JPH0671877A - Ink-jet print head - Google Patents
Ink-jet print headInfo
- Publication number
- JPH0671877A JPH0671877A JP7758593A JP7758593A JPH0671877A JP H0671877 A JPH0671877 A JP H0671877A JP 7758593 A JP7758593 A JP 7758593A JP 7758593 A JP7758593 A JP 7758593A JP H0671877 A JPH0671877 A JP H0671877A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- pressure
- protrusion
- piezoelectric element
- pressure plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、印字信号に応じてノズ
ルからインク滴を吐出して記録媒体上にインク像を形成
する形式のインクジェットヘッドに関し、より詳しくは
インク室の一面を覆う加圧板に対する圧力伝達機構に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head of the type in which ink droplets are ejected from nozzles in response to a print signal to form an ink image on a recording medium, and more specifically, a pressure plate covering one surface of an ink chamber. To the pressure transmission mechanism.
【０００２】[0002]
【従来の技術】印字信号に応じて圧電素子を長手方向に
伸縮させてインク室内のインクを加圧する形式のインク
ジェットヘッドは、ノズルをきわめて高密度に配列する
ことができる利点を有しているため、これまでに多くの
提案がなされているが、反面においてこの種のものは、
圧電素子の長手方向の変位量がきわめて小さいため、こ
の変位をいかにインク室に効率よく伝達するかといった
点に問題を残している。2. Description of the Related Art An ink jet head of a type in which a piezoelectric element is expanded and contracted in a longitudinal direction in accordance with a print signal to pressurize ink in an ink chamber has an advantage that nozzles can be arranged at extremely high density. Although many proposals have been made so far, on the other hand, this kind of thing,
Since the amount of displacement of the piezoelectric element in the longitudinal direction is extremely small, there remains a problem in how to efficiently transmit this displacement to the ink chamber.
【０００３】もとより、このような問題に対しては、イ
ンク室の他面を覆う加圧板をインク室の占める領域内で
最大限にタワませ得るように、圧電素子の厚みをインク
室の巾より薄くすればよいが、ノズル配列をより高密度
化すべくインク室の巾をさらに縮めていったような場合
には、圧電素子の厚みもこれに伴って薄くしてゆかねば
ならず、その強度上の問題が派生する。In order to solve such a problem, the thickness of the piezoelectric element is set to be smaller than the width of the ink chamber so that the pressure plate covering the other surface of the ink chamber can be maximized within the area occupied by the ink chamber. It may be thin, but if the width of the ink chamber is further reduced in order to increase the density of the nozzle array, the thickness of the piezoelectric element must be reduced accordingly. The problem of is derived.
【０００４】米国特許第４，４１８，３５５号明細書に
おいて開示されたインクジェットヘッドはこのような問
題を解消するために、インク室の巾より狭い圧力伝達部
材を介して圧電素子の変位を加圧板に伝えるように構成
し、これによって、圧電素子の厚みをインク室の配列ピ
ッチに相当する程度にまで厚くすることを可能となした
ものであるが、逆にこのように構成したために、組付け
の際に巾方向に僅かなズレが生じた場合には、圧力伝達
部材と圧電素子が偏って当接してしまう結果、加圧板を
水平に変位させることができなくなって、圧電素子の変
位を効率よくインク室に伝達することができなくなると
いった問題が派生する。In order to solve such a problem, the ink jet head disclosed in US Pat. No. 4,418,355 presses the displacement of the piezoelectric element through a pressure transmitting member narrower than the width of the ink chamber. It is possible to increase the thickness of the piezoelectric element to the extent that it corresponds to the arrangement pitch of the ink chambers, but on the contrary, because it was configured in this way, If a slight displacement occurs in the width direction at the time of, the pressure transmitting member and the piezoelectric element abut against each other in a biased manner, and as a result, the pressure plate cannot be displaced horizontally, resulting in an efficient displacement of the piezoelectric element. The problem arises that it cannot be often transmitted to the ink chamber.
【０００５】[0005]
【発明が解決しようとする課題】本発明はこのような問
題に鑑みてなされたもので、その目的とするところは、
巾方向に僅かなズレが生じても、圧電素子の変位を効率
よくインク室に伝達することのできる新たなインクジェ
ットヘッドを提案することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and its object is to:
Another object of the present invention is to propose a new inkjet head that can efficiently transfer the displacement of the piezoelectric element to the ink chamber even if a slight displacement occurs in the width direction.
【０００６】[0006]
【課題を解決するための手段】すなわち、本発明はこの
ような課題を達成するためのインクジェットヘッドとし
て、インク室の一面を覆う加圧板の背面に、少なくとも
インク室の有効巾より加圧板の撓み量を減じた巾の狭い
突部を設けて、これらの突部の頂面に、圧電素子と当接
しかつインク室の配列ピッチに相当する巾を限度とする
巾の広い圧力伝達部材を接合させるようにしたものであ
る。That is, according to the present invention, as an ink jet head for achieving such a problem, the pressure plate is bent on the back surface of the pressure plate covering one surface of the ink chamber at least from the effective width of the ink chamber. Providing narrow protrusions with a reduced width, and joining a wide pressure transmitting member, which is in contact with the piezoelectric element and has a maximum width corresponding to the arrangement pitch of the ink chambers, to the top surfaces of these protrusions. It was done like this.
【０００７】[0007]
【実施例】そこで以下に図示した実施例について説明す
る。図１は、本発明の一実施例をなす圧力伝達機構部分
を示したものであり、また、図６は、このような機構を
備えたインクジェットヘッドの一例を分解して示したも
のである。Embodiments Now, the embodiments shown in the drawings will be described. FIG. 1 shows a pressure transmitting mechanism portion which constitutes an embodiment of the present invention, and FIG. 6 shows an exploded view of an ink jet head provided with such a mechanism.
【０００８】はじめに、図６をもとにインクジェットヘ
ッドの全体構成について説明すると、符号１は、複数の
ノズル２を有するノズルプレートで、このノズルプレー
ト１の背面には、各ノズル２に対応するインク室３と共
通のリザーバ部７を有するキャビティ形成板４が積層さ
れ、またこのキャビティ形成板４の背面には、印字信号
に応じて各インク室３内のインクに圧力を加えるべく変
形する加圧板６が積層されていて、その背面には、図示
しない凸部と接合する圧力伝達部材１６を介して圧電素
子８が一体的に接合されている。First, the overall structure of the ink jet head will be described with reference to FIG. 6. Reference numeral 1 is a nozzle plate having a plurality of nozzles 2, and the ink corresponding to each nozzle 2 is provided on the back surface of the nozzle plate 1. A cavity forming plate 4 having a common reservoir portion 7 with the chambers 3 is laminated, and a pressure plate that is deformed to apply pressure to the ink in each ink chamber 3 in accordance with a print signal is provided on the back surface of the cavity forming plate 4. 6 are laminated, and the piezoelectric element 8 is integrally joined to the back surface thereof via a pressure transmission member 16 that is joined to a protrusion (not shown).
【０００９】一方、上記した圧電素子８はその長手方向
下半部を固定板９に固定され、またこの固定板９は、ヘ
ッドフレーム６０内を貫通する取付け孔６１に、圧電素
子８を面方向前後左右に位置決めすべく支持されてい
る。On the other hand, the above-mentioned piezoelectric element 8 is fixed at its lower half portion in the longitudinal direction to a fixing plate 9, and this fixing plate 9 has the piezoelectric element 8 in a mounting hole 61 penetrating the inside of the head frame 60. It is supported so that it can be positioned to the front, rear, left and right.
【００１０】このヘッドフレーム６０には、図示しない
インク溜めに延びるインク供給管６２が接続されてお
り、またこのインク供給管６２に連なるインク通路６３
は、ヘッドフレーム６０内を上方に延び上って、中間部
材１０及び加圧板６に穿設した各連通孔１０ａ、６ａを
介してキャビティ形成板４に設けたリザーバ部７にイン
クを供給するように構成されている。An ink supply pipe 62 extending to an ink reservoir (not shown) is connected to the head frame 60, and an ink passage 63 connected to the ink supply pipe 62.
Supplies ink to the reservoir portion 7 provided in the cavity forming plate 4 via the communication holes 10a, 6a formed in the intermediate member 10 and the pressure plate 6 so as to extend upward in the head frame 60. Is configured.
【００１１】なお、図中符号６４はノズルプレート１を
保護する枠体、６５は、この枠体６４を接地電位に保持
すべく、制御基板６６を貫通して基体に接続させたアー
ス板を示している。In the figure, reference numeral 64 is a frame body for protecting the nozzle plate 1, and reference numeral 65 is a ground plate which penetrates the control board 66 and is connected to the base body in order to hold the frame body 64 at the ground potential. ing.
【００１２】つぎに、図１によって本発明の一実施例を
なす圧力伝達機構について説明すると、インク室３に圧
力を加える加圧板６は、ニッケル材を用いた電鋳加工に
よってインク室３内のインクが滲み出すことがない程度
に、かつ圧電素子８の縦方向伸縮動を可能な限り効率よ
くインク室３内に伝えることができるように、肉厚が例
えば１乃至２０μｍ程度の薄い板材として形成され、さ
らにその背面には、インク室３の巾よりも狭く、かつそ
の長さよりも短い形状の突部１２が電鋳加工により一体
的に突出形成されていて、区画壁５の内面と突部１２と
の間に形成されたギャップＧにより、加圧板６に過度の
応力を作用させることなくこれをインク室３に向けて水
平に撓ませることができるように形成されている。Next, referring to FIG. 1, a pressure transmission mechanism according to an embodiment of the present invention will be described. The pressure plate 6 for applying pressure to the ink chamber 3 is formed in the ink chamber 3 by electroforming using a nickel material. Formed as a thin plate material having a wall thickness of, for example, about 1 to 20 μm so that the longitudinal expansion / contraction motion of the piezoelectric element 8 can be transmitted to the ink chamber 3 as efficiently as possible without the ink oozing out. Further, a projection 12 having a shape narrower than the width of the ink chamber 3 and shorter than the length thereof is integrally formed on the back surface thereof by electroforming to integrally project with the inner surface of the partition wall 5. A gap G formed between the pressure plate 6 and the pressure plate 6 allows the pressure plate 6 to be bent horizontally toward the ink chamber 3 without applying excessive stress to the pressure plate 6.
【００１３】一方図中符号１６は、圧電素子８の変位を
突部１２に伝えるべく両者の間に介在させた圧力伝達部
材で、この圧力伝達部材１６は、可能な限りインク室３
の配列ピッチＰに近い巾Ｗを持つように形成されてい
て、突部１２と圧電素子８との間に成形上の誤差や組付
け上の位置ズレがあっても両者間で正しく圧力伝達が行
えるように構成されている。On the other hand, reference numeral 16 in the drawing denotes a pressure transmission member interposed between the piezoelectric element 8 and the protrusion 12 in order to transmit the displacement of the piezoelectric element 8 to the protrusion 12. The pressure transmission member 16 is as much as possible.
Is formed so as to have a width W close to the arrangement pitch P, and even if there is a molding error or a positional deviation in assembly between the protrusion 12 and the piezoelectric element 8, the pressure can be properly transmitted between them. It is configured to do.
【００１４】これらの各圧力伝達部材１６‥‥は、フィ
ルム状の支持膜１８とともに、インク室３の配列ピッチ
Ｐに対応するよう配列された状態で電鋳加工により一体
的に形成されていて、上記した各突部１２‥‥の上に正
しく接合される一方、その背面には支持膜１８を介して
各圧電素子８の先端が接着される。Each of the pressure transmitting members 16 ... Is integrally formed with the film-shaped support film 18 by electroforming in a state of being arranged so as to correspond to the arrangement pitch P of the ink chambers 3. The above-mentioned protrusions 12 are correctly joined to each other, while the tips of the piezoelectric elements 8 are adhered to the back surface of the protrusions 12 with a support film 18 interposed therebetween.
【００１５】この薄い支持膜１８は、個々の圧力伝達部
材１６がばらばらにならないように結合しておくもので
あり、各圧力伝達部材１６の間には切欠き１７を設けて
おいてもよく、特に、インク室３の両側やその周囲に切
欠き入れておくことにより、圧電素子８への負荷を軽減
してより効率的に加圧板６を変位させることができる。The thin support film 18 is used to bond the individual pressure transmitting members 16 so as not to come apart from each other. A notch 17 may be provided between the pressure transmitting members 16. In particular, by making cutouts on both sides of the ink chamber 3 and around it, the load on the piezoelectric element 8 can be reduced and the pressure plate 6 can be displaced more efficiently.
【００１６】このように構成されたインクジェットヘッ
ドは、加圧板６と圧電素子８とが、可能な限り巾広く形
成された圧力伝達部材１６を介して結合されるため、加
工上の誤差や組付け上の位置ズレによって両者間に巾方
向のズレが生じても、加圧板６に偏った荷重を作用させ
ることなく、インク室３内のインクに効率的な圧力を加
えることができる。In the ink jet head constructed as described above, the pressure plate 6 and the piezoelectric element 8 are coupled via the pressure transmission member 16 formed as wide as possible, so that there is a processing error or assembly. Even if a displacement in the width direction occurs between the two due to the above positional displacement, it is possible to apply an efficient pressure to the ink in the ink chamber 3 without applying a biased load to the pressure plate 6.
【００１７】いま、ノズル３の密度を１８０ｄｐｉとし
た場合、ノズル３の配列ピッチＰを１４１μｍ、インク
室３の巾Ｗを１００μｍ程度にする必要があり、さら
に、加圧板６の背面に設ける突部１２の巾の３０μｍ程
度にする必要があるが、これらの突部１２の頂面に接合
させる圧力伝達部材１６については、ノズル２の配列ピ
ッチＰにのみ制約を受けるだけで済むため、例えば巾６
０μｍの圧電素子８に対して１２０μｍ程度の巾を採る
ことが可能となって、組付けの際の両者のズレを３０μ
ｍ程度まで許容することが可能になる。Now, when the density of the nozzles 3 is 180 dpi, the arrangement pitch P of the nozzles 3 needs to be 141 μm and the width W of the ink chambers 3 needs to be about 100 μm. Although it is necessary to set the width of the nozzles 12 to about 30 μm, the pressure transmission members 16 to be joined to the top surfaces of the protrusions 12 need only be restricted by the arrangement pitch P of the nozzles 2, and therefore, for example, the width 6
A width of about 120 μm can be taken with respect to the piezoelectric element 8 of 0 μm, and a deviation of both when assembling is 30 μm.
It is possible to allow up to about m.
【００１８】図２は本発明の第２の実施例を示したもの
で、複数の圧力伝達部材２６を、その両側に設けた帯状
の支持部材２８によってノズル４のピッチ間隔毎に結合
支持した状態で支持部材２８とともに電鋳加工により一
体的に形成し、ついで、これらの圧力伝達部材２６を対
応する各突部２２に接合させるようにしたものである。FIG. 2 shows a second embodiment of the present invention, in which a plurality of pressure transmission members 26 are joined and supported at intervals of the pitch of the nozzle 4 by belt-shaped support members 28 provided on both sides thereof. Are integrally formed with the support member 28 by electroforming, and then these pressure transmission members 26 are joined to the corresponding protrusions 22.
【００１９】この実施例は、各突部２２の頂面に金属プ
レートを接合させた上、圧力伝達部材２６を除く他の不
要部分をエッチングにより除去するようにして構成する
こともできる。In this embodiment, a metal plate may be bonded to the top surface of each protrusion 22 and other unnecessary portions except the pressure transmitting member 26 may be removed by etching.
【００２０】また、図３乃至図５は、本発明のさらに別
の実施例を製造工程順に示したものである。図３に示し
た第３の実施例は、加圧板６の背面に光により硬化する
ネガ型の感光性樹脂フィルム３１を貼着し、これをマス
クＭ1 を介して照射した光により突部３２に相当する部
分を硬化させ（同図（ａ））、ついで、未露光部分３３
を適宜の溶剤により溶解除去した上、その上に第２の感
光性樹脂フィルム３５を貼着し、マスクＭ2 を介してこ
れに光を照射して圧力伝達部材３６に相当する部分を硬
化させ（同図（ｂ））、最後に、未露光部分３７を溶剤
により除去することによって、同図（ｃ）に示したよう
に、加圧板６の背面に、圧力伝達部材２６を突部２２と
一体に形成する。3 to 5 show still another embodiment of the present invention in the order of manufacturing steps. In the third embodiment shown in FIG. 3, a negative type photosensitive resin film 31 that is cured by light is attached to the back surface of the pressure plate 6, and the protrusion 32 is formed by the light irradiated through the mask M 1. Is cured (FIG. 11A), and then the unexposed portion 33
Is dissolved and removed by an appropriate solvent, and then the second photosensitive resin film 35 is adhered thereon, and light is radiated through the mask M 2 to cure the portion corresponding to the pressure transmission member 36. ((B) in the figure) Finally, by removing the unexposed portion 37 with a solvent, as shown in (c) in the figure, the pressure transmitting member 26 and the protrusion 22 are formed on the back surface of the pressure plate 6. Form integrally.
【００２１】他方、図４に示した第４の実施例は、第３
の実施例とは逆に、加圧板６に貼着した感光性樹脂フィ
ルム４１に、露光、現像処理を施して、突部４２に相当
する部分を除去し（同図（ａ））、その上に貼着した第
２の感光性樹脂フィルム４５に同じく露光、現像処理を
施して、圧力伝達部材を４６に相当する部分を除去した
上（同図（ｂ））、この面にニッケルメッキ処理４７を
施し（同図（ｃ））、最後に感光性樹脂フィルム４１、
４５を溶解除去して、加圧板１上に圧力伝達部材４６と
一体の突部４２を形成するようにしたものである（同図
（ｄ））。On the other hand, the fourth embodiment shown in FIG.
Contrary to the above example, the photosensitive resin film 41 attached to the pressure plate 6 is exposed and developed to remove the portion corresponding to the protrusion 42 (FIG. 7A), and Similarly, the second photosensitive resin film 45 adhered to the substrate is exposed and developed to remove the portion corresponding to the pressure transmitting member 46 ((b) in the figure), and the nickel plating treatment 47 is applied to this surface. (The same figure (c)), and finally, the photosensitive resin film 41,
45 is melted and removed to form a protrusion 42 integral with the pressure transmission member 46 on the pressure plate 1 (FIG. 7 (d)).
【００２２】さらに図５に示した第５の実施例は、ニッ
ケルの電鋳加工によるか、もしくはプラスチックスの射
出成形加工によって、加圧板６の背面に突部５２を一体
的に形成する一方、これらの突部５２と対応する円錐台
状の圧力伝達部材５６を薄い支持膜５８とともに射出成
形加工により一体的に形成し（同図（ａ））、最後に突
部５２と圧力伝達部材５６を接合させて一体となしたも
のである（同図（ｂ））。Further, in the fifth embodiment shown in FIG. 5, the protrusion 52 is integrally formed on the back surface of the pressure plate 6 by nickel electroforming or plastic injection molding. A truncated cone-shaped pressure transmitting member 56 corresponding to these protrusions 52 is integrally formed with a thin support film 58 by injection molding (FIG. 7A), and finally the protrusions 52 and the pressure transmitting member 56 are formed. They are joined together to form one body (FIG. 2 (b)).
【００２３】[0023]
【発明の効果】以上述べたように本発明によれば、加圧
板の背面に、その撓み量に相当する分巾を狭くした突部
を設け、さらにこの突部の頂面に、インク室の配列ピッ
チに相当する巾を限度とする広巾の圧力伝達部材を接合
させるようにしたので、製造上あるいは組付け上の誤差
により圧電素子に巾方向のズレが生じた場合でも、広巾
の圧力伝達部材を介して圧電素子の変位を突部に正しく
伝えることができるとともに、狭巾の突部により加圧板
をインク室に向けて水平に変位させてインクを効率よく
加圧することができる。As described above, according to the present invention, the back surface of the pressure plate is provided with a projection having a narrow width corresponding to the amount of deflection, and the top surface of the projection is provided with the ink chamber. Since a wide pressure transmitting member with a width corresponding to the array pitch is used as a limit, even if the piezoelectric element is displaced in the width direction due to an error in manufacturing or assembly, the wide pressure transmitting member can be joined. The displacement of the piezoelectric element can be correctly transmitted to the protrusion via the, and the narrow protrusion allows the pressure plate to be horizontally displaced toward the ink chamber to efficiently press the ink.
【００２４】しかも、突部と圧力伝達部材をそれぞれ別
個に形成して一体とするようにしたので、狭巾の突部の
上に広巾の圧力伝達部材が位置するといったアンダーカ
ット形状をなすこの部分をきわめて容易に成形すること
ができる。Moreover, since the protrusion and the pressure transmitting member are separately formed and integrated with each other, the undercut shape in which the wide pressure transmitting member is located on the narrow protrusion is formed. Can be molded very easily.
【図１】本発明の一実施例を示すインクジェットヘッド
の断面図である。FIG. 1 is a cross-sectional view of an inkjet head showing an embodiment of the present invention.
【図２】本発明の第２の実施例を示すインクジェットヘ
ッドの断面図である。FIG. 2 is a sectional view of an inkjet head showing a second embodiment of the present invention.
【図３】（ａ）乃至（ｃ）は本発明の第３の実施例を製
造工程順に示した図である。3A to 3C are views showing a third embodiment of the present invention in the order of manufacturing steps.
【図４】（ａ）乃至（ｄ）は本発明の第４の実施例を製
造工程順に示した図である。4A to 4D are views showing a fourth embodiment of the present invention in the order of manufacturing steps.
【図５】（ａ）（ｂ）は本発明の第５の実施例を製造工
程順に示した図である。5A and 5B are views showing a fifth embodiment of the present invention in the order of manufacturing steps.
【図６】インクジェットヘッドの全容を示した分解斜視
図である。FIG. 6 is an exploded perspective view showing the entire inkjet head.
１ ノズルプレート ３ インク室 ６ 加圧板 ８ 圧電素子 １２、２２、３２、４２、５２ 突部 １６、２６、３６、４６、５６ 圧力伝達部材 ３１、３５、４１、４５ 感光性樹脂フィルム １８、５８ 支持膜 1 Nozzle Plate 3 Ink Chamber 6 Pressurizing Plate 8 Piezoelectric Element 12, 22, 32, 42, 52 Protrusions 16, 26, 36, 46, 56 Pressure Transmission Member 31, 35, 41, 45 Photosensitive Resin Film 18, 58 Support film
Claims (6)
少なくとも上記インク室の有効巾より上記加圧板の撓み
量を減じた巾の狭い突部を設けるとともに、該突部の頂
面に、圧電素子と当接しかつ上記インク室の配列ピッチ
に相当する巾を限度とする巾の広い圧力伝達部材を接合
させたことを特徴とするインクジェットヘッド。1. A back surface of a pressure plate covering one surface of the ink chamber,
At least a protrusion whose width is smaller than the effective width of the ink chamber by reducing the amount of flexure of the pressure plate is provided, and a width corresponding to the arrangement pitch of the ink chambers is in contact with the piezoelectric element on the top surface of the protrusion. An ink jet head characterized in that a wide pressure transmission member having a maximum width is joined.
により一体的に形成したことを特徴とする請求項１記載
のインクジェットヘッド。2. The ink jet head according to claim 1, wherein the protrusion is integrally formed with the pressure plate by electroforming.
持膜とともに、電鋳加工により一体的に形成したことを
特徴とする請求項１記載のインクジェットヘッド。3. The ink jet head according to claim 1, wherein the pressure transmitting member is integrally formed with a support film that supports the member by electroforming.
感光性樹脂材を用いて積層形成したことを特徴とする請
求項１記載のインクジェットヘッド。4. The ink jet head according to claim 1, wherein the protrusion and the pressure transmitting member are formed by laminating a photosensitive resin material.
をもとに、上記加圧板の背面に上記突部と上記圧力伝達
部材を一体的に形成したことを特徴とする請求項１記載
のインクジェットヘッド。5. The projection and the pressure transmission member are integrally formed on the back surface of the pressure plate based on a female die that imitates the projection and the pressure transmission member. 1. The inkjet head according to 1.
成形した上記圧力伝達部材を接合させたことを特徴とす
る請求項１記載のインクジェットヘッド。6. The ink jet head according to claim 1, wherein the pressure transmission member formed by injection molding is joined to the top surface of the protrusion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7758593A JP3116984B2 (en) | 1992-06-22 | 1993-03-11 | Inkjet head |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4-162885 | 1992-06-22 | ||
| JP16288592 | 1992-06-22 | ||
| JP7758593A JP3116984B2 (en) | 1992-06-22 | 1993-03-11 | Inkjet head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0671877A true JPH0671877A (en) | 1994-03-15 |
| JP3116984B2 JP3116984B2 (en) | 2000-12-11 |
Family
ID=26418665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7758593A Expired - Fee Related JP3116984B2 (en) | 1992-06-22 | 1993-03-11 | Inkjet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3116984B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5548314A (en) * | 1993-05-12 | 1996-08-20 | Seiko Epson Corporation | Ink jet recording head |
| JPH09174836A (en) * | 1995-12-22 | 1997-07-08 | Nec Corp | Ink jet recording head and manufacture thereof |
| WO2001072519A1 (en) * | 2000-03-27 | 2001-10-04 | Fujitsu Limited | Multiple-nozzle ink-jet head and method of manufacture thereof |
| US6943483B2 (en) | 2001-03-01 | 2005-09-13 | Ngk Insulators, Ltd. | Comb teeth type piezoelectric actuator and method for manufacturing the same |
| JP2009073081A (en) * | 2007-09-21 | 2009-04-09 | Seiko Epson Corp | Liquid jet head |
| EP2379330A1 (en) * | 2009-01-20 | 2011-10-26 | Hewlett-Packard Development Company, L.P. | Fluid ejector structure |
-
1993
- 1993-03-11 JP JP7758593A patent/JP3116984B2/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5548314A (en) * | 1993-05-12 | 1996-08-20 | Seiko Epson Corporation | Ink jet recording head |
| JPH09174836A (en) * | 1995-12-22 | 1997-07-08 | Nec Corp | Ink jet recording head and manufacture thereof |
| US7425058B2 (en) | 2000-03-27 | 2008-09-16 | Fuji Photo Film Co., Ltd. | Multi-nozzle ink jet head and manufacturing method thereof |
| US6877843B2 (en) | 2000-03-27 | 2005-04-12 | Fuji Photo Film Co., Ltd. | Multi-nozzle ink jet head and manufacturing method thereof |
| WO2001072519A1 (en) * | 2000-03-27 | 2001-10-04 | Fujitsu Limited | Multiple-nozzle ink-jet head and method of manufacture thereof |
| US7517061B2 (en) | 2000-03-27 | 2009-04-14 | Fuji Photo Film Co., Ltd. | Multi-nozzle ink jet head and manufacturing method thereof |
| US7607764B2 (en) | 2000-03-27 | 2009-10-27 | Fuji Photo Film Co., Ltd. | Multi-nozzle ink jet head and manufacturing method thereof |
| US7743477B2 (en) | 2000-03-27 | 2010-06-29 | Fuji Photo Film Co., Ltd. | Method of manufacturing a multi-nozzle ink jet head |
| US6943483B2 (en) | 2001-03-01 | 2005-09-13 | Ngk Insulators, Ltd. | Comb teeth type piezoelectric actuator and method for manufacturing the same |
| US7246420B2 (en) | 2001-03-01 | 2007-07-24 | Ngk Insulators, Ltd. | Method for manufacturing a comb teeth type piezoelectric actuator |
| JP2009073081A (en) * | 2007-09-21 | 2009-04-09 | Seiko Epson Corp | Liquid jet head |
| EP2379330A1 (en) * | 2009-01-20 | 2011-10-26 | Hewlett-Packard Development Company, L.P. | Fluid ejector structure |
| CN102292216A (en) * | 2009-01-20 | 2011-12-21 | 惠普开发有限公司 | Fluid ejector structure |
| EP2379330A4 (en) * | 2009-01-20 | 2012-09-26 | Hewlett Packard Development Co | Fluid ejector structure |
| US8651630B2 (en) | 2009-01-20 | 2014-02-18 | Hewlett-Packard Development Company, L.P. | Fluid ejector structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3116984B2 (en) | 2000-12-11 |
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