JPH0671890A - Liquid jet recording head and manufacture thereof - Google Patents

Abstract

PURPOSE:To easily form a thin film in the atmosphere, and provide a liquid jet recording head with a high productivity and reliability, which can be manufactured at a low cost by a method wherein a heating resistant layer contained in an electro-thermal converter is formed by drying and sintering a paste of which the major component is an organic resinate. CONSTITUTION:A heat accumulating layer 102 is formed on a substrate 101, and an organic resinate which is diluted to a specified viscosity is applied on the top of the heat accumulating layer by a spin coater, and the heat accumulating layer 102 coated by the organic resinate is sintered under a specified condition to form a heating resistant layer 103. Then, a metal is formed into a film by vapor deposition, and a circuit pattern is formed by photolithography technique and is made to be an electrode layer 104. The heating resistant layer 103 between the electrodes becomes a heating part. A film is formed by a spatter on the top of the electrode layer 104, and is made to be a first protective layer 105, and in addition, a film is formed by a spatter on the top of the first protective layer 105, and a second protective layer 106 is formed into a bar-shaped pattern by photolithography technique. On the top of the second protective layer 106, a third protective layer 107 is formed to complete a heater board. In addition, on the top of the heater board, a specified nozzle passage, ink liquid chamber, ink feeding port, and discharge port are formed to complete the liquid jet recording head.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid jet recording head for jetting a liquid from an orifice to form droplets and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a liquid jet recording method (inkjet recording method) is known in which a liquid is ejected from an orifice and recording is performed by the droplets. For example, JP-A-54-51
Japanese Patent No. 837 describes a liquid jet recording method of a type in which thermal energy is applied to a liquid to obtain a driving force for droplet ejection. In this type of recording method, a liquid that has been subjected to the action of heat energy is heated to generate bubbles, and a droplet is formed from an orifice at the tip of the recording head by the action force based on the generation of the bubbles. The feature is that the information is recorded by being attached to the recording member.

A liquid ejection section of a recording head applied to this recording method has an orifice for ejecting a liquid and a liquid flow path communicating with the orifice. This liquid flow path has a heat acting portion, which is a portion where heat energy for ejecting droplets acts on the liquid, as a part of the configuration. Further, this recording head is provided with a heat generating resistance layer as a heat converting body, which is a means for generating heat energy, and an upper protective layer for protecting it from ink.

In order to efficiently foam the ink in this type of recording method, the foamed surface is filled with a very short pulse interval of 30.
The temperature must be about 0 ° C. and then returned to room temperature on the order of μsec. Therefore, it is necessary to reduce the heat capacity of the heating resistance layer itself. For the same reason, it is also necessary to reduce the thermal resistance between the heating resistance layer and the foamed surface (specifically, the thermal resistance of the electrode and the upper protective layer). On the other hand, since the heat generating resistance layer, the electrode, and the upper protective layer are usually provided in a laminated manner, if the width of the heat generating resistance layer and the electrode is made too thin, the step between those portions becomes relatively tight. If the stepped portion becomes tight, the film quality of the upper protective layer in that portion deteriorates, which causes problems such as electrolytic corrosion of the electrodes and the heating resistance layer.

Therefore, it is preferable to reduce the film thickness as a means for reducing the heat capacity of the heating resistance layer. Further, the thermal resistance can be reduced by reducing the film thickness of the electrodes and the upper protective layer. The specific film thickness is preferably about 0.1 to 1 μm. Conventionally, when an inorganic material used as a material for the heating resistance layer, the electrode, and the protective layer is formed to have such a film thickness, it is formed by a vacuum process such as vacuum deposition or sputtering. However, this vacuum process not only requires a large-scale apparatus but also has poor productivity because the environmental conditions are severe for forming a good thin film. Moreover, the price of the manufacturing apparatus is high, and it is not always preferable in terms of cost.

[0006]

SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid jet recording head capable of forming a thin film of an inorganic material by a conventional method such as a printing method or a coating method, which can be relatively easily manufactured, in the air. It is an object of the present invention to provide a liquid jet recording apparatus including a manufacturing method, a head manufactured by the manufacturing method, and a member for mounting the head and the head.

[0007]

Means for Solving the Problems The present inventor, after intensive studies, discovered a completely new method, and achieved the above object by the present invention listed below.

A heat acting portion that communicates with an orifice for ejecting a liquid to give heat energy to the liquid to form bubbles, an electrothermal converter that generates the thermal energy, and a heat generated in the electrothermal converter. In a liquid jet recording head having a resistance layer and an electrode layer included in the electrothermal converter and applying a voltage to the heat generation resistance layer, the heat generation resistance layer is mainly composed of an organic resinate. Jet recording head.

A heat acting portion that communicates with an orifice for ejecting liquid to give heat energy to the liquid to form bubbles, an electrothermal converter that generates the thermal energy, and heat generated in the electrothermal converter. In a liquid jet recording head having a resistance layer and an electrode layer which is included in the electrothermal converter and applies a voltage to the heating resistance layer, the electrode layer is mainly composed of organic resinate. Recording head.

A heat acting portion which communicates with an orifice for ejecting a liquid and gives heat energy to the liquid to form a bubble, an electrothermal converter for generating the thermal energy, and heat generated in the electrothermal converter. A liquid jet recording head having a resistance layer, an electrode layer included in the electrothermal converter for applying a voltage to the heating resistive layer, and an upper protective layer on the electrothermal converter for protecting the electrothermal converter. 2. The liquid jet recording head according to claim 1, wherein the upper protective layer is composed mainly of an organic resinate.

A heat acting portion which communicates with an orifice for ejecting a liquid and gives a thermal energy to the liquid to form a bubble, an electrothermal converter for generating the thermal energy, and heat generated in the electrothermal converter. In a method of manufacturing a liquid jet recording head having a resistance layer and an electrode layer that is included in the electrothermal converter and applies a voltage to the heating resistance layer, the heating resistance layer is formed by drying a paste containing an organic resinate as a main material. A method for manufacturing a liquid jet recording head, which is formed by firing.

A heat acting portion which communicates with an orifice for ejecting a liquid and gives a thermal energy to the liquid to form a bubble, an electrothermal converter which generates the thermal energy, and a heat generated in the electrothermal converter. In a method of manufacturing a liquid jet recording head having a resistance layer and an electrode layer which is included in the electrothermal converter and applies a voltage to the heating resistance layer, the electrode layer is formed by drying a paste containing an organic resinate as a main material, A method for manufacturing a liquid jet recording head, which is formed by firing.

A heat acting portion which communicates with an orifice for ejecting a liquid and gives a heat energy to the liquid to form a bubble, an electrothermal converter for generating the thermal energy, and a heat generated in the electrothermal converter. A liquid jet recording head having a resistance layer, an electrode layer included in the electrothermal converter for applying a voltage to the heating resistive layer, and an upper protective layer on the electrothermal converter for protecting the electrothermal converter. 2. The liquid jet recording head according to claim 1, wherein the upper protective layer is formed by drying and firing a paste containing an organic resinate as a main material.

A liquid jet recording apparatus comprising at least the recording head of the present invention and a member for mounting the recording head.

Examples of the organic resinate used in the present invention generally include carboxylates, carboxylic acid esters, alkoxides, rosin esters, polycyclic organic compounds, siloxanes, boric acid compounds and the like.

[0016]

According to the present invention, since a desired thin film can be easily formed in the atmosphere, a liquid jet recording head having high productivity, low cost and high reliability can be provided. In addition, since it does not become thick and does not have a good surface property like a film formed of a dispersion material of an inorganic material and glass which has been conventionally used in a printing method or a coating method, it is driven at a high frequency. Even in this case, stable ejection is possible.

Further, the present inventor has discovered that the present invention has a completely different effect in addition to the above effects. That is, according to the present invention, defects such as pinholes in a thin film, which have been found by the conventional sputtering method or the like, are significantly reduced. This is probably because the film itself is less likely to be porous because it is less susceptible to the high voltage applied to the thin film and the severe environment. As a result, it is possible to further reduce the electrolytic corrosion of the heating resistance layer and the electrodes due to the ink.

As described above, the present invention is an epoch-making invention in which, when a thin film is formed of an inorganic material, it is possible to secure the same fineness of a film as that of an organic material and the ease of preparation.

The present invention will be described in more detail below.

As mentioned above, the heat resistance layer is required to have a small heat capacity, but this is related to the foaming stability of the bubbles, and especially when the driving frequency is high, the effect is large. As a result, foaming and eventually ejection becomes unstable. Further, as a recent tendency, there is a demand for power saving of the heat generating portion in accordance with the lengthening of the recording head and the downsizing of the apparatus.

As a material satisfying these properties, Zr
B₂, TiB₂, Ta₂Si, Ti ₂Si, TaAl, etc.
Can be given. The present invention is an organic cash register containing these inorganic substances.
By forming a heat-generating resistance layer using nate as a main material.
Formed by a vacuum process such as the conventional sputtering method.
It is possible to form a thin film with almost the same properties as
it can. In addition, since it is possible to form a thin film in the atmosphere,
It is possible to create a durable and reliable recording head.
it can.

Although metals such as Au and Al having high conductivity are used as the electrodes, the present invention forms them by a vacuum process such as the conventional sputtering method by forming the electrodes using an organic resinate containing these as a main material. It is possible to form a thin film having almost the same properties as the thin film used.

Further, in the case of the liquid jet recording head of the type in which the heat generating resistance layer and the electrodes are in direct contact with the ink, it is necessary to use a material having excellent electrochemical stability in addition to the above-mentioned respective characteristics. For example, as the heating resistance layer,
Materials such as WNi, ZrCr, TaIr, TaFe, ZrNi, and Au and Pt can be used for the electrodes. In the present invention, a liquid jet recording head with high reliability can be provided by forming a heat generating resistance layer and an electrode using an organic resinate containing each of these materials as a main material.

In addition, since the thin film formed by the present invention has few defective portions such as pinholes, partial concentration of the resistance value is eliminated and the reliability of the heating resistance layer and the electrode is dramatically improved.

In the present invention, each of the heating resistance layer and the electrode alone has a sufficient effect, but when the two are combined, the effects are dramatically increased.

On the other hand, the structure of the protective layer is the conventional insulating layer,
Although the liquid-resistant layer, the cavitation-resistant layer and the multi-layered structure for each of the functions thereof are used, in the present invention, the protective layer is mainly composed of an organic resinate containing an inorganic material that is conventionally used for these protective layers at least in a portion in contact with ink. By forming it, it is possible to more reliably prevent electrolytic corrosion from a defective portion such as a pinhole, which has been particularly problematic in the past. In particular, since the cavitation resistant layer, which is a portion that comes into contact with ink as a heat acting part, needs to use a material having excellent mechanical shock resistance, a metal material that is thermally and chemically stable such as Ta, W, and Pt is used. However, by forming the cavitation resistant layer using an organic resinate containing these materials as a main material, it is possible to form a protective layer having stable mechanical impact resistance even at high temperatures.

Needless to say, the effect of the present invention is further improved by using the above-mentioned heat generating resistance layer and electrodes in addition to this protective layer.

According to the present invention, the cost for forming a thin film is about ⅛ for the heating resistor layer and about 1/10 for the electrode, as compared with the vacuum film forming method.
The protective layer is about 1/12, which is significantly lower. Further, it can be formed at a low cost and is highly reliable as compared with the case where it is formed of a dispersion type material of an inorganic substance and glass which has been conventionally used in a printing method or a coating method.

The thin film containing an organic resinate as a main material of the present invention is formed by coating a substrate with a paste containing an organic resinate as a main material on a substrate by a coating method, a printing method or the like, and then drying to remove the solvent in the paste. It is formed by firing in an atmosphere containing sufficient oxygen at 350 ° C. or higher, preferably 600 ° C. or higher to remove the resin component in the paste.

FIG. 5 is an external perspective view showing an example of an ink jet recording apparatus (IJRA) in which the recording head obtained by the present invention is mounted as an ink jet head cartridge (IJC).

In the figure, reference numeral 20 is an ink jet head cartridge (IJC) provided with a group of nozzles for ejecting ink so as to face the recording surface of the recording paper fed onto the platen 24. Reference numeral 16 is a carriage HC that holds the IJC 20, and is connected to a part of a drive belt 18 that transmits the driving force of the drive motor 17, and is slidable with two guide shafts 19A and 19B arranged in parallel with each other. By doing so, reciprocating movement over the entire width of the recording paper of the IJC 20 is possible.

Reference numeral 26 is a head recovery device, which is arranged at one end of the movement path of the IJC 20, for example, at a position facing the home position. The head recovery device 26 is operated by the driving force of the motor 22 via the transmission mechanism 23, and the IJ
Cap the C20. This head recovery device 2
In association with the capping of the IJC 20 by the cap portion 26A of No. 6, ink is sucked by an appropriate suction means provided in the head recovery device 26 or ink is pressure-fed by an appropriate pressure means provided in an ink supply path to the IJC 20. Ejection recovery processing such as removing the thickened ink in the nozzle by forcibly ejecting the ink from the ejection port is performed. Further, the IJC is protected by capping at the end of recording or the like.

Reference numeral 30 is a blade as a wiping member which is arranged on the side surface of the head recovery device 26 and is made of silicon rubber. The blade 31 is a blade holding member 3
1A, which is held in a cantilever form and has a head recovery device 2
Similar to 6, the motor 22 and the conduction mechanism 23 operate to enable engagement with the ejection surface of the IJC 20. As a result, the blade 31 is projected into the movement path of the IJC 20 at an appropriate timing in the recording operation of the IJC 20 or after the ejection recovery process using the head recovery device 26, and the ejection surface of the IJC 20 is moved along with the movement operation of the IJC 20. It wipes off condensation, wetness, dust, etc.

[0034]

EXAMPLES The present invention will be described in detail below with reference to examples.

FIG. 1 is a schematic partial sectional view showing the layer structure of the heater board of the recording head manufactured in Examples 1 to 23. The position of the cross section of this heater board is indicated by the cross section line XY of the schematic partial plan view shown in FIG.
In this figure, the heater board includes a heat storage layer 102, a heating resistance layer 103, and an electrode layer 10 at predetermined positions on a substrate 101.
4, the first protective layer 105, the second protective layer 106, and the third protective layer 107 are sequentially stacked. The heat generating resistance layer 103 between the electrodes becomes the heat generating portion 201.

<Examples 1 to 5> First, as the substrate 101
Using silicon, the substrate 101 is thermally oxidized to form SiO 2. ₂
To have a thickness of 2.0 μm to form a heat storage layer 102. On this
Under the conditions and materials shown in Table 1 by spin coating.
The heat resistance layer 103 was formed. The heating resistance layer 10
Organic resinate as the material of 3 is Engelthard
Using a metal resinate manufactured by the company (trade name is listed in Table 1)
did. Also, during this spin coating, the material
Dilute organic resinate with chloromethane
Used.

Then, Al was deposited thereon by vapor deposition to a thickness of 0.6 μm, and a circuit pattern shown by a dotted line in FIG. 2 was formed by photolithography to form an electrode layer 104. Further, by forming the electrode layer 104, the heat generating portion 201 is formed between the electrodes in a size of 30 μm × 150 μm. On this, SiO ₂ was deposited as a first protective layer 105 by sputtering to a film thickness of 1.0 μm. Further, Ta was sputtered thereon to a film thickness of 0.5 μm and formed into a bar-shaped pattern as shown by the solid line in FIG. Further, a photosensitive polyimide was applied on this to form a shape pattern as shown in FIG. 1 to form a third protective layer 107, and a heater board was completed.

Further, on this heater board, a predetermined nozzle flow path, an ink liquid chamber, an ink supply port, and an ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

<Comparative Example 1> No organic resinate was used in the formation of the heat generation resistance layer 103, and Ta ₂ N was formed by sputtering to 0.1.
A film having a thickness of 2 μm was formed as a heating resistance layer 103. A liquid jet recording head was produced in the same manner as in Example 1 except for the above.

Comparative Example 2 The heating resistor layer 103 was formed by a printing method using a dispersion system of ruthenium oxide and glass without using an organic resinate, and the heating resistor layer 103 having a thickness of about 2 μm was formed. Further, the first protective layer 105 has a film thickness of 3 μm for the purpose of blocking ink. A liquid jet recording head was produced in the same manner as in Example 1 except for the above.

[0041]

[Table 1] With respect to each of the recording heads manufactured in Examples 1 to 5 and Comparative Examples 1 and 2, the bubbling state of the ink with respect to the recording signal of the driving frequency of 10 Hz to 50 kHz was visually observed and evaluated. The results are shown in Table 2.

As shown in Table 2, in the recording head of Comparative Example 1, foaming is unstable at a driving frequency of 50 kHz. In the recording head of Comparative Example 2, foaming is unstable at a driving frequency of 10 Hz, and very unstable at a driving frequency of 100 Hz or higher. On the other hand, Examples 1 to
In the recording head of No. 5, since the heat capacity of the heating resistance layer 103 is small and the first protective layer 105 may be thin, the bubbling of ink is stable even if the driving frequency is high.

[0043]

[Table 2] <Evaluation of Thermal Stress Durability> Driving frequency = 5.0 for each recording head manufactured in Examples 1 to 5 and Comparative Example 1.
A recording signal was applied under the conditions of kHz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.4, and thermal stress durability was evaluated by the breaking pulse. The results are shown in Table 3.

As shown in Table 3, the breaking pulse of each of the recording heads of Examples 1 to 5 and the recording head of Comparative Example 1 was 10 ^8.
It is about 10 ⁹ units, which is equivalent in heat stress durability. That is, even the heat-generating resistance layer formed by coating is not inferior in durability to that formed by the vacuum thin film process.

[0045]

[Table 3] <Examples 6 to 7> Silicon was used as the substrate 101, and the substrate 101 was thermally oxidized to form SiO ₂ with a thickness of 2.0 μm to form the heat storage layer 102. On this, HfB ₂ was formed into a film having a thickness of 0.1 μm by a sputtering method to form a heating resistance layer 103. A layer for an electrode layer was formed thereon by spin coating under the conditions and materials shown in Table 4. The organic resinate used as a material for this layer was a metal resinate manufactured by Engelhard Co., Ltd. (trade name is shown in Table 4). In addition, in this spin coating, the organic resinate was diluted with chloromethane and used in order to make the material have a predetermined viscosity. Then, a circuit pattern shown by a dotted line in FIG. 2 was formed on this layer by a photolithography technique to form an electrode layer 104. Further, by forming the electrode layer 104, the heat generating portion 201 is formed between the electrodes in a size of 30 μm × 150 μm. On this, SiO ₂ was deposited as a first protective layer 105 by sputtering to a film thickness of 1.0 μm. Furthermore, Ta is sputtered on this to a film thickness of 0.5 μm.
A film is formed and formed into a bar-shaped pattern as shown by the solid line in FIG.
And Further, a photosensitive polyimide is applied on this, and FIG.
The heater board was completed by forming the third protective layer 107 into a shape pattern as shown in FIG.

Further, on this heater board, a predetermined nozzle flow path, an ink liquid chamber, an ink supply port, and an ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

<Comparative Example 3> No organic resinate was used for forming the electrode layer 104, and Al was deposited to a thickness of 0.6 μm to form the electrode layer 104. A liquid jet recording head was produced in the same manner as in Example 6 except for the above.

Comparative Example 4 The electrode layer 104 was formed by a printing method using a dispersion system of gold and glass without using an organic resinate, and an electrode layer 104 having a thickness of about 2 μm was formed. Also, the first
The protective layer 105 has a thickness of 3 μm for the purpose of blocking the ink. A liquid jet recording head was produced in the same manner as in Example 6 except for the above.

[0049]

[Table 4] <Evaluation of Foaming Characteristics> With respect to each recording head manufactured in Examples 6 to 7 and Comparative Examples 3 to 4, the foaming state of the ink with respect to the recording signal of the driving frequency of 10 Hz to 50 kHz was visually observed and evaluated. The results are shown in Table 5.

As shown in Table 5, in the recording head of Comparative Example 3, foaming is unstable at a driving frequency of 50 kHz. In the recording head of Comparative Example 4, foaming is unstable at a driving frequency of 10 Hz, and is very unstable at a driving frequency of 100 Hz or higher. On the other hand, Examples 6 to
In the recording head of No. 7, since the first protective layer 105 may be thin, the bubbling of ink is stable even if the driving frequency is high.

[0051]

[Table 5] <Evaluation of Thermal Stress Durability> For each recording head manufactured in Examples 6 to 7 and Comparative Example 1, drive frequency = 5.0.
A recording signal was applied under the conditions of kHz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.4, and thermal stress durability was evaluated by the breaking pulse. The results are shown in Table 6.

As shown in Table 6, the breaking pulse of each of the recording heads of Examples 6 to 7 and the recording head of Comparative Example 3 was 10 ^8.
The table is the same, and the heat stress durability is the same. That is, even the electrode layer formed by coating is not inferior in durability to that formed by the vacuum thin film process.

[0053]

[Table 6] <Examples 8 to 12> Silicon is used as the substrate 101,
This substrate 101 is thermally oxidized to a SiO ₂ thickness of 2.0 μm.
The heat storage layer 102 was formed. Then, the heating resistance layer 103 was formed by spin coating under the conditions and materials shown in Table 7.
Was formed. The organic resinate used as the material of the heat generation resistance layer 103 was a metal resinate manufactured by Engelthard Co., Ltd. (trade name is shown in Table 7). In addition, in this spin coating, the organic resinate was diluted with chloromethane and used in order to make the material have a predetermined viscosity.

On top of this, a metal resinate (trade name: manufactured by Engelhard Co., Ltd.) as an organic resinate material for Al is used.
A-3808, a carboxylate as a main component) was adjusted to a viscosity of 11 cp with chloromethane and applied with a spinner.
The coating conditions are 1st: 500 rpm × 5 sec, 2n
d: 3000 rpm × 30 sec. The applied film was sintered under conditions of room temperature 10 minutes, 120 ° C. 10 minutes, and 550 ° C. 10 minutes. Then, when the final film thickness is 0.7 μm, the sheet resistance is 0.
An Al thin film for the electrode layer of 05Ω / □ was formed. Then, a circuit pattern as shown by a dotted line in FIG. 2 is formed on the Al thin film by a photolithography technique to form an electrode layer 1
04. Further, by forming the electrode layer 104, the heat generating portion 201 is formed between the electrodes in a size of 30 μm × 150 μm. On top of this, the first protective layer 10
As No. 5, SiO ₂ was formed into a film having a thickness of 1.0 μm by sputtering. Further, Ta was sputtered thereon to a film thickness of 0.5 μm and formed into a bar-shaped pattern as shown by the solid line in FIG. Further, a photosensitive polyimide is applied thereon to form a shape pattern as shown in FIG. 1 to form a third protective layer 107,
Completed the heater board.

Further, on this heater board, a predetermined nozzle flow path, an ink liquid chamber, an ink supply port, and an ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

Comparative Example 5 An organic resinate was not used for forming the heating resistance layer 103 and the electrode layer 104, and Ta ₂ N was used.
To form a heating resistance layer 103 by a sputtering method with a thickness of 0.2 μm, and Al with a film thickness of 0.6 μm by vapor deposition to form an electrode layer 104.
And A liquid jet recording head was produced in the same manner as in Example 8 except for the above.

Comparative Example 6 The heating resistor layer 103 and the electrode layer 104 were not formed using an organic resinate, but a heating resistor layer 103 having a thickness of about 2 μm was formed by a printing method using a dispersion system of rutinium oxide and glass. The electrode layer 104 having a thickness of about 2 μm was formed by a printing method using a dispersion system of gold and glass. Also, the first protective layer 105 has a thickness of 4 μm due to the ink blocking property.
The film thickness of A liquid jet recording head was produced in the same manner as in Example 8 except for the above.

[0058]

[Table 7] <Evaluation of Foaming Properties> Examples 8 to 12 and Comparative Examples 5 to 6
10 Hz to 50 kHz for each recording head manufactured in
The state of bubbling of the ink with respect to the recording signal of the driving frequency was visually observed and evaluated. The results are shown in Table 8.

As shown in Table 8, in the recording head of Comparative Example 5, foaming is unstable at a driving frequency of 50 kHz. In the recording head of Comparative Example 6, foaming is unstable at a driving frequency of 10 Hz, and very unstable at a driving frequency of 100 Hz or higher. On the other hand, Examples 8 to
In the recording head of No. 12, since the heat capacity of the heating layer resistance layer 103 is small and the first protective layer 105 may be thin, the bubbling of the ink is stable even if the driving frequency is high.

[0060]

[Table 8] <Evaluation of Thermal Stress Durability> For each of the recording heads manufactured in Examples 8 to 12 and Comparative Example 5, drive frequency = 5.
A recording signal was applied under the conditions of 0 kHz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.4, and thermal stress durability was evaluated by the breaking pulse. The results are shown in Table 9.

As shown in Table 9, both the recording heads of Examples 8 to 12 and the recording head of Comparative Example 5 had a breaking pulse of 10
^{The number is 8} to 10 ⁹ and the heat stress durability is equivalent. That is, even the heating resistance layer and the electrode layer formed by coating are not inferior in durability to those formed by the vacuum thin film process.

[0062]

[Table 9] <Examples 13 to 17> Silicon was used as the substrate 101, and the substrate 101 was thermally oxidized to a SiO ₂ thickness of 2.0.
The heat storage layer 102 was formed with a thickness of μm. On top of this, HfB ₂
Was formed into a film having a thickness of 0.2 μm by a sputtering method, and the heating resistance layer 103
And A film of Al was vapor-deposited thereon by 0.6 μm, and a circuit pattern as shown by a dotted line in FIG. 2 was formed by photolithography to form an electrode layer 104. Further, due to the formation of the electrode layer 104, the heat generating portion 2 is formed between the electrodes.
01 is also formed in a size of 30 μm × 150 μm. On top of this, SiO is used as the first protective layer 105.
₂ was formed into a film having a thickness of 1.0 μm by sputtering. Second on this
The protective layer 106 (the upper protective layer in contact with the ink in the heat acting portion) was formed by spin coating under the conditions and materials shown in Table 10. The organic resinate used as a material for this layer was a metal resinate manufactured by Engelhard Co., Ltd. (trade name is shown in Table 10). In addition, in this spin coating, the organic resinate was diluted with chloromethane and used in order to make the material have a predetermined viscosity. Then, this layer was formed into a bar-shaped pattern as shown by the solid line in FIG. 2 by a photolithography technique to form a second protective layer 106. Further, a photosensitive polyimide was applied on this to form a shape pattern as shown in FIG. 1 to form a third protective layer 107, and a heater board was completed.

Further, on this heater board, a predetermined nozzle flow path, an ink liquid chamber, an ink supply port, and an ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

<Comparative Example 7> No organic resinate was used for forming the second protective layer 106, and Ta was sputtered to a film thickness of 0.
A film having a thickness of 5 μm was formed as a second protective layer 106. A liquid jet recording head was produced in the same manner as in Example 13 except for the above.

Comparative Example 8 An organic resinate was not used for forming the second protective layer 106, but a second protective layer 106 having a thickness of about 2 μm was formed by a printing method using a dispersion system of Ta and glass. A liquid jet recording head was produced in the same manner as in Example 13 except for the above.

[0066]

[Table 10] <Evaluation of Foaming Properties> Examples 13 to 17 and Comparative Examples 7 to
For each recording head manufactured in No. 8, 10 Hz to 50 kHz
The bubbling state of the ink with respect to the recording signal of the drive frequency of z was visually observed and evaluated. The results are shown in Table 11.

As shown in Table 11, in the recording head of Comparative Example 7, foaming is unstable at a driving frequency of 50 kHz. In the recording head of Comparative Example 8, foaming is unstable at a driving frequency of 10 Hz, and very unstable at a driving frequency of 100 Hz or higher. On the other hand, Example 1
In the recording heads 3 to 17, the second protective layer 106 has a large thermal conductivity and a small film thickness, so that the bubbling of the ink is stable even if the driving frequency is high.

[0068]

[Table 11] <Evaluation of Discharge Durability> Examples 13 to 17 and Comparative Example 7
Drive frequency = 2.0k for each recording head manufactured in
A recording signal was applied under the conditions of Hz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.15, driving segment = 500 bits, and the ejection durability was evaluated by the number of broken segments. The results are shown in Table 12.

As shown in Table 12, both the recording heads of Examples 13 to 17 and the recording head of Comparative Example 7 had no broken segment even at 1 × 10 ^{9 and} had the same ejection durability.
That is, even in the upper protective layer formed by coating,
The durability is not inferior to that formed by the vacuum thin film process.

[0070]

[Table 12] <Examples 18 to 23> Silicon is used as the substrate 101, and the substrate 101 is thermally oxidized to a SiO ₂ thickness of 2.0.
The heat storage layer 102 was formed with a thickness of μm. The heating resistance layer 10 was formed by spin coating under the conditions and materials shown in Table 13 above.
Formed 3. As the organic resinate as the material of the heat generation resistance layer 103, a metal resinate manufactured by Engelhard Co., Ltd. (trade name is shown in Table 13) was used. In addition, in this spin coating, the organic resinate was diluted with chloromethane and used in order to make the material have a predetermined viscosity.

On top of this, a metal resinate (trade name: manufactured by Engelthard) as an organic resinate material for Al is used.
A-3808, a carboxylate as a main component) was adjusted to a viscosity of 11 cp with chloromethane and applied with a spinner.
The coating conditions are 1st: 500 rpm × 5 sec, 2n
d: 3000 rpm × 30 sec. The applied film was sintered at room temperature for 10 minutes at 120 ° C. for 10 minutes at 550 ° C. And the final film thickness is 0.7μm and the sheet resistance is 0.05Ω.
An Al thin film for the electrode layer of / □ was formed. Then, a circuit pattern shown by a dotted line in FIG. 2 was formed on the Al thin film by a photolithography technique to form an electrode layer 104. Further, by forming the electrode layer 104, the heat generating portion 201 is formed between the electrodes in a size of 30 μm × 150 μm.

On top of this, Si is used as the first protective layer 105.
O ₂ was formed into a film having a thickness of 1.0 μm by sputtering. A second protective layer 106 (an upper protective layer in contact with the ink in the heat acting portion) was formed thereon by spin coating under the conditions and materials shown in Table 14. The organic resinate used as a material for this layer was a metal resinate manufactured by Engelhard Co., Ltd. (trade name is shown in Table 14). In addition, in this spin coating, the organic resinate was diluted with chloromethane and used in order to make the material have a predetermined viscosity. Then, this layer was formed into a bar-shaped pattern as shown by the solid line in FIG. 2 by a photolithography technique to form a second protective layer 106. Further, a photosensitive polyimide was applied on this to form a shape pattern as shown in FIG. 1 to form a third protective layer 107, and a heater board was completed.

Further, on this heater board, a predetermined nozzle flow path, an ink liquid chamber, an ink supply port, and an ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

<Comparative Example 9> Heat generating resistance layer 103, electrode layer 1
04 and the second protective layer 106 are not formed of an organic resinate, Ta ₂ N is deposited to a thickness of 0.2 μm by a sputtering method to form a heating resistance layer 103, and Al is deposited to a thickness of 0.6 μm.
A film is formed to form the electrode layer 104, and Ta is sputtered to a film thickness of 0.
A film having a thickness of 5 μm was formed as a second protective layer 106. A liquid jet recording head was produced in the same manner as in Example 18 except for the above.

Comparative Example 10 An organic resinate was not used in the formation of the heat generation resistance layer 103, the electrode layer 104 and the second protective layer 106, and a dispersion of ruthenium oxide and glass was used to form a film having a thickness of about 2 μm. A heating resistance layer 103 is formed, an electrode layer 104 having a thickness of about 2 μm is formed by a printing method using a dispersion system of gold and glass, and a second layer having a thickness of about 2 μm is formed by a printing method using a dispersion system of Ta and glass. The protective layer 106 was formed. Also,
The first protective layer 105 has a film thickness of 4 μm for the purpose of blocking ink. A liquid jet recording head was produced in the same manner as in Example 18 except for the above.

[0076]

[Table 13]

[0077]

[Table 14] <Evaluation of Foaming Properties> Examples 18 to 23 and Comparative Examples 9 to
10Hz to 50k for each recording head manufactured in 10
The bubbling state of the ink with respect to the recording signal of the driving frequency of Hz was visually observed and evaluated. The results are shown in Table 15.

As shown in Table 15, in the recording head of Comparative Example 9, foaming is unstable at a driving frequency of 50 kHz. In the recording head of Comparative Example 10, foaming is unstable at a driving frequency of 10 Hz, and very unstable at a driving frequency of 100 Hz or higher. On the other hand, in the recording heads of Examples 18 to 23, the heat capacity of the heating layer resistance layer 103 is small, the thermal conductivity of the second protective layer 106 is large, the film thickness is thin, and the first protective layer 105 may be thin. So
Ink bubbling is stable even if the drive frequency is high.

[0079]

[Table 15] <Evaluation of ejection durability> Examples 18 to 23 and Comparative Example 9
Drive frequency = 2.0k for each recording head manufactured in
A recording signal was applied under the conditions of Hz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.15, driving segment = 500 bits, and the ejection durability was evaluated by the number of broken segments. The results are shown in Table 16.

As shown in Table 16, both the recording heads of Examples 18 to 23 and the recording head of Comparative Example 9 had no broken segment even at 1 × 10 ⁹ , and the ejection durability was the same. That is, even if the upper protective layer formed by coating,
The durability is not inferior to that formed by the vacuum thin film process.

[0081]

[Table 16] FIG. 3 is a schematic partial cross-sectional view showing the layer structure of the heater board of the recording head manufactured in Examples 24 to 35. The position of the cross section of this heater board is indicated by the cross section line XY of the schematic partial plan view shown in FIG. In this figure, the heater board has a structure in which a heat storage layer 102, a heating resistance layer 103, and an electrode layer 104 are sequentially stacked at a predetermined position on a substrate 101. Heat generating resistance layer 1 between the electrodes
03 is the heat generating portion 201.

<Embodiments 24 to 28> First, the substrate 101 and
Then, using silicon, the substrate 101 is thermally oxidized to form Si.
O ₂ To have a thickness of 2.0 μm to form a heat storage layer 102. This
Spin coat under the conditions and materials shown in Table 17.
Thus, the heating resistance layer 103 was formed. This heating resistance
The organic resinate as the material of the layer 103 is Engelt
HARD's metal resinate (trade name is shown in Table 17)
Used). Also, during this spin coating, the material
The organic resinate is a
It was diluted with water before use.

Next, a chemically stable Au film was added on the surface of the thin film.
The electrode layer 10 is formed by depositing a film having a thickness of 6 μm and forming a circuit pattern as shown in FIG.
It was set to 4. Further, by forming the electrode layer 104, the heat generating portion 201 is formed between the electrodes in a size of 30 μm × 150 μm. In this way, the heater board was completed.

Further, on this heater board, a predetermined nozzle channel, ink liquid chamber, ink supply port, and ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

<Comparative Example 11> No organic resinate was used for forming the heating resistance layer 103, and Al-Ta-Ir was deposited to a thickness of 0.2 μm by a sputtering method to form the heating resistance layer 103. A liquid jet recording head was produced in the same manner as in Example 24 except for the above.

Comparative Example 12 The heating resistance layer 103 was formed by a printing method using a dispersion system of iridium oxide and glass without using an organic resinate to form the heating resistance layer 103.
Was formed. A liquid jet recording head was produced in the same manner as in Example 24 except for the above.

[0087]

[Table 17] <Evaluation of Foaming Properties> Examples 24-28 and Comparative Example 11
10 Hz to 50 for each recording head manufactured in
The bubbling state of the ink with respect to the recording signal of the driving frequency of kHz was visually observed and evaluated. The results are shown in Table 18.

As shown in Table 18, in the recording head of Comparative Example 11, foaming is unstable at a driving frequency of 50 kHz. In the recording head of Comparative Example 12, foaming is unstable at a driving frequency of 10 Hz, and very unstable at a driving frequency of 100 Hz or higher. On the other hand, in the recording heads of Examples 24 to 28, since the heat capacity of the heating layer resistance layer 103 is small, the bubbling of ink is stable even if the drive frequency is high.

[0089]

[Table 18] <Evaluation of ejection durability> Examples 24 to 28 and Comparative Example 1
Driving frequency = 2.0 for each recording head manufactured in 1.
A recording signal was applied under the conditions of kHz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.15, driving segment = 500 bits, and the ejection durability was evaluated by the number of broken segments. The results are shown in Table 19.

As shown in Table 19, both the recording heads of Examples 24 to 28 and the recording head of Comparative Example 11 had no breakable segment even at 1 × 10 ⁹ , and the ejection durability was the same.
That is, even if the heating resistance layer is formed by coating,
The durability is not inferior to that formed by the vacuum thin film process.

[0091]

[Table 19] <Examples 29 to 30> Silicon is used as the substrate 101, and the substrate 101 is thermally oxidized to a SiO ₂ thickness of 2.0.
The heat storage layer 102 was formed with a thickness of μm. On top of this, HfB ₂
Was formed into a film having a thickness of 0.1 μm by a sputtering method, and the heating resistance layer 103 was formed.
And A layer for an electrode layer was formed thereon by spin coating under the conditions and materials shown in Table 20. In addition,
As the organic resinate as a material for this layer, a metal resinate (trade name shown in Table 20) manufactured by Engelhard was used. In addition, in this spin coating, the organic resinate was diluted with chloromethane and used in order to make the material have a predetermined viscosity. Then, a circuit pattern as shown in FIG. 4 was formed on this layer by a photolithography technique to form an electrode layer 104. Further, by forming the electrode layer 104, the heat generating portion 201 is formed between the electrodes in a size of 30 μm × 150 μm. In this way, the heater board was completed.

Further, on this heater board, a predetermined nozzle flow path, an ink liquid chamber, an ink supply port, and an ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

Comparative Example 13 The electrode layer 104 was formed without using an organic resinate, and gold was deposited to a thickness of 0.6 μm to form the electrode layer 104. A liquid jet recording head was produced in the same manner as in Example 29 except for the above.

Comparative Example 14 The electrode layer 104 was formed by a printing method using a dispersion system of gold and glass without using an organic resinate, and an electrode layer 104 having a thickness of about 2 μm was formed. A liquid jet recording head was produced in the same manner as in Example 29 except for the above.

[0095]

[Table 20] <Evaluation of ejection durability> Examples 29 to 30 and Comparative Example 1
For each recording head manufactured in 3 to 14, drive frequency =
A recording signal was applied under the conditions of 2.0 kHz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.15, driving segment = 500 bits, and the ejection durability was evaluated by the number of broken segments. The results are shown in Table 21.

As shown in Table 21, even in the recording heads of Examples 29 to 30 and the recording head of Comparative Example 13, there was no breakage segment even at 1 × 10 ⁹ , and the ejection durability was the same.
That is, even if the heating resistance layer is formed by coating,
The durability is not inferior to that formed by the vacuum thin film process. It is also shown that Comparative Example 14 using a dispersion system of gold and glass is inferior in ejection durability.

[0097]

[Table 21] <Examples 31 to 35> Silicon is used as the substrate 101, and the substrate 101 is thermally oxidized to a SiO ₂ thickness of 2.0.
The heat storage layer 102 was formed with a thickness of μm. The heat generating resistance layer 10 was formed thereon by spin coating under the conditions and materials shown in Table 22.
Formed 3. As the organic resinate as the material of the heat generation resistance layer 103, a metal resinate manufactured by Engelhard Co., Ltd. (trade name is shown in Table 22) was used. In addition, in this spin coating, the organic resinate was diluted with chloromethane and used in order to make the material have a predetermined viscosity.

On top of this, a metal resinate (trade name: A-1118, whose main component is carboxylate) manufactured by Engelthard Co., Ltd. as an electrochemically stable organic resinate material for Au was used with chloromethane to give a viscosity of 15 cp. And adjusted with a spinner. Coating conditions are 1st: 500 rpm
× 5 sec, 2nd: 3000 rpm × 30 sec. Apply the coated film at room temperature for 10 minutes, 120 ° C for 10 minutes, 850
Sintering was carried out under the condition of 10 ° C for 10 minutes. And final film thickness 1.0 μm
Then, an Au thin film for an electrode layer having a sheet resistance of 0.07 Ω / □ was formed. Then, a circuit pattern as shown in FIG. 4 was formed on this Au thin film by a photolithography technique to form an electrode layer 104. Further, by forming the electrode layer 104, the heat generating portion 201 is formed between the electrodes in a size of 30 μm × 150 μm. In this way, the heater board was completed.

Furthermore, on this heater board, a predetermined nozzle flow path, ink liquid chamber, ink supply port, and ejection port (40 μm ×
40 μm) was formed by a normal operation to complete a liquid jet recording head.

<Comparative Example 15> An organic resinate was not used in the formation of the heating resistance layer 103 and the electrode layer 104, and Al-
Ta-Ir was sputtered to a film thickness of 0.2 μm to form a heating resistance layer 103, and gold was deposited to a film thickness of 0.5 μm to form an electrode layer 104. A liquid jet recording head was produced in the same manner as in Example 31 except for the above.

Comparative Example 16 A heating resistor layer having a thickness of about 2 μm was formed by a printing method using a dispersion system of iridium oxide, tantalum oxide and glass without using an organic resinate for forming the heating resistor layer 103 and the electrode layer 104. 103, and the electrode layer 10 having a thickness of about 2 μm is formed by a printing method using a dispersion system of gold and glass.
4 was formed. A liquid jet recording head was produced in the same manner as in Example 31 except for the above.

<Comparative Example 17> No organic resinate was used for forming the heating resistance layer 103 and the electrode layer 104.
Ta-Ir was sputtered to a film thickness of 0.2 μm to form a heating resistance layer 103, and an electrode layer 104 having a thickness of about 2 μm was formed by a printing method using a dispersion system of gold and glass. A liquid jet recording head was produced in the same manner as in Example 31 except for the above.

[0103]

[Table 22] <Evaluation of Foaming Properties> Examples 31 to 35 and Comparative Example 15
10 Hz to 50 for each recording head manufactured in
The bubbling state of the ink with respect to the recording signal of the driving frequency of kHz was visually observed and evaluated. The results are shown in Table 23.

As shown in Table 23, in the recording head of Comparative Example 16, foaming is unstable at a driving frequency of 10 kHz, and very unstable at a driving frequency of 100 Hz or higher. On the other hand, in the recording heads of Examples 31 to 35, the heating layer resistance layer 103 has a small heat capacity, the second protective layer 106 has a large thermal conductivity and a small film thickness, and the first protective layer 105 may be thin. Therefore, the bubbling of ink is stable even if the driving frequency is high.

[0105]

[Table 23] <Evaluation of ejection durability> Examples 31 to 35 and Comparative Example 1
Driving frequency =
A recording signal was applied under the conditions of 2.0 kHz, rectangular pulse width = 10 μsec, driving voltage = foaming voltage × 1.15, driving segment = 500 bits, and the ejection durability was evaluated by the number of broken segments. The results are shown in Table 24.

As shown in Table 24, both the recording heads of Examples 31 to 35 and the recording head of Comparative Example 15 had no broken segment even at 1 × 10 ⁹ , and the ejection durability was the same.
That is, even if the heating resistance layer is formed by coating,
The durability is not inferior to that formed by the vacuum thin film process. It is also shown that Comparative Example 16 using a dispersion system of gold and glass is inferior in ejection durability.

[0107]

[Table 24] The present invention relates to a recording head and a recording apparatus of an inkjet recording system that forms flying droplets by utilizing thermal energy and performs recording, particularly in the inkjet recording system.
It has an excellent effect.

With regard to its typical structure and principle, see, for example, US Pat. Nos. 4,723,129 and 4740.
No. 796, the present invention is preferably carried out using these basic principles. This recording method is applicable to both the so-called on-demand type and the continuous type.

To briefly explain this recording method, the electrothermal converter is arranged corresponding to the sheet or liquid path holding the liquid (ink), and the liquid (ink) is converted to correspond to the recording information. Heat energy is generated by applying at least one drive signal for giving a rapid temperature rise that causes the film boiling phenomenon beyond the nucleate boiling phenomenon, and causes the film boiling on the heat acting surface of the recording head. . In this way, bubbles can be formed in one-to-one correspondence with the drive signal applied from the liquid (ink) to the electrothermal converter, which is particularly effective for the on-demand recording method. By the growth and contraction of the bubbles, liquid (ink) is ejected through the ejection holes,
Form at least one drop. It is more preferable to make the driving signal into a pulse shape because bubbles can be grown and contracted immediately and appropriately, and thus a liquid (ink) with excellent responsiveness can be ejected. As the pulse-shaped drive signal, U.S. Pat. Nos. 4,463,359 and 4,345 are used.
Those as described in the '262 patent are suitable. If the conditions described in US Pat. No. 4,313,124, which is an invention relating to the rate of temperature rise on the heat acting surface, are adopted, more excellent recording can be performed.

The structure of the recording head is a combination of a discharge hole, a liquid flow path, and an electrothermal converter as disclosed in the above-mentioned specifications (straight liquid flow path or right-angled liquid flow path).
In addition, as disclosed in U.S. Pat. No. 4,558,333 and U.S. Pat. No. 4,459,600, the present invention includes those having a configuration in which a heat acting portion is arranged in a bending region.

In addition, Japanese Laid-Open Patent Publication No. 123670/1984, which discloses a structure in which a common slit is used as a discharge hole for a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective in a structure based on Japanese Patent Laid-Open No. 138461/1984, which discloses a structure in which the corresponding opening corresponds to the discharge portion.

Further, as a recording head in which the present invention is effectively used, there is a full line type recording head having a length corresponding to the maximum width of the recording medium which can be recorded by the recording apparatus.
The full line head may be a full line configuration formed by combining a plurality of print heads as disclosed in the above specification, or may be a single full line print head integrally formed.

In addition, by being attached to the apparatus main body, it can be electrically connected to the apparatus main body and can be supplied with ink from the apparatus main body by a replaceable chip type recording head or the recording head itself. The present invention is also effective when a cartridge-type recording head that is specially provided is used.

It is preferable to add recovery means for the recording head, preliminary auxiliary means, etc. to the recording apparatus of the present invention because the recording apparatus of the present invention can be made more stable. Specifically, the recording head is preheated by a capping means, a cleaning means, a pressure or suction means, an electrothermal converter or a heating element other than this, or a combination thereof. It is also effective to perform stable recording by adding a means for performing a preliminary ejection mode for performing ejection different from the means and recording.

Further, the recording mode of the recording apparatus is not limited to the mode in which only the mainstream color such as black is recorded, and either the recording head may be integrally formed or a combination of plural recording heads may be used. However, the present invention is extremely effective for an apparatus provided with at least one of a multicolor of different colors or a full color by color mixing.

In the embodiments of the present invention described above, a liquid ink is used for explanation. However, in the present invention, either an ink which is solid at room temperature or an ink which is in a softened state at room temperature is used. Can be used. In the above-mentioned inkjet device, the temperature of the ink itself is generally adjusted within the range of 30 ° C. or higher and 70 ° C. or lower to control the temperature of the ink so that the viscosity of the ink is within the stable ejection range. Any liquid may be used as long as the ink is liquid.

In addition, the excessive temperature rise of the head or ink due to thermal energy is positively prevented by using it as the energy of the state change of the ink from the solid state to the liquid state, or the evaporation of the ink is prevented. It is also possible to use an ink that solidifies when left as it is. In any case, liquefaction occurs only when heat energy is applied, such as when the ink is liquefied by applying heat energy according to the recording signal and ejected as an ink liquid, or when it begins to solidify when it reaches the recording medium. The use of an ink having such a property is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or Japanese Patent Laid-Open No. 60-71260 so that it faces the electrothermal converter in the state of being held as a liquid or solid in the recesses or through holes of the porous sheet. It may be in any form.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0120]

As described above, according to the present invention, since a desired thin film can be easily formed in the atmosphere, a liquid jet recording head having high productivity, low cost and high reliability can be provided. it can. In addition, since it does not become thick and does not have a good surface property like a film formed of a dispersion material of an inorganic material and glass which has been conventionally used in a printing method or a coating method, it is driven at a high frequency. Even in this case, stable ejection is possible.

Further, according to the present invention, the number of defects such as pinholes in the thin film, which has been found by the conventional sputtering method or the like, is significantly reduced. As a result, it is possible to further reduce the electrolytic corrosion of the heating resistance layer and the electrodes due to the ink.

As described above, the present invention is an epoch-making invention in which, when a thin film is formed of an inorganic material, it is possible to ensure the same fineness of a film as an organic material and the ease of preparation.

[Brief description of drawings]

FIG. 1 is a schematic partial cross-sectional view showing a layer structure of a heater board of a recording head created in Examples 1 to 23.

FIG. 2 is a schematic plan view showing a position of a cross section line XY in the cross sectional view in FIG.

FIG. 3 is a schematic partial cross-sectional view showing a layer structure of a heater board of a recording head created in Examples 24 to 35.

4 is a schematic plan view showing a position of a cross section line XY in the cross sectional view in FIG.

FIG. 5 is an external perspective view showing an example of an inkjet recording apparatus in which the recording head of the present invention is mounted as an inkjet head cartridge.

[Explanation of symbols]

 101 substrate 102 heat storage layer 103 heat generation resistance layer 104 electrode layer 105 first protective layer 106 second protective layer 107 third protective layer 201 heat generating portion

Continuation of the front page (31) Priority claim number Japanese Patent Application No. 4-165015 (32) Priority date Hei 4 (1992) June 23 (33) Priority claiming country Japan (JP) (31) Priority claim number Special Japanese Patent Application No. 4-165016 (32) Priority Day No. 4 (1992) June 23 (33) Country of priority claim Japan (JP) (31) Priority claim number Japanese Patent Application No. 4-165017 (32) Priority Day No. 4 (1992) June 23 (33) Priority claiming country Japan (JP) (31) Priority claim number Japanese Patent Application No. 4-165018 (32) Priority Date 4 (1992) June 23 (33) Priority Claiming country Japan (JP) (31) Priority claim number Japanese Patent Application No. 4-165019 (32) Priority date Hei 4 (1992) June 23 (33) Priority claiming country Japan (JP)

Claims (22)

[Claims] 1. A heat acting portion which communicates with an orifice for ejecting a liquid and applies thermal energy to the liquid to form bubbles.
Liquid jet recording having an electrothermal converter for generating the thermal energy, a heating resistance layer included in the electrothermal converter, and an electrode layer included in the electrothermal converter for applying a voltage to the heating resistance layer. In the head, the liquid jet recording head is characterized in that the heating resistance layer is mainly composed of an organic resinate. 2. The liquid jet recording head according to claim 1, further comprising an upper protective layer that protects the electrothermal converter on the electrothermal converter. 3. The liquid jet recording head according to claim 1, wherein the bubbles are formed by film boiling. 4. A heat acting portion which communicates with an orifice for ejecting a liquid and applies heat energy into the liquid to form bubbles.
Liquid jet recording having an electrothermal converter for generating the thermal energy, a heating resistance layer included in the electrothermal converter, and an electrode layer included in the electrothermal converter for applying a voltage to the heating resistance layer. In the head, the liquid jet recording head is characterized in that the electrode layer is mainly composed of an organic resinate. 5. The liquid jet recording head according to claim 4, wherein the heat generating resistance layer is mainly made of organic resinate. 6. The liquid jet recording head according to claim 4, further comprising an upper protective layer that protects the electrothermal converter on the electrothermal converter. 7. The liquid jet recording head according to claim 4, wherein the bubbles are formed by film boiling. 8. A heat acting portion which communicates with an orifice for ejecting a liquid and applies heat energy into the liquid to form bubbles.
An electrothermal converter for generating the thermal energy, a heating resistance layer included in the electrothermal converter, an electrode layer included in the electrothermal converter for applying a voltage to the heating resistance layer, and the electrothermal conversion A liquid jet recording head having an upper protective layer for protecting the electrothermal converter on the body, wherein the upper protective layer is mainly composed of an organic resinate. 9. The liquid jet recording head according to claim 8, wherein at least a portion of the upper protective layer that is in contact with the ink as the heat acting portion is made of an organic resinate as a main material. 10. The liquid jet recording head according to claim 8, wherein the heating resistance layer and the electrode layer are mainly made of organic resinate. 11. The liquid jet recording head according to claim 8, wherein the bubbles are formed by film boiling. 12. A heat acting portion which communicates with an orifice for ejecting a liquid and gives heat energy to the liquid to form bubbles, an electrothermal converter for generating the thermal energy, and an electrothermal converter included in the electrothermal converter. A method of manufacturing a liquid jet recording head, comprising: a heat-generating resistance layer that is included in the electrothermal converter; and an electrode layer that is included in the electrothermal converter and applies a voltage to the heat-generating resistance layer. A method for manufacturing a liquid jet recording head, which is formed by drying and baking. 13. The method of manufacturing a liquid jet recording head according to claim 12, further comprising an upper protective layer that protects the electrothermal converter on the electrothermal converter. 14. A heat acting portion which communicates with an orifice for ejecting a liquid and gives heat energy to the liquid to form bubbles, an electrothermal converter for generating the thermal energy, and an electrothermal converter included in the electrothermal converter. In a method of manufacturing a liquid jet recording head having a heat generating resistance layer and an electrode layer that is included in the electrothermal converter and applies a voltage to the heat generating resistance layer, the electrode layer comprises a paste containing an organic resinate as a main material. A method of manufacturing a liquid jet recording head, which is formed by drying and firing. 15. The method for manufacturing a liquid jet recording head according to claim 14, wherein the heating resistance layer is formed by drying and firing a paste containing an organic resinate as a main material. 16. The upper protective layer for protecting the electrothermal converter is provided on the electrothermal converter.
7. A method for manufacturing a liquid jet recording head according to item 1. 17. A heat acting portion which communicates with an orifice for ejecting a liquid and gives heat energy to the liquid to form bubbles, an electrothermal converter for generating the thermal energy, and an electrothermal converter included in the electrothermal converter. A liquid jet having a heat generating resistance layer, an electrode layer included in the electrothermal converting body for applying a voltage to the heat generating resistive layer, and an upper protective layer for protecting the electrothermal converting body on the electrothermal converting body. A method of manufacturing a recording head, wherein the upper protective layer is formed by drying and firing a paste containing an organic resinate as a main material. 18. The liquid jet recording head according to claim 17, wherein at least a portion of the upper protective layer that is in contact with the ink as the heat acting portion is formed by drying and firing a paste containing an organic resinate as a main material. Production method. 19. The method of manufacturing a liquid jet recording head according to claim 17, wherein the heating resistance layer and the electrode layer are formed by drying and firing a paste containing an organic resinate as a main material. 20. A liquid jet recording apparatus comprising at least the recording head according to claim 1 and a member for mounting the recording head. 21. A liquid jet recording apparatus comprising at least the recording head according to claim 4 and a member for mounting the recording head. 22. A liquid jet recording apparatus comprising at least the recording head according to claim 8, 9 or 10, and a member for mounting the recording head.