JPH0674789A - Displacement detector - Google Patents

Displacement detector

Info

Publication number
JPH0674789A
JPH0674789A JP4225599A JP22559992A JPH0674789A JP H0674789 A JPH0674789 A JP H0674789A JP 4225599 A JP4225599 A JP 4225599A JP 22559992 A JP22559992 A JP 22559992A JP H0674789 A JPH0674789 A JP H0674789A
Authority
JP
Japan
Prior art keywords
signal
output
arithmetic processing
detection
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4225599A
Other languages
Japanese (ja)
Inventor
Kazuyuki Tsujioka
一幸 辻岡
Koji Yamamoto
幸二 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4225599A priority Critical patent/JPH0674789A/en
Publication of JPH0674789A publication Critical patent/JPH0674789A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To obtain a displacement detector being mounted as an automobile component in which the position of an object can be detected highly accurately regardless of deterioration in detecting capacity at a detecting part due to temperature drift or attenuation of a transmission signal of the object. CONSTITUTION:An ultrasonic detecting part 1 is disposed at one end of a magnetostriction wire 2 and an ultrasonic signal detected through the detecting section 1 is converted through a binary encoding circuit 4 into a digital signal which is then subjected to arithmetic processing. Thus processed signals are converted, at final output stage, into analog signals through D/A converters 10, 11 in order to obtain average value outputs. This constitution detects the position of a magnet moving along the magnetostriction wire 2 and produces an electrical signal representative thereof.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、機械的な変位位置ある
いは長さを電気信号に変換する変位検出装置に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a displacement detecting device for converting a mechanical displacement position or length into an electric signal.

【0002】[0002]

【従来の技術】この種の変位検出装置において、変位検
出部よりある距離離れた点に非検出部が配置され、図5
の波形B(実線)のような位置信号を発しているような
変位検出装置においては、この信号を検出部で検出し、
二値化回路を経て二値化された信号を用い、基準時間か
らこの二値化信号到達時間までの時間を計測すること
で、非検出体と検出体の距離を測定することができるも
のである。
2. Description of the Related Art In a displacement detecting device of this type, a non-detecting portion is arranged at a point a certain distance away from the displacement detecting portion.
In a displacement detection device that emits a position signal such as the waveform B (solid line) of, the detection unit detects this signal,
By using the signal binarized through the binarization circuit, by measuring the time from the reference time to the arrival time of this binarized signal, it is possible to measure the distance between the non-detection body and the detection body. is there.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記従
来の変位検出装置では、前記二値化信号の立ち上がり成
分、もしくは立ち下がり成分だけを用いており、検出部
・非検出部の温度ドリフトにより出力値が環境温度に左
右され易く、更に二値化回路のオフセット電圧が変化し
ても同じく出力に変動をきたし、たとえば自動車用の変
位センサーに使用しようとした場合、出力電圧の温度依
存性が悪いため自動車用部品として搭載することができ
ないという課題があった。
However, in the above-mentioned conventional displacement detecting device, only the rising component or the falling component of the binarized signal is used, and the output value is caused by the temperature drift of the detection unit / non-detection unit. Is easily influenced by the ambient temperature, and even if the offset voltage of the binarization circuit changes, the output also fluctuates. For example, when using it for a displacement sensor for automobiles, the temperature dependence of the output voltage is poor. There is a problem that it cannot be mounted as an automobile part.

【0004】ここで、図5は検出部検出能力または非検
出部発信信号が変化したときの波形図であり、波形Aは
検出部時間測定用基準パルス、波形Bは検出部で検出さ
れる非検出部発信信号、波形Cは波形Bを二値化回路に
て二値化した信号である。このような波形において、検
出部検出能力または非検出部発信信号が温度によって変
化すると、図5の波線で示すように波形Bが変化し、こ
の結果波形Cも波線のように変動し、本来の測定時間t
がt′へずれ、測定誤差Δtを生じる。図6は二値化回
路のオフセット電圧が変化した時の波形図であり、本来
のオフセット電圧値vが温度変化によりv′へ変動する
と測定誤差Δtを生じる。
FIG. 5 is a waveform diagram when the detection capability of the detection section or the oscillation signal of the non-detection section changes. The waveform A is a reference pulse for measuring the detection section time, and the waveform B is a non-detection reference pulse. The detection unit transmission signal, waveform C, is a signal obtained by binarizing waveform B by a binarizing circuit. In such a waveform, when the detection unit detection capability or the non-detection unit transmission signal changes with temperature, the waveform B changes as shown by the wavy line in FIG. 5, and as a result, the waveform C also changes like the wavy line, and the original Measurement time t
Shifts to t ', causing a measurement error Δt. FIG. 6 is a waveform diagram when the offset voltage of the binarization circuit changes, and a measurement error Δt occurs when the original offset voltage value v changes to v ′ due to a temperature change.

【0005】本発明はこのような従来の課題を解決する
ものであり、自動車用部品としても搭載できる優れた変
位検出装置を提供することを目的とするものである。
The present invention is intended to solve such a conventional problem, and an object thereof is to provide an excellent displacement detecting device which can be mounted as an automobile part.

【0006】[0006]

【課題を解決するための手段】本発明は前記課題を解決
するために、検出部検出信号をその立ち上がり成分と立
ち下がり成分の二つに分け、立ち上がり成分と立ち下が
り成分の時間的中点を演算回路部で演算し、その点を非
検出部の位置とする構成としたものである。
In order to solve the above-mentioned problems, the present invention divides the detection signal of the detection unit into two components, a rising component and a falling component, and determines the temporal midpoint of the rising component and the falling component. The arithmetic circuit is used for the arithmetic operation, and the point is set as the position of the non-detection portion.

【0007】[0007]

【作用】この構成により、検出部検出信号をその立ち上
がり立ち下がりに分け、演算回路部で立ち上がり成分と
立ち下がり成分の時間的中点を演算し、その点を測定点
とすることによって、温度依存性のない優れた変位検出
装置を提供することができ、使用温度範囲のきわめて広
い自動車用部品としても搭載できることとなる。
With this configuration, the detection part detection signal is divided into its rising and falling edges, the arithmetic circuit section calculates the time midpoint between the rising component and the falling component, and this point is used as the measurement point, so that the temperature dependence is obtained. It is possible to provide an excellent displacement detection device having no property, and it can be mounted as an automobile part having an extremely wide operating temperature range.

【0008】[0008]

【実施例】【Example】

(実施例1)本発明の一実施例による変位検出装置を図
1により説明する。図において、1は磁歪線2の一端に
設けられた超音波検出部である。3はマグネットであ
り、磁歪線2に沿って移動可能である。この超音波検出
部1の出力は二値化回路4に接続されている。この二値
化回路4の超音波検出部1に対する出力の立ち上がり成
分は、第1のパルスカウンタ5のストップ信号として用
いられ、出力の立ち下がり成分は第2のパルスカウンタ
6のストップ信号として用いられる。7は電流出力部で
あり、磁歪線2にパルス電流を印加すると同時に、上記
第1及び第2のパルスカウンタ5,6のスタート信号と
なる。8は第1のパルスカウンタ5の出力を入力とする
演算処理部、9は第2のパルスカウンタ6の出力を入力
とする演算処理部である。10は演算処理部8の出力を
入力とするD/Aコンバータ、11は演算処理部9の出
力を入力とするD/Aコンバータ、12は固定抵抗部で
ある。
(Embodiment 1) A displacement detecting device according to an embodiment of the present invention will be described with reference to FIG. In the figure, reference numeral 1 is an ultrasonic wave detecting portion provided at one end of the magnetostrictive wire 2. A magnet 3 is movable along the magnetostrictive line 2. The output of the ultrasonic wave detection unit 1 is connected to the binarization circuit 4. The rising component of the output of the binarization circuit 4 to the ultrasonic wave detecting unit 1 is used as a stop signal of the first pulse counter 5, and the falling component of the output is used as a stop signal of the second pulse counter 6. . A current output unit 7 applies a pulse current to the magnetostrictive line 2 and simultaneously serves as a start signal for the first and second pulse counters 5 and 6. Reference numeral 8 is an arithmetic processing unit that receives the output of the first pulse counter 5, and 9 is an arithmetic processing unit that receives the output of the second pulse counter 6. Reference numeral 10 is a D / A converter that receives the output of the arithmetic processing unit 8, 11 is a D / A converter that receives the output of the arithmetic processing unit 9, and 12 is a fixed resistance unit.

【0009】次に上記実施例の動作について説明する。
上記実施例において、移動可能なマグネット3が任意の
位置Aにあるとする。磁歪線2に電流出力部7よりパル
ス電流が印加され、磁歪線2に磁界を生じるが、A点で
はマグネット3により磁歪を生じており、機械的ねじり
が発生してそのため超音波が発生する。これは一般的に
ビィーデマン(Wiedeman)効果と言われる。こ
の超音波は磁歪線2上を音速で伝搬し、超音波検出部1
にパルス電流印加後のt1秒後に到達する。上記第1の
パルスカウンタ5と第2のパルスカウンタ6は、上記電
流出力部7よりパルス電流が印加されると同時にこの信
号をスタート信号としてパルスカウントしている。この
時のカウントアップ用クロックパルスは、第1及び第2
のパルスカウンタ5,6より供給されているものであ
る。
Next, the operation of the above embodiment will be described.
In the above embodiment, it is assumed that the movable magnet 3 is at the arbitrary position A. A pulse current is applied to the magnetostrictive wire 2 from the current output unit 7 to generate a magnetic field on the magnetostrictive wire 2, but at the point A, the magnet 3 causes magnetostriction, which causes mechanical twisting, which in turn generates ultrasonic waves. This is generally called the Wiedeman effect. This ultrasonic wave propagates on the magnetostrictive line 2 at the speed of sound, and the ultrasonic wave detection unit 1
Is reached t 1 seconds after the pulse current is applied. The first pulse counter 5 and the second pulse counter 6 perform pulse counting using this signal as a start signal at the same time when the pulse current is applied from the current output unit 7. The count-up clock pulse at this time is the first and second clock pulses.
It is supplied from the pulse counters 5 and 6.

【0010】一方、上記マグネット3からの超音波信号
は超音波検出部1を経て二値化回路4で二値化され、そ
の立ち上がり成分は第1のパルスカウンタ5のパルスカ
ウントを停止させるストップ信号となり、その立ち下が
り成分は上記第2のパルスカウンタ6のパルスカウント
を停止させるストップ信号となる。このようにしてスト
ップされた第1及び第2のパルスカウンタ5,6のそれ
ぞれのデータを演算処理部8,9で求め、このデータを
D/Aコンバータ10,11でアナログ出力に変換す
る。更に固定抵抗部12で二つの信号の平均化を取るこ
とで、マグネット3の位置を環境温度変化に左右されに
くく検出できるものである。
On the other hand, the ultrasonic wave signal from the magnet 3 is binarized by the binarization circuit 4 through the ultrasonic wave detecting section 1, and the rising component thereof is a stop signal for stopping the pulse counting of the first pulse counter 5. And its falling component becomes a stop signal for stopping the pulse counting of the second pulse counter 6. The respective data of the first and second pulse counters 5 and 6 stopped in this way are obtained by the arithmetic processing units 8 and 9, and this data is converted into analog output by the D / A converters 10 and 11. Furthermore, by averaging the two signals with the fixed resistance unit 12, the position of the magnet 3 can be detected without being easily influenced by the environmental temperature change.

【0011】今までの一連の動作を周期的に繰り返すこ
とによりこの出力の値は定期的に更新され、マグネット
3がB点に移動しても、その移動中の位置の変化やB点
の位置の電圧が出力される。
The value of this output is periodically updated by periodically repeating the series of operations up to now, and even if the magnet 3 moves to the point B, the position change during the movement or the position of the point B is moved. Is output.

【0012】このように、本実施例によれば、超音波検
出部出力の立ち上がり成分と立ち下がり成分で、二組の
カウンタ、演算処理部、D/Aコンバータをそれぞれ駆
動し、各々のD/Aコンバータの出力の平均値を取るこ
とで、超音波検出部の温度変化に対する影響を受けにく
くするものである。
As described above, according to the present embodiment, two sets of counters, an arithmetic processing unit, and a D / A converter are driven by the rising component and the falling component of the output of the ultrasonic detecting unit, and the D / A of each of them is driven. By taking the average value of the output of the A converter, it is possible to make the ultrasonic detector less susceptible to the temperature change.

【0013】図2は本発明を実施した時の波形図であ
り、波形Aは検出部時間測定用基準パルス、波形Bは検
出部で検出される非検出部発信信号、波形Cは波形Bを
二値化回路にて二値化した信号、波形Dは波形Cの立ち
上がり成分、波形Eは波形Cの立ち上がり成分をそれぞ
れ示すものである。
FIG. 2 is a waveform diagram when the present invention is embodied. A waveform A is a reference pulse for measuring the detection unit time, a waveform B is a non-detection unit transmission signal detected by the detection unit, and a waveform C is the waveform B. The signal binarized by the binarization circuit, the waveform D shows the rising component of the waveform C, and the waveform E shows the rising component of the waveform C.

【0014】今、検出部検出能力または、非検出部発信
信号が温度によって変化すると、図2の破線で示すよう
に波形Bが変化し、波形C,D,Eも変動する。しかし
波形D,Eのタイミングでカウント演算された信号をさ
らに平均化することで、波形Bが変動しても常に波形B
の中点での計測時間tは不変となる。
Now, when the detection part detection capability or the non-detection part transmission signal changes with temperature, the waveform B changes and the waveforms C, D and E also change as shown by the broken line in FIG. However, by further averaging the signals counted at the timings of the waveforms D and E, even if the waveform B fluctuates, the waveform B is always
The measurement time t at the midpoint of is unchanged.

【0015】(実施例2)図3に本発明の他の実施例に
よる変位検出装置を示しており、図3において、13は
演算処理部8の出力と演算処理部9の出力を更に平均化
演算する演算処理部、14は演算処理部13の出力を入
力とするD/Aコンバータである。
(Embodiment 2) FIG. 3 shows a displacement detecting device according to another embodiment of the present invention. In FIG. 3, numeral 13 further averages the outputs of the arithmetic processing unit 8 and the arithmetic processing unit 9. An arithmetic processing unit for arithmetic operation, 14 is a D / A converter which receives the output of the arithmetic processing unit 13.

【0016】次に上記実施例の動作について説明する
と、この実施例においては、マグネット3からの超音波
信号は、超音波検出部1を経て二値化回路4で二値化さ
れ、その立ち上がり成分は第1のパルスカウンタ5のパ
ルスカウントを停止させるストップ信号となり、同立ち
下がり成分は上記第2のパルスカウンタ6のパルスカウ
ントを停止せるストップ信号となる。このようにしてス
トップされた第1及び第2のパルスカウンタ5,6のそ
れぞれのデータを演算処理部8,9で求め、更にこれら
のデジタル処理信号を演算処理部13で平均化し、D/
Aコンバータ14でアナログ出力に変換することで、マ
グネット3の位置を環境温度変化に左右されにくく検出
できるようになる。
Next, the operation of the above embodiment will be described. In this embodiment, the ultrasonic signal from the magnet 3 is binarized by the binarizing circuit 4 via the ultrasonic detector 1 and its rising component. Is a stop signal for stopping the pulse counting of the first pulse counter 5, and the falling component is a stop signal for stopping the pulse counting of the second pulse counter 6. The respective data of the first and second pulse counters 5 and 6 stopped in this way are obtained by the arithmetic processing units 8 and 9, and these digital processed signals are averaged by the arithmetic processing unit 13 to obtain D /
By converting into an analog output by the A converter 14, it becomes possible to detect the position of the magnet 3 unlikely to be affected by environmental temperature changes.

【0017】(実施例3)図4に本発明の他の実施例に
よる変位検出装置を示しており、図4において、41は
駆動回路42により駆動される多数個の受光素子(例え
ばCCD)が連なり、後述の発光素子部43に対面する
よう配置された受光素子部、43は駆動回路によって駆
動され、受光素子部41に沿って移動可能な受光素子部
である。
(Embodiment 3) FIG. 4 shows a displacement detecting device according to another embodiment of the present invention. In FIG. 4, reference numeral 41 denotes a large number of light receiving elements (eg CCDs) driven by a drive circuit 42. A light receiving element portion arranged in series and arranged to face a light emitting element portion 43 described later, and 43 is a light receiving element portion driven by a drive circuit and movable along the light receiving element portion 41.

【0018】45は受光素子部41からの出力信号を二
値化する二値化回路である。この二値化回路45の出力
信号の立ち上がり成分は第1のパルスカウンタ46のス
トップ信号として用いられ、出力の立ち下がり成分は第
2のパルスカウンタ47のストップ信号として用いられ
る。44は受光素子部43の駆動回路であると同時に、
この受光素子部43の駆動信号で第1,第2のパルスカ
ウンタ46,47をスタートさせるスタート信号発生回
路でもある。48は第1のパルスカウンタ46の出力を
入力とする演算処理部、49は第2のパルスカウンタ4
7を入力する演算処理部である。
Reference numeral 45 is a binarizing circuit for binarizing the output signal from the light receiving element section 41. The rising component of the output signal of the binarization circuit 45 is used as the stop signal of the first pulse counter 46, and the falling component of the output is used as the stop signal of the second pulse counter 47. Reference numeral 44 denotes a drive circuit for the light receiving element section 43, and at the same time,
It is also a start signal generating circuit for starting the first and second pulse counters 46, 47 with the drive signal of the light receiving element section 43. Reference numeral 48 is an arithmetic processing unit that receives the output of the first pulse counter 46, and 49 is the second pulse counter 4
This is an arithmetic processing unit for inputting 7.

【0019】50は演算処理部48と演算処理部49の
出力を更に平均化演算する演算処理部、51は演算処理
部50の出力を入力とするD/Aコンバータである。
Reference numeral 50 is an arithmetic processing unit for further averaging the outputs of the arithmetic processing units 48 and 49, and 51 is a D / A converter which receives the output of the arithmetic processing unit 50 as an input.

【0020】次に上記実施例の動作について説明する
と、上記実施例においては、移動可能な発光素子部43
が任意の位置Aにあるとする。発光素子部の光に対して
受光素子部41でその光を電気信号に変換し二値化回路
45へ入力する。この二値化回路45の出力の立ち上が
り成分で第1のパルスカウンタ46の出力の立ち下がり
成分で第2のパルスカウンタ47のそれぞれのパルスカ
ウントをストップさせる。
Next, the operation of the above embodiment will be described. In the above embodiment, the movable light emitting element section 43 is movable.
Is at an arbitrary position A. The light of the light emitting element portion is converted into an electric signal by the light receiving element portion 41 and input to the binarization circuit 45. The rising component of the output of the binarization circuit 45 causes the falling component of the output of the first pulse counter 46 to stop each pulse count of the second pulse counter 47.

【0021】このようにしてストップされた第1及び第
2のパルスカウンタ45,46のそれぞれのデータを演
算処理部48,49で求め、更にこれらの処理信号を演
算処理部50で平均化し、D/Aコンバータ51でアナ
ログ出力に変換することで、発光素子部43の位置を環
境温度に左右されにくく検出できるようになる。今まで
の一連の動作を周期的に繰り返すことによりこの出力の
値は定期的に更新されるものであり、発光素子部43が
B点に移動しても、その移動の位置の変化やB点の電圧
が出力される。
The respective data of the first and second pulse counters 45 and 46 stopped in this way are obtained by the arithmetic processing units 48 and 49, and further, these processed signals are averaged by the arithmetic processing unit 50, and D By converting into an analog output by the / A converter 51, it becomes possible to detect the position of the light emitting element section 43 so that it is less affected by the environmental temperature. The value of this output is periodically updated by periodically repeating the series of operations up to now, and even if the light emitting element unit 43 moves to the point B, the change in the position of the movement or the point B Is output.

【0022】このように前記実施例によれば、受光素子
部出力の立ち上がり成分・立ち下がり成分で、二組のD
/Aコンバータの出力の平均値を取ることで、発光素子
部・受光素子部の温度ドリフトに対する影響を受けにく
くすることができる。
As described above, according to the above-described embodiment, two sets of D are used for the rising component and the falling component of the light receiving element output.
By taking the average value of the output of the / A converter, it is possible to make it less susceptible to the temperature drift of the light emitting element section and the light receiving element section.

【0023】[0023]

【発明の効果】以上のように本発明は、検出部検出信号
出力の立ち上がり成分と立ち下がり成分を、演算処理部
にて時間的中点を取ることで、温度変化に対して非常に
安定した位置検出ができるという効果が得られるもので
ある。
As described above, according to the present invention, the rising and falling components of the detection signal output of the detection unit are set at the midpoint in time in the arithmetic processing unit, so that they are very stable against temperature changes. The effect that the position can be detected is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例による変位検出装置を示すブ
ロック図
FIG. 1 is a block diagram showing a displacement detection device according to an embodiment of the present invention.

【図2】同装置の信号波形図FIG. 2 is a signal waveform diagram of the device.

【図3】本発明の他の実施例による変位検出装置を示す
ブロック図
FIG. 3 is a block diagram showing a displacement detection device according to another embodiment of the present invention.

【図4】本発明の他の実施例による変位検出装置を示す
ブロック図
FIG. 4 is a block diagram showing a displacement detection device according to another embodiment of the present invention.

【図5】従来の変位検出装置の信号波形図FIG. 5 is a signal waveform diagram of a conventional displacement detection device.

【図6】同じく要部の信号波形図FIG. 6 is a signal waveform diagram of the main part of the same.

【符号の説明】[Explanation of symbols]

1 超音波検出部 2 磁歪線 3 マグネット 4 二値化回路 5 第1のパルスカウンタ 6 第2のパルスカウンタ 7 電流出力部 8,9,13 演算処理部 10,11,14 D/Aコンバータ 41 受光素子部 42 駆動回路 43 発光素子部 44 スタート信号発生回路 45 二値化回路 46 第1のパルスカウンタ 47 第2のパルスカウンタ 48,49,50 演算処理部 51 D/Aコンバータ DESCRIPTION OF SYMBOLS 1 Ultrasonic wave detector 2 Magnetostrictive wire 3 Magnet 4 Binarization circuit 5 First pulse counter 6 Second pulse counter 7 Current output section 8, 9, 13 Arithmetic processing section 10, 11, 14 D / A converter 41 Light reception Element unit 42 Drive circuit 43 Light emitting element unit 44 Start signal generation circuit 45 Binarization circuit 46 First pulse counter 47 Second pulse counter 48, 49, 50 Arithmetic processing unit 51 D / A converter

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】非検出体の発生信号を二値化する手段と、
その二値化信号の立ち上がり成分・立ち下がり成分より
二値化信号の時間的中点を演算し、その点を非検出体の
位置として位置検出演算する手段とを備えた変位検出装
置。
1. A means for binarizing a signal generated by a non-detection body,
A displacement detecting device comprising means for calculating a temporal midpoint of the binarized signal from the rising component and the falling component of the binarized signal, and performing position detection calculation using the point as the position of the non-detection body.
JP4225599A 1992-08-25 1992-08-25 Displacement detector Pending JPH0674789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4225599A JPH0674789A (en) 1992-08-25 1992-08-25 Displacement detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4225599A JPH0674789A (en) 1992-08-25 1992-08-25 Displacement detector

Publications (1)

Publication Number Publication Date
JPH0674789A true JPH0674789A (en) 1994-03-18

Family

ID=16831856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4225599A Pending JPH0674789A (en) 1992-08-25 1992-08-25 Displacement detector

Country Status (1)

Country Link
JP (1) JPH0674789A (en)

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