JPH0671985U - Compound moving high vacuum valve - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a high vacuum valve for rotating and linearly moving a valve plate with respect to a valve seat. [Structure] Both end portions of a rotary shaft 11 provided in a diametrical direction of a valve plate 9 are movably inserted into an opening / closing groove 15 provided in an operation plate 14 straddling the valve plate, and non-rotatably provided at a tip of the rotary shaft. The rotating table 25 attached to the rotary groove 24 provided on the body 1
Movably insert into. When the operation plate 7 is pressed by the operation unit 7, the rotary table 25 moves from the horizontal portion 24a of the rotation groove to the bent portion 24c, the valve plate rotates 90 degrees, and the rotation shaft 11 is opened and closed by the subsequent pressing of the operation unit. Since it moves from the upper part 15a to the inclined part 15b, the valve plate 9 moves linearly and comes into pressure contact with the valve seat 6.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a compound moving type high vacuum valve that rotates a valve plate relative to a valve seat and advances straight.

[0002]

[Prior art]

 In a high-vacuum valve, the valve plate with its valve seat open is rotated in a direction substantially parallel to the flow direction of the fluid in order to prevent flow resistance of the fluid, in other words, to increase the conductance of the valve. Need to let. 2. Description of the Related Art Conventionally, a butterfly valve has been known as a valve that rotates a valve plate by an appropriate operating portion to make a valve body with a valve seat open substantially parallel to a fluid flow direction. However, since the known butterfly valve is uncertain about the sealing of the valve seat by the valve plate, when used in a high vacuum valve, there is a problem that a large amount of fluid leaks and a high vacuum cannot be maintained.

[0003]

[Problems to be solved by the device]

 The problem to be solved by the present invention is to provide a high vacuum valve in which the valve seat is completely sealed by the valve body and the valve conductance is large.

[0004]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the compound moving type high vacuum valve of the present invention is a vacuum valve for moving a valve plate by advancing and retracting an operating portion to open and close a valve seat provided in a flow path of a body. Both end portions of the rotary shaft provided in the diametrical direction of the valve plate are movably inserted into open / close grooves provided at the end of the operation plate straddling the valve plate, and non-rotatably attached to the tip of the rotary shaft. A rotary base is movably inserted into a rotary groove provided on the body, and the open / close groove is retracted obliquely from the upper part in a direction substantially orthogonal to the pressing direction of the operation plate by the operation part. The rotary groove includes a horizontal portion substantially parallel to the pressing direction, a vertical portion substantially vertical to the pressing direction, and a bent portion therebetween, and the valve plate is moved by moving the operating portion forward and backward. It is characterized by rotating and going straight to open and close the valve seat. Further, in order to regulate the posture of the valve plate, in the above-mentioned composite movable high vacuum valve, the end portion of the operating plate is provided with a parallel holding groove that is substantially parallel to the pressing direction of the operating plate, and passes through the parallel holding groove. The parallel holding shaft is characterized in that both ends are attached to the body. Further, in order to solve the same problem, in the above-mentioned combined movement type high vacuum valve, an operation plate is swingably attached to an operation portion, and an end portion of the operation plate is arranged in a pressing direction of the operation plate. A rotation holding groove having an inclined opening / closing groove, an inclined portion inclined in a direction opposite to the opening / closing groove, and a horizontal portion substantially parallel to the pressing direction. It is characterized in that both ends are attached to the body.

[0005]

[Action]

 When the valve plate opens the valve seat and is in a posture substantially parallel to the flow direction of the fluid, the rotary shaft of the valve plate is located at the upper end of the opening / closing groove provided on the operation plate. The turntable attached to is located at the end of the horizontal part of the rotation groove. When the operating plate is pressed by the operating part, the rotary shaft of the valve plate is pressed by the upper part of the opening / closing groove, so that the rotary base moves from the horizontal part of the rotating groove to the bent part, which causes the valve plate to rotate 90 degrees. Then, the posture becomes almost orthogonal to the flow direction of the fluid. Subsequent pressing of the operating plate by the operating part causes the rotary shaft to move along the inclined part of the opening / closing groove, so the rotary base moves along the vertical part of the rotating groove, so the valve plate moves linearly and presses against the valve seat. To do. Therefore, the valve seat is reliably sealed by the valve body, and the fluid does not leak even in a high vacuum. When the operating part is moved in the opposite direction to the above, the rotary shaft moves along the inclined part of the open / close groove, and the rotary base moves along the vertical part of the rotary groove, so the valve plate moves linearly and the valve seat moves. Is opened, and then the rotary base is rotated by about 90 degrees by the bent portion of the rotary groove, so that the valve plate is in a posture substantially parallel to the fluid flow direction.

Further, since the parallel holding groove which is substantially parallel to the pressing direction of the operating portion is provided at the end portion of the operation plate and both ends of the parallel holding shaft inserted into the parallel holding groove are attached to the body, the opening and closing groove is formed. The valve plate is prevented from rising when the rotary shaft is pressed.

Further, the operation plate is swingably attached to the operation portion, and an opening / closing groove that is inclined with respect to a pressing direction of the operation plate is provided at an end portion of the operation plate, and is inclined in a direction opposite to the opening / closing groove. By providing an inclined portion and a rotation holding groove having a horizontal portion substantially parallel to the pressing direction, and attaching both ends of the rotation holding shaft passing through the rotation holding groove to the body, the structure of the opening / closing groove is simplified. Moreover, the rotation posture of the valve plate can be controlled by the rotation holding shaft and the rotation holding groove.

[0008]

【Example】

 1 to 6 show a first embodiment of the present invention, in which a body 1 of the compound moving type high vacuum valve includes a cylindrical main body 2 and flanges 3a which are hermetically attached to both axial ends thereof by welding. , 3b, and a chamber port 4 and a pump port 5 facing each other are formed in these flanges 3a, 3b, and a valve seat 6 is formed on the main body 2 side of the chamber port 4, and A fluid pressure cylinder (not shown), which is an example of an operation unit 7 for pressing an operation plate to be described later, is attached.

The disk-shaped valve plate 9 that opens and closes the valve seat 6 has a ring-shaped seal member 10 that seals the valve seat 6 side surface and rotates in the diametrical direction on the opposite side surface. Rollers 13 and 13 (ball bearings) provided with a shaft 11 and rotatably mounted near both ends of the rotating shaft 11 are opening / closing grooves 15 formed at ends 14a and 14a of an operation plate 14 straddling the valve plate 9. The opening / closing groove 15 includes an upper portion 15a that is substantially orthogonal to the pressing direction of the operating plate 14 by the operating portion 7, and an inclined portion 15b that extends obliquely downward from the upper portion 15a. Further, the end portions 14a, 14a are provided with parallel holding grooves 16 above the opening / closing groove 15 which are substantially parallel to the pressing direction, and the parallel holding shafts parallel to the rotating shaft 11 and having both ends attached to the main body 2 are provided. Rollers 17 and 17 are rotatably mounted at a position passing through the parallel holding groove 16 (see FIG. 4).

The pressing member 19 attached to the piston rod 18 of the fluid pressure cylinder has an intermediate portion of the operation plate 14 attached by a bolt 20 to the tip inserted into the body from the opening of the body 2. Therefore, when the piston rod 18 presses the pressing member 19, the operation plate 14 is pressed. Further, both ends of a metal bellows 21 that hermetically seals the opening are welded to the periphery of the opening and the outer periphery of the base of the pressing member 19 (see FIG. 1).

Rotation guide plates 23, 23, which are shown in detail in FIG. 5, are attached to the main body 2 so as to face each other in the radial direction, and rotation grooves 24, 23 formed in the rotation guide plates 23, 23 are provided. The reference numeral 24 includes a horizontal portion 24a that is substantially parallel to the pressing direction, a vertical portion 24b that is substantially orthogonal to the horizontal portion 24a, and a bent portion 24c therebetween. The rotary bases 25, 25 moving along the rotary grooves 24, 24 have a pair of rollers 26, 26 rolling in the rotary grooves 24 as shown in detail in FIG. Spring pins 27 that pass through holes provided in the shaft 11 and 11 are non-rotatably attached to both ends of the rotary shaft 11 in the axial direction. The vertical direction, the horizontal direction, the vertical direction, and the like in the first embodiment are based on the pressing direction of the operating portion 7 in the figure, and are not related to the installation posture of the valve.

The upper part of FIG. 2 shows a state in which the valve plate 9 is rotated in a posture substantially parallel to the axis of the body 1 (fluid flow direction) and the valve seat 6 is opened. In the upper part 15a of the opening / closing groove 15, the parallel holding shaft 12 is located at the left end of the parallel holding groove 16, and the rotary table 25 is located at the right end of the horizontal portion 24a of the rotary groove 24 (see FIGS. 4 and 5). .

When the pushing member 19 is moved forward toward the body 1 by the piston rod 18 of the operation portion 7, the upper portion 15 a of the opening / closing groove 15 pushes the rotating shaft 11, so that the rotating shaft mounted on the rotating shaft 11 is rotated. The base 25 moves leftward in the drawing along the horizontal portion 24a of the rotation groove of the rotation guide plate 23, and is rotated by about 90 degrees by the bent portion 24c. Therefore, the valve plate 9 integral therewith is also rotated at the same angle and the axis of the body 1 is rotated. The posture becomes orthogonal to. When the operation plate 14 is further pressed, the rotary shaft 11 moves from the upper portion 15a of the opening / closing groove along the inclined portion 15b, whereby the rotary base 25 moves downward in the vertical portion 24b of the rotary groove in the figure, When the plate 9 moves toward the valve seat 6 and the rotary shaft 11 moves to the lower end of the inclined portion 15b of the open / close groove and the rotary table 25 moves to the lower end of the vertical portion 24b of the rotary groove, respectively, the sealing material of the valve plate 9 is moved. 10 is pressed against the valve seat 6 to obtain the sealing force required to maintain a high vacuum (see the lower part of FIG. 2). Therefore, the seal of the valve seat 6 by the valve plate 9 is sure, and the fluid does not leak even in a high vacuum. Further, since the parallel holding shaft 12 having both ends fixed to the body 1 is inserted into the parallel holding grooves 16 and 16 of the end portions 14a 1 and 14a of the operation plate 14, the valve plate 9 is not removed even if the operation plate 14 is pressed. It never rises.

When the pressing member 19 is retracted by the piston rod 18 in the state where the valve plate 9 closes the valve seat 6, the rotary shaft 11 moves upward in the drawing by the inclined portion 15b of the opening / closing groove, and the rotary table 25 Moves upward in the vertical portion 22b of the rotary groove, so that the valve plate 9 moves in the axial direction of the body 1 to open the valve seat 6. When the pressing member 19 is further retracted, the rotary shaft 11 reaches the upper portion 15a of the opening / closing groove, and the rotary table 25 is rotated by the bent portion 24c of the rotary groove, so that the valve plate 9 is rotated approximately 90 degrees to move in the axial direction. It becomes a parallel posture, and then moves to the end of the horizontal portion 24b. Therefore, the conductance of the valve can be increased.

7 to 10 show a second embodiment of the present invention. An operation plate 31 of the second embodiment has a rotation holding groove 32 and an opening / closing groove 33 at end portions 31a, 31a straddling the valve plate 9. It is provided and is swingably attached to the pressing member 19 by the swing shaft 34. The rotation holding groove 32 includes an inclined portion 32a that is inclined with respect to the pressing direction of the operation portion 7 and a horizontal portion 32b that is substantially parallel to the pressing direction, and is substantially parallel to the rotation shaft 11 and both ends thereof are attached to the main body 2. A roller 36 is rotatably attached to the rotation holding shaft 35 at a position passing through the rotation holding groove 32. The opening / closing groove 33 is inclined in the direction opposite to the inclined portion 32a, and the rollers 13, 13 pivotally supported at both axial ends of the rotary shaft 11 are movably inserted. Since the other structure of the second embodiment is the same as that of the first embodiment, the same reference numerals are given to the main parts in the drawing, and the detailed description will be omitted.

The operation of the second embodiment is the same as that of the first embodiment except that the rotation posture of the valve plate 9 is restricted by the rotation holding shaft 35 and the rotation holding groove 32. Omit it.

[0017]

[Effect of device]

 In the compound moving type high vacuum valve of the present invention, the valve plate that opens and closes the valve seat rotates and goes straight by advancing and retracting the operating portion, so that the valve seat can be reliably sealed and the valve conductance can be increased. it can.

The posture of the valve plate is regulated by the parallel holding groove or the rotary holding groove provided on the operation plate and the parallel holding shaft or the rotary holding shaft having both ends attached to the body, so that the movement of the valve plate is prevented. Certainly.

[Brief description of drawings]

FIG. 1 is a vertical sectional front view of a first embodiment.

FIG. 2 is a cross-sectional plan view showing a closed state and an open state of a valve seat.

FIG. 3 is a front view of an operation plate.

4 is a cross-sectional view taken along the line AA of FIG.

FIG. 5 is a side view of a rotation guide plate.

FIG. 6 is an exploded perspective view of a turntable.

FIG. 7 is a vertical sectional front view of a second embodiment.

FIG. 8 is a cross-sectional plan view showing a closed state and an open state of the valve seat.

FIG. 9 is a front view of an operation plate.

10 is a sectional view taken along line BB of FIG.

[Explanation of symbols]

 1 body 6 valve seat 7 operation part 9 valve plate 11 rotary shaft 12 parallel holding shaft 14, 31 operation plate 14a, 31a end part 15, 33 opening / closing groove 15a upper part 15b inclined part 16 parallel holding groove 24 rotary groove 24a horizontal part 24b vertical Part 24c Bending part 25 Turntable 32 Rotation holding groove 32a Inclined part 32b Horizontal part 35 Rotation holding shaft

Claims (3)

[Scope of utility model registration request] 1. A valve plate is moved by advancing and retreating an operating portion,
In a vacuum valve that opens and closes a valve seat provided in the flow path of the body, both ends of the rotary shaft provided in the diametrical direction of the valve plate move to the opening and closing groove provided at the end of the operation plate that straddles the valve plate. A turntable that is rotatably attached to the tip of the rotation shaft is movably inserted into a rotation groove provided on the body, and the opening / closing groove is formed on the operation plate of the operation portion. An upper portion in a direction substantially orthogonal to the pressing direction and an inclined portion that recedes obliquely from the upper portion are provided, and the rotary groove has a horizontal portion substantially parallel to the pressing direction and a substantially vertical portion, and A compound moving type high vacuum valve, comprising: a bent portion, wherein the valve plate rotates and rectilinearly moves to open and close the valve seat by advancing and retracting the operating portion. 2. An end portion of the operation plate is provided with a parallel holding groove substantially parallel to a pressing direction of the operation plate, and both ends of a parallel holding shaft passing through the parallel holding groove are attached to a body. The composite moving high vacuum valve according to claim 1. 3. An operation plate is swingably attached to an operation portion, and an end portion of the operation plate has an opening / closing groove inclined with respect to a pressing direction of the operation plate and a direction opposite to the opening / closing groove. A rotary holding groove having a tilted inclined portion and a horizontal holding portion that is substantially parallel to the pressing direction, and both ends of a rotary holding shaft passing through the rotary holding groove are attached to a body. The composite moving high vacuum valve described in 1.