JPH0671321B2 - Micro displacement device for solid-state image sensor - Google Patents
Micro displacement device for solid-state image sensorInfo
- Publication number
- JPH0671321B2 JPH0671321B2 JP62049296A JP4929687A JPH0671321B2 JP H0671321 B2 JPH0671321 B2 JP H0671321B2 JP 62049296 A JP62049296 A JP 62049296A JP 4929687 A JP4929687 A JP 4929687A JP H0671321 B2 JPH0671321 B2 JP H0671321B2
- Authority
- JP
- Japan
- Prior art keywords
- bonded
- solid
- piezoelectric vibrator
- state image
- bonded piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、同一面上二方向の精密な位置決めを行うため
の固体撮像素子用微小変位装置に関する。この装置は、
ビデオカメラのカラー用固体撮像素子の位置合わせ、高
解像度化の固体撮像素子用変位装置等に利用することが
できる。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a minute displacement device for a solid-state image pickup device for performing precise positioning in two directions on the same plane. This device
It can be used for positioning of a solid-state image pickup device for color of a video camera, a displacement device for a solid-state image pickup device having high resolution, and the like.
従来の技術 ミクロン、サブミクロンという微小変位による位置決め
は、従来はステッピング・モータや、DC・サーボモータ
を使い、ボールねじで回転運動を直進運動に変換する機
械的な手段で行われていた。このため機械的な結合によ
る誤差をなくせず、精度を上げるためには、装置が大型
化してしまう。Conventional technology Positioning by minute displacements of micron and sub-micron has conventionally been performed by mechanical means that uses ball screw to convert rotational movement to linear movement using a stepping motor or DC servo motor. Therefore, in order to improve the accuracy without eliminating the error due to mechanical coupling, the device becomes large.
そこで、電気的な制御が可能な圧電素子の逆圧電効果を
利用した微小変位装置が考えられ、特公昭51−12497号
公報に示されているようなシャクトリ虫型の移動機構が
ある。第３図は、前記シャクトリ虫型の移動機構の説明
図で、円筒型圧電素子１の両端に静電力、あるいは電磁
力を利用したクランプ素子２、３を取り付けた構造であ
る。同図（ａ）では、クランプ素子２、３は固定台４に
クランプされ、同図（ｂ）でクランプ素子３をフリーに
し、同図（ｃ）で圧電素子１に電圧を印加して圧電素子
１を伸ばている。同図（ｄ）では、伸びている状態で再
びクランプ素子３を固定台４にクランプし、同図（ｅ）
でクランプ素子２をフリーにし、同図（ｆ）で印加電圧
を取り去り、同図（ｇ）で再びクランプ素子２をクラン
プしている。これは、同図（ａ）と同じ状態になり、Δ
だけ変位したことになる。前記移動機構を２方向に取
り付けることにより、簡単に２方向微小変位装置を得る
ことができる。逆圧電効果によるひずみが小さいことか
ら、高精度な位置決めが可能である。Therefore, a minute displacement device utilizing the inverse piezoelectric effect of a piezoelectric element that can be electrically controlled is conceivable, and there is a rhododendron type movement mechanism as disclosed in Japanese Patent Publication No. 51-12497. FIG. 3 is an explanatory view of the Rhododendron-type moving mechanism, and has a structure in which the clamp elements 2 and 3 using electrostatic force or electromagnetic force are attached to both ends of the cylindrical piezoelectric element 1. In FIG. 1A, the clamp elements 2 and 3 are clamped by the fixed base 4, the clamp element 3 is freed in FIG. 1B, and a voltage is applied to the piezoelectric element 1 in FIG. Stretching 1. In the same figure (d), the clamp element 3 is again clamped to the fixed base 4 in the extended state, and the same figure (e)
The clamp element 2 is made free by, the applied voltage is removed in the same figure (f), and the clamp element 2 is clamped again in the same figure (g). This is the same state as in FIG.
It has been displaced only. By attaching the moving mechanism in two directions, a two-way micro displacement device can be easily obtained. Since the strain due to the inverse piezoelectric effect is small, highly accurate positioning is possible.
また、特公昭58−130677号公報、同58−196773号公報に
は厚さ方向に分極軸を有する短冊状圧電素子を同形の薄
い金属板の上下面に貼り合わせ、一端を固定、あるいは
両端を固定した屈曲振動子（バイモルフ振動子）を使
い、固定撮像素子を変位させて受光面積を増やし高解像
度化する固体撮像素子用変位装置が開示されている。第
４図はその１例の前記屈曲振動子を用いた１方向の微小
変位装置を示す。両端固定の屈曲振動子５、５′を平行
に配置し、変位量の最大となる前記屈曲振動子５、５′
の中心位置に固体撮像素子等を載せた移動台６が設けら
れている。In addition, in Japanese Patent Publication Nos. 58-130677 and 58-196773, a strip-shaped piezoelectric element having a polarization axis in the thickness direction is attached to the upper and lower surfaces of a thin metal plate of the same shape, and one end is fixed or both ends are fixed. A displacement device for a solid-state image pickup device is disclosed which uses a fixed bending oscillator (bimorph oscillator) to displace a fixed image pickup device to increase a light-receiving area and increase resolution. FIG. 4 shows a unidirectional microdisplacement device using the bending oscillator of one example thereof. The bending vibrators 5 and 5'fixed at both ends are arranged in parallel, and the bending vibrators 5 and 5'having the maximum displacement amount are provided.
A movable table 6 on which a solid-state image sensor or the like is mounted is provided at the center position of the.
発明が解決しようとする問題点 上述したシャクトリ虫型の微小変位装置を、同一面２方
向に取り付けることにより、容易に２方向微小変位装置
が考えられるが、絶えず駆動体の一方を静電力、あるい
は電磁力でクランプしておかなければならないので、携
帯、或は傾けて使うような装置では、動作させない時に
移動する物の固定が別途必要で構造が複雑となり、装置
が大型化してくる。また、移動している時はクランプを
外している部分に移動する物の重量が集中し、機械的に
不安定となる。さらに移動方向は装置の取り付けで決ま
ってしまい、取り付け後の任意の方向への移動はできな
い。Problems to be Solved by the Invention A two-way microdisplacement device can be easily conceived by mounting the above-described microscopic displacement device of the Rhododendron worm type on the same plane in two directions. Since it has to be clamped by electromagnetic force, in a device that is portable or used while being tilted, it is necessary to separately fix an object that moves when not in operation, which complicates the structure and increases the size of the device. In addition, when moving, the weight of the moving object is concentrated on the part where the clamp is removed, and it becomes mechanically unstable. Furthermore, the movement direction is determined by the attachment of the device, and it cannot be moved in any direction after attachment.
屈曲振動子を用いた微小変位装置の場合は、ひずみ量が
大きくとれるが、発生する力が弱く重いものを動かすこ
とができない。また、大きな荷重がかかると振動子の共
振周波数が下がり、駆動周波数の高調波成分により共振
しやすくなり、耐久性に問題が生じる。したがって、任
意方向への微小変位装置とするために前記屈曲振動子を
用いた変位装置（第１変位ユニット）で、他の変位装置
（第２変位ユニット）を変位させることが考えられる
が、第２変位ユニットの重量が第１変位ユニットにかか
るため、第２変位ユニットの重量の影響を少なくするた
めに、第１変位ユニットの屈曲振動子を大きくする必要
があり大型化してしまう。また、耐久性にも問題が生じ
る。In the case of a minute displacement device using a bending oscillator, a large amount of strain can be taken, but the generated force is weak and a heavy object cannot be moved. Further, when a large load is applied, the resonance frequency of the vibrator is lowered, and the harmonic components of the drive frequency easily cause resonance, which causes a problem in durability. Therefore, it is conceivable to displace another displacement device (second displacement unit) by the displacement device (first displacement unit) using the bending oscillator in order to make a minute displacement device in an arbitrary direction. Since the weight of the two displacement unit is applied to the first displacement unit, in order to reduce the influence of the weight of the second displacement unit, it is necessary to enlarge the bending oscillator of the first displacement unit, resulting in an increase in size. In addition, durability also becomes a problem.
問題点を解決するための手段 ４角形となるように作られた矩形状金属薄板の各辺の両
面に、厚さ方向に分極軸を有し上下面に電極を配した板
状圧電素子２枚を、分極軸方向が同一となるよう貼り合
わせて、互いに独立な貼り合わせ圧電振動子を構成し、
向かい合う１対の前記貼り合わせ圧電振動子の中央部を
樹脂コーティングした金属あるいは樹脂等の絶縁材料か
らなる固定部材により固定支持し、向かい合う他の１対
の前記貼り合わせ圧電振動子の中央部に固体撮像素子を
取り付けた移動台を設け、前記貼り合わせ圧電振動子の
上下面電極の導通を図り個々に独立した１つの印加電圧
端子とし、前記金属薄板を前記貼り合わせ圧電振動子総
てに共通の印加電圧端子として構成し、前記移動台底面
に貼り合わせたフレキシブル基板を用いて、前記固体撮
像素子の信号と前記貼り合わせ圧電振動子の印加電圧端
子を外部に引き出す様にし、前記圧電振動子を独立に駆
動することにより固体撮像素子を同一面上２方向へ独立
に微小変位させることが出来るようにする。Means for Solving Problems Two plate-shaped piezoelectric elements each having a polarization axis in the thickness direction and electrodes arranged on the upper and lower surfaces on both sides of each side of a rectangular metal thin plate formed to have a quadrangular shape Are bonded so that the directions of the polarization axes are the same, and the bonded piezoelectric vibrators that are independent of each other are configured.
The central portion of one pair of the bonded piezoelectric vibrators facing each other is fixed and supported by a fixing member made of an insulating material such as a resin-coated metal or resin, and the other central portion of the pair of bonded piezoelectric vibrators facing each other is solid. A movable table to which an image pickup device is attached is provided, and the upper and lower electrodes of the bonded piezoelectric vibrator are electrically connected to each other to form one independently applied voltage terminal, and the metal thin plate is common to all of the bonded piezoelectric vibrators. By using a flexible substrate configured as an applied voltage terminal and attached to the bottom surface of the movable table, the signal of the solid-state imaging device and the applied voltage terminal of the attached piezoelectric vibrator are drawn to the outside. By independently driving, the solid-state image pickup device can be independently displaced minutely in two directions on the same plane.
作 用 貼り合わせ圧電振動子の上下面電極の印加電圧端子と金
属薄板の印加電圧端子に電圧を印加すれば、貼り合わせ
た板状圧電素子の１方が伸び、他方が縮み、その結果屈
曲振動が生じる屈曲振動子として機能する。中央部が固
定されている貼り合わせ圧電振動子は固定部分の両側が
片持ち構造の屈曲振動子となり、移動台を取り付けた貼
り合わせ圧電振動子そのものを前記片持ち構造屈曲振動
子の電極面に対し法線方向へ変位させることが出来る。
中央に移動台を取り付けた貼り合わせ圧電振動子は両端
を固定支持された構造の屈曲振動子であり、固体撮像素
子を取り付けた移動台を電極面に対し法線方向に変位さ
せることが出来る。この結果、固体撮像素子を２方向へ
独立に変位させる微小変位装置として小型化でき、構造
の簡単なものとなる。When a voltage is applied to the applied voltage terminals of the upper and lower surface electrodes of the bonded piezoelectric vibrator and the applied voltage terminal of the thin metal plate, one of the bonded plate piezoelectric elements expands and the other contracts, resulting in bending vibration. Function as a bending oscillator. The bonded piezoelectric vibrator whose central part is fixed becomes a flexural vibrator with a cantilever structure on both sides of the fixed part, and the bonded piezoelectric vibrator itself with a movable table is attached to the electrode surface of the cantilever structure flexural vibrator. It can be displaced in the normal direction.
The bonded piezoelectric vibrator having a movable table attached at the center is a bending oscillator having a structure in which both ends are fixedly supported, and the movable table having a solid-state image sensor attached thereto can be displaced in the normal direction to the electrode surface. As a result, the solid-state imaging device can be miniaturized as a minute displacement device that independently displaces in two directions, and the structure becomes simple.
実施例 以下、本発明の実施例について、図面を用いて詳細に説
明する。Example Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第１図は、本発明の一実施例を示し、同図（ａ）は斜視
図、同図（ｂ）は分解斜視図、同図（ｃ）は貼り合わせ
圧電振動子を示す分解斜視図である。４角形とした矩形
状金属薄板７の各面の上下に、第１図（ｃ）に示すよう
に、厚さ方向に分極軸を有し上下面に電極を配した板状
圧電素子（8a,8b）、（9a,9b）、（10a,10b）、（11a,1
1b）を、それぞれ分極軸方向が同一となるよう貼り合わ
せて、互いに独立な貼り合わせ圧電振動子8,9,10,11を
構成している。貼り合わせ圧電振動子10,11の中央部
を、樹脂コーティングした金属あるいは樹脂等からなる
固定部材13a,13bを用いて基台12に接着等により固定支
持し、貼り合わせ圧電振動子8,9の中央部には、パッケ
ージ化された固体撮像素子14を載せた移動台15を取り付
けている。貼り合わせ圧電振動子8,9,10,11の上下面電
極の導通を図り、印加電圧端子16,17,18,19とし、金属
薄板７を印加電圧端子16,17,18,19に対して共通の印加
電圧端子20としている。移動台15の底面にはフレキシブ
ル基板21を取り付け、固体撮像素子15の信号と貼り合わ
せ圧電振動子8,9,10,11の印加電圧端子16、17、18、19
への信号を配線し、基台12の底面に取り付けるプリント
基板22へ接続している。さらに、共通の印加電圧端子20
は基台12との導通を図り、プリント基板22へ接続されて
いる。印加電圧端子20と16,17に電圧を印加することに
より貼り合わせ圧電振動子8,9は両端支持構造の屈曲振
動子として機能し、電極面に対し法線方向に変位する。
その変位量は印加電界と圧電定数d31に比例する。貼り
合わせる圧電素子8a,8b,9a,9bの厚さが同一で、向かい
合う貼り合わせ圧電振動子8,9の分極軸方向が同一であ
れば同位相、同電圧を与えると、貼り合わせ圧電振動子
8,9の変位量、変位方向が同一となり、中央部に取り付
けた移動台15を貼り合わせ圧電振動子8,9の変位方向、
すなわち電極面に対し法線方向へ変位させることができ
る。中央部を固定部材13a,13bで固定支持している貼り
合わせ圧電振動子10,11は、片持ち構造の屈曲振動子と
して機能し、印加電圧端子20と18,19に、変位量、変位
方向が同一となるよう印加電圧を与えると、貼り合わせ
圧電振動子8,9を変位方向と同一方向、すなわち圧電振
動子10,11の電極面に対し法線方向へ変位させるので移
動台15も同一方向へ変位することになる。貼り合わせ圧
電振動子8,9と10,11は独立に駆動できるので、移動台15
すなわち固体撮像素子14を同一面２方向へ変位させるこ
とができる。1A and 1B show an embodiment of the present invention. FIG. 1A is a perspective view, FIG. 1B is an exploded perspective view, and FIG. 1C is an exploded perspective view showing a bonded piezoelectric vibrator. is there. As shown in FIG. 1 (c), plate-shaped piezoelectric elements (8a, 8a, 8a, 8c) having polarization axes in the thickness direction and electrodes on the upper and lower surfaces are provided above and below each surface of the rectangular rectangular metal thin plate 7. 8b), (9a, 9b), (10a, 10b), (11a, 1
1b) are bonded so that the polarization axis directions thereof are the same to form bonded piezoelectric vibrators 8, 9, 10, 11 which are independent of each other. The central portions of the bonded piezoelectric vibrators 10 and 11 are fixedly supported by bonding or the like to the base 12 using fixing members 13a and 13b made of resin-coated metal or resin, and the bonded piezoelectric vibrators 8 and 9 are A movable table 15 on which a packaged solid-state imaging device 14 is mounted is attached to the central portion. The upper and lower electrodes of the laminated piezoelectric vibrators 8, 9, 10, 11 are made conductive, and the applied voltage terminals 16, 17, 18, 19 are made, and the metal thin plate 7 is applied to the applied voltage terminals 16, 17, 18, 19. The common applied voltage terminal 20 is used. A flexible substrate 21 is attached to the bottom surface of the moving table 15 and is bonded to the signal of the solid-state image sensor 15 and applied voltage terminals 16, 17, 18, 19 of the piezoelectric vibrators 8, 9, 10, 11 are attached.
Signal to the printed circuit board 22 attached to the bottom surface of the base 12. In addition, the common applied voltage terminal 20
Is connected to the printed circuit board 22 for electrical connection with the base 12. By applying a voltage to the applied voltage terminals 20 and 16 and 17, the bonded piezoelectric vibrators 8 and 9 function as a bending vibrator having a support structure at both ends and are displaced in the direction normal to the electrode surface.
The amount of displacement is proportional to the applied electric field and the piezoelectric constant d 31 . If the piezoelectric elements 8a, 8b, 9a, 9b to be bonded have the same thickness, and the bonding piezoelectric vibrators 8 and 9 facing each other have the same polarization axis direction, when the same phase and the same voltage are applied, the bonded piezoelectric vibrators
The displacement amounts and displacement directions of 8, 9 are the same, and the moving base 15 attached to the central portion is pasted together, and the displacement directions of the piezoelectric vibrators 8, 9 are
That is, it can be displaced in the direction normal to the electrode surface. The bonded piezoelectric vibrators 10 and 11 whose central portion is fixedly supported by the fixing members 13a and 13b function as a flexural vibrator having a cantilever structure, and the applied voltage terminals 20 and 18 and 19 have a displacement amount and a displacement direction. When the applied voltage is applied so that they become the same, the bonded piezoelectric vibrators 8 and 9 are displaced in the same direction as the displacement direction, that is, in the normal direction to the electrode surfaces of the piezoelectric vibrators 10 and 11, so that the movable table 15 is also the same. It will be displaced in the direction. Since the bonded piezoelectric vibrators 8, 9 and 10, 11 can be driven independently,
That is, the solid-state imaging device 14 can be displaced in the same plane 2 direction.
また、貼り合わせ圧電振動子8,9,10,11を同一平面に構
成しているため、２方向へ独立な微小変位装置として小
型化でき、構造の簡単なものとなる。In addition, since the bonded piezoelectric vibrators 8, 9, 10, 11 are formed on the same plane, it is possible to miniaturize the minute displacement device independent in two directions, and the structure is simple.
さらに小型化できるという利点は、三管ビデオカメラ等
で用いるプリズムの３方向へ、撮像管ではなく固体撮像
素子を位置調整が出来る状態で取り付けられるという大
きな特徴を有する。The advantage of further miniaturization is that the prism used in a three-tube video camera or the like has a great feature that the solid-state image pickup device is attached to the prism in three directions so that the position of the solid-state image pickup device can be adjusted.
次に本発明の他の実施例について説明する。Next, another embodiment of the present invention will be described.
第２図は、本発明の他の一実施例を示す貼り合わせ圧電
振動子の分解斜視図である。コの字状に折り曲げた矩形
状金属薄板7a,7bを向き合わせて、４角形をした矩形状
金属薄板を構成し、金属薄板7a,7bの両端が貼り合わせ
る圧電素子（10a,10b）、（11a,11b）の中央部分にくる
よう構成したものである。金属薄板7a、7bの作製におい
て、折り曲げる方向が１方向しかなく量産性の良い構造
である。FIG. 2 is an exploded perspective view of a bonded piezoelectric vibrator showing another embodiment of the present invention. Piezoelectric elements (10a, 10b) in which both ends of the metal thin plates 7a, 7b are bonded to each other are formed by arranging the rectangular metal thin plates 7a, 7b bent in a U shape to face each other to form a square rectangular metal thin plate. 11a, 11b) is configured so as to come to the central portion. In manufacturing the metal thin plates 7a and 7b, the bending direction is only one direction, which is a structure with good mass productivity.
片持ち構造の貼り合わせ圧電振動子と両端支持構造の貼
り合わせ圧電振動子は、金属薄板を通して結合されてい
るため、互いに影響を受けることは避けられないが、第
１図（ｃ）に示したように両端支持構造の貼り合わせ圧
電振動子両側の金属薄板にＵ型のへこみ23a,23b,23c,23
dを設けたり、あるいは穴を設けたりして曲げ剛性率を
大きくして、影響を少なくし、信頼性の向上が図られ
る。The bonded piezoelectric vibrator having a cantilever structure and the bonded piezoelectric vibrator having both-ends supporting structure are connected through a thin metal plate, so that they are inevitably influenced by each other, but as shown in FIG. 1 (c). As shown in the figure, the U-shaped dents 23a, 23b, 23c, and 23
Bending rigidity is increased by providing d or holes to reduce the influence and improve reliability.
発明の効果 本発明は片持ち構造の貼り合わせ圧電振動子と両端支持
構造の貼り合わせ圧電振動子を同一平面内に構成するこ
とにより、２方向へ独立に微小変位させることができ
る。この結果、２方向へ独立な微小変位装置として小型
化でき、構造の簡単なものとなる。EFFECTS OF THE INVENTION According to the present invention, the bonded piezoelectric vibrator having a cantilever structure and the bonded piezoelectric vibrator having both-ends supporting structures are formed on the same plane, so that the bonded piezoelectric vibrators can be slightly displaced independently in two directions. As a result, it is possible to reduce the size of the minute displacement device independent in two directions and to simplify the structure.
第１図は本発明の一実施例の２方向微小変位装置を示
し、同図（ａ）はその斜視図、同図（ｂ）は分解斜視
図、同図（ｃ）はその要部である貼り合わせ圧電振動子
を示す分解斜視図、第２図は、本発明による他の実施例
における要部である貼り合わせ圧電振動子の分解斜視
図、第３図及び第４図は各々従来の微小変位装置の正面
図及び斜視図である。 ７……金属薄板、8,9,10,11……貼り合わせ圧電振動
子、8a,8b,9a,9b,10a,10b,11a,11b,……圧電素子、12…
…基台、13a,13b……固定部材、14……固体撮像素子、1
5……移動台、21……フレキシブル基板。FIG. 1 shows a two-way microdisplacement device according to an embodiment of the present invention. FIG. 1A is a perspective view thereof, FIG. 1B is an exploded perspective view, and FIG. FIG. 2 is an exploded perspective view showing a bonded piezoelectric vibrator, FIG. 2 is an exploded perspective view of a bonded piezoelectric vibrator which is a main part of another embodiment according to the present invention, and FIGS. It is a front view and a perspective view of a displacement device. 7 ... Metal thin plate, 8,9,10,11 ... Piezoelectric vibrator, 8a, 8b, 9a, 9b, 10a, 10b, 11a, 11b, ... Piezoelectric element, 12 ...
... Base, 13a, 13b ... Fixing member, 14 ... Solid-state image sensor, 1
5: Mobile platform, 21: Flexible board.
Claims (3)
に、厚さ方向に分極軸を有し上下面に電極を配した板状
圧電素子２枚を、分極軸方向が同一となるよう貼り合わ
せて貼り合わせ圧電振動子を構成し、向かい合う１対の
前記貼り合わせ圧電振動子の中央部を絶縁材料からなる
固定部材により固定支持し、向かい合う他の１対の前記
貼り合わせ圧電振動子の中央部に固体撮像素子を取り付
けた移動台を設け、前記貼り合わせ圧電振動子の上下面
電極の導通を図り個々に独立した１つの印加電圧端子と
し、前記金属薄板を前記貼り合わせ圧電振動子総てに共
通の印加電圧端子として構成し、前記移動台底面に貼り
合わせたフレキシブル基板を用いて、前記固体撮像素子
の信号と前記貼り合わせ圧電振動子の印加電圧端子を外
部に引き出す様にしたことを特徴とする固体撮像素子用
微小変位装置。1. Two plate-shaped piezoelectric elements each having a polarization axis in the thickness direction and electrodes arranged on the upper and lower surfaces on both sides of each side of a rectangular rectangular metal thin plate having the same polarization axis direction. To form a bonded piezoelectric vibrator, the central portion of a pair of the bonded piezoelectric vibrators facing each other is fixedly supported by a fixing member made of an insulating material, and another pair of the bonded piezoelectric vibrations facing each other. A movable table having a solid-state image sensor attached is provided in the center of the child, the upper and lower electrodes of the bonded piezoelectric vibrator are electrically connected to each other to form one independently applied voltage terminal, and the thin metal plate is bonded to the piezoelectric vibrator. A flexible substrate that is configured as a common applied voltage terminal for all the terminals and is bonded to the bottom surface of the moving base is used to draw out the signal of the solid-state image sensor and the applied voltage terminal of the bonded piezoelectric vibrator to the outside. A solid-state imaging device for small displacement and wherein the a.
つ用いて４角形をした矩形状金属薄板を構成し、前記２
つの金属薄板の両端が、中央部を固定部材により固定支
持する前記貼り合わせ圧電振動子の中央固定部分に位置
するよう構成したことを特徴とする特許請求の範囲第１
項記載の固体撮像素子用微小変位装置。2. A rectangular metal thin plate bent in a U-shape
Is used to form a quadrangular rectangular thin metal plate,
The both ends of the two metal thin plates are located at the central fixed portion of the bonded piezoelectric vibrator whose central portion is fixedly supported by a fixing member.
A minute displacement device for a solid-state imaging device according to the item.
動子両端部分の金属薄板の曲げ剛性率を大きくするよう
構成したことを特徴とする特許請求の範囲第１項記載の
固体撮像素子用微小変位装置。3. A microscopic device for a solid-state image pickup device according to claim 1, wherein the bending rigidity of the thin metal plates at both ends of the bonded piezoelectric vibrator, to which a moving table is attached, is increased. Displacement device.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62049296A JPH0671321B2 (en) | 1987-03-04 | 1987-03-04 | Micro displacement device for solid-state image sensor |
| EP87110218A EP0253375B1 (en) | 1986-07-15 | 1987-07-15 | Two-dimensional piezoelectric actuator |
| DE8787110218T DE3783960T2 (en) | 1986-07-15 | 1987-07-15 | TWO-DIMENSIONAL PIEZOELECTRIC DRIVE SYSTEM. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62049296A JPH0671321B2 (en) | 1987-03-04 | 1987-03-04 | Micro displacement device for solid-state image sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63215275A JPS63215275A (en) | 1988-09-07 |
| JPH0671321B2 true JPH0671321B2 (en) | 1994-09-07 |
Family
ID=12826957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62049296A Expired - Fee Related JPH0671321B2 (en) | 1986-07-15 | 1987-03-04 | Micro displacement device for solid-state image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0671321B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7214919B2 (en) * | 2005-02-08 | 2007-05-08 | Micron Technology, Inc. | Microelectronic imaging units and methods of manufacturing microelectronic imaging units |
| CN109099830B (en) * | 2018-08-18 | 2020-07-10 | 重庆巅慧科技有限公司 | Direct-push type two-dimensional rapid micro-displacement scanning positioning workbench |
-
1987
- 1987-03-04 JP JP62049296A patent/JPH0671321B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63215275A (en) | 1988-09-07 |
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| LAPS | Cancellation because of no payment of annual fees |