JPH0676383A - Magneto-optical recording medium and manufacture thereof - Google Patents

Abstract

PURPOSE:To sufficiently improve the magnetic field sensitivity characteristics of a magneto-optical recording medium and to enable its mass production by adding an easily oxidizable metal in the range of 30 to 50% on the surface of an amorphous magnetic alloy film and oxidizing the surface. CONSTITUTION:The magneto-optical recording medium 1 is manufactured by laminating a dielectric protective layer 3 of 100nm thickness, an amorphous magnetic alloy film 4 of 35nm thickness consisting of Tb, Fe, Co and Al, a dielectric protective film 5 of 35nm thickness made of silicon nitride and a reflection film 6 of 50nm thickness made of an aluminum alloy on a transparent resin substrate 2 which has a size of 86mm diameter and 1.2mm thickness and is made of e.g. polycarbonate resin. The magnetic film 4 of this magneto-optical recording medium 1 is effectively oxidized. Therefore the magneto-optical recording medium having a good magnetic field sensitivity can be manufactured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rewritable magneto-optical recording medium and a method for manufacturing the same.

[0002]

2. Description of the Related Art A magneto-optical recording medium in which information can be recorded by utilizing a magneto-optical effect (Kerr effect and Faraday effect) and rewritable on the medium can record a large amount of data at high density and is portable. It has many advantages such as being present, and in recent years, it is being used in many fields such as document files, video files, external memory for computers, and memory for audio.

Particularly, in recent years, research and development of an overwrite technique have been actively conducted in order to further increase the recording density and the operation speed. In the case of a magneto-optical disk, as an overwrite method, an optical modulation method that changes the writing laser power and a magnetic field modulation method that changes the external magnetic field have been proposed. In particular, the magnetic field modulation method can easily realize high density recording because the pit length can be shortened,
Further, it has an advantage that the film structure of the recording medium can be simplified as compared with the optical modulation type recording medium, so that its practical application is urgently needed.

The problem in the magnetic field modulation method is how to change the magnetic field at high speed.
In order to solve this, it is necessary to reduce the size of the magnetic field coil, and to reduce the distance between the magnetic coil and the recording medium, or to enable writing with a small magnetic field,
It is important to improve the magnetic sensitivity of the recording medium. In order to improve the magnetic field sensitivity of the recording medium, conventionally, there have been proposed methods such as adjusting the composition of the recording film, forming the magnetic film into multiple layers, or oxidizing the surface of the magnetic film.

[0005]

However, the above-mentioned method for adjusting the composition of the recording film cannot sufficiently improve the magnetic field sensitivity characteristic, and the method for forming a multilayer magnetic film requires a manufacturing process. There was a problem that it became complicated. On the other hand, the method of performing the surface oxidation treatment of the magnetic film was difficult to apply because the principle of the effect generation was unknown, and there was almost no reproducibility if the device or the manufacturing process was different. The present invention has been made in order to solve such a problem, and elucidates the process of the oxidation treatment of the magnetic film to improve the reproducibility and further enhances the effect of the oxidation treatment, thereby An object is to provide a magneto-optical recording medium having excellent sensitivity and a method for manufacturing the same.

[0006]

The present inventors have conducted various studies in order to clarify the process of oxidation treatment of magnetic films. As a result, it has been clarified that the condition of the surface composition of the magnetic film is extremely important in order to sufficiently improve the magnetic field sensitivity characteristic of the magneto-optical recording medium and enhance its reproducibility. That is, when the surface of the magnetic film is subjected to an oxidation treatment, if a metal that is easily oxidized is contained in the surface of the magnetic film at a predetermined concentration, the oxidizing material is captured by the easily oxidized metal. Does not proceed to the deep part, only the very surface is oxidized, and the oxidation treatment proceeds with extremely good reproducibility. On the other hand, if the surface of the magnetic film does not contain any easily oxidizable metal, the oxidation will proceed to the deep part of the magnetic film, so that the magnetic field characteristics are not improved and the effect of the oxidation treatment Does not appear. Further, when the easily oxidizable metal is excessively contained on the surface of the magnetic film, only the easily oxidizable metal is oxidized and the magnetic film is hard to be oxidized, so that the magnetic field characteristics cannot be sufficiently improved.

FIG. 4 and FIG. 5 are characteristic diagrams of the CNR with respect to an external magnetic field in comparison with the case with and without the oxidation treatment effect. FIG. 4 shows the optical modulation method and FIG. 5 shows the magnetic field modulation method. Show. As shown in these figures,
In order to improve the magnetic field sensitivity characteristic of the magneto-optical recording medium,
It is necessary that the surface of the magnetic film contains an easily oxidizable metal in an appropriate concentration. Then, when Al, Ti, Cr or the like is used as the metal that is easily oxidized, the effect is particularly large. Furthermore, when the concentration of the metal that is easily oxidized on the surface of the magnetic film with respect to the oxidation treatment was measured by ESCA analysis, it was found that the appropriate concentration value was in the range of 3% to 50%.

On the other hand, when the oxidizing material used for the oxidation treatment was examined, it was found that effective oxidation was achieved by oxygen gas or a gas containing water (hereinafter, released gas) released from a jig for fixing and transporting the substrate. It was confirmed that processing could be performed. Similar results were obtained even when a mixture of the oxygen gas or the release gas with an inert gas such as argon gas or nitrogen gas was used. Further, it was also found that the concentration of the oxidizing material is not particularly important, and that it is sufficient to supply an amount enough to oxidize the surface of the magnetic film containing a metal that is easily oxidized to an extremely thin thickness. From these things, the following means were adopted in order to achieve the above-mentioned object.

According to a first aspect of the present invention, there is provided a magneto-optical recording medium in which a recording layer composed of an amorphous magnetic alloy film and a dielectric protective film is laminated on a signal surface of a transparent resin substrate. 3% or more and 50% or more of easily oxidizable metal on the surface of the film
It is contained in the following range, and the surface thereof is subjected to an oxidation treatment. The invention according to claim 2 is the magneto-optical recording medium according to claim 1, wherein the metal that is easily oxidized is at least one metal selected from the group consisting of Al, Ti, and Cr.
According to a third aspect of the present invention, in the method of manufacturing a magneto-optical recording medium, the recording layer including an amorphous magnetic alloy film and a dielectric protective film is laminated on a signal surface of a transparent resin substrate, wherein 3% or more of easily oxidizable metal on the surface of the magnetic alloy film 5
The surface is oxidized in the state of containing 0% or less. According to a fourth aspect of the present invention, in the method of manufacturing a magneto-optical recording medium, the recording layer comprising an amorphous magnetic alloy film and a dielectric protective film is laminated on the signal surface of a transparent resin substrate, wherein The easily oxidizable metal is sputter-deposited on the amorphous magnetic alloy film so that the surface of the magnetic alloy film contains the easily oxidizable metal in the range of 3% to 50%. The alloy film is oxidized. According to a fifth aspect of the present invention, in a method of manufacturing a magneto-optical recording medium, which comprises a recording layer made of an amorphous magnetic alloy film and a dielectric protective film laminated on a signal surface of a transparent resin substrate, a metal that is easily oxidized. Mixed with an amorphous magnetic alloy target,
By sputtering the target, an amorphous magnetic alloy film containing the above-mentioned easily oxidizable metal in a range of 3% to 50% is formed, and the amorphous magnetic alloy film is subjected to an oxidation treatment. .

[0010]

When the surface of the magnetic film is oxidized, if a metal that is easily oxidized is contained at a predetermined concentration on the surface of the magnetic film,
Since the oxidizable metal is trapped by the oxidizable metal, the oxidization does not proceed to the deep part of the magnetic film, only the pole surface is oxidised, and the reproducibility of the oxidization treatment becomes high. Thereby, the magnetic field sensitivity characteristic of the magneto-optical recording medium can be sufficiently improved. The characteristic actions of each of the above claims will be described below.

In the magneto-optical recording medium according to the present invention, the surface of the amorphous magnetic alloy film is oxidized by adding a predetermined concentration of a metal which is easily oxidized, to the surface of the amorphous magnetic alloy film. Is moderately oxidized, and the magnetic field sensitivity characteristics are good. According to the method of manufacturing a magneto-optical recording medium according to claim 3, the surface of the amorphous magnetic alloy film is oxidized by adding a predetermined concentration of an easily oxidizable metal to the surface of the amorphous magnetic alloy film. Is oxidized to. An amorphous magnetic alloy containing a oxidizable metal at a predetermined concentration on the surface of the amorphous magnetic alloy film by sputtering by the method for manufacturing a magneto-optical recording medium according to claim 4. A film is obtained. The method for producing a magneto-optical recording medium according to claim 5, wherein a metal that is easily oxidized is mixed with an amorphous magnetic alloy target, the target is sputtered, and an amorphous metal containing a metal that is easily oxidized at a predetermined concentration on the surface thereof is used. A magnetic alloy film is formed.

[0012]

EXAMPLES Examples embodying the present invention will be described below. Table 1 shows a list of magneto-optical recording media according to Examples and Comparative Examples of the present invention, and FIG. 1 is a sectional view of magneto-optical recording media according to Examples of the present invention.

A magneto-optical recording medium according to the first embodiment will be described. In FIG. 1, a magneto-optical recording medium 1 comprises a dielectric resin protective layer 3 of 100 nm on a transparent resin substrate 2 of 86 mmφ and 1.2 mmt made of polycarbonate resin.
A 25 nm amorphous magnetic alloy film 4 made of TbFeCoAl and a 35 nm dielectric protection film 5 made of silicon nitride.
And a reflection film 6 of 50 nm made of aluminum alloy are laminated.

A procedure for manufacturing the magneto-optical recording medium 1 will be described. A transparent resin substrate 2 is obtained by injection molding a polycarbonate resin. A film forming process is performed on the transparent resin substrate 2 by using an in-line magnetron sputtering apparatus in which an 8-inch cathode is mounted in each chamber. This film formation process is
First, each of the chambers 5 × 10 ^- was evacuated until ⁵ Pa, after the transparent resin substrate 2 mounted on the substrate holder was fed into the vacuum chamber was 1 hour evacuated, dielectric by reactive sputtering The protective layer 3 is formed. After that, the substrate is moved to the sputtering chamber, and the amorphous magnetic alloy film 4 of TbFeCoAl is laminated on the dielectric protection layer 3. next,
The surface of the amorphous magnetic alloy film 4 on the transparent resin substrate 2 is oxidized by moving the transparent resin substrate 2 to a vacuum chamber and flowing an argon gas having an oxygen concentration of 5% (volume ratio) at 100 SCCM for 10 seconds. Further, the transparent resin substrate 2 is moved to the sputtering chamber, and the dielectric protective film 5 of silicon nitride is laminated under the same conditions as when forming the dielectric protective layer 3. Finally, the aluminum alloy film 6 is laminated to manufacture the magneto-optical recording medium 1 having a four-layer film structure.

In the above procedure, the amorphous magnetic alloy film 4
During film formation, composition using a target which is _{Tb 2 1 Fe 7 0 Co 6} Al 3. As a result of ESCA analysis of the composition of the amorphous magnetic alloy film 4 formed using this target, 3% of Al was contained. The magnetic field sensitivity in optical modulation of the magneto-optical recording medium 1 is 150 Oersted (Oe).
Met. In addition, the external magnetic field in the magnetic field modulation is 100
The CNR when set to (Oe) was 48 decibels (dB) (see Table 1). In the magneto-optical recording medium 1, no characteristic deterioration due to oxidation was observed, and the magnetic field characteristic was improved by the oxidation treatment.

The second embodiment will be described. In this example, in the procedure described in the first example, the composition of the target used when forming the amorphous magnetic alloy film 4 was Tb _{2 1}
A magneto-optical recording medium 1 was produced by changing to Fe _{6 8} Co ₆ Al ₅ . As a result of ESCA analysis of the composition of the amorphous magnetic alloy film 4, 5% of Al was contained. The magnetic field sensitivity in light modulation is 150 (Oe), and the CNR when the external magnetic field in magnetic field modulation is 100 (Oe) is 48 dB.
Met. These values are equivalent to those in the first embodiment. Also in this example, the magneto-optical recording medium did not show any deterioration in characteristics due to oxidation, and the magnetic field characteristics were improved by the oxidation treatment.

A third embodiment will be described. In this embodiment, after the amorphous magnetic alloy film 4 is formed by sputtering using a target having a composition of Tb _{2 1} Fe _{7 3} Co ₆ , Al is formed by sputtering on the amorphous magnetic alloy film 4. At 0.05 nm
A magnetic film was formed by stacking and performing an oxidation treatment using oxygen gas. Others were manufactured by the same procedure as in the first and second embodiments. As a result of ESCA analysis of the composition of the surface of the amorphous magnetic alloy film 4 after forming Al, Al was 5%. The magnetic field sensitivity of this magneto-optical recording medium 1 in optical modulation was 150 (Oe), and the CNR was 48 dB when the external magnetic field in magnetic field modulation was 100 (Oe). Also in this example, the magnetic field characteristics were improved by the oxidation treatment.

A fourth embodiment will be described. In the third embodiment described above, the surface of the amorphous magnetic alloy film 4 was oxidized by flowing oxygen gas, but in the present embodiment, the composition is Tb _{2 1} Fe _{7 3} Co ₆
The amorphous magnetic alloy film 4 is sputter-deposited by using the target, and Al is laminated on the amorphous magnetic alloy film 4, and then the transparent resin substrate 2 is moved to another vacuum chamber to be transparent. The resin substrate 2 was held in the holder and evacuated for 10 minutes. Others were manufactured by the same procedure as in the third embodiment.
As a result of ESCA analysis of the composition of the surface of the amorphous magnetic alloy film 4 after forming Al, Al was 5%. The magnetic field sensitivity of the magneto-optical recording medium 1 in optical modulation is 150 (O
e), and the external magnetic field in the magnetic field modulation is 100 (O
The CNR was 48 dB when referred to as e). Also in this example, the magnetic field characteristics were improved by the oxidation treatment. On the other hand, as a result of analyzing the gas in the vacuum when it was left standing in a vacuum, H ₂ O gas which was considered to be emitted from the transparent resin substrate 2 or a jig for fixing and transporting the transparent resin substrate 2 was detected.

A fifth embodiment will be described. In this example, after the amorphous magnetic alloy film 4 was formed using a target having a composition of Tb _{2 1} Fe _{7 3} Co ₆ , Al was laminated by sputtering to a thickness of 0.1 nm. It was manufactured by the same procedure as in the third embodiment. Amorphous magnetic alloy film 4 after Al is formed
As a result of ESCA analysis of the composition of the surface of Al, Al was 10%. The magnetic field sensitivity of this magneto-optical recording medium 1 in optical modulation was 150 (Oe), and the CNR was 48 dB when the external magnetic field in magnetic field modulation was 100 (Oe). Also in this example, the magnetic field characteristics were improved by the oxidation treatment.

A sixth embodiment will be described. In this example, after the amorphous magnetic alloy film 4 was formed using a target having a composition of Tb _{2 1} Fe _{7 3} Co ₆ , Al was deposited by sputtering to a thickness of 0.5 nm. It was manufactured by the same procedure as in the third embodiment. Amorphous magnetic alloy film 4 after Al is formed
As a result of ESCA analysis of the composition of the surface of Al, Al was 50%. The magnetic field sensitivity of this magneto-optical recording medium 1 in optical modulation was 150 (Oe), and the CNR was 48 dB when the external magnetic field in magnetic field modulation was 100 (Oe). Also in this example, the magnetic field characteristics were improved by the oxidation treatment as in the first to fifth examples.

The seventh embodiment will be described. In this example, in the procedure described in the first example, the composition of the target used when forming the amorphous magnetic alloy film 4 was Tb _{2 1}
A magneto-optical recording medium 1 was produced by changing to Fe ₆ Co ₆ Cr ₈ . In the first and second examples, Al was used as the metal that is contained in the amorphous magnetic alloy film 4 and is easily oxidized, but in this example, Cr was used. Amorphous magnetic alloy film 4
As a result of ESCA analysis of the composition of Cr, 8% of Cr was contained. The magnetic field sensitivity in light modulation is 160 (Oe).
The CNR was 46 dB when the external magnetic field in the magnetic field modulation was 100 (Oe). As can be seen from these values, the magneto-optical recording medium of this example also showed no deterioration in the characteristics due to oxidation, and the magnetic field characteristics were improved by the oxidation treatment.

The eighth embodiment will be described. In the present embodiment, the easily oxidizable metal in the third embodiment is replaced with Ti. That is, after the amorphous magnetic alloy film 4 is formed by sputtering using a target having a composition of Tb _{2 1} Fe _{7 3} Co ₆ , Ti is sputter-deposited on the amorphous magnetic alloy film 4. A magnetic film was formed by stacking layers with a thickness of 0.05 nm and performing an oxidation process using oxygen gas. Others are the above 3rd
It was manufactured by the same procedure as in the example. As a result of ESCA analysis of the composition of the surface of the amorphous magnetic alloy film 4 after Ti was formed, Ti was 6%. The magnetic field sensitivity in light modulation is
140 (Oe), the external magnetic field in the magnetic field modulation is 1
The CNR when measured as 00 (Oe) was 47 dB. Also in this example, the magnetic field characteristics were improved by the oxidation treatment.

Next, a comparative example will be described. In each of the following comparative examples, the structure of the magneto-optical recording medium is the same as that shown in FIG. In the first comparative example, the composition is Tb _2
The amorphous magnetic alloy film 4 is sputter-deposited using a target of ₁ Fe _{7 3} Co ₆ , and Al is sputter-deposited on the amorphous magnetic alloy film 4 to a thickness of 0.05 nm.
No oxidation treatment was performed. Others were manufactured by the same procedure as in the third embodiment. As a result of ESCA analysis of the composition of the surface of the amorphous magnetic alloy film 4 after forming Al, Al was 5%. The magnetic field sensitivity of this magneto-optical recording medium in optical modulation was 250 (Oe), and the CNR when the external magnetic field in magnetic field modulation was 100 (Oe) was 42 dB. The magneto-optical recording medium in this comparative example had poor magnetic field characteristics.

Further, a second comparative example will be described. In this comparative example, after the amorphous magnetic alloy film 4 was formed by sputtering using a target having a composition of Tb _{2 1} Fe _{7 3} Co ₆ ,
The oxidation treatment was performed without laminating the 1 film. Others were manufactured by the same procedure as in the third embodiment. As a result of ESCA analysis of the composition of the surface of the amorphous magnetic alloy film 4, Al was 0%. The magnetic field sensitivity of the magneto-optical recording medium 1 in optical modulation was 250 (Oe), and the CNR when the external magnetic field in magnetic field modulation was 100 (Oe) was 42 dB. Also in this comparative example, the magnetic field characteristics were poor.

A third comparative example will be described. In this comparative example, an amorphous magnetic alloy film 4 was formed by sputtering using a target having a composition of Tb _{2 1} Fe _{7 3} Co ₆ , and then Al was formed by sputtering on the amorphous magnetic alloy film 4. After being laminated by 1 nm, oxidation treatment was performed. Others were manufactured by the same procedure as in the third embodiment. As a result of ESCA analysis of the composition of the surface of the amorphous magnetic alloy film 4, Al was 70%. The magnetic field sensitivity of the magneto-optical recording medium 1 in optical modulation is 250.
(Oe), and the external magnetic field in the magnetic field modulation is 100
The CNR when calculated as (Oe) was 42 dB. The magneto-optical recording medium according to this comparative example had poor magnetic field characteristics.

A fourth comparative example will be described. In this comparative example, as in the case of the seventh embodiment, an amorphous magnetic alloy film 4 was formed by sputtering using an amorphous magnetic alloy target mixed with Cr, and then an oxidation treatment was performed. The procedure was the same as in Example 7. The composition of the target used was Tb _{2 1}
The composition of the surface of the amorphous magnetic alloy film 4 was Fe _{7 1} Co ₆ Cr ₂ , and the result of ESCA analysis was 2% Cr. The magnetic field sensitivity in optical modulation of this magneto-optical recording medium is
240 (Oe), the external magnetic field in the magnetic field modulation is 1
CNR when set to 00 (Oe) was 42 dB. Also in this comparative example, the manufactured magneto-optical recording medium had poor magnetic field characteristics.

Since the surface of the amorphous magnetic alloy film was not oxidized in the above-mentioned first comparative example, the magnetic field sensitivity of the recording medium was remarkably poor as compared with the third example in which other conditions were the same. . From this, in order to improve the magnetic field characteristics of the recording medium, it is important to oxidize the surface of the amorphous magnetic alloy film, and moreover, because of the oxidization treatment, Al or the like is easily oxidized. It is understood that not only the metal is contained, but also it is necessary to positively perform the oxidation treatment using an oxidizing material such as oxygen gas.

Further, the first to eighth embodiments and the second to fourth embodiments.
Comparing with the comparative example, it is apparent that the quality of the magnetic field sensitivity is determined by the composition of the surface of the amorphous magnetic alloy film during the oxidation treatment. That is, as in the first to eighth embodiments, when the surface of the amorphous magnetic alloy film contains Al in the range of 3% to 50% during the oxidation treatment, the manufactured recording medium It can be seen that the magnetic field sensitivity characteristics of 1 are good and the effect of the oxidation treatment is great. On the other hand, as in the second to fourth comparative examples, when the contained Al is excessive or insufficient and is out of the above range, the magnetic field sensitivity is poor,
The effect of oxidation treatment is small.

On the surface of the amorphous magnetic alloy film, Al, Cr,
As a method of incorporating a metal such as Ti that is easily oxidized, as described in the first, second, and seventh embodiments, an amorphous magnetic alloy target mixed with a metal that is easily oxidized is provided, and this target is used. An amorphous magnetic alloy film containing a predetermined concentration of a metal that is easily oxidized may be formed by sputtering (FIG. 2), or as in the third to sixth and eighth embodiments, A metal that is easily oxidized may be sputter-deposited on the amorphous magnetic alloy film (FIG. 3), and good results were obtained for both.

As for the oxide material, as in the first to third embodiments and the fifth to eighth embodiments, oxygen gas is supplied by flowing it on the surface of the amorphous magnetic alloy film 1, as well as in the fourth embodiment. As shown in the embodiment, there is a method of oxidizing the transparent resin substrate 2 using a gas released from the transparent resin substrate 2 or a jig for fixing or transporting the transparent resin substrate 2. Equivalent good results were obtained.

Although one embodiment of the present invention has been described above, the present invention is not limited to this, and various modifications can be made.
For example, the amorphous magnetic alloy film 4 used in the configuration of the above embodiment
The metals that are easily oxidized include Al, Ti, and
Of Cr, or a mixture thereof, etc., considering the use, quality standard, manufacturing equipment, etc. of the recording medium to be manufactured,
The most appropriate one may be selected and used, and other metal materials may be used depending on the case. Further, as the oxidizing material used for the oxidation treatment, a mixed gas of oxygen gas and argon gas may be used in addition to the above-mentioned oxygen gas and release gas.

[0032]

[Table 1]

[0033]

As described above, in the magneto-optical recording medium according to claims 1 and 2, since the magnetic film is effectively oxidized, a magneto-optical recording medium having good magnetic field sensitivity can be provided.
Further, according to the manufacturing method of claims 3 to 8, when the surface of the magnetic film is oxidized during the manufacturing of the magneto-optical recording medium, the oxidation does not proceed to the deep part of the magnetic film, and only the pole surface is formed. Since it is oxidized, the magnetic film is effectively oxidized, and a magneto-optical recording medium having good magnetic field sensitivity can be easily manufactured. Moreover, since the reproducibility is high and the method of implementation is simple, it can be easily applied to a manufacturing facility of a magneto-optical recording medium and the like, and mass production of a high-quality magneto-optical recording medium can be achieved.

[Brief description of drawings]

FIG. 1 is a sectional configuration diagram of a magneto-optical recording medium according to an embodiment of the present invention.

FIG. 2 is a model diagram of an amorphous magnetic alloy film formed by sputtering a target in which an amorphous magnetic alloy and Al are mixed.

FIG. 3 is a model diagram showing an amorphous magnetic alloy film in which Al is sputter-deposited and laminated on the surface.

FIG. 4 is a characteristic diagram of the CNR with respect to an external magnetic field in the optical modulation method, comparing the case with the oxidation treatment effect and the case without the oxidation treatment effect.

FIG. 5 is a characteristic diagram of a CNR with respect to an external magnetic field in a magnetic field modulation method, comparing the case where there is an oxidation treatment effect and the case where there is no oxidation treatment effect.

[Explanation of symbols]

 1 Magneto-optical recording medium 2 Transparent resin substrate 3 Dielectric protective layer 4 Amorphous magnetic alloy film 4 5 Dielectric protective film 6 Reflective film

Claims (5)

[Claims] 1. A magneto-optical recording medium comprising a recording layer comprising an amorphous magnetic alloy film and a dielectric protective film laminated on a signal surface of a transparent resin substrate, wherein the surface of the amorphous magnetic alloy film comprises: 3 metals that are easily oxidized
% Or more and 50% or less, and the surface of the magneto-optical recording medium is oxidized. 2. A metal which is easily oxidized is Al, Ti, Cr.
The magneto-optical recording medium according to claim 1, wherein the magneto-optical recording medium is at least one metal selected from the group consisting of: 3. A method of manufacturing a magneto-optical recording medium comprising a recording layer comprising an amorphous magnetic alloy film and a dielectric protective film laminated on a signal surface of a transparent resin substrate, wherein the amorphous magnetic alloy film is used. On the surface of the metal 3
%, And 50% or less, the surface is subjected to an oxidation treatment, and a method for manufacturing a magneto-optical recording medium. 4. A method for manufacturing a magneto-optical recording medium comprising a recording layer comprising an amorphous magnetic alloy film and a dielectric protective film laminated on a signal surface of a transparent resin substrate, wherein the amorphous magnetic alloy film is used. The metal that is easily oxidized is sputter-deposited on the amorphous magnetic alloy film so that the metal that is easily oxidized is contained in the range of 3% to 50% on the surface of
A method for manufacturing a magneto-optical recording medium, characterized by oxidizing the amorphous magnetic alloy film. 5. A method of manufacturing a magneto-optical recording medium comprising a recording layer composed of an amorphous magnetic alloy film and a dielectric protective film laminated on a signal surface of a transparent resin substrate, wherein a metal which is easily oxidized is amorphous. By mixing with a high-quality magnetic alloy target and sputtering the target, an amorphous magnetic alloy film containing the above-mentioned easily oxidizable metal in a range of 3% to 50% is formed. A method for manufacturing a magneto-optical recording medium, which comprises oxidizing the film.