JPH0677341B2 - Magneto-optical memory medium - Google Patents
Magneto-optical memory mediumInfo
- Publication number
- JPH0677341B2 JPH0677341B2 JP15971686A JP15971686A JPH0677341B2 JP H0677341 B2 JPH0677341 B2 JP H0677341B2 JP 15971686 A JP15971686 A JP 15971686A JP 15971686 A JP15971686 A JP 15971686A JP H0677341 B2 JPH0677341 B2 JP H0677341B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magneto
- recording
- optical memory
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、情報の記録特性、耐食性と共に磁性膜間の交
換結合が改善された光磁気メモリ用媒体に関する。Description: TECHNICAL FIELD The present invention relates to a medium for a magneto-optical memory having improved information recording characteristics, corrosion resistance, and exchange coupling between magnetic films.
希土類−鉄族非晶質合金薄膜を用いた光磁気メモリは、
その読み出し特性が充分ではなく、その改善方法につい
てさまざまな提案がなされている。その一つに記録特性
が良い膜と読み出し特性が良い膜からなる交換結合二層
膜がある(例えば特開昭57-78652号)。従来の交換結合
二層膜では、記録層にはTb−Fe、Dy−Fe、読み出し層に
はGd−Fe、Gd−Fe−Coなどが用いられていた。A magneto-optical memory using a rare earth-iron group amorphous alloy thin film,
The read characteristics are not sufficient, and various proposals have been made for improving the read characteristics. One of them is an exchange-coupling double-layer film composed of a film having a good recording property and a film having a good reading property (for example, JP-A-57-78652). In the conventional exchange-coupling bilayer film, Tb-Fe and Dy-Fe were used for the recording layer, and Gd-Fe, Gd-Fe-Co, etc. were used for the reading layer.
光磁気メモリでは、レーザー光の熱作用を利用して情報
を記録するので、その磁性膜のキュリー温度が低いほど
記録感度が高くなる。交換結合二層磁性膜において記録
感度を決めるものは記録層のキュリー温度であるので、
記録層のキュリー温度を下げれば記録感度が高くなる。
しかし、記録情報の安定性や光磁気メモリ用ドライブ装
置の機内温度(>50℃)などから考えると、記録層のキ
ュリー温度は100℃程度が望ましい。この点から考える
と、従来記録層として用いられていたTb−Feはキュリー
温度が約130℃とやや高く、Dy−Feは約70℃とやや低
く、実用的には最適なキュリー温度であるとはいえな
い。Since information is recorded in the magneto-optical memory by utilizing the thermal action of laser light, the lower the Curie temperature of the magnetic film, the higher the recording sensitivity. Since the Curie temperature of the recording layer determines the recording sensitivity in the exchange-coupled two-layer magnetic film,
Lowering the Curie temperature of the recording layer increases the recording sensitivity.
However, considering the stability of recorded information and the temperature inside the magneto-optical memory drive device (> 50 ° C), the Curie temperature of the recording layer is preferably about 100 ° C. From this point of view, the Curie temperature of Tb-Fe, which was conventionally used as the recording layer, is slightly high at about 130 ° C, and that of Dy-Fe is slightly low at about 70 ° C, which means that the Curie temperature is practically optimal. I can't say.
さらに、光磁気メモリの実用化に対しては、その磁性膜
の耐食性がかなり重要な問題となっている。希土類−鉄
族非晶質合金薄膜では、鉄族元素としてCoを多量に含む
ほど耐食性が改善されることがわかっている。交換結合
二層磁性膜では、その読み出し層にはGd−Fe−Coを用い
ることができ、Coの濃度を高くして、読み出し特性の改
善とともに耐食性の改善を行なうことができる。しか
し、その記録層にはTb−FeやDy−Feが用いられていて、
これにCoを添加すると少量でもキュリー温度がかなり上
昇し、記録感度が悪くなる欠点があった。Further, the corrosion resistance of the magnetic film is a very important issue for practical use of the magneto-optical memory. It has been known that in a rare earth-iron group amorphous alloy thin film, the corrosion resistance is improved as the iron group element is contained in a larger amount. In the exchange-coupling double-layer magnetic film, Gd-Fe-Co can be used for the readout layer, and the Co concentration can be increased to improve the readout characteristics and corrosion resistance. However, Tb-Fe and Dy-Fe are used for the recording layer,
Even if a small amount of Co is added to this, the Curie temperature rises considerably and the recording sensitivity deteriorates.
本発明は、上記従来の欠点を改良するためになされたも
のであり、その目的は記録層としてR−Fe−Co(R=T
b,Dy)を用い、読み出し層にGd−Fe−Coを用いて、記録
層を読み出し層ではさんで、記録特性、耐食性と共に交
換結合を改善した光磁気メモリ用媒体を提供することに
ある。The present invention has been made to improve the above-mentioned conventional drawbacks, and its purpose is to use R-Fe-Co (R = T as a recording layer.
b, Dy), Gd-Fe-Co is used for the reading layer, and the recording layer is sandwiched between the reading layers to provide a medium for a magneto-optical memory having improved recording characteristics, corrosion resistance, and exchange coupling.
上記目的達成可能な本発明は室温において高い保磁力と
低いキュリー温度を有する記録層を、低い保磁力と高い
キュリー温度を有する読み出し層ではさんだ交換結合を
した三層構造の磁性膜を有して成る光磁気メモリ用媒体
であって、前記記録層がR−Fe−Coであり、前記読み出
し層がGd−Fe−CoMであることを特徴とする光磁気メモ
リ用媒体(ただし、RはTb及びDyから選ばれる1種また
は2種の元素である。)である。The present invention, which can achieve the above object, has a recording layer having a high coercive force and a low Curie temperature at room temperature, and a magnetic film having a three-layer structure in which exchange coupling is sandwiched between read layers having a low coercive force and a high Curie temperature. A medium for a magneto-optical memory, wherein the recording layer is R-Fe-Co and the read layer is Gd-Fe-CoM (where R is Tb and It is one or two elements selected from Dy.).
以下に、従来例と本発明の光磁気メモリ用媒体の違いに
ついて詳しく説明する。The difference between the conventional example and the magneto-optical memory medium of the present invention will be described in detail below.
まず、両媒体の記録層のキュリー点の差異について述べ
る。従来の媒体の記録層としては、Tb−Fe、Dy−Feなど
が使用されていたが、前述したようにTb−Feはキュリー
温度が約130℃とやや高く、Dy−Feは約70℃とやや低
い。そこで、((Tb1-XDyX)−(Fe1-YCoY)(0≦x≦
1,0≦y≦0.3)で示される磁性膜を種々作製したとこ
ろ、そのキュリー温度TcとDyの原子数比x、Coの原子数
比yとの間にはほぼ Tc=130(1−x)+70x+600y(℃) という関係が得られた。したがって、x=0.8、y=0.0
3とするとキュリー温度は約100℃となり、Tb−Feよりも
キュリー温度が低く、Dy−Feよりも温度安定性に優れた
磁性膜が得られる。この知見に基づき、R、Fe及びCoを
含む磁性膜を本発明の光磁気メモリ用媒体の記録層とし
て用いたのである。キュリー温度の最適値は使用するレ
ーザーのパワー、光学系の構成、媒体の構成、ディスク
の回転数、ディスクの直径などによって例えば90、110
℃のように100℃から多少ずれることもあるが、その場
合にも、そのキュリー点となるようにx、yの値を適宜
選べばよい。また、本発明の光磁気メモリ用媒体の記録
層のキュリー点を、従来の媒体の記録層が示すキュリー
点と同じような値にすることもできる。しかし、一般的
には媒体の記録感度が高ければ、使用するレーザーのパ
ワーが小さくてすみ、光学系も簡単となるので安価とな
り、また、外乱による記録パワーの変動に対しても安定
に記録されるので信頼性が高くなる。したがって、記録
感度はなるべく高くなるようにキュリー点は低くするの
が望ましいが、温度に対する安定性から考えるとキュリ
ー温度は高いほうが良いので設定すべきキュリー点は90
〜120℃が好ましい。First, the difference in Curie points of the recording layers of both media will be described. As a recording layer of a conventional medium, Tb-Fe, Dy-Fe, etc. were used, but as described above, Tb-Fe has a slightly high Curie temperature of about 130 ° C and Dy-Fe of about 70 ° C. Somewhat low. Therefore, ((Tb 1-X Dy X ) − (Fe 1-Y Co Y ) (0 ≦ x ≦
When various magnetic films represented by 1,0 ≦ y ≦ 0.3) were prepared, Tc = 130 (1-x) between the Curie temperature Tc and the atomic ratio x of Dy and the atomic ratio y of Co. ) + 70x + 600y (℃) was obtained. Therefore, x = 0.8, y = 0.0
When it is 3, the Curie temperature is about 100 ° C., which is lower than the Curie temperature of Tb-Fe, and a magnetic film having better temperature stability than Dy-Fe can be obtained. Based on this finding, the magnetic film containing R, Fe and Co was used as the recording layer of the magneto-optical memory medium of the present invention. The optimum value of the Curie temperature depends on the power of the laser used, the configuration of the optical system, the configuration of the medium, the rotational speed of the disc, the diameter of the disc, etc.
Although there may be some deviation from 100 ° C. such as 0 ° C., in that case as well, the values of x and y may be appropriately selected so as to obtain the Curie point. Further, the Curie point of the recording layer of the medium for magneto-optical memory of the present invention can be set to a value similar to the Curie point of the recording layer of the conventional medium. However, in general, if the recording sensitivity of the medium is high, the power of the laser used will be small and the optical system will be simple, so the cost will be low, and recording will be stable even against fluctuations in the recording power due to disturbance. Reliability increases. Therefore, it is desirable to lower the Curie point so that the recording sensitivity is as high as possible, but considering the stability against temperature, the Curie temperature should be higher, so the Curie point to be set is 90.
~ 120 ° C is preferred.
次に従来例と本発明の光磁気メモリ用媒体の記録層の耐
食性の差異について述べる。希土類−鉄族非晶質合金薄
膜から成る磁性膜の腐食過程には、膜中に存在する遊離
酸素が主に希土類元素と結合し酸化されたり、磁性膜と
保護膜の界面を通して酸素や水分が膜中に拡散し酸化さ
れることなどが考えられるこのうちの前者に関しては、
スパッタリングにおけるターゲットや蒸着における蒸発
源の中の酸素濃度を減らしたり、真空装置の残留ガス
圧、Arガス中の不純物を減らすことによりかなり改善さ
れる。一方、後者については、緻密で酸素を含まない保
護膜によってかなり抑えられるものの、磁性膜そのもの
の耐食性の改善が望まれる。特に、基板にプラスチック
を用いる場合には、基板にある程度の吸水性があり、保
護膜だけでなく磁性膜の耐食性の改善が特に望まれる。
交換結合二層磁性膜では、その読み出し層はキュリー点
が高くてよいのでGd−Fe−Coを用いることができ、Coの
濃度を高くして耐食性の改善を行なうことができる。し
かし、従来の媒体の記録層のTb−FeにCoを添加すると少
量でもキュリー温度がかなり上昇し、記録感度が悪くな
る欠点があった。Next, the difference in corrosion resistance between the recording layers of the conventional example and the magneto-optical memory medium of the present invention will be described. During the corrosion process of a magnetic film composed of a rare earth-iron group amorphous alloy thin film, free oxygen existing in the film is mainly combined with a rare earth element to be oxidized, or oxygen and water are not absorbed through the interface between the magnetic film and the protective film. Regarding the former of these, which may be diffused and oxidized in the film,
It can be significantly improved by reducing the oxygen concentration in the target in sputtering or the evaporation source in vapor deposition, reducing the residual gas pressure in the vacuum device, and reducing the impurities in Ar gas. On the other hand, with regard to the latter, it is desired to improve the corrosion resistance of the magnetic film itself, though it can be considerably suppressed by a dense protective film containing no oxygen. In particular, when plastic is used for the substrate, the substrate has some degree of water absorption, and it is particularly desired to improve the corrosion resistance of the magnetic film as well as the protective film.
In the exchange-coupling two-layer magnetic film, the Curie point may be high in the readout layer, so that Gd-Fe-Co can be used, and the concentration of Co can be increased to improve the corrosion resistance. However, when Co is added to Tb-Fe of the recording layer of the conventional medium, the Curie temperature rises considerably even in a small amount, and the recording sensitivity is deteriorated.
本発明では、Tb−Dy−FeやDy−FeにCoを少量添加するこ
とにより耐食性を多少改善したR−Fe−Coの記録層を、
さらに耐食性の良い読み出し層のGd−Fe−Coではさむこ
とによって、磁性層と保護層の界面からの腐食に対して
改善を行なったものである。In the present invention, a recording layer of R-Fe-Co whose corrosion resistance is slightly improved by adding a small amount of Co to Tb-Dy-Fe or Dy-Fe is used.
Further, by sandwiching the read layer having good corrosion resistance with Gd-Fe-Co, the corrosion from the interface between the magnetic layer and the protective layer is improved.
また、交換結合二層磁性膜では、磁性膜間の交換結合の
大きさが媒体の特性を大きく左右するが、交換結合の大
きさは作製時の到達真空圧の違いによってかなり変動す
る。これは、磁性膜を作製してから次の磁性膜を作製す
るまでの間に界面に吸着した残留ガスの影響であり、こ
の影響は耐食性を改善することによってかなり改善され
る。したがって、耐食性の改善された記録層を用いた本
発明の光磁気メモリ用媒体は、単に媒体の経時変化の改
善のみならず、交換結合の向上にも効果がある。Further, in the exchange-coupling two-layer magnetic film, the size of the exchange coupling between the magnetic films greatly influences the characteristics of the medium, but the size of the exchange coupling considerably varies depending on the ultimate vacuum pressure at the time of fabrication. This is the effect of the residual gas adsorbed on the interface between the production of one magnetic film and the production of the next magnetic film, and this effect is considerably improved by improving the corrosion resistance. Therefore, the medium for a magneto-optical memory of the present invention using the recording layer with improved corrosion resistance is effective not only for improving the aging of the medium but also for improving the exchange coupling.
本発明の光磁気メモリ媒体は磁性膜を上記のように構成
したことに特徴を有するもので、磁性膜以外に光を有効
に利用するための反射層、磁性膜を保護してさらに保護
機能を高めるための保護層など、各種の補助層が所望に
応じて任意に配設されてよい。The magneto-optical memory medium of the present invention is characterized in that the magnetic film is configured as described above. In addition to the magnetic film, the reflective layer for effectively utilizing light and the magnetic film are protected to further provide a protective function. Various auxiliary layers, such as a protective layer for enhancing, may be optionally provided as desired.
実施例1 通常のスパッタリング法を用いて、従来例と本発明の13
0mmφのディスク状光磁気メモリ用媒体を作製し、記録
感度の実験を行った。従来例において磁性膜は読み出し
層:Gd−Fe−Co(Gd:Fe:Co=18:62:20、膜厚500Å)と記
録層:Tb−Fe(Tb:Fe=22:78、膜厚500Å)の二層膜と
し、本発明におけるものの磁性膜は、Gd−Fe−Co(Gd:F
e:Co=18:62:20、膜厚300Å)の読み出し層で、Dy−(F
e1-YCoY)(y=0.05、膜厚400Å)の記録層をはさんだ
三層膜とした。基板には、ポリカーボネートを用いた。Example 1 A conventional example and the present invention
A 0 mmφ disk-shaped medium for magneto-optical memory was prepared, and recording sensitivity experiment was conducted. In the conventional example, the magnetic layer is a read layer: Gd-Fe-Co (Gd: Fe: Co = 18: 62: 20, film thickness 500Å) and a recording layer: Tb-Fe (Tb: Fe = 22: 78, film thickness 500Å). ), The magnetic film of the present invention is a Gd-Fe-Co (Gd: F
e: Co = 18: 62: 20, thickness 300 Å) readout layer, Dy- (F
e 1-Y Co Y ) (y = 0.05, film thickness 400Å) was used as a three-layer film. Polycarbonate was used for the substrate.
回転数1800rpmで、従来例の媒体の記録にはレーザーパ
ワー4.9mW、バイアス磁界200 Oeが必要であったが、本
発明のものはレーザーパワー4.2mW、バイアス磁界200 O
eで記録が可能であり記録特性が改善された。At a rotation speed of 1800 rpm, a laser power of 4.9 mW and a bias magnetic field of 200 Oe were required for recording the medium of the conventional example, but the present invention has a laser power of 4.2 mW and a bias magnetic field of 200 Oe.
Recording was possible with e and the recording characteristics were improved.
また、1規定のNaCl水溶液を用いた耐食性の試験では、
従来例では15分間浸した後には、目視でかなりのピンホ
ールが見られたが、本発明のものは、目視でピンホール
の発生は見られなかった。In addition, in the corrosion resistance test using 1N NaCl aqueous solution,
In the conventional example, after soaking for 15 minutes, a considerable number of pinholes were visually observed, but in the case of the present invention, no pinholes were visually observed.
交換結合の測定は、誤差をかなり含むので値としては求
められなかったが、本発明の方法が従来例より約1.5倍
ほど向上するという傾向があった。The exchange coupling measurement was not obtained as a value because it contained a considerable error, but the method of the present invention tended to be improved by about 1.5 times as compared with the conventional example.
実施例2 通常のスパッタリング法を用いて、本発明の130mmφの
ディスク状光磁気メモリ用媒体を作製し、記録感度の実
験を行った。磁性膜は、Gd−Fe−Co(Gd:Fe:Co=18:62:
20、300Å)の読み出し層で、(Tb1-XDyX)−(Fe1-YCo
Y)(X=0.8,y=0.03、膜厚400Å)の記録層をはさん
だ三層膜とした。Example 2 A medium for disk-shaped magneto-optical memory having a diameter of 130 mm according to the present invention was manufactured by using a normal sputtering method, and an experiment of recording sensitivity was conducted. The magnetic film is Gd-Fe-Co (Gd: Fe: Co = 18: 62:
(Tb 1-X Dy X ) − (Fe 1-Y Co
The recording layer of Y ) (X = 0.8, y = 0.03, film thickness 400Å) was formed as a three-layer film.
回転数1800rpmで、レーザーパワー4.3mW、バイアス磁界
200 Oeで記録が可能であり記録特性が改善された。At 1800 rpm, laser power 4.3 mW, bias magnetic field
Recording was possible at 200 Oe, and the recording characteristics were improved.
また、1規定のNaCl水溶液を用いた耐食性の試験では、
目視でピンホールの発生は見られなかった。In addition, in the corrosion resistance test using 1N NaCl aqueous solution,
No pinholes were visually observed.
以上説明したように、記録層にR−Fe−Co(R=Tb及び
/またはDy)を用い、読み出し層にGd−Fe−Coを用い、
記録層を読み出し層ではさんだ本発明の光磁気メモリ媒
体により、記録特性、耐食性と共に交換結合が改善され
た。As described above, R-Fe-Co (R = Tb and / or Dy) is used for the recording layer, and Gd-Fe-Co is used for the reading layer.
The magneto-optical memory medium of the present invention having the recording layer sandwiched by the read layer has improved recording characteristics, corrosion resistance, and exchange coupling.
Claims (1)
度を有する記録層を、低い保磁力と高いキュリー温度を
有する読み出し層ではさんだ交換結合をした三層構造の
磁性膜を有して成る光磁気メモリ用媒体であって、前記
記録層がR−Fe−Coであり、前記読み出し層がGd−Fe−
Coであることを特徴とする光磁気メモリ用媒体(ただ
し、RはTb及びDyから選ばれる1種または2種の元素で
ある。)1. A magneto-optical device comprising a recording layer having a high coercive force and a low Curie temperature at room temperature and a magnetic film having a three-layer structure in which exchange coupling is sandwiched between read layers having a low coercive force and a high Curie temperature. A memory medium, wherein the recording layer is R-Fe-Co and the read layer is Gd-Fe-
Medium for magneto-optical memory characterized by being Co (wherein R is one or two elements selected from Tb and Dy)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15971686A JPH0677341B2 (en) | 1986-07-09 | 1986-07-09 | Magneto-optical memory medium |
US07/170,053 US4871614A (en) | 1986-07-09 | 1988-03-16 | Opto-magnetic recording medium having three exchange-coupled magnetic layers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15971686A JPH0677341B2 (en) | 1986-07-09 | 1986-07-09 | Magneto-optical memory medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6316442A JPS6316442A (en) | 1988-01-23 |
JPH0677341B2 true JPH0677341B2 (en) | 1994-09-28 |
Family
ID=15699720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15971686A Expired - Fee Related JPH0677341B2 (en) | 1986-07-09 | 1986-07-09 | Magneto-optical memory medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0677341B2 (en) |
-
1986
- 1986-07-09 JP JP15971686A patent/JPH0677341B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPS6316442A (en) | 1988-01-23 |
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