JPH0674557A - Pure water heater - Google Patents

Abstract

PURPOSE:To provide a pure water heating device which fluidizes foams generated during heating operation smoothly, and is provided at a low cost, in a pure water heating device. CONSTITUTION:A cylindrical water heating tank 1 is inclined upward to its downstream side, and both ends of the tank are vertically cut. The both ends are sealed with end face materials 3 and 4. A plurality of heater insertion pipes 5 are inserted in the tank in such a fashion that they cross the end face materials 3 and 4. A pure inlet pipe 6 is installed to the lower part of the tank near the end face on the upstream side while a pure water outlet pipe 7 is installed to the upper part of the tank near the end face on the downstream side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pure water heating device used in a semiconductor manufacturing process or the like.

[0002]

2. Description of the Related Art As is well known, since a device for heating pure water is made of a material such as transparent quartz glass or Teflon, it is an expensive device because of the cost of raw materials and the difficulty of processing. FIG. 7 is a vertical sectional view of a conventional pure water heating device,
As shown in the figure, the body 22 of the heated water tank 21 and the plurality of heater insertion pipes 23 inserted in the body 22 are arranged in parallel, so that the bubbles generated during the heating of pure water stay. As a result, temperature unevenness may occur, or bubbles may block the flow passages, increasing the flow passage resistance and destroying the heating water tank. Further, as shown in the figure, since the pure water inlet pipe 24 and the pure water outlet pipe 25 are provided on the peripheral surface of the body 22, the processing is difficult, and the connecting pipe 26 is required when the heating water tanks are arranged in series vertically. Therefore, the cost is high and the structure is not compact.

[0003]

SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a pure water warming device which can deal with the generation of bubbles at low cost.

[0004]

That is, according to the present invention, a cylindrical heating water tank is provided with an upward gradient toward the downstream side, and both end portions are cut vertically, and both end portions are end members. The heater insertion pipes are inserted so as to be orthogonal to the both end face members, and the pure water inlet pipe is provided in the lower portion near the upstream end face and the pure water outlet pipe is provided in the upper portion near the downstream end face. According to a second aspect of the present invention, the cylindrical heating water tank is provided with an upward gradient toward the downstream side, both ends are cut vertically, and both ends are sealed by end face members. In the deionized water warming device having a configuration in which a plurality of heating water pipes having a plurality of heater insertion pipes inserted so as to be orthogonal to the end face members are arranged above and below, an upstream end face member of the heating water bath disposed at a lower part A pure water inlet pipe is provided in the lower part of the, and an outlet hole is formed on the peripheral surface in the vicinity of the downstream end face member, An inlet hole is formed in the peripheral surface of the upstream end face member of the warming water tank disposed in the above portion, and a pure water outlet pipe is provided above the downstream end face member, and the outlet hole and the inlet hole are formed. It is characterized in that they communicate with each other through a joining member.

[0005]

According to the present invention, the pure water heated in the warm water tank flows toward the pure water outlet pipe provided on the upper portion of the downstream end face member, but the upper portion on the downstream side becomes wider due to the gradient. Since the air bubbles are in contact with each other, they flow while coalescing. Therefore, there is no problem due to air bubbles in the warm water tank and the pure water outlet pipe, and no temperature unevenness occurs.

[0006]

Embodiments of the present invention will be described in detail below with reference to the drawings. 1 is a vertical sectional view of a warming water tank 1 of a pure water heating apparatus according to claim 1 of the present invention, FIG. 2 is a right side view of FIG. 1, and FIG. 3 is a left side view of FIG. In FIG. 1, 1
Is a warm water tank, which is composed of a cylindrical body 2, an upstream end face member 3, a downstream end face member 4, a plurality of heater insertion pipes 5, a pure water inlet pipe 6 and a pure water outlet pipe 7. The deionized water heating device is composed of a deionized water supply line, a water intake line, a water storage tank, a water distribution line, a heating member, etc., which are not shown, in addition to the heated water tank.

Transparent quartz glass is used for all the constituent members of the heating water tank 1. Both ends of the body 2 are obliquely cut to a predetermined length with respect to the cylindrical wire, and the upstream end face member 3 is provided on the upstream side (left side in FIG. 1) of the both end faces and the downstream side (see FIG. 1). The downstream end face member 4 is sealed on the right side), and both end face members 3 and 4 are arranged vertically. That is, the cylindrical line of the body 2 has a predetermined gradient (about 1.5 ° in this embodiment) toward the downstream side with respect to the horizontal. Then, between the upstream end face member 3 and the downstream end face member 4, as shown in FIGS. 2 to 3, six heater insertion pipes 5 are orthogonal to both end face members 3 and 4. The warm water tank 1 is formed by inserting the pure water inlet pipe 6 below the upstream end face member 3 and the pure water outlet pipe 7 above the downstream end face member 4. The pure water inlet pipe 6 and the pure water outlet pipe 7 can also be inserted perpendicularly to the peripheral surface of the body 2 in the vicinity of their ends, as shown by the phantom lines in FIG.

Next, the operation of the present invention will be described.
Pure water flowing from the pure water supply line (not shown) into the warm water tank 1 through the pure water inlet pipe 6 is heated by a heating member (not shown) inserted in the six heater insertion pipes 5 such as a halogen lamp. While being heated and rising in temperature, it flows toward the pure water outlet pipe 7 on the downstream side and flows into the water storage tank 7 through the water intake line connected to the pure water outlet pipe 7. Then, pure water at a predetermined temperature is supplied as cleaning water to a semiconductor manufacturing process or the like through a water distribution line. In addition, since the warming water tank 1 is arranged in an upward slope toward the downstream side, the bubbles generated at the time of temperature rise are
They gather between the heater insertion pipe 5 arranged above and the body 2 and float to the body 2 side. The floating bubbles smoothly flow along the upper inner wall because the body 2 has an upward slope. Therefore, there is no problem due to bubbles in the warm water tank 1 and the pure water outlet pipe 7, and no temperature unevenness occurs.

An embodiment of claim 2 which replaces the above embodiment will be described in detail with reference to the drawings. The same members as those in the above embodiment are designated by the same reference numerals, and the description of the same components will be omitted. FIG. 4 is a system diagram of an integrated pure water heating apparatus in which two heating water tanks 1 are vertically arranged in series, and FIG. 5 is a vertical cross-sectional view of the heating water tank 1 integrally formed in FIG. FIG. 6 is a right side view of FIG. In FIG. 4, 1 is a heating water tank, 12 is a water storage tank, 13 is a pure water supply line, and 14 is a heating water tank 1 and a water storage tank.
A water intake line connecting 12; a water distribution line 15; and a temperature sensor 16.

As shown in FIGS. 5 and 6, the heating water tank 1 is composed of a lower heating water tank 1a and an upper heating water tank 1b. The heating water tanks 1a and 1b are arranged in an upward slope toward the downstream side. I am doing it. Then, a pure water inlet pipe 6 is inserted in the lower part of the upstream end face member 3a of the lower heating water tank 1a, and an outlet hole 8 is formed in the upper peripheral surface near the downstream end face. On the other hand, an inlet hole 9 facing the outlet hole 8 formed in the lower heating water tank 1a is formed in the lower peripheral surface of the upstream side end surface of the upper heating water tank 1b, and the outlet hole 8 and the inlet hole 9 are joined together. At 10, the upper and lower heated water tanks 1a and 1b are joined so that both end surfaces are vertical. or,
A pure water outlet pipe 7 is inserted above the downstream end face member 4b of the upper heated water tank 1b and communicated with the water intake line 14. 11 in the figure
Fixes the upper and lower heated water tanks 1a and 1b with a stay member.

Next, the operation of this embodiment will be described. It is to be noted that the portions overlapping with the operation of the above-mentioned embodiment of claim 1 will be omitted. As shown in FIG. 4, the pure water flowing from the pure water supply line 13 into the lower heating water tank 1a through the pure water inlet pipe 6 is heated by a plurality of heaters or the like and heated through the joining member 10 through the joining member 10. And flows into the upper heated water tank 1b. Then, it is further heated in the upper heating water tank 1b to a predetermined temperature (75
The pure water heated to ℃ ~ 85 ℃) flows out to the water intake line 14 through the pure water outlet pipe 7 attached to the upper heating water tank 1b, and the temperature is detected by the temperature sensor 16 inserted in the middle of the water storage tank. Inflow into 12. Since the upper and lower warming water tanks 1a and 1b are arranged in an upward gradient toward the downstream side, respectively, as in the above-mentioned embodiment, there is no problem due to bubbles and no temperature unevenness occurs. Further, the temperature sensor 16 checks whether the pure water has been heated to a predetermined temperature, and notifies the controller (not shown) via a communication line (not shown) to adjust the heating member to adjust the pure water. Is controlled to be within a predetermined temperature.

[0012]

The present invention has the above-mentioned structure.
Since the warming water tank is arranged on the downstream side with respect to the heater insertion pipe in an upward gradient, the flow of air bubbles can be smoothed and the temperature can be made uniform, and the pure water can be warmed to a predetermined temperature smoothly. Further, since the heating water tank is arranged in a gradient, a space is created in the heater insertion pipe inserted into the end face members, and the pure water inlet pipe and the pure water outlet pipe can be inserted into the end face members, which facilitates the processing. In the integrated type according to the second aspect, since the upper and lower heating water tanks are respectively arranged in the upward slope toward the downstream side, the conventional piping structure is not required, and the manufacturing cost can be reduced.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a warming water tank according to a first embodiment of the present invention.

FIG. 2 is a right side view of FIG.

FIG. 3 is a left side view of FIG.

FIG. 4 is a system diagram of a pure water heating apparatus according to claim 2 of the present invention.

5 is a vertical cross-sectional view of the integrated heating water tank of FIG.

FIG. 6 is a right side view of FIG.

FIG. 7 is a vertical cross-sectional view of a conventional heating water tank.

[Explanation of symbols]

 1. Heating water tank 3. Upstream end face member 4. Downstream end face member 5. Heater insertion pipe 6. Pure water inlet tube 7. Pure water outlet pipe 1a. Upper heating water tank 1b. Lower heating water tank 3a. Upstream end face member 3b. Upstream end face member 4a. Downstream end face member 4b. Downstream end face member 8. Exit hole 9. Inlet hole 10. Joining member

Claims (2)

[Claims] 1. A cylindrical heating water tank 1 is provided with an upward gradient toward the downstream side, both ends are cut vertically, and both ends are sealed by end face members 3 and 4. Both end surface members 3, 4
A plurality of heater insertion pipes 5 are inserted so as to be orthogonal to, and a pure water inlet pipe 6 is provided in the lower part near the upstream end face.
A deionized water heating device, characterized in that a deionized water outlet pipe 7 is provided in the upper part near the downstream end face. 2. A cylindrical heating water tank 1 is provided with an upward slope toward the downstream side, both ends are cut vertically, and both ends are sealed by end face members 3 and 4. Both end surface members 3, 4
In a pure water warming device having a configuration in which a plurality of heating water tanks 1 each having a plurality of heater insertion pipes 5 inserted therein are arranged vertically so that the upstream end face member 3 of the heating water tank 1a arranged at the bottom is
The pure water inlet pipe 6 is provided in the lower part of a, the outlet hole 8 is formed in the peripheral surface of the downstream side end face member 4a in the proximity position, and the upstream side end face member 3b of the warming water tank 1b disposed in the upper part is provided. An inlet hole 9 is formed in the peripheral surface, a pure water outlet pipe 7 is provided above the downstream end face member 4b, and the outlet hole 8 and the inlet hole 9 are communicated with each other via a joining member 10. Pure water heating device.