W is attracted to the chuck 203. Then, the work W gripped by the pair of claws 603 and 604 that expands and contracts by the same amount as each other is transferred with its center point aligned with the center point of the chuck 203, that is, the center of rotation, and may be attracted to the chuck 203 to be displaced. Disappears.

In this state, the chuck 203 is lifted and the work W is chucked by the chuck 2
It is sandwiched between 03 and the upper plate 204, and the negative pressure of the chuck 203 disappears here. Next, the copying mechanism 500 approaches, the stylus 506 engages with the model M, and the grindstone 5
01 contacts the work W. The grindstone 501 rotates at a high speed and rises, and at the same time, the model M and the work W rotate at a low speed, so that the outer peripheral surface of the work W is roughly ground. Model M
The rotation speed of the workpiece W is high when the corner portion C and the central portion M are engaged with the stylus 506, and is slow otherwise, so that the grindstone 501 grinds the workpiece W with high accuracy. Whetstone 501
Performs chamfering below the work W at the raised position. Next, chamfering above the work W is performed at the lowered position. Then, while the grindstone 501 moves from the ascending position to the descending position, the grindstone 501 finish-grinds the outer peripheral surface of the work W.

When the grinding process is completed, the rotation operation of the work W is stopped,
The chuck 203 descends and the work W is released from the upper plate 204. At this time, the clutch 401 is disengaged and the locking pin 404
Engages in the notch 403 of the fixed disc 402, and the model M is aligned. Further, the copying mechanism 500 returns to the original position.

On the other hand, the transfer member 702 of the work discharge mechanism 700 is the chuck 203.
To support the lower surface of the peripheral edge of the work W, and then the work W is taken out from the chuck 203 and transferred to the discharge plate 710. The discharge plate 710 is tilted to take out the work W and move it into the water tank 701.

During the above operation, the claws 603 and 604 have returned to the stocker 601 and are holding the next work.

As described above, according to the present invention, the positioning of the model is performed easily and accurately, and the work to be ground is always fed coaxially with the model and oriented in the same angle direction. Therefore, the machining allowance is minimized,
It is possible to shorten the grinding time and extend the life of the grindstone.

[Brief description of drawings]

1 (a) and 1 (b) are plan views showing an example of the shape of the work, and FIG.
FIG. 3 is a plan view of the apparatus of the embodiment, FIG. 3 is a side view showing a part of the apparatus of the embodiment in a cutaway manner, and FIG. Sectional view, 4th
Figure (b) is a perspective view showing a fixed disk and a locking pin, Figure 5 is a side view showing a state in which a stylus and a grindstone are engaged with a model and a work, respectively, and Figures 6 (a), (b), (c) is an explanatory view showing a grinding process of a work with a grindstone, FIG. 7 is an explanatory view showing a relationship between rotation of a model and reciprocating motion of a stylus, FIG. 8 is a plan view showing a work supply mechanism and a work discharge mechanism, FIG. 9 is a plan view showing a pawl, FIG. 10 is a sectional view showing a coupling structure of a piston rod and a plate member, and FIGS. 11 (a) and 11 (b) are plan views showing an expanding / contracting operation of the pawl. 100: Fixed frame, 200: Work support mechanism, 300: Rotation drive mechanism, 400: Stopper mechanism, 500: Copying mechanism, 50
1 …… Whetstone, 506 …… Stylus, 507 …… Drive motor, 6
00 …… Work supply mechanism, 601 …… Stocker, 603,604…
… Claws, 700 work discharge mechanism, M …… model, W …… work.

Claims (1)

[Scope of utility model registration request] 1. An apparatus for copying an outer peripheral surface of a work made of a hard and brittle material, which is provided with the following requirements (a) to (g). . (A) A fixed frame having a stocker portion for holding the workpiece before processing and a guide rail extending from the stocker portion, and (b) a model provided on the fixed frame and having a peripheral shape after grinding the workpiece and the workpiece. (A) A rotation drive mechanism that rotates the work support mechanism around the axis of the model, and (d) a fixed circle integrally connected to the work support mechanism. An engaging portion formed on the outer peripheral surface of the plate, a locking pin that engages with the engaging portion when the work supporting mechanism is stopped and adjusts a rotation angle position of the supporting mechanism, and a work supporting member of the rotation driving mechanism. A stopper mechanism having a clutch for transmitting and blocking the rotational driving force to the mechanism, and for blocking the rotational driving force when the locking pin engages with the engaging portion, (e) reciprocally movable to the fixed frame Provided in And a stylus that is rotatably supported by the housing about the axis and engageable with the outer peripheral surface of the model, and has the same outer shape as the stylus, and is rotatably coaxial with the stylus in the housing. A copying mechanism including a grindstone that is supported and grinds the outer peripheral surface of the work, and a drive motor that rotates the grindstone, (f) Reciprocally supported along the guide rail,
There is one claw capable of gripping the outer peripheral surface of the work by expanding and contracting by the same amount in the orthogonal direction of the guide rail, and these claws position and receive the work at the stocker portion, and the work is received. A work supply mechanism that supplies the support mechanism, and (g) a work discharge mechanism that removes the ground work from the work support mechanism.