JPH0678399A - Composite piezoelectric body - Google Patents

Abstract

PURPOSE:To obtain the composite piezoelectric body having a broad band frequency characteristic used for a sonar or an ultrasonic wave diagnostic device or the like. CONSTITUTION:In the composite piezoelectric body 11 in which lots of rod shaped piezoelectric elements 12 set vertically are arranged and an organic high polymer material 13 is packed in a gap between the piezoelectric elements 12, the thickness of the composite piezoelectric body 11 is ununiformized, and the thickness of the piezoelectric element 12 and the interval between adjacent piezoelectric elements 12 are set to be proportional to the thickness of the composite piezoelectric body 11, that is, the length of the piezoelectric elements 12. Thus, the vibration in the frequency mode corresponding to each thickness is generated and the composite piezoelectric body having a broad frequency band is obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite piezoelectric body for an ultrasonic probe used as a sensor for a sonar or an ultrasonic diagnostic apparatus.

[0002]

2. Description of the Related Art Recently, a large number of columnar piezoelectric ceramics are arranged as a material for a piezoelectric body used in ultrasonic probes such as sonars and ultrasonic diagnostic devices for water and living bodies, and polymer materials are used in the gaps. A so-called 1-3 type composite piezoelectric material filled with the material has been studied. As such a composite piezoelectric material, Pr
o. IEEE, 1985, U1trasonics Symp. p643 to 647.

FIG. 3 is a perspective view showing the structure of a conventional composite piezoelectric body. As shown in FIG. 3, a composite piezoelectric body 1 is composed of a columnar piezoelectric ceramic 2 having a one-dimensional shape and a polymer material 3 three-dimensionally provided in a gap between the piezoelectric ceramics 2.
It has a uniform thickness. This composite piezoelectric body has a small acoustic impedance, and can be brought closer to the acoustic impedance of the subject (acoustic impedance of the living body is about 1.6 MRay1), and also has a large electromechanical coupling coefficient. Since it was possible to efficiently obtain frequency characteristics in a wide band, it was possible to obtain a high-resolution ultrasonic tomographic image.

[0004]

However, with such a conventional composite piezoelectric body, although a wider frequency band characteristic can be obtained as compared with a piezoelectric ceramic single body, it is still possible to obtain a sufficient frequency characteristic. There wasn't.

The present invention solves such conventional problems, and an object of the present invention is to provide an excellent composite piezoelectric body having further wide band frequency characteristics.

[0006]

In order to achieve the above object, the present invention provides a large number of piezoelectric elements having a rod-like shape having a similar vertical cross section and an organic polymer material filled in the gaps between the piezoelectric elements. In the composite piezoelectric body including the above, the thickness is made non-uniform and a vibration mode having a frequency corresponding to each thickness can be generated.

[0007]

According to the present invention, with the above structure, vibration modes having frequencies corresponding to respective thicknesses are generated in the portion of the composite piezoelectric body, so that a characteristic having a wide frequency band can be obtained. Therefore, since the ultrasonic probe using the composite piezoelectric body of the present invention can obtain an extremely short pulse response waveform, it is possible to obtain an ultrasonic image with a deep test depth and high resolution.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a sectional view of a composite piezoelectric body according to an embodiment of the present invention. FIG. 2 is a diagram showing the relationship between the shape ratio of the width and length (thickness of the composite piezoelectric body) of the piezoelectric element of the composite piezoelectric body of one embodiment of the present invention and the electromechanical coupling coefficient.

In FIG. 1, 11 is a composite piezoelectric body,
One surface is flat and the other surface is concave. 1
Reference numeral 2 denotes a plurality of rod-shaped piezoelectric elements, which are PZT system, P
Piezoelectric ceramics such as bTiO ₃ system and single crystals such as LiNbO ₃ are used. Reference numeral 13 is an organic polymer material which three-dimensionally fills the gaps between the piezoelectric elements 12 and bonds them together, and for example, silicone rubber, epoxy resin or urethane resin is used. Electrodes 14 and 15 are provided on both surfaces of the composite piezoelectric body 11, which are plated,
It is provided by a method such as vapor deposition or baking. Although not shown here, the composite piezoelectric body 1 may be used if necessary.
A back load material may be provided on the surface of the first electrode 14 and an acoustic matching layer or a protective film may be provided on the surface of the electrode 15 of the composite piezoelectric body 11. And these electrodes 14, 1
When a voltage is applied to 5, the composite piezoelectric body 11 mechanically vibrates to generate an ultrasonic wave having a frequency corresponding to each thickness.

A specific example will be described below. Piezoelectric element 1
The electromechanical coupling coefficient k of the composite piezoelectric body 11 has a relationship as shown in FIG. 2 depending on the shape ratio (w / t) between the width w of 2 and the length (thickness of the composite piezoelectric body 11) t. FIG. 2 shows the piezoelectric element 1.
2 is a PZT-based piezoelectric ceramic C-6 manufactured by Fuji Ceramics Co., Ltd., and epoxy resin is used as the organic polymer material 13, and the shape ratio (w / It shows the relationship between t) and the electromechanical coupling coefficient k. As is clear from the relationship in FIG. 2, it is understood that the electromechanical engagement coefficient k changes depending on the shape ratio of the piezoelectric element 12 of the composite piezoelectric body 11. This means that when the composite piezoelectric body 11 has a non-uniform thickness as shown in FIG. 1 and the piezoelectric elements 12 are arranged at the same intervals as in the conventional case, a thin portion (around the center in the figure).
The shape ratio of the piezoelectric element 12 significantly changes between the thick portion and the thick portion (outer peripheral portion in the figure). That is, it means that the electromechanical coupling coefficient k of each thickness portion changes, and the frequency characteristics deteriorate. For example, in FIG. 1, the diameter of the composite piezoelectric body 11 is 20 mm, one surface of the composite piezoelectric body 11 is a flat surface, and the other surface has a concave shape with a radius of curvature of 80 mm. .2 mm, the thickest portion of the outermost peripheral portion is 0.82 mm, and the piezoelectric elements 12 are equally spaced and the width of the piezoelectric element 12 is fixed to 0.15 mm. The shape ratio is 0.75, and the piezoelectric element 12 in the thickest part of the outermost peripheral part has a shape ratio of 0.18. This means that the electromechanical coupling coefficient k changes in the shape ratio of the piezoelectric element 12 in the range of 0.75 to 0.18 as shown in FIG. The decrease of the electromechanical coupling coefficient k becomes remarkable.

The electromechanical coupling coefficient k is greatly related to the frequency characteristic and the sensitivity, and the electromechanical coupling coefficient k
It is already known that there is a proportional relationship in that the frequency band characteristic deteriorates to become a narrow band and the sensitivity also decreases when is decreased. Therefore, the value of the shape ratio of the piezoelectric element 12 is changed. In this case, lowering the electromechanical coupling coefficient k is not preferable because it deteriorates the frequency characteristic.

It is a feature of the present embodiment that such a problem is solved and the frequency characteristic is further widened.

For example, in FIG. 1, the diameter of the composite piezoelectric body 11 is 20 mm, one surface of the composite piezoelectric body 11 is a flat surface, and the other surface is a concave surface with a radius of curvature of 80 mm. When the thickness is 0.2 mm and the thickest part of the outermost circumference is 0.82 mm, and the shape ratio (w / t) of the piezoelectric element 12 is set to a constant value at any place, for example, a value of 0.5 The width w ₁ of the piezoelectric element 12 in the thinnest portion of the central portion is 0.1 mm, and the width w ₂ of the piezoelectric element 12 in the thickest portion of the outermost peripheral portion is 0.41 mm. Thus, arranging the piezoelectric elements 12 in a constant vertical cross-sectional shape means changing the arrangement interval of the piezoelectric elements 12 of the composite piezoelectric body 11. Since the width of the piezoelectric element becomes wider from the center to the outside,
The arrangement interval of the piezoelectric elements 12 also becomes wider from the central portion to the outside. Further, the width of the piezoelectric element 12 in the portion having the intermediate thickness of the composite piezoelectric body 11 may be sequentially changed so that the shape ratio (w / t) of the piezoelectric element 12 becomes about 0.5.

As described above, the shape ratio (w / t) of the piezoelectric elements 12 of the composite piezoelectric body 11 having a non-uniform thickness is made substantially the same value, and the arrangement interval of the piezoelectric elements 12 is changed, whereby the composite piezoelectric body is changed. Since the electromechanical coupling coefficient k is substantially constant and has a high value from the central portion to the outermost peripheral portion of 11, a wide frequency characteristic can be obtained, and the design is easy. Further, since it has a concave shape, it has the feature that it is possible to focus the ultrasonic beam along this shape at the same time.

Therefore, since the ultrasonic deep probe using the composite piezoelectric material of the present invention can obtain an extremely short pulse response waveform, it is possible to obtain an ultrasonic image having a deep test depth and high resolution. it can.

In this embodiment, the composite piezoelectric body 1
The case of the concave surface configuration in which one surface of 1 has a certain curvature has been described. Similarly, by forming the shape, a wide band frequency characteristic can be obtained.

In this embodiment, the composite piezoelectric body 1
Although the case where the shape of 1 is a disk shape has been described, in addition to this, the present embodiment is also used in a direction orthogonal to the direction of an array electrode of a so-called array type in which electrodes are provided in the composite piezoelectric body 11 in an array. Similarly, a wide band frequency characteristic can be obtained.

[0019]

As is apparent from the above description, the present invention provides a composite piezoelectric body in which a large number of rod-shaped piezoelectric elements are vertically arranged and an organic polymer material is filled around the piezoelectric elements. By making the thickness of the piezoelectric body non-uniform, making the thickness and length of the piezoelectric element substantially constant, and making the arrangement interval of the piezoelectric elements non-uniform, vibration modes of frequencies corresponding to the respective thicknesses can be obtained. It can be generated uniformly, and a wide frequency band characteristic corresponding to the thickness range of the composite piezoelectric body can be obtained. Therefore, since the ultrasonic probe using the composite piezoelectric body of the present invention can obtain an extremely short pulse response waveform, it is possible to obtain an ultrasonic image with a deep test depth and high resolution.

[Brief description of drawings]

FIG. 1 is a sectional view showing a schematic configuration of a composite piezoelectric body according to an embodiment of the present invention.

FIG. 2 is a diagram showing the relationship between the shape ratio of the piezoelectric element of the composite piezoelectric body of the present invention and the electromechanical coupling coefficient.

FIG. 3 is a perspective view showing a schematic configuration of a conventional composite piezoelectric body.

[Explanation of symbols]

 11 Composite Piezoelectric Body 12 Piezoelectric Element 13 Organic Polymer Material 14, 15 Electrode

Claims (5)

[Claims] 1. A composite piezoelectric body in which a large number of rod-shaped piezoelectric elements are vertically arranged, and a gap between the piezoelectric elements is filled with an organic polymer material. A composite piezoelectric body, characterized in that the thickness and the length of the elements are set to a substantially constant ratio, and the arrangement intervals of the piezoelectric elements are made nonuniform. 2. The composite piezoelectric body according to claim 1, wherein one surface is flat and the other surface is curved. 3. The composite piezoelectric body according to claim 1, wherein both surfaces have different curved surface shapes. 4. The composite piezoelectric body according to claim 1, wherein the curved surface has a concave shape. 5. The arrangement interval of the piezoelectric elements is narrow in the central portion,
The composite piezoelectric body according to claim 1, wherein the composite piezoelectric body is configured so as to become wider toward the outside.