JPH0670145U - X-ray fluorescence device - Google Patents

Abstract

(57) [Summary] [Purpose] To cool the heat generated from X-ray tubes,
The structure is most efficient and prevents dust from being introduced into the equipment. A fan for introducing outside air is provided on a side surface of a cover that covers the entire X-ray apparatus, and a discharge port for discharging the introduced outside air is provided on an upper surface of the cover. A lid that opens and closes in conjunction with the fan is arranged at the outlet. [Effect] The outside air introduced by the fan is warmed by the X-ray tube or the like and discharged from the discharge port provided on the upper surface of the cover. This is because the convection causes the outside air to be discharged more efficiently, which improves the cooling efficiency. Since the lid is closed when the apparatus is not in operation, dust is not introduced into the cover from the outside air.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention is a fluorescent X-ray device for irradiating a sample with X-rays, detecting fluorescent X-rays generated from the sample, and measuring the components of the sample or measuring the film thickness of the film coated on the sample. Regarding

[0002]

[Prior art]

 In the conventional fluorescent X-ray apparatus, the fluorescent X-ray apparatus, particularly the X-ray tube that generates X-rays, generates a lot of heat. Therefore, the inside of the cover that covers the entire device must be air-cooled by forced ventilation for cooling.

A conventional air-cooling structure is shown in FIG. The main unit of the fluorescent X-ray device is housed in the cover 10. A fan 1 is provided on the back surface of the cover 10. The fan 1 introduces outside air into the cover 10. Exhaust ports 2 are provided on both side surfaces of the cover 10, and the outside air introduced into the cover 10 by the fan 1 cools the X-ray tube inside the cover 10. The flow 3 of outside air in the cover 10 is shown in FIG.

[0004]

[Problems to be solved by the device]

 However, regarding the cooling efficiency of the main device of the fluorescent X-ray device, it is clear that it is better to provide the discharge port 2 on the upper surface of the cover 10 than to provide the discharge port 2 on the side surface or the back surface of the cover 10 due to convection. .

However, when the exhaust port 2 is provided on the upper surface of the cover 10, dust in the outside air enters the cover 10. And the dust has a bad influence on the entire fluorescent X-ray apparatus. This means that even if filters are installed, geographic intrusion cannot be completely prevented, and at the same time, cooling efficiency will deteriorate.

Therefore, an object of the present invention is to improve the cooling efficiency of air cooling and prevent dust from entering the cover.

[0007]

[Means for Solving the Problems]

 In order to solve the above problems, the present invention provides a discharge port on the upper surface of a cover in a fluorescent X-ray device. Then cover the outlet with an openable lid. Furthermore, the opening and closing of the lid is linked with the operation of the fan that introduces the outside air to open and close. As another structure, an openable and closable lid placed on the top surface of the cover is made of a light material, and the lid is opened and closed by the pressure generated in the cover by a fan that introduces outside air.

[0008]

[Action]

 In the fluorescent X-ray apparatus configured as described above, when the entire apparatus is operated, the fan for introducing outside air operates. Then, the lid of the discharge port is opened in conjunction with the fan, and the outside air introduced for cooling by the fan is warmed and discharged from the discharge port. When the device is stopped, the fans also stop spinning and the lid closes. In other words, when the device is stopped, it is always closed at the discharge port provided on the top surface of the cover, so the dust will not enter through the discharge port.

In the fluorescent X-ray apparatus configured as described above, when the apparatus is operated, the fan for introducing the outside air operates. Due to the function of the fan, the air pressure inside the cover rises, and the lightweight outlet lid on the top of the cover is pushed up and the outlet opens. The outside air introduced by the fan for cooling is warmed and discharged from the outlet. When the device is stopped, the fan also stops rotating, and the lid closes due to its own weight. In other words, when the device is stopped, it is always closed at the discharge port provided on the top surface of the cover, so dust does not enter from the discharge port.

[0010]

Embodiment An embodiment of the present invention will be described below with reference to the drawings. 2 is a schematic perspective view of the present invention in FIG. 1. FIG. Inside the cover 10, an X-ray tube that generates X-rays, insulating oil that protects the X-ray tube from the high voltage supplied to the X-ray tube, and fluorescent X-rays that are generated by irradiating the sample with X-rays Although not shown, an X-ray detector for detecting is arranged.

A fan 1 for cooling the main unit of the X-ray apparatus inside the cover 10 is provided on the back surface of the cover 10. It should be noted that the fan 1 does not have to be on the back surface of the cover and can be arranged on the side surface. An exhaust port 2 is provided on the upper surface of the cover 10 for exhausting outside air that has cooled the entire apparatus. The discharge port 2 is provided with a lid 4 capable of opening and closing the discharge port 2. The lid 4 is structured to open and close in conjunction with the operation of the fan 1 (the lid 4 opens when the fan 1 is turned on, and the lid 4 closes when the fan 1 is turned off), or the lid is made of a light material. The structure is such that the lid 4 is opened by the increase in the pressure inside.

When the fluorescent X-ray device is operated, the fan 1 for introducing the outside air operates. In the structure of, the lid 4 is forcibly lifted and the discharge port 2 is opened. In this structure, the pressure inside the cover 10 rises due to the introduction of the outside air by the fan 1, and the lid 4 rises due to the pressure. And the discharge port 2 opens.

When the outlet 2 is opened, the state shown in FIG. 3 is reached, and the outside air flows as shown by the arrow 3 to cool the fluorescent X-ray device in the cover 10. When the operation of the entire device is stopped, the fan 1 stops, and in conjunction with that, the lid 4 lowers and the outlet 2 closes.

[0014]

[Effect of device]

 In the present invention, as described above, the gas outlet is provided on the upper surface of the cover, and the outlet is provided with the lid that can be opened and closed. The lid is linked to the fan, or the pressure inside the cover increases due to the fan, and the lid rises and the discharge port opens. For this reason, since the outlet is provided on the upper surface of the cover, the cooling efficiency of the entire apparatus is improved. When the device is not operating, dust is not introduced because the discharge port provided on the upper surface of the cover is closed.

It should be noted that when the device is in an operating state, the structure is such that the discharge port is open, but since cooling air for discharging the atmosphere flows there, dust is introduced into the cover. Absent.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a perspective view of a conventional device.

FIG. 3 is a perspective view showing a gas flow of the device of the present invention.

[Explanation of symbols]

 1 Fan 2 Exhaust port 3 Outside air flow 4 Lid

Claims (1)

[Scope of utility model registration request] 1. An X-ray tube for generating X-rays, an X-ray detector for irradiating a sample with the X-rays to detect fluorescent X-rays generated from the sample, and at least the X-ray tube. In a fluorescent X-ray apparatus including a sphere, a sample and an X-ray detector built-in cover, the cover has a fan for introducing outside air on its side surface, and a lid on its upper surface that opens and closes based on the operation of the fan. An X-ray fluorescence device, characterized in that