JPH0674298A - Vibration damping mount - Google Patents

Abstract

PURPOSE:To provide a vibration damping mount with a high vibration damping effect for supporting precision equipment such as an optical microscope and a scanning tunnel microscope, a machine such as a precision lathe for performing high accuracy machining work, and other equipment. CONSTITUTION:A viscous body layer 7 is provided between a support base 5 receiving the load of equipment, and a foundation plate 8 brought into contact with the installation face where the equipment is installed. The viscous body layer 7 is made work as damping material so as to suppress the vibration of the equipment.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration damping mount for supporting precision machines such as optical microscopes and scanning tunnel microscopes, machines such as precision lathes for performing highly accurate machining, and other equipment.

[0002]

2. Description of the Related Art As a mount (supporting device) for mounting equipment such as machines, instruments and instruments on an installation surface such as a floor, a mount as shown in FIG. 7 is generally adopted. That is, this is composed of a base a having high rigidity, and a leveling bolt b for height adjustment is abutted on the base a. The lower end of the leg of the device as described above is generally connected to the leveling bolt b of the mount. The main purpose of such mounts is to make the installation rigidity of the equipment as high as possible.

[0003]

However, in the case of the above-mentioned conventional mount, although the installation rigidity is high, there is a problem in terms of the vibration damping property in the horizontal direction. That is, in general, the leg portion of the above device has high vertical rigidity, but has low horizontal rigidity.
The resonance point of the leg may appear near several tens of Hz, and the vibration of the device may be amplified at that frequency (see FIG. 3). Therefore, such a mount is not suitable for a device such as the above-mentioned optical microscope that has a severe demand for damping. Also, the problem of horizontal vibration is common to machine tools,
In this case, the vibration during machining is amplified by the above resonance,
The processing accuracy will deteriorate.

[0004]

SUMMARY OF THE INVENTION The present invention provides a mount having a high vibration damping property by using a viscous body having an intermediate property between solid and liquid.

That is, the first means for solving the above-mentioned problems (the invention according to claim 1) is a vibration damping mount for supporting a device, and a support base for receiving the load of the device and the installation of the device. It is characterized by comprising a base plate which is brought into contact with the installed surface, and a viscous layer provided between the support and the base plate.

As the above-mentioned support base, a support made of steel or other material having high rigidity, which is not deformed by the load of equipment, is suitable. Further, it is preferable to apply a material having a high rigidity to the above-mentioned base plate as well, in order to improve the accuracy of the horizontal level, but it may be made of rubber or plastic. From the viewpoint of improving the vibration damping property and protecting the installation surface, such a material having relatively low rigidity is preferable.

The viscous layer is preferably formed by a pressure-sensitive adhesive which has viscosity at room temperature and adheres to an adherend with a light pressure, a so-called pressure-sensitive adhesive. It is possible to use a polymer alone, or a rubber having a large elasticity as an elastomer and a tackifier resin added thereto. In this case, the viscosity of the viscous body is preferably 5000 to 7000 cps.

Adhesion between the viscous layer and the support base and the base plate, or an intermediate plate described later can be obtained only by the adhesive force of the viscous layer, but if necessary, an adhesive is used in combination. Things are not limited.

A second means for solving the above problems (claim 2)
The invention described in 1) is a development of the first means, wherein a plurality of viscous layers are laminated between the upper and lower viscous layers via an intermediate plate between the support base and the base plate. It is characterized by that.

The intermediate plate may be the same as the base plate, but may be made of different materials. As a laminated form of the viscous layer and the intermediate plate, it is preferable to sandwich the intermediate plate between the upper and lower viscous layers, but a plurality of the viscous layers and a plurality of intermediate plates are alternately stacked to form a stack. The upper layer and the lowermost layer may be composed of a viscous layer.

A third means for solving the above problems (claim 3)
The invention according to claim 1) is a development of the above-mentioned first means or second means, wherein
It is characterized in that a protrusion is provided so as to come into contact with the base plate in accordance with the horizontal displacement of the support base and to restrict the horizontal displacement amount of the support base within a certain range.

The slip prevention can be constructed by providing an annular projection projecting downward all around the lower surface of the support base. From a different point of view, such a structure is such that a recess for accommodating the base plate and the viscous layer or the intermediate plate is formed in the central portion of the lower surface of the support base, and the peripheral wall of the recess serves as a stopper. You can It is also possible to form protrusions at a plurality of circumferentially spaced intervals on the lower surface of the support base to prevent the protrusions from shifting.

[0013]

In each of the first to third means, the viscous layer between the support and the base plate acts as a damping material that absorbs vibration energy (converts it into heat energy). Then, the vibration energy in this case is absorbed by the viscous resistance when the viscous body layer is plastically deformed, but since the viscous body layer is easy to shear and deform in the horizontal direction, it is excellent in the absorbability of this horizontal direction vibration, for example, , It is possible to lower the resonance peak of the leg of the above-mentioned device or eliminate the resonance.

Further, in terms of manufacturing a vibration damping mount, when a pressure-sensitive adhesive is used for the above-mentioned viscous body, unlike an adhesive, an adhesive effect can be obtained simply by pressing without applying to an adherend. It is possible, therefore, just peel off the release paper (paper for protecting the adhesive surface) that has been pasted in advance, press the adhesive thin plate against the support base, and press the base plate onto it.
You can easily obtain the vibration control mount.

Further, the above-mentioned vibration damping in the horizontal direction can be obtained by arranging the oil damper horizontally, but in the case of each of the above means, a container for enclosing the oil or an oil passage with an orifice is used. Such a complicated instrument is unnecessary, and the structure is extremely simple.

In the second means, since the viscous layer and the intermediate plate are laminated between the support base and the base plate, the intermediate plate adjusts the damping mount to a desired damping characteristic. In addition to the above, it becomes possible to obtain a dynamic vibration absorbing effect by separately forming a vibration system having the intermediate plate as a mass.

Further, in the third means, the shift stopper provided on the support base can prevent a large relative displacement between the support base and the base plate when a large external force is applied.

[0018]

Therefore, according to each of the first to third means, a viscous layer is provided between the support base that receives the load of the equipment and the base plate that is in contact with the installation surface on which the equipment is installed. Therefore, it is possible to obtain a high damping effect by plastic deformation of the viscous layer, especially the horizontal damping effect is increased, and it is possible to prevent the vibration of the equipment from increasing by suppressing the resonance of the leg part of the equipment against external horizontal vibration. And the manufacture of the vibration damping mount is extremely simple.

Further, according to the second means, since the viscous layer and the intermediate plate are laminated between the support base and the base plate, the desired damping characteristics can be achieved while improving the damping characteristics. Will be easier to obtain.

Further, according to the third means, the peripheral edge of the lower surface of the support base is brought into contact with the base plate in accordance with the horizontal displacement of the support base, and the horizontal displacement amount of the support base is restricted within a certain range. Since the anti-slip is provided in a protruding manner, it is advantageous in that the installation rigidity of the equipment is secured while obtaining a high damping property.

[0021]

Embodiments of the present invention will be described below with reference to the drawings.

<Embodiment 1> The configuration of this embodiment is described in FIGS. 1 and 2. In FIG. 1, reference numeral 1 is a vibration damping mount, 2 is a table (equipment) on which a precision machine or the like is mounted, and the vibration damping mount 1 is attached to the lower ends of the four legs 3 of the table 2. .

The specific structure of the vibration damping mount 1 is shown in FIG. In the figure, 5 is a high-rigidity support stand that receives the load of the equipment and the table 2, and a leveling bolt 6 for adjusting the height of the table 2 is in contact with the upper surface thereof. The leveling bolt 6 is a headed bolt, and its head is in contact with the upper surface of the support 5. Then, the base plate 8 is fixed to the lower surface of the support base 5 via the viscous layer 7. The height of the table 2 can be adjusted by rotating the head of the leveling bolt 6 with a tool to change the screwing position of the screw portion of the leveling bolt 6 of the table 2.

The support 5 and the base plate 8 are made of steel. On the other hand, the viscous layer 7 is formed by a pressure-sensitive adhesive made of a two-component cross-linking acrylic copolymer consisting of a main agent and a curing agent shown in Table 1, and its viscosity is 6000 cps. In the production of the pressure-sensitive adhesive, the main agent and the curing agent are mixed at a ratio of 100: 0.6, and 1
It was dried at 00 ° C for 2 minutes and aged at room temperature for 7 days.
The thickness of the viscous layer 7 is 100 μm.

[0025]

[Table 1] The adhesive performance of the viscous layer 7 is as follows. Shear adhesive strength: 20-30kgf / 20 × 25mm ² 90 degree Peeling strength: 1.2-1.8kgf / 25mm Shear cohesive force: 70 ° C, 500gr / 25 × 25mm ² for 24 hours No abnormality Initial adhesion: Ball number (× 1/32 inch) 12
~ 16

FIGS. 3 and 4 show data obtained by actually measuring the horizontal vibration transmissibility (dB) of the vibration damping mount 1 of this embodiment and the conventional mount shown in FIG. It is shown. In the measurement, the mount was attached to the table 2 shown in FIG. 1, and the transfer function of the vibration acceleration on the floor under the slight vibration and the upper surface of the table 2 was obtained by the FFT analyzer. Figure 3 shows the result of the conventional mount.
4 and the same result for the vibration damping mount 1 of the present embodiment is shown in FIG. According to the figure, in the conventional example, a peak due to resonance is seen near 34 Hz, but in the example, there is no such peak, and in the frequency region higher than 25 Hz, the damping effect higher than that of the conventional example is obtained. Has been obtained. This supports the effect of the viscous layer 7.

<Embodiment 2> FIG. 5 shows only the main part of the configuration of this embodiment. The difference from the first embodiment is that the viscous body layer 7 has two layers, an intermediate plate 9 is provided for that purpose, and the support base 5 does not shift.
This is the point where a is provided.

That is, the intermediate plate 9 is provided between the upper and lower viscous layers 7, 7, the upper surface of the upper viscous layer 7 is fixed to the lower surface of the support 5, and the lower surface of the lower viscous layer 7 is the base plate. It is fixed to the upper surface of 7. Then, an annular protrusion protruding downward from the entire peripheral edge of the lower surface of the support base 5 is provided, and the viscous layers 7, 7, the base plate 8 and the intermediate plate 9 are provided inside the annular protrusion with a certain gap. The annular projection is housed and abuts on the base plate 8 in accordance with the horizontal displacement of the support base 5, and constitutes a shift stopper 5a for restricting the horizontal displacement amount of the support base 5 within a certain range.
The lower end of the shift stopper 5a is positioned higher than the lower surface of the base plate 8 in order to secure the vibration damping effect of the viscous layer 7.

Therefore, in the case of this embodiment, a high damping effect can be obtained by the two viscous layers 7, 7 and the intermediate plate 9, and the shift stopper 5a prevents excessive horizontal displacement of the table 2. can do.

<Embodiment 3> The structure of this embodiment is shown in FIG. 6 only in its main part, and the fixing structure of the leveling bolt 6 is different from that of the previous embodiment.

That is, the support base 5 of this example is formed into an annular body having a through hole 5b in the center thereof, and
On the lower surface of the support base 5, a concave portion 5c that is recessed upward is formed in the peripheral portion of the through hole 5b. On the other hand, the lower end of the leveling bolt 6 is provided with a small diameter shaft 6a having a diameter smaller than that of its threaded portion. Then, the small-diameter shaft 6a of the leveling bolt 6 is inserted into the through hole 5b of the support base 5, a snap ring 10 is fitted to the lower end thereof, and the leveling bolt 6 is rotated by a tool. The head 11 is integrally provided, and the lower surface of the head 11 is rotatably abutted on the upper surface of the support 5.

The upper viscous layer 7 is formed in an annular shape corresponding to the recess 5c formed on the lower surface of the support 5. Other configurations are the same as those in the second embodiment.

[Brief description of drawings]

FIG. 1 is a perspective view showing the overall structure of a first embodiment.

FIG. 2 is a cross-sectional view showing the vibration damping mount of the first embodiment.

FIG. 3 is a graph showing vibration transmission characteristics of a conventional example.

FIG. 4 is a graph showing a vibration transfer characteristic of the first embodiment.

FIG. 5 is a partially omitted sectional view showing a vibration damping mount according to a second embodiment.

FIG. 6 is a cross-sectional view, partly omitted, showing a vibration damping mount according to a third embodiment.

FIG. 7 is a sectional view showing a conventional mount.

[Explanation of symbols]

 1 Vibration Suppression Mount 2 Table 5 Support Base 5a Locking 6 Leveling Bolt 7 Viscous Layer 8 Foundation Plate 9 Intermediate Plate

Claims (3)

[Claims] 1. A vibration-damping mount for supporting equipment, comprising: a support base for receiving the load of the equipment; a base plate abutting against an installation surface on which the equipment is installed; and the support base and the base plate. A vibration-damping mount, characterized in that it has a viscous layer provided therebetween. 2. The vibration damping mount according to claim 1, wherein a plurality of viscous layers are laminated between the upper and lower viscous layers with an intermediate plate interposed between the support and the base plate. 3. A shift stopper that abuts on the base plate according to the horizontal displacement of the support table and restricts the horizontal displacement amount of the support table within a certain range is provided at the peripheral edge of the lower surface of the support table. The vibration damping mount according to claim 1 or 2.